KR102319415B1 - 기판 캐리어 도어 어셈블리들, 기판 캐리어들, 및 자기 도어 시일을 포함하는 방법들 - Google Patents

기판 캐리어 도어 어셈블리들, 기판 캐리어들, 및 자기 도어 시일을 포함하는 방법들 Download PDF

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KR102319415B1
KR102319415B1 KR1020177036912A KR20177036912A KR102319415B1 KR 102319415 B1 KR102319415 B1 KR 102319415B1 KR 1020177036912 A KR1020177036912 A KR 1020177036912A KR 20177036912 A KR20177036912 A KR 20177036912A KR 102319415 B1 KR102319415 B1 KR 102319415B1
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South Korea
Prior art keywords
carrier
substrate carrier
port
magnetic field
door
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KR1020177036912A
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Korean (ko)
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KR20180010249A (ko
Inventor
존 제이. 마조꼬
니어 메리
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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    • H01L21/67373—
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C19/00—Other devices specially designed for securing wings, e.g. with suction cups
    • E05C19/16—Devices holding the wing by magnetic or electromagnetic attraction
    • E05C19/166—Devices holding the wing by magnetic or electromagnetic attraction electromagnetic
    • H01L21/67376—
    • H01L21/67393—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1916—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020177036912A 2015-05-22 2016-04-15 기판 캐리어 도어 어셈블리들, 기판 캐리어들, 및 자기 도어 시일을 포함하는 방법들 Active KR102319415B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562165555P 2015-05-22 2015-05-22
US62/165,555 2015-05-22
PCT/US2016/027801 WO2016190982A1 (en) 2015-05-22 2016-04-15 Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal

Publications (2)

Publication Number Publication Date
KR20180010249A KR20180010249A (ko) 2018-01-30
KR102319415B1 true KR102319415B1 (ko) 2021-10-28

Family

ID=57325191

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177036912A Active KR102319415B1 (ko) 2015-05-22 2016-04-15 기판 캐리어 도어 어셈블리들, 기판 캐리어들, 및 자기 도어 시일을 포함하는 방법들

Country Status (6)

Country Link
US (1) US10196845B2 (https=)
JP (1) JP2018515936A (https=)
KR (1) KR102319415B1 (https=)
CN (1) CN107636243A (https=)
TW (1) TWI697977B (https=)
WO (1) WO2016190982A1 (https=)

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KR20240061328A (ko) * 2022-10-31 2024-05-08 (주)신산이엔지 웨이퍼 카세트

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US9694910B2 (en) 2013-02-22 2017-07-04 World View Enterprises Inc. Near-space operation systems
US9540091B1 (en) 2016-02-11 2017-01-10 World View Enterprises Inc. High altitude balloon systems and methods
US10336432B1 (en) 2017-01-09 2019-07-02 World View Enterprises Inc. Lighter than air balloon systems and methods
US10124875B1 (en) 2017-01-09 2018-11-13 World View Enterprises Inc. Continuous multi-chamber super pressure balloon
DE202017100143U1 (de) * 2017-01-12 2017-02-06 Simonswerk Gmbh Türanordnung
TWI735570B (zh) * 2017-05-09 2021-08-11 日商樂華股份有限公司 噴嘴單元、及具備噴嘴單元的環境氣體置換裝置、與環境氣體置換方法
TWI779505B (zh) * 2020-05-14 2022-10-01 台灣積體電路製造股份有限公司 光罩盒及防止光罩污染之方法
US11703754B2 (en) * 2020-05-14 2023-07-18 Taiwan Semiconductor Manufacturing Company Ltd. Particle prevention method in reticle pod
US12009242B2 (en) * 2021-08-30 2024-06-11 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transport container
US12325504B2 (en) 2022-11-07 2025-06-10 World View Enterprises Inc. Magnetic ballast dispenser

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JP3347812B2 (ja) * 1992-05-19 2002-11-20 株式会社荏原製作所 真空容器並びに該真空容器を用いた真空処理方法
JP2003229476A (ja) * 2002-01-30 2003-08-15 Chi Mei Electronics Corp 摩擦を生じないドア部材を有する基板収納容器

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JPH03215960A (ja) * 1990-01-22 1991-09-20 Ebara Corp 容器開閉機構
US5398481A (en) * 1992-05-19 1995-03-21 Ebara Corporation Vacuum processing system
JPH0637176A (ja) * 1992-05-21 1994-02-10 Ebara Corp 保管箱の防塵装置及びその着脱機構
US6336567B1 (en) 1997-06-13 2002-01-08 Kakizaki Manufacturing Co., Ltd. Magnetic secured container closure with release by movement of magnetic member
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
US20070140822A1 (en) 2005-12-16 2007-06-21 Applied Materials, Inc. Methods and apparatus for opening and closing substrate carriers
CN101370616B (zh) 2006-01-11 2011-04-27 应用材料股份有限公司 一种基材载件、一种装载端口以及一种清洗基材载件的方法
US20070175792A1 (en) 2006-02-02 2007-08-02 Barry Gregerson Magnetic seal for wafer containers
KR20090053915A (ko) * 2006-08-18 2009-05-28 브룩스 오토메이션 인코퍼레이티드 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
KR101772600B1 (ko) * 2007-05-17 2017-08-29 브룩스 오토메이션 인코퍼레이티드 측면 개방형 기판 캐리어 및 로드 포트
US8424703B2 (en) * 2008-05-01 2013-04-23 Brooks Automation, Inc. Substrate container sealing via movable magnets
TWI365836B (en) * 2009-05-08 2012-06-11 Gudeng Prec Industral Co Ltd Wafer container with the magnetic latch
JP5516968B2 (ja) * 2010-06-08 2014-06-11 独立行政法人産業技術総合研究所 連結搬送システム
JP5881956B2 (ja) * 2011-02-28 2016-03-09 株式会社日立国際電気 基板処理装置、半導体装置の製造方法およびウェーハホルダ
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JP3347812B2 (ja) * 1992-05-19 2002-11-20 株式会社荏原製作所 真空容器並びに該真空容器を用いた真空処理方法
JP2003229476A (ja) * 2002-01-30 2003-08-15 Chi Mei Electronics Corp 摩擦を生じないドア部材を有する基板収納容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240061328A (ko) * 2022-10-31 2024-05-08 (주)신산이엔지 웨이퍼 카세트
KR102717220B1 (ko) 2022-10-31 2024-10-15 (주)신산이엔지 웨이퍼 카세트

Also Published As

Publication number Publication date
US20160340947A1 (en) 2016-11-24
KR20180010249A (ko) 2018-01-30
JP2018515936A (ja) 2018-06-14
WO2016190982A1 (en) 2016-12-01
US10196845B2 (en) 2019-02-05
CN107636243A (zh) 2018-01-26
TW201703176A (zh) 2017-01-16
TWI697977B (zh) 2020-07-01

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