KR102294254B1 - 데이터 처리 방법, 데이터 처리 장치 및 데이터 처리 프로그램 - Google Patents

데이터 처리 방법, 데이터 처리 장치 및 데이터 처리 프로그램 Download PDF

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KR102294254B1
KR102294254B1 KR1020190006844A KR20190006844A KR102294254B1 KR 102294254 B1 KR102294254 B1 KR 102294254B1 KR 1020190006844 A KR1020190006844 A KR 1020190006844A KR 20190006844 A KR20190006844 A KR 20190006844A KR 102294254 B1 KR102294254 B1 KR 102294254B1
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히데지 나오하라
마유미 야마모토
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가부시키가이샤 스크린 홀딩스
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00—Subject matter not provided for in other groups of this subclass
    • G01M99/005—Testing of complete machines, e.g. washing-machines or mobile phones
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/021—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system adopting a different treatment of each operating region or a different mode of the monitored system, e.g. transient modes; different operating configurations of monitored system
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/006—Identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/22—Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G06F11/26—Functional testing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G06F17/18—Complex mathematical operations for evaluating statistical data, e.g. average values, frequency distributions, probability functions, regression analysis
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • G07C3/005—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles during manufacturing process
    • H01L21/67276—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput

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  • Automation & Control Theory (AREA)
  • Data Mining & Analysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
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  • Databases & Information Systems (AREA)
  • Bioinformatics & Computational Biology (AREA)
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  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Computer Hardware Design (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020190006844A 2018-02-08 2019-01-18 데이터 처리 방법, 데이터 처리 장치 및 데이터 처리 프로그램 Active KR102294254B1 (ko)

Applications Claiming Priority (2)

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JPJP-P-2018-020796 2018-02-08
JP2018020796A JP7090430B2 (ja) 2018-02-08 2018-02-08 データ処理方法、データ処理装置、および、データ処理プログラム

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KR20190096271A KR20190096271A (ko) 2019-08-19
KR102294254B1 true KR102294254B1 (ko) 2021-08-26

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US (1) US11099105B2 (https=)
JP (1) JP7090430B2 (https=)
KR (1) KR102294254B1 (https=)
CN (1) CN110134536B (https=)
TW (1) TWI770348B (https=)

Families Citing this family (6)

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Publication number Priority date Publication date Assignee Title
JP7460381B2 (ja) * 2020-01-30 2024-04-02 株式会社Ｓｃｒｅｅｎホールディングス データ処理方法、データ処理装置およびプログラム
JP7366775B2 (ja) * 2020-01-30 2023-10-23 株式会社Ｓｃｒｅｅｎホールディングス データ処理方法、データ処理装置およびプログラム
KR102455758B1 (ko) 2020-01-30 2022-10-17 가부시키가이샤 스크린 홀딩스 데이터 처리 방법, 데이터 처리 장치 및 기억 매체
JP2021152762A (ja) 2020-03-24 2021-09-30 株式会社Ｓｃｒｅｅｎホールディングス 学習済みモデル生成方法、学習済みモデル、異常要因推定装置、基板処理装置、異常要因推定方法、学習方法、学習装置、及び、学習データ作成方法
KR20230035051A (ko) * 2020-07-02 2023-03-10 도쿄엘렉트론가부시키가이샤 정보 처리 방법 및 정보 처리 장치
KR102864346B1 (ko) * 2022-02-24 2025-09-24 주식회사 히타치하이테크 진단 장치 및 진단 방법 및 반도체 제조 장치 시스템 및 반도체 장치 제조 시스템

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004186445A (ja) * 2002-12-03 2004-07-02 Omron Corp モデル化装置及びモデル解析方法並びにプロセス異常検出・分類システム及びプロセス異常検出・分類方法並びにモデル化システム及びモデル化方法並びに故障予知システム及びモデル化装置の更新方法
JP6076571B1 (ja) * 2015-08-06 2017-02-08 新日鉄住金ソリューションズ株式会社 情報処理装置、情報処理システム、情報処理方法及びプログラム

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10232714A (ja) * 1997-02-18 1998-09-02 Kokusai Electric Co Ltd 流量制御装置の診断装置
JP2000269108A (ja) * 1999-03-15 2000-09-29 Sharp Corp 半導体製造装置の管理システム
JP2002278800A (ja) * 2001-03-21 2002-09-27 Oki Electric Ind Co Ltd 監視装置およびその方法
EP1480227A1 (en) 2003-05-22 2004-11-24 Koninklijke Philips Electronics N.V. Testing integrated circuits with fault dictionary
JP2005259930A (ja) * 2004-03-11 2005-09-22 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP5401070B2 (ja) * 2008-10-08 2014-01-29 株式会社アルバック 処理装置の管理システム
JP5402183B2 (ja) * 2009-04-10 2014-01-29 オムロン株式会社 監視装置、監視装置の制御方法、および制御プログラム
JP5593121B2 (ja) * 2010-05-10 2014-09-17 シャープ株式会社 工程管理装置および工程管理方法、制御プログラム、可読記録媒体
JP5796994B2 (ja) * 2010-06-08 2015-10-21 株式会社日立国際電気 処理システム、基板処理装置、処理システムのデータ処理方法、収集ユニット及び記録媒体並びに半導体装置の製造方法
JP5414703B2 (ja) * 2011-01-20 2014-02-12 東京エレクトロン株式会社 処理装置の異常診断方法及びその異常診断システム
JP6163811B2 (ja) * 2013-03-25 2017-07-19 日本電気株式会社 時系列データ処理装置、時系列データ処理方法、及び時系列データ処理プログラム
JP6450650B2 (ja) * 2015-06-16 2019-01-09 東京エレクトロン株式会社 処理装置、処理方法および記憶媒体
JP6532845B2 (ja) * 2016-07-26 2019-06-19 双葉電子工業株式会社 計測装置、計測方法、プログラム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004186445A (ja) * 2002-12-03 2004-07-02 Omron Corp モデル化装置及びモデル解析方法並びにプロセス異常検出・分類システム及びプロセス異常検出・分類方法並びにモデル化システム及びモデル化方法並びに故障予知システム及びモデル化装置の更新方法
JP6076571B1 (ja) * 2015-08-06 2017-02-08 新日鉄住金ソリューションズ株式会社 情報処理装置、情報処理システム、情報処理方法及びプログラム

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TWI770348B (zh) 2022-07-11
US20190242789A1 (en) 2019-08-08
CN110134536B (zh) 2023-07-18
TW201939316A (zh) 2019-10-01
JP2019140193A (ja) 2019-08-22
US11099105B2 (en) 2021-08-24
KR20190096271A (ko) 2019-08-19
JP7090430B2 (ja) 2022-06-24
CN110134536A (zh) 2019-08-16

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