KR102258268B1 - 렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 - Google Patents
렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 Download PDFInfo
- Publication number
- KR102258268B1 KR102258268B1 KR1020167006947A KR20167006947A KR102258268B1 KR 102258268 B1 KR102258268 B1 KR 102258268B1 KR 1020167006947 A KR1020167006947 A KR 1020167006947A KR 20167006947 A KR20167006947 A KR 20167006947A KR 102258268 B1 KR102258268 B1 KR 102258268B1
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- KR
- South Korea
- Prior art keywords
- radius
- curvature
- pixel
- lens
- microlens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0018—Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane
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- H01L27/146—
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- H01L27/14621—
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- H01L27/14623—
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- H01L27/14627—
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- H01L27/14685—
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/703—SSIS architectures incorporating pixels for producing signals other than image signals
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/703—SSIS architectures incorporating pixels for producing signals other than image signals
- H04N25/704—Pixels specially adapted for focusing, e.g. phase difference pixel sets
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/182—Colour image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/32—Means for focusing
- G03B13/34—Power focusing
- G03B13/36—Autofocus systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Inorganic Chemistry (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020217015183A KR20210062722A (ko) | 2013-09-25 | 2014-09-12 | 렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013197861A JP2015065268A (ja) | 2013-09-25 | 2013-09-25 | レンズアレイおよびその製造方法、固体撮像装置、並びに電子機器 |
| JPJP-P-2013-197861 | 2013-09-25 | ||
| PCT/JP2014/074244 WO2015045914A1 (ja) | 2013-09-25 | 2014-09-12 | レンズアレイおよびその製造方法、固体撮像装置、並びに電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217015183A Division KR20210062722A (ko) | 2013-09-25 | 2014-09-12 | 렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160061999A KR20160061999A (ko) | 2016-06-01 |
| KR102258268B1 true KR102258268B1 (ko) | 2021-06-01 |
Family
ID=52743056
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020167006947A Expired - Fee Related KR102258268B1 (ko) | 2013-09-25 | 2014-09-12 | 렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 |
| KR1020217015183A Ceased KR20210062722A (ko) | 2013-09-25 | 2014-09-12 | 렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217015183A Ceased KR20210062722A (ko) | 2013-09-25 | 2014-09-12 | 렌즈 어레이 및 그 제조 방법, 고체 촬상 장치, 및 전자 기기 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10088608B2 (https=) |
| JP (1) | JP2015065268A (https=) |
| KR (2) | KR102258268B1 (https=) |
| CN (1) | CN105556672B (https=) |
| TW (1) | TWI651563B (https=) |
| WO (1) | WO2015045914A1 (https=) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015012059A (ja) * | 2013-06-27 | 2015-01-19 | ソニー株式会社 | 固体撮像素子及びその製造方法、並びに撮像装置 |
| JP2015076475A (ja) * | 2013-10-08 | 2015-04-20 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
| JP2016058451A (ja) * | 2014-09-05 | 2016-04-21 | キヤノン株式会社 | センサおよびカメラ |
| CN105140250A (zh) * | 2015-06-30 | 2015-12-09 | 京东方科技集团股份有限公司 | 光电转换阵列基板及其制作方法、光电转换装置 |
| JP6600246B2 (ja) * | 2015-12-17 | 2019-10-30 | キヤノン株式会社 | 撮像装置及びカメラ |
| JP6656720B2 (ja) * | 2016-01-07 | 2020-03-04 | 株式会社ジャパンディスプレイ | 電極の作製方法、および電極を備える表示装置の作製方法 |
| CN106324727B (zh) * | 2016-11-03 | 2017-12-12 | 山东师范大学 | 自聚焦微透镜阵列的制作系统及制作方法 |
| CN110199572B (zh) * | 2017-01-20 | 2024-01-26 | 索尼半导体解决方案公司 | 显示装置、电子设备及制造显示装置的方法 |
| CN107040724B (zh) | 2017-04-28 | 2020-05-15 | Oppo广东移动通信有限公司 | 双核对焦图像传感器及其对焦控制方法和成像装置 |
| WO2019220861A1 (ja) * | 2018-05-16 | 2019-11-21 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子および固体撮像素子の製造方法 |
| US10880467B2 (en) * | 2018-06-25 | 2020-12-29 | Omnivision Technologies, Inc. | Image sensors with phase detection auto-focus pixels |
| US10608039B1 (en) * | 2018-10-02 | 2020-03-31 | Foveon, Inc. | Imaging arrays having focal plane phase detecting pixel sensors |
| JP7544602B2 (ja) * | 2018-12-27 | 2024-09-03 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子 |
| EP3958022A4 (en) | 2019-04-15 | 2022-12-21 | Canon Kabushiki Kaisha | IMAGE CAPTURE ELEMENT AND IMAGE CAPTURE DEVICE |
| JP7561514B2 (ja) * | 2019-04-15 | 2024-10-04 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| TWI902704B (zh) * | 2019-08-30 | 2025-11-01 | 日商凸版印刷股份有限公司 | 光電轉換元件、攝像元件及攝像系統 |
| KR20220036630A (ko) * | 2020-09-16 | 2022-03-23 | 삼성전자주식회사 | 컬러 보정을 위한 영상 처리 장치, 영상 처리 방법 및 이를 포함하는 영상 처리 시스템 |
| KR20220043556A (ko) | 2020-09-29 | 2022-04-05 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 |
| US11569291B2 (en) * | 2020-11-05 | 2023-01-31 | Visera Technologies Company Limited | Image sensor and method forming the same |
| WO2022168523A1 (ja) * | 2021-02-02 | 2022-08-11 | 株式会社ジャパンディスプレイ | 検出装置及び検出装置の製造方法 |
| KR20220152484A (ko) * | 2021-05-07 | 2022-11-16 | 삼성전자주식회사 | 이미지 센서 |
| JP7786062B2 (ja) * | 2021-07-21 | 2025-12-16 | Toppanホールディングス株式会社 | 固体撮像素子 |
| KR20230056858A (ko) | 2021-10-20 | 2023-04-28 | 삼성전자주식회사 | 이미지 센서 |
| JP2023100350A (ja) * | 2022-01-06 | 2023-07-19 | ソニーセミコンダクタソリューションズ株式会社 | 光検出装置及び電子機器 |
| FR3135330B1 (fr) * | 2022-05-05 | 2025-11-07 | St Microelectronics Crolles 2 Sas | Procédé de fabrication de microlentilles |
| WO2025249190A1 (ja) * | 2024-05-27 | 2025-12-04 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子および電子機器 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000206310A (ja) | 1999-01-19 | 2000-07-28 | Matsushita Electric Ind Co Ltd | レンズアレイ |
| JP2004021209A (ja) | 2002-06-20 | 2004-01-22 | Seiko Epson Corp | マイクロレンズアレイ、液晶パネル、投射型表示装置及びマイクロレンズアレイの製造方法 |
| JP2004037873A (ja) | 2002-07-03 | 2004-02-05 | Seiko Epson Corp | マイクロレンズアレイ、マイクロレンズ基板及びその製造方法、電気光学装置並びに電子機器 |
| JP2007101661A (ja) * | 2005-09-30 | 2007-04-19 | Fujifilm Corp | マイクロレンズアレイおよびマイクロレンズアレイの製造方法 |
| JP2008052004A (ja) * | 2006-08-24 | 2008-03-06 | Sony Corp | レンズアレイ及び固体撮像素子の製造方法 |
| JP2009109965A (ja) * | 2007-10-11 | 2009-05-21 | Nikon Corp | 固体撮像素子および撮像装置 |
| JP2010129783A (ja) * | 2008-11-27 | 2010-06-10 | Nikon Corp | 撮像素子および撮像装置 |
| JP2013021168A (ja) | 2011-07-12 | 2013-01-31 | Sony Corp | 固体撮像装置、固体撮像装置の製造方法、電子機器 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003258224A (ja) * | 2002-03-06 | 2003-09-12 | Toppan Printing Co Ltd | 固体撮像素子及びその製造方法 |
| TWI278991B (en) * | 2002-07-09 | 2007-04-11 | Toppan Printing Co Ltd | Solid image-pickup device and method of manufacturing the same |
| JP4761740B2 (ja) * | 2004-08-31 | 2011-08-31 | 東京エレクトロン株式会社 | マイクロレンズの形成方法 |
| JP4285373B2 (ja) * | 2004-09-01 | 2009-06-24 | セイコーエプソン株式会社 | マイクロレンズの製造方法、マイクロレンズ及びマイクロレンズアレイ、並びに電気光学装置及び電子機器 |
| TW200628921A (en) * | 2004-09-17 | 2006-08-16 | Hitachi Maxell | Microlens array, method of fabricating microlens array, and liquid crystal display apparatus with microlens array |
| JP2007208817A (ja) * | 2006-02-03 | 2007-08-16 | Toshiba Corp | 固体撮像装置 |
| JP4826362B2 (ja) * | 2006-06-28 | 2011-11-30 | 東京エレクトロン株式会社 | マイクロレンズの形成方法 |
| US7978255B2 (en) * | 2007-10-11 | 2011-07-12 | Nikon Corporation | Solid-state image sensor and image-capturing device |
| JP2010181485A (ja) * | 2009-02-03 | 2010-08-19 | Nikon Corp | 撮像装置および撮像素子 |
| JP2011013411A (ja) * | 2009-07-01 | 2011-01-20 | Toppan Printing Co Ltd | マイクロレンズアレイの製造方法及びフォトマスク |
| US8659839B2 (en) * | 2010-02-26 | 2014-02-25 | Konica Minolta Advanced Layers, Inc. | Imaging lens and imaging device |
| JP2012134261A (ja) | 2010-12-20 | 2012-07-12 | Sharp Corp | レンズおよびその製造方法、固体撮像素子およびその製造方法、電子情報機器 |
| JP2013077740A (ja) * | 2011-09-30 | 2013-04-25 | Sony Corp | 固体撮像素子、固体撮像素子の製造方法、及び、電子機器 |
-
2013
- 2013-09-25 JP JP2013197861A patent/JP2015065268A/ja active Pending
-
2014
- 2014-09-09 TW TW103131030A patent/TWI651563B/zh not_active IP Right Cessation
- 2014-09-12 KR KR1020167006947A patent/KR102258268B1/ko not_active Expired - Fee Related
- 2014-09-12 WO PCT/JP2014/074244 patent/WO2015045914A1/ja not_active Ceased
- 2014-09-12 KR KR1020217015183A patent/KR20210062722A/ko not_active Ceased
- 2014-09-12 CN CN201480051607.0A patent/CN105556672B/zh not_active Expired - Fee Related
- 2014-09-12 US US15/021,764 patent/US10088608B2/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000206310A (ja) | 1999-01-19 | 2000-07-28 | Matsushita Electric Ind Co Ltd | レンズアレイ |
| JP2004021209A (ja) | 2002-06-20 | 2004-01-22 | Seiko Epson Corp | マイクロレンズアレイ、液晶パネル、投射型表示装置及びマイクロレンズアレイの製造方法 |
| JP2004037873A (ja) | 2002-07-03 | 2004-02-05 | Seiko Epson Corp | マイクロレンズアレイ、マイクロレンズ基板及びその製造方法、電気光学装置並びに電子機器 |
| JP2007101661A (ja) * | 2005-09-30 | 2007-04-19 | Fujifilm Corp | マイクロレンズアレイおよびマイクロレンズアレイの製造方法 |
| JP2008052004A (ja) * | 2006-08-24 | 2008-03-06 | Sony Corp | レンズアレイ及び固体撮像素子の製造方法 |
| JP2009109965A (ja) * | 2007-10-11 | 2009-05-21 | Nikon Corp | 固体撮像素子および撮像装置 |
| JP2010129783A (ja) * | 2008-11-27 | 2010-06-10 | Nikon Corp | 撮像素子および撮像装置 |
| JP2013021168A (ja) | 2011-07-12 | 2013-01-31 | Sony Corp | 固体撮像装置、固体撮像装置の製造方法、電子機器 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160061999A (ko) | 2016-06-01 |
| TWI651563B (zh) | 2019-02-21 |
| CN105556672B (zh) | 2019-11-12 |
| CN105556672A (zh) | 2016-05-04 |
| TW201512732A (zh) | 2015-04-01 |
| KR20210062722A (ko) | 2021-05-31 |
| JP2015065268A (ja) | 2015-04-09 |
| US10088608B2 (en) | 2018-10-02 |
| US20160231468A1 (en) | 2016-08-11 |
| WO2015045914A1 (ja) | 2015-04-02 |
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