KR102235562B1 - 펌핑 시스템에서의 펌핑 방법 및 진공 펌프 시스템 - Google Patents

펌핑 시스템에서의 펌핑 방법 및 진공 펌프 시스템 Download PDF

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Publication number
KR102235562B1
KR102235562B1 KR1020167030629A KR20167030629A KR102235562B1 KR 102235562 B1 KR102235562 B1 KR 102235562B1 KR 1020167030629 A KR1020167030629 A KR 1020167030629A KR 20167030629 A KR20167030629 A KR 20167030629A KR 102235562 B1 KR102235562 B1 KR 102235562B1
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KR
South Korea
Prior art keywords
ejector
vacuum pump
pumping
rotary vane
check valve
Prior art date
Application number
KR1020167030629A
Other languages
English (en)
Korean (ko)
Other versions
KR20170005410A (ko
Inventor
디디에 뮬러
장-에릭 라흐쉬
테오도르 일쉐브
Original Assignee
아뜰리에 부쉬 에스.아.
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Application filed by 아뜰리에 부쉬 에스.아. filed Critical 아뜰리에 부쉬 에스.아.
Publication of KR20170005410A publication Critical patent/KR20170005410A/ko
Application granted granted Critical
Publication of KR102235562B1 publication Critical patent/KR102235562B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
KR1020167030629A 2014-05-01 2014-05-01 펌핑 시스템에서의 펌핑 방법 및 진공 펌프 시스템 KR102235562B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/058948 WO2015165544A1 (fr) 2014-05-01 2014-05-01 Méthode de pompage dans un système de pompage et système de pompes à vide

Publications (2)

Publication Number Publication Date
KR20170005410A KR20170005410A (ko) 2017-01-13
KR102235562B1 true KR102235562B1 (ko) 2021-04-05

Family

ID=50639522

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167030629A KR102235562B1 (ko) 2014-05-01 2014-05-01 펌핑 시스템에서의 펌핑 방법 및 진공 펌프 시스템

Country Status (15)

Country Link
US (1) US20170045051A1 (fr)
EP (1) EP3137771B1 (fr)
JP (1) JP6410836B2 (fr)
KR (1) KR102235562B1 (fr)
CN (1) CN106255828A (fr)
AU (1) AU2014392229B2 (fr)
BR (1) BR112016024380B1 (fr)
CA (1) CA2944825C (fr)
DK (1) DK3137771T3 (fr)
ES (1) ES2797400T3 (fr)
PL (1) PL3137771T3 (fr)
PT (1) PT3137771T (fr)
RU (1) RU2666379C2 (fr)
TW (1) TWI698585B (fr)
WO (1) WO2015165544A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106232992A (zh) * 2014-03-24 2016-12-14 阿特利耶博世股份有限公司 真空泵系统中的泵送方法和真空泵系统
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
CN113621936A (zh) * 2021-10-12 2021-11-09 陛通半导体设备(苏州)有限公司 一种真空镀膜中真空泵系统的工作方法及真空泵系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030068233A1 (en) * 2001-10-09 2003-04-10 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US20050232783A1 (en) * 2002-05-03 2005-10-20 Peter Tell Vacuum pump and method for generating sub-pressure
JP2007100562A (ja) * 2005-10-03 2007-04-19 Shinko Seiki Co Ltd 真空装置
WO2014012896A2 (fr) * 2012-07-19 2014-01-23 Adixen Vacuum Products Procede et dispositif de pompage d'une chambre de procedes

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JPS52128885A (en) * 1976-04-22 1977-10-28 Fujitsu Ltd Treatment in gas phase
US4426450A (en) * 1981-08-24 1984-01-17 Fermentec Corporation Fermentation process and apparatus
DE3721611A1 (de) * 1987-06-30 1989-01-19 Alcatel Hochvakuumtechnik Gmbh Mechanische vakuumpumpe mit einer federbelasteten rueckschlagklappe
SU1700283A1 (ru) * 1989-05-05 1991-12-23 Предприятие П/Я А-3634 Вакуумный насос
JPH08178438A (ja) * 1994-12-21 1996-07-12 Yanmar Diesel Engine Co Ltd エンジンヒートポンプ
US5848538A (en) * 1997-11-06 1998-12-15 American Standard Inc. Oil and refrigerant pump for centrifugal chiller
WO2003023229A1 (fr) * 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide
US7254961B2 (en) * 2004-02-18 2007-08-14 Denso Corporation Vapor compression cycle having ejector
US7655140B2 (en) * 2004-10-26 2010-02-02 Cummins Filtration Ip Inc. Automatic water drain for suction fuel water separators
US8807158B2 (en) * 2005-01-20 2014-08-19 Hydra-Flex, Inc. Eductor assembly with dual-material eductor body
DE102005008887A1 (de) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
DE102008019472A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP5389419B2 (ja) * 2008-11-14 2014-01-15 株式会社テイエルブイ 真空ポンプ装置
GB2465374A (en) * 2008-11-14 2010-05-19 Mann & Hummel Gmbh Centrifugal separator with venturi
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US20120261011A1 (en) * 2011-04-14 2012-10-18 Young Man Cho Energy reduction module using a depressurizing vacuum apparatus for vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030068233A1 (en) * 2001-10-09 2003-04-10 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US20050232783A1 (en) * 2002-05-03 2005-10-20 Peter Tell Vacuum pump and method for generating sub-pressure
JP2007100562A (ja) * 2005-10-03 2007-04-19 Shinko Seiki Co Ltd 真空装置
WO2014012896A2 (fr) * 2012-07-19 2014-01-23 Adixen Vacuum Products Procede et dispositif de pompage d'une chambre de procedes

Also Published As

Publication number Publication date
BR112016024380A2 (pt) 2017-08-15
PT3137771T (pt) 2020-05-29
JP6410836B2 (ja) 2018-10-24
AU2014392229B2 (en) 2018-11-22
CN106255828A (zh) 2016-12-21
TWI698585B (zh) 2020-07-11
CA2944825C (fr) 2021-04-27
US20170045051A1 (en) 2017-02-16
RU2016142607A3 (fr) 2018-06-01
TW201608134A (zh) 2016-03-01
CA2944825A1 (fr) 2015-11-05
PL3137771T3 (pl) 2020-10-05
ES2797400T3 (es) 2020-12-02
KR20170005410A (ko) 2017-01-13
WO2015165544A1 (fr) 2015-11-05
DK3137771T3 (da) 2020-06-08
RU2016142607A (ru) 2018-06-01
EP3137771B1 (fr) 2020-05-06
EP3137771A1 (fr) 2017-03-08
JP2017515031A (ja) 2017-06-08
RU2666379C2 (ru) 2018-09-07
BR112016024380B1 (pt) 2022-06-28
AU2014392229A1 (en) 2016-11-03

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