BR112016024380A2 - método e sistema de bombeamento - Google Patents

método e sistema de bombeamento

Info

Publication number
BR112016024380A2
BR112016024380A2 BR112016024380A BR112016024380A BR112016024380A2 BR 112016024380 A2 BR112016024380 A2 BR 112016024380A2 BR 112016024380 A BR112016024380 A BR 112016024380A BR 112016024380 A BR112016024380 A BR 112016024380A BR 112016024380 A2 BR112016024380 A2 BR 112016024380A2
Authority
BR
Brazil
Prior art keywords
gas outlet
rotary vane
vacuum pump
spp
lubricated rotary
Prior art date
Application number
BR112016024380A
Other languages
English (en)
Other versions
BR112016024380B1 (pt
Inventor
Müller Didier
Larcher Jean-Eric
Iltchev Théodore
Original Assignee
Ateliers Busch S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ateliers Busch S A filed Critical Ateliers Busch S A
Publication of BR112016024380A2 publication Critical patent/BR112016024380A2/pt
Publication of BR112016024380B1 publication Critical patent/BR112016024380B1/pt

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

a presente invenção refere-se a um método de bombeamento (sp, spp) compreendendo: uma bomba a vácuo de palheta rotativa lubrificada primária (3) com uma abertura de entrada de gás (2) conectada a uma câmara a vácuo (1) e uma abertura de saída de gás (2) que leva para um conduto (5) antes de seguir para a saída de gás (4) do sistema de bombeamento (sp, spp), uma válvula de não retorno (6) posicionada no conduto (5) entre a abertura de saída de gás (4) e a saída de gás (8), e um ejetor (7) conectado em paralelo com a válvula de não retorno (6). de acordo com este método, a bomba a vácuo de palheta rotativa lubrificada primária (3) é colocada em ação para bombear os gases contidos na câmara a vácuo (1) através da abertura de saída de gás (4). simultaneamente, o ejetor (7) alimentado de fluido de trabalho e o ejetor (7) contínua sendo alimentado com fluido de trabalho durante todo o tempo em que a bomba a vácuo de palheta rotativa lubrificada primária (3) bombeia os gases contidos na câmara a vácuo (1) e/ou durante todo o tempo em que a bomba a vácuo à palheta rotativa lubrificada primária (3) mantém uma certa pressão na câmara a vácuo (1). a presente invenção também relaciona-se a um sistema de bombeamento (sp, spp) capaz de ser usado para implementar este método.
BR112016024380-3A 2014-05-01 2014-05-01 Método de bombeamento em um sistema de bombeamento e sistema de bombeamento BR112016024380B1 (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/058948 WO2015165544A1 (fr) 2014-05-01 2014-05-01 Méthode de pompage dans un système de pompage et système de pompes à vide

Publications (2)

Publication Number Publication Date
BR112016024380A2 true BR112016024380A2 (pt) 2017-08-15
BR112016024380B1 BR112016024380B1 (pt) 2022-06-28

Family

ID=50639522

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112016024380-3A BR112016024380B1 (pt) 2014-05-01 2014-05-01 Método de bombeamento em um sistema de bombeamento e sistema de bombeamento

Country Status (15)

Country Link
US (1) US20170045051A1 (pt)
EP (1) EP3137771B1 (pt)
JP (1) JP6410836B2 (pt)
KR (1) KR102235562B1 (pt)
CN (1) CN106255828A (pt)
AU (1) AU2014392229B2 (pt)
BR (1) BR112016024380B1 (pt)
CA (1) CA2944825C (pt)
DK (1) DK3137771T3 (pt)
ES (1) ES2797400T3 (pt)
PL (1) PL3137771T3 (pt)
PT (1) PT3137771T (pt)
RU (1) RU2666379C2 (pt)
TW (1) TWI698585B (pt)
WO (1) WO2015165544A1 (pt)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2752762T3 (es) * 2014-03-24 2020-04-06 Ateliers Busch S A Procedimiento de bombeo en un sistema de bombas de vacío y sistema de bombas de vacío
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
CN113621936A (zh) * 2021-10-12 2021-11-09 陛通半导体设备(苏州)有限公司 一种真空镀膜中真空泵系统的工作方法及真空泵系统

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JPH08178438A (ja) * 1994-12-21 1996-07-12 Yanmar Diesel Engine Co Ltd エンジンヒートポンプ
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KR100876318B1 (ko) * 2001-09-06 2008-12-31 가부시키가이샤 아루박 진공배기장치 및 진공배기장치의 운전방법
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
SE0201335L (sv) * 2002-05-03 2003-03-25 Piab Ab Vakuumpump och sätt att tillhandahålla undertryck
US7254961B2 (en) * 2004-02-18 2007-08-14 Denso Corporation Vapor compression cycle having ejector
US7655140B2 (en) * 2004-10-26 2010-02-02 Cummins Filtration Ip Inc. Automatic water drain for suction fuel water separators
US8807158B2 (en) * 2005-01-20 2014-08-19 Hydra-Flex, Inc. Eductor assembly with dual-material eductor body
DE102005008887A1 (de) * 2005-02-26 2006-08-31 Leybold Vacuum Gmbh Einwellige Vakuum-Verdränderpumpe
JP4745779B2 (ja) * 2005-10-03 2011-08-10 神港精機株式会社 真空装置
DE102008019472A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP5389419B2 (ja) * 2008-11-14 2014-01-15 株式会社テイエルブイ 真空ポンプ装置
GB2465374A (en) * 2008-11-14 2010-05-19 Mann & Hummel Gmbh Centrifugal separator with venturi
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
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FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes

Also Published As

Publication number Publication date
RU2016142607A3 (pt) 2018-06-01
TW201608134A (zh) 2016-03-01
CA2944825A1 (fr) 2015-11-05
ES2797400T3 (es) 2020-12-02
DK3137771T3 (da) 2020-06-08
TWI698585B (zh) 2020-07-11
JP2017515031A (ja) 2017-06-08
AU2014392229A1 (en) 2016-11-03
PL3137771T3 (pl) 2020-10-05
RU2666379C2 (ru) 2018-09-07
AU2014392229B2 (en) 2018-11-22
RU2016142607A (ru) 2018-06-01
EP3137771A1 (fr) 2017-03-08
CN106255828A (zh) 2016-12-21
WO2015165544A1 (fr) 2015-11-05
BR112016024380B1 (pt) 2022-06-28
JP6410836B2 (ja) 2018-10-24
CA2944825C (fr) 2021-04-27
KR102235562B1 (ko) 2021-04-05
US20170045051A1 (en) 2017-02-16
EP3137771B1 (fr) 2020-05-06
PT3137771T (pt) 2020-05-29
KR20170005410A (ko) 2017-01-13

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Legal Events

Date Code Title Description
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B350 Update of information on the portal [chapter 15.35 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 01/05/2014, OBSERVADAS AS CONDICOES LEGAIS