KR102176561B1 - 기판들의 두께 제어 - Google Patents

기판들의 두께 제어 Download PDF

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Publication number
KR102176561B1
KR102176561B1 KR1020197023987A KR20197023987A KR102176561B1 KR 102176561 B1 KR102176561 B1 KR 102176561B1 KR 1020197023987 A KR1020197023987 A KR 1020197023987A KR 20197023987 A KR20197023987 A KR 20197023987A KR 102176561 B1 KR102176561 B1 KR 102176561B1
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South Korea
Prior art keywords
laser beam
preselected
substrate
glass
glass substrate
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Korean (ko)
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KR20190099098A (ko
Inventor
필립 로버트 르블랑
코레이 로버트 유스타니크
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코닝 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00—Shaping glass in contact with the surface of a liquid
    • C03B18/02—Forming sheets
    • C03B18/04—Changing or regulating the dimensions of the molten glass ribbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/02—Re-forming glass sheets
    • C03B23/037—Re-forming glass sheets by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
KR1020197023987A 2012-11-06 2013-10-31 기판들의 두께 제어 Active KR102176561B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/669,994 2012-11-06
US13/669,994 US8904822B2 (en) 2012-11-06 2012-11-06 Thickness control of substrates
PCT/US2013/067714 WO2014074384A1 (en) 2012-11-06 2013-10-31 Thickness control of substrates

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020157014445A Division KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Publications (2)

Publication Number Publication Date
KR20190099098A KR20190099098A (ko) 2019-08-23
KR102176561B1 true KR102176561B1 (ko) 2020-11-10

Family

ID=50621108

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020197023987A Active KR102176561B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어
KR1020157014445A Active KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020157014445A Active KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Country Status (6)

Country Link
US (1) US8904822B2 (cg-RX-API-DMAC7.html)
JP (1) JP6158342B2 (cg-RX-API-DMAC7.html)
KR (2) KR102176561B1 (cg-RX-API-DMAC7.html)
CN (1) CN104768883B (cg-RX-API-DMAC7.html)
TW (1) TWI588305B (cg-RX-API-DMAC7.html)
WO (1) WO2014074384A1 (cg-RX-API-DMAC7.html)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290403B2 (en) 2013-02-25 2016-03-22 Corning Incorporated Repositionable heater assemblies for glass production lines and methods of managing temperature of glass in production lines
US9556051B2 (en) * 2014-09-22 2017-01-31 Corning Incorporated Methods for controlling the thickness wedge in a glass ribbon
DE102014119064A1 (de) 2014-12-18 2016-06-23 Schott Ag Glasfilm mit speziell ausgebildeter Kante, Verfahren zu dessen Herstellung sowie dessen Verwendung
JP6498933B2 (ja) * 2014-12-29 2019-04-10 ＡｖａｎＳｔｒａｔｅ株式会社 ディスプレイ用ガラス基板の製造方法および製造装置
JP2018529615A (ja) * 2015-09-24 2018-10-11 コーニング インコーポレイテッド ガラスの製造方法及び装置
JP2017119617A (ja) * 2015-12-28 2017-07-06 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法、及び、ガラス基板の製造装置
DE102017101808B4 (de) * 2016-02-04 2024-12-24 Schott Ag Verfahren zur Dickenkontrolle eines Substrates
DE102018111543B4 (de) 2017-05-22 2026-07-02 Schott Ag Verfahren und Vorrichtung zur Dickenkontrolle eines Materialbands
TW201912597A (zh) * 2017-08-24 2019-04-01 美商康寧公司 用於選擇性地改變玻璃基製品的虛擬溫度之方法及設備
US12151962B2 (en) 2018-03-06 2024-11-26 Corning Incorporated Apparatus and method for controlling substrate thickness
WO2020005555A1 (en) 2018-06-28 2020-01-02 Corning Incorporated Continuous methods of making glass ribbon and as-drawn glass articles from the same
US11485667B2 (en) 2019-01-25 2022-11-01 Corning Incorporated Dual-elevation edge roll system for fused downdraw glass forming
CN113825729A (zh) * 2019-04-12 2021-12-21 康宁公司 制造带的方法和设备
KR20220063202A (ko) * 2019-09-13 2022-05-17 코닝 인코포레이티드 가열 장치를 이용하여 유리 리본을 형성하는 시스템 및 방법
EP4045469A1 (en) 2019-10-14 2022-08-24 Corning Incorporated Foldable apparatus and methods of making
CN114599615B (zh) * 2019-10-22 2024-10-18 康宁公司 用于熔融玻璃系统及方法的激光厚度控制的能量传递优化
CN114929635B (zh) * 2019-12-02 2025-02-21 康宁公司 制造玻璃带之方法及设备
KR102894833B1 (ko) * 2020-06-19 2025-12-02 코닝 인코포레이티드 유리 리본의 제조 방법
CN112279499B (zh) * 2020-10-22 2022-06-07 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
KR20240115274A (ko) * 2021-11-23 2024-07-25 코닝 인코포레이티드 고해상도 가열을 통한 유리 줄무늬 개선을 위한 시스템들 및 방법들
US20260193122A1 (en) * 2022-12-15 2026-07-09 Corning Incorporated Methods for manufacturing a glass ribbon
KR20260025093A (ko) * 2023-06-14 2026-02-23 코닝 인코포레이티드 융합 유리의 레이저 두께 제어

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011149800A2 (en) * 2010-05-26 2011-12-01 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694181A (en) * 1971-06-01 1972-09-26 Ppg Industries Inc Apparatus for controlling glass fractures
JP3589486B2 (ja) * 1994-06-29 2004-11-17 株式会社町田製作所 マイクロレンズの製造方法
US5604635A (en) * 1995-03-08 1997-02-18 Brown University Research Foundation Microlenses and other optical elements fabricated by laser heating of semiconductor doped and other absorbing glasses
US5768022A (en) * 1995-03-08 1998-06-16 Brown University Research Foundation Laser diode having in-situ fabricated lens element
US5742026A (en) * 1995-06-26 1998-04-21 Corning Incorporated Processes for polishing glass and glass-ceramic surfaces using excimer laser radiation
JPH1097715A (ja) * 1996-07-31 1998-04-14 Asahi Komagu Kk 磁気記録媒体用基板および磁気記録媒体
EP0959051A4 (en) 1996-08-13 1999-12-15 Nippon Sheet Glass Co Ltd Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
DE19918936A1 (de) * 1999-04-27 2000-11-02 Schott Glas Verfahren und Vorrichtung zur Herstellung von Einzelglasscheiben
DE10128636C1 (de) 2001-06-13 2002-08-01 Schott Glas Verfahren zur selektiven Beeinflussung der Glasdicke bei der Herstellung von Flachglas und Vorrichtung zur Durchführung des Verfahrens
JP2003307602A (ja) * 2002-04-18 2003-10-31 Nippon Sheet Glass Co Ltd 平板レンズおよび平板レンズアレイの製造方法
US20050160767A1 (en) * 2004-01-28 2005-07-28 Robert Novak Horizontal sheet movement control in drawn glass fabrication
KR100910952B1 (ko) * 2005-04-15 2009-08-05 아사히 가라스 가부시키가이샤 유리판 내부에 존재하는 기포의 직경을 축소시키는 방법
US20070140311A1 (en) * 2005-12-20 2007-06-21 House Keith L Method and apparatus for characterizing a glass ribbon
WO2007132590A1 (ja) * 2006-05-11 2007-11-22 Asahi Glass Company, Limited 溶融ガラスの泡除去方法および除去装置、並びにガラスの製造方法
US7570366B2 (en) * 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
TWI370894B (en) * 2007-02-26 2012-08-21 Corning Inc Method for measuring distortion
WO2009011834A2 (en) * 2007-07-16 2009-01-22 Corning Incorporated Microalignment using laser-softened glass bumps
JP5327702B2 (ja) 2008-01-21 2013-10-30 日本電気硝子株式会社 ガラス基板の製造方法
US20090217705A1 (en) * 2008-02-29 2009-09-03 Filippov Andrey V Temperature control of glass fusion by electromagnetic radiation
JP5465235B2 (ja) * 2008-05-01 2014-04-09 コーニング インコーポレイテッド 透明基板上の隆起特徴構造および関連方法
US7920257B2 (en) * 2008-08-27 2011-04-05 Corning Incorporated Systems and methods for determining the shape of glass sheets
US8899078B2 (en) * 2008-11-26 2014-12-02 Corning Incorporated Glass sheet stabilizing system, glass manufacturing system and method for making a glass sheet
DE102009008292B4 (de) * 2009-02-10 2014-09-25 Schott Ag Kondensator und Verfahren zur Herstellung eines solchen
US8037716B2 (en) 2009-02-27 2011-10-18 Corning Incorporated Thermal control of the bead portion of a glass ribbon
CN102414134B (zh) * 2009-02-27 2015-01-21 康宁股份有限公司 对玻璃带上的区域成形的方法
US8590873B2 (en) * 2009-04-08 2013-11-26 Corning Incorporated Method and device for restraining movement of continuously traveling glass sheet
ATE551304T1 (de) * 2009-05-13 2012-04-15 Corning Inc Verfahren und anlagen zum formen von endlosen glasscheiben
TWI395630B (zh) 2009-06-30 2013-05-11 Mitsuboshi Diamond Ind Co Ltd 使用雷射光之玻璃基板加工裝置
CN102648164B (zh) * 2009-10-14 2014-07-23 康宁股份有限公司 用于控制平板厚度的方法和装置
US20110100058A1 (en) * 2009-10-30 2011-05-05 Dickinson Jr James Edward Formation of glass bumps with increased height using thermal annealing
CN102725238B (zh) 2009-11-24 2015-07-01 康宁股份有限公司 用于制造具有受控厚度的玻璃板的方法和装置
JP5717053B2 (ja) * 2010-02-18 2015-05-13 日本電気硝子株式会社 ガラスフィルムの製造方法およびその製造装置
JP5720885B2 (ja) * 2010-03-03 2015-05-20 日本電気硝子株式会社 ガラスロール、及びガラスロールの製造方法
US9656901B2 (en) * 2010-03-03 2017-05-23 Nippon Electric Glass Co., Ltd. Method of manufacturing a glass roll
US8397536B2 (en) 2010-05-26 2013-03-19 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass
US9676649B2 (en) * 2011-08-26 2017-06-13 Corning Incorporated Glass substrates with strategically imprinted B-side features and methods for manufacturing the same
US8459062B2 (en) * 2011-09-27 2013-06-11 Corning Incorporated Apparatus and methods for producing a glass ribbon
US8677783B2 (en) * 2011-11-28 2014-03-25 Corning Incorporated Method for low energy separation of a glass ribbon

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011149800A2 (en) * 2010-05-26 2011-12-01 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass

Also Published As

Publication number Publication date
KR20190099098A (ko) 2019-08-23
KR20150083098A (ko) 2015-07-16
TW201420822A (zh) 2014-06-01
JP2015536895A (ja) 2015-12-24
US20140123703A1 (en) 2014-05-08
WO2014074384A1 (en) 2014-05-15
KR102013426B1 (ko) 2019-08-22
CN104768883A (zh) 2015-07-08
US8904822B2 (en) 2014-12-09
CN104768883B (zh) 2018-01-16
TWI588305B (zh) 2017-06-21
JP6158342B2 (ja) 2017-07-05

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