KR102155598B1 - 취성 기판의 분단 방법 - Google Patents

취성 기판의 분단 방법 Download PDF

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Publication number
KR102155598B1
KR102155598B1 KR1020187024459A KR20187024459A KR102155598B1 KR 102155598 B1 KR102155598 B1 KR 102155598B1 KR 1020187024459 A KR1020187024459 A KR 1020187024459A KR 20187024459 A KR20187024459 A KR 20187024459A KR 102155598 B1 KR102155598 B1 KR 102155598B1
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KR
South Korea
Prior art keywords
line
blade tip
assist
brittle substrate
crack
Prior art date
Application number
KR1020187024459A
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English (en)
Korean (ko)
Other versions
KR20180105208A (ko
Inventor
히로시 소야마
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20180105208A publication Critical patent/KR20180105208A/ko
Application granted granted Critical
Publication of KR102155598B1 publication Critical patent/KR102155598B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B5/00—Producing shaped articles from the material in moulds or on moulding surfaces, carried or formed by, in, or on conveyors irrespective of the manner of shaping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027—Scoring tool holders; Driving mechanisms therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
KR1020187024459A 2016-02-26 2017-02-17 취성 기판의 분단 방법 KR102155598B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016035045 2016-02-26
JPJP-P-2016-035045 2016-02-26
PCT/JP2017/005934 WO2017145937A1 (ja) 2016-02-26 2017-02-17 脆性基板の分断方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020207004086A Division KR102205786B1 (ko) 2016-02-26 2017-02-17 취성 기판의 분단 방법

Publications (2)

Publication Number Publication Date
KR20180105208A KR20180105208A (ko) 2018-09-27
KR102155598B1 true KR102155598B1 (ko) 2020-09-14

Family

ID=59685211

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187024459A KR102155598B1 (ko) 2016-02-26 2017-02-17 취성 기판의 분단 방법
KR1020207004086A KR102205786B1 (ko) 2016-02-26 2017-02-17 취성 기판의 분단 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020207004086A KR102205786B1 (ko) 2016-02-26 2017-02-17 취성 기판의 분단 방법

Country Status (5)

Country Link
JP (2) JP6648817B2 (zh)
KR (2) KR102155598B1 (zh)
CN (2) CN108698254B (zh)
TW (2) TW202039193A (zh)
WO (1) WO2017145937A1 (zh)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014031292A (ja) 2012-08-03 2014-02-20 Mitsuboshi Diamond Industrial Co Ltd 強化ガラス基板のスクライブ方法
WO2015151755A1 (ja) 2014-03-31 2015-10-08 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法
WO2015198748A1 (ja) * 2014-06-26 2015-12-30 三星ダイヤモンド工業株式会社 脆性基板の分断方法およびスクライブ装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3680213A (en) * 1969-02-03 1972-08-01 Karl O Reichert Method of grooving semiconductor wafer for the dividing thereof
JP3074143B2 (ja) 1995-11-06 2000-08-07 三星ダイヤモンド工業株式会社 ガラスカッターホイール
JP2003183040A (ja) * 2001-12-18 2003-07-03 Oputo System:Kk ポイントカッター並びにその使用の方法及び装置
AU2003280723A1 (en) * 2002-11-06 2004-06-07 Mitsuboshi Diamond Industrial Co., Ltd. Scribe line forming device and scribe line forming method
WO2005063460A1 (ja) * 2003-12-29 2005-07-14 Mitsuboshi Diamond Industrial Co., Ltd. スクライブヘッドおよびスクライブ装置
EP2851172A1 (en) * 2004-02-02 2015-03-25 Mitsuboshi Diamond Industrial Co., Ltd. Cutter wheel and method for manufacturing the cutter wheel
JP5129826B2 (ja) * 2010-02-05 2013-01-30 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク方法
JP2013071335A (ja) * 2011-09-28 2013-04-22 Mitsuboshi Diamond Industrial Co Ltd マザー基板の分断方法
TWI488824B (zh) * 2011-12-05 2015-06-21 Mitsuboshi Diamond Ind Co Ltd The method and scribing device of glass substrate
JP6344787B2 (ja) * 2012-11-30 2018-06-20 三星ダイヤモンド工業株式会社 セラミックス基板の分断方法及びスクライブ装置
JP6201608B2 (ja) * 2013-10-08 2017-09-27 三星ダイヤモンド工業株式会社 スクライブ方法
JP6421472B2 (ja) * 2014-06-24 2018-11-14 三星ダイヤモンド工業株式会社 脆性基板の分断方法および表示パネルの製造方法
JP6303861B2 (ja) * 2014-06-25 2018-04-04 三星ダイヤモンド工業株式会社 単結晶基板の分断方法
JP2016030413A (ja) * 2014-07-30 2016-03-07 三星ダイヤモンド工業株式会社 貼り合わせ基板の分断方法及び分断装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014031292A (ja) 2012-08-03 2014-02-20 Mitsuboshi Diamond Industrial Co Ltd 強化ガラス基板のスクライブ方法
WO2015151755A1 (ja) 2014-03-31 2015-10-08 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法
WO2015198748A1 (ja) * 2014-06-26 2015-12-30 三星ダイヤモンド工業株式会社 脆性基板の分断方法およびスクライブ装置

Also Published As

Publication number Publication date
KR20200017563A (ko) 2020-02-18
TWI715718B (zh) 2021-01-11
WO2017145937A1 (ja) 2017-08-31
KR102205786B1 (ko) 2021-01-20
CN111347574A (zh) 2020-06-30
CN108698254A (zh) 2018-10-23
JP6648817B2 (ja) 2020-02-14
CN108698254B (zh) 2020-08-25
KR20180105208A (ko) 2018-09-27
TW201741107A (zh) 2017-12-01
JP2019214213A (ja) 2019-12-19
JPWO2017145937A1 (ja) 2018-11-29
TW202039193A (zh) 2020-11-01

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