KR102138113B1 - 광학 디바이스, 노광 장치 및 물품의 제조 방법 - Google Patents

광학 디바이스, 노광 장치 및 물품의 제조 방법 Download PDF

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Publication number
KR102138113B1
KR102138113B1 KR1020170008962A KR20170008962A KR102138113B1 KR 102138113 B1 KR102138113 B1 KR 102138113B1 KR 1020170008962 A KR1020170008962 A KR 1020170008962A KR 20170008962 A KR20170008962 A KR 20170008962A KR 102138113 B1 KR102138113 B1 KR 102138113B1
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South Korea
Prior art keywords
coil
heat
mirror
optical device
unit
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Korean (ko)
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KR20170089767A (ko
Inventor
도모후미 니시카와라
가즈키 기무라
히로노리 야다
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/192—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for minimising internal mirror stresses not in use
    • G02B7/195—Fluid-cooled mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020170008962A 2016-01-27 2017-01-19 광학 디바이스, 노광 장치 및 물품의 제조 방법 Active KR102138113B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2016-013620 2016-01-27
JP2016013620 2016-01-27
JP2016231794A JP6866131B2 (ja) 2016-01-27 2016-11-29 光学装置、それを備えた露光装置、および物品の製造方法
JPJP-P-2016-231794 2016-11-29

Publications (2)

Publication Number Publication Date
KR20170089767A KR20170089767A (ko) 2017-08-04
KR102138113B1 true KR102138113B1 (ko) 2020-07-27

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ID=59503653

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KR1020170008962A Active KR102138113B1 (ko) 2016-01-27 2017-01-19 광학 디바이스, 노광 장치 및 물품의 제조 방법

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JP (1) JP6866131B2 (https=)
KR (1) KR102138113B1 (https=)
TW (1) TWI682247B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7016661B2 (ja) 2017-10-06 2022-02-07 キヤノン株式会社 露光装置および物品の製造方法
DE102020214800A1 (de) 2020-11-25 2022-05-25 Carl Zeiss Smt Gmbh Feldfacettensystem und lithographieanlage

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100791161B1 (ko) * 2005-04-14 2008-01-02 캐논 가부시끼가이샤 광학장치 및 그것을 구비한 노광장치
JP2015212775A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0453072A (ja) * 1990-06-19 1992-02-20 Hitachi Ltd ロータリー型ヘッド位置決め装置
JP2756551B2 (ja) * 1992-10-20 1998-05-25 住友重機械工業株式会社 伝導冷却型超電導磁石装置
JP2007316132A (ja) * 2006-05-23 2007-12-06 Canon Inc 反射装置
JP2015050353A (ja) * 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100791161B1 (ko) * 2005-04-14 2008-01-02 캐논 가부시끼가이샤 광학장치 및 그것을 구비한 노광장치
JP2015212775A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Also Published As

Publication number Publication date
TWI682247B (zh) 2020-01-11
JP6866131B2 (ja) 2021-04-28
JP2017134389A (ja) 2017-08-03
TW201802607A (zh) 2018-01-16
KR20170089767A (ko) 2017-08-04

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