KR102135219B1 - Coating system for mask frame with structure of standing road and ion beam - Google Patents

Abstract

The present invention relates to a coating system for a mask frame having a vertical loading structure and an ion beam preprocessing module. The technical gist of the present invention is to: vertically (lateral standing-type drawing structure) load or unload a mask frame during surface coating, thereby easily securing an installation area compared to a conventional horizontal coasting system; allow a tray, having fixed the mask frame, to perform a coating process while being drawn in an alternate manner and in a cassette type by a load-lock chamber, thereby enabling a quick and reliable coating operation on the mask frame (preventing deflection of the mask frame compared to the conventional horizontal coasting system); form an ion beam oscillator for preprocessing and a plasma oscillator in a lateral emitting-type structure (standing type), thereby enabling a uniform surface treatment; and readily accommodate a large mask frame to be coated. Further, the coating system for a mask frame can emit an ion beam for preprocessing during a coating process for the mask frame to clean or remove a corroded surface of the mask frame or foreign substances sticking thereto, thereby increasing coating performance and the quality of the product.

Description

Coating system for mask frame with structure of standing road and ion beam with vertical loading structure and ion beam pretreatment module

The present invention is to allow the surface coating to be performed while the mask frame is loaded/unloaded vertically (sideways pull-out structure), which prevents the sagging phenomenon (horizontal sagging) of the mask frame compared to the conventional horizontal coating device. It is formed so that the work can be done, and in particular, it is easy to secure the installation area, but the tray holding the mask frame allows the load lock chamber of the auto reverse structure to perform the coating process while alternately withdrawing in the cassette type. The present invention relates to a coating system for a mask frame equipped with a vertical loading structure and an ion beam pre-processing module, which is characterized by greatly improving workability and productivity.

In addition, the present invention allows the ion beam to be irradiated as a pre-treatment part during the coating process for the mask frame, which precisely cleans or removes foreign matter or corrosion parts adsorbed on the surface of the mask frame before the coating process. By making it possible, it is characterized in that the coating performance is enhanced.

In addition, the present invention is an ion beam oscillator and a plasma oscillator for pre-treatment are formed in a side-irradiated structure (standing type) so that the surface treatment is uniform compared to a horizontal coating device (the mask frame is not sagging and plasma is emitted from both sides. ,Excellent surface coating properties compared to the horizontal type below).

In general, the mask frame is in the form of a square frame, so that each side of a straight bar is manufactured by welding mutually adjacent ones. It is formed to have.

Meanwhile, the mask frame requires a protective layer on the surface to prevent surface damage in a chemical vapor deposition process in practical use, which is achieved through a plasma coating process.

However, in the conventional coating equipment, the mask frame is usually loaded/unloaded in a horizontal structure, and if it continuously reciprocates for several times or a certain period of time, sagging (bending) occurs in the mask frame itself, which has a coating effect. Deterioration as well as post-damage of the coated foil occurs and the pattern is misaligned when patterning with a metal mask (mask sheet).

In addition, conventional coating equipment has no means to pre-treat (clean) foreign substances adsorbed on the surface of the mask frame or damage such as arcing, corrosion, particles, etc. The situation is not actively responding.

1. Republic of Korea Registered Patent Publication No. 10-1570429 (2015.11.13.)

The present invention is to solve the above-mentioned problems, the technical point is that the loading / unloading of the mask frame proceeds vertically (sideways pull-out structure), sagging phenomenon of the mask frame compared to the conventional horizontal coating device It is an object to provide to prevent the stable coating operation is made.

In addition, the present invention makes it easy to secure the installation area, but the tray fixed with the mask frame allows the load lock chamber of the auto reverse structure to perform the coating process while alternately drawing out the cassette type, which is workability and productivity. The aim is to provide something to make this greatly improved.

In addition, the present invention allows the ion beam to be irradiated as a pre-treatment part during the coating process for the mask frame, which enables precise cleaning or removal of foreign substances or corrosion parts adsorbed on the mask frame surface, thereby coating The aim is to provide a performance enhancement.

Accordingly, an object of the present invention is to provide an ion beam oscillator for pretreatment and a plasma oscillator in a side-irradiated structure (standing type) to enable uniform surface treatment compared to a horizontal coating device.

In addition, the present invention is a plasma oscillator in the coating part (processor) is formed in a tilted structure at a certain angle, and is formed in a multi-step spaced installation structure to increase the area of irradiation (emission) of the plasma, as well as to increase productivity due to reduced coating time The purpose is to provide things.

In addition, an object of the present invention is to provide a thing capable of performing a coating process (no sagging occurs) while smoothly accommodating a larger size for the mask frame to be coated.

In addition, the present invention allows the mask frame to be fixed in such a way that the tray-side coupling pin is inserted into the fixing hole formed on the thickness side of the mask frame when the mask frame is fixed to the window-shaped tray. The object is to provide a uniform pretreatment (removal of foreign matter) and coating on the front (both sides) of the four-sided border without interference.

In addition, the present invention allows the copper thin-walled member of high-adsorption material to be mounted on the inner wall of the coating part (bonded by spot welding to the stainless inner panel), whereby the residual coating material scattered toward the mask frame adsorbs to the copper thin plate It is an object of the present invention to provide a maintenance (maintenance) cycle (a maintenance cycle) to be greatly extended (the cleaning and replacement replacement cycle becomes longer).

In order to achieve the above object, the present invention is provided with a drawer 110 in a rectangular shape having a high side-to-side vertical height so that the mask frame 10 can be received vertically, and a narrow left and right interval width in a planar direction. However, the drawout box 110 is such that the entrance gate 111 and the exit gate 112 are respectively formed in the front and rear openings, and a support frame 120 of a square frame is provided inside the drawer box 110. When the cylinder 121 is driven to move forward and backward in the lateral direction along the upper and lower guide rails 122, a guide roller 123 and a drawing roller 124 are provided at the upper and lower ends of the support frame 120, respectively. A load lock chamber 100 that allows the tray 130 picked up in a fixed state to be loaded/unloaded toward the work chamber when rotated by the driving motor 125; The tray 130 equipped with the mask frame 10 enters vertically, so that the vertical height of the lateral side is high and the width of the left and right intervals is narrow in the direction of the plane reference so that it can move back and forth within the longitudinal section of the inner space. Although the work box 230 is provided, the work box 230 is provided with an exit/exit 231 corresponding to the exit gate 112 on one side, and a transfer roller 232 on the upper and lower sides of the inner space of the work box 230. ) And drive rollers 233 are formed, respectively, and an ion beam treatment part 210 is provided on one side of the inner space of the work box 230 to irradiate an ion beam against a square surface of the mask frame 10. It is formed to be irradiated and pre-processed cleaning is performed, and a workpiece part 220 is provided at one end of the pre-processing part 210 to perform plasma-bone coating on the mask frame 10 where the pre-treatment is completed. Chamber 200; It consists and is made.

Thus, the pre-treatment (Ion beam Treatment) part 210 is to be provided with an ion beam oscillator 211 extended in the vertical direction in the inner space of the work box 230, the ion beam oscillator 211 Is provided on both sides based on the mask frame 10 is formed so that the ion beam is irradiated to both sides of the square surface of the mask frame 10 being reciprocated for a set period.

At this time, it is preferable that the ion beam oscillator 211 is irradiated with the ion beam while being spaced apart at a predetermined interval with respect to the reciprocating section in which the mask frame 10 moves forward and backward.

In addition, it is preferable that the ion beam oscillator 211 is detached from the outside of the work box.

Thus, the coating (Processor) part 220 is to be provided with a plasma oscillator 221 extending in the vertical direction in the vertical direction in the inner space of the work box 230, the plasma oscillator 221 is a mask frame ( 10) is provided on both sides as a reference and is formed to be irradiated with plasma on both sides of the square surface of the mask frame 10 being reciprocated for a set period, and the plasma oscillator 221 has a plasma emission surface of '평면' Alternatively, the tilting angle is formed in the form of'∨' to expand the plasma emission region.

At this time, it is preferable that the plasma oscillator 221 is irradiated with plasma while being spaced apart at a predetermined interval with respect to the reciprocating section in which the mask frame 10 moves forward and backward.

Further, it is preferable that the plasma oscillator 221 is detached from the outside of the work box.

As described above, the present invention allows the loading/unloading of the mask frame according to the surface coating to proceed vertically (sideways pull-out structure), thereby preventing the sagging phenomenon of the mask frame compared to the conventional horizontal coating device, thereby ensuring a stable coating operation. Not only is it made, but it is also easy to secure the installation area, but the tray with the mask frame fixed allows the auto-reverse structured load-lock chamber to carry out the coating process by alternately withdrawing in the cassette type, which means workability and productivity. This has the effect of greatly improving.

In addition, the present invention allows the ion beam to be irradiated as a pre-treatment part during the coating process for the mask frame, which enables precise cleaning or removal of foreign substances or corrosion parts adsorbed on the mask frame surface, thereby coating It has the effect of enhancing performance.

Accordingly, the present invention has an effect that the ion beam oscillator for pretreatment and the plasma oscillator are formed in a side-irradiated structure (standing type), so that even surface treatment is possible compared to a horizontal coating device.

In addition, in the present invention, the plasma oscillator in the coating part (processor) is formed in a tilted structure at a certain angle, and is formed in a multi-step spaced installation structure, thereby increasing the area of irradiation (emission) of the plasma, as well as greatly reducing productivity due to shortening of the coating time. There is an effect to be improved.

In addition, the present invention has an effect capable of performing the coating process (no sagging occurs) while smoothly accommodating the large-sized size for the mask frame to be coated.

In addition, the present invention allows the mask frame to be fixed in such a way that the tray-side coupling pin is inserted into the fixing hole formed on the thickness side of the mask frame when the mask frame is fixed to the window-shaped tray. There is an effect of uniform pretreatment (removal of foreign matter) and coating on the front (both sides) of the four-sided border without interference.

In addition, the present invention allows the copper thin-walled member of high-adsorption material to be mounted on the inner wall of the coating part (bonded by spot welding to the stainless inner panel), whereby the residual coating material scattered toward the mask frame adsorbs to the copper thin plate By making it possible, there is an effect that the maintenance (maintenance) cycle (management cycle) is greatly extended (the cleaning and replacement replacement cycle becomes longer).

1 to 2 is an exemplary view showing a coating system for a mask frame equipped with a vertical loading structure and an ion beam pretreatment module according to the present invention,
3 to 8 is an exemplary view showing a load lock chamber according to the present invention,
9 is an exemplary view showing a connection state between a load lock chamber and a work chamber according to the present invention;
10 to 13 is an exemplary view showing a pretreatment part in a work chamber according to the present invention,
14 to 15 is an exemplary view showing a combined state of the tray and the mask frame according to the present invention,
16 to 24 are exemplary views showing a coating part in a work chamber according to the present invention.

Next, the present invention will be described in more detail with reference to the accompanying drawings.

First, as illustrated in FIGS. 1 to 24, the present invention is largely composed of a load lock chamber 100 and a work chamber 200.

Thus, the load-lock chamber 100, as shown in Figures 3 to 8, the mask frame 10 has a high vertical height on the side and vertical, so that the width of the left and right intervals in the plane reference direction is narrow. A drawer 110 having a rectangular shape is provided.

At this time, the withdrawal box 110 has an entrance gate 111 and an exit gate 112 are formed in front and rear openings, respectively.

Thus, the entrance gate and the exit gate are set to maintain a closed state when the opposite side is opened, and an open state when the opposite side is closed.

At this time, the inside of the drawer box 110 is provided with a support frame 120 of a square frame is formed to move forward and backward in the lateral direction along the upper and lower guide rail 122 when driving the cylinder 121.

Accordingly, a guide roller 123 and a draw roller 124 are provided at upper and lower ends of the support frame 120, respectively, so that the tray 130 picking up the mask frame 10 in a fixed state is provided to the driving motor 125. It is formed to be loaded/unloaded toward the work chamber upon rotation.

In more detail, the load lock chamber is a kind of magazine that waits when the mask frame is mounted on a tray formed like two window frames (two in a row in the longitudinal direction), and the entrance gate of the drawer (at this time) , The exit gate is closed.) The tray holding the mask frame is received.

At this time, the tray has a two-row (row) structure, and two sets of two mask frames are mounted in a pair like a two-car train.

That is, if one of the two trays first departs through the exit gate (departure and then closes), after the pretreatment and coating are completed in the work chamber (the inlet and outlet are closed during the pretreatment and coating steps when the tray enters through the inlet and outlet) Will return.

At this time, when the tray on which the coating is completed returns to the support frame, the support frame moves along either side of the guide rail in either direction in the width direction, starting from the operation of the cylinder, while the other tray is waiting in front of the exit gate (with the remaining uncoated mask frame. Tray) is prepared to be prepared.

In other words, when the one tray is completed, the frame is moved to one side after returning to the load lock chamber, and the mask frame of the other tray is put in and coated to form.

Incidentally, such a support frame is provided with a plurality of trays, and one tray assembly is formed such that two sets of mask frames to be coated are mounted.

At this time, when the mask frame is mounted in the groove in the inner space of the tray, the coupling pin 131 is fixed to the fixing hole 11 formed on the thickness side of the mask frame to secure the insertion bolt screw fastening, and when viewed from the opened side of the tray 4 It is formed so that the face rim is fixed at a predetermined interval.

Accordingly, the tray is formed to be drawn toward the work chamber by rotation of the guide roller 123 and the draw roller 124 during operation of the driving motor.

On the other hand, the work chamber 200 has a high vertical height of the lateral reference and a flat reference traveling direction so that the tray 130 on which the mask frame 10 is mounted enters vertically and moves back and forth within the longitudinal section of the inner space. In the right and left interval width is formed to be provided with a narrow rectangular work box (230).

Accordingly, the work box 230 is formed with an entrance and exit 231 corresponding to the exit gate 112 on one side, and there is a transfer roller 232 and a drive roller 233 on the upper and lower sides of the inner space of the work box 230. Each is formed.

At this time, one side of the inner space of the work box 230 is provided with an ion beam treatment part 210, which is formed to irradiate an ion beam against a square surface of the mask frame 10 to perform pretreatment cleaning.( 10 to 13)

Accordingly, a coating part 220 is provided on one side of the rear end portion of the pre-processing part 210 to form a plasma-bone coating on the mask frame 10 having been pre-processed.

At this time, the pre-treatment (Ion beam Treatment) part 210 is formed to be provided with an ion beam oscillator 211 extended in the vertical direction in the inner space of the work box 230.

Thus, the ion beam oscillator 211 is provided on both sides of the mask frame 10 and is formed to irradiate ion beams on both sides of the square surface of the mask frame 10 being reciprocated for a set period.

At this time, it is preferable that the ion beam oscillator 211 is irradiated with the ion beam while being spaced apart at a predetermined interval with respect to the reciprocating section in which the mask frame 10 moves forward and backward.

In addition, it is preferable that the ion beam oscillator 211 is detached from the outside of the work box.

Thus, the coating (Processor) part 220 is formed to be provided with a plasma oscillator 221 extending in the vertical direction in the vertical direction in the inner space of the work box 230.

At this time, the plasma oscillator 221 is provided on both sides with respect to the mask frame 10 is formed to be irradiated with plasma on both sides of the square surface of the mask frame 10 being reciprocated during a set period.

Accordingly, the plasma oscillating body 221 is formed such that the plasma emission area is expanded by a tilting angle of the plasma emission surface in the form of a plane reference'∧' or'∨'.

At this time, it is preferable that the plasma oscillator 221 is irradiated with plasma while being spaced apart at a predetermined interval with respect to the reciprocating section in which the mask frame 10 moves forward and backward.

Further, it is preferable that the plasma oscillator 221 is detached from the outside of the work box.

In other words, the process of irradiating the ion beam by the pre-processed part is usually (approximately) 30-40 minutes. At this time, the driving of the coated part does not work, and the tray frame is continuously moved back and forth (back and forth) during the pre-processed part section It is formed to be exposed (cleaned) to the ion beam.

Thereafter, the coating part is powered on while the pre-processing part is turned off, and the coating is performed for about 12 hours.(The tray with the mask frame continuously reciprocates forward and backward through the section of the plasma oscillator-because the coating thickness is high. )

At this time, the moving section of the tray goes back and forth to pass the ion beam section during the pretreatment process, and after the pretreatment process, the tray moving section moves up and down to the plasma oscillator section of the coating part. In the entire space section, only the relevant section is used during the processing, so that wasted time or power is not wasted)

Meanwhile, in the coating part, the plasma oscillator is formed to form a tilted structure at a predetermined angle with respect to the mask frame reciprocating.

In other words, the radiation surface irradiation angle of the plasma oscillator forms a'V' shape to form a wide angle spread toward the mask frame, so that the angle of inclination enters the coating influence first, for example, before the entry side, and on the contrary, the exit side is more It is formed to sting the coated plasma for a long time.

On the other hand, it is preferable that a coating panel is installed as an interior material on the inner wall surface in the coating part.

For reference, the sputter coating has a problem in that a deposition material is deposited on the chamber surface, so a shield must be provided inside the chamber.

At this time, in order to prevent contamination in the existing vacuum chamber, a stainless (SUS) plate was used to deposit on the mask surface and the shield surface during sputtering.

If deposition continues on the chamber surface, it is necessary to replace the shield (once a week). To further extend this replacement cycle, a copper (Cu) sheet is mounted on the SUS (Shield) plate so that the shield replacement cycle can be further extended. do.

For reference, a myriad of embossed irregularities are formed on the copper thin plate attached to the SUS plate, so that the sputter deposition property is doubled.

In more detail, the coated panel is a flat square plate in the form of a tile, and is formed by bonding (spot welding) a copper thin plate member to a stainless square plate and attaching it to the inner wall surface of the coating part (fusion or bolting). .

The copper thin plate is formed to be longer to the cleaning cycle by taking a longer maintenance period (management cycle) because the coating material is better adhered to the copper thin plate according to the plasma oscillation.

In other words, the present invention is that the mask frame is loaded and unloaded in an erected form, so that it is coated in a vertical form, which prevents sagging of the mask frame mounted in a suspended form for a large size and has excellent coating properties. Plasma coating radiation angle is characterized in that the coating efficiency is improved by spraying from both sides rather than up and down from the side.

In addition, the installation space of the facility can be made small, and the driving device can be downsized during reciprocation, and the load lock chamber can be pulled out and driven by a two-piece type, making it a highly productive and economical structure. It is characterized by no damage or interference.

The present invention is not limited to the specific preferred embodiments described above, and various modifications can be implemented by anyone who has ordinary skill in the art to which the present invention pertains without departing from the gist of the present invention as claimed in the claims. Of course, such changes are within the scope of the claims.

100 ... load lock chamber 110 ... withdrawal box
111 ... entrance gate 112 ... exit gate
120 ... support frame 121 ... cylinder
122 ... Guide rail 123 ... Guide roller
124 ... withdrawal roller 125 ... drive motor
130 ... Tray 131 ... Coupling pin
200 ... work chamber 210 ... pre-treatment part
211 ... ion beam oscillator 220 ... coated parts
221 ... plasma oscillator 230 ... work box
231 ... I/O 232 ... Transfer roller
233 ... drive roller

Claims (3)

The mask frame 10 is provided with a drawer 110 in the form of a flat rectangular enclosure so that it can be stored vertically, wherein the drawer box 110 has an entrance gate 111 and an exit gate 112 in front and rear openings, respectively. It is to be formed, the drawer 110 is to be provided with a support frame 120 of a square frame inside, the support frame 120 is a guide roller 123 and a draw roller 124 at the upper and lower ends, respectively. A load lock chamber 100 provided to load/unload the tray 130 where the mask frame 10 is picked up in a fixed state when being rotated by the driving motor 125 toward the work chamber; The tray 130 equipped with the mask frame 10 enters vertically so that a work box 230 in the form of a flat rectangular enclosure is provided so as to be able to move back and forth within the longitudinal section of the inner space, but the work box 230 is provided. ) Is formed so that the entrance gate 231 corresponding to the exit gate 112 is formed on one side, and the transfer roller 232 and the drive roller 233 are formed on the upper and lower sides of the inner space of the work box 230, respectively. An ion beam treatment part 210 is provided on one side of the inner space of the ship 230 to be formed to perform pretreatment cleaning by irradiating an ion beam against a square surface of the mask frame 10, and the pretreatment part 210 ) On one side of the rear end, a work chamber 200 is provided so that a plasma part coating is performed on the mask frame 10 having a pre-processed mask part 220 provided thereon; In the coating system for a mask frame equipped with a vertical loading structure and ion beam pre-treatment module consisting of,
The support frame 120 is provided with a plurality of cylinders 121 in a direction orthogonal to the plane on which the tray is mounted, and is formed to move back and forth in the lateral direction along the upper and lower guide rails 122 when driving, and the mask frame ( 10) When the mounting space groove of the tray 130 is mounted, the coupling pin 131 is inserted into the fixing hole 11 formed on the thickness side of the mask frame 10, thereby fixing the bolt screw fastening to fix the opening of the tray. When viewed from the side, the four-sided edge of the mask frame 10 is formed to be fixed at a predetermined interval, and the ion beam treatment part 210 is vertically and vertically heighted from the inner space of the work box 230. A long elongated ion beam oscillator 211 is provided, but the ion beam oscillator 211 is provided on both sides of the mask frame 10, and the square of the mask frame 10 is being reciprocated for a set period. The ion beam oscillator 211 is formed to be irradiated with respect to both surfaces of the surface, and the ion beam oscillator 211 is irradiated with the ion beam while being spaced apart at a predetermined interval with respect to the reciprocating section in which the mask frame 10 moves forward and backward. Coating system for mask frame with vertical loading structure and ion beam pretreatment module.
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