KR102130124B1 - 실장 장치 - Google Patents
실장 장치 Download PDFInfo
- Publication number
- KR102130124B1 KR102130124B1 KR1020187021580A KR20187021580A KR102130124B1 KR 102130124 B1 KR102130124 B1 KR 102130124B1 KR 1020187021580 A KR1020187021580 A KR 1020187021580A KR 20187021580 A KR20187021580 A KR 20187021580A KR 102130124 B1 KR102130124 B1 KR 102130124B1
- Authority
- KR
- South Korea
- Prior art keywords
- plunger
- pin
- mounting
- head
- sheet
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 30
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 210000002445 nipple Anatomy 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 2
- 238000005452 bending Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 210000000481 breast Anatomy 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
- H05K13/0409—Sucking devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/02—Feeding of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/83001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector involving a temporary auxiliary member not forming part of the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2016/068526 WO2017221350A1 (ja) | 2016-06-22 | 2016-06-22 | 実装方法、実装用ヘッドおよび実装装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20190020641A KR20190020641A (ko) | 2019-03-04 |
KR102130124B1 true KR102130124B1 (ko) | 2020-07-03 |
Family
ID=60783307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187021580A KR102130124B1 (ko) | 2016-06-22 | 2016-06-22 | 실장 장치 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP6603412B2 (zh) |
KR (1) | KR102130124B1 (zh) |
CN (1) | CN108605427B (zh) |
SG (1) | SG11201806151UA (zh) |
TW (1) | TWI706480B (zh) |
WO (1) | WO2017221350A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100512488B1 (ko) * | 2002-06-26 | 2005-09-05 | 주식회사 삼우테크놀로지 | 자기테이프에서 자성도료와 베이스필름의 분리 추출방법 |
WO2023027387A1 (ko) | 2021-08-25 | 2023-03-02 | 레이저쎌 주식회사 | 전사 방식을 이용한 초소형 led 칩 리웍장치 및 리웍방법 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN210429751U (zh) | 2018-09-11 | 2020-04-28 | Pyxis Cf私人有限公司 | 半导体器件贴片装置及用于对准多个半导体器件的机构 |
JP7205896B2 (ja) * | 2019-05-22 | 2023-01-17 | 株式会社 ベアック | 貼り付け装置および貼り付け方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000225588A (ja) | 1999-02-08 | 2000-08-15 | Juki Corp | 切替え式吸着パッド装置 |
JP2007317748A (ja) | 2006-05-23 | 2007-12-06 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2010040657A (ja) | 2008-08-01 | 2010-02-18 | Canon Machinery Inc | チップ剥離装置およびチップ剥離方法 |
JP2013507010A (ja) | 2009-10-06 | 2013-02-28 | アエロラス ゲーエムベーハー | 電気または電子部品を取り扱うための挿入ヘッド |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS557775B2 (zh) | 1974-06-20 | 1980-02-28 | ||
JPS6063940A (ja) * | 1984-07-26 | 1985-04-12 | Sanken Electric Co Ltd | 半導体ペレツトのダイボンデイング方法 |
JPS6430235A (en) * | 1987-07-27 | 1989-02-01 | Matsushita Electronics Corp | Die bonding device |
JP2540075B2 (ja) * | 1989-06-15 | 1996-10-02 | ティーディーケイ株式会社 | 部品装着装置 |
JPH07105633B2 (ja) * | 1990-01-08 | 1995-11-13 | 松下電器産業株式会社 | 部品装着機 |
JPH06188595A (ja) * | 1993-08-01 | 1994-07-08 | Matsushita Electric Ind Co Ltd | 電子部品の装着装置 |
JP3145899B2 (ja) * | 1995-07-11 | 2001-03-12 | 有限会社ソルテック | 電磁ソレノイド駆動装置及びこれを用いたパチンコ機の入賞装置 |
JP5964005B2 (ja) * | 2005-04-08 | 2016-08-03 | パック テック−パッケージング テクノロジーズ ゲーエムベーハー | チップを接触基板に移送する方法及び装置 |
US9258936B2 (en) * | 2011-12-27 | 2016-02-09 | Hanwha Techwin Co., Ltd. | Adsorption head for surface mounting device |
-
2016
- 2016-06-22 SG SG11201806151UA patent/SG11201806151UA/en unknown
- 2016-06-22 WO PCT/JP2016/068526 patent/WO2017221350A1/ja active Application Filing
- 2016-06-22 JP JP2018523211A patent/JP6603412B2/ja active Active
- 2016-06-22 KR KR1020187021580A patent/KR102130124B1/ko active IP Right Grant
- 2016-06-22 CN CN201680081435.0A patent/CN108605427B/zh active Active
-
2017
- 2017-06-21 TW TW106120670A patent/TWI706480B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000225588A (ja) | 1999-02-08 | 2000-08-15 | Juki Corp | 切替え式吸着パッド装置 |
JP2007317748A (ja) | 2006-05-23 | 2007-12-06 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2010040657A (ja) | 2008-08-01 | 2010-02-18 | Canon Machinery Inc | チップ剥離装置およびチップ剥離方法 |
JP2013507010A (ja) | 2009-10-06 | 2013-02-28 | アエロラス ゲーエムベーハー | 電気または電子部品を取り扱うための挿入ヘッド |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100512488B1 (ko) * | 2002-06-26 | 2005-09-05 | 주식회사 삼우테크놀로지 | 자기테이프에서 자성도료와 베이스필름의 분리 추출방법 |
WO2023027387A1 (ko) | 2021-08-25 | 2023-03-02 | 레이저쎌 주식회사 | 전사 방식을 이용한 초소형 led 칩 리웍장치 및 리웍방법 |
KR20230030385A (ko) | 2021-08-25 | 2023-03-06 | 레이저쎌 주식회사 | 전사 방식을 이용한 초소형 led 칩 리웍장치 및 리웍방법 |
Also Published As
Publication number | Publication date |
---|---|
CN108605427B (zh) | 2020-10-30 |
KR20190020641A (ko) | 2019-03-04 |
TWI706480B (zh) | 2020-10-01 |
SG11201806151UA (en) | 2019-01-30 |
JPWO2017221350A1 (ja) | 2019-04-11 |
WO2017221350A1 (ja) | 2017-12-28 |
TW201801208A (zh) | 2018-01-01 |
CN108605427A (zh) | 2018-09-28 |
JP6603412B2 (ja) | 2019-11-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102130124B1 (ko) | 실장 장치 | |
US10471545B2 (en) | Top-side laser for direct transfer of semiconductor devices | |
CN110073478B (zh) | 用于直接传送半导体器件的顺应针 | |
JP6545889B1 (ja) | Ledディスプレイパネル製造のためのマイクロledチップアレイ方法及びこれに用いられるマルチチップキャリア | |
US20100093131A1 (en) | Bonding apparatus and bonding method | |
JP6967411B2 (ja) | 半導体製造装置、半導体装置の製造方法およびコレット | |
KR20140086361A (ko) | 다이 본딩 방법 및 장치 | |
KR102019298B1 (ko) | 전사 방법 및 실장 방법 | |
KR100950250B1 (ko) | 이젝터의 칩 지지장치 | |
JP4831091B2 (ja) | ダイボンディング装置及びダイボンディング方法 | |
JPH11354561A (ja) | バンプ形成方法及びバンプ | |
JP6138332B1 (ja) | 吸着搬送方法 | |
KR102149430B1 (ko) | 초음파 접합 장치 및 초음파 접합 방법 | |
JPH0992699A (ja) | 発光素子の測定方法 | |
JP2007208106A (ja) | 熱圧着装置及び熱圧着装置に装着される熱圧着ツール、熱圧着装置における熱圧着方法 | |
JP4119598B2 (ja) | 電子部品実装装置および電子部品実装方法 | |
JPH08203962A (ja) | チップ位置決め装置、チップステージおよびインナリードボンディング装置ならびに方法 | |
CN112530834B (zh) | 芯片贴装装置、剥离单元、筒夹及半导体器件的制造方法 | |
WO2011007398A1 (ja) | ピックアップ装置 | |
JP2619443B2 (ja) | ペレットのピックアップ方法 | |
TWI732284B (zh) | 傳送發光二極體晶片之傳送裝置及傳送方法 | |
JP2010040657A (ja) | チップ剥離装置およびチップ剥離方法 | |
KR102127695B1 (ko) | 반도체 다이 분리장치 | |
KR102031603B1 (ko) | 발광다이오드 칩을 전사하는 전사 장치 및 방법 | |
JP2823748B2 (ja) | 半導体部品供給装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
AMND | Amendment | ||
AMND | Amendment | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
X091 | Application refused [patent] | ||
AMND | Amendment | ||
X701 | Decision to grant (after re-examination) | ||
GRNT | Written decision to grant |