KR102121295B1 - 유체 유인 유닛 및 진공 펌프의 수명을 연장시키는 운용 방법 - Google Patents

유체 유인 유닛 및 진공 펌프의 수명을 연장시키는 운용 방법 Download PDF

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Publication number
KR102121295B1
KR102121295B1 KR1020187031835A KR20187031835A KR102121295B1 KR 102121295 B1 KR102121295 B1 KR 102121295B1 KR 1020187031835 A KR1020187031835 A KR 1020187031835A KR 20187031835 A KR20187031835 A KR 20187031835A KR 102121295 B1 KR102121295 B1 KR 102121295B1
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KR
South Korea
Prior art keywords
fluid
cylinder
driven
opening
vacuum pump
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KR1020187031835A
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English (en)
Korean (ko)
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KR20180126072A (ko
Inventor
미노루 우에다
다카히로 오가와
Original Assignee
가부시키가이샤 테크노스
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Application filed by 가부시키가이샤 테크노스 filed Critical 가부시키가이샤 테크노스
Publication of KR20180126072A publication Critical patent/KR20180126072A/ko
Application granted granted Critical
Publication of KR102121295B1 publication Critical patent/KR102121295B1/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020187031835A 2016-09-21 2016-11-16 유체 유인 유닛 및 진공 펌프의 수명을 연장시키는 운용 방법 KR102121295B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2016-184209 2016-09-21
JP2016184209A JP6120469B1 (ja) 2016-09-21 2016-09-21 真空ポンプの寿命を延ばす運用方法
PCT/JP2016/083897 WO2018055780A1 (ja) 2016-09-21 2016-11-16 流体誘引ユニット及び真空ポンプの寿命を延ばす運用方法

Publications (2)

Publication Number Publication Date
KR20180126072A KR20180126072A (ko) 2018-11-26
KR102121295B1 true KR102121295B1 (ko) 2020-06-10

Family

ID=58666490

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187031835A KR102121295B1 (ko) 2016-09-21 2016-11-16 유체 유인 유닛 및 진공 펌프의 수명을 연장시키는 운용 방법

Country Status (5)

Country Link
JP (1) JP6120469B1 (ja)
KR (1) KR102121295B1 (ja)
CN (1) CN108350908B (ja)
TW (1) TWI655372B (ja)
WO (1) WO2018055780A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11269284B2 (en) 2017-04-27 2022-03-08 Hewlett-Packard Development Company, L.P. Pattern discharge to photoconductor
CN114294711B (zh) * 2021-12-08 2023-07-04 约克广州空调冷冻设备有限公司 风机盘管

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0176600U (ja) * 1987-11-11 1989-05-24
JPH01166800U (ja) * 1988-05-14 1989-11-22
JP2644040B2 (ja) * 1989-05-02 1997-08-25 大晃機械工業株式会社 真空ポンプの運転方法
JP3941147B2 (ja) * 1997-02-27 2007-07-04 富士通株式会社 真空排気装置及びそのメンテナンス方法
JP2004346858A (ja) * 2003-05-23 2004-12-09 Renesas Technology Corp 半導体製品製造装置およびその清浄化方法
JP2005188416A (ja) * 2003-12-26 2005-07-14 Myotoku Ltd 負圧発生器または真空発生装置
KR101278529B1 (ko) * 2010-03-18 2013-06-25 삼성전자주식회사 진공펌프용 이젝터 및 이를 구비한 진공펌프
IT1401930B1 (it) * 2010-09-14 2013-08-28 Catalfamo Attrezzatura di aspirazione per dispositivi destinati alla abrasione di superfici di manufatti
US10502237B2 (en) * 2011-10-27 2019-12-10 Edco Usa Method and system for attenuating transmission of high amplitude oscillations by a vacuum system
JP5821709B2 (ja) * 2012-03-07 2015-11-24 株式会社デンソー エジェクタ
US20160106280A1 (en) * 2013-04-22 2016-04-21 Husqvarna Ab Vacuum attachment for a blower
JP6161202B2 (ja) 2013-11-15 2017-07-12 花王株式会社 吸収性物品
CN205117398U (zh) * 2015-11-04 2016-03-30 山东恒远机电开发有限公司 一种新型拉阀尔瓦斯诱导器

Also Published As

Publication number Publication date
WO2018055780A1 (ja) 2018-03-29
TW201814168A (zh) 2018-04-16
CN108350908B (zh) 2019-07-16
KR20180126072A (ko) 2018-11-26
JP6120469B1 (ja) 2017-04-26
CN108350908A (zh) 2018-07-31
TWI655372B (zh) 2019-04-01
JP2018048586A (ja) 2018-03-29

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