KR102119430B1 - Exposure/rendering device, exposure/rendering system, program, and exposure/rendering method - Google Patents

Abstract

Disclosed is an exposure drawing apparatus that can prevent images of images that do not correspond to each other on each side when drawing images on both surfaces of a substrate to be exposed. The first drawing means for drawing an image on the first surface by exposing the first surface of the substrate to be exposed, the first job information 60A corresponding to the image information on the first surface and the exposure condition information, and the image on the second surface In the second job information 60B to which the information and exposure condition information correspond, and storage means for storing corresponding information between the first job information 60A and the second job information 60B, and the first job information 60A. When an image is drawn on the second surface of the substrate to be exposed by drawing the image on the first surface by exposing the first surface under the exposure conditions indicated by the agent, the agent used when drawing the image on the first surface according to the corresponding information The image represented by the second job information 60B is drawn on the second side by exposing the second side under the exposure conditions indicated by the second job information corresponding to the one job information 60A.

Description

Exposure drawing device, exposure drawing system, program and exposure drawing method {EXPOSURE/RENDERING DEVICE, EXPOSURE/RENDERING SYSTEM, PROGRAM, AND EXPOSURE/RENDERING METHOD}

The present invention relates to an exposure drawing apparatus, an exposure drawing system, a program, and an exposure drawing method. In particular, an exposure drawing apparatus and an exposure drawing system for drawing an image on both surfaces of an exposed substrate, and the exposure drawing apparatus and the exposure drawing system It relates to a program to be executed and an exposure drawing method of drawing an image on both surfaces of a substrate to be exposed.

Conventionally, an exposure drawing apparatus has been developed in which a light beam modulated based on image information is exposed on a substrate to be exposed as a printed circuit board and an image is drawn on the substrate to be exposed. In addition, in order to draw images on both sides of the substrate to be exposed, two exposure drawing devices are paralleled to use one side for drawing on the first side, and the other for drawing on the second side opposite to the first side. An exposure imaging system to be developed has also been developed. In this exposure drawing system, after an image is drawn on the first surface of the substrate to be exposed by the exposure drawing device for the first surface, the substrate to be exposed is conveyed to a predetermined position in the exposure drawing device for the second surface, and then the exposure drawing device By this, an image is drawn on the second surface of the substrate to be exposed.

As a technique relating to this exposure drawing system, Patent Document 1 improves the throughput of conveyance processing of the substrate to be exposed when drawing images on the first and second surfaces of the substrate to be exposed, respectively, using two exposure drawing devices. Disclosed is an exposure imaging system.

Each exposure drawing apparatus of this exposure drawing system includes a stage on which the substrate to be exposed is loaded, stage moving means for moving the stage in a linear shape, and beam scanning for scanning a light beam on a first surface of the substrate to be loaded on the stage. And a drawing unit having a means. Further, each exposure drawing apparatus includes an upstream side unit disposed on the upstream side of the drawing unit in the moving direction of the stage, and a downstream side unit disposed on the downstream side of the drawing unit in the moving direction of the stage. In addition, each exposure drawing apparatus is provided with carrying means for holding the exposed substrate of the upstream unit and moving it in the conveying direction which is the same direction as the moving direction of the stage, and carrying the exposed substrate onto the stage in the drawing unit. . Moreover, each exposure drawing apparatus is equipped with the carrying-out means which hold|maintains the to-be-exposed board|substrate on the stage in a drawing unit, moves it in a conveyance direction, and carries out a to-be-exposed board|substrate to a downstream unit.

In each exposure drawing apparatus, when scanning the light beam on the first surface of the substrate to be exposed, the stage is moved from the upstream side to the downstream side in the conveying direction, and the substrate to be exposed is brought into the stage positioned on the upstream side, and positioned on the downstream side. The substrate to be exposed is taken out from the stage.

Japanese Patent Publication 2002-341550

In general, when an image is drawn on a substrate to be exposed using an exposure drawing apparatus, an image of an operator drawing on the substrate to be exposed to the exposure drawing apparatus, and a job indicating a processing request (job) in which exposure conditions at the time of drawing are specified Enter your information. When the same image is continuously drawn on the plurality of substrates to be exposed under the same exposure conditions, a series of processes in the job information is collectively shown. Then, the exposure drawing apparatus performs exposure drawing processing for the substrate to be exposed based on the inputted job information.

In the exposure drawing system disclosed in Patent Document 1, since an image is drawn on one side of the substrate to be exposed using each of the two exposure drawing devices, the operator inputs job information on the first side into one exposure drawing device, and the other. Job information on the second surface is input to the exposure drawing apparatus. As described above, since the operator inputs job information separately for each exposure drawing apparatus, there is a possibility that images that do not correspond to each other on each surface of the substrate to be exposed may be drawn if the operator inputs the wrong information. there was.

In addition, in one exposure drawing apparatus, the exposed substrate that has failed the exposure drawing process and becomes a defective product may be removed. In this case, even if the job information is input correctly, if the job information input to the other exposure drawing apparatus is not updated, there is a possibility that an image that does not correspond to each other on each surface of the substrate to be exposed may be drawn. There was also.

The present invention has been made in consideration of the above problems, and when an image is drawn on both surfaces of an exposed substrate, an exposure drawing apparatus, an exposure drawing system, a program and an exposure, which can prevent an image that does not correspond to each other on each side are drawn. It is an object to provide a drawing method.

In order to achieve the above object, the exposure drawing apparatus according to the present invention includes first drawing means for drawing an image on the first surface by exposing a first surface of the substrate to be exposed, and on the first surface of the substrate to be exposed First job information to which image information indicating an image to be drawn and exposure condition information indicating an exposure condition are matched, and image information and exposure conditions indicating an image to be drawn on a second surface opposite to the first surface of the substrate to be exposed Storage means for storing second job information to which exposure condition information indicating, and corresponding information indicating the relationship between the first job information and the second job information, and the first job information as the first drawing means In the case of drawing an image on the second surface of the substrate to be exposed, on which the image represented by the first job information is drawn on the first surface by exposing the first surface under the exposure conditions indicated by, the corresponding information An image represented by the second job information by exposing the second side under the exposure conditions indicated by the second job information corresponding to the first job information used when drawing the image on the first side based on And second rendering means for drawing on the second surface.

According to the exposure drawing apparatus according to the present invention, an image is drawn on the first surface by exposing the first surface of the substrate to be exposed by the first drawing means.

Here, in the present invention, the first job information corresponding to the image information representing the image drawn on the first surface of the substrate to be exposed by the storage means and the exposure condition information representing the exposure condition, and the agent of the substrate to be exposed An image information representing an image drawn on a second surface opposite to the one surface and the second job information corresponding to the exposure condition information indicating the exposure condition, and a correspondence relationship between the first job information and the second job information Correspondence information is stored. And, in the present invention, the first drawing means is exposed by the first job information on the first surface by exposing the first surface at an upward angle under the exposure conditions indicated by the first job information by the second drawing means. When an image is drawn on the second surface of the substrate to be imaged on which the image is drawn, the second job information corresponding to the first job information used when drawing the image on the first side based on image correspondence information By exposing the second surface under the indicated exposure conditions, an image represented by the second job information is drawn on the second surface.

In this way, according to the exposure drawing apparatus of the present invention, the first side is obtained by using the corresponding information that correlates the first job information for drawing the image on the first side and the second job information for drawing the image on the second side. When an image is drawn on the second side using the second job information corresponding to the first job information used when drawing the image, when drawing images on both sides of the substrate to be exposed, images that do not correspond to each other on each side are drawn. It can prevent drawing.

Further, the exposure drawing apparatus according to the present invention includes a first storage area in which the storage means stores the first job information and a second storage area in which the second job information is stored, and the corresponding information is stored in the first. It may be stored in either the storage area or the second storage area. Accordingly, it is possible to simply select job information corresponding to each other on each side.

On the other hand, in order to achieve the above object, the exposure drawing system according to the present invention is configured to store first job information corresponding to image information representing an image drawn on a first surface of an exposed substrate and exposure condition information representing an exposure condition. 1 storage means, first rendering means for drawing an image represented by the first job information on the first side by exposing the first side under the exposure conditions indicated by the first job information, and the first The first exposure drawing apparatus including transmission means for transmitting information indicating the first job information used when the image is drawn on the first surface by the drawing means, and the first surface of the substrate to be exposed are opposite. The second job information to which the image information representing the image to be drawn on the second second surface and the exposure condition information representing the exposure condition are correlated, and the corresponding information representing the correspondence relationship between the first job information and the second job information are stored. Second storage means, receiving means for receiving information indicating the first job information transmitted by the transmitting means, and information corresponding to the first job information received by the receiving means in the corresponding information By means for determining an image to be drawn on the second surface and exposure conditions based on the second job information corresponding to the first job information, and by exposing the second surface with exposure conditions determined by the determination means It has a 2nd exposure drawing apparatus provided with the 2nd drawing means which draws the image determined by the said determination means on the said 2nd surface.

According to the exposure drawing system according to the present invention, the image information indicating the image drawn on the first surface of the substrate to be exposed by the first storage means of the first exposure drawing device corresponds to the exposure condition information indicating the exposure condition. Job information is memorized. Further, by exposing the first surface under the exposure conditions indicated by the first job information by the first drawing means of the first exposure drawing apparatus, the image represented by the first job information is drawn on the first surface. do. Further, information indicating the first job information used when an image is drawn on the first surface by the first drawing means is transmitted by the transmitting means of the first exposure drawing device.

On the other hand, in the exposure drawing system according to the present invention, image information and exposure conditions representing an image drawn on a second surface opposite to the first surface of the substrate to be exposed by the second storage means of the second exposure drawing device are used. The second job information to which the exposure condition information to be displayed is correlated, and the corresponding information indicating the correspondence relationship between the first job information and the second job information are stored. Further, information indicating the first job information transmitted by the transmitting means is received by the receiving means of the second exposure drawing apparatus. Further, the second job information corresponding to the first job information indicated by the information indicating the first job information received by the receiving means in the corresponding information by the determination means of the second exposure drawing apparatus Based on this, an image to be drawn on the second surface and exposure conditions are determined. Further, the image determined by the determining means is drawn on the second surface by exposing the second surface under the exposure conditions determined by the determining means by the second drawing means of the second exposure drawing apparatus.

In this way, according to the exposure drawing system of the present invention, the second exposure drawing apparatus provides corresponding information that corresponds to the first job information for drawing an image on the first surface and the second job information for drawing the image on the second surface. Remember, the second job information corresponding to the first job information used when drawing the image on the first side using the corresponding information is specified and used to draw the image on the second side, so that both sides of the substrate to be exposed are drawn. When drawing an image, it is possible to prevent drawing images that do not correspond to each other on each side.

In addition, the exposure drawing system according to the present invention is information in which the corresponding information corresponds to identification information for identifying the first job information and identification information for identifying the second job information corresponding to the first job information. , The information indicating the first job information may be the identification information of the first job information. Thereby, the information amount of the information transmitted from the 1st exposure drawing apparatus to the 2nd exposure drawing apparatus can be reduced compared with the case where the 1st job information itself is transmitted.

Further, in the exposure drawing system according to the present invention, the transmission means of the first exposure drawing apparatus may transmit information indicating the first job information only when the drawing by the first drawing means is normally ended. In this way, it is possible to prevent the imaging of images that do not correspond to each other on each surface when drawing images on both surfaces of the substrate to be exposed more reliably as compared with the case where the present invention is not applied.

Further, in the exposure drawing system according to the present invention, the transmission means of the first exposure drawing apparatus may transmit error information indicating that an error has occurred when the drawing by the first drawing means is abnormally ended. In this way, it is possible to prevent the imaging of images that do not correspond to each other on each surface when drawing images on both surfaces of the substrate to be exposed more reliably as compared with the case where the present invention is not applied.

Further, the exposure drawing system according to the present invention includes the first job information, the third job means for storing the second job information and the corresponding information, and the first job information stored by the third memory means. And a control device having second transmission means for transmitting to the first exposure drawing apparatus, and transmitting the second job information and the corresponding information to the second exposure drawing apparatus, wherein the first exposure drawing apparatus is And second receiving means for receiving the first job information transmitted by the second transmitting means, wherein the first drawing means of the first exposure drawing apparatus is received by the second receiving means. And third receiving means for drawing an image on the first surface using one job information, and for the second exposure drawing apparatus to receive the second job information and the corresponding information transmitted by the second transmitting means. And the second determining means of the second exposure drawing apparatus determines the image and exposure conditions to be drawn on the second surface using the second job information and the corresponding information received by the third receiving means. You may do it. Accordingly, the entire system can be managed comprehensively by the control device.

Further, the exposure drawing system according to the present invention further includes receiving means for the control device to receive input of the first job information, the second job information, and the corresponding information, and the third storage means of the control device. The first job information, the second job information, and the corresponding information received by the reception means may be stored. Accordingly, images corresponding to each other on each surface of the substrate to be exposed can be drawn using the job information input by the user.

On the other hand, in order to achieve the above object, the exposure drawing system according to the present invention stores first job information corresponding to image information representing an image drawn on a first surface of an exposed substrate and exposure condition information representing an exposure condition. , The relationship between the first job information and the second job information corresponding to the image information indicating the image drawn on the second surface opposite to the first surface of the substrate to be exposed and the exposure condition information indicating the exposure condition A first storage means for storing corresponding information indicating, an agent for drawing an image represented by the first job information on the first surface by exposing the first surface under the exposure conditions indicated by the first job information 1 drawing means, and transmitting means for transmitting the second job information corresponding to the first job information used when an image is drawn on the first surface by the first drawing means in the corresponding information. 1 Exposing the second surface under the exposure conditions indicated by the exposure drawing apparatus, the receiving means for receiving the second job information transmitted by the transmitting means, and the second job information received by the receiving means Thereby, it has the 2nd exposure drawing apparatus provided with the 2nd drawing means which draws the image represented by the said 2nd job information on the said 2nd surface.

According to the exposure drawing system according to the present invention, the image information indicating the image drawn on the first surface of the substrate to be exposed by the first storage means of the first exposure drawing device corresponds to the exposure condition information indicating the exposure condition. In addition to storing the job information, the first job information and the image information representing the image drawn on the second surface opposite to the first surface of the substrate to be exposed and the exposure condition information representing the exposure condition are associated. Correspondence information indicating the correspondence between two job information is stored. Further, by exposing the first surface under the exposure conditions indicated by the first job information by the first drawing means of the first exposure drawing apparatus, the image represented by the first job information is drawn on the first surface. do. In addition, the second job information corresponding to the first job information used when an image was drawn on the first surface by the first drawing means in the corresponding information by the transmission means of the first exposure drawing apparatus is shown. Information is transmitted.

On the other hand, in the exposure drawing system according to the present invention, the second job information transmitted by the transmitting means is received by the receiving means of the second exposure drawing apparatus. Further, the image represented by the second job information by exposing the second surface under the exposure conditions indicated by the second job information received by the receiving means by the second drawing means of the second exposure drawing apparatus. The second surface is drawn.

As described above, according to the exposure drawing system of the present invention, the first exposure drawing apparatus provides corresponding information that corresponds to the first job information for drawing an image on the first surface and the second job information for drawing the image on the second surface. Remember, the second job information corresponding to the first job information used when drawing the image on the first side using the corresponding information is transmitted to the second exposure drawing apparatus, so that images can be drawn on both sides of the substrate to be exposed. At this time, it is possible to prevent an image that does not correspond to each other on each side from being drawn.

In addition, in order to achieve the above object, the exposure drawing system according to the present invention is configured to store first job information corresponding to image information representing an image drawn on a first surface of a substrate to be exposed and exposure condition information representing an exposure condition. 4 storage means, first rendering means for drawing the image represented by the first job information on the first surface by exposing the first surface under the exposure conditions indicated by the first job information, and the first The first exposure drawing apparatus is provided with a third transmission means for transmitting information indicating the first job information used for drawing by the drawing means, and the first job information is opposite to the first surface of the substrate to be exposed. The second job information to which the image information representing the image to be drawn on the second second surface and the exposure condition information representing the exposure condition are correlated, and the corresponding information representing the correspondence relationship between the first job information and the second job information are stored. A fifth storage means, fourth receiving means for receiving information indicating the first job information transmitted by the third transmitting means, and the first job information received by the fourth receiving means in the corresponding information. Information indicating the second job information transmitted by the fourth transmission means, and a control device provided with fourth transmission means for transmitting the second job information corresponding to the first job information indicated by the information indicated. An image represented by the second job information by exposing the second surface under exposure conditions represented by fifth receiving means for receiving the information, and information representing the second job information received by the fifth receiving means It has the 2nd exposure drawing apparatus provided with the 2nd drawing means which draws on the said 2nd surface.

According to the exposure drawing system according to the present invention, the image information indicating the image drawn on the first surface of the substrate to be exposed by the fourth storage means of the first exposure drawing device corresponds to the exposure condition information indicating the exposure condition. Job information is memorized. Further, by exposing the first surface under the exposure conditions indicated by the first job information by the first drawing means of the first exposure drawing apparatus, the image represented by the first job information is drawn on the first surface. do. In addition, information indicating the first job information used for drawing by the first drawing means is transmitted by the third transmitting means of the first exposure drawing device.

On the other hand, in the exposure drawing system according to the present invention, the first job information by the fifth storage means of the control device, and the image information indicating the image drawn on the second surface opposite to the first surface of the substrate to be exposed, The second job information to which exposure condition information indicating the exposure condition is associated, and the corresponding information to indicate the correspondence relationship between the first job information and the second job information are stored. Further, information indicating the first job information transmitted by the third transmitting means is received by the fourth receiving means of the control device. Further, the second job information corresponding to the first job information indicated by the information indicating the first job information received by the fourth receiving means in the corresponding information by the fourth transmitting means of the control device. Is transmitted.

Further, in the exposure drawing system according to the present invention, information indicating the second job information transmitted by the fourth transmitting means is received by the fifth receiving means of the second exposure drawing apparatus, and the second exposure drawing apparatus is configured to The image represented by the second job information is exposed to the second by exposing the second surface under exposure conditions indicated by information representing the second job information received by the fifth receiving means by the two drawing means. It is drawn on the cotton.

In this way, according to the exposure drawing system of the present invention, the control device stores corresponding information that associates the first job information for drawing an image on the first surface with the second job information for drawing an image on the second surface, Since the second job information corresponding to the first job information used when drawing an image on the first surface received from the first exposure drawing apparatus using the above-described corresponding information is transmitted to the second exposure drawing apparatus, the exposure drawing apparatus is new. When images are drawn on both surfaces of the substrate to be exposed without adding a function, it is possible to prevent images that do not correspond to each other from being drawn on each side.

Further, in the exposure drawing system according to the present invention, marks are formed in order to determine the exposure conditions, the size of the substrate to be exposed, the number of exposure targets of the substrate to be exposed, and the imaging area of the image on the substrate to be exposed. In this case, at least one of the arrangement pattern of the mark and the type of photosensitive material of the substrate to be exposed may be included. Thereby, an image can be drawn under exposure conditions suitable for each surface of the substrate to be exposed.

On the other hand, in order to achieve the above object, the program according to the present invention is based on first job information corresponding to image information representing an image drawing a computer on the first surface of the substrate to be exposed and exposure condition information representing an exposure condition. First rendering means for drawing an image represented by the first job information on the first surface by exposing the first surface under the exposure conditions indicated; and the first by means of exposure conditions indicated by the first job information. When an image is drawn on the second surface of an exposed substrate on which the image represented by the first job information is drawn on the first surface by exposing one surface, the first job information and the In the corresponding information indicating the correspondence relationship between the image information indicating the image drawn on the second surface opposite to the first surface and the second job information indicating the exposure condition information indicating the exposure condition, the image is displayed on the first surface. A second drawing an image represented by the second job information on the second surface by exposing the second surface under exposure conditions indicated by the second job information corresponding to the first job information used when drawing. It functions as a drawing means.

Therefore, according to the program according to the present invention, the computer can be operated similarly to the exposure drawing device and the exposure drawing system according to the present invention. It is possible to prevent drawing images that do not correspond to each other on each side.

Further, in order to achieve the above object, the exposure drawing method according to the present invention represents an image drawn on the first surface by first drawing means for drawing an image on the first surface by exposing the first surface of the substrate to be exposed First job information to which image information and exposure condition information indicating exposure conditions correspond, image information indicating an image drawn on a second surface opposite to the first surface of the substrate to be exposed, and exposure condition information indicating exposure conditions The second job information corresponding to, and the storage step for storing in the storage means the corresponding information indicating the corresponding relationship between the first job information and the second job information, and the first job information by the first drawing means When an image is drawn on the second surface of the substrate to be exposed on which the image represented by the first job information is drawn on the first surface by exposing the first surface under the indicated exposure conditions, based on the corresponding information The image represented by the second job information is exposed by exposing the second side under the exposure conditions indicated by the second job information corresponding to the first job information used when drawing the image on the first side. It has a 2nd drawing step of drawing on the 2nd surface.

Therefore, the exposure drawing method according to the present invention acts in the same way as the exposure drawing device and the exposure drawing system according to the present invention. In this way, it is possible to prevent images that do not correspond to each other from being drawn.

(Effects of the Invention)

ADVANTAGE OF THE INVENTION According to this invention, when drawing an image on both surfaces of a to-be-exposed board|substrate, it has the effect that it can prevent drawing images which do not correspond to each other on each surface.

1 is a schematic plan view showing the overall configuration of an exposure drawing system according to an embodiment.
It is a perspective view which shows the structure of a 1st exposure drawing apparatus and a 2nd exposure drawing apparatus by embodiment.
3A is a schematic plan view showing an exposure area by an exposure head according to an embodiment and an arrangement pattern of the exposure head.
3B is a schematic plan view showing an image area of an image drawn on the substrate to be exposed by the exposure head according to the embodiment.
4 is a partially broken perspective view showing the configuration of an inverting device according to the embodiment.
It is a block diagram which shows the structure of the electric system of the 1st exposure drawing apparatus and 2nd exposure drawing apparatus by embodiment.
6 is a block diagram showing the configuration of the electric system of the control device according to the embodiment.
7A is a schematic diagram showing an example of job information according to the first and second embodiments.
7B is a schematic diagram showing an example of job information according to the first and second embodiments.
8 is a flowchart showing the flow of processing of the job setting processing program according to the first embodiment.
9 is a configuration diagram showing a configuration example of a job input screen according to the first embodiment.
It is a schematic diagram provided for description of the exposure drawing process by the exposure drawing system which concerns on 1st Embodiment.
11 is a flowchart showing the flow of processing of the first job execution processing program according to the first embodiment.
12 is a flowchart showing the flow of processing of the second job execution processing program according to the first embodiment.
13 is a flowchart showing the flow of processing in the job setting processing program according to the second embodiment.
14 is a flowchart showing the flow of processing of the first job execution processing program according to the second embodiment.
15 is a flowchart showing the flow of processing in the job selection processing program according to the second embodiment.
16 is a flowchart showing the flow of processing of the second job execution processing program according to the second embodiment.
17A is a schematic diagram showing an example of job information according to the third embodiment.
17B is a schematic diagram showing an example of job information according to the third embodiment.
18 is a flowchart showing the flow of processing in the job setting processing program according to the third embodiment.
It is a schematic diagram provided for description of the exposure drawing process by the exposure drawing system which concerns on 3rd Embodiment.
20 is a flowchart showing the flow of processing of the second job execution processing program according to the third embodiment.
21 is a configuration diagram showing a configuration example of a job selection screen according to the third embodiment.

[First Embodiment]

Hereinafter, the exposure drawing apparatus according to the embodiment will be described in detail with reference to the accompanying drawings. In addition, in each embodiment, the case where the present invention is applied to an exposure drawing system in which an image showing a circuit pattern is drawn by exposing a light beam to a substrate to be exposed (the substrate to be exposed (C) to be described later) is described as an example. Further, the substrate to be exposed C is a flat substrate such as a printed wiring board or a glass substrate for a flat panel display.

As shown in FIG. 1, the exposure drawing system 1 by this embodiment is the 1st exposure drawing apparatus 2 which exposes the 1st surface of the to-be-exposed board|substrate C, and the to-be-exposed board|substrate C It is equipped with the 2nd exposure drawing apparatus 3 which exposes to the 2nd surface opposite to the 1st surface of the. Moreover, the exposure drawing system 1 is provided between the 1st exposure drawing apparatus 2 and the 2nd exposure drawing apparatus 3, and the inverting apparatus 4 which reverses the front and back of the to-be-exposed substrate C, and the pinot A control device 5 for controlling exposure to the first and second surfaces of the optical substrate C is provided.

In addition, between the first exposure drawing device 2 and the control device 5, and between the second exposure drawing device 3 and the control device 5 are respectively connected by a wired cable 8a, and the control device 5 Communicates between the first exposure drawing device 2 and the second exposure drawing device 3 through a wired cable 8a. Similarly, the first exposure drawing device 2 and the second exposure drawing device 3 are connected by a wired cable 8b, and each of these exposure drawing devices communicates through a wired cable 8b.

Next, the structures of the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 according to the present embodiment will be described. In addition, since the 1st exposure drawing apparatus 2 and the 2nd exposure drawing apparatus 3 have the same structure, the 1st exposure drawing apparatus 2 is demonstrated here, and to the 2nd exposure drawing apparatus 3 The description is omitted.

2, the 1st exposure drawing apparatus 2 by this embodiment is equipped with the stage 10 of the flat plate shape for fixing the to-be-exposed board|substrate C. As shown in FIG. In addition, a plurality of suction holes (not shown) for sucking air are formed on the upper surface of the stage 10. When the substrate to be exposed C is mounted on the upper surface of the stage 10, the air between the substrate to be exposed C and the stage 10 is sucked through the suction hole, so that the substrate to be exposed C is the stage 10 It is adsorbed in vacuum.

Further, the stage 10 is supported by a flat plate-like base 12 movably installed on the top surface of the tabletop body 11. That is, one or a plurality (two in this embodiment) of guide rails 14 are provided on the upper surface of the base 11. The base 12 is supported so as to be freely movable along the guide rail 14, and is driven and moved by a drive mechanism (stage drive section 42 to be described later) constituted by a motor or the like. The stage 10 moves along the guide rail 14 in connection with the movement of the base 12.

In the following description, the direction in which the stage 10 moves is defined as the Y direction, the direction orthogonal to the Y direction in the horizontal plane is determined as the X direction, and the direction orthogonal to the Y direction in the vertical plane is determined as the Z direction.

On the upper surface of the aircraft 11, a gate-shaped gate 15 installed upright so as to span two guide rails 14 is installed. The substrate C to be loaded on the stage 10 moves by opening and closing the opening of the gate 15 along the guide rail 14. An exposure unit 16 for exposing the light beam toward the opening is attached to the top of the opening of the gate 15. When the stage 10 moves along the guide rail 14 and is located in the opening by the exposure unit 16, the light beam is exposed on the upper surface of the substrate C to be exposed on the stage 10. do.

The exposure section 16 according to the present embodiment includes a plurality of exposure heads 16a (16 in this embodiment). Each of the exposure heads 16a is arranged in a matrix shape in the exposure section 16. In addition, the optical fiber 18 drawn out from the light source unit 17 described later and the signal cable 20 drawn out from the image processing unit 19 described below are connected to the exposure section 16, respectively.

Each of the exposure heads 16a has a digital micromirror device (DMD) as a reflective spatial light modulation element. The exposure head 16a modulates the light beam from the light source unit 17 by controlling the DMD based on image information input from the image processing unit 19. The 1st exposure drawing apparatus 2 exposes the to-be-exposed board|substrate C by irradiating this modulated light beam to the to-be-exposed board|substrate C. In addition, the spatial light modulation element is not limited to a reflection type, and may be a transmissive spatial light modulation element such as liquid crystal.

As shown in Fig. 3A, the image area P1, which is the area exposed by the exposure head 16a, has a rectangular shape inclined at a predetermined inclination angle with respect to the movement direction (Y direction) of one side of the transition stage 10. In addition, in FIG. 3A, only a part of the plurality of exposure heads 16a according to the present embodiment is shown. In addition, when the light beam is exposed to the substrate C to be exposed by the exposure head 16a when the stage 10 moves the opening of the gate 15, as shown in FIG. 3B, as the stage 10 moves In the exposed substrate C, a region P2 in which strip-shaped exposure is completed is formed for each exposure head 16a. Each of the exposure heads 16a arranged in a matrix shape is arranged by shifting the length of the long side of the image area P1 by a distance of a natural multiple (1 time in this embodiment) in the X direction. Then, each of the regions P2 where the exposure is completed is formed by partially overlapping the regions P2 where the adjacent exposure is completed.

As shown in Fig. 2, a gate-shaped gate 22 is installed on the upper surface of the base 11 so as to hang the two guide rails 14. The substrate C to be loaded on the stage 10 moves by opening and closing the opening of the gate 22 along the guide rail 14.

On the upper portion of the opening portion of the gate 22, one or a plurality of photographing portions 23 for photographing the opening portions are attached. The imaging unit 23 is a CCD camera or the like incorporating a strobe with a very short light emission time. In addition, the rail 23a is installed in the upper portion of the opening portion of the gate 22 along a direction (X direction) perpendicular to the moving direction (Y direction) of the stage 10 in a horizontal plane, and the photographing unit 23 is provided. Each is guided by a rail 23a and is provided to be movable. When the stage 10 is moved along the guide rail 14 and positioned in the opening by the photographing unit 23, the top surface of the substrate C to be loaded on the stage 10 is photographed.

1 and 2, the first exposure drawing device 2 is a first conveying unit 6 for conveying the substrate C to be brought in from outside to a predetermined position of the first exposure drawing device 2 ), and a second conveying portion 7 for conveying the substrate C to be exposed from the first exposure drawing device 2 to a predetermined position of the inverting device 4. Similarly, the 2nd exposure drawing apparatus 3 is the 1st conveyance part 6 which conveys the to-be-exposed board|substrate C from the inversion apparatus 4 to the predetermined position of the 2nd exposure drawing apparatus 3, and the to-be-exposed board|substrate ( A second conveying section 7 for conveying C) to the outside of the second exposure drawing apparatus 3 is provided.

The 1st conveyance part 6 and the 2nd conveyance part 7 have a some rotation roller and the drive motor which rotates the said rotation roller. Each of the plurality of rotating rollers is installed in parallel, and one end of the rotating roller is attached with a sprocket or a pulley receiving rotational force transmitted by a belt or wire. As a means for transmitting the rotational force of the drive motor that rotates the rotating roller, a transmission method using a cylindrical magnet other than a belt or wire can also be employed.

2, the 1st exposure drawing apparatus 2 conveys the to-be-exposed board|substrate C conveyed to the predetermined position by the 1st conveyance part 6 from the said predetermined position to the stage 10. An auto carrier hand (hereafter referred to as an AC hand) 24 is provided. The AC hand 24 is formed in a flat shape, and is provided to be movable in the X and Z directions. A plurality of suction holes 25 for sucking air are formed on the lower surface of the AC hand 24. The AC hand 24 sucks air between the AC hand 24 and the substrate C to be exposed when the lower surface of the AC hand 24 moves to a position in contact with the upper surface of the substrate C to be exposed. ), the substrate to be exposed C is vacuum adsorbed on the lower surface of the AC hand 24 to be adsorbed and supported. In addition, when the AC hand 24 moves to the upper surface of the stage 10 while the substrate to be exposed C is adsorbed and supported on the lower surface of the AC hand 24, the substrate to be exposed C is extruded downward. Thus, a pressing portion 26 that is movable in the Z direction to press against the stage 10 is provided.

The AC hand 24 of the first exposure drawing apparatus 2 adsorbs and supports the unexposed substrate C that has been conveyed to the first conveying part 6, moves upward, and moves it to the upper surface of the stage 10. Load. In addition, the AC hand 24 of the first exposure drawing apparatus 2 is moved upward by adsorbing and supporting the exposed substrate C to which the first surface loaded on the upper surface of the stage 10 is exposed, and exposed The substrate C is moved to the second transfer section 7. The exposed substrate C, on which the first surface moved to the second conveying part 7 is exposed, is carried out to the outside of the first exposure drawing device 2 by the second conveying part 7.

In addition, the AC hand 24 of the second exposure drawing apparatus 3 adsorbs and supports the exposed substrate C, which has been exposed to the first conveyance section 6, to the first conveyance section 6, and moves upward. The substrate C to be exposed is mounted on the upper surface of the stage 10. In addition, the AC hand 24 of the second exposure drawing apparatus 3 moves upward by adsorbing and supporting the exposed substrate C on which the first and second surfaces stacked on the upper surface of the stage 10 are exposed. And the substrate to be exposed C is moved to the second conveying portion 7. The exposed substrate C on which the first surface and the second surface that have moved to the second conveying part 7 have been exposed is taken out of the exposure drawing system 1 by the second conveying part 7.

Next, the configuration of the inverting device 4 according to the present embodiment will be described.

As shown in Fig. 4, the inverting device 4 is provided with a flat-shaped sub-frame 30 axially supported by the rotation shaft L. The sub-frame 30 reverses the front and back of the substrate C by rotating it 180 degrees with the substrate C being held therein.

In addition, as shown in FIG. 4, the substrate to be exposed C is brought into the inside of the sub-frame 30 on the side of the side of the sub-frame 30 where the first exposure drawing apparatus 2 is located. The inlet 31 is formed. In addition, a plurality of roller pairs 34 driven by a motor 33 is installed inside the subframe 30. The roller pair 34 conveys the to-be-exposed board|substrate C accommodated in the inside of the sub frame 30 in the pinched state. The substrate C to be exposed is conveyed to the inside of the sub-frame 30 through the inlet 31 by the roller pair 34, and the front and rear are reversed by the rotation of the sub-frame 30, and thus the roller pair 34 ) Is transferred to the outside of the sub-frame 30 through the inlet 31. In addition, the sub-frame 30 is rotated 180 degrees again to bring the next substrate to be exposed (C) therein after the removal of the substrate to be exposed (C).

Next, the structures of the electric systems of the first exposure drawing device 2 and the second exposure drawing device 3 according to the present embodiment will be described. In addition, since the 1st exposure drawing apparatus 2 and the 2nd exposure drawing apparatus 3 have the structure of the same electric system, the 1st exposure drawing apparatus 2 is demonstrated here, and the 2nd exposure drawing apparatus ( The description of 3) is omitted.

As shown in FIG. 5, the 1st exposure drawing apparatus 2 is provided with the system control part 40 which is each electrically connected to each part of the apparatus, and the 1st exposure drawing apparatus 2 is provided by this system control part 40. ) Are controlled collectively. In addition, the first exposure drawing device 2 includes a job storage unit 41, a stage driving unit 42, a display device 43, an input device 44, an imaging driving unit 46, and an external input/output unit 48. Have

The system controller 40 has a central processing unit (CPU), random access memory (RAM), read only memory (ROM), and a hard disk drive (HDD). Further, the system control unit 40 emits light beams from the light source unit 17 at the timing according to the movement of the stage 10 by the CPU, and outputs corresponding image information by the image processing unit 19. . The system controller 40 controls exposure of the light beam to the substrate C to be exposed by the exposure head 16a in this way.

The job storage unit 41 has RAM or a nonvolatile memory, and stores job information indicating a job to be executed. In the present embodiment, the same image is exposed on the first surface of the single or multiple exposed substrates C under the same conditions, and the same image is applied to the second surface of the exposed substrate C. It is a request for a batch of exposure processing in which exposure is drawn under the same conditions. Note that the details of the job information will be described later. In the present embodiment, the job storage unit 41 stores job information of the job to be executed in a list format, but is not limited to this, and may be stored in a cue format.

The stage drive unit 42 has a drive mechanism composed of a motor, a hydraulic pump, or the like, and drives the stage 10 under control of the system control unit 40.

The display device 43 is a display means such as a liquid crystal display that displays various information under the control of the system control unit 40.

The input device 44 is an input means such as a touch sensor or an operation button for inputting various information by user manipulation.

The photographing driving unit 46 has a driving mechanism composed of a motor or a hydraulic pump or the like, and drives the photographing unit 23 under the control of the system control unit 40.

The external input/output unit 48 performs input/output of various information between various information processing devices including a second exposure drawing device 3 and a control device 5 connected to the first exposure drawing device 2. In addition, the external input/output unit 48 of the second exposure drawing device 3 includes various information processing devices including a first exposure drawing device 2 and a control device 5 connected to the second exposure drawing device 3. Various information is input/output between and.

Next, the configuration of the electric system of the control device 5 according to the present embodiment will be described.

As shown in FIG. 6, the control apparatus 5 is equipped with the control part 50 which controls the exposure drawing process in the exposure drawing system 1. In addition, the control device 5 includes a storage unit 51 having a ROM, an HDD, or the like for storing programs and various data necessary for exposure drawing processing by the control unit 50. Further, the storage unit 51 also stores the job information, the job setting processing program, the first job execution processing program, the second job execution processing program, and the job selection processing program of the second embodiment.

Further, the control device 5 is a display unit 52 such as a liquid crystal display that displays various information under the control of the control unit 50, and an input unit 53 such as a keyboard or mouse for inputting various information by user manipulation. It is equipped with. In addition, the control device 5 is provided with a communication interface 54 that transmits and receives various information to and from the first exposure drawing device 2 and the second exposure drawing device 3 under the control of the control unit 50. have.

Here, the control device 5 according to the present embodiment accepts input of information regarding a job by a user operation. In addition, when the control device 5 receives input of information on a job, it generates and transmits job information corresponding to the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3, respectively. The first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 according to this embodiment store the job information received when the job information is received in the job storage unit 41, and store the contents of the stored job. Therefore, exposure drawing processing is performed on the substrate C to be exposed. At this time, when the first exposure drawing apparatus 2 according to the present embodiment stores a plurality of job information, it executes the jobs indicated by each job information in the order in which each job information was received. Further, the second exposure drawing apparatus 3 according to the present embodiment sequentially executes jobs corresponding to the jobs executed in the first exposure drawing apparatus 2.

At the time of generation of the job information, the control device 5 generates the job information 60A for drawing an image on the first surface of the substrate C to be exposed on the first exposure drawing apparatus 2, and the second exposure drawing apparatus. In (3), job information 60B for drawing an image on the second surface of the substrate C to be exposed is respectively generated and stored in the storage unit 51. That is, even if the job is related to the same exposed substrate C, the exposure drawing processing is performed on the first and second surfaces with separate exposure drawing devices, respectively, so that the job information 60A for the first surface and the second The job information 60B for the surface is separately generated and stored.

As the example of the job information 60A, 60B, as shown in Figs. 7A and 7B, the job identification information 61, the image information 61a, the exposure condition information 62, and the relative information 63, respectively, It is information corresponding to each job. Further, the job identification information 61 is information for identifying each job. Further, the image information 61a is information indicating an image to be drawn. Further, the exposure condition information 62 is information indicating exposure conditions when exposing a light beam in order to draw an image corresponding to the substrate C to be exposed. The exposure condition information 62 according to the present embodiment is a substrate size information indicating the substrate size of the substrate C to be imaged (hereinafter referred to as "target substrate"), and a drawing indicating the number of images of the target substrate. It contains purchase information. In addition, the exposure condition information 62 according to the present embodiment includes mark information in which coordinates of the mark arrangement pattern are represented by coordinates when a mark for determining a drawing area of an image corresponding to the target substrate is formed, and the target substrate And photosensitive material type information indicating the type of photosensitive material. In addition, the arrangement pattern of the marks formed in the target substrate is mirrored in the first and second surfaces. However, the information included in the exposure condition information 62 is not limited to these, and any information may be used as long as it is information used in performing the exposure drawing process, such as information indicating the intensity of the light beam and information indicating the moving speed of the stage 10. Information is fine. The relative information 63 is information indicating job identification information of the other party's jobs (hereinafter also referred to as "other job") corresponding to each other on the first and second sides.

When the operator wants to execute the job on the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3, each information included in the job information 60A, 60B through the input unit 53 controls the control device 5 ). In accordance with this, the control device 5 generates job information 60A for the first surface and job information 60B for the second surface based on each inputted information and stores the job information in the storage unit 51 for storage. Processing is performed.

Next, with reference to FIG. 8, the operation of the exposure drawing system 1 according to the present embodiment will be described. 8 is a flowchart showing the flow of processing of the job setting processing program executed by the control unit 50 of the control device 5 when an execution instruction is input through the input unit 53. The program is stored in advance in a predetermined area of the ROM of the storage unit 51.

First, in step S101, control is performed to display the job input screen for assisting the user in inputting information on the job on the display unit 52. As shown in Fig. 9, the job input screen 70 according to the present embodiment is drawn on the first surface image input field 71 for inputting image identification information indicating the image to be drawn on the first surface, and on the second surface. It has a second surface image input field 72 for inputting image identification information representing an image. The image identification information is a file name of a file containing image information or a URL (Uniform Resource Locator) indicating a storage location of the image file. Further, the job input screen 70 has a substrate type input field 73 for inputting substrate type information indicating the substrate type of the substrate C to be applied to the job to be input. In addition, the job input screen 70 has a drawing number input field 74 for inputting drawing number information indicating the number of writings of the substrate C to be exposed in the target job. Further, the job input screen 70 has an input end button 75 for designating information indicating that the input is ended. In addition, when inputting each information in each input field, a selection candidate is displayed by a list display or the like for each input field, and one of the displayed selection candidates may be selected through the input unit 53. The user inputs information corresponding to each input field using the input unit 53, and then designates the input end button 75.

Thus, in the next step S103, the input wait button 75 is waited until it is designated, and the wait is waited until the input of the job information is finished.

In the next step S105, job information 60A, 60B is generated based on each information input in each input field, and the generated job information 60A, 60B is stored in the storage unit 51. At this time, the control unit 50 sets the image information of the image indicated by the information input in the first surface image input field 71 as the image information 61a, and the information input in the number of drawing input fields 74 as the rendering number information. , The information input in the second-side image input field 72 is regarded as relative information 63. Then, the control unit 50 generates the job information 60A of the first surface. Further, in the job information 60A, the substrate size information, mark information, and photosensitive material type information are determined from the information entered in the substrate type input field 73. That is, in the exposure drawing system 1 according to the present embodiment, the substrate size information, the mark information, and the photosensitive material type information are respectively stored in the storage unit 51 for each type of substrate of the substrate C to be exposed. Then, in the exposure drawing system 1 according to the present embodiment, the substrate size information, mark information, and photosensitive material type information corresponding to the substrate type indicated by the information input in the substrate type input field 73 are obtained from the job information 60A. It is set as substrate size information, mark information, and photosensitive material type information.

In addition, the image information of the image indicated by the information input in the second-side image input field 72 is used as the image information 61a, the information input in the number of drawing input fields 74 is used as the number of drawing information, and the first-side image The information entered in the input field 71 is used as the relative information 63 to generate the job information 60B on the second side. Further, in the job information 60B, the substrate size information, mark information, and photosensitive material type information are determined and applied in the same manner as the job information 60A.

In the next step S107, the job information 60A of the first surface generated by the processing in step S105 is transmitted to the first exposure drawing apparatus 2 through the wired cable 8a. In contrast, the first exposure drawing apparatus 2 stores the received job information 60A in its own job storage unit 41.

In the next step S109, after the job information 60B of the second surface generated by the processing in step S105 is transmitted to the second exposure drawing apparatus 3 through the wired cable 8a, the job setting processing program is transmitted. Ends. In contrast, the second exposure drawing apparatus 3 stores the received job information 60B in its own job storage unit 41.

In this way, in the exposure drawing system 1 according to the present embodiment, as shown in Fig. 10, the control device 5 based on the information input by the user, the job information 60A on the first side, and the second side The job information 60B is generated. Then, in the job information 60A and the job information 60B on the second side, the relative information 63 is set as the job identification information attached to the corresponding job information, respectively, and the corresponding job information ( 60A, 60B) correspond to each other. Further, the job identification information 61 and the relative information 63 in each of the job information 60A, 60B correspond to the correspondence between the job information 60A on the first side and the job information 60B on the second side. Corresponds to the corresponding information indicated.

When the first exposure drawing apparatus 2 receives and stores the job information 60A from the control device 5, the first exposure drawing apparatus 2 removes the substrate to be exposed C based on the job information 60A stored according to a predetermined user operation. A first job execution process for drawing an image on one surface is performed.

Next, the operation of the first exposure drawing apparatus 2 when executing the first job execution process according to the present embodiment will be described with reference to FIG. 11. 11 is a flowchart showing the flow of processing of the first job execution processing program executed by the system control unit 40 of the first exposure drawing apparatus 2 at this time. The program is stored in advance in a predetermined area of the ROM included in the system control unit 40. Note that the timing at which the program is executed is not limited to the timing according to a predetermined user operation, but may be a timing at which the job information 60A is received.

First, in step S200, control is performed to display the job information 60A stored in the job storage unit 41 on the display device 43. At this time, when the plurality of job information 60A is stored, the system control unit 40 performs control to display each job information 60A in a list format. The number of exposed substrates C indicated by the number of pieces of drawing information of the job information 60A to be executed is disposed on the upstream side of the first conveyance section 6 of the first exposure drawing device 2. Then, the user inputs an instruction to execute the job indicated by the specified job information 60A by selecting and specifying the job information 60A displayed through the input device 44.

In the next step S201, it waits until the execution instruction of the job is input, and in the next step S203, from the job information 60A corresponding to the job in which execution is instructed (hereinafter referred to as "execution first side job"). Acquire image information. Further, in the present embodiment, when acquiring image information of an image to be drawn, image information (image information of the job information 60A) stored in its own job storage unit 41 is acquired, but is not limited to this. . That is, the image identification information may be stored in the job information 60A, and image information of an image drawn on the basis of the image identification information may be obtained from the control device 5 or an external storage device.

In the next step S205, the exposure conditions when drawing an image on the substrate to be exposed C are determined by execution of the execution first surface job. At this time, the system control unit 40 determines the exposure conditions based on the substrate size information, drawing number information, mark information, and photosensitive material type information in the job information 60A of the running first surface job. In this embodiment, first, the system control unit 40 photographs the mark formed on the substrate C to be exposed by the photographing unit 23, and measures the position of the mark from the image obtained by photographing. Further, the system control unit 40 determines a drawing area for drawing an image based on the position of the measured mark. In addition, the system control unit 40 transforms the image to be drawn on the basis of the determined size or shape of the drawing area. Then, the system controller 40 determines the intensity of the light beam to be exposed, the moving speed of the stage 10 (or the exposure time of the light beam), etc. according to the type of the photosensitive material indicated by the photosensitive material type information.

In the next step S207, an exposure drawing process in which an image is drawn by exposing a light beam to the substrate C to be exposed in accordance with the determined exposure conditions. In the exposure drawing process according to the present embodiment, the system control unit 40 draws the modified image on the substrate C to be exposed by exposing the modulated light beam based on the deformed image with the exposure head 16a.

In the next step S209, it is determined whether or not a predetermined error has occurred. At this time, the system control unit 40 is deformed or defective in positioning of the substrate C to be exposed, a failure of a portion used when performing exposure imaging of the light source unit 17, the image processing unit 19, the exposure unit 16, and the like. It is judged that an error has occurred, for example, when the exposure writing process is stopped in the middle. When affirmative determination is made in step S209, the flow advances to step S211, and error information indicating that an error has occurred is transmitted to the control device 5 to end the first job execution processing program. In contrast, the control device 5 that has received the error information performs control to display the error information on the display unit 52. In addition, the system control unit 40 may transmit error information to the second exposure drawing apparatus 3. On the other hand, the second exposure drawing apparatus 3 that has received the error information performs control to display the error information on the display device 43, or job information 60B of the job corresponding to the execution first surface job where the error occurred. ) Is subtracted from the number of drawing.

On the other hand, when it becomes negative determination by step S209, it transfers to step S213.

In step S213, it is determined whether or not the exposure drawing process for the single substrate to be exposed C is completed. If a negative determination is made in step S213, the process returns to step S209, whereas in the case of a positive determination, processing proceeds to step S215.

In step S215, information indicating the execution first surface job is transmitted to the second exposure drawing apparatus 3. At this time, the system control unit 40 transmits the job identification information 61 in the job information 60A of the running first surface job to the second exposure drawing apparatus 3. In addition, in the present embodiment, the job identification information 61 is transmitted from the first exposure drawing apparatus 2 to the second exposure drawing apparatus 3, but is not limited to this. In other words, the information to be transmitted may be information that the second exposure drawing apparatus 3 can specify to execute the first surface job, so that the job information 60A itself may be, for example.

In the next step S217, it is determined whether or not all the processes included in the execution first side job have been completed. At this time, the system control unit 40 determines that the execution of the first surface job is completed when the exposure imaging process for the substrate to be exposed C of the number of drawing indicated by the number of drawing information of the exposure condition information 62 is completed. .

If a negative determination is made in step S217, the process returns to step S209. If a positive determination is made, the first job execution processing program is ended.

When the second exposure drawing apparatus 3 according to the present embodiment receives the job identification information of the running first surface job from the first exposure drawing apparatus 2, the job identification information and the job received from the control device 5 Based on the information 60B, a second job execution process is performed for drawing an image on the second surface of the substrate C to be exposed.

Next, with reference to FIG. 12, the action of the 2nd exposure drawing apparatus 3 at the time of performing the 2nd job execution process by this embodiment is demonstrated. 12 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time. The program is stored in advance in a predetermined area of the ROM included in the system control unit 40. The timing at which the program is executed is not limited to the timing at which job identification information is received, but may be a timing at which a predetermined execution instruction is input by the user through the input device 44.

Initially, in step S301, job information 60B indicating a job on the second side (hereinafter referred to as "executing second side job") corresponding to the job indicated by the job identification information of the received execution first side job. It is determined whether or not exists. At this time, the system control unit 40 is the job information 60B of the job information 60B stored in the job storage unit 41 and includes job identification information 61 of the first side job executed as the relative information 63 ( 60B) is determined.

When affirmative determination is made in step S301, the flow proceeds to step S303. On the other hand, when the negative determination is made in step S301, the process proceeds to step S311, which will be described later, and the error information indicating that the job to be executed does not exist is transmitted to the control device 5 to end the first job execution processing program. do.

In step S303, the image information of the image to be drawn on the substrate to be exposed in the job information 60B of the execution second surface job is acquired. At this time, the system control unit 40 acquires the image information of the image represented as the image information 61a in the job information 60B of the execution second surface job. Further, in the present embodiment, image information is stored in the storage unit 51 of the control device 5, and the second exposure drawing device 3 acquires image information from the control device 5, but is not limited to this. The image information may be stored in the storage means included in the second exposure drawing apparatus 3.

In the next step S305, the exposure conditions when drawing an image on the substrate to be exposed C in the job execution second surface job to be executed are set. At this time, the system control unit 40 sets exposure conditions based on the substrate size information, drawing number information, mark information, and photosensitive material type information in the job information 60B of the execution second surface job.

As an example, as shown in FIG. 10, in the first exposure drawing apparatus 2, the double-sided job A of the first side in the double-sided job in which images corresponding to both the first and second surfaces are drawn, It is assumed that job information 60A, 60B, etc. indicating the double-sided job B are stored. In addition, in the second exposure drawing apparatus 3, job information 60B indicating the double-sided job A on the second side corresponding to the double-sided job A on the first side, and the double-sided job B on the first side It is assumed that the job information 60B indicating the double-sided job B of the second side corresponding to is stored. In this state, when the double-sided job (B) of the first surface is executed in the first exposure drawing apparatus 2, the second exposure drawing apparatus 3 is the agent corresponding to the double-sided job B of the first side. The two-sided double-sided job B is to be executed.

In the next step S307, an exposure rendering process in which an image is drawn by exposing a light beam to the substrate C to be exposed in accordance with the set exposure conditions.

In the next step S309, it is determined whether or not an error has occurred in the execution second-side job. At this time, the system control unit 40 is a part used to perform exposure or deformation of the substrate C to be exposed or defective, positioning of the light source unit 17, the image processing unit 19, the exposure unit 16, and the like. It is judged that an error has occurred, for example, when the exposure drawing process is stopped halfway due to a failure or the like. When affirmative determination is made in step S309, the process advances to step S311, and the second job execution processing program is terminated by sending error information indicating to the control device 5 that an error occurred in the running job. On the other hand, when it becomes negative determination by step S309, it transfers to step S313.

In step S313, it is determined whether or not the exposure writing process for the substrate to be exposed C has been completed. If a negative determination is made in step S313, the process returns to step S309. If a positive determination is made, the process proceeds to step S315.

In the next step S315, it is determined whether or not the execution second side job has been completed. At this time, the system control unit 40 determines that the execution second surface job is completed when the exposure drawing process for the substrate to be exposed C of the number of drawing indicated in the drawing number information of the exposure condition information 62 is completed. When it becomes negative determination by step S314, it transfers to step S317.

In step S317, it waits until job identification information 61 for drawing an image of the next to-be-exposed substrate C in the execution second-side job is received.

In the next step S319, it is determined whether or not the received job identification information 61 is the same as the job identification information 61 of the execution second side job.

When affirmative determination is made in step S319, the process proceeds to step S309. On the other hand, when the negative determination is made in step S319, the process advances to step S311, and the error information indicating the purpose of receiving the job identification information 61 different from the job identification information 61 of the execution second side job is the control device (5). ) To terminate the first job execution processing program.

On the other hand, when affirmative determination is made in step S315, the first job execution processing program is ended.

Further, in the present embodiment, in step S215 of the first job execution processing program, the first exposure drawing apparatus 2 transmits the job identification information 61 of the running first surface job to the second exposure drawing apparatus 3, It is not limited to this. That is, in step S215, the first exposure drawing apparatus 2 may transmit the relative information 63 of the job information 60A of the running first surface job to the second exposure drawing apparatus 3. In this case, the job represented by the job information 60B having the relative information 63 received in step S301 of the second job execution processing program as the job identification information 61 is called an execution second-side job.

[Second Embodiment]

Hereinafter, the exposure drawing system 1 according to the second embodiment will be described in detail with reference to the accompanying drawings.

In the above-described first embodiment, information indicating the execution first surface job is transmitted from the first exposure drawing apparatus 2 to the second exposure drawing apparatus 3, and the job corresponding to the second exposure drawing apparatus 3 is selected and executed. do. On the other hand, in the second embodiment, information indicating the execution first surface job is transmitted from the first exposure drawing apparatus 2 to the control apparatus 5, and the job corresponding to the control apparatus 5 is selected, and the selected job is second exposure drawing. Send to device 3.

Note that the configuration of the exposure drawing system 1 according to the second embodiment is the same as that of the exposure drawing system 1 according to the first embodiment, and thus descriptions thereof are omitted here.

Next, the operation of the exposure drawing system 1 according to this embodiment will be described with reference to FIG. 13. 13 is a flowchart showing the flow of processing of the job setting processing program executed by the control unit 50 of the control device 5 of the exposure drawing system 1 when an execution instruction is input through the input unit 53. to be. The program is stored in advance in a predetermined area of the ROM of the storage unit 51.

First, in steps S401 to S405, the same processing as steps S101 to S105 of the first embodiment is performed.

In the next step S407, the generated job information 60A of the first surface is transmitted to the first exposure drawing apparatus 2 through the wired cable 8a, thereby ending the job setting processing program. The first exposure drawing apparatus 2 stores the received job information 60A of the first surface in the job storage unit 41.

When the first exposure drawing apparatus 2 stores the job information 60A, based on the job information 60A, the first job execution process of drawing an image on the first surface of the substrate C to be exposed is performed.

Next, the operation of the first exposure drawing apparatus 2 when executing the first job execution process according to the present embodiment will be described with reference to FIG. 14. 14 is a flowchart showing the flow of processing of the first job execution processing program executed by the system control unit 40 of the first exposure drawing apparatus 2 at this time. The program is stored in advance in a predetermined area of the ROM included in the system control unit 40. The timing at which the program is executed is not limited to the timing at which the job information 60A is received and stored, and may be a timing at which a predetermined execution instruction is input by the user through the input device 44.

In steps S500 to S513, the same processing as steps S201 to S213 of the first embodiment is performed.

In step S515, the job identification information of the running job is transmitted to the control device 5. At this time, the system control unit 40 transmits the job identification information 61 in the job information 60A of the running first surface job to the control device 5.

In step S517, the same processing as in step S217 of the first embodiment is performed, and the first job execution processing program is ended.

When the control device 5 according to the present embodiment receives the job identification information 61 from the first exposure drawing apparatus 2, the job identification information 61 captures the job on the second side corresponding to the execution first side job. And a job selection process to select based on the job information 60B stored in the storage unit 51.

Next, the operation of the control device 5 when executing the job selection processing according to the present embodiment will be described with reference to FIG. 15. 15 is a flowchart showing the flow of processing of the job selection processing program executed by the control unit 50 of the control device 5 at this time. The program is stored in advance in a predetermined area of the ROM of the storage unit 51. Further, the timing at which the program is executed is not limited to the timing at which the job identification information 61 of the execution first-side job is received, and may be a timing at which a predetermined execution instruction is input by the user through the input unit 53. .

First, in step S601, among job information 60B on the second side stored in the storage unit 51, corresponding to job information 60A on the first side having job identification information of the received execution first side job. The job information 60B on the second side is searched. At this time, the control unit 50 receives the job information 60B including the job identification information 61 of the first side job executed as the relative information 63 from the job information 60B stored in the storage unit 51. To search.

In the next step S603, as a result of the search, whether the job information 60B on the second side corresponding to the job information 60A on the first side having the received job first side job job identification information is present or not exists. To judge.

When affirmative determination is made in step S603, the process proceeds to step S605. On the other hand, when a negative determination is made in step S603, the process proceeds to step S607, and control is performed to display the error information indicating that the job information 60B of the corresponding second surface does not exist on the display unit 52.

In step S605, the job information 60B obtained as a result of the search is transmitted to the second exposure drawing apparatus 3 through the wired cable 8a. In contrast, the second exposure drawing apparatus 3 stores the received job information 60B of the second surface in the job storage unit 41. In addition, in the process of step S605, when the job information 60B obtained as a result of the search has already been transmitted to the second exposure drawing apparatus 3, only the job identification information 61 of the job information 60B is transmitted. You may do it. In this case, when the second exposure drawing apparatus 3 executes step S701 of the second job execution processing program described later, the received job identification information 61 is included in the job information 60B including the job identification information 61 as the job identification information 61. Image information of the image included as the image information 61a is acquired.

When the second exposure drawing apparatus 3 according to the present embodiment receives the job information 60B of the second surface from the control device 5, the substrate to be exposed C based on the received job information 60B A second job execution process of drawing an image on the second side of the screen is performed.

Next, the operation of the second exposure drawing apparatus 3 when executing the second job execution process according to this embodiment will be described with reference to FIG. 16. 16 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time. The program is stored in advance in a predetermined area of the ROM included in the system control unit 40. Note that the timing at which the program is executed is not limited to the timing at which job identification information of the job to be executed is received, and may be a timing at which a predetermined execution instruction is input by the user through the input device 44.

First, in step S701, image information of an image included as image information 61a in the received job information 60B is acquired.

In the following steps S703 to S717, the same processing as steps S305 to S319 of the first embodiment is performed.

[Third Embodiment]

Hereinafter, the exposure drawing system 1 according to the third embodiment will be described in detail with reference to the accompanying drawings.

In the first and second embodiments, images corresponding to each other on the first and second surfaces of the substrate C to be exposed are drawn using the job information 60A and 60B indicating the double-sided job. On the other hand, in the third embodiment, an image corresponding to the first and second surfaces of the substrate C to be exposed to each other, even when the single-sided job representing one of the first and second sides and the double-sided job are mixed. To draw.

Similar to the first embodiment, the control device 5 includes the job information 60A for drawing an image on the first surface of the substrate C to be exposed on the first exposure drawing device 2, and the second exposure drawing device. In (3), the job information 60B for drawing an image on the second surface of the substrate C to be exposed is stored in the storage unit 51.

17A and 17B, the job information 60A, 60B is information to which job identification information 61, exposure condition information 62, and relative information 63 correspond to each job, respectively. However, when the job to be set is the one-sided job, the relative information 63 is left blank. In the example shown in FIGS. 17A and 17B, the jobs of the job identification information C000001 and C000002 are single-sided jobs, respectively, and the job relative information 63 of the job identification information C000001 and C000002 is blank.

When the operator wants to execute the job in the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3, the control unit 5 inputs each information included in the job information 60A, 60B to the input unit 53 Enter through.

The control device 5 performs job setting processing for setting a job by storing the inputted information in the storage unit 51 as job information 60A for the first surface and job information 60B for the second surface.

Next, the operation of the exposure drawing system 1 according to this embodiment will be described with reference to FIG. 18. 18 is a flowchart showing the flow of processing of the job setting processing program executed by the control unit 50 of the control device 5 of the exposure drawing system 1 when an execution instruction is input through the input unit 53. to be. The program is stored in advance in a predetermined area of the ROM of the storage unit 51.

First, in steps S801 to S803, the same processing as steps S101 to S103 of the first embodiment is performed.

In step S805, at least one of the job information 60A, 60B is generated for each information input in each input field, and at least one of the generated job information 60A, 60B is stored in the storage unit 51. At this time, when information is input to both the first-side image input field 71 and the second-side image input field 72, the job to be set is a double-sided job and is the same as the step S105 of the first embodiment. Job information 60A and job information 60B on the second side are generated and stored. In addition, when information is input to only the first-side image input field 71 of the first-side image input field 71 and the second-side image input field 72, the job to be set is a single-sided job and the first-side job information ( Create only 60A) and remember. In addition, when information is input only to the second side image input field 72 of the first side image input field 71 and the second side image input field 72, the job to be set is a single-sided job and the second side job information ( 60B) to create and remember.

In the next step S807, it is determined whether or not the job to be set is a double-sided job. In the case of affirmative determination in step S807, the process proceeds to step S809. In the case of a negative determination, it is assumed that the job to be set is a single-sided job, and the procedure proceeds to step S813 described later.

In steps S809 and S811, the same processing as steps S107 and S109 of the first embodiment is performed, and this job setting processing program ends.

In step S813, it is determined whether or not the job to be set is a single-sided job of the first surface. When affirmative determination is made in step S813, the process advances to step S815 to perform the same processing as in step S107 of the first embodiment, and ends the job setting processing program.

On the other hand, when a negative determination is made in step S813, the process advances to step S817 to perform the same processing as in step S109 of the first embodiment, and ends this job setting processing program.

As shown in Fig. 19, the job information 60A for the first surface is transmitted to the first exposure drawing apparatus 2 and stored in the job storage section 41 of the first exposure drawing apparatus 2. Similarly, the job information 60B for the second surface is transmitted to the second exposure drawing apparatus 3 and stored in the job storage unit 41 of the second exposure drawing apparatus 3. At this time, the single-sided job and the double-sided job are stored in a mixed state.

When the first exposure drawing apparatus 2 stores the job information 60A, based on the job information 60A, the first job execution process of drawing an image on the first surface of the substrate C to be exposed is performed.

The 1st exposure drawing apparatus 2 by this 3rd embodiment performs the 1st job execution process similar to 1st embodiment.

When the second exposure drawing apparatus 3 receives the job identification information 61 transmitted by the first job execution process, the second exposure drawing apparatus 3 receives the job identification information 61 and the job information 60B received from the control device 5. Based on this, a second job execution process for drawing an image on the second surface of the substrate C to be exposed is performed.

Next, with reference to FIG. 20, the operation of the second exposure drawing apparatus 3 when executing the second job execution process according to the present embodiment will be described. 20 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time. The program is stored in advance in a predetermined area of the ROM included in the system control unit 40. In addition, the timing at which the program is executed is not limited to the received timing of job identification information of the job to be executed, and the predetermined execution instruction is input through the input device 44 by the user. Timing, etc. may be used.

First, in steps S301 to S319, the same processing as steps S301 to S319 of the first embodiment is performed.

However, in the third embodiment, when a negative determination is made in step S301, the process proceeds to step S901.

In step S901, when there is no job corresponding to the double-sided job, but there is a job corresponding to the single-sided job, control is performed to display the job selection screen for assisting the user in selecting the job to be executed by the user on the display device 43.

As shown in Fig. 21, the job selection screen 76 has a selection button 77 for selecting any one of the single-sided jobs stored in the job storage unit 41, and a non-selection button for not selecting any one-sided jobs. (78). The user selects either a selection button 77 or a non-selection button 78 using the input device 44.

In the next step S903, it is determined whether any one job is selected. At this time, the system control unit 40 determines that any one job is selected when any one of the selection buttons 77 is selected, and determines that any one job is not selected when the non-selection button 78 is selected.

When affirmative determination is made in step S903, the process advances to step S303 to determine an image to be drawn based on the selected job job information 60B, and acquires image information of the image. On the other hand, when a negative determination is made in step S903, the process advances to step S311 to transmit error information indicating that a corresponding job does not exist to the control device 5, thereby ending the second job execution processing program.

DESCRIPTION OF SYMBOLS 1 Exposure drawing system 2 1st exposure drawing apparatus
3: second exposure drawing device 4: inverting device
5: control device 10: stage
16a: exposure head 40: system control
41: job storage unit 50: control unit
51: memory 60A: first job information
60B: second job information C: substrate to be exposed

Claims (13)

First rendering means for drawing an image on the first surface by exposing the first surface of the substrate to be exposed;
The first job information to which the image information representing the image drawn on the first surface of the substrate to be exposed and the exposure condition information representing the exposure condition are correlated, to the second surface opposite to the first surface of the substrate to be exposed. Storage means for storing image information indicating an image to be drawn and exposure condition information indicating an exposure condition, and corresponding information indicating a correspondence relationship between the first job information and the second job information;
By exposing the first surface under the exposure conditions indicated by the first job information by the first drawing means, an image represented by the first job information is drawn on the first surface to draw the first surface. When an image is drawn on the second side of the finished substrate to be exposed, it is indicated by the second job information corresponding to the first job information used when drawing the image on the first side based on the corresponding information. An exposure drawing apparatus comprising second drawing means for drawing an image represented by the second job information on the second surface by exposing the second surface under exposure conditions. According to claim 1,
The storage means includes a first storage area that stores the first job information and a second storage area that stores the second job information, and the corresponding information is one of the first storage area and the second storage area. An exposure drawing device characterized in that it is stored on one side. First storage means for storing image information representing an image drawn on a first surface of the substrate to be exposed and first job information corresponding to exposure condition information representing an exposure condition,
First rendering means for drawing an image represented by the first job information on the first surface by exposing the first surface under the exposure conditions indicated by the first job information, and
A first exposure rendering apparatus comprising transmission means for transmitting information indicating the first job information used when an image is drawn on the first surface by the first rendering means,
Second job information corresponding to image information indicating an image drawn on a second surface opposite to the first surface of the substrate to be exposed and exposure condition information indicating an exposure condition, and the first job information and the second Second storage means for storing corresponding information indicating the correspondence between job information,
Receiving means for receiving information representing the first job information transmitted by the transmitting means,
Images and exposures drawn on the second surface based on the second job information corresponding to the first job information indicated by information indicating the first job information received by the receiving means in the corresponding information Determining means for determining conditions, and
And a second exposure rendering apparatus having second rendering means for drawing the image determined by the determination means on the second surface by exposing the second surface under exposure conditions determined by the determination means. Drawing system. The method of claim 3,
The corresponding information is information corresponding to identification information for identifying the first job information and identification information for identifying the second job information corresponding to the first job information,
The information indicating the first job information is the identification information of the first job information. The method of claim 3 or 4,
The transmitting means of the first exposure drawing apparatus transmits information indicating the first job information only when the drawing by the first drawing means is normally ended. The method of claim 3 or 4,
The transmitting means of the first exposure drawing apparatus transmits error information indicating that an error has occurred when the drawing by the first drawing means ends abnormally. The method of claim 3 or 4,
Third storage means for storing the first job information, the second job information and the corresponding information, and
Second transmitting means for transmitting the first job information stored by the third storage means to the first exposure drawing apparatus, and transmitting the second job information and the corresponding information to the second exposure drawing apparatus; Further provided with a control device provided,
The first exposure drawing apparatus further includes second receiving means for receiving the first job information transmitted by the second transmitting means,
The first drawing means of the first exposure drawing apparatus draws an image on the first surface using the first job information received by the second receiving means,
The second exposure drawing apparatus further includes third receiving means for receiving the second job information and the corresponding information transmitted by the second transmitting means,
The determining means of the second exposure drawing apparatus is characterized by determining the image and exposure conditions to be drawn on the second surface using the second job information and the corresponding information received by the third receiving means. Exposure drawing system. The method of claim 7,
The control device further includes receiving means for accepting input of the first job information, the second job information, and the corresponding information,
The third storage means of the control device stores the first job information, the second job information and the corresponding information received by the reception means. Image information indicating an image to be drawn on a first surface of the substrate to be exposed and first job information to which exposure condition information indicating an exposure condition are stored, and the first job information and the first of the substrate to be exposed First storage means for storing correspondence information indicating a correspondence relationship between image information representing an image drawn on a second surface opposite to the surface and second job information to which exposure condition information representing an exposure condition is associated,
First rendering means for drawing an image represented by the first job information on the first surface by exposing the first surface under the exposure conditions indicated by the first job information, and
A first exposure drawing apparatus having transmission means for transmitting the second job information corresponding to the first job information used when drawing the image on the first surface by the first drawing means in the corresponding information; ,
Receiving means for receiving the second job information transmitted by the transmitting means, and
And second rendering means for drawing an image represented by the second job information on the second surface by exposing the second surface under exposure conditions indicated by the second job information received by the receiving means. An exposure imaging system, comprising a second exposure imaging device. Fourth storage means for storing image information representing an image drawn on a first surface of the substrate to be exposed and first job information corresponding to exposure condition information representing an exposure condition,
First rendering means for drawing an image represented by the first job information on the first surface by exposing the first surface under the exposure conditions indicated by the first job information, and
A first exposure drawing apparatus comprising third transmitting means for transmitting information indicating the first job information used for drawing by the first drawing means,
The first job information, image information indicating an image drawn on a second surface opposite to the first surface of the substrate to be exposed, and second job information corresponding to exposure condition information indicating exposure conditions, and the first job Fifth storage means for storing corresponding information indicating a correspondence between the job information and the second job information,
Fourth receiving means for receiving information indicating the first job information transmitted by the third transmitting means,
Control with fourth transmitting means for transmitting the second job information corresponding to the first job information indicated by information indicating the first job information received by the fourth receiving means in the corresponding information. Device,
Fifth receiving means for receiving information indicating the second job information transmitted by the fourth transmitting means, and
An agent for drawing an image represented by the second job information on the second surface by exposing the second surface under exposure conditions indicated by information representing the second job information received by the fifth receiving means An exposure drawing system comprising a second exposure drawing device provided with two drawing means. The method of claim 3 or 4,
The exposure conditions include the size of the substrate to be exposed, the number of exposure targets of the substrate to be exposed, and the arrangement pattern of the marks when a mark is formed on the substrate to be determined to determine an image drawing area, An exposure writing system comprising at least one of the types of photosensitive materials of the substrate to be exposed. Computer,
The first surface is exposed to the first surface by exposing the first surface under the exposure conditions indicated by the first job information corresponding to the image information representing the image drawn on the first surface of the substrate to be exposed and the exposure condition information representing the exposure condition. First rendering means for drawing an image represented by the first job information;
By exposing the first surface under the exposure conditions indicated by the first job information, an image exposed by the first job information is drawn on the first surface to complete the imaging of the first surface. When an image is drawn on the second surface, the first job information and the image information indicating the image drawn on the second surface opposite to the first surface of the substrate to be exposed and the exposure condition information indicating the exposure conditions In the correspondence information indicating the correspondence relationship between the corresponding second job information, the second side is exposed under the exposure conditions indicated by the second job information corresponding to the first job information used when an image is drawn on the first side. A computer-readable medium having a program recorded thereon, characterized in that it functions as a second rendering means for drawing an image represented by the second job information on the second surface by exposing. A first job in which image information representing an image drawn on the first surface and exposure condition information indicating an exposure condition are associated with first rendering means for drawing an image on the first surface by exposing the first surface of the substrate to be exposed Information, second job information corresponding to image information indicating an image drawn on a second surface opposite to the first surface of the substrate to be exposed, and exposure condition information indicating an exposure condition, and the first job information and the A storage step for storing the corresponding information indicating the corresponding relationship between the second job information in the storage means,
By exposing the first surface under the exposure conditions indicated by the first job information by the first drawing means, an image represented by the first job information is drawn on the first surface to draw the first surface. When an image is drawn on the second side of the finished substrate to be exposed, it is indicated by the second job information corresponding to the first job information used when drawing the image on the first side based on the corresponding information. And a second drawing step of drawing an image represented by the second job information on the second surface by exposing the second surface under exposure conditions.

Images