KR102092363B1 - 이미징 광학 유닛 - Google Patents

이미징 광학 유닛 Download PDF

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Publication number
KR102092363B1
KR102092363B1 KR1020137030787A KR20137030787A KR102092363B1 KR 102092363 B1 KR102092363 B1 KR 102092363B1 KR 1020137030787 A KR1020137030787 A KR 1020137030787A KR 20137030787 A KR20137030787 A KR 20137030787A KR 102092363 B1 KR102092363 B1 KR 102092363B1
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KR
South Korea
Prior art keywords
optical unit
partial
imaging
imaging optical
optical
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KR1020137030787A
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English (en)
Korean (ko)
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KR20140043732A (ko
Inventor
알렉산더 볼프
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칼 짜이스 에스엠티 게엠베하
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0663—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020137030787A 2011-05-31 2012-05-24 이미징 광학 유닛 Active KR102092363B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161491523P 2011-05-31 2011-05-31
US61/491,523 2011-05-31
DE102011076752A DE102011076752A1 (de) 2011-05-31 2011-05-31 Abbildende Optik
DE102011076752.5 2011-05-31
PCT/EP2012/059697 WO2012163794A1 (en) 2011-05-31 2012-05-24 Imaging optical unit

Publications (2)

Publication Number Publication Date
KR20140043732A KR20140043732A (ko) 2014-04-10
KR102092363B1 true KR102092363B1 (ko) 2020-03-24

Family

ID=47173165

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137030787A Active KR102092363B1 (ko) 2011-05-31 2012-05-24 이미징 광학 유닛

Country Status (7)

Country Link
US (1) US9377608B2 (https=)
EP (1) EP2715452B1 (https=)
JP (1) JP6263800B2 (https=)
KR (1) KR102092363B1 (https=)
CN (1) CN103635859B (https=)
DE (1) DE102011076752A1 (https=)
WO (1) WO2012163794A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9291751B2 (en) * 2013-06-17 2016-03-22 Carl Zeiss Smt Gmbh Imaging optical unit and projection exposure apparatus for projection lithography comprising such an imaging optical unit
DE102018201170A1 (de) * 2018-01-25 2019-07-25 Carl Zeiss Smt Gmbh Abbildende Optik für die EUV-Mikrolithographie
DE102023203224A1 (de) * 2023-04-06 2024-10-10 Carl Zeiss Smt Gmbh Abbildende EUV-Optik zur Abbildung eines Objektfeldes in ein Bildfeld

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040218291A1 (en) * 2003-05-01 2004-11-04 Eastman Kodak Company Multiple aperture imaging system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6314113A (ja) * 1986-07-07 1988-01-21 Matsushita Electric Ind Co Ltd 微細パタ−ン投影光学系
EP0237041B1 (en) * 1986-03-12 1993-08-18 Matsushita Electric Industrial Co., Ltd. Projection optical system for use in precise copy
JPH1114913A (ja) * 1997-06-23 1999-01-22 Kazuo Kosho 第１面に凹球面反射鏡を使用した望遠鏡。
DE19809055A1 (de) * 1998-03-04 1999-09-16 Ernst Brinkmeyer Zweistrahl-Interferometer zur Gitterherstellung in photosensitiven Materialien
US6307682B1 (en) * 2000-02-16 2001-10-23 Silicon Valley Group, Inc. Zoom illumination system for use in photolithography
JP4495942B2 (ja) * 2003-10-20 2010-07-07 リコー光学株式会社 結像光学系・画像形成装置・プリンターおよび画像読取装置
TWI366004B (en) 2005-09-13 2012-06-11 Zeiss Carl Smt Gmbh Microlithography projection optical system, microlithographic tool comprising such an optical system, method for microlithographic production of microstructured components using such a microlithographic tool, microstructured component being produced by s
DE102006014380A1 (de) * 2006-03-27 2007-10-11 Carl Zeiss Smt Ag Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille
JP4998803B2 (ja) * 2006-04-14 2012-08-15 株式会社ニコン 露光装置、デバイス製造方法、および露光方法
EP2203787B1 (en) 2007-10-26 2014-05-14 Carl Zeiss SMT GmbH Imaging optical system and projection exposure installation for micro-lithography with an imaging optical system of this type
DE102007051669A1 (de) * 2007-10-26 2009-04-30 Carl Zeiss Smt Ag Abbildende Optik, Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik sowie Verfahren zur Herstellung eines mikrostrukturierten Bauteils mit einer derartigen Projektionsbelichtungsanlage
KR20100117281A (ko) * 2009-04-24 2010-11-03 주식회사 프로텍 Ｌｄｉ용 다중 광 분할방법 및 장치
JP5328512B2 (ja) * 2009-06-24 2013-10-30 富士フイルム株式会社 露光装置
DE102010039745A1 (de) * 2010-08-25 2012-03-01 Carl Zeiss Smt Gmbh Abbildende Optik

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040218291A1 (en) * 2003-05-01 2004-11-04 Eastman Kodak Company Multiple aperture imaging system

Also Published As

Publication number Publication date
EP2715452A1 (en) 2014-04-09
WO2012163794A1 (en) 2012-12-06
CN103635859B (zh) 2016-12-14
JP6263800B2 (ja) 2018-01-24
EP2715452B1 (en) 2020-12-16
CN103635859A (zh) 2014-03-12
DE102011076752A1 (de) 2012-12-06
KR20140043732A (ko) 2014-04-10
JP2014517349A (ja) 2014-07-17
US20140071418A1 (en) 2014-03-13
US9377608B2 (en) 2016-06-28

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