KR102073401B1 - Heat treatment method - Google Patents

Abstract

An object of the present invention is to further suppress the outflow of the atmosphere from the inside of the furnace body to the external space.
The roller hearth kiln corresponding to the heat processing apparatus which concerns on this invention forms the furnace body 11 which forms the 1st space 11a, and the 2nd space 30a which communicates with the 1st space 11a inside, The wall body 30 which has the 1st wall part 31 and the 2nd wall part 32 is provided. Moreover, the 1st wall part 31 and the 2nd space (the rotating body 60 which can convey the to-be-processed object 96 in the 1st space 11a toward the external space from the 1st space 11a side) 30a), and the 2nd wall part 32 penetrates in this order, and one end protrudes from the 2nd wall part 32. FIG. The first wall portion 31 is provided with a first bearing 40 having clearances 44a and 45a through which gas can flow in the penetrating direction of the rotor 60 while rotatably supporting the rotor 60. . The second wall portion 32 is provided with a second bearing 50 having a higher sealing property than the first bearing 40 while rotatably supporting the rotating body 60. The gas of higher pressure than the atmosphere of the 1st space 11a is supplied from the 2nd space supply port 33 to the 2nd space 30a.

Description

Heat treatment method {HEAT TREATMENT METHOD}

The present invention relates to a heat treatment method.

BACKGROUND ART Conventionally, a heat treatment apparatus for heat-treating an object to be processed while conveying an object to be processed such as a ceramic product with a roller is known. For example, Patent Document 1 discloses a roller hearth kiln (roller) having a tunnel-shaped furnace body, a plurality of rollers provided in an inner space of the furnace body, and a gas burner for firing the object to be processed. Haas continuous) is described.

Patent Document 1: Japanese Patent Application Laid-open No. 04-270884

By the way, in such a heat processing apparatus, the rotating body containing a roller etc. normally penetrate the furnace body, and is connected with the drive shaft of the motor arrange | positioned outside the furnace body. The reason for arranging the motor outside of the furnace is that the environment inside the furnace is not suitable for disposing the motor, for example, the inside of the furnace may be at a high temperature. For this reason, the through-hole is formed in the furnace body through which a rotating body penetrates. And, when such a through hole exists, the atmosphere inside a furnace body may flow out of a furnace along the axial direction of a rotating body.

This invention is made | formed in order to solve such a subject, and its main objective is to further suppress that an atmosphere leaks from the inside of a furnace body to an external space.

Heat treatment method of the present invention,

The furnace body which forms the 1st space as a process space,

A wall having a second space communicating therein with the first space therein, the wall having a first wall portion, a second wall portion, and a second space supply port capable of supplying gas from the outside into the second space;

The to-be-processed object can be conveyed in the said 1st space, The 1st wall part, the said 2nd space, and the said 2nd wall part penetrate in this order toward the outer space from the said 1st space side, and one end is said 2nd A rotating body protruding from the wall,

Drive means connected to the one end side of the rotating body and capable of rotationally driving the rotating body;

A first bearing provided at a portion through which the rotating body penetrates, the first bearing being a rolling bearing having a gap through which the gas can flow in a penetrating direction of the rotating body while rotatably supporting the rotating body;

The sealing member which is provided in the part through which the said rotating body penetrates a said 2nd wall part, and is highly sealed compared with the said 1st bearing

As a heat treatment method using a heat treatment apparatus comprising a,

A step of performing heat treatment while the driving means rotates the rotating body to convey the object to be processed in the processing space,

In the said process, gas of high pressure compared with the atmosphere of a said 1st space is supplied into a said 2nd space through a said 2nd space supply port.

In the heat treatment method of this invention, the heat treatment apparatus used for a heat treatment method forms inside the furnace body which forms the 1st space as a process space, and the 2nd space which communicates with the said 1st space, and the 1st wall part, And a wall having a second wall portion and a second space supply port capable of supplying gas from the outside into the second space. Moreover, the rotating body which can convey a to-be-processed object in a 1st space penetrates a 1st wall part, a 2nd space, and a 2nd wall part in this order toward the outer space from the 1st space side, and one end is a 2nd wall part. Protrudes from And the drive means connected to the one end side of this rotating body rotates a rotating body, and heat-processes the to-be-processed object in a 1st space, conveying a to-be-processed object by a rotating body in a 1st space. At this time, the part which a rotating body penetrates a 1st wall part is provided with the 1st bearing which is a rolling bearing which has a clearance which can distribute | circulate gas in the penetrating direction of a rotating body, rotatably supporting a rotating body. In addition, a sealing member having a higher sealing property than that of the first bearing is provided at a portion where the rotating body penetrates through the second wall portion. In the heat treatment, high-pressure gas is supplied into the second space through the second space supply port as compared with the atmosphere of the first space. As a result, the gas supplied to the second space tries to be directed toward the first space side from the gap between the first bearings, which is lower than the sealing member. For this reason, the gas which tries to face the 1st space from the 2nd space is suppressed that the atmospheric gas flows out from the 1st space through the clearance gap of the 1st bearing. Therefore, the outflow of the atmosphere from the inside of the furnace body to the external space can be further suppressed.

Here, "the sealing member is high in sealing property compared with a 1st bearing" means that the clearance gap through which gas can flow in the penetrating direction of a rotating body has a smaller sealing member compared with a 1st bearing. In addition, the seal member "high sealing property compared with a 1st bearing" also includes the case where the sealing member does not have the clearance gap which can distribute | circulate gas in the penetrating direction of a rotating body (it is sealed). The "second space that communicates with the first space" is a case where the first space and the second space are in direct communication, or the first space and the second space communicate with each other through a space (other than an external space). Include if present.

In the heat treatment method of the present invention, the furnace body has an exhaust port capable of exhausting the atmosphere in the first space, and in the step, the first body is discharged from the exhaust port so that the atmosphere of the first space is maintained at a predetermined pressure. The atmosphere of one space may be exhausted and gas may be supplied to the second space. In this case, when gas is supplied into the first space through the gap between the second space supply port, the second space, and the first bearing, the pressure of the atmosphere in the first space is adjusted to a predetermined pressure by exhausting the atmosphere from the exhaust port. Can be.

In the heat treatment method of the present invention, the furnace has a first space supply port capable of supplying gas into the first space, and in the step, the exhaust port is configured such that the atmosphere of the first space is maintained at a predetermined pressure. The gas may be supplied to the first space and the second space while exhausting the atmosphere of the first space. In this case, since the gas is supplied to the first space through a path that does not pass through the gap between the second space and the first bearing, it is easy to adjust the atmosphere (composition of atmosphere gas, atmospheric pressure, etc.) in the first space. In the above process, the gas supplied from the first space supply port to the first space and the gas supplied from the second space supply port to the second space may have the same composition and pressure, and at least one of the composition and pressure may be May be different.

In the heat treatment method of the present invention, the heat treatment apparatus includes a first pipe connected to the first space supply port, a second pipe connected to the second space supply port, the first pipe and the second pipe. And a common pipe connected to the pipe, in the step, by supplying gas to the common pipe, the high pressure gas is supplied into the second space compared with the atmosphere of the first space through the common pipe and the second pipe. The gas may be supplied into the first space via the common pipe and the first pipe. In this way, both the gas supply to the 1st space through a 1st space supply port and the gas supply to the 2nd space through a 2nd space supply port can be performed together by supplying gas to a common piping. In addition, in the said process, you may supply gas to the said 1st piping also from paths other than common piping. In this case, while supplying gas to both the 1st space and the 2nd space by supplying gas to a common piping, 1st space supply is also carried out by also distributing the gas from the other route to the 1st piping (mixing with the gas from a common piping). The composition of the gas supplied through the sphere and the gas supplied through the second space supply port may be different.

In the heat treatment method of the present invention, the heat treatment apparatus includes a first flow rate adjustment valve connected to the first pipe to adjust the flow rate of the first pipe, and a flow rate of the second pipe connected to the second pipe. And a second flow rate adjustment valve to adjust, and in the process, by supplying gas to the common pipe, the gas whose flow rate is adjusted by the first flow rate control valve through the common pipe and the first pipe. The gas supplied to one space and whose flow rate is adjusted by the second flow control valve via the common pipe and the second pipe may be supplied to the second space.

In the heat processing method of this invention, the said heat processing apparatus is provided in at least one of the said common piping and the said 1st piping, The 1st pressure reduction valve provided in the upstream side rather than the said 1st flow volume adjustment valve, and the said 2nd piping And a second pressure reducing valve provided upstream from the second flow rate adjusting valve, wherein the first pressure reducing valve reduces the pressure of the gas on the downstream side to a first pressure that is higher than the atmosphere of the first space, The 2 pressure reducing valve reduces the pressure of the gas on the downstream side to a second pressure which is higher than the atmosphere of the first space. In the step, the gas having a pressure exceeding the first pressure and the second pressure is supplied to the common pipe. You may supply. In this case, since the gas of higher pressure than the pressure after pressure reduction (1st pressure and 2nd pressure) is supplied from a common piping, even if piping upstream than a 1st pressure reducing valve or an upstream side than a 2nd pressure reducing valve is made, Flow rate can be secured.

In the heat processing method of this invention, the said heat processing apparatus is provided in the conveyance path which conveys the said to-be-processed object between the said outer space and the said 1st space, and the perpendicular | vertical upper side of the said conveyance path, and is opened by the vertical lower side. And an upper space forming portion for forming an upper space communicating with the conveying path, and a lower space forming portion provided below the vertical of the conveying path, the lower space forming portion for opening at a vertical upper side and communicating with the conveying path. In the above step, the atmosphere of the first space may be heated to a higher temperature than the outside air, and at least one of the upper space and the lower space may be sucked. In this way, since the atmospheric gas of a 1st space is heated to temperature higher than outside air, the atmospheric gas which flows out to a conveyance path from a 1st space tends to face an upper space, and the outside air tends to a lower space. Moreover, by sucking at least one of an upper space and a lower space in this state, at least one of the flow of the gas of the upper direction toward an upper space from a conveyance path, and the flow of the gas of the lower direction toward a lower space from a conveyance path arises. As a result, the atmosphere and outside air of the first space easily flow in the up and down direction within the transport path, so that one of the atmospheres in the outer space and the first space flows through the transport path to the other side (the direction perpendicular to the up and down direction). Can be more suppressed. That is, the inflow and outflow of the atmosphere through the conveyance path into and out of a furnace body can be suppressed more. Moreover, even if the furnace body is always opened to the external space through the conveyance path, the outflow into and out of the furnace body can be further suppressed as described above. Here, the said conveyance path may be what carries the said to-be-processed object from the exterior to a furnace, or may carry out the said to-be-processed object from a furnace to the outside.

The heat treatment apparatus of the present invention is a heat treatment apparatus for performing heat treatment on an object to be processed in a treatment space,

A furnace body forming a first space as the processing space,

A wall having a second space communicating therein with the first space therein, the wall having a first wall portion, a second wall portion, and a second space supply port capable of supplying gas from the outside into the second space;

The to-be-processed object can be conveyed in the said 1st space, The said 1st wall part, the said 2nd space, and the said 2nd wall part penetrate in this order toward the outer space from the said 1st space side, and the said one end is carried out Rotating body which protrudes from 2 wall parts,

Drive means connected to the one end side of the rotating body and capable of rotationally driving the rotating body;

A first bearing provided at a portion through which the rotating body penetrates, the first bearing being a rolling bearing having a gap through which the gas can flow in a penetrating direction of the rotating body while rotatably supporting the rotating body; and

It is provided with the sealing member which is provided in the part through which the said rotating body penetrates a said 2nd wall part compared with the said 1st bearing.

The heat treatment apparatus of this invention forms the furnace body which forms the 1st space as a process space, and the 2nd space which communicates with the said 1st space inside, a 1st wall part, a 2nd wall part, and the said 2nd space. It is provided with the wall which has a 2nd space supply port which can supply gas from the outside in the inside. Moreover, the rotating body which can convey a to-be-processed object in a 1st space penetrates a 1st wall part, a 2nd space, and a 2nd wall part in this order toward the outer space from the 1st space side, and one end is a 2nd wall part. Protrudes from And the drive means connected to the one end side of this rotating body rotates a rotating body, and can heat-process a to-be-processed object in a 1st space, conveying a to-be-processed object by a rotating body in a 1st space. At this time, the part which a rotating body penetrates a 1st wall part is provided with the 1st bearing which is a rolling bearing which has a clearance which can distribute | circulate gas in the penetrating direction of a rotating body, rotatably supporting a rotating body. In addition, a sealing member having a higher sealing property than that of the first bearing is provided at a portion where the rotating body penetrates through the second wall portion. For this reason, for example, during the heat treatment, the gas supplied to the second space is more sealed than the second bearing by supplying a gas having a high pressure compared with the atmosphere of the first space through the second space supply port into the second space. Trying to face the first space side from the gap of the lower first bearing. For this reason, the gas which tries to face the 1st space from the 2nd space is suppressed that the atmospheric gas flows out from the 1st space through the clearance gap of the 1st bearing. Therefore, the outflow of the atmosphere from the inside of the furnace body to the external space can be further suppressed.

In the heat treatment apparatus of this invention, the one end side bearing which rotatably supports the said one end side of the said rotating body rather than the said 1st bearing is provided, The said sealing member may be an axial seal. In this case, the one-side bearing may be provided at a portion through which the rotating body penetrates the second wall portion. In addition, the one-side bearing may support the rotating body in an external space.

In the heat treatment apparatus of this invention, the said seal member is provided in the part through which the said rotating body penetrates the said 2nd wall part, and is a cloud with high sealing property compared with the said 1st bearing, rotatably supporting the said rotating body. The second bearing may be a bearing. By doing so, the second bearing can also serve as the above-described shaft seal and the role of the one-side bearing.

In the heat treatment apparatus of the present invention, the second bearing includes a plurality of rolling bodies accommodated between the inner ring, the outer ring, the inner ring, and the outer ring, and the plurality of rolling in the axial direction of the inner ring. And a shielding member disposed between the inner ring and the outer ring at a position shifted from the sieve, and the shielding member of the second bearing is smaller than the gap between the inner ring and the outer ring in comparison with the gap of the first bearing. A gap may be formed, or the gap may be sealed between the inner ring and the outer ring. In this way, the clearance gap through which gas can flow in the penetrating direction of the rotating body in the second bearing can be easily reduced or sealed using the shielding member. For this reason, it can suppress more that the atmosphere of the 2nd space (for example, gas supplied from the 2nd space supply port) flows out through the clearance gap of a 2nd bearing to an external space. On the other hand, it is preferable that the shield member of the 2nd bearing seals between the inner ring and outer ring of a 2nd bearing.

In the heat treatment apparatus of the present invention in which the second bearing has a shielding member, the first bearing includes an inner ring, an outer ring, a plurality of rolling elements housed between the inner ring and the outer ring, and an axis of the inner ring. And a shielding member disposed between the inner ring and the outer ring at a position shifted from the plurality of rolling elements in a direction, and the shielding member of the first bearing forms the gap between the inner ring and the outer ring. You may be. In this way, the clearance gap through which gas can flow in the penetrating direction of the rotating body in the first bearing can be easily reduced by using the shielding member. Thereby, it is easy to suppress the invasion of particulates, such as dust, from the 2nd space to the 1st space through the clearance gap of a 1st bearing, making gas flow from a 2nd space to a 1st space.

In the heat treatment apparatus of the present invention, the first bearing and the second bearing may be ball bearings. That is, each of the first bearing and the second bearing may have an inner ring, an outer ring, and a plurality of spherical rolling elements housed between the inner ring and the outer ring. In addition, a 1st bearing and a said 2nd bearing are not limited to a ball bearing, For example, a rolling element may be cylindrical. The rolling element may be a member that enables relative positional displacement between the outer ring and the inner ring, such as the inner ring rotating as it rotates.

In the heat treatment apparatus of the present invention, the heat treatment may include heat treatment of the object. Here, when the process including a heat process is performed in a 1st space, a 1st bearing may be heated by a rotor etc. being heated in a furnace body. In this case, by supplying a gas to the second space from the second space supply port and creating a flow from the second space toward the first space through the gap of the first bearing, the flow of this gas causes the first bearing to Cooling can be suppressed.

In the heat treatment apparatus of the present invention, the furnace body may have an exhaust port capable of exhausting the atmosphere in the first space. In this case, when gas is supplied into the first space through the gap between the second space supply port, the second space, and the first bearing, it is easy to adjust the pressure of the atmosphere in the first space by exhausting the atmosphere from the exhaust port. In this case, the exhaust port may be connected to an exhaust valve outside the furnace body. Moreover, the heat processing apparatus of this invention may be equipped with the exhaust means connected to an exhaust port and sucking in the atmosphere in a 1st space.

In the heat treatment apparatus of this invention, the said furnace body may have a 1st space supply port which can supply gas to the said 1st space. In this case, since the gas can be supplied to the first space without passing through the gap between the second space and the first bearing, it is easy to adjust the atmosphere (composition of atmospheric gas, atmospheric pressure, etc.) in the first space. On the other hand, the gas supplied from the first space supply port to the first space and the gas supplied from the second space supply port to the second space may have the same composition and pressure, or at least one of the composition and pressure may be different. .

The heat treatment apparatus of the present invention includes a first pipe connected to the first space supply port, a second pipe connected to the second space supply port, and a common pipe connected to the first pipe and the second pipe. It may be provided. In this way, both the gas supply to the 1st space through a 1st space supply port and the gas supply to the 2nd space through a 2nd space supply port can be performed together by supplying gas to a common piping. In addition, the 1st piping may be able to distribute the gas from the path other than common piping. This makes it possible to supply gas to both the first space and the second space by supplying gas to the common pipe, while also distributing (mixing with gas from the common pipe) the gas from another path to the first pipe. The composition of the gas supplied through the space supply port and the gas supplied through the second space supply port may be different.

The heat treatment apparatus of the present invention includes a first flow rate adjustment valve connected to the first pipe to adjust the flow rate of the first pipe, and a second flow rate adjustment connected to the second pipe to adjust the flow rate of the second pipe. A valve may be provided. In this way, the flow volume of the gas which flows into a 1st space and a 2nd space can be adjusted.

The heat treatment apparatus of the present invention includes a first pressure reducing valve provided on at least one of the common pipe and the first pipe and provided upstream from the first flow control valve and the second flow control valve of the second pipe. And a second pressure reducing valve provided on an upstream side, wherein the first pressure reducing valve reduces the pressure of the gas on the downstream side to a first pressure that is higher than the atmosphere of the first space, and the second pressure reducing valve is downstream. The pressure of the gas on the side may be reduced to a second pressure that is higher than the atmosphere of the first space. In this way, the gas of higher pressure than the pressure (1st pressure and 2nd pressure) after pressure reduction can be supplied from a common piping. For this reason, even if the piping upstream than a 1st pressure reducing valve or an upstream side than a 2nd pressure reducing valve can be made thin, the flow volume of a required gas can be ensured.

The heat treatment apparatus of this invention forms the 3rd space which communicates with a said 1st space and a said 2nd space between the said 1st space and the said 2nd space, and forms the 3rd space penetrated by the said rotating body. A member may be provided. In this case, the third space is present between the first space and the second space, so that the influence from the furnace body to the wall, for example, the temperature of the first bearing and the seal member of the wall is changed by the heat conduction from the furnace body. It can be suppressed. In this case, the heat treatment apparatus of the present invention may further include support means for rotatably supporting the rotating body in the third space.

In the heat treatment apparatus of this invention provided with the 3rd space formation member, the said rotating body is rotationally driven by the conveyance roller which can convey the said to-be-processed object in the said 1st space, and the said drive means. A drive shaft penetrating through the wall, a hollow pipe-shaped holder in which an end portion of the drive roller side of the drive shaft is inserted and connected to the end portion, a roller cap fixed to the drive shaft side of the transfer roller, the holder and the A connecting shaft inserted into the roller cap and connected to the holder and the roller cap, wherein the holder, the roller cap, and the connecting shaft are disposed in the third space, the inner circumferential surface of the roller cap and the connecting shaft; There is a clearance between and the connecting shaft is connected to the roller cap so as to be axially offset by the clearance. Also good. In this case, since the connecting shaft is connected to the roller cap so as to be axially offset, even if eccentricity (axial offset) occurs between the conveying roller and the drive shaft, the rotational driving force from the driving means can be transmitted to the conveying roller via the drive shaft. In this case, the heat treatment apparatus of the present invention may further include supporting means for rotatably supporting the roller cap in the third space.

The heat treatment apparatus of the present invention may include gas supply means for supplying a gas of a high pressure into the second space as compared with the atmosphere of the first space. In this way, the gas from a gas supply means can produce the flow of the gas from a 2nd space through the clearance gap of a 1st bearing toward a 1st space.

The heat treatment apparatus of the present invention may include heating means disposed in the first space. Moreover, the heat processing apparatus of this invention may have a some rotating body which can convey the said to-be-processed object in a 1st space. In this case, one or more of the plural rotating bodies may be " the first wall portion, the second space, and the second wall portion penetrate in this order from the first space side toward the outer space, and one end protrudes from the second wall portion. &Quot; . In addition, since one rotating body penetrates a wall, the heat processing apparatus of this invention may have a some wall. There may be a wall penetrating through the plurality of rotating bodies.

The heat treatment apparatus of the present invention includes a conveying path for conveying the object to be processed between the external space and the first space, heating means for making an atmosphere inside the furnace body higher than outside air, and the conveying path of An upper space forming portion that is provided on the vertical upper side and opens in the vertical lower side and forms an upper space communicating with the conveying path; A lower space forming portion for forming a space and suction means for sucking at least one of the upper space and the lower space may be provided. In this way, as described above in the description of the heat treatment method of the present invention, the inflow and outflow of the atmosphere through the conveying path into and out of the furnace body can be further suppressed.

In the heat treatment apparatus of the present invention, the upper space forming portion may form the upper space inclined in a direction away from the upper body. When atmospheric gas of temperature higher than outside air flows out from a furnace body, the direction which this atmospheric gas flows becomes a direction which rises, so that it moves away with respect to a furnace body. For this reason, when the upper space is inclined in a direction away from the furnace body, the atmospheric gas from the furnace body is easily induced into the upper space, and the outflow to the outside can be further suppressed.

In the heat treatment apparatus of the present invention, the upper space forming portion is a member inclined in a direction away from the furnace body, and has a partition member for partitioning the upper space into a plurality of partition spaces along a conveying direction of the object. You may. In this case, the plurality of partition members are inclined in the direction away from the top of the furnace body, whereby the atmospheric gas from the furnace body is easily induced to the upper space. In this case, the plurality of partition spaces may be in communication with each other from above in the upper space.

In the heat treatment apparatus of this invention, the said lower space formation part may form the said lower space inclined in the direction which comes closer to the said furnace body. When outside air flows to a conveyance path, since the atmosphere gas of a furnace body has a high temperature, the direction which this outside air flows becomes a direction which descends as it approaches a furnace body. For this reason, when the lower space is inclined in a direction toward the lower body with respect to the furnace body, outside air flowing in the conveying path is easily induced to the lower space, and the inflow into the furnace body can be further suppressed.

In the heat treatment apparatus of the present invention, the lower space forming portion is a member that is inclined in a direction closer to the furnace body and partitions the lower space into a plurality of partition spaces along the conveying direction of the object. You may have it. In this case, the plurality of partition members are inclined in the direction in which the lower portion approaches the furnace body, whereby the outside air flowing in the conveying path is easily induced to the lower space. In this case, the plurality of partition spaces may be in communication with each other at a lower side of the lower space.

FIG. 1: is a longitudinal cross-sectional view of the roller hearth kiln 10 of 1st Embodiment.
FIG. 2 is a cross-sectional view taken along AA of FIG. 1.
3 is an enlarged cross-sectional view around the drive side cover 26 and the wall 30 of FIG. 2.
4 is an enlarged cross-sectional view of the periphery of the wall 30 in the roller hearth kiln of the modification.
5 is an enlarged cross-sectional view of the periphery of the wall 30 in the roller hearth kiln of the modification.
6 is a longitudinal cross-sectional view of the roller hearth kiln 310 of the second embodiment.

[First Embodiment]

Next, embodiment of this invention is described using drawing. 1: is a longitudinal cross-sectional view of the roller hearth kiln 10 which is one Embodiment of the heat processing apparatus used for the heat processing method of this invention. 2 is a cross-sectional view taken along the line A-A of FIG. 3 is an enlarged cross-sectional view around the drive side cover 26 and the wall 30 of FIG. 2. The roller hearth kiln 10 heat-treats the to-be-processed object 96, conveying the tray 95 which arrange | positioned the some to-be-processed object 96 in the 1st space 11a of the furnace body 11. Device. The roller hearth kiln 10 includes a furnace body 11, a driven side cover 22, a drive side cover 26, a wall body 30, and a plurality of rotating bodies 60 including a conveyance roller 61. ), A gas supply device 70, and an exhaust device 86 (see FIGS. 1 and 2).

The furnace body 11 is a heat insulation structure formed in substantially rectangular parallelepiped, the 1st space 11a which is a process space which heat-processes the to-be-processed object 96 inside, and the front end surface 12 of the furnace body (left end surface of FIG. 1). And openings 14 and 15 respectively formed in the rear end face 13 (right end face in FIG. 1) and serving as entrances and exits from the outside to the first space 11a (FIG. 1). The length of the furnace body 11 from the front end face 12 to the rear end face 13 is, for example, 2 m to 15 m. In the 1st space 11a, the some conveyance roller 61 is arrange | positioned from the opening 14 to the opening 15 along a conveyance direction (the front-back direction of FIG. 1). As this conveyance roller 61 rotates, the tray 95 in which the several to-be-processed object 96 was placed passes through the inside of the 1st space 11a from the opening 14, and is conveyed to the opening 15. FIG. On the other hand, the conveyance roller 61 has penetrated the furnace 11 in the direction orthogonal to the conveyance direction (left-right direction of FIG. 2), as shown in FIG. The furnace body 11 has a through hole 16 and a through hole 17 in the left and right direction, and one end (left end of FIG. 2) of the conveying roller 61 is driven through the through hole 16 of the furnace body 11. It reaches inside the side cover 26, and the other end (right end of FIG. 2) penetrates the through-hole 17 of the furnace 11, and has reached the inside of the driven side cover 22. As shown in FIG. Moreover, in the 1st space 11a, the some heater 20 is arrange | positioned in the ceiling and the bottom part of the furnace body 11 so that the some conveyance roller 61 may be interposed up and down. The heater 20 is arrange | positioned so that a longitudinal direction may orthogonally cross a conveyance direction, and it is arrange | positioned in multiple numbers along a conveyance direction. The heater 20 heats the to-be-processed object 96 which passes through the 1st space 11a, and is comprised as ceramic heaters, such as a SiC heater, for example. In addition, it is not limited to the heater 20, What is necessary is just a heating apparatus which can heat-process the to-be-processed object 96, such as a gas burner. As shown in FIG. 2, an exhaust port 19 is formed in the ceiling portion of the furnace 11 to be connected to the exhaust device 86 to exhaust the atmosphere of the first space 11a. Further, at the bottom of the furnace body 11, a first space supply port 18 is formed which is connected to the gas supply device 70 and can supply gas to the first space 11a. On the other hand, the furnace body 11 has an airtight structure except for the openings 14 and 15, the through holes 16 and 17, the first space supply port 18, and the exhaust port 19. In this case, the inflow and outflow of gas into other spaces such as an external space hardly occurs. In addition, the opening 14 and the opening 15 may be opened in the substitution chamber which is not shown of an airtight structure.

The driven side cover 22 is a substantially rectangular parallelepiped structure disposed on the right side (right side in FIG. 2) of the furnace body 11. This driven side cover 22 covers the other end of the conveyance roller 61 so that the other end of the conveyance roller 61 which penetrated the through hole 17 may not be exposed to the outer space of the roller hearth kiln 10. The driven side cover 22 has an airtight structure except for an opening continuous to the through-hole 17 on the furnace body 11 side, and gas flow in and out of the space and the outer space in the driven side cover 22 is prevented. It hardly happens. Moreover, in the driven side cover 22, the driven side support roller 24 which supports the conveyance roller 61 from the lower side is arrange | positioned. The driven side support roller 24 arrange | positions two rollers side by side in the position which shifted back and forth (just before and inside the paper of FIG. 2) from the lower side of the conveyance roller 61, and the center axis of the conveyance roller 61, for example, The conveyance roller 61 is rotatably supported by these several rollers.

The drive side cover 26 is a substantially rectangular parallelepiped structure disposed on the left side (left side in FIG. 2) of the furnace body 11, and forms a third space 26a therein. As for the drive side cover 26, the furnace body 11 side (right side of FIG. 2) is opened, and the 3rd space 26a communicates with the 1st space 11a through the through-hole 16. As shown in FIG. One end of the conveyance roller 61 which penetrated the through-hole 16 has reached in the 3rd space 26a, and the drive side cover 26 has covered the one end of the conveyance roller 61. As shown in FIG. Moreover, the opening 27 which communicates with the 3rd space 26a is formed in the left side of the drive side cover 26, and the drive shaft 65 connected to the conveyance roller 61 has penetrated the opening 27. As shown in FIG. (See Figure 3). The drive side cover 26 has an airtight structure except for the opening continuous to the opening 27 and the through-hole 16 on the furnace body 11 side, except for these portions, the third space 26a. Inflow and outflow of gas hardly occurs between the first space 11a, the second space 30a, and the external space. In the 3rd space 26a, the drive side support roller 28 which supports the rotating body 60 (roller cap 62) from the lower side is arrange | positioned. The drive side support roller 28 has the structure similar to the driven side support roller 24, and supports the rotating body 60 (roller cap 62) rotatably.

The wall 30 is a substantially rectangular parallelepiped structure disposed on the left side (left side in FIG. 2) of the drive side cover 26. As shown in FIG. 3, the wall 30 has the 1st wall part 31 and the 2nd wall part 32 which are plate-shaped members, and combines several plate-shaped members containing these by an adhesive agent, a bolt fastening, etc. It is made of a rectangular parallelepiped structure. As a result, the second space 30a is formed inside the wall 30. The 1st wall part 31 and the 2nd wall part 32 are arrange | positioned facing the 2nd space 30a along the axial direction (left-right direction of FIG. 3) of the rotating body 60, and is arrange | positioned. As for the 1st wall part 31, the surface of the furnace body 11 side (right side of FIG. 3) is in contact with the surface of the wall 30 side (left side of FIG. 3) of the drive side cover 26, and the drive side cover ( It is arrange | positioned so that the opening 27 of 26 may be closed. Thereby, the 1st wall part 31 faces the 3rd space 26a which the surface of the furnace body 11 side continues in the 1st space 11a, and the surface on the opposite side to the furnace body 11 is made into the 1st wall part 31. It faces two spaces 30a. That is, the first wall part 31 partitions the 3rd space 26a and the 2nd space 30a. Moreover, the surface of the furnace body 11 side faces the 2nd space 30a, and the surface on the opposite side to the furnace body 11 faces the external space of the 2nd wall part 32. As shown in FIG. That is, the 2nd wall part 32 has divided the 2nd space 30a and the external space. In the ceiling (upper part of FIG. 3) of the wall 30, the 2nd space supply port 33 which is connected with the gas supply apparatus 70 and can supply gas to the 2nd space 30a is formed. Moreover, the 1st wall part 31 penetrates by the drive shaft 65, and the 1st bearing 40 is attached to this through part. Similarly, the second wall portion 32 is penetrated by the drive shaft 65, and the second bearing 50 is attached to the penetrating portion. On the other hand, the wall 30 has an airtight structure except for the clearances 44a and 45a (see the enlarged portion in FIG. 3) of the second space supply port 33 and the first bearing 40, and these portions Otherwise, the outflow and outflow of gas to and from the outer space and the third space 26a hardly occurs.

The 1st bearing 40 is a rolling bearing comprised as a ball bearing, and supports the rotating body 60 (drive shaft 65) rotatably. The first bearing 40 has an inner ring 41, an outer ring 42, a plurality of spheres 43, and shielding members 44, 45. The inner ring 41 has the drive shaft 65 penetrating through the center, and is comprised so that rotation with the drive shaft 65 may be carried out integrally. The outer ring 42 is a member arranged concentrically with the inner ring 41. The outer circumferential surface of the outer ring 42 is attached to and fixed to the first wall portion 31. Between the outer circumferential surface of the outer ring 42 and the inner circumferential surface of the penetrating portion of the first wall portion 31 is sealed with a sealing material or the like, for example. The sphere 43 is a member rotatably disposed between the inner ring 41 and the outer ring 42. A plurality of spheres 43 are disposed at equal intervals in the circumferential direction along the outer circumferential surface of the inner ring 41 and the inner circumferential surface of the outer ring 42. When the inner ring 41 rotates as the drive shaft 65 rotates, the sphere 43 absorbs the relative positional shift between the rotating inner ring 41 and the fixed outer ring 42. Accordingly, the first bearing 40 rotatably supports the drive shaft 65. The shielding members 44 and 45 are arranged between the inner ring 41 and the outer ring 42 at positions deviated from the plurality of spheres 43 in the axial direction (left and right direction in FIG. 3) of the inner ring 41. It is a member of shape. On the other hand, the shielding member 44 is arrange | positioned at the 1st space 11a side rather than the sphere 43, and the shielding member 45 is arrange | positioned at the 2nd space 30a side rather than the sphere 43. The shielding members 44 and 45 are members which fixed elastic bodies, such as synthetic rubber, on the surface of the steel plate, for example, and ring-shaped protrusions of the outer peripheral surfaces of the shielding members 44 and 45 are fitted into grooves formed in the inner peripheral surface of the outer ring 42. It is fixed to the outer ring 42 by entering. In addition, ring-shaped protrusions are formed on the inner circumferential surfaces of the shield members 44 and 45, and the protrusions form gaps 44a and 45a between grooves of the outer circumferential surface of the inner ring 41, respectively. That is, the shielding members 44 and 45 block the clearance gap between the inner ring 41 and the outer ring 42, leaving gaps 44a and 45a. These gaps 44a and 45a are placed between the grooves of the inner ring 41 and the projections of the shielding members 44 and 45 and have a labyrinth shape. The gap 44a and the gap 45a communicate with each other through the gaps between the plurality of spheres 43. Therefore, the first bearing 40 reaches the third space 26a from the second space 30a via the gap 45a, the gap between the plurality of spheres 43, and the gap 44a. The flow path is formed so that the second space 30a and the third space 26a communicate with each other.

The 2nd bearing 50 is a rolling bearing comprised as a ball bearing, and supports the rotating body 60 (drive shaft 65) rotatably. The second bearing 50 has an inner ring 51, an outer ring 52, a plurality of spheres 53, and shielding members 54, 55. The inner ring 51 has a drive shaft 65 penetrating the center thereof, and is configured to be rotatable integrally with the drive shaft 65. The outer ring 52 is a member arranged concentrically with the inner ring 51. The outer circumferential surface of the outer ring 52 is attached to and fixed to the second wall portion 32. Between the outer circumferential surface of the outer ring 52 and the inner circumferential surface of the penetrating portion of the second wall portion 32 is sealed with a sealing material or the like, for example. The sphere 53 is a member rotatably disposed between the inner ring 51 and the outer ring 52. A plurality of spheres 53 are arranged at equal intervals in the circumferential direction along the outer circumferential surface of the inner ring 51 and the inner circumferential surface of the outer ring 52. When the inner ring 51 rotates with the rotation of the drive shaft 65, the sphere 53 absorbs the relative positional shift between the rotating inner ring 51 and the fixed outer ring 52. Accordingly, the second bearing 50 rotatably supports the drive shaft 65. The shielding members 54 and 55 are arranged between the inner ring 51 and the outer ring 52 at positions deviated from the plurality of spheres 53 in the axial direction (left and right direction in FIG. 3) of the inner ring 51. It is a member of shape. On the other hand, the shielding member 54 is arrange | positioned at the 2nd space 30a side rather than the sphere 53, and the shielding member 55 is arrange | positioned at the outer space side rather than the sphere 53. The shielding members 54 and 55 are members in which elastic bodies such as synthetic rubber are fixed to the surface of the steel sheet, for example, and ring-shaped protrusions of the outer peripheral surfaces of the shielding members 54 and 55 are fitted into grooves formed in the inner peripheral surface of the outer ring 52. It is fixed to the outer ring 52 by entering. In addition, unlike the shield members 44 and 45 of the first bearing 40, the ring-shaped protrusion formed on the inner circumferential surface of the shield member 54, 55 fits into the groove of the outer circumferential surface of the inner ring 51 and enters the bottom of the groove. Is in contact with For this reason, there is no gap between the shielding members 54 and 55 and the inner ring 51, and the shielding members 54 and 55 seal between the inner ring 51 and the outer ring 52.

The rotating body 60 has the conveyance roller 61, the roller cap 62, the connecting shaft 63, the holder 64, and the drive shaft 65. As shown in FIG. This rotating body 60 can convey the to-be-processed object 96 in the 1st space 11a by the conveyance roller 61, and is a drive side cover toward the outer space from the 1st space 11a side. (26) [Third space 26a], the first wall portion 31, the second space 30a, and the second wall portion 32 penetrate in this order so that one end (the left end in FIG. 3) is the second wall portion ( 32) protrude into the outer space. More specifically, the conveying roller 61 penetrates the through-hole 16 from the first space 11a to reach the third space 26a and the second space 30a from the first space 11a side. The roller cap 62, the connecting shaft 63, and the holder 64 are disposed in the third space 26a in this order toward the side. Moreover, the drive shaft 65 has the opening 27 from the 3rd space 26a, the 1st wall part 31 (1st bearing 40), the 2nd space 30a, and the 2nd wall part 32 (made from the inside). 2 bearing 50] penetrates in this order, and protrudes from the 2nd wall part 32 to outer space. The sprocket 66 is formed in the one end side of the drive shaft 65, and the roller chain 92 hangs on this sprocket 66. As shown in FIG. The roller chain 92 is arrange | positioned so that the drive shaft 91 and the sprocket 66 of the motor 90 arrange | positioned in the outer space may be connected, and the rotating body 60 and the motor 90 are connected. The motor 90 transmits a rotational driving force to the sprocket 66 through the drive shaft 91 and the roller chain 92. As the sprocket 66 rotates, the whole rotating body 60 rotates, and the conveyance roller 61 conveys the to-be-processed object 96.

Each component of the rotating body 60 and its connection are demonstrated. The conveying roller 61 is, for example, a hollow pipe made of ceramics, and has a cylindrical protrusion 61a having a small outer diameter at one end (left end in FIG. 3). The roller cap 62 is a cylindrical member in which both ends in the axial direction are opened. The protrusion 61a is inserted in the opening of the edge part by the side of the conveyance roller 61 of the roller cap 62, and the protrusion 61a and the roller cap 62 are being fixed by the bolt etc. which are not shown in figure. Thereby, the conveyance roller 61 and the roller cap 62 are being coaxially fixed.

The connecting shaft 63 has a cylindrical member having an outer diameter smaller than the opening diameter at both ends of the roller cap 62 (for example, a half etc.) and having an outer diameter smaller than the opening diameter at both ends of the holder 64. to be. The holder 64 is a hollow pipe-like member in which both ends in the axial direction are opened. The end part on the furnace body 11 side of the connecting shaft 63 is inserted into the opening of the end part on the wall 30 side of the roller cap 62. Moreover, in the vicinity of the edge part of the furnace body 11 side of the connection shaft 63, the insertion pin 67a has penetrated the connection shaft 63 perpendicular to the central axis of the connection shaft 63. As shown in FIG. The connecting shaft 63 and the insertion pin 67a are fixed by the stop screw 68a which penetrates the connection shaft 63 perpendicularly to the insertion pin 67a. This insertion pin 67a is a member longer than the outer diameter of the roller cap 62, and penetrates through a pair of cutout parts 62a and 62b formed in the edge part of the wall 30 side of the roller cap 62. As shown in FIG. The notches 62a and 62b are groove | channels along the axial direction (depth direction) formed by cutting the cylindrical part of the roller cap 62 along the axial direction from the end surface on the wall 30 side of the roller cap 62 along the axial direction. Is an axial groove). For this reason, in the state which fixed the connection shaft 63 and the insertion pin 67a with the set screw 68a, the connection shaft 63 is inserted in the inside of the roller cap 62, and the wall of the roller cap 62 ( The insertion pin 67a can be inserted into the notch parts 62a and 62b from the end surface of the 30 side. Further, the C-shaped stop ring 69a is attached to the left end side of the roller cap 62 (opening side of the cutouts 62a and 62b) than the insertion pin 67a, whereby the insertion pin 67a after insertion is inserted. ) Is prevented from coming off in the axial direction from the cutouts 62a and 62b. In this way, the roller cap 62 and the connecting shaft 63 are connected by the insertion pin 67a, the notch parts 62a and 62b, and the C-type stop ring 69a. The end portion on the wall 30 side of the connecting shaft 63 passes through the insertion pin 67b similarly to the end portion on the furnace 11 side, and the insertion pin 67b is fixed by the stop screw 68b. Thereby, similarly to the connection of the roller cap 62 and the connection shaft 63 mentioned above, the notch part 64a, 64b of the furnace body 11 side of the holder 64, the insertion pin 67b, and the C type | mold Both of them are connected by the stop ring 69b while the connecting shaft 63 is inserted into the cylindrical holder 64.

The drive shaft 65 is a cylindrical member having an outer diameter smaller than the opening diameters at both ends of the holder 64 (for example, the same outer diameter as the connecting shaft 63). An end portion of the drive shaft 65 on the furnace body 11 side passes through the insertion pin 67c similarly to the connecting shaft 63, and the insertion pin 67c is fixed by the stop screw 68c. Thereby, similarly to the connection of the holder 64 and the connection shaft 63 mentioned above, the notch part 64c, 64d, the insertion pin 67c, and the C type stop of the wall 64 side of the holder 64 are stopped. The ring 69c is connected to each other while the drive shaft 65 is inserted into the cylindrical holder 64.

On the other hand, in this embodiment, the difference between the inner diameter of the holder 64 and the outer diameter of the connecting shaft 63 and the drive shaft 65 is relatively small (for example, less than 1 mm), and the inner diameter of the roller cap 62 and the connecting shaft ( The difference in the outer diameter of 63) is assumed to be relatively large (for example, tens of millimeters). Accordingly, while the clearance between the inner diameter of the holder 64 and the outer diameter of the connecting shaft 63 and the drive shaft 65 is relatively small, the clearance between the inner diameter of the roller cap 62 and the outer diameter of the connecting shaft 63 is relatively large. . For this reason, while the holder 64, the connection shaft 63, and the drive shaft 65 are kept coaxially and connected, the connection shaft 63 and the roller cap 62 are inserted pin 67a by this clearance. Is axially offset in the longitudinal direction (up and down direction in FIG. 3). On the other hand, the insertion pin 67a has a sufficient length not to fall out from the notch parts 62a and 62b even if the connecting shaft 63 and the roller cap 62 are axially offset. Thus, the structure which connects the roller cap 62, the connection shaft 63, the holder 64, and the drive shaft 65 using the insertion pin 67a-67c is, for example, Unexamined-Japanese-Patent No. 09-26264. (Or Japanese Patent No. 3556739).

The gas supply apparatus 70 is equipped with the 1st gas supply source 71 which supplies a 1st gas, and the 2nd gas supply source 72 which supplies a 2nd gas, as shown in FIG. Moreover, the gas supply apparatus 70 is via the common piping 73 used as the flow path of the 1st gas from the 2nd gas supply source 72 to the connection part 76a, and the connection part 76a through the connection part 76b. The first pipe 74 serving as the flow path of the gas to the first space supply port 18 and the second pipe 75 serving as the flow path of the gas from the connecting portion 76a to the second space supply port 33 are provided. Equipped. In the middle of the gas flow path of the common pipe 73, the filter 80, the flowmeter 81, and the first pressure reducing valve 82 are attached in this order from the second gas supply source 72 toward the connecting portion 76a. It is. Moreover, the 1st flow volume adjusting valve 84 is attached in the middle of the gas flow path of the 1st piping 74 in the downstream side (1st space supply port 18 side) rather than the connection part 76b. In the middle of the gas flow path of the second pipe 75, the second pressure reducing valve 83 and the second flow rate adjusting valve 85 are attached in this order from the connecting portion 76a toward the second space supply port 33. It is.

The first gas supply source 71 is a device that supplies the first gas to the connecting portion 76b of the first pipe 74. This first gas reaches the first space 11a from the connecting portion 76b via the first pipe 74 and the first space supply port 18. The second gas supply source 72 is a device that supplies the second gas to the common pipe 73. The second gas flows into the first pipe 74 from the common pipe 73 and is mixed with the first gas at the connecting portion 76b to be in the first space 11a from the first space supply port 18. To reach. In addition, the second gas flows into the second pipe 75 from the common pipe 73 and reaches the second space 30a through the second space supply port 33. Here, the second gas is a gas containing at least a part of the atmospheric components in the first space 11a at the time of heat treatment of the workpiece 96. In this embodiment, at the time of heat processing, the atmosphere in the 1st space 11a was made into the reducing atmosphere, and specifically, it was set as the atmosphere (for example, hydrogen concentration in atmosphere was several% etc.) which mixed trace amount of hydrogen with nitrogen. And the 2nd gas was made into nitrogen. In addition, the 1st gas contains the component which is not contained in the 2nd gas in the atmosphere in the 1st space 11a at the time of heat processing, and was set as hydrogen in this embodiment.

The filter 80 is a device that removes fine particles such as dust from the second gas supplied from the second gas supply source 72. The flowmeter 81 is a device for measuring the flow rate of the second gas flowing through the common pipe 73. The 1st pressure reduction valve 82 is provided in the upstream of gas rather than the 1st flow regulating valve 84, The pressure of the gas supplied from the 2nd gas supply source 72 in the upstream of its own is made into predetermined | prescribed agent. It pressure-reduces to 1 pressure and flows to one's downstream side. This first pressure is predetermined as a pressure higher than the atmosphere of the first space 11a (for example, a pressure ten times as large as the atmosphere of the first space 11a) during the heat treatment of the workpiece 96. Although it does not specifically limit, 1st pressure may be half or less of the pressure of the 2nd gas supplied from the 2nd gas supply source 72. The 2nd pressure reduction valve 83 is installed in the upstream of gas rather than the 2nd flow regulating valve 85, and pressure-reduces the pressure of the gas supplied to its upstream to the predetermined 2nd pressure, and To the downstream side. On the other hand, as can be seen from FIG. 2, since the first pressure reducing valve 82 is provided upstream of the second pressure reducing valve 83, the first pressure reducing valve 82 is provided at a first pressure on the upstream side of the second pressure reducing valve 83. Gas is supplied. That is, the second pressure reducing valve 83 reduces the gas of the first pressure to the second pressure and flows the downstream side. This second pressure is previously determined as a pressure higher than the atmosphere of the first space 11a (for example, several times the pressure of the atmosphere of the first space 11a) at the time of heat treatment of the workpiece 96. Although it does not specifically limit, 2nd pressure may be 1/100 or less of 1st pressure. The first flow rate adjustment valve 84 is a device for adjusting the flow rate of the gas (the gas in which the first gas and the second gas are mixed) passing through it is a predetermined first flow rate (not to exceed the first flow rate). . The 2nd flow volume adjustment valve 85 is an apparatus which adjusts so that the flow volume of the 2nd gas which may pass through it may become a predetermined 2nd flow volume (not to exceed 2nd flow volume).

The exhaust device 86 is a device connected to the exhaust port 19 to suck and exhaust the atmosphere in the first space 11a. This exhaust device 86 has an exhaust valve 87, an intake valve 88, and an exhaust fan 89. The exhaust valve 87 is an apparatus for adjusting the flow rate of the atmospheric gas flowing from the first space 11a through the exhaust port 19 by adjusting the opening degree of the valve. The intake valve 88 is an apparatus which cools the atmospheric gas which flowed out from the 1st space 11a, for example by inhaling surrounding air | atmosphere etc., for example. The exhaust fan 89 sucks the atmosphere in the first space 11a through the exhaust port 19, the exhaust valve 87, and the intake valve 88, and exhausts it. The exhaust fan 89 may adjust the displacement per unit time.

The object 96 to be processed is subjected to heat treatment, for example, firing, by the heat from the heater 20 when passing through the furnace body 11. Although not specifically limited, in the present embodiment, the object to be processed 96 is a laminate in which a ceramic dielectric and an electrode are laminated (dimensions are, for example, within 1 mm in length and width), and after firing, a chip of a ceramic capacitor is used. did.

Although the structure of the roller hearth kiln 10 was demonstrated using FIG. 1 thru | or FIG. 3 above, in FIG. 2, FIG. 3, the one rotating body 60 and the one drive side which the rotating body 60 penetrates is described. The cover 26, one wall 30, etc. are shown. In the present embodiment, any of the plurality of rotating bodies 60 disposed in the first space 11a is assumed to have the configuration as shown in FIGS. 2 and 3. That is, the roller hearth kiln 10 has the drive side cover 26, the wall 30, the motor 90, and the driven side cover as many as the number of the rotating bodies 60 arrange | positioned in the 1st space 11a. (22) and the like. In addition, the 2nd piping 75 shall branch by the same number as the wall 30 in the downstream of the 2nd flow regulating valve 85, and the branch object may be each of the some 2nd space supply port 33 Assume that you are connected to.

Next, the state which heat-processes the to-be-processed object 96 using the roller hearth kiln 10 comprised in this way is demonstrated. First, the motor 90 is operated to rotate and drive the plurality of rotating bodies 60, and energize the heater 20 to heat the heater 20. The driving force from the rotor 60 to the rotor 60 is determined in advance in the present embodiment based on the time required for the heat treatment. The output of the heater 20 is set in advance based on the temperature (for example, around 1000 degreeC etc.) at the time of the heat processing of the to-be-processed object 96 in the 1st space 11a. Next, the tray 95 which arrange | positions the several to-be-processed object 96 is prepared, and it arrange | positions on the rotating body 60 (conveyance roller 61) of the edge part by the opening 14 side sequentially. Two or more trays 95 may be arrange | positioned in the direction perpendicular | vertical to a conveyance direction (left-right direction of FIG. 2). The tray 95 placed on the conveyance roller 61 is carried in into the furnace 11 by the rotation of the some conveyance roller 61, and is conveyed sequentially in a conveyance direction. And the tray 95 passes out from the opening 15 side through the 1st space 11a. In this way, in the roller hearth kiln 10, the motor 90 rotates the rotating body 60 to the heater 20 while sequentially conveying the workpiece 96 in the first space 11a. Heat treatment is carried out.

And while conveying the to-be-processed object 96, ie, performing heat processing, the 1st gas and the 2nd gas are supplied from the 1st gas supply source 71 and the 2nd gas supply source 72, respectively, The exhaust fan 89 sucks and exhausts the atmosphere in the first space 11a. The flow of gas will be described below.

The second gas supply source 72 supplies the common pipe 73 with a second gas having a pressure exceeding the first pressure and the second pressure. The second gas supplied to the common pipe 73 passes through the filter 80 and the flow meter 81, and is reduced in pressure to the first pressure by the first pressure reducing valve 82. The 2nd gas decompressed by the 1st pressure reduction valve 82 flows branched from the connection part 76a to the 1st piping 74 and the 2nd piping 75. The second gas flowing through the first pipe 74 is mixed with the first gas supplied from the first gas supply source 71 at the connecting portion 76b. On the other hand, the first gas supply source 71 supplies the first gas to the connecting portion 76b at a pressure equal to or slightly higher than the first pressure, for example. The gas which mixed the 1st gas and the 2nd gas is adjusted so that flow volume may become a 1st flow volume by the 1st flow volume adjustment valve 84 downstream of the connection part 76b, and a 1st space supply port by this 1st flow volume In 18, it flows into the 1st space 11a.

On the other hand, the 2nd gas branched from the connection part 76a to the 2nd piping 75 is pressure-reduced to the 2nd pressure by the 2nd pressure reduction valve 83, and the flow volume is set by the 2nd flow volume adjustment valve 85, and It adjusts so that it may become 2 flow volume, and it flows into the 2nd space 30a from the 2nd space supply port 33 at this 2nd flow volume. Here, the second pressure is set to a value higher than the pressure of the atmosphere of the first space 11a during the heat treatment, and the pressure of the second gas supplied into the second space 30a is equal to the first space 11a [and]. The third space 26a communicated thereto is adjusted to be higher than the pressure of the atmosphere. Moreover, although the 2nd space 30a communicates with the 3rd space 26a through the clearances 44a and 45a of the 1st bearing 40, the wall 30 is kept airtight other than that. Thereby, the 2nd gas supplied to the 2nd space 30a is going toward the 1st space 11a side from the clearance 44a, 45a of the 1st bearing 40. As shown in FIG. For this reason, the second gas in the second space 30a flows into the first space 11a from the gaps 44a and 45a via the third space 26a.

In this way, the first gas and the second gas are supplied to the first space 11a via the first space supply port 18, and the second gas is supplied to the first space via the second space supply port 33. It is supplied to 11a, and what mixed these gases becomes the atmospheric gas in the 1st space 11a. In the present embodiment, the supply amount of the first gas from the first gas supply source 71 and the first gas so that the atmosphere in the first space 11a becomes a desired composition (for example, a nitrogen atmosphere having a hydrogen concentration of several%) during the heat treatment. The supply amount of the 2nd gas from the 2 gas supply source 72 shall be previously determined by experiment. In addition, the atmosphere of the first space 11a is exhausted by the exhaust fan 89. For this reason, the pressure in the 1st space 11a can be adjusted by the balance of the gas supply from the 1st gas supply source 71 and the 2nd gas supply source 72, and the gas exhaust from the exhaust fan 89. FIG. . In the present embodiment, the first pressure, the second pressure, the first flow rate, the second flow rate, so that the atmosphere in the first space 11a is maintained at a desired pressure (for example, a pressurized atmosphere of about several hundred PaG) during the heat treatment. The opening degree of the exhaust valve 87, the exhaust amount of the exhaust fan 89, and the like are determined in advance by experiment. On the other hand, for example, a pressure gauge is arranged in the first space 11a and the second space 30a, and the computer detects the pressure detected by the pressure gauge and inputs the value detected by the pressure gauge to the computer so that the computer approaches the first pressure, second pressure, The first flow rate, the second flow rate, the opening degree of the exhaust valve 87 and the exhaust amount of the exhaust fan 89 may be controlled.

On the other hand, when the atmosphere of the first space 11a becomes the atmospheric atmosphere at the start of the heat treatment, the gas supply and the exhaust fan 89 from the first gas supply source 71 and the second gas supply source 72 are performed. May be first started, and the conveyance of the object 96 may be started after the atmosphere of the first space 11a becomes the desired atmosphere during heat treatment.

Here, the correspondence of the component of this embodiment and the component of this invention is revealed. The roller hearth kiln 10 of this embodiment is corresponded to the heat processing apparatus of this invention, the furnace body 11 is corresponded to a furnace body, the 1st wall part 31 corresponded to a 1st wall part, and the 2nd wall part 32 was carried out. Corresponds to the second wall portion, the wall 30 corresponds to the wall, the rotor 60 corresponds to the rotor, the motor 90 corresponds to the driving means, and the first bearing 40 corresponds to the first. It corresponds to a bearing, the 2nd bearing 50 corresponds to a 2nd bearing, and the 2nd space supply port 33 corresponds to a 2nd space supply port. Further, the spheres 43 and 53 correspond to the rotating body, the drive side cover 26 corresponds to the third space forming member, the drive side support roller 28 corresponds to the support means, and the second gas supply source ( 72 corresponds to the gas supply means, and the exhaust fan 89 corresponds to the exhaust means. In addition, in this embodiment, an example of the heat processing method of this invention is also made clear by demonstrating operation | movement of the roller hearth kiln 10. As shown in FIG.

The roller hearth kiln 10 of this embodiment demonstrated above has the furnace body 11 which forms the 1st space 11a as a process space, and the 2nd space 30a which communicates with the 1st space 11a inside. And a wall 30 having a first wall portion 31, a second wall portion 32, and a second space supply port 33 through which the gas can be supplied from the outside into the second space 30a. . Moreover, the 1st wall part 31 and the 2nd space which the rotating body 60 which can convey the to-be-processed object 96 in the 1st space 11a toward the external space from the 1st space 11a side are shown. 30a and the second wall part 32 penetrate in this order, and one end protrudes from the second wall part 32. Then, the motor 90 connected to one end side of the rotating body 60 drives the rotating body 60 to rotate the object to be processed 96 by the rotating body 60 in the first space 11a. The object to be processed 96 is heat-treated in the first space 11a while conveying. At this time, the gaps 44a and 45a through which the gas can flow in the penetrating direction of the rotating body 60 while supporting the rotating body 60 rotatably in a portion where the rotating body 60 penetrates through the first wall portion 31. The 1st bearing 40 which is a rolling bearing which has a is provided. Moreover, in the part which the rotating body 60 penetrates through the 2nd wall part 32, while supporting the rotating body 60 rotatably, the 2nd bearing which is a rolling bearing with high sealing property compared with the 1st bearing 40 ( 50) is installed. During the heat treatment, high-pressure gas is supplied into the second space 30a through the second space supply port 33 as compared with the atmosphere of the first space 11a. As a result, the gas supplied to the second space 30a is directed toward the first space 11a from the gaps 44a and 45a of the first bearing 40 having a lower sealability than the second bearing 50. do. For this reason, it turns out that atmospheric gas flows out from the 1st space 11a through the clearance gap 44a, 45a of the through-hole 16, the 3rd space 26a, and the 1st bearing 40, and the 2nd space 30a. ), Gas trying to face the first space 11a is suppressed. Therefore, the outflow of the atmosphere from the inside of the furnace body 11 to the external space can be further suppressed. On the other hand, the rotating body 60 penetrates the furnace body 11, the driving side cover 26, and the wall body 30 and protrudes into the external space, so that the rotating body 60 rotates, for example, bushing or the like. Even if is used, it is difficult to completely seal the gap between the periphery of the rotating body 60. In the roller hearth kiln 10 of this embodiment, the wall 30 blocks the opening 27 of the drive side cover 26 which becomes the outlet of the atmosphere from the 1st space 11a, and the periphery of the rotating body 60 Clearly, the gaps 44a and 45a are formed. As a result, the gas is actively introduced into the first space 11a via the penetrating portion of the rotating body 60, so that the gap is not sealed, but the flow of gas causes the gas to flow in the atmosphere of the first space 11a. Spill is suppressed. On the other hand, in the roller hearth kiln 10, since hydrogen is contained in the atmosphere of the 1st space 11a at the time of heat processing, the meaning which suppresses that this atmosphere flows out into the external space is large.

In addition, the second bearing 50 includes the inner ring 51, the outer ring 52, the plurality of spheres 53 accommodated between the inner ring 51 and the outer ring 52, and the shaft of the inner ring 51. It has the shielding members 54 and 55 arrange | positioned between the inner ring 51 and the outer ring 52 in the position shifted | deviated from the some sphere 53 in the direction. The shield members 54 and 55 of the second bearing 50 seal between the inner ring 51 and the outer ring 52. Thereby, the clearance gap through which gas can flow in the penetrating direction of the rotating body 60 in the 2nd bearing 50 can be sealed using the shielding members 54 and 55. FIG. For this reason, it can suppress more that the atmosphere (for example, 2nd gas supplied from the 2nd space supply port 33) of the 2nd space 30a flows out through the clearance gap of the 2nd bearing 50 to an external space. .

Moreover, the 1st bearing 40 has the inner ring 41, the outer ring 42, the some sphere 43 accommodated between the inner ring 41, and the outer ring 42, and the shaft of the inner ring 41. As shown in FIG. And shielding members 44 and 45 disposed between the inner ring 41 and the outer ring 42 at positions displaced from the plurality of spheres 43 in the direction. The shield members 44 and 45 of the first bearing 40 form gaps 44a and 45a between the inner ring 41 and the outer ring 42. Accordingly, the gaps 44a and 45a through which gas can flow in the penetrating direction of the rotating body 60 in the first bearing 40 can be easily reduced by using the shielding members 44 and 45. Accordingly, while the gas is directed from the second space 30a to the first space 11a, dust or the like is moved from the second space 30a to the first space 11a through the gap of the first bearing 40. It is easy to suppress the invasion of fine particles.

In addition, the roller hearth kiln 10 heat-processes including the heat processing of the to-be-processed object 96. Here, when the process including heat processing is performed in the 1st space 11a, the 1st bearing 40 may be heated by the rotor 60 being heated in the furnace 11, etc. in some cases. In this case, gas is supplied from the second space supply port 33 to the second space 30a, and the first space is spaced from the second space 30a through the gaps 44a and 45a of the first bearing 40. By generating the flow toward 11a, the first bearing 40 can be cooled by the flow of this gas to suppress the heating.

And the furnace 11 has the exhaust port 19 which can exhaust the atmosphere in the 1st space 11a. At the time of heat treatment, the atmosphere of the first space 11a is exhausted from the exhaust port 19 and gas is supplied to the second space 30a so that the atmosphere of the first space 11a is maintained at a predetermined pressure. . For this reason, when gas is supplied into the 1st space 11a through the clearances 44a and 45a of the 2nd space supply port 33, the 2nd space 30a, and the 1st bearing 40, the exhaust port ( By exhausting the atmosphere from 19, the pressure of the atmosphere in the first space 11a can be adjusted to a predetermined pressure. In addition, the furnace 11 has a first space supply port 18 capable of supplying gas into the first space 11a. At the time of heat treatment, the atmosphere of the first space 11a is exhausted from the exhaust port 19 so that the atmosphere of the first space 11a is maintained at a predetermined pressure, and the first space 11a and the second space ( Supply gas to 30a). As a result, the gas is supplied to the first space 11a via a path which does not pass through the gaps 44a and 45a of the second space 30a and the first bearing 40. Thus, the atmosphere in the first space 11a is reduced. Easy to adjust

And the roller hearth kiln 10 is the 1st piping 74 connected to the 1st space supply port 18, the 2nd piping 75 connected to the 2nd space supply port 33, and the 1st The common pipe 73 connected to the piping 74 and the 2nd piping 75 is provided. At the time of heat treatment, the gas is supplied to the common pipe 73 so that the high-pressure gas is compared to the atmosphere of the first space 11a through the common pipe 73 and the second pipe 75. 30a is supplied, and gas is supplied into the 1st space 11a through the common piping 73 and the 1st piping 74. FIG. Thereby, both the gas supply to the 1st space 11a through the 1st space supply port 18 and the gas supply to the 2nd space 30a through the 2nd space supply port 33 are common piping. This can be performed by supplying gas to the 74. In the heat treatment, the first gas is supplied to the first pipe 74 by the first gas supply source 71 from a path other than the common pipe. For this reason, while supplying gas to both the 1st space 11a and the 2nd space 30a by supplying gas to the common piping 73, gas from other path | route also flows to the 1st piping 74 (common piping By mixing with gas from (73), the composition of the gas supplied through the 1st space supply port 18 and the gas supplied through the 2nd space supply port 33 can be made different.

And the roller hearth kiln 10 is connected to the 1st piping 74, and is connected to the 1st flow volume adjusting valve 84 which adjusts the flow volume of the 1st piping 74, and the 2nd piping 75, 2nd flow volume adjustment valve 85 which adjusts the flow volume of the piping 75 is provided. Then, at the time of heat treatment, by supplying gas to the common pipe 73, the gas whose flow rate is adjusted by the first flow rate adjustment valve 84 through the common pipe 73 and the first pipe 74 is first supplied. It supplies to space 11a, and supplies the gas by which the flow volume was adjusted by the 2nd flow regulating valve 85 via the common piping 73 and the 2nd piping 75 to 2nd space 30a. Thus, the flow volume of the gas which flows into the 1st space 11a and the 2nd space 30a can be adjusted.

And the roller hearth kiln 10 is provided in the common piping 73, and the 1st pressure reduction valve 82 and the 2nd piping 75 which were provided in the upstream rather than the 1st flow regulating valve 84, The 2nd pressure reduction valve 83 provided upstream rather than the 2 flow control valve 85 is provided, The 1st pressure reduction valve 82 makes the pressure of the gas of a downstream side high pressure than the atmosphere of the 1st space 11a. The pressure is reduced to the first pressure, and the second pressure reducing valve 83 reduces the pressure of the gas on the downstream side to a second pressure that is higher than the atmosphere of the first space 11a. At the time of heat treatment, the gas having a pressure exceeding the first pressure and the second pressure is supplied to the common pipe 73. As a result, since a gas having a higher pressure than the pressure after pressure reduction (first pressure and second pressure) is supplied from the common pipe, even if the pipe upstream of the first pressure reducing valve or the upstream of the second pressure reducing valve is thinner, Flow rate can be secured. Since the piping can be thinned, for example, the configuration can be made compact, such as reducing the installation area of the roller hearth kiln 10, or the manufacturing cost can be reduced.

And the roller hearth kiln 10 forms the 3rd space 26a which communicates with the 1st space 11a and the 2nd space 30a between the 1st space 11a and the 2nd space 30a. And a drive side cover 26 penetrating the rotating body 60. Thereby, the 3rd space 26a exists between the 1st space 11a and the 2nd space 30a, for example, the 1st bearing 40 of the wall 30 by heat conduction from the furnace body 11, for example. The influence from the furnace body 11 to the wall body 30, such as the temperature of the second bearing 50, can be further suppressed.

And the rotating body 60 is driven by the conveyance roller 61 which can convey the to-be-processed object 96 in the 1st space 11a, and the motor 90, and penetrates the wall 30. On the drive shaft 65 of the drive shaft 65, the end of the conveying roller 61 side of the drive shaft 65 is inserted and connected to the holder 64 of the hollow pipe-like, and the drive shaft 65 of the conveying roller 61 A fixed roller cap 62 and a connecting shaft 63 inserted into the holder 64 and the roller cap 62 and connected to the holder 64 and the roller cap 62 are provided. The holder 64, the roller cap 62, and the connecting shaft 63 are disposed in the third space 26a, and there is a clearance between the inner circumferential surface of the roller cap 62 and the connecting shaft 63. The connecting shaft 63 is connected to the roller cap 62 so that an axis offset is possible by clearance. As a result, the connecting shaft 63 is connected to the roller cap 62 in such a manner that the shaft can be offset so that the drive shaft 65 can be rotated even if the conveyance roller 61 and the drive shaft 65 are eccentric. The rotational driving force from the motor 90 can be transmitted to the conveyance roller 61 through it. On the other hand, when the roller cap 62 and the connecting shaft 63 are not axially offset, if an axial offset occurs in the conveyance roller 61 and the drive shaft 65, an excessive force is applied to any part of the rotating body 60. It may be applied and the rotating body 60 may be damaged. By connecting the connecting shaft 63 to the roller cap 62 so that the shaft can be offset, such damage of the rotating body 60 can be suppressed more. On the other hand, the roller hearth kiln 10 heat-processes the to-be-processed object 96, and the axial offset of the conveyance roller 61 and the drive shaft 65 is changed by the temperature difference between the 1st space 11a and an external space. Since it is easy to produce, the significance of applying this invention is large.

And since the roller hearth kiln 10 is equipped with the gas supply apparatus 70 which supplies the high pressure gas in the 2nd space 30a compared with the atmosphere of the 1st space 11a, it is the 2nd space 30a. ) May flow through the gaps 44a and 45a of the first bearing 40 toward the first space 11a.

In addition, this invention is not limited to embodiment mentioned above at all, As long as it belongs to the technical scope of this invention, of course, it can implement.

For example, in the above-mentioned embodiment, although the shielding members 54 and 55 of the 2nd bearing 50 sealed between the inner ring 51 and the outer ring 52, it is not limited to this, The 1st bearing Compared with 40, the sealing property of the 2nd bearing 50 should just be high. For example, the shielding members 54 and 55 of the second bearing 50 may form a gap between the inner ring 51 similarly to the shielding members 44 and 45 of the first bearing 40. In this case, the sealing property of the second bearing 50 is higher than that of the first bearing 40 such that the gap of the second bearing 50 is smaller than the gaps 44a and 45a of the first bearing 40 [ Gas may pass through the first bearing 40 more easily than the second bearing 50]. Alternatively, the first bearing 40 may not include at least one of the shielding members 44 and 45, and the second bearing 50 may not include at least one of the shielding members 54 and 55. good. The 1st bearing 40 and the 2nd bearing 50 do not need to be equipped with the shielding member together. In this case, the difference between the outer diameter of the inner ring 41 and the inner diameter of the outer ring 42 in the first bearing 40 is the difference between the outer diameter of the inner ring 51 and the inner diameter of the outer ring 52 in the second bearing 50. The sealing property of the second bearing 50 may be higher than that of the first bearing 40 so as to be larger than the difference. Alternatively, the number and diameter of the spheres 43 and the spheres 53 may be adjusted to make the sealing property of the second bearing 50 higher than that of the first bearing 40. In addition, the shield members 44 and 45 of the first bearing 40 do not form a gap with the outer circumferential surface of the inner ring 51 like the shield members 54 and 55, and instead the shield members 44 and 45. By forming a separate hole in), a gap serving as a gas flow path may be formed. On the other hand, the inner ring 51 and the outer ring of the second bearing 50, for example, when the shielding members 54 and 55 of the second bearing 50 form a gap between the inner ring 51 and the outer ring 52. When there is a gap between 52 and 52, the gas supplied from the second space supply port 33 to the second space 30a may flow out to the external space. However, in this embodiment, since the 2nd gas supplied to the 2nd space 30a was made into nitrogen, even if it flows out to an external space, there is no problem. In addition, the gas supplied from the 2nd space supply port 33 to the 2nd space 30a is not limited to nitrogen, It is preferable to set it as gas which is satisfactory even if it flows out, such as an inert gas.

In the above-described embodiment, the driving side cover 26 and the wall body 30 are provided in the same number as the number of the rotating bodies 60 disposed in the first space 11a. The drive side cover 26 and the wall 30 may be shared by the rotating body 60. However, the structure in which one wall 30 penetrates the one rotating body 60 allows the second space 30a to have a small volume so as to supply the gas to the second space supply port 33. The flow rate can be reduced.

In the above-mentioned embodiment, although the rotating body 60 penetrated the furnace body 11, the drive side cover 26, and the wall 30 in a straight line, it is not limited to this. For example, the drive shaft 65 has a first member penetrating the first wall portion 31 having an axis in the left and right direction in FIG. The axis of the rotating body 60 may not be straight, for example, when it is connected in 30a) and has the 2nd member which penetrates the wall 30 below. In this case, what is necessary is just to arrange | position the 2nd bearing 50 in the part which a 2nd member penetrates the wall 30 below. Also in this structure, like the embodiment mentioned above, it can suppress that the atmosphere of the 1st space 11a flows out to an external space along the axial direction of the rotating body 60. As shown in FIG.

In the above-described embodiment, the third space 26a is formed between the first space 11a and the second space 30a, but the first space 11a and the second space 30a communicate with each other. It is enough. For example, the roller hearth kiln 10 may not be provided with the drive side cover 26, and the 3rd space 26a may not be formed. In this case, the first space 11a and the second space 30a are formed in the through holes 16 and the gaps 44a due to the contact between the first wall portion 31 and the furnace body 11 of the wall 30. It may be in communication with 45a). In this case, the roller cap 62, the connection shaft 63, the holder 64, etc. may be arrange | positioned in the 2nd space 30a.

In the above-mentioned embodiment, although the drive shaft 65 and the conveyance roller 61 were connected through the roller cap 62, the connection shaft 63, and the holder 64, even if one or more of these components is abbreviate | omitted, good. In addition, the connection between the roller cap 62, the connection shaft 63, the holder 64, and the drive shaft 65 is not limited to using insertion pins 67a-67c.

In the above-described embodiment, the first bearing 40 and the second bearing 50 are ball bearings. do. For example, at least one of the 1st bearing 40 and the 2nd bearing 50 may be set as the structure which has a cylindrical member instead of the spheres 43 and 53 as a rolling element.

In the above-mentioned embodiment, although the heat processing by the heater 20 is performed with respect to the to-be-processed object 96, what is necessary is just to heat-process. For example, the cooling treatment may be performed, or the heating treatment and the cooling treatment may be performed in a predetermined order.

In the above embodiment, the first pressure reducing valve 82 is provided in the common pipe 73, but may be provided in the first pipe 74. For example, the first pressure reducing valve 82 is provided between the connecting portion 76b and the first flow regulating valve 84. It may be provided in the pipe 74. In addition, you may not be provided with any one or more of the 1st pressure reduction valve 82 and the 2nd pressure reduction valve 83.

In the above-mentioned embodiment, although the gas supply apparatus 70 is equipped with the 1st flow regulating valve 84 and the 2nd flow regulating valve 85, the 1st flow regulating valve 84 and the 2nd flow regulating valve. You may not be provided any one or more of (85).

In the above-mentioned embodiment, although the 1st piping 74 and the 2nd piping 75 were connected to the common piping 73, it is not limited to this. For example, the common gas 73 is not provided, and the first gas supply source 71 supplies the first gas to the first space 11a through the first pipe 74 and the first space supply port 18. The second gas supply source 72 may supply the second gas to the second space 30a through the second pipe 75 and the second space supply port 33. In this case, for example, the first gas may be a mixed gas of nitrogen and hydrogen, and the second gas may be nitrogen. Alternatively, the gas supply device 70 does not include the first space supply port 18, and the gas supply device 70 supplies gas to the second space 30a from the second pipe 75 through the second space supply port 33. The gas may be supplied to the first space 11a via the second space 30a.

In the above-described embodiment, the exhaust fan 89 of the exhaust device 86 exhausts the atmosphere of the first space 11a through the exhaust port 19, but is not limited thereto. For example, the exhaust fan 89 may not be provided and the atmosphere of the first space 11a may not be sucked. Alternatively, the exhaust port 19 may not be provided.

In the above-mentioned embodiment, although the atmosphere of the 1st space 11a at the time of heat processing was made into the reducing atmosphere containing nitrogen and hydrogen, it is not limited to this, You may set it as what kind of atmosphere. What is necessary is just to determine suitably the composition, temperature, pressure, etc. of the atmosphere at the time of heat processing according to the to-be-processed object.

In the above-described embodiment, the wall 30 is a structure in which a plurality of plate members including the first wall portion 31 and the second wall portion 32 are combined, but is not limited thereto. The first wall portion 31 and the second wall portion 32 may be part of the wall 30 or may not be independent members. For example, the wall 30 may be an integrally formed structure.

In the above-mentioned embodiment, although the rotating body 60 penetrates the 2nd wall part 32, it was supposed that the 2nd bearing 50 with high sealing property compared with the 1st bearing 40 is provided, It is not limited to this. The sealing member which is not limited to the 2nd bearing 50 but has a high sealing property compared with the 1st bearing 40 should just be provided in the part through which the rotating body 60 penetrates the 2nd wall part 32. As shown in FIG. 4 is an enlarged cross-sectional view of the periphery of the wall 30 in the roller hearth kiln of the modification in this case. 4, the same code | symbol is attached | subjected about the component same as the roller hearth kiln 10 mentioned above, and detailed description is abbreviate | omitted. In FIG. 4, the second wall portion 132 of the wall 30 is penetrated by the drive shaft 65, and one end side bearing 150 and the shaft seal 156 are attached to the penetrating portion. The one end side bearing 150 is a ball bearing which rotatably supports the rotating body 60 (drive shaft 65), and has the one end side of the drive shaft 65 rather than the 1st bearing 40 and the shaft seal 156 ( It is arrange | positioned at the left side of FIG. The one end side bearing 150 has the same structure as the above-mentioned second bearing 50 except that the shielding members 54 and 55 are not provided. The shaft seal 156 is a ring-shaped member, and the drive shaft 65 penetrates through the center. The shaft seal 156 is an oil seal and is comprised as a sealing member with high sealing property compared with the 1st bearing 40. As shown in FIG. The shaft seal 156 includes a main body portion 157, a metal ring 158, and a spring 159. The main body 157 is a ring-shaped member made of an elastic body such as rubber, and the outer circumferential surface and the surface of the second space 30a side (right side in FIG. 4) are fixed to the second wall portion 132. The main body portion 157 is provided with a seal lip portion 157a and a dust lip portion 157b on its inner peripheral surface side. The seal lip portion 157a has a shape in which the tip thereof becomes thin toward the drive shaft 65 when viewed from the cross section in the axial direction of the drive shaft 65, and is in contact with the drive shaft 65 at this tip. The dust lip portion 157b protrudes toward the drive shaft 65, and the tip thereof is in contact with the outer circumferential surface of the drive shaft 65. The dust lip portion 157b serves to prevent intrusion of dust or the like from the external space. The metal ring 158 is a ring-shaped member disposed so as to surround the drive shaft 65, and the main body portion 157 is pushed against the second wall portion 132. For this reason, there is no gap between the main body portion 157 and the second wall portion 132, and the shaft seal 156 and the second wall portion 132 are sealed. The spring 159 is a ring-shaped elastic body provided to surround the seal lip portion 157a. Due to the elastic force of the spring 159, the tip of the seal lip portion 157a is pushed against the outer circumferential surface of the drive shaft 65. For this reason, there is no gap between the drive shaft 65 and the main body 157, and the space between the drive shaft 65 and the shaft seal 156 is sealed. In the roller hearth kiln of the modification comprised in this way, the axial seal 156 which is high in sealing property compared with the 1st bearing 40 is provided in the part through which the rotating body 60 penetrates the 2nd wall part 132. For this reason, similarly to the above-described embodiment, the gas supplied to the second space 30a is directed toward the first space 11a, so that the gap 44a of the first bearing 40 is from the first space 11a. , 45a) can be suppressed from flowing out of the atmosphere gas. On the other hand, in the roller hearth kiln of the modification shown in FIG. 4, the bearing 150 bears the role which supports the drive shaft 65, and demonstrates the high sealing performance compared with the 1st bearing 40. As shown in FIG. The axis seal 156 is in charge of. In contrast, the second bearing 50 of the above-described embodiment has a role of the one end bearing 150 and a role of the shaft seal 156. On the other hand, in the roller hearth kiln of the modification shown in FIG. 4, it is assumed that there is no gap between the shaft seal 156 and the second wall portion 132 or between the shaft seal 156 and the drive shaft 65. If the sealability of the shaft seal 156 is higher than that of the first bearing 40, a gap may be formed. In addition, although the axial seal 156 was made into the oil seal, what kind of axial seal may be used if the sealing property is high compared with the 1st bearing 40. As shown in FIG. As shown in FIG. 4, the one-side bearing 150 is arranged on one end side (left side in FIG. 4) of the drive shaft 65 rather than the shaft seal 156. You may arrange | position it to the other end side (right side of FIG. 4) of the drive shaft 65 rather than the shaft seal 156. As shown in FIG. For example, the arrangement of the one-side bearing 150 and the shaft seal 156 in FIG. 4 may be reversed. In addition, in FIG. 4, although the one end side bearing 150 is not provided with the shielding members 54 and 55, and the one end side bearing 150 is a sealing property lower than the 1st bearing 40, the 1st bearing ( The sealing property may be higher than 40). In addition, although the one end side bearing 150 of FIG. 4 was made into the ball bearing, it is not limited to this, What is necessary is just a rolling bearing provided with the inner ring, the outer ring, and the some rolling element accommodated between the inner ring and the outer ring.

In the roller hearth kiln of the modification shown in FIG. 4, although the one end side bearing 150 was provided in the part which the rotating body 60 penetrates the 2nd wall part 132, it is not limited to this. For example, the one-side bearing 150 may support the rotating body 60 in the outer space. 5 is an enlarged cross-sectional view of the periphery of the wall 30 in the roller hearth kiln of the modification in this case. In addition, in FIG. 5, the same code | symbol is attached | subjected about the component same as the roller hearth kiln 10 mentioned above or the roller hearth kiln of FIG. 4, and detailed description is abbreviate | omitted. In FIG. 5, the second wall portion 232 of the wall 30 penetrates through the drive shaft 65. A shaft seal 156 is attached to this through portion. Moreover, one end side (left side of FIG. 5) of the rotating body 60 (drive shaft 65) penetrates the support part 294 in an outer space. The one end side bearing 250 is provided in the part through which the drive shaft 65 penetrates the support part 294. The one end side bearing 250 is a ball bearing which rotatably supports the rotating body 60 (drive shaft 65) in an outer space, and has the same structure as the one end side bearing 150 of FIG. Further, cam clutches 293a and 293b are provided between the wall 30 and the support portion 294. The cam clutch 293a is disposed between the cam clutch 293b and the wall 30. The cam clutches 293a and 293b are ring members, and the drive shaft 65 penetrates the center thereof. Although not shown, the cam clutches 293a and 293b have an inner ring and an outer ring, and are configured to transmit driving force from the outer ring to the inner ring, while driving force from the inner ring is not transmitted to the outer ring (to allow the inner ring to revolve with respect to the outer ring). It is a mechanical clutch. The inner rings of the cam clutches 293a and 293b are connected to the outer circumferential surface of the drive shaft 65, respectively. The outer rings of the cam clutch 293a and 293b are coaxially connected to the sprockets 266a and 266b, respectively. The roller chains 292a and 292b hang on the sprockets 266a and 266b, respectively. The roller chain 292a is arrange | positioned so that the drive shaft of the sprocket 266a and the low speed motor (not shown) arrange | positioned at the outer space may be applied. The roller chain 292b is disposed so as to span the sprocket 266b and the drive shaft of a high speed motor (not shown) disposed in the outer space. The rotational driving force output from the low speed motor is transmitted to the drive shaft 65 via the cam clutch 293a to rotate the entire rotating body 60 at low speed. In addition, even if the drive shaft 65 rotates by the low speed motor, since the inner ring of the cam clutch 293b revolves, rotation driving force is not transmitted to the high speed motor. Similarly, the rotation drive force output from the high speed motor is transmitted to the drive shaft 65 via the cam clutch 293b to rotate the entire rotating body 60 at high speed. In addition, even if the drive shaft 65 rotates by the high speed motor, since the inner ring of the cam clutch 293a revolves, rotation driving force is not transmitted to the low speed motor. Thus, the rotating body 60 of FIG. 5 can be rotated at different speeds by a low speed motor and a high speed motor. For this reason, switching of the conveyance speed of the to-be-processed object 96 by the rotating body 60 is attained. In the roller hearth kiln of the modified example comprised in this way, the shaft seal 156 which is high in sealing property compared with the 1st bearing 40 is provided in the part through which the rotating body 60 penetrates the 2nd wall part 232. . For this reason, similarly to the above-mentioned embodiment and the roller hearth kiln of FIG. 4, the gas supplied to the 2nd space 30a is directed toward the 1st space 11a, and the 1st bearing from the 1st space 11a is carried out. It is possible to suppress the outflow of the atmospheric gas through the gaps 44a and 45a of the 40. On the other hand, although the one end side bearing 250 of FIG. 5 was made into the ball bearing, you may use any bearing not only this. For example, rolling bearings other than ball bearings may be used. For example, like the driven side support roller 24 and the drive side support roller 28 of the above-mentioned embodiment, you may be a rolling bearing which supports the drive shaft 65 rotatably from the lower side. Alternatively, the one end side bearing 250 may be a sliding bearing.

In addition, the one end side bearing 150 may be abbreviate | omitted in FIG. 4, and the one end side bearing 250 may be abbreviate | omitted in FIG. Even in this case, if there is a first bearing 40 and one or more bearings (for example, the driven side support roller 24, the drive side support roller 28, etc.), the drive shaft 65 can be rotatably supported.

Second Embodiment

FIG. 6: is a longitudinal cross-sectional view of the roller hearth kiln 310 of 2nd Embodiment. The roller hearth kiln 310 is further equipped with the conveyance paths 329, 429 etc. in the roller hearth kiln 10 of 1st Embodiment. For this reason, about the component same as the roller hearth kiln 10, the same code | symbol is attached | subjected and description or illustration is abbreviate | omitted, and mainly the different components, such as conveyance paths 329 and 429 among the roller hearth kiln 310, are demonstrated. .

First, the conveyance path 329 is demonstrated. The conveyance path 329 becomes a carrying path of the to-be-processed object 96 from the exterior to the opening 14 of the furnace body 11. In the conveyance path 329, the some (10 in this embodiment) conveyance roller 335 is arrange | positioned from the conveyance port 52 to the opening 14 along a conveyance direction (front-back direction of FIG. 1). The conveyance roller 335 is rotationally driven by the motor etc. which are not shown in figure, and conveys the tray 95 and the to-be-processed object 96. FIG. The conveyance path 329 is arranged in the order of the 3rd conveyance path 350, the 1st conveyance path 330, and the 2nd conveyance path 340 from the exterior toward the furnace 11 (from front to back). It is supposed to be done. Hereinafter, this procedure will be described.

The 3rd conveyance path 350 is a carrying path for conveying the tray 95 and the to-be-processed object 96 to the 1st conveyance path 330 from the exterior, and is comprised as a pipeline. This 3rd conveyance path 350 has the conveyance opening 352 used as an entrance opening from the exterior. Inside of the 3rd conveyance path 350, four of the some conveyance roller 335 mentioned above is arrange | positioned.

The 1st conveyance path 330 is a carrying path for conveying the tray 95 and the to-be-processed object 96 from the 3rd conveyance path 350 to the 2nd conveyance path 340, and is comprised as a pipeline. Three of the above-mentioned several conveyance rollers 335 are arrange | positioned inside this 1st conveyance path 330. As shown in FIG.

The upper space formation part 360 is provided in the vertical upper side of this 1st conveyance path 330. As shown in FIG. This upper space formation part 360 has the box-shaped outer wall 362 which the lower direction opened, As a space inside this outer wall 362, it vertically opens and communicates in the 1st conveyance path 330. As shown in FIG. An upper space 363 is formed. The outer wall 362 has an airtight structure other than the opening in the downward direction, and almost no outflow and inflow of gas to the outside that passes through the first conveying path 330 occurs. On the other hand, the outer wall 362 is inclined in the direction away from the upper part 11 with respect to the furnace body 11 in the wall part of the front (left side of FIG. 1), and the wall part of the back (right side of FIG. 1). As a result, the upper space 363 is a space inclined in the direction away from the upper body 11. Moreover, the upper space formation part 360 is equipped with the partition member 364a, 364b which inclined in the direction away from the top 11 with respect to the furnace body 11 inside the outer wall 362. As shown in FIG. The partition members 364a and 364b are flat members arranged in this order from the front to the rear, and although not shown, both ends in the left and right directions are attached to the left and right wall portions of the outer wall 362, for example, by welding or the like. have. The partition members 364a and 364b, the front wall portion of the outer wall 362 and the rear wall portion are both inclined from the front toward the upper side by the same angle θ1. Inclination angle (theta) 1 should just exceed 0 degree-less than 90 degree. Although it does not specifically limit, For example, angle (theta) 1 may be 30-60 degrees. In this embodiment, angle (theta) 1 was 45 degrees. By the partition members 364a and 364b, a part of the upper space 363 is partitioned into partition spaces 365a to 365c. The partition space 365a is a space partitioned by the wall part in front of the outer wall 362 and the partition member 364a. The partition space 365b is a space partitioned by the partition member 364a and the partition member 364b. The partition space 365c is a space partitioned by the partition member 364b and the wall portion behind the outer wall 362. All of these division spaces 365a-365c open in the 1st conveyance path 330 below. In addition, the partition members 364a and 364b do not both contact the ceiling of the outer wall 362. For this reason, partition spaces 365a-365c are mutually connected in the upper side (near the ceiling of the outer wall 362) of the upper space 363. On the other hand, at an upper portion of the outer wall 362, a suction port 366 is formed to be connected to the suction device 367 and to suck the upper space 363. The suction device 367 sucks and exhausts gas in the upper space 363 through the suction port 366.

Moreover, the lower space formation part 370 is provided in the perpendicular lower side of the 1st conveyance path 330. As shown in FIG. This lower space formation part 370 has the box-shaped outer wall 372 which the upper direction opened, and is opened as an inner space of this outer wall 372 and communicates in the 1st conveyance path 330 vertically. The lower space 373 is formed. The outer wall 372 has a hermetic structure other than the opening in the upward direction, and almost no outflow and outflow of gas to and from the outside through the first conveying path 330 occurs. On the other hand, the outer wall 372 is inclined in the direction in which the wall portion at the front side (left side in FIG. 1) and the wall portion at the rear side (right side in FIG. 1) are closer to the furnace body 11 (the upper part is far away). As a result, the lower space 373 is a space inclined in a direction in which the lower portion approaches the furnace body 11. In addition, the lower space forming portion 370 includes partition members 374a and 374b which are inclined in a direction toward the lower part with respect to the furnace body 11 inside the outer wall 372. The partition members 374a and 374b are flat members arranged in this order from the rear to the front, and although not shown, both ends in the left and right directions are attached to the left and right wall portions of the outer wall 372 by welding or the like, for example. . The partition members 374a and 374b, the front wall portion of the outer wall 372 and the rear wall portion are both inclined from the rear to the bottom by the same angle θ2. The angle θ2 of the inclination may be more than 0 ° and less than 90 °. Although it does not specifically limit, For example, angle (theta) 2 may be 30-60 degrees. The angle θ2 may be the same value as the angle θ1, and the angle θ2 is 45 ° in this embodiment. A part of lower space 373 is partitioned into partition spaces 375a-375c by this partition member 374a, 374b. The partition space 375a is a space partitioned by the wall part behind the outer wall 372 and the partition member 374a. The partition space 375b is a space partitioned by the partition member 374a and the partition member 374b. The partition space 375c is a space partitioned by the partition member 374b and the wall part in front of the outer wall 372. All of these partition spaces 375a-375c open in the 1st conveyance path 330. As shown in FIG. In addition, the partition members 374a and 374b do not both contact the bottom of the outer wall 372. For this reason, partition spaces 375a-375c are mutually communicated in the lower side (near the bottom part of outer wall 372) among lower spaces 373. As shown in FIG. On the other hand, the three conveyance rollers 335 in the 1st conveyance path 330 mentioned above are arrange | positioned one by one in the opening part above partition space 375a-375c. At the bottom of the outer wall 372, a suction port 376 is formed which is connected to the suction device 377 and sucks the lower space 373. The suction device 377 sucks and exhausts gas in the lower space 373 through the suction port 376.

The 2nd conveyance path 340 is a carrying path for conveying the tray 95 and the to-be-processed object 96 from the 1st conveyance path 330 to the opening 14 of the furnace body 11, and is comprised as a pipeline. have. Inside of this 2nd conveyance path 340, three of the some conveyance roller 335 mentioned above is arrange | positioned.

On the other hand, the 1st conveyance path 330 and the 3rd conveyance path 350 are comprised as a continuous pipe line. In this embodiment, the 1st conveyance path 330 and the 3rd conveyance path 350 connect the line segment D1 which connected the front end of the opening of the upper space formation part 360, and the front end of the opening of the lower space formation part 370. I made a border. Similarly, the 1st conveyance path 330 and the 2nd conveyance path 340 are comprised as a continuous pipeline. In this embodiment, the 1st conveyance path 330 and the 2nd conveyance path 340 are line segment D2 which connected the rear end part of the opening of the upper space formation part 360, and the rear end part of the opening of the lower space formation part 370. I made a border. On the other hand, the line segments D1 and D2 are preferably inclined by the angle θ1 and the angle θ2, respectively. In other words, it is preferable that the wall part in front of the outer wall 362 and the wall part in front of the outer wall 372 are located in a straight line in the state seen from the longitudinal section as shown in FIG. 6, and the wall part and the rear wall of the rear part of the outer wall 362. It is preferable that the rear wall part of 372 is located in a straight line. Similarly, it is preferable that the partition member 364a and the partition member 374b are located in a straight line, and it is preferable that the partition member 364b and the partition member 374a are located in a straight line. In addition, the upper end of the some conveyance roller 335 mentioned above is located in substantially the same height as the lower end of the conveyance port 352. As shown in FIG. On the other hand, in FIG. 6, on the occasion of showing the upper space forming part 360 and the lower space forming part 370, the interval between the front and rear directions of the plurality of conveying rollers 335 is different from the inside of the first conveying path 330. In reality, although different, the several conveyance roller 335 is arrange | positioned at equal intervals along a conveyance direction.

Next, the conveyance path 429 is demonstrated. The conveyance path 429 becomes a conveyance path of the to-be-processed object 96 from the opening 15 of the furnace 11 to the exterior. The upper space forming part 460 is formed in the vertical upper side of the 1st conveyance path 430 of the conveyance path 429. The lower space formation part 470 is provided in the perpendicular lower side of the 1st conveyance path 430 of the conveyance path 429. As shown in FIG. A suction device 467 is connected to an upper portion of the outer wall 462 of the upper space forming portion 460. A suction device 477 is connected to the bottom portion of the outer wall 472 of the lower space forming portion 470. The 3rd conveyance path 450 of the conveyance path 429 has the conveyance port 452 which becomes an exit port to the exterior. In the conveyance path 429, the some (10 in this embodiment) conveyance roller 435 is arrange | positioned over the conveyance port 452 at the opening 15 along a conveyance direction (front-back direction of FIG. 1). On the other hand, the conveyance path 429, the upper space formation part 460, the lower space formation part 470, and the suction apparatus 467, 477 are the conveyance path 329, the upper space formation part 360, and lower space formation, respectively. The portion 370 and the suction devices 367 and 377 have a structure symmetrical in the front-rear direction. For this reason, about the components of the conveyance path 429, the upper space formation part 460, the lower space formation part 470, and the suction apparatuses 467 and 477, the conveyance path 329 and the upper space formation part 360 ), The lower space forming unit 370 and the suction devices 367 and 377 are denoted by the reference to the value plus 100, and detailed description thereof is omitted. On the other hand, line segment D3 is a line segment which connected the rear end part of the opening of the upper space formation part 460 and the rear end part of the opening of the lower space formation part 470, and is corresponded to the line segment D1 in the conveyance path 329. FIG. Line segment D4 is a line segment which connected the front end part of the opening of the upper space formation part 460, and the front end part of the opening of the lower space formation part 470, and is corresponded to the line segment D2 of the conveyance path 329. As shown in FIG. The angles θ3 are the inclination angles of the partition members 464a and 464b, the front wall portion of the outer wall 462, and the rear wall portion, and correspond to the angle θ1 in the upper space forming portion 360. The angle θ4 is the inclination angle of the partition members 474a and 474b, the front wall portion of the outer wall 472, and the rear wall portion, and corresponds to the angle θ2 in the lower space forming portion 370. In this embodiment, angle (theta) 1 = angle (theta) 3 and angle (theta) 2 = angle (theta) 4.

In the roller hearth kiln 310 formed in this way, in the heat processing of the to-be-processed object 96, conveyance rollers 335 and 435 are rotated in addition to the operation | movement similar to the roller hearth kiln 10. FIG. In addition, the suction devices 367 and 467 suck and exhaust the atmosphere in the upper spaces 363 and 463, respectively, and the suction devices 377 and 477 suck and exhaust the atmosphere in the lower spaces 373 and 473, respectively. do. And the tray 95 which arrange | positioned the several to-be-processed object 96 is carried in from the conveyance port 352 of the conveyance path 329 one by one. The tray 95 carried in from the conveyance port 352 transfers the 3rd conveyance path 350, the 1st conveyance path 330, and the 2nd conveyance path 340 by rotation of the some conveyance roller 335. FIG. It passes through in order and is carried in in the furnace 11 from the opening 14. Subsequently, the object 96 is heat-treated by the heater 20 while the tray 95 passes through the first space 11a and is carried out from the opening 15 side. And the tray 95 carried out from the opening 15 carries out 2nd conveyance path 440, 1st conveyance path 430, and 3rd conveyance path 450 by rotation of the some conveyance roller 435. As shown in FIG. It passes in this order and is carried out from the conveyance port 452 to the outside.

Here, the correspondence relationship between the component of this embodiment and the component of this invention is made clear. In addition, description of a correspondence is abbreviate | omitted about the component same as 1st Embodiment. The conveyance paths 329 and 429 (the 1st conveyance paths 330 and 430) of this embodiment correspond to the conveyance path of this invention, and the upper space formation parts 360 and 460 correspond to the upper space formation part, The lower space forming portions 370 and 470 correspond to the lower space forming portions, the heater 20 corresponds to the heating means, and the suction devices 367, 377, 467 and 477 correspond to the suction means.

In the roller hearth kiln 310 of this embodiment demonstrated above, since the atmospheric gas of the 1st space 11a is heated by the heater 20 to the temperature higher than outside air at the time of heat processing, in the 1st space 11a, Atmosphere gas which flows out into the conveyance paths 329 and 429 tends to be directed to the upper spaces 363 and 463, and the outside air tends to be directed to the lower spaces 373 and 473. In this state, the suction devices 367, 467, 377, and 477 suck the upper spaces 363 and 463 and the lower spaces 373 and 473, so that the upper spaces 363 and 463 are moved from the conveying paths 329 and 429. ) And a gas flow in a downward direction toward the lower spaces 373 and 473 in the conveying paths 329 and 429. As a result, the atmosphere and the outside air of the first space 11a easily flow in the up and down direction in the conveying paths 329 and 429, so that the atmosphere of one of the outer space and the first space 11a is transferred to the conveying path 329. 429 can be further suppressed from flowing to the other side (gas flowing in the front and rear directions). That is, the inflow and outflow of the atmosphere through the conveyance paths 329 and 429 to the inside and outside of the furnace body 11 can be suppressed more. Moreover, even if the furnace body 11 is always opened to the external space through the conveyance paths 329 and 429, the outflow into and out of the furnace body 11 can be suppressed more as mentioned above.

In addition, the upper space forming parts 360 and 460 form upper spaces 363 and 463 inclined in a direction away from the upper body 11. When atmospheric gas of temperature higher than the outside air flows out from the furnace body 11, the direction which this atmospheric gas flows becomes as it goes up with respect to the furnace body 11. For this reason, since the upper spaces 363 and 463 are inclined in the direction away from the furnace body 11, the atmospheric gas from the furnace body 11 is easily induced into the upper spaces 363 and 463, and thus, the outside Can be suppressed more. The upper space forming portions 360 and 460 are members which are inclined in a direction away from the upper body 11 in a plurality of sections along the conveying direction of the object 96. The partition members 364a, 364b, 464a, and 464b which divide into spaces 365a-365c and 465a-465c are provided. Therefore, the plurality of partition members 364a, 364b, 464a, and 464b are inclined in a direction away from the upper body 11 so that the atmospheric gas from the furnace body 11 is led to the upper spaces 363 and 463. It becomes easy to be.

In addition, the lower space forming portions 370 and 470 may form lower spaces 373 and 473 inclined in a direction toward the lower part with respect to the furnace body 11. When the outside air flows to the conveying paths 329 and 429, since the atmospheric gas of the furnace body 11 has a higher temperature, the direction in which the outside air flows becomes lower as it gets closer to the furnace body 11. For this reason, since the lower spaces 373 and 473 are inclined in a direction toward the lower part with respect to the furnace body 11, the outside air which flowed to the conveyance paths 329 and 429 becomes easy to be guided to the lower spaces 373 and 473. Inflow into the furnace 11 can be further suppressed. In addition, the lower space forming portions 370 and 470 are members that are inclined in a direction toward the lower part with respect to the furnace body 11, and the lower spaces 373 and 474 are arranged along the conveying direction of the object 96. Partition members 374a, 374b, 474a, and 474b are partitioned into partition spaces 375a to 375c and 475a to 475c. Therefore, the plurality of partition members 374a, 374b, 474a, and 474b are inclined in the direction in which the lower portion approaches the furnace 11, so that the outside air flowing through the conveying paths 329 and 429 is lower spaces 373 and 474. It is easy to be guided by).

In addition, in 2nd Embodiment mentioned above, you may employ | adopt various modified examples of 1st Embodiment mentioned above.

In the above-described embodiment, either one of the suction devices 367 and 377 may be omitted, or one of the suction devices 467 and 477 may be omitted. In addition, although the upper space formation part 360 is equipped with two partition members 364a and 364b, it may be provided with one, three or more, and may not be provided with either partition member. The same applies to the upper space forming portion 460 and the lower space forming portions 370 and 470. In addition, one of the conveyance paths 329 and 429 may be omitted.

In the above-mentioned embodiment, although the conveyance path 329 and the conveyance path 429 etc. were set as the structure which was symmetric in the front-back direction, it is not limited to this. For example, angle θ1 and angle θ3 may be different, and angle θ2 and angle θ4 may be different. Also, the number of partition members described above, the presence or absence of a suction device, and the like may not be symmetrical in the front-rear direction.

EXAMPLE

Example 1

The roller hearth kiln 10 of 1st Embodiment shown in FIGS. 1-3 was produced and it was set as Example 1. FIG. On the other hand, the 2nd space 30a of the wall 30 made 125 mm, the left-right direction length 53 mm, and the front-rear direction length 1125 mm in the up-and-down height. As the first bearing 40, a shield-type ball bearing having a gap 44a and a gap 45a was used. As the second bearing 50, a seal-type ball bearing in which the shielding members 54 and 55 seal between the inner ring 51 and the outer ring 52 was used. Moreover, the double-shutter type substitution chamber was arrange | positioned between the opening 14 and 15 of the furnace 11, and the exterior, respectively.

Example 2

The roller hearth kiln 310 of 2nd Embodiment shown in FIG. 6 was produced, and it was set as Example 2. FIG. In addition, about the component similar to the roller hearth kiln 10 among the components of Example 2, the same thing as Example 1 was used.

[Evaluation test 1]

In Example 1, the atmosphere of the 1st space 11a is made into 1% of hydrogen concentration in the state which the several tray 95 which arrange | positioned the to-be-processed object 96 was carried in to the furnace 11 through the substitution chamber sequentially. , The output of the heater 20, the supply amounts of the first gas and the second gas from the first gas source 71 and the second gas source 72, the first pressure, to maintain the nitrogen atmosphere at 1250 ° C. and 150 PaG, The 1st flow volume, the opening degree of the exhaust valve 87, the exhaust amount of the exhaust fan 89, etc. were adjusted. Moreover, with respect to the 2nd space 30a of the wall 30, 2nd pressure was set to 200 PaG (pressure of the atmosphere of the 1st space 11a +50 Pa), and the 2nd flow volume made 1.2L / min. Gas (nitrogen) was supplied. In this state, hydrogen flowing out to the outside from the second bearing 50 of the wall 30 was not detected. In addition, the adjustment of the 2nd pressure and the 2nd flow volume, and the measurement of the outflowing hydrogen were performed about one wall 30. As shown in FIG.

Also in Example 2, the tray 95 is carried in and out of the furnace body 11 through the conveyance paths 329 and 429, the suction by the suction apparatuses 367, 467, 377, and 477, the 1st space The atmosphere of (11a) was kept in a nitrogen atmosphere of 1% hydrogen, 1250 ° C., and 2 PaG, and the second pressure was set at 5 PaG (first space 11a to the second space 30a of the wall 30). Was measured in the same manner as in Example 1, except that the second gas (nitrogen) having a pressure of +3 Pa] and a second flow rate of 0.1 L / min or less (less than the minimum value of the measurement scale) was supplied. . In this state, hydrogen flowing out to the outside from the second bearing 50 of the wall 30 was not detected.

As described above, in any of the first and second embodiments, the furnace body (by supplying the gas of high pressure in the second space 30a through the second space supply port 33 in comparison with the atmosphere of the first space 11a) is obtained. 11 it was confirmed that the outflow of the atmosphere through the wall 30 to the external space can be suppressed.

Industrial availability

INDUSTRIAL APPLICABILITY The present invention can be used in industries in which it is necessary to perform heat treatment such as firing while conveying a workpiece, for example, in the manufacture industry of ceramic products such as ceramic capacitors.

10: Roller Haskell 11: Noche
11a: first space 12: shear surface
13: rear face 14, 15: opening
16, 17: through hole 18: first space supply port
19: exhaust port 20: heater
22: driven side cover 24: driven side support roller
26: drive side cover 26a: third space
27: opening 28: driving side support roller
30: wall 30a: second space
31: first wall portion 32: second wall portion
33: second space supply port 40: first bearing
41: inner ring 42: outer ring
43: sphere 44, 45: shielding member
44a, 45a: clearance 50: second bearing
51: inner ring 52: outer ring
53: Sphere 54, 55: shielding member
60: rotating body 61: conveying roller
61a: protrusion 62: roller cap
62a, 62b: cutout 63: connecting shaft
64: holder 64a-64d: cutout
65: drive shaft 66: sprocket
67a to 67c: insertion pin 68a to 68c: set screw
69a to 69c: type C stop ring 70: gas supply unit
71; First gas source 72: Second gas source
73: common piping 74: first piping
75: 2nd piping 76a, 76b: connection part
80: filter 81: flow meter
82: first pressure reducing valve 83: second pressure reducing valve
84: first flow regulating valve 85: second flow regulating valve
86: exhaust device 87: exhaust valve
88: intake valve 89: exhaust fan
90: motor 91: drive shaft
92: roller chain 95: tray
96: workpiece 150, 250: bearing on one side
156: shaft seal 157: main body
157a: seal lip, 157b: dust lip
158: metal ring 259: spring
266a, 226b: Sprockets 292a, 292b: Roller chain
293a and 293b: cam clutch 294: support portion
310: roller hearth kiln 329, 429: conveying path
330: first conveying path 335: conveying roller
340: second conveying path 350: third conveying path
352: conveying path 360, 460: upper space forming portion
362: outer wall 363: upper space
364a, 364b: compartment member 365a-365c: compartment space
366: suction port 367, 467: suction device
370 and 470: lower space forming portion 372: outer wall
373: lower space 374a, 374b: partition member
375a-375c: compartment space 376: suction port
377, 477: suction device D1, D2: line segment

Claims (7)

The furnace body which forms the 1st space as a process space,
A wall having a second space communicating therein with the first space therein, the wall having a first wall portion, a second wall portion, and a second space supply port capable of supplying gas from the outside into the second space;
The to-be-processed object can be conveyed in the said 1st space, The 1st wall part, the said 2nd space, and the said 2nd wall part penetrate in this order toward the outer space from the said 1st space side, and one end is said 2nd A rotating body protruding from the wall,
Drive means connected to the one end side of the rotating body and capable of rotationally driving the rotating body;
A first bearing provided at a portion through which the rotating body penetrates, the first bearing being a rolling bearing having a gap through which the gas can flow in a penetrating direction of the rotating body while rotatably supporting the rotating body;
A sealing member provided at a portion through which the rotating body penetrates the second wall portion, and having a higher sealing property than the first bearing;
A third space forming member formed between the furnace body and the first wall portion to form a third space communicating with the first space and the second space, and penetrated by the rotating body;
As a heat treatment method using a heat treatment apparatus provided with,
And a step of performing heat treatment while the driving means rotates the rotating body to convey the object to be processed in the processing space,
In the said process, the heat processing method of supplying the gas of high pressure compared with the atmosphere of the said 1st space through the said 2nd space supply port in the said 2nd space. The said furnace body has an exhaust port which can exhaust the atmosphere in a said 1st space,
In the said step, the heat processing method of exhausting the atmosphere of the said 1st space from the said exhaust port and supplying gas to the said 2nd space so that the atmosphere of the said 1st space is maintained at a predetermined pressure. The said furnace body has a 1st space supply port which can supply gas in a said 1st space,
In the step, the heat treatment method is to exhaust the atmosphere of the first space from the exhaust port and to supply gas to the first space and the second space so that the atmosphere of the first space is maintained at a predetermined pressure. The method of claim 3, wherein the heat treatment apparatus,
A first pipe connected to the first space supply port;
A second pipe connected to the second space supply port;
A common pipe connected to said first pipe and said second pipe,
In the said process, by supplying gas to the said common piping, the gas of high pressure is supplied in the said 2nd space compared with the atmosphere of the said 1st space through the said common piping and the 2nd piping, and the said common piping and said 1st The heat treatment method of supplying gas into a 1st space through piping. The method of claim 4, wherein the heat treatment apparatus,
A first flow rate adjustment valve connected to the first pipe to adjust the flow rate of the first pipe,
A second flow rate adjustment valve connected to the second pipe to adjust the flow rate of the second pipe,
In the said process, by supplying gas to the said common piping, the gas by which the flow volume was adjusted by the said 1st flow regulating valve via the said common piping and said 1st piping is supplied to the said 1st space, The said common piping and the said And a gas whose flow rate is adjusted by the second flow control valve through the second pipe is supplied to the second space. The method of claim 5, wherein the heat treatment apparatus,
A first pressure reducing valve provided on at least one of the common pipe and the first pipe, and installed on an upstream side of the first flow rate adjusting valve;
A second pressure reducing valve provided upstream from said second flow rate adjusting valve in said second piping,
The first pressure reducing valve reduces the pressure of the gas on the downstream side to a first pressure that is higher than the atmosphere of the first space,
The second pressure reducing valve reduces the pressure of the gas on the downstream side to a second pressure that is higher than the atmosphere of the first space,
In the said process, the heat processing method of supplying the gas of the pressure more than the said 1st pressure and the said 2nd pressure to the said common pipe. The method according to any one of claims 1 to 6,
The heat treatment apparatus,
A conveying path for conveying the object to be processed between the external space and the first space;
An upper space forming portion provided on the vertical upper side of the conveying path, the upper space forming portion opening in the vertical lower side to form an upper space communicating with the conveying path;
The lower space forming part provided in the vertical lower side of the said conveyance path, and formed into the vertical upper side, and forms the lower space which communicates in the said conveyance path.
And
In the said process, the atmosphere of the said 1st space is heated to temperature higher than outside air, and at least one of the said upper space and the said lower space is sucked.

Images