JP2000055564A - Roller hearth kiln - Google Patents

Roller hearth kiln

Info

Publication number
JP2000055564A
JP2000055564A JP11233644A JP23364499A JP2000055564A JP 2000055564 A JP2000055564 A JP 2000055564A JP 11233644 A JP11233644 A JP 11233644A JP 23364499 A JP23364499 A JP 23364499A JP 2000055564 A JP2000055564 A JP 2000055564A
Authority
JP
Japan
Prior art keywords
gas
furnace
atmosphere
furnace chamber
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11233644A
Other languages
Japanese (ja)
Inventor
Masaki Urushizaki
雅紀 漆崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP11233644A priority Critical patent/JP2000055564A/en
Publication of JP2000055564A publication Critical patent/JP2000055564A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To facilitate conditioning of atmosphere by supplying ambient gas into furnace chamber, arranging a seal cover on the outside of a furnace body and sealing the atmosphere in the furnace from the outer air thereby preventing the atmospheric gas from leaking through the gap of rollers. SOLUTION: A large number of rollers 3 arranged at a constant pitch over the entire length of a furnace chamber 2 transfers a product W mounted on a base board 4. Gas purge type seal covers 5 are arranged on the opposite sides of a furnace body 1 in order to seal the atmosphere in the furnace leaking through the gap of the rollers 3 from the outer air. Heaters 6, 7 are arranged vertically on the opposite sides of the roller 3 in order to heat the product W from upper and lower sides. Inside of the furnace chamber 2 is sectioned in the longitudinal direction by means of upper and lower barrier walls and each section is arranged with a gas supply pipe 10 in order to eject atmospheric gas obliquely toward the product W. A gas exhaust opening 11 for sucking and exhausting the atmospheric gas is made at the lower part of the furnace chamber 2 in order to suck and exhaust the atmospheric gas containing a binder gas.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、例えば電子部品等の焼
成に用いられるローラーハースキルンに関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roller hearth kiln used for firing electronic parts and the like.

【0002】[0002]

【従来の技術】製品をローラーにより移送しつつ焼成を
行うローラーハースキルンは古くから知られているが、
最近ではこのローラーハースキルンの炉室の内部を水素
ガスによる還元性雰囲気とし、電子部品等の還元焼成を
行うローラーハースキルンが開発されている。
2. Description of the Related Art Roller hearth kilns, which perform firing while transferring products by rollers, have been known for a long time.
Recently, a roller hearth kiln has been developed in which the inside of a furnace chamber of the roller hearth kiln is made a reducing atmosphere by hydrogen gas to perform reduction firing of electronic components and the like.

【0003】ところが一般にローラーハースキルンで
は、製品を移送するための多数のローラーの端部を炉体
の外部に露出させて駆動する必要があるため、各ローラ
ーが炉体を貫通する部分の隙間から多少の雰囲気ガスが
洩れることが避けられない。このために種々のシール手
段が用いられてきたが、雰囲気ガスの漏洩を完全に防止
することはできず、その分だけ炉内の雰囲気調整が困難
になるという問題があった。
However, in the roller hearth kiln, generally, it is necessary to drive the rollers by exposing the ends of a large number of rollers for transferring products to the outside of the furnace body. It is inevitable that some atmospheric gas leaks. For this reason, various sealing means have been used, but it has been impossible to completely prevent the leakage of the atmospheric gas, and there has been a problem that it is difficult to adjust the atmosphere in the furnace by that much.

【0004】[0004]

【発明が解決しようとする課題】本発明は上記した従来
の問題点を解決し、ローラーの隙間からの雰囲気ガスの
漏洩をなくし、雰囲気調整の容易化を図ることができる
ローラーハースキルンを提供するためになされたもので
ある。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems, and provides a roller hearth kiln capable of eliminating the leakage of the atmosphere gas from the gap between the rollers and facilitating the adjustment of the atmosphere. It was done for.

【0005】[0005]

【課題を解決するための手段】上記の課題を解決するた
めになされた本発明は、ローラーの端部を炉体の外部に
露出させたローラーハースキルンにおいて、炉室の内部
に雰囲気ガスを供給するとともに、炉体の外側にシール
カバーを設け、ローラーの隙間から漏れる炉内の雰囲気
と外気とをシールしたことを特徴とするものである。な
お、シールカバーはガスパージ式のものであることが好
ましく、またシールカバーを炉体の両側に設けることが
好ましい。更に、炉室の入口と出口にもそれぞれガスボ
ックスを設け、炉の出入口からの外気の進入を防止する
ことが好ましく、これらのガスボックスの内部を多数の
仕切り板により細かく区画するとともに、その内部に窒
素ガス等を供給した構造とすることが好ましい。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a roller hearth kiln in which the ends of rollers are exposed to the outside of a furnace body, and supplies an atmosphere gas to the inside of a furnace chamber. In addition, a seal cover is provided outside the furnace body to seal the atmosphere inside the furnace leaking from the gap between the rollers and the outside air. The seal cover is preferably of a gas purge type, and the seal covers are preferably provided on both sides of the furnace body. Further, it is preferable to provide gas boxes at the inlet and the outlet of the furnace chamber, respectively, to prevent the invasion of outside air from the inlet and the outlet of the furnace.The inside of these gas boxes is finely divided by a number of partition plates, and It is preferable to adopt a structure in which nitrogen gas or the like is supplied to the substrate.

【0006】本発明のローラーハースキルンにおいて
は、炉体の外側に設けたシールカバーによりローラーの
隙間から漏れる炉内の雰囲気をシールすることができる
ので、炉室内の雰囲気調整が容易である。
In the roller hearth kiln of the present invention, the atmosphere inside the furnace leaking from the gap between the rollers can be sealed by the seal cover provided outside the furnace body, so that the atmosphere in the furnace chamber can be easily adjusted.

【0007】[0007]

【発明の実施の形態】以下に図面を参照しつつ、本発明
の好ましい実施形態を示す。図1、図2は本発明の実施
形態を示すもので、1はローラーハースキルンの炉体、
2は炉室、3は炉室2の全長にわたって一定ピッチで設
けられた多数のローラーである。図2に示すようにロー
ラー3は台板4に載せた製品Wを移送するためのもの
で、通常のローラーハースキルンではローラー3の端部
および駆動部は炉体1の外部に露出しているが、本実施
形態のローラーハースキルンでは炉体1の両側にガスパ
ージ式のシールカバー5、5が設けてあり、ローラー3
の隙間から漏れる炉内の雰囲気と外気とをシールしてい
る。このため、炉内の雰囲気ガスの漏洩による雰囲気変
動がないので雰囲気調整が容易である。また雰囲気ガス
に水素ガスが含まれる場合にも、危険性がない。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. 1 and 2 show an embodiment of the present invention, in which 1 is a roller hearth kiln furnace body,
Reference numeral 2 denotes a furnace chamber, and 3 denotes a number of rollers provided at a constant pitch over the entire length of the furnace chamber 2. As shown in FIG. 2, the roller 3 is for transferring the product W placed on the base plate 4, and in a normal roller hearth kiln, the end of the roller 3 and the drive unit are exposed outside the furnace body 1. However, in the roller hearth kiln of this embodiment, gas purge type seal covers 5 and 5 are provided on both sides of the furnace
To seal the atmosphere inside the furnace and the outside air leaking from the gap. Therefore, there is no change in atmosphere due to leakage of the atmosphere gas in the furnace, so that the atmosphere can be easily adjusted. Also, there is no danger when the atmosphere gas contains hydrogen gas.

【0008】炉室2のローラー3を挟む上下位置には、
加熱用ヒーター6、7が適当な間隔で設置され、ローラ
ー3上を走行する製品Wを上下両面から加熱するように
なっている。この例では加熱源として電気ヒーターが使
用されているが、ラジアントチューブのような他の加熱
源を使用することもできる。
[0008] In the vertical position sandwiching the roller 3 of the furnace chamber 2,
Heating heaters 6 and 7 are provided at appropriate intervals to heat the product W traveling on the roller 3 from both upper and lower surfaces. Although an electric heater is used as a heating source in this example, other heating sources such as a radiant tube can be used.

【0009】図1に示すように、炉室2は上下の隔壁
8、9により長手方向に区画されている。そして炉室2
の各区画には、ガス供給管10が設けられている。このガ
ス供給管10は上方の加熱用ヒーター6よりも製品Wに近
い位置に設けられており、その斜め下側に透設されたガ
ス供給口から、水素ガスと窒素ガスとを混合した還元焼
成のための雰囲気ガスを、ローラー3上を走行する製品
Wに向かって斜め方向に噴出している。なお、ガス供給
管10は少なくとも昇温ゾーンに設置されるが、その他の
ゾーンには他の形式の雰囲気ガス供給手段を設けてもよ
い。
As shown in FIG. 1, the furnace chamber 2 is longitudinally partitioned by upper and lower partitions 8 and 9. And furnace room 2
A gas supply pipe 10 is provided in each section. The gas supply pipe 10 is provided at a position closer to the product W than the upper heater 6, and a gas supply port provided obliquely below the gas supply pipe 10, through which hydrogen gas and nitrogen gas are mixed for reduction firing. Is blown obliquely toward the product W running on the roller 3. Although the gas supply pipe 10 is provided at least in the temperature raising zone, other types of atmosphere gas supply means may be provided in other zones.

【0010】図1に示すように、ガス供給管10は各区画
内の比較的出口側(右側)に近い位置に設けられてい
る。これは炉室2の内部では出口から入口側に向かうガ
ス流が生ずるため、そのガス流に乗せて雰囲気ガスを噴
出するためである。また、ガス供給管10を回転させるこ
とにより、ガス供給口からの雰囲気ガスの噴出方向の調
節が可能である。このようにして製品Wの表面付近に滞
留しているバインダーガスを吹き飛ばことができるが、
製品Wが小型の電子部品であるときにはその流速を調整
し、製品Wが吹き飛ばされないようにする必要がある。
ガス供給口からの雰囲気ガスの噴出速度は例えば秒速15
m程度であるが、製品Wの表面では秒速5m以下となっ
ている。
As shown in FIG. 1, the gas supply pipe 10 is provided at a position relatively close to the outlet side (right side) in each section. This is because a gas flow from the outlet to the inlet is generated inside the furnace chamber 2 and the atmosphere gas is ejected along with the gas flow. In addition, by rotating the gas supply pipe 10, it is possible to adjust the direction in which the atmospheric gas is ejected from the gas supply port. In this way, the binder gas staying near the surface of the product W can be blown off,
When the product W is a small electronic component, it is necessary to adjust the flow velocity so that the product W is not blown off.
The blowing speed of the atmospheric gas from the gas supply port is, for example, 15
m, but on the surface of the product W, the speed is 5 m / sec or less.

【0011】また図2に示すように、炉室2の下部には
炉室内の雰囲気ガスを吸引排気するガス排出口11が設け
られている。これらのガス排出口11は各区画の比較的入
口側に設けられており、上記のガス流に乗って入口側に
移動してくるバインダーガスを含む雰囲気ガスを吸引
し、炉外に排気する。前記したようにバインダーガスは
重く炉室2の下部に滞留し易いので、このように炉室2
の下部にガス排出口11を設ければ、製品Wから発生した
バインダーガスを効率よく炉外へ除去することができ
る。
As shown in FIG. 2, a gas outlet 11 for sucking and exhausting atmospheric gas in the furnace chamber is provided at a lower portion of the furnace chamber 2. These gas outlets 11 are provided relatively on the inlet side of each section, and suck the atmospheric gas containing the binder gas which moves to the inlet side along with the above-mentioned gas flow, and exhausts the gas outside the furnace. As described above, the binder gas is heavy and easily stays in the lower part of the furnace chamber 2.
If the gas outlet 11 is provided at the lower part of the furnace, the binder gas generated from the product W can be efficiently removed from the furnace.

【0012】 なお図1に示すように、炉室2の入口と
出口にそれぞれガスボックス12、13を設け、その内部を
多数の仕切り板により細かく区画するとともに、その内
部に窒素ガス等を供給しておけば、炉の出入口からの外
気の進入を簡便かつ確実に防止することができる。この
ため、ローラーハースキルンで雰囲気焼成を行う上で更
に便利である。
As shown in FIG. 1, gas boxes 12 and 13 are provided at the inlet and the outlet of the furnace chamber 2, respectively, and the inside thereof is finely divided by a large number of partition plates, and nitrogen gas or the like is supplied into the inside. By doing so, it is possible to simply and reliably prevent the entrance of outside air from the entrance and exit of the furnace. For this reason, it is more convenient for firing the atmosphere with a roller hearth kiln.

【0013】[0013]

【発明の効果】以上に説明したように、本発明のローラ
ーハースキルンは、炉体の外側に設けたシールカバーに
よりローラーの隙間から漏れる炉内の雰囲気を外気に対
してシールすることができるので、炉室内の雰囲気調整
が容易であるという利点がある。
As described above, the roller hearth kiln of the present invention can seal the atmosphere in the furnace leaking from the gap between the rollers against the outside air by the seal cover provided outside the furnace body. There is an advantage that the atmosphere in the furnace chamber can be easily adjusted.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施形態を示す中央縦断面図である。FIG. 1 is a central longitudinal sectional view showing an embodiment of the present invention.

【図2】本発明の実施形態を示す炉幅方向の断面図であ
る。
FIG. 2 is a sectional view in a furnace width direction showing an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 炉体、2 炉室、3 ローラー、4 台板、5 シ
ールカバー、6 加熱用ヒーター、7 加熱用ヒータ
ー、8 隔壁、9 隔壁、10 ガス供給管、11ガス排出
口、12 ガスボックス、13 ガスボックス、W 製品
1 Furnace body, 2 Furnace chambers, 3 Rollers, 4 Plates, 5 Seal covers, 6 Heater, 7 Heater, 8 Partition, 9 Partition, 10 Gas supply pipe, 11 Gas outlet, 12 Gas box, 13 Gas boxes, W products

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 ローラーの端部を炉体の外部に露出させ
たローラーハースキルンにおいて、炉室の内部に雰囲気
ガスを供給するとともに、炉体の外側にシールカバーを
設け、ローラーの隙間から漏れる炉内の雰囲気と外気と
をシールしたことを特徴とするローラーハースキルン。
In a roller hearth kiln in which an end of a roller is exposed to the outside of a furnace body, an atmospheric gas is supplied into a furnace chamber, and a seal cover is provided outside the furnace body to leak from a gap between the rollers. A roller heart kiln characterized by sealing the atmosphere inside the furnace and the outside air.
【請求項2】 シールカバーがガスパージ式のものであ
る請求項1記載のローラーハースキルン。
2. The roller hearth kiln according to claim 1, wherein the seal cover is of a gas purge type.
【請求項3】 シールカバーを炉体の両側に設けた請求
項1記載のローラーハースキルン。
3. The roller hearth kiln according to claim 1, wherein seal covers are provided on both sides of the furnace body.
【請求項4】 炉室の入口と出口にもそれぞれガスボッ
クスを設け、炉の出入口からの外気の進入を防止した請
求項1記載のローラーハースキルン。
4. The roller hearth kiln according to claim 1, wherein a gas box is provided at each of an inlet and an outlet of the furnace chamber to prevent outside air from entering through an inlet and an outlet of the furnace.
【請求項5】 ガスボックスの内部を多数の仕切り板に
より細かく区画するとともに、その内部に窒素ガス等を
供給した請求項4記載のローラーハースキルン。
5. The roller hearth kiln according to claim 4, wherein the inside of the gas box is finely divided by a number of partition plates, and nitrogen gas or the like is supplied into the inside.
JP11233644A 1999-08-20 1999-08-20 Roller hearth kiln Pending JP2000055564A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11233644A JP2000055564A (en) 1999-08-20 1999-08-20 Roller hearth kiln

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11233644A JP2000055564A (en) 1999-08-20 1999-08-20 Roller hearth kiln

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11470393A Division JPH06323738A (en) 1993-05-17 1993-05-17 Roller hearth kiln

Publications (1)

Publication Number Publication Date
JP2000055564A true JP2000055564A (en) 2000-02-25

Family

ID=16958281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11233644A Pending JP2000055564A (en) 1999-08-20 1999-08-20 Roller hearth kiln

Country Status (1)

Country Link
JP (1) JP2000055564A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006061903A1 (en) * 2004-12-09 2006-06-15 International Customer Service Gas atmosphere heat treatment equipment
CN102519244A (en) * 2005-09-20 2012-06-27 光洋热系统株式会社 Dustproof device located in roller hearth type heat treatment furnace
JP2014215033A (en) * 2013-04-24 2014-11-17 日本碍子株式会社 Heat treatment method and heat treatment apparatus
CN104422277A (en) * 2013-08-26 2015-03-18 日本碍子株式会社 Heat treatment furnace
JP2017032219A (en) * 2015-08-03 2017-02-09 住友電工焼結合金株式会社 Roller hearth furnace and process of manufacture of heat treatment product by roller hearth furnace
CN107741156A (en) * 2017-11-21 2018-02-27 湖南金炉科技有限责任公司 Roller kilns roll breakage detecting system
WO2019054296A1 (en) * 2017-09-13 2019-03-21 住友化学株式会社 Method for manufacturing lithium secondary battery positive electrode active material
CN109708478A (en) * 2017-10-25 2019-05-03 Ngk(苏州)热工技术有限公司 The firing furnace of atmosphere method of replacing and device and subsidiary atmosphere replacement device
CN112648842A (en) * 2020-09-09 2021-04-13 宣城鸿海装备科技有限公司 Lithium cell silicon carbon negative electrode material atmosphere protection roller hearth furnace equipment

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006061903A1 (en) * 2004-12-09 2006-06-15 International Customer Service Gas atmosphere heat treatment equipment
CN102519244A (en) * 2005-09-20 2012-06-27 光洋热系统株式会社 Dustproof device located in roller hearth type heat treatment furnace
CN102519244B (en) * 2005-09-20 2015-03-04 光洋热系统株式会社 Dustproof device located in roller hearth type heat treatment furnace
JP2014215033A (en) * 2013-04-24 2014-11-17 日本碍子株式会社 Heat treatment method and heat treatment apparatus
CN104422277A (en) * 2013-08-26 2015-03-18 日本碍子株式会社 Heat treatment furnace
JP2017032219A (en) * 2015-08-03 2017-02-09 住友電工焼結合金株式会社 Roller hearth furnace and process of manufacture of heat treatment product by roller hearth furnace
JP7356786B2 (en) 2017-09-13 2023-10-05 住友化学株式会社 Method for producing positive electrode active material for lithium secondary battery
WO2019054296A1 (en) * 2017-09-13 2019-03-21 住友化学株式会社 Method for manufacturing lithium secondary battery positive electrode active material
JP2019053846A (en) * 2017-09-13 2019-04-04 住友化学株式会社 Method for manufacturing positive electrode active material for lithium secondary batteries
CN109708478A (en) * 2017-10-25 2019-05-03 Ngk(苏州)热工技术有限公司 The firing furnace of atmosphere method of replacing and device and subsidiary atmosphere replacement device
CN109708478B (en) * 2017-10-25 2021-07-06 Ngk(苏州)热工技术有限公司 Atmosphere replacement method and apparatus, and firing furnace with atmosphere replacement apparatus
CN107741156A (en) * 2017-11-21 2018-02-27 湖南金炉科技有限责任公司 Roller kilns roll breakage detecting system
CN112648842A (en) * 2020-09-09 2021-04-13 宣城鸿海装备科技有限公司 Lithium cell silicon carbon negative electrode material atmosphere protection roller hearth furnace equipment

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