TW201506338A - Thermal treatment method and thermal treatment device - Google Patents

Thermal treatment method and thermal treatment device Download PDF

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Publication number
TW201506338A
TW201506338A TW103109363A TW103109363A TW201506338A TW 201506338 A TW201506338 A TW 201506338A TW 103109363 A TW103109363 A TW 103109363A TW 103109363 A TW103109363 A TW 103109363A TW 201506338 A TW201506338 A TW 201506338A
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Taiwan
Prior art keywords
space
gas
bearing
heat treatment
pipe
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TW103109363A
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Chinese (zh)
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TWI603045B (en
Inventor
Takahiko Hashimoto
Makoto Arai
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Ngk Insulators Ltd
Ngk Kiln Tech Corp
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Publication of TW201506338A publication Critical patent/TW201506338A/en
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Publication of TWI603045B publication Critical patent/TWI603045B/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/10Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated by hot air or gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/38Arrangements of devices for charging
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00Charging; Discharging; Manipulation of charge
    • F27D3/02Skids or tracks for heavy objects
    • F27D3/026Skids or tracks for heavy objects transport or conveyor rolls for furnaces; roller rails
    • F27D3/028Roller rails or succession of small sized rollers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/02Supplying steam, vapour, gases, or liquids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/02Supplying steam, vapour, gases, or liquids
    • F27D2007/023Conduits
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00Subject matter not provided for in other groups of this subclass
    • F27D2099/0083Drives; Auxiliary drives

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

A roller kiln of the invention comprises a furnace body and a wall body. The furnace body forms a first space. The wall body forms a second space communicated with the first space and has a first wall part and a second wall part. In addition, a rotary body of a treated objected can be transported in the first space from a first space side to an external space by passing through the first wall part, the second space and the second wall part, so that one end of the rotary body stretches out of the second wall part. The first wall part is provided with a first bearing which can rotatably support the rotary body and has a gap allowing gas to flow in the through direction of the rotary body. The second wall part is provided with a second bearing which can rotatably support the rotary body and is better in tightness than the first bearing. In the second space, gas of higher pressure than that of the first space is supplied by a supply port of the second space.

Description

熱處理方法及熱處理裝置 Heat treatment method and heat treatment device

本發明係關於一種熱處理方法及熱處理裝置。 The present invention relates to a heat treatment method and a heat treatment apparatus.

先前,一邊藉滾輪搬運陶瓷製品等之被處理物,一邊進行被處理物之熱處理之熱處理裝置係眾所周知。例如在專利文獻1中,記載有具有隧道狀之爐體、被設於爐體內部的空間之多數滾輪、及用於燒製被處理物之氣體燃燒器之輥道窯(輥道連續爐)。 In the prior art, a heat treatment apparatus for performing heat treatment of a workpiece while carrying a workpiece such as a ceramic product by a roller is known. For example, Patent Document 1 describes a furnace body having a tunnel shape, a plurality of rollers provided in a space inside the furnace body, and a roller kiln (roller continuous furnace) for burning a gas burner of the workpiece. .

【先前技術文獻】 [Previous Technical Literature] 【專利文獻】 [Patent Literature]

【專利文獻1】日本特開平4-270884號公報 [Patent Document 1] Japanese Patent Laid-Open No. 4-270884

通常,在這種熱處理裝置中,包含滾輪等之旋轉體係貫穿爐體,與被配置於爐體外部之馬達的驅動軸相連接。配置馬達在爐體外部之理由,係爐體內部例如有時變高溫等,爐體內部的環境不適合配置馬達。因此,在爐體形成有旋轉體貫穿之穿孔。而且,因為存在這種穿孔,爐體內部的環境氣體有時沿著旋轉體的軸向,流出到爐外。 Usually, in such a heat treatment apparatus, a rotating system including a roller or the like is passed through the furnace body and connected to a drive shaft of a motor disposed outside the furnace body. The reason why the motor is disposed outside the furnace body is that the inside of the furnace body may become high temperature, for example, and the environment inside the furnace body is not suitable for arranging the motor. Therefore, a perforation through which the rotating body penetrates is formed in the furnace body. Moreover, because of such perforations, the ambient gas inside the furnace sometimes flows out of the furnace along the axial direction of the rotating body.

本發明係為解決這種課題所研發出者,其主要目的在於更加抑制環境氣體自爐體的內部往外部空間流出。 The present invention has been developed to solve such problems, and its main object is to further suppress the outflow of ambient gas from the inside of the furnace to the external space.

本發明之熱處理方法,使用熱處理裝置,前述熱處理裝置具有:爐體,形成做為處理空間之第1空間;壁體,形成連通前述第1空間之第2空間,其具有:第1壁部、第2壁部及可自外部供給氣體到前述第2空間內之第2空間供給口;旋轉體,可在前述第1空間內搬運被處理物,自前述第1空間往外部空間,依序貫穿前述第1壁部、前述第2空間及前述第2壁部,以一端自前述第2壁部突出;驅動機構,與前述旋轉體的前述一端側相連接,可旋轉驅動前述旋轉體;第1軸承,被設於前述旋轉體貫穿前述第1壁部之部分,可旋轉地支撐前述旋轉體,而且,在前述旋轉體的貫穿方向上,具有可流通氣體之間隙,其係滾動軸承;以及密封構件,被設於前述旋轉體貫穿前述第2壁部之部分,與前述第1軸承相比較下,密封性較高,其包含藉前述驅動機構旋轉驅動前述旋轉體,在前述處理空間內,一邊搬運前述被處理物,一邊進行熱處理之工序,在前述工序中,使壓力大於前述第1空間的環境氣體之氣體,透過前述第2空間供給口,供給到前述第2空間內。 In the heat treatment method of the present invention, the heat treatment apparatus includes a furnace body that forms a first space as a processing space, and a wall body that forms a second space that communicates with the first space, and has a first wall portion, a second wall portion and a second space supply port for supplying gas from the outside into the second space; and the rotating body transporting the workpiece in the first space, and sequentially passing through the first space to the external space The first wall portion, the second space, and the second wall portion protrude from the second wall portion at one end, and the drive mechanism is coupled to the one end side of the rotating body to rotatably drive the rotating body; The bearing is provided in a portion of the rotating body that penetrates the first wall portion, rotatably supports the rotating body, and has a gap through which gas can flow in a direction in which the rotating body penetrates, and is a rolling bearing; and a sealing member a portion of the rotating body that penetrates the second wall portion, and has a high sealing property as compared with the first bearing, and includes rotating the rotating body by the driving mechanism. In the processing space, the heat treatment is performed while the workpiece is being conveyed, and in the step, the gas of the ambient gas having a pressure greater than the first space is supplied through the second space supply port and supplied to the second space. .

在本發明之熱處理方法中,使用於熱處理方法之 熱處理裝置具有:爐體,形成做為前述處理空間之第1空間;以及壁體,在內部形成連通前述第1空間之第2空間,其具有:第1壁部、第2壁部及可自外部供給氣體到前述第2空間內之第2空間供給口。又,在第1空間內,可搬運被處理物之旋轉體,係自第1空間側往外部空間,依序貫穿第1壁部、第2空間及第2壁部,以一端自第2壁部突出。而且,與前述旋轉體的一端側相連接之驅動機構,旋轉驅動旋轉體,藉此,一邊在第1空間內,藉旋轉體搬運被處理物,一邊在第1空間內,進行被處理物之熱處理。此時,在旋轉體貫穿第1壁部之部分設有第1軸承,前述第1軸承係可旋轉地支撐前述旋轉體,而且,在前述旋轉體的貫穿方向上,具有可流通氣體之間隙,其係滾動軸承。又,在前述旋轉體貫穿前述第2壁部之部分設有密封構件,前述密封構件係與前述第1軸承相比較下,密封性較高。而且,在熱處理中,使比第1空間的環境氣體還要高壓之氣體,透過第2空間供給口,供給到前述第2空間內。藉此,被供給到第2空間之氣體,係自密封性低於密封構件之第1軸承的間隙,流向第1空間側。因此,環境氣體自第1空間,通過第1軸承的間隙以流出,而欲自第2空間往第1空間流動之氣體變得被擠回。因此,可更加抑制環境氣體自爐體內部往外部空間流出。 In the heat treatment method of the present invention, used in a heat treatment method The heat treatment apparatus includes a furnace body that forms a first space as the processing space, and a wall body that internally forms a second space that communicates with the first space, and has a first wall portion, a second wall portion, and a self-contained The external supply gas flows into the second space supply port in the second space. In the first space, the rotating body of the object to be processed is transported from the first space side to the outer space, and sequentially penetrates the first wall portion, the second space, and the second wall portion, and ends from the second wall. Highlighted. In addition, the driving mechanism that is connected to the one end side of the rotating body rotates and drives the rotating body, and the object to be processed is conveyed in the first space while the object to be processed is conveyed by the rotating body in the first space. Heat treatment. In this case, a first bearing is provided in a portion where the rotating body penetrates the first wall portion, and the first bearing rotatably supports the rotating body, and a gap in which a gas can flow is formed in a direction in which the rotating body penetrates. It is a rolling bearing. Further, a sealing member is provided in a portion of the rotating body that penetrates the second wall portion, and the sealing member has a high sealing property as compared with the first bearing. Further, in the heat treatment, a gas higher than the ambient gas in the first space is supplied through the second space supply port and supplied into the second space. Thereby, the gas supplied to the second space flows to the first space side because the sealing property is lower than the gap of the first bearing of the sealing member. Therefore, the ambient gas flows out from the first space through the gap of the first bearing, and the gas flowing from the second space to the first space is pushed back. Therefore, it is possible to further suppress the outflow of the ambient gas from the inside of the furnace to the external space.

在此,所謂密封構件「密封性高於第1軸承」,係意味氣體可流通在旋轉體的貫穿方向之間隙,係密封構件的間隙小於第1軸承的間隙。又,所謂密封構件「密封性高於第1軸承」,也包含使氣體可流通在旋轉體的貫穿方向之間隙無密 封構件(未密封)之情形。所謂「連通第1空間之第2空間」,包含第1空間與第2空間直接連通之情形,及第1空間與第2空間透過其他空間(但是,係外部空間以外的空間)連通之情形。 Here, the sealing member "the sealing property is higher than that of the first bearing" means that the gas can flow in the gap in the penetration direction of the rotating body, and the gap of the sealing member is smaller than the gap of the first bearing. Further, the sealing member "the sealing property is higher than that of the first bearing" also includes a gap in which the gas can flow in the penetration direction of the rotating body. The condition of the sealing member (unsealed). The "second space connecting the first spaces" includes a case where the first space directly communicates with the second space, and a case where the first space and the second space pass through another space (however, a space other than the external space).

在本發明之熱處理方法中,也可以前述爐體具有可排出前述第1空間內的環境氣體之排氣口,在前述工序中,也可以自前述排氣口排出前述第1空間的環境氣體,同時供給氣體到前述第2空間,使得前述第1空間的環境氣體被保持在既定壓力。如此一來,當透過第2空間供給口、第2空間及第1軸承的間隙,供給氣體到第1空間內時,藉自排氣口排出環境氣體,可調整第1空間內的環境氣體到既定壓力。 In the heat treatment method of the present invention, the furnace body may have an exhaust port through which the ambient gas in the first space can be discharged, and in the step, the ambient gas in the first space may be discharged from the exhaust port. At the same time, the gas is supplied to the second space, so that the ambient gas in the first space is maintained at a predetermined pressure. In this way, when the gas is supplied into the first space through the gap between the second space supply port, the second space, and the first bearing, the ambient gas in the first space can be adjusted by discharging the ambient gas from the exhaust port. Established pressure.

在本發明之熱處理方法中,也可以前述爐體具有可供給氣體到前述第1空間內之第1空間供給口,在前述工序中,自前述排氣口排出前述第1空間的環境氣體,同時供給氣體到前述第1空間及前述第2空間,使得前述第1空間的環境氣體被保持在既定壓力。如此一來,以不透過第2空間及第1軸承的間隙之路徑,供給氣體到第1空間,所以,很容易調整第1空間內的環境氣體(環境氣體的組成及氣壓等)。而且,在前述工序中,自第1空間供給口供給到第1空間之氣體,與自第2空間供給口供給到第2空間之氣體,也可以組成及壓力相同,也可以組成及壓力之至少一者不同。 In the heat treatment method of the present invention, the furnace body may have a first space supply port through which the gas can be supplied into the first space, and in the step, the ambient gas in the first space is discharged from the exhaust port. The supply gas flows into the first space and the second space, so that the ambient gas in the first space is maintained at a predetermined pressure. In this way, since the gas is supplied to the first space without passing through the gap between the second space and the first bearing, it is easy to adjust the ambient gas (the composition of the ambient gas, the air pressure, and the like) in the first space. Further, in the above-described step, the gas supplied from the first space supply port to the first space and the gas supplied from the second space supply port to the second space may have the same composition and pressure, and may be composed of at least pressure and pressure. One is different.

在本發明之熱處理方法中,也可以前述熱處理裝置具有:第1配管,被連接在前述第1空間供給口;第2配管,被連接在前述第2空間供給口;以及共通配管,被連接在前述 第1配管及前述第2配管;在前述工序中,藉供給氣體到前述共通配管,透過前述共通配管及前述第2配管,供給比前述第1空間的環境氣體還要高壓的氣體到前述第2空間內,透過前述共通配管及前述第1配管,供給氣體到前述第1空間內。如此一來,可使透過第1空間供給口往第1空間之氣體之供給,與透過第2空間供給口往第2空間之氣體之供給兩者,藉供給氣體到共通配管而一同進行。而且,在前述工序中,也可以自共通配管以外的路徑,供給氣體到前述第1配管。如此一來,藉供給氣體到共通配管,持續供給氣體到第1空間與第2空間,也自其他路徑流通氣體到第1配管(與來自共通配管之氣體混合),藉此,可使透過第1空間供給口供給之氣體,與透過第2空間供給口供給之氣體的組成不同。 In the heat treatment method of the present invention, the heat treatment apparatus may include: a first pipe connected to the first space supply port; a second pipe connected to the second space supply port; and a common pipe connected to The foregoing In the above-described process, the first pipe and the second pipe are supplied to the common pipe, and the gas is supplied to the second pipe through the common pipe and the second pipe to supply the gas higher than the ambient gas in the first space to the second pipe. In the space, the gas is supplied into the first space through the common pipe and the first pipe. In this way, both the supply of the gas that has passed through the first space supply port to the first space and the supply of the gas that has passed through the second space supply port to the second space can be performed by supplying the gas to the common pipe. Further, in the above-described step, the gas may be supplied to the first pipe from a path other than the common pipe. In this way, by supplying the gas to the common pipe, the gas is continuously supplied to the first space and the second space, and the gas is also distributed from the other path to the first pipe (mixed with the gas from the common pipe), thereby allowing the passage of the gas. The gas supplied to the space supply port is different from the gas supplied through the second space supply port.

在本發明之熱處理方法中,也可以前述熱處理裝置具有:第1流量調整閥,被連接在前述第1配管,調整前述第1配管的流量;以及第2流量調整閥,被連接在前述第2配管,調整前述第2配管的流量;在前述工序中,藉供給氣體到前述共通配管,透過前述共通配管及前述第1配管,供給以前述第1流量調整閥而流量被調整之氣體到前述第1空間,同時透過前述共通配管及前述第2配管,供給以前述第2流量調整閥而流量被調整之氣體到前述第2空間。 In the heat treatment method of the present invention, the heat treatment apparatus may include: a first flow rate adjustment valve connected to the first pipe to adjust a flow rate of the first pipe; and a second flow rate adjustment valve connected to the second pipe In the piping, the flow rate of the second pipe is adjusted, and the gas is supplied to the common pipe, and the gas is adjusted by the first flow rate adjusting valve through the common pipe and the first pipe. In the space, the gas is adjusted to the second space by the second flow rate adjusting valve through the common pipe and the second pipe.

在本發明之熱處理方法中,也可以前述熱處理裝置具有:第1減壓閥,被設於前述共通配管與前述第1配管之至少一者上,而且,被設於比前述第1流量調整閥還要上游側;以及第2減壓閥,在前述第2配管之中,被設於比前述第2流 量調整閥還要上游側;前述第1減壓閥使下游側的氣體壓力,減壓到比前述第1空間的環境氣體還要高壓的第1壓力,前述第2減壓閥使下游側的氣體壓力,減壓到比前述第1空間的環境氣體還要高壓的第2壓力,在前述工序中,使壓力超過前述第1壓力及前述第2壓力之氣體,供給到前述共通配管。如此一來,使壓力高於減壓後之壓力(第1壓力及第2壓力)之氣體自共通配管供給,所以,即使使比第1減壓閥還要上游側或第2減壓閥還要上游側的配管較細,也可以確保必要之氣體流量。 In the heat treatment method of the present invention, the heat treatment device may include a first pressure reducing valve provided on at least one of the common pipe and the first pipe, and provided in the first flow rate adjusting valve Further, the second pressure reducing valve and the second pressure reducing valve are provided in the second flow than the second flow The first pressure reducing valve further reduces the gas pressure on the downstream side to a first pressure higher than the ambient gas in the first space, and the second pressure reducing valve is on the downstream side. The gas pressure is reduced to a second pressure higher than the ambient gas in the first space, and in the step, the gas having a pressure exceeding the first pressure and the second pressure is supplied to the common pipe. In this way, since the gas having a pressure higher than the pressure (the first pressure and the second pressure) after the pressure reduction is supplied from the common pipe, even if the pressure is higher than the first pressure reducing valve or the second pressure reducing valve The piping on the upstream side is fine, and the necessary gas flow rate can also be ensured.

在本發明之熱處理方法中,也可以前述熱處理裝置具有:搬運通路,使前述被處理物在前述外部空間與前述第1空間之間搬運;上方空間形成部,被設於前述搬運通路的鉛直上側,形成在鉛直下側開口以連通到前述搬運通路內之上方空間;以及下方空間形成部,被設於前述搬運通路的鉛直下側,形成在鉛直上側開口以連通到前述搬運通路內之下方空間;在前述工序中,加熱前述第1空間的環境氣體到比外部氣體還要高的溫度,吸引前述上方空間及前述下方空間之至少一者。如此一來,第1空間的環境氣體被加熱到比外部氣體還要高溫,所以,自第1空間流出到搬運通路之環境氣體很容易往上方空間,外部氣體很容易往下方空間。又,在此狀態下,藉吸引上方空間及下方空間之至少一者,會產生自搬運通路往上方空間之氣體的流動,與自搬運通路往下方空間之氣體的流動之至少一者。藉此,第1空間的環境氣體及外部氣體在搬運通路內,很容易在上下方向流動,所以,可更加抑制外部空間及 第1空間一邊的環境氣體,通過搬運通路以流到另一邊(在上下方向上,氣體在垂直方向上流動)。亦即,可更加抑制透過在爐體內外的搬運通路之環境氣體的流出入。此外,即使爐體透過搬運通路而總是往外部空間開口,如上所述,也可以更加抑制在爐體內外之流出入。在此,前述搬運通路也可以係自外部搬運前述被處理物進入爐體者,也可以係自爐體搬出前述被處理物到外部者。 In the heat treatment method of the present invention, the heat treatment apparatus may include a conveyance path for conveying the workpiece between the external space and the first space, and an upper space forming portion provided on a vertical upper side of the conveyance path. a vertical space formed on the lower side of the vertical passage to communicate with the inside of the conveyance path; and a lower space forming portion provided on the lower side of the conveyance path and formed on the upper side of the vertical passage to communicate with the space below the conveyance path In the above step, the ambient gas in the first space is heated to a temperature higher than the outside air, and at least one of the upper space and the lower space is sucked. As a result, the ambient gas in the first space is heated to a higher temperature than the outside air. Therefore, the ambient gas flowing out of the first space to the transport path is easily moved upward, and the outside air is easily moved downward. Further, in this state, at least one of the upper space and the lower space is caused to generate at least one of the flow of the gas from the transport path to the upper space and the flow of the gas from the transfer path to the lower space. Thereby, the ambient gas and the outside air in the first space are easily moved in the vertical direction in the conveyance path, so that the external space can be further suppressed. The ambient gas on the side of the first space flows to the other side through the conveyance path (the gas flows in the vertical direction in the vertical direction). In other words, it is possible to further suppress the inflow and outflow of the ambient gas that has passed through the conveyance path inside and outside the furnace. Further, even if the furnace body is always opened to the external space through the conveyance path, as described above, it is possible to further suppress the inflow and outflow inside and outside the furnace. Here, the conveyance path may be one in which the workpiece is conveyed from the outside into the furnace body, or the workpiece may be carried out from the furnace body to the outside.

本發明之熱處理裝置,係一種熱處理裝置,在處理空間內,對於被處理物進行熱處理,其具有:爐體,形成做為前述處理空間之第1空間;壁體,形成連通前述第1空間之第2空間,其具有:第1壁部、第2壁部及可自外部供給氣體到前述第2空間內之第2空間供給口;旋轉體,在前述第1空間內,可搬運被處理物,自前述第1空間側往外部空間,依序貫穿前述第1壁部、前述第2空間及前述第2壁部,一端自前述第2壁部突出;驅動機構,與前述旋轉體的前述一端側相連接,可旋轉驅動前述旋轉體;第1軸承,被設於前述旋轉體貫穿前述第1壁部之部分,可旋轉地支撐前述旋轉體,而且,在前述旋轉體的貫穿方向上,具有可流通氣體之間隙,其係滾動軸承;以及密封構件,被設於前述旋轉體貫穿前述第2壁部之部分,其密封性高於前述第1軸承。 The heat treatment apparatus according to the present invention is a heat treatment apparatus that heat-treats a workpiece in a processing space, and has a furnace body that forms a first space as the processing space, and a wall body that communicates with the first space. The second space includes a first wall portion, a second wall portion, and a second space supply port that can supply gas from the outside into the second space, and a rotating body that can transport the workpiece in the first space. Opening the first wall portion, the second space, and the second wall portion from the first space side to the outer space, one end of which protrudes from the second wall portion, and a drive mechanism and the one end of the rotating body The first rotating body is rotatably supported by the side surface, and the first bearing is provided in a portion of the rotating body that penetrates the first wall portion to rotatably support the rotating body, and has a direction in which the rotating body penetrates A gap between the flowable gas and a rolling bearing; and a sealing member provided in a portion of the rotating body penetrating the second wall portion, and having a higher sealing property than the first bearing.

本發明之熱處理裝置具有:爐體,形成做為前述 處理空間之第1空間;以及壁體,形成連通前述第1空間之第2空間,其具有:第1壁部、第2壁部及可自外部供給氣體到前述第2空間內之第2空間供給口。又,在第1空間內可搬運被處理物之旋轉體,係自第1空間側往外部空間,依序貫穿第1壁部、第2空間及第2壁部,以一端自第2壁部突出。而且,與旋轉體的一端側相連接之驅動機構,藉旋轉驅動旋轉體,可一邊在第1空間內藉旋轉體搬運被處理物,一邊在第1空間內進行被處理物之熱處理。此時,在旋轉體貫穿第1壁部之部分設有第1軸承,第1軸承係可旋轉地支撐旋轉體,而且,在旋轉體的貫穿方向上,具有可流通氣體之間隙,其係滾動軸承。又,在旋轉體貫穿第2壁部之部分設有密封構件,密封構件的密封性優於第1軸承。因此,例如在熱處理中,使壓力比第1空間的環境氣體的壓力還要大之氣體,透過第2空間供給口供給到前述第2空間,藉此,被供給到第2空間之氣體,自密封性小於密封構件之第1軸承的間隙,流向第1空間側。因此,自第1空間通過第1軸承的間隙以流出之環境氣體,被自第2空間往第1空間流動之氣體擠回。因此,可更加抑制環境氣體自爐體內部往外部空間之流出。 The heat treatment apparatus of the present invention has a furnace body formed as described above a first space in the processing space; and a wall forming a second space that communicates with the first space, the first wall portion, the second wall portion, and the second space that can supply gas from the outside into the second space Supply port. In addition, the rotating body of the workpiece can be transported in the first space, and the first wall portion, the second space, and the second wall portion are sequentially inserted from the first space side to the outer space, and one end is passed from the second wall portion. protruding. In addition, the driving mechanism that is connected to the one end side of the rotating body can heat-treat the workpiece in the first space while transporting the workpiece in the first space by rotating the rotating body. At this time, the first bearing is provided in a portion where the rotating body penetrates the first wall portion, and the first bearing system rotatably supports the rotating body, and has a gap through which gas can flow in the penetrating direction of the rotating body, and is a rolling bearing . Further, a sealing member is provided in a portion where the rotating body penetrates the second wall portion, and the sealing member is superior in sealing property to the first bearing. Therefore, for example, in the heat treatment, a gas having a pressure greater than the pressure of the ambient gas in the first space is supplied to the second space through the second space supply port, whereby the gas supplied to the second space is supplied to the gas in the second space. The sealing property is smaller than the gap of the first bearing of the sealing member, and flows to the first space side. Therefore, the gas flowing out from the second space through the gap of the first bearing is pushed back by the gas flowing from the second space to the first space. Therefore, the outflow of the environmental gas from the inside of the furnace to the external space can be further suppressed.

在本發明之熱處理裝置中,也可以其具有比前述第1軸承還要可旋轉地支撐前述旋轉體的前述一端側之一端側軸承,前述密封構件係軸封。在此情形下,前述一端側軸承也可以被設於前述旋轉體貫穿前述第2壁部之部分。又,前述一端側軸承也可以在外部空間支撐前述旋轉體。 In the heat treatment apparatus according to the present invention, the one end side end bearing of the rotating body may be rotatably supported by the first bearing, and the sealing member may be shaft-sealed. In this case, the one-end side bearing may be provided in a portion where the rotating body penetrates the second wall portion. Further, the one-end side bearing may support the rotating body in the external space.

在本發明之熱處理裝置中,前述密封構件也可以 係第2軸承,前述第2軸承係被設於前述旋轉體貫穿前述第2壁部之部分,可旋轉地支撐前述旋轉體,而且,密封性大於前述第1軸承之滾動軸承。如此一來,第2軸承可兼具上述軸封與一端側軸承之角色。 In the heat treatment apparatus of the present invention, the aforementioned sealing member may also In the second bearing, the second bearing is provided in a portion where the rotating body penetrates the second wall portion, rotatably supports the rotating body, and the sealing property is larger than that of the first bearing. In this way, the second bearing can have both the above-described shaft seal and the one-end side bearing.

在本發明之熱處理裝置中,前述第2軸承具有:內輪;外輪;複數轉動體,被收納在前述內輪與前述外輪之間;以及遮蔽構件,在前述內輪的軸向上,於偏離前述複數轉動體之位置,被配置在前述內輪與前述外輪之間;前述第2軸承的遮蔽構件,可以在前述內輪與前述外輪之間,形成比前述第1軸承的前述間隙還要小之間隙,或者,密封前述內輪與前述外輪之間。如此一來,使在第2軸承中之旋轉體的貫穿方向上,氣體可流通之間隙,使用遮蔽構件可以很容易減少或密封。因此,可更加抑制第2空間的環境氣體(例如自第2空間供給口被供給之氣體),通過第2軸承的間隙以流出到外部空間。而且,第2軸承的遮蔽構件最好密封第2軸承的內輪與外輪之間。 In the heat treatment apparatus according to the present invention, the second bearing includes: an inner ring; an outer ring; a plurality of rotating bodies are housed between the inner ring and the outer ring; and the shielding member is offset from the axial direction of the inner ring The position of the plurality of rotating bodies is disposed between the inner ring and the outer ring; and the shielding member of the second bearing may be smaller than the gap between the inner ring and the outer ring than the first bearing The gap, or, seals between the aforementioned inner wheel and the aforementioned outer wheel. In this way, the gap through which the gas can flow in the penetration direction of the rotating body in the second bearing can be easily reduced or sealed by using the shielding member. Therefore, it is possible to further suppress the ambient gas in the second space (for example, the gas supplied from the second space supply port), and to flow out to the external space through the gap of the second bearing. Further, it is preferable that the shielding member of the second bearing seals between the inner ring and the outer ring of the second bearing.

在第2軸承具有遮蔽構件之態樣之本發明熱處理裝置中,也可以前述第1軸承具有:內輪;外輪;複數轉動體,被收納在前述內輪與前述外輪之間;以及遮蔽構件,在前述內輪的軸向上,於偏離前述複數轉動體之位置,被配置在前述內輪與前述外輪之間;前述第1軸承的遮蔽構件,在前述內輪與前述外輪之間形成前述間隙。如此一來,可易於使用遮蔽構件將第1軸承之旋轉體的貫穿方向上氣體可流通之間隙縮小。藉此,氣體自第2空間持續往第1空間前進,很容易抑制塵埃等微粒子透過第1軸承的間隙,自第2空間往第1空間侵入。 In the heat treatment apparatus of the present invention in which the second bearing has the shielding member, the first bearing may include an inner wheel, an outer wheel, a plurality of rotating bodies housed between the inner ring and the outer ring, and a shielding member. The axial direction of the inner ring is disposed between the inner ring and the outer wheel at a position deviated from the plurality of rotating bodies; and the shielding member of the first bearing forms the gap between the inner ring and the outer ring. In this way, it is easy to reduce the gap in which the gas can flow in the penetration direction of the rotating body of the first bearing using the shielding member. As a result, the gas continues to advance toward the first space from the second space, and it is easy to prevent fine particles such as dust from passing through the gap between the first bearings and from the second space to the first space.

在本發明之熱處理裝置中,前述第1軸承及前述第2軸承也可以係滾珠軸承。亦即,前述各第1軸承及前述各第2軸承也可以係具有內輪、外輪及被收納在前述內輪與前述外輪間之複數球狀的滾動體者。而且,第1軸承及第2軸承並不侷限於滾珠軸承,也可以係例如滾動體為圓柱狀者。滾動體只要係藉本身旋轉而內輪旋轉等之外輪與內輪之相對位置可偏移之構件即可。 In the heat treatment apparatus of the present invention, the first bearing and the second bearing may be ball bearings. In other words, each of the first bearing and each of the second bearings may have an inner ring, an outer ring, and a plurality of spherical rolling elements housed between the inner ring and the outer ring. Further, the first bearing and the second bearing are not limited to the ball bearings, and for example, the rolling elements may be cylindrical. The rolling element may be a member that can be offset by the relative position of the outer wheel and the inner wheel by the rotation of the inner wheel by itself.

在本發明之熱處理裝置中,前述熱處理也可以包含前述被處理物之加熱處理。在此,當在第1空間中,被進行包含加熱處理之處理時,藉在爐體內旋轉體被加熱等,有時第1軸承被加熱。在此種情形下,自第2空間供給口供給氣體到第2空間,產生自第2空間透過第1軸承的間隙,以流向第1空間之流動,藉此,可藉此氣體流動,冷卻第1軸承以抑制加熱。 In the heat treatment apparatus of the present invention, the heat treatment may include heat treatment of the object to be treated. Here, when the heat treatment is performed in the first space, the first bearing is heated by heating or the like in the furnace body. In this case, the gas is supplied from the second space supply port to the second space, and a gap is transmitted from the second space to the first bearing to flow into the first space, whereby the gas can be flowed and cooled. 1 bearing to suppress heating.

在本發明之熱處理裝置中,前述爐體也可以具有排出前述第1空間內的環境氣體之排氣口。如此一來,當透過第2空間供給口、第2空間及第1軸承的間隙,供給氣體到第1空間內時,藉自排氣口排出環境氣體,可很容易調整第1空間內的環境氣體的壓力。在此情形中,前述排氣口也可以在前述爐體外部連接排氣閥。又,本發明之熱處理裝置也可以具備被連接到排氣口,而且吸引第1空間內的環境氣體之排氣機構。 In the heat treatment apparatus of the present invention, the furnace body may have an exhaust port for discharging the ambient gas in the first space. In this way, when the gas is supplied into the first space through the gap between the second space supply port, the second space, and the first bearing, the environment in the first space can be easily adjusted by discharging the ambient gas from the exhaust port. The pressure of the gas. In this case, the exhaust port may be connected to the exhaust valve outside the furnace body. Further, the heat treatment apparatus of the present invention may include an exhaust mechanism that is connected to the exhaust port and that sucks the ambient gas in the first space.

在本發明之熱處理裝置中,前述爐體也可以具有可供給氣體到前述第1空間內之第1空間供給口。如此一來,可不透過第2空間及第1軸承的間隙,供給氣體到第1空間, 所以,很容易調整第1空間內的環境氣體(環境氣體的組成及氣壓等)。而且,自第1空間供給口供給到第1空間之氣體,與自第2空間供給口供給到第2空間之氣體,其組成及壓力可以相同,也可以組成及壓力之至少一者不同。 In the heat treatment apparatus of the present invention, the furnace body may have a first space supply port through which gas can be supplied into the first space. In this way, the gas can be supplied to the first space without passing through the gap between the second space and the first bearing. Therefore, it is easy to adjust the ambient gas (the composition of the ambient gas, the gas pressure, etc.) in the first space. Further, the gas supplied to the first space from the first space supply port and the gas supplied to the second space from the second space supply port may have the same composition and pressure, and may have at least one of composition and pressure.

本發明之熱處理裝置,也可以具有:第1配管,被連接在前述第1空間供給口;第2配管,被連接在前述第2空間供給口;以及共通配管,被連接在前述第1配管及前述第2配管。如此一來,可以使透過第1空間供給口之往第1空間之氣體,與透過第2空間供給口之往第2空間之氣體,藉供給氣體到共通配管而一齊進行。而且,第1配管也可以係來自共通配管以外的路徑之氣體可流通者。如此一來,藉供給氣體到第1配管,可持續供給氣體到第1空間與第2空間,藉也自其他路徑流通氣體到第1配管(與來自共通配管之氣體混合),可使透過第1空間供給口供給之氣體,與透過第2空間供給口供給之氣體的組成不同。 The heat treatment apparatus according to the present invention may include: a first pipe connected to the first space supply port; a second pipe connected to the second space supply port; and a common pipe connected to the first pipe and The second pipe described above. In this way, the gas that has passed through the first space supply port to the first space and the gas that has passed through the second space supply port to the second space can be supplied together by the supply of gas to the common pipe. Further, the first pipe may be a gas circulatory person from a path other than the common pipe. In this way, by supplying the gas to the first pipe, the gas can be continuously supplied to the first space and the second space, and the gas can be distributed from the other path to the first pipe (mixed with the gas from the common pipe), so that the first pass can be transmitted. The gas supplied to the space supply port is different from the gas supplied through the second space supply port.

本發明之熱處理裝置也可以具有:第1流量調整閥,被連接在前述第1配管,調整前述第1配管的流量;以及第2流量調整閥,被連接在前述第2配管,調整前述第2配管的流量。如此一來,可調整流入第1空間及第2空間之氣體的流量。 In the heat treatment apparatus of the present invention, the first flow rate adjustment valve may be connected to the first pipe to adjust the flow rate of the first pipe, and the second flow rate adjustment valve may be connected to the second pipe to adjust the second pipe. The flow of piping. In this way, the flow rate of the gas flowing into the first space and the second space can be adjusted.

本發明之熱處理裝置也可以具有:第1減壓閥,被設於前述共通配管與前述第1配管之至少一者上,而且,被設於比前述第1流量調整閥還要上游側;以及第2減壓閥,在前述第2配管之中,被設於比前述第2流量調整閥還要上游 側;前述第1減壓閥使下游側的氣體壓力,減壓到比前述第1空間的環境氣體還要高壓的第1壓力,前述第2減壓閥使下游側的氣體壓力,減壓到比前述第1空間的環境氣體還要高壓的第2壓力,如此一來,可自共通配管供給壓力比減壓後之壓力(第1壓力及第2壓力)還要大之氣體。因此,即使使比第1減壓閥還要上游側及比第2減壓閥還要上游側的配管較細,也可以確保必須之氣體流量。 The heat treatment device according to the present invention may further include: a first pressure reducing valve provided on at least one of the common pipe and the first pipe; and further provided on an upstream side of the first flow rate adjusting valve; The second pressure reducing valve is provided upstream of the second flow rate adjusting valve among the second pipes. The first pressure reducing valve lowers the gas pressure on the downstream side to a first pressure higher than the ambient gas in the first space, and the second pressure reducing valve decompresses the gas pressure on the downstream side to The second pressure higher than the ambient gas in the first space is such that the gas is supplied from the common pipe to a pressure greater than the pressure (the first pressure and the second pressure) after the pressure reduction. Therefore, even if the piping on the upstream side of the first pressure reducing valve and the upstream side of the second pressure reducing valve is made thinner, the necessary gas flow rate can be secured.

本發明之熱處理裝置也可以在前述第1空間與前述第2空間之間,形成連通前述第1空間與前述第2空間之間之第3空間,具有被前述旋轉體貫穿之第3空間形成構件。如此一來,在第1空間與第2空間之間存在第3空間,藉此,可更加抑制例如藉來自爐體之熱傳導,而壁體的第1軸承及密封構件的溫度產生變化等之爐體對於壁體之影響。又,在此情形下,本發明之熱處理裝置,也可以在第3空間具有可旋轉地支撐前述旋轉體之支撐機構。 In the heat treatment apparatus of the present invention, a third space that communicates between the first space and the second space may be formed between the first space and the second space, and a third space forming member that is inserted by the rotating body may be formed. . In this way, the third space exists between the first space and the second space, whereby the temperature of the first bearing and the sealing member of the wall body can be more suppressed, for example, by heat conduction from the furnace body. The effect of the body on the wall. Further, in this case, the heat treatment apparatus of the present invention may have a support mechanism that rotatably supports the rotating body in the third space.

在具有第3空間形成構件之態樣之本發明熱處理裝置中,前述旋轉體具有:搬運滾輪,在前述第1空間內,可搬運前述被處理物;驅動軸,被前述驅動機構旋轉驅動,貫穿前述壁體;保持器,插入有在前述驅動軸之中,前述搬運滾輪側的端部,以與該端部相連接,呈中空管狀;滾輪蓋體,被固定在前述搬運滾輪中之前述驅動軸側;以及連結軸,被插入前述保持器與前述滾輪蓋體,以被連接到前述保持器與前述滾輪蓋體;前述保持器、前述滾輪蓋體及前述連結軸,係也可以被配置在前述第3空間內,在前述滾輪蓋體的內周面與前述連結 軸之間具有間隙,前述連結軸係藉前述間隙,可軸向偏移地被連接在前述滾輪蓋體上。如此一來,前述連結軸可軸向偏移地被連接在滾輪蓋體,藉此,在搬運滾輪與驅動軸即使產生偏心(軸向偏移),也可以透過驅動軸,傳遞來自驅動機構之旋轉驅動力到搬運滾輪。在此情形下,本發明之熱處理裝置,也可以具有在前述第3空間內,可旋轉地支撐前述滾輪蓋體之支撐機構。 In the heat treatment apparatus of the present invention having the third space forming member, the rotating body has a conveying roller that conveys the workpiece in the first space, and a drive shaft that is rotationally driven by the driving mechanism. The retainer is inserted into the drive shaft, and the end on the transport roller side is connected to the end and has a hollow tubular shape; the roller cover is fixed to the drive roller. a shaft side; and a connecting shaft inserted into the retainer and the roller cover to be coupled to the retainer and the roller cover; the retainer, the roller cover, and the connecting shaft may be disposed In the third space, the inner circumferential surface of the roller cover body is connected to the aforementioned A gap is formed between the shafts, and the connecting shaft is coupled to the roller cover by an axial offset by the gap. In this way, the connecting shaft can be coupled to the roller cover body in an axially offset manner, so that even if the transport roller and the drive shaft are eccentric (axially offset), the drive shaft can be transmitted through the drive mechanism. Rotate the driving force to the carrying roller. In this case, the heat treatment apparatus of the present invention may have a support mechanism that rotatably supports the roller cover in the third space.

本發明之熱處理裝置,也可以具有使壓力比前述第1空間內的環境氣體還要高壓之氣體,供給到前述第2空間內之氣體供給機構。如此一來,藉來自氣體供給機構之氣體,可產生自第2空間,通過第1軸承的間隙,往第1空間流動之氣流。 The heat treatment apparatus of the present invention may have a gas supply mechanism that supplies a gas having a higher pressure than the ambient gas in the first space to the second space. In this way, the gas flowing from the gas supply means can generate the airflow flowing from the first space through the gap of the first bearing to the first space.

本發明之熱處理裝置,也可以具有被配置於前述第1空間內之加熱機構。又,本發明之熱處理裝置,也可以具有在第1空間內,可搬運前述被處理物之複數旋轉體。在此情形下,複數旋轉體中之一個以上,只要係「自第1空間側往外部空間,依序貫穿第1壁部、第2空間及第2壁部,以一端自第2壁部突出」者即可。又,壁體係貫穿有一個旋轉體,本發明之熱處理裝置也可以具有複數壁體,也可以係貫穿有複數旋轉體。 The heat treatment apparatus of the present invention may have a heating mechanism disposed in the first space. Further, the heat treatment apparatus of the present invention may have a plurality of rotating bodies that can transport the workpiece in the first space. In this case, one or more of the plurality of rotating bodies may be inserted through the first wall portion, the second space, and the second wall portion in order from the first space side to the outer space, and protrude from the second wall portion at one end. You can do it. Further, the wall system has a rotating body therethrough, and the heat treatment apparatus of the present invention may have a plurality of walls or a plurality of rotating bodies.

本發明之熱處理裝置也可以具有:搬運通路,在前述外部空間與前述第1空間之間,搬運前述被處理物;加熱機構,使前述爐體內部的環境氣體的溫度比外部氣體還要高溫;上方空間形成部,被設於前述搬運通路的鉛直上側,形成 在鉛直下側開口,以連通到前述搬運通路內之上方空間;下方空間形成部,被設於前述搬運通路的鉛直下側,形成在鉛直上側開口,以連通到前述搬運通路內之下方空間;以及吸引機構,吸引前述上方空間與前述下方空間之至少一者。如此一來,如上述之本發明之熱處理方法,可更加抑制透過在爐體內外的搬運通路之環境氣體的流出入。 The heat treatment apparatus according to the present invention may further include: a conveyance path that conveys the object to be processed between the external space and the first space; and a heating mechanism that causes a temperature of the atmosphere inside the furnace to be higher than that of the outside air; The upper space forming portion is provided on the vertical upper side of the transport path to form Opening in a vertical lower side to communicate with an upper space in the transport path; a lower space forming portion is provided on a vertically lower side of the transport path, and is formed to open vertically upward to communicate with a space below the transport path; And an attraction mechanism that attracts at least one of the aforementioned upper space and the aforementioned lower space. As described above, according to the heat treatment method of the present invention described above, it is possible to further suppress the outflow of the ambient gas that has passed through the conveyance path inside and outside the furnace.

在本發明之熱處理裝置中,前述上方空間形成部也可以形成相對於前述爐體而言,上部往遠離方向傾斜之前述上方空間。當溫度比外部氣體還要高溫之環境氣體,自爐體流出後,此環境氣體的流動方向,係相對於爐體而言,愈遠離則愈上升之方向。因此,上方空間相對於爐體而言,上部傾斜到遠離方向,藉此,來自爐體的環境氣體很容易被導引到上方空間,可更加抑制往外部之流出。 In the heat treatment apparatus according to the present invention, the upper space forming portion may form the upper space that is inclined toward the distal direction with respect to the furnace body. When the ambient gas having a higher temperature than the external gas flows out of the furnace body, the flow direction of the ambient gas is in the direction of increasing as it is farther away from the furnace body. Therefore, the upper space is inclined to the outward direction with respect to the furnace body, whereby the ambient gas from the furnace body can be easily guided to the upper space, and the outflow to the outside can be further suppressed.

在本發明之熱處理裝置中,前述上方空間形成部也可以具有隔間構件,前述隔間構件係相對於前述爐體而言,上部傾斜到遠離方向之構件,使前述上方空間沿著前述被處理物的搬運方向,隔間成複數個隔間空間。如此一來,複數個隔間構件係相對於爐體而言,上部傾斜到遠離方向,藉此,來自爐體的環境氣體很容易被導引到上方空間。在此情形中,前述複數個隔間空間係也可以在前述上方空間之中,於上方彼此連通。 In the heat treatment apparatus according to the present invention, the upper space forming portion may include a partition member, wherein the partition member is inclined to a member away from the direction with respect to the furnace body, and the upper space is treated along the aforementioned The direction of transportation of the object, the compartment into a plurality of compartment space. In this way, the plurality of compartment members are inclined to the outward direction with respect to the furnace body, whereby the ambient gas from the furnace body is easily guided to the upper space. In this case, the plurality of compartment spaces may be in communication with each other in the upper space.

在本發明之熱處理裝置中,前述下方空間形成部也可以形成相對於前述爐體而言,下方傾斜到接近方向之前述下方空間。當外部氣體流到搬運通路後,爐體的環境氣體溫度 較高,所以,此外部氣體的流動方向,係相對於爐體而言,愈接近則愈下降之方向。因此,下方空間相對於爐體而言,下部傾斜到接近方向,藉此,流到搬運通路之外部氣體,很容易被導引到下方空間,可更加抑制往爐體之流入。 In the heat treatment apparatus according to the present invention, the lower space forming portion may form the lower space that is inclined downward to the approach direction with respect to the furnace body. Ambient gas temperature of the furnace after the external gas flows to the handling path It is higher, so the flow direction of the external air is closer to the direction of the furnace body as it approaches. Therefore, the lower space is inclined to the approaching direction with respect to the furnace body, whereby the outside air flowing to the conveying path can be easily guided to the lower space, and the inflow into the furnace body can be further suppressed.

在本發明之熱處理裝置中,前述下方空間形成部也可以具有隔間構件,前述隔間構件係相對於前述爐體而言,下部傾斜到接近方向之構件,使前述下方空間沿著前述被處理物的搬運方向,隔間成複數個隔間空間。如此一來,複數個隔間構件係相對於爐體而言,下部傾斜到接近方向,藉此,流至搬運通路的外部氣體很容易被導引到下方空間。在此情形中,前述複數個隔間空間係也可以在前述下方空間之中,於下方彼此連通。 In the heat treatment apparatus according to the present invention, the lower space forming portion may have a partition member, wherein the partition member is a member that is inclined to a proximal direction with respect to the furnace body, and the lower space is treated along the aforementioned The direction of transportation of the object, the compartment into a plurality of compartment space. In this way, the plurality of compartment members are inclined to the approaching direction with respect to the furnace body, whereby the outside air flowing to the conveying path can be easily guided to the lower space. In this case, the plurality of compartment spaces may be connected to each other under the aforementioned lower space.

10‧‧‧輥道窯 10‧‧‧Roller kiln

11‧‧‧爐體 11‧‧‧ furnace body

11‧‧‧第1空間 11‧‧‧1st space

12‧‧‧前端面 12‧‧‧ front end

13‧‧‧後端面 13‧‧‧ rear end face

14,15‧‧‧開口 14,15‧‧ openings

16‧‧‧穿孔 16‧‧‧Perforation

17‧‧‧穿孔 17‧‧‧Perforation

18‧‧‧第1空間供給口 18‧‧‧1st space supply port

19‧‧‧排氣口 19‧‧‧Exhaust port

20‧‧‧加熱器 20‧‧‧heater

22‧‧‧被動側蓋體 22‧‧‧ Passive side cover

24‧‧‧被動側支撐滾輪 24‧‧‧ Passive side support roller

26‧‧‧驅動側蓋體 26‧‧‧Drive side cover

26a‧‧‧第3空間 26a‧‧‧3rd space

27‧‧‧開口 27‧‧‧ openings

28‧‧‧驅動側支撐滾輪 28‧‧‧Drive side support roller

30‧‧‧壁體 30‧‧‧ wall

30a‧‧‧第2空間 30a‧‧‧Second space

31‧‧‧第1壁部 31‧‧‧1st wall

32‧‧‧第2壁部 32‧‧‧2nd wall

33‧‧‧第2空間供給口 33‧‧‧2nd space supply port

40‧‧‧第1軸承 40‧‧‧1st bearing

41‧‧‧內輪 41‧‧‧ Inner wheel

42‧‧‧外輪 42‧‧‧Outside

43‧‧‧球體 43‧‧‧ sphere

44,45‧‧‧遮蔽構件 44,45‧‧‧Shielding members

44a,45a‧‧‧間隙 44a, 45a‧‧‧ gap

50‧‧‧第2軸承 50‧‧‧2nd bearing

51‧‧‧內輪 51‧‧‧Inner wheel

52‧‧‧外輪 52‧‧‧Outside

53‧‧‧球體 53‧‧‧ sphere

54,55‧‧‧遮蔽構件 54,55‧‧‧Shielding members

60‧‧‧旋轉體 60‧‧‧ rotating body

61‧‧‧搬運滾輪 61‧‧‧Handling roller

62‧‧‧滾輪蓋體 62‧‧‧Roller cover

62a,62b‧‧‧切入部 62a, 62b‧‧‧cutting department

63‧‧‧連結軸 63‧‧‧Connected shaft

64‧‧‧保持器 64‧‧‧ Keeper

64a,64b‧‧‧切入部 64a, 64b‧‧‧cut-in department

64c,64d‧‧‧切入部 64c, 64d‧‧‧cutting department

65‧‧‧驅動軸 65‧‧‧Drive shaft

66‧‧‧鏈輪 66‧‧‧Sprocket

67a‧‧‧插入銷 67a‧‧‧Insert pin

67b‧‧‧插入銷 67b‧‧‧Insert pin

67c‧‧‧插入銷 67c‧‧‧Insert pin

68a‧‧‧擋止螺絲 68a‧‧‧stop screw

68c‧‧‧擋止螺絲 68c‧‧‧stop screw

69a‧‧‧C型環 69a‧‧‧C-ring

69b‧‧‧C型環 69b‧‧‧C-ring

69c‧‧‧C型環 69c‧‧‧C-ring

70‧‧‧氣體供給裝置 70‧‧‧ gas supply device

71‧‧‧第1氣體供給源 71‧‧‧1st gas supply source

72‧‧‧第2氣體供給源 72‧‧‧2nd gas supply source

73‧‧‧共通配管 73‧‧‧Common piping

74‧‧‧第1配管 74‧‧‧1st piping

75‧‧‧第2配管 75‧‧‧2nd piping

76a‧‧‧連接部 76a‧‧‧Connecting Department

76b‧‧‧連接部 76b‧‧‧Connecting Department

80‧‧‧過濾器 80‧‧‧Filter

81‧‧‧流量計 81‧‧‧ flowmeter

82‧‧‧第1減壓閥 82‧‧‧1st pressure reducing valve

83‧‧‧第2減壓閥 83‧‧‧2nd pressure reducing valve

84‧‧‧第1流量調整閥 84‧‧‧1st flow adjustment valve

85‧‧‧第2流量調整閥 85‧‧‧2nd flow adjustment valve

86‧‧‧排氣裝置 86‧‧‧Exhaust device

87‧‧‧排氣閥 87‧‧‧Exhaust valve

88‧‧‧吸氣閥 88‧‧‧ Inhalation valve

89‧‧‧排氣風扇 89‧‧‧Exhaust fan

90‧‧‧馬達 90‧‧‧Motor

91‧‧‧驅動軸 91‧‧‧Drive shaft

92‧‧‧滾子鏈條 92‧‧‧Roller chain

95‧‧‧托盤 95‧‧‧Tray

96‧‧‧被處理物 96‧‧‧Processed objects

132‧‧‧第2壁部 132‧‧‧2nd wall

150‧‧‧一端側軸承 150‧‧‧one end bearing

156‧‧‧軸封 156‧‧‧ shaft seal

157‧‧‧本體部 157‧‧‧ Body Department

157a‧‧‧密封脣緣 157a‧‧‧ sealing lip

157b‧‧‧防塵脣緣 157b‧‧‧Dust lip

158‧‧‧金屬環 158‧‧‧Metal ring

159‧‧‧彈簧 159‧‧ ‧ spring

232‧‧‧第2壁部 232‧‧‧2nd wall

250‧‧‧一端側軸承 250‧‧‧one end bearing

266a,266b‧‧‧鏈輪 266a, 266b‧‧‧ sprocket

292a,292b‧‧‧滾子鏈條 292a, 292b‧‧‧Roller chain

293a,293b‧‧‧凸輪離合器 293a, 293b‧‧‧ cam clutch

294‧‧‧支撐部 294‧‧‧Support

310‧‧‧輥道窯 310‧‧‧Roller kiln

329,429‧‧‧搬運通路 329,429‧‧‧Transportation

330‧‧‧第1搬運通路 330‧‧‧1st transport path

335‧‧‧搬運滾輪 335‧‧‧Handling roller

340‧‧‧第2搬運通路 340‧‧‧2nd transport path

350‧‧‧第3搬運通路 350‧‧‧3rd transport path

352‧‧‧搬運口 352‧‧‧Transportation port

360‧‧‧上方空間形成部 360‧‧‧Top Space Formation Department

362‧‧‧外壁 362‧‧‧ outer wall

363‧‧‧上方空間 363‧‧‧The space above

364a,364b‧‧‧隔間構件 364a, 364b‧‧‧ compartment components

365a~365c‧‧‧隔間空間 365a~365c‧‧‧ Compartment space

366‧‧‧吸引口 366‧‧‧ attracting mouth

367,377‧‧‧吸引裝置 367,377‧‧‧ suction device

370‧‧‧下方空間形成部 370‧‧‧The space formation department below

372‧‧‧外壁 372‧‧‧ outer wall

373‧‧‧下方空間 373‧‧‧Lower space

374a,374b‧‧‧隔間構件 374a, 374b‧‧‧ compartment components

375a~375c‧‧‧隔間空間 375a~375c‧‧‧ Compartment space

376‧‧‧吸引口 376‧‧‧ attracting mouth

429‧‧‧搬運通路 429‧‧‧Transportation path

430‧‧‧第1搬運通路 430‧‧‧1st transport path

435‧‧‧搬運滾輪 435‧‧‧Handling roller

440‧‧‧第2搬運通路 440‧‧‧2nd transport path

452‧‧‧搬運口 452‧‧‧ports

460‧‧‧上方空間形成部 460‧‧‧The upper space forming department

462‧‧‧外壁 462‧‧‧ outer wall

464a,464b‧‧‧隔間構件 464a, 464b‧‧‧ compartment components

467‧‧‧吸引裝置 467‧‧‧ attracting device

470‧‧‧下方空間形成部 470‧‧‧The space formation department below

472‧‧‧外壁 472‧‧‧ outer wall

477‧‧‧吸引裝置 477‧‧‧ attracting device

474a,474b‧‧‧隔間構件 474a, 474b‧‧‧ compartment components

第1圖係第1實施形態之輥道窯10的縱剖面圖。 Fig. 1 is a longitudinal sectional view showing a roller kiln 10 according to the first embodiment.

第2圖係第1圖的A-A剖面圖。 Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

第3圖係第2圖的驅動側蓋體26及壁體30周邊的放大剖面圖。 Fig. 3 is an enlarged cross-sectional view showing the vicinity of the drive side cover 26 and the wall body 30 in Fig. 2 .

第4圖係變形例的輥道窯中之壁體30周邊的放大剖面圖。 Fig. 4 is an enlarged cross-sectional view showing the periphery of the wall body 30 in the roller kiln of the modification.

第5圖係變形例的輥道窯中之壁體30周邊的放大剖面圖。 Fig. 5 is an enlarged cross-sectional view showing the periphery of the wall body 30 in the roller kiln of the modification.

第6圖係第2實施形態之輥道窯310的縱剖面圖。 Fig. 6 is a longitudinal sectional view showing a roller kiln 310 according to a second embodiment.

[第1實施形態] [First Embodiment]

接著,使用圖面說明本發明之實施形態。第1圖係根據本 發明之熱處理方法之熱處理裝置的第1實施形態之輥道窯10的縱剖面圖。第2圖係第1圖的A-A剖面圖。第3圖係第2圖的驅動側蓋體26及壁體30周邊的放大剖面圖。輥道窯10係在爐體11的第1空間11a內,一邊搬運載置有複數被處理物96之托盤95,一邊對被處理物96進行熱處理之裝置。輥道窯10具有爐體11、被動側蓋體22、驅動側蓋體26、壁體30、包含搬運滾輪61之複數旋轉體60、氣體供給裝置70及排氣裝置86(參照第1圖及第2圖)。 Next, an embodiment of the present invention will be described using the drawings. Figure 1 is based on this A longitudinal cross-sectional view of the roller kiln 10 according to the first embodiment of the heat treatment apparatus of the heat treatment method of the invention. Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1. Fig. 3 is an enlarged cross-sectional view showing the vicinity of the drive side cover 26 and the wall body 30 in Fig. 2 . The roller kiln 10 is a device that heats the workpiece 96 while transporting the tray 95 on which the plurality of workpieces 96 are placed in the first space 11a of the furnace body 11. The roller kiln 10 includes a furnace body 11, a passive side cover 22, a drive side cover 26, a wall body 30, a plurality of rotating bodies 60 including a conveyance roller 61, a gas supply device 70, and an exhaust device 86 (see Fig. 1 and Figure 2).

爐體11係被形成略呈立方體之絕熱構造體,其具有:第1空間11a,在內部進行被處理物96之熱處理之處理空間;以及開口14,15,分別被形成在爐體的前端面12(第1圖的左端面)及後端面13(第1圖的右端面),成為自外部往第1空間11a之出入口(第1圖)。此爐體11係自前端面12至後端面13的長度為例如2~15公尺。在第1空間11a內,複數搬運滾輪61係沿著搬運方向(第1圖的前後方向),自開口14橫貫到開口15配置。藉搬運滾輪61旋轉,載置有複數被處理物96之拖盤95,自開口14通過第1空間11a內,以被搬運到開口15。而且,如第2圖所示,搬運滾輪61係在直交搬運方向之方向(第2圖的左右方向)上,貫穿爐體11。爐體11在左右方向上,具有穿孔16及穿孔17,搬運滾輪61的一端(第2圖的左端)係貫穿爐體11的穿孔16,以到達驅動側蓋體26內,另一端(第2圖的右端)係貫穿爐體11的穿孔17,以到達被動側蓋體22內。又,在第1空間11a內,於爐體11的天花板及底部,配置有複數加熱器20,使得自上下夾著複數搬運滾輪 61。加熱器20係被配置使得縱向直交搬運方向,其沿著搬運方向被配置複數個。加熱器20係加熱通過第1空間11a內之被處理物96者,其係例如SiC加熱器等之陶瓷加熱器。而且,並不侷限於加熱器20,其只要係氣體燃燒器等,可進行被處理物96的熱處理之加熱裝置即可。如第2圖所示,在爐體11的天花板部分,形成有與排氣裝置86連接,可排出第1空間11a內的環境氣體之排氣口19。又,在爐體11的底部,形成有與氣體供給裝置70連接,可供給氣體到第1空間11a之第1空間供給口18。而且,爐體11除了開口14,15、穿孔16,17、第1空間供給口18及排氣口19,其餘皆氣密構造,使得在這些部分以外,與外部空間等的其他空間,幾乎不產生氣體的流出入。又,開口14及開口15也可以開口到氣密構造之未圖示置換室內。 The furnace body 11 is formed into a substantially cubic heat insulating structure having a first space 11a in which a processing space for heat treatment of the workpiece 96 is performed, and openings 14 and 15 formed on the front end surface of the furnace body, respectively. 12 (the left end surface of Fig. 1) and the rear end surface 13 (the right end surface of Fig. 1) are the entrances and exits from the outside to the first space 11a (Fig. 1). The length of the furnace body 11 from the front end surface 12 to the rear end surface 13 is, for example, 2 to 15 meters. In the first space 11a, the plurality of conveyance rollers 61 are disposed from the opening 14 to the opening 15 in the conveyance direction (the front-rear direction in the first drawing). By the rotation of the conveyance roller 61, the tray 95 on which the plurality of objects 96 are placed is placed in the first space 11a from the opening 14 to be conveyed to the opening 15. Moreover, as shown in FIG. 2, the conveyance roller 61 penetrates the furnace body 11 in the direction of the orthogonal conveyance direction (the horizontal direction of FIG. 2). The furnace body 11 has a through hole 16 and a through hole 17 in the left-right direction, and one end (the left end of the second drawing) of the conveying roller 61 passes through the through hole 16 of the furnace body 11 to reach the inside of the driving side cover 26, and the other end (second The right end of the figure extends through the perforations 17 of the furnace body 11 to reach the passive side cover 22. Further, in the first space 11a, a plurality of heaters 20 are disposed on the ceiling and the bottom of the furnace body 11, so that the plurality of carrying rollers are sandwiched from above and below. 61. The heater 20 is configured such that the longitudinal direction is orthogonal to the conveyance direction, which is arranged in plural in the conveyance direction. The heater 20 heats the workpiece 96 passing through the first space 11a, and is a ceramic heater such as a SiC heater. Further, the heater 20 is not limited to the heater 20, and a heating device for heat-treating the workpiece 96 may be used as long as it is a gas burner or the like. As shown in Fig. 2, an exhaust port 19 that is connected to the exhaust device 86 and discharges the ambient gas in the first space 11a is formed in the ceiling portion of the furnace body 11. Further, at the bottom of the furnace body 11, a first space supply port 18 that is connected to the gas supply device 70 and supplies the gas to the first space 11a is formed. Further, the furnace body 11 has a gas-tight structure except for the openings 14, 15, the perforations 16, 17, the first space supply port 18, and the exhaust port 19, so that other spaces such as the external space are hardly formed outside these portions. Produces the inflow of gas. Further, the opening 14 and the opening 15 may be opened to a replacement chamber (not shown) having a hermetic structure.

被動側蓋體22係被配置在爐體11的右側(第2圖的右側)之略呈立方體之構造體。此被動側蓋體22係覆蓋貫穿穿孔17的搬運滾輪61的另一端,使得搬運滾輪61的另一端不露出到輥道窯10的外部空間。被動側蓋體22係除了連到爐體11側的穿孔17之開口外,為氣密構造,使得在被動側蓋體22內的空間與外部空間,幾乎不產生氣體的流出入。又,在被動側蓋體22內,配置有自下側支撐搬運滾輪61之被動側支撐滾輪24。被動側支撐滾輪24係例如在搬運滾輪61的下側,而且,自搬運滾輪61的中心軸往前後(第2圖的圖面前方與後方)偏移之位置處,並列兩個滾輪者,藉此複數滾輪,可旋轉地支撐搬運滾輪61。 The passive side cover 22 is a slightly cubic structure disposed on the right side (the right side of FIG. 2) of the furnace body 11. The passive side cover 22 covers the other end of the conveying roller 61 penetrating the through hole 17, so that the other end of the conveying roller 61 is not exposed to the outer space of the roller kiln 10. The passive side cover 22 is an airtight structure except for the opening of the through hole 17 connected to the side of the furnace body 11, so that there is almost no gas flowing in and out of the space and the external space in the passive side cover 22. Further, in the passive side cover 22, a passive side support roller 24 that supports the transport roller 61 from the lower side is disposed. The passive side support roller 24 is, for example, on the lower side of the conveyance roller 61, and is placed at a position shifted from the center axis of the conveyance roller 61 to the front and rear (front and rear of the drawing in FIG. 2). The plurality of rollers rotatably support the carrying roller 61.

驅動側蓋體26係被配置在爐體11的左側(第2圖的左側)之略呈立方體之構造體,並在內部形成第3空間26a。驅動側蓋體26係在爐體11側(第2圖的右側)開口,第3空間26a係透過穿孔16,與第1空間11a連通。貫穿穿孔16之搬運滾輪61的一端,係到達第3空間26a內,驅動側蓋體26覆蓋搬運滾輪61的一端。又,在驅動側蓋體26的左側,形成有連通到第3空間26a之開口27,被連接到搬運滾輪61之驅動軸65係貫穿開口27(參照第3圖)。驅動側蓋體26係除了開口27或與爐體11側的穿孔16連接之開口外,其係氣密構造,在這些部分以外,在第3空間26a與第1空間11a、第2空間30a及外部空間之間,幾乎不產生氣體的流出入。在第3空間26a內,配置有自下側支撐旋轉體60(滾輪蓋體62)之驅動側支撐滾輪28。驅動側支撐滾輪28係與被動側支撐滾輪24之構成相同,其可旋轉地支撐旋轉體60(滾輪蓋體62)。 The drive side cover body 26 is a slightly cubic structure disposed on the left side (the left side of FIG. 2) of the furnace body 11, and a third space 26a is formed inside. The drive side cover 26 is opened on the furnace body 11 side (the right side in FIG. 2), and the third space 26a is transmitted through the through hole 16 to communicate with the first space 11a. One end of the conveyance roller 61 that penetrates the through hole 16 reaches the third space 26a, and the drive side cover 26 covers one end of the conveyance roller 61. Further, on the left side of the drive side cover 26, an opening 27 that communicates with the third space 26a is formed, and the drive shaft 65 connected to the conveyance roller 61 passes through the opening 27 (see Fig. 3). The drive side cover 26 is an airtight structure except for the opening 27 or the opening that is connected to the through hole 16 on the furnace body 11 side. In addition to these portions, the third space 26a and the first space 11a and the second space 30a are There is almost no gas inflow between the external spaces. In the third space 26a, a driving side support roller 28 that supports the rotating body 60 (roller cover 62) from the lower side is disposed. The drive side support roller 28 is identical in construction to the passive side support roller 24, and rotatably supports the rotary body 60 (roller cover 62).

壁體30係被配置在驅動側蓋體26的左側(第2圖的左側)之略呈立方體之構造體。如第3圖所示,壁體30具有其係板狀構件之第1壁部31與第2壁部32,使包含這些之複數板狀構件,藉接著劑或螺絲鎖固以組合,成為略呈立方體之構造體。藉此,在壁部30的內部,形成有第2空間30a。第1壁部31與第2壁部32係被相向配置,使得沿著旋轉體60的軸向(第3圖的左右方向)夾著第2空間30a。第1壁部31係爐體11側(第3圖的右側)的表面,與驅動側蓋體26的壁體30側(第3圖的左側)相接,被配置使得阻塞驅動側蓋體26的開口27。藉此,第1壁部31係爐體11側的表面,面對連接到第1 空間11a之第3空間26a,與爐體11相反側之表面係面對第2空間30a。亦即,第1壁部31隔間第3空間26a與第2空間30a。又,第2壁部32係爐體11側的表面面對第2空間30a,與爐體11相反側之表面係面對外部空間。亦即,第2壁部32隔間第2空間30a與外部空間。在壁體30的天花板(第3圖的上部),形成有與氣體供給裝置70相連接,可供給氣體到第2空間30a之第2空間供給口33。又,第1壁部31係藉驅動軸65被貫穿,在此貫穿部分安裝有第1軸承40。同樣地,第2壁部32係藉驅動軸65被貫穿,在此貫穿部分安裝有第2軸承50。而且,壁體30除了第2空間供給口33及第1軸承40的間隙44a,45a(參照第3圖的放大部分),其係氣密構造,在這些部分之外,與外部空間或第3空間26a幾乎不產生氣體的流出入。 The wall body 30 is a slightly cubic structure that is disposed on the left side (the left side of FIG. 2) of the drive side cover body 26. As shown in Fig. 3, the wall body 30 has the first wall portion 31 and the second wall portion 32 of the plate-like member, and the plurality of plate-like members including these are combined by an adhesive or a screw to be abbreviated. A cubic structure. Thereby, the second space 30a is formed inside the wall portion 30. The first wall portion 31 and the second wall portion 32 are opposed to each other such that the second space 30a is interposed in the axial direction of the rotating body 60 (the horizontal direction in FIG. 3). The surface of the first wall portion 31 on the side of the furnace body 11 (the right side in FIG. 3) is in contact with the wall body 30 side (the left side in FIG. 3) of the drive side cover 26, and is arranged such that the drive side cover 26 is blocked. The opening 27. Thereby, the first wall portion 31 is the surface on the side of the furnace body 11, and is connected to the first surface. The third space 26a of the space 11a faces the second space 30a on the surface opposite to the furnace body 11. That is, the first wall portion 31 partitions the third space 26a and the second space 30a. Further, the surface of the second wall portion 32 on the side of the furnace body 11 faces the second space 30a, and the surface on the opposite side to the furnace body 11 faces the external space. That is, the second wall portion 32 partitions the second space 30a from the external space. In the ceiling of the wall body 30 (the upper portion of FIG. 3), a second space supply port 33 that is connected to the gas supply device 70 and supplies the gas to the second space 30a is formed. Further, the first wall portion 31 is penetrated by the drive shaft 65, and the first bearing 40 is attached to the through portion. Similarly, the second wall portion 32 is penetrated by the drive shaft 65, and the second bearing 50 is attached to the through portion. Further, in addition to the gaps 44a and 45a of the second space supply port 33 and the first bearing 40 (see the enlarged portion of Fig. 3), the wall body 30 has an airtight structure, and is external to the external space or the third portion. The space 26a hardly generates an inflow of gas.

第1軸承40係構成為滾珠軸承之滾動軸承,其係可旋轉地支撐旋轉體60(驅動軸65)者。第1軸承40具有內輪41、外輪42、複數球體43及遮蔽構件44,45。內輪41係驅動軸65貫穿中心,可與驅動軸65一同旋轉。外輪42係被配置成與內輪41同心圓狀之構件。外輪42的外周面被安裝在第1壁部31上,以被固定。外輪42的外周面與第1壁部31的貫穿部分的內周面之間,係被例如密封材料等密封。球體43係被可旋轉地配置在內輪41與外輪42之間之構件。此球體43係沿著內輪41的外周面及外輪42的內周面,在圓周方向上等間隔配置複數個。內輪41隨著驅動軸65旋轉而旋轉時,旋轉之內輪41與被固定之外輪42之相對性位置偏移,藉球體43 旋轉來吸收。藉此,第1軸承40係可旋轉地支撐驅動軸65。遮蔽構件44,45係在內輪41的軸向(第3圖的左右方向)上,自複數球體43偏移之位置上,被配置於內輪41與外輪42間之環狀構件。而且,遮蔽構件44係被配置於比球體43還要靠近第1空間11a側,遮蔽構件45係被配置於比球體43還要靠近第2空間30a側。遮蔽構件44,45係例如在鋼板表面固著有合成橡膠等彈性體之構件,遮蔽構件44,45的外周面的環狀突起,係嵌入被形成於外輪42的內周面之凹槽,藉此,被固定在外輪42上。又,在遮蔽構件44,45的內周面也形成有環狀突起,此突起係在與內輪41的外周面的凹槽之間,分別形成有間隙44a,45a。亦即,遮蔽構件44,45係殘留間隙44a,45a,而阻塞內輪41與外輪42間之間隙。此間隙44a,45a係做成被內輪41的凹槽與遮蔽構件44,45的突起夾持之迷宮形狀。間隙44a與間隙45a係透過複數球體43間之間隙以連通。因此,第1軸承40係形成自第2空間30a,經由間隙45a、複數球體43間的間隙及間隙44a,以到達第3空間26a之氣體流路,藉此,第2空間30a與第3空間26a相連通。 The first bearing 40 is configured as a rolling bearing of a ball bearing that rotatably supports the rotating body 60 (the driving shaft 65). The first bearing 40 has an inner ring 41, an outer ring 42, a plurality of balls 43, and shielding members 44, 45. The inner wheel 41 has a drive shaft 65 running through the center and is rotatable together with the drive shaft 65. The outer wheel 42 is configured as a member concentric with the inner ring 41. The outer peripheral surface of the outer ring 42 is attached to the first wall portion 31 to be fixed. The outer peripheral surface of the outer ring 42 and the inner peripheral surface of the penetrating portion of the first wall portion 31 are sealed by, for example, a sealing material or the like. The ball 43 is a member that is rotatably disposed between the inner wheel 41 and the outer wheel 42. The spherical body 43 is disposed along the outer circumferential surface of the inner ring 41 and the inner circumferential surface of the outer ring 42, and is disposed at equal intervals in the circumferential direction. When the inner wheel 41 rotates as the drive shaft 65 rotates, the relative position of the rotated inner wheel 41 and the fixed outer wheel 42 is offset by the ball 43 Rotate to absorb. Thereby, the first bearing 40 rotatably supports the drive shaft 65. The shielding members 44 and 45 are annular members disposed between the inner ring 41 and the outer ring 42 at positions shifted from the plurality of balls 43 in the axial direction of the inner ring 41 (the horizontal direction in FIG. 3). Further, the shielding member 44 is disposed closer to the first space 11a than the spherical body 43, and the shielding member 45 is disposed closer to the second space 30a than the spherical body 43. The shielding members 44 and 45 are, for example, members having an elastic body such as synthetic rubber fixed to the surface of the steel sheet, and the annular projections on the outer circumferential surface of the shielding members 44 and 45 are fitted into the grooves formed on the inner circumferential surface of the outer ring 42. This is fixed to the outer wheel 42. Further, annular projections are formed on the inner circumferential surfaces of the shielding members 44 and 45, and the projections are formed with gaps 44a and 45a between the recesses on the outer circumferential surface of the inner ring 41, respectively. That is, the shielding members 44, 45 retain the gaps 44a, 45a and block the gap between the inner wheel 41 and the outer wheel 42. The gaps 44a, 45a are formed in a labyrinth shape in which the grooves of the inner ring 41 and the projections of the shielding members 44, 45 are held. The gap 44a and the gap 45a pass through the gap between the plurality of spheres 43 to communicate. Therefore, the first bearing 40 is formed in the second space 30a, passes through the gap 45a, the gap between the plurality of balls 43, and the gap 44a to reach the gas flow path of the third space 26a, whereby the second space 30a and the third space 26a is connected.

第2軸承50係構成為滾珠軸承之滾動軸承,其係可旋轉地支撐旋轉體60(驅動軸65)者。第2軸承50具有內輪51、外輪52、複數球體53及遮蔽構件54,55。內輪51係驅動軸65貫穿中心,可與驅動軸65一同旋轉。外輪52係被配置成與內輪51同心圓狀之構件。外輪52的外周面被安裝在第2壁部32上,以被固定。外輪52的外周面與第2壁部32的貫穿部分的內周面之間,係被例如密封材料等密封。球體53係 被可旋轉地配置在內輪51與外輪52之間之構件。此球體53係沿著內輪51的外周面及外輪52的內周面,在圓周方向上等間隔配置複數個。內輪51隨著驅動軸65旋轉而旋轉時,旋轉之內輪51與被固定之外輪52之相對性位置偏移,藉球體53旋轉來吸收。藉此,第2軸承50係可旋轉地支撐驅動軸65。遮蔽構件54,55係在內輪51的軸向(第3圖的左右方向)上,自複數球體53偏移之位置上,被配置於內輪51與外輪52間之環狀構件。而且,遮蔽構件54係被配置於比球體53還要靠近第2空間30a側,遮蔽構件55係被配置於比球體53還要靠近外部空間側。遮蔽構件54,55係例如在鋼板表面固著有合成橡膠等彈性體之構件,遮蔽構件54,55的外周面的環狀突起,係嵌入被形成於外輪52的內周面之凹槽,藉此,被固定在外輪52上。又,與第1軸承40的遮蔽構件44,45不同地,被形成在遮蔽構件54,55的內周面上之環狀突起,係嵌入到內輪51的外周面的凹槽,以接觸到凹槽的底部。因此,在遮蔽構件54,55與內輪51之間無間隙,遮蔽構件54,55係密封內輪51與外輪52之間。 The second bearing 50 is configured as a rolling bearing of a ball bearing that rotatably supports the rotating body 60 (the driving shaft 65). The second bearing 50 has an inner ring 51, an outer ring 52, a plurality of balls 53 and shielding members 54, 55. The inner wheel 51 is a drive shaft 65 that runs through the center and is rotatable together with the drive shaft 65. The outer wheel 52 is a member that is concentric with the inner ring 51. The outer peripheral surface of the outer ring 52 is attached to the second wall portion 32 to be fixed. The outer circumferential surface of the outer ring 52 and the inner circumferential surface of the penetrating portion of the second wall portion 32 are sealed by, for example, a sealing material or the like. Sphere 53 A member that is rotatably disposed between the inner wheel 51 and the outer wheel 52. The spherical body 53 is disposed along the outer circumferential surface of the inner ring 51 and the inner circumferential surface of the outer ring 52 at equal intervals in the circumferential direction. When the inner ring 51 rotates as the drive shaft 65 rotates, the rotational inner wheel 51 is displaced from the fixed outer wheel 52, and is absorbed by the rotation of the ball 53. Thereby, the second bearing 50 rotatably supports the drive shaft 65. The shielding members 54 and 55 are annular members disposed between the inner ring 51 and the outer ring 52 at positions shifted from the plurality of balls 53 in the axial direction of the inner ring 51 (the horizontal direction in FIG. 3). Further, the shielding member 54 is disposed closer to the second space 30a than the spherical body 53, and the shielding member 55 is disposed closer to the external space than the spherical body 53. The shielding members 54 and 55 are, for example, members having an elastic body such as synthetic rubber fixed to the surface of the steel sheet, and the annular projections on the outer circumferential surface of the shielding members 54 and 55 are fitted into the grooves formed on the inner circumferential surface of the outer ring 52. This is fixed to the outer wheel 52. Further, unlike the shielding members 44 and 45 of the first bearing 40, the annular projections formed on the inner circumferential surfaces of the shielding members 54, 55 are fitted into the grooves on the outer circumferential surface of the inner ring 51 to be in contact with The bottom of the groove. Therefore, there is no gap between the shielding members 54, 55 and the inner ring 51, and the shielding members 54, 55 seal the inner wheel 51 and the outer ring 52.

旋轉體60具有搬運滾輪61、滾輪蓋體62、連結軸63、保持器64及驅動軸65。此旋轉體60係藉搬運滾輪61,在第1空間11a內可搬運被處理物96,自第1空間11a往外部空間,依序貫穿驅動側蓋體26(第3空間26a)、第1壁部31、第2空間30a及第2壁部32,一端(第3圖的左端)自第2壁部32突出到外部空間。具體說來,搬運滾輪61係自第1空間11a貫穿穿孔16,以到達第3空間26a內,自第1空間11a側往第 2空間30a側,滾輪蓋體62、連結軸63及保持器64係以此順序被配置在第3空間26a內。又,驅動軸65係自第3空間26a內,依序貫穿開口27、第1壁部31(第1軸承40)、第2空間30a及第2壁部32(第2軸承50),以自第2壁部32突出到外部空間。在驅動軸65的一端側形成有鏈輪66,在此鏈輪66捲繞有滾子鏈條92。滾子鏈條92係被配置,使得橫跨捲繞被配置於外部空間之馬達90的驅動軸91與鏈輪66,連接旋轉體60與馬達90。馬達90係透過驅動軸91與滾子鏈條92,傳遞旋轉驅動力到鏈輪66。藉鏈輪66旋轉驅動,旋轉體60整體旋轉,搬運滾輪61搬運被處理物96。 The rotating body 60 has a conveying roller 61, a roller cover 62, a connecting shaft 63, a retainer 64, and a drive shaft 65. In the rotating body 60, the workpiece 96 is transported in the first space 11a by the transport roller 61, and the drive side cover 26 (the third space 26a) and the first wall are sequentially inserted from the first space 11a to the external space. One end (the left end of FIG. 3) of the second portion 30a and the second wall portion 32 protrudes from the second wall portion 32 to the external space. Specifically, the conveyance roller 61 passes through the through hole 16 from the first space 11a to reach the third space 26a, and is moved from the first space 11a side to the first space. In the space 30a side, the roller cover 62, the connecting shaft 63, and the retainer 64 are disposed in the third space 26a in this order. Further, the drive shaft 65 is inserted through the opening 27, the first wall portion 31 (the first bearing 40), the second space 30a, and the second wall portion 32 (the second bearing 50) from the third space 26a. The second wall portion 32 protrudes into the external space. A sprocket 66 is formed on one end side of the drive shaft 65, and a roller chain 92 is wound around the sprocket 66. The roller chain 92 is disposed such that the rotation shaft 60 and the motor 90 are connected across the drive shaft 91 of the motor 90 disposed in the external space and the sprocket 66. The motor 90 transmits the rotational driving force to the sprocket 66 through the drive shaft 91 and the roller chain 92. The sprocket 66 is rotationally driven, and the rotator 60 is rotated as a whole, and the conveyance roller 61 conveys the workpiece 96.

說明旋轉體60的各構成要素及其連接。搬運滾輪61係例如陶瓷製之中空管體,在一端(第3圖的左端)側具有外徑較小之圓柱狀突出部61a。滾輪蓋體62係軸向兩端開口之筒狀構件。在滾輪蓋體62的搬運滾輪61側的端部的開口內,插入有突出部61a,藉未圖示之螺栓等,固定突出部61a與滾輪蓋體62。藉此,搬運滾輪61與滾輪蓋體62係被同軸固定。 Each component of the rotating body 60 and its connection will be described. The conveyance roller 61 is a hollow tubular body made of, for example, ceramic, and has a cylindrical projecting portion 61a having a small outer diameter on one end (the left end of Fig. 3). The roller cover 62 is a cylindrical member that is open at both axial ends. A protruding portion 61a is inserted into the opening of the end portion of the roller cover 62 on the side of the conveying roller 61, and the protruding portion 61a and the roller cover 62 are fixed by bolts or the like (not shown). Thereby, the conveyance roller 61 and the roller cover 62 are coaxially fixed.

連結軸63係具有比滾輪蓋體62的兩端的開口直徑還要小(例如1/2等)之外徑,而且,具有外徑比保持器64的兩端的開口直徑還要小之圓柱狀構件。保持器64係軸向兩端開口之中空管狀構件。連結軸63的爐體11側的端部,係被插入滾輪蓋體62的壁部30側的端部的開口內。又,在連結軸63的爐體11側端部附近,插入銷67a係與連結軸63的中心軸垂直地,貫穿連結軸63。連結軸63與插入銷67a係藉擋止螺絲68a固定,擋止螺絲68a係與插入銷67a垂直地貫穿連結軸63。 此插入銷67a係長度比滾輪蓋體62的外徑還要長之構件,貫穿被形成在滾輪蓋體62的壁體30側的端部上之一對切入部62a,62b。切入部62a,62b係沿著軸向之凹槽(深度方向係軸向之凹槽),前述凹槽係自滾輪蓋體62的壁體30側的端面,沿著軸向切入滾輪蓋體62的筒狀部分以形成。因此,在以擋止螺絲68a固定連結軸63與插入銷67a之狀態下,插入連結軸63到滾輪蓋體62的內部,同時可自滾輪蓋體62的壁體30側的端面,插入插入銷67a到切入部62a,62b內。又,在插入銷67a之外,再於滾輪蓋體62的左端部側(切入部62a,62b的開口側)安裝C型環69a。藉此,防止插入後之插入銷67a自切入部62a,62b往軸向脫出,如此一來,藉插入銷67a、切入部62a,62b及C型環69a,滾輪蓋體62與連結軸63被連接。連結軸63的壁體30側的端部,係與爐體11側的端部相同地,被插入銷67b貫穿,插入銷67b被擋止螺絲68b固定。藉此,與上述滾輪蓋體62與連結軸63之連接相同地,藉保持器64的爐體11側的切入部64a,64b、插入銷67b及C型環69b,連結軸63係被插入圓筒狀的保持器64內,而兩者被連接。 The connecting shaft 63 has an outer diameter smaller than the opening diameter of both ends of the roller cover 62 (for example, 1/2 or the like), and has a cylindrical member having an outer diameter smaller than the opening diameter of both ends of the retainer 64. . The retainer 64 is a hollow tubular member that is axially open at both ends. The end portion of the connecting shaft 63 on the furnace body 11 side is inserted into the opening of the end portion of the roller cover 62 on the wall portion 30 side. Further, in the vicinity of the end portion of the connecting shaft 63 on the side of the furnace body 11, the insertion pin 67a is inserted perpendicularly to the central axis of the connecting shaft 63, and penetrates the connecting shaft 63. The connecting shaft 63 and the insertion pin 67a are fixed by a stopper screw 68a, and the stopper screw 68a penetrates the coupling shaft 63 perpendicularly to the insertion pin 67a. The insertion pin 67a is a member having a length longer than the outer diameter of the roller cover 62, and penetrates one of the pair of cut portions 62a, 62b formed at the end portion of the roller cover 62 on the wall body 30 side. The cut-in portions 62a, 62b are grooves along the axial direction (the grooves in the axial direction in the axial direction), and the grooves are formed from the end faces of the side of the wall body 30 of the roller cover 62, and are cut into the roller cover 62 in the axial direction. The cylindrical portion is formed. Therefore, in a state where the coupling shaft 63 and the insertion pin 67a are fixed by the stopper screw 68a, the coupling shaft 63 is inserted into the inside of the roller cover 62, and the insertion pin can be inserted from the end surface of the roller cover 62 on the side of the wall body 30 side. 67a is into the cut-in portions 62a, 62b. Further, in addition to the insertion pin 67a, the C-ring 69a is attached to the left end side of the roller cover 62 (the opening side of the cutting portions 62a, 62b). Thereby, the inserted insertion pin 67a is prevented from coming out of the cut-in portions 62a, 62b in the axial direction. Thus, the insertion pin 67a, the cut-in portions 62a, 62b and the C-ring 69a, the roller cover 62 and the connecting shaft 63 are thereby provided. Connected. The end portion of the connecting shaft 63 on the wall body 30 side is inserted through the insertion pin 67b in the same manner as the end portion on the furnace body 11 side, and the insertion pin 67b is fixed by the stopper screw 68b. Thereby, similarly to the connection of the roller cover 62 and the connecting shaft 63, the connecting shaft 63 is inserted into the circle by the cutting portions 64a and 64b, the insertion pin 67b and the C-ring 69b on the furnace body 11 side of the retainer 64. Inside the cylindrical holder 64, the two are connected.

驅動軸65具有外徑(例如與連結軸63相同外徑)比保持器64的兩端的開口直徑還要小之圓柱狀的構件。驅動軸65的爐體11側的端部,係與連結軸63同樣地,被插入銷67c貫穿,插入銷67c被擋止螺絲68c固定。藉此,與上述保持器64與連結軸63之連接相同地,藉保持器64的壁體30側的切入部64c,64d、插入銷67c及C型環69c,驅動軸65係 被插入圓筒狀的保持器64內,而兩者被連接。 The drive shaft 65 has a cylindrical member having an outer diameter (for example, the same outer diameter as the coupling shaft 63) smaller than the opening diameter of both ends of the retainer 64. The end portion of the drive shaft 65 on the furnace body 11 side is inserted through the insertion pin 67c similarly to the connection shaft 63, and the insertion pin 67c is fixed by the stopper screw 68c. Thereby, similarly to the connection of the retainer 64 and the connecting shaft 63, the drive shaft 65 is driven by the cut-in portions 64c and 64d of the retainer 64 on the wall 30 side, the insertion pin 67c and the C-ring 69c. It is inserted into the cylindrical holder 64, and the two are connected.

而且,在本實施形態中,係使保持器64的內徑與連結軸63及驅動軸65的外徑之差比較小(例如小於1mm等),滾輪蓋體62的內徑與連結軸63的外徑之差比較大(例如十數mm)。藉此,雖然保持器64的內徑與連結軸63及驅動軸65的外徑之間隙比較小,但是,滾輪蓋體62的內徑與連結軸63的外徑之間隙比較大。因此,相對於使保持器64與連結軸63及驅動軸65大概保持同軸連接,連結軸63與滾輪蓋體62係藉此間隙,而在插入銷67a的縱向(第3圖的上下方向)可軸向偏移地被連接。而且,插入銷67a係具有即使連結軸63與滾輪蓋體62軸向偏移,也不會自切入部62a,62b脫出之充分長度。這樣地使用插入銷67a~67c,以連接滾輪蓋體62、連結軸63、保持器64及驅動軸65之構成,係例如記載於特開平9-26264號公報(或者,專利第3556739號公報)。 Further, in the present embodiment, the difference between the inner diameter of the retainer 64 and the outer diameter of the connecting shaft 63 and the drive shaft 65 is relatively small (for example, less than 1 mm), and the inner diameter of the roller cover 62 and the connecting shaft 63 are The difference in outer diameter is relatively large (for example, ten mm). Thereby, although the inner diameter of the retainer 64 and the outer diameter of the connecting shaft 63 and the outer diameter of the drive shaft 65 are relatively small, the gap between the inner diameter of the roller cover 62 and the outer diameter of the connecting shaft 63 is relatively large. Therefore, the connecting shaft 63 and the roller cover 62 are substantially coaxially connected to each other with respect to the connecting shaft 63 and the connecting shaft 63 and the drive shaft 65, and the longitudinal direction of the insertion pin 67a (up and down direction of FIG. 3) can be made. They are connected in an axially offset manner. Further, the insertion pin 67a has a sufficient length that the connecting shaft 63 does not escape from the cutting portions 62a, 62b even if the connecting shaft 63 is axially offset from the roller cover 62. The use of the insertion pins 67a to 67c to connect the roller cover 62, the connection shaft 63, the holder 64, and the drive shaft 65 is disclosed in Japanese Laid-Open Patent Publication No. Hei 9-26264 (No. 3,556,739). .

如第2圖所示,氣體供給裝置70具有:第1氣體供給源71,供給第1氣體;以及第2氣體供給源72,供給第2氣體。又,氣體供給裝置70具有:共通配管73,成為自第2氣體供給源72到連接部76a之第1氣體的流路;第1配管74,自連接部76a經由連接部76b到第1空間供給口18為止之氣體的流路;以及第2配管75,自連接部76a到第2空間供給口33為止之氣體的流路。在共通配管73的氣體的流路的中途,自第2氣體供給源72往連接部76a,依序安裝有過濾器80、流量計81及第1減壓閥82。又,在第1配管74的氣體的流路的中途,在比連接部76b還要下游側(第1空間供給口18側), 安裝有第1流量調整閥84。在第2配管75的氣體的流路的中途,自連接部76a往第2空間供給口33,依序安裝有第2減壓閥83及第2流量調整閥85。 As shown in Fig. 2, the gas supply device 70 includes a first gas supply source 71, a first gas supply unit 72, and a second gas supply source 72, and a second gas supply unit. In addition, the gas supply device 70 includes a common pipe 73 and a flow path of the first gas from the second gas supply source 72 to the connection portion 76a, and the first pipe 74 is supplied from the connection portion 76a to the first space via the connection portion 76b. The flow path of the gas to the port 18 and the flow path of the gas from the connection portion 76a to the second space supply port 33 in the second pipe 75. In the middle of the gas flow path of the common pipe 73, the filter 80, the flow meter 81, and the first pressure reducing valve 82 are sequentially attached from the second gas supply source 72 to the connection portion 76a. In the middle of the gas flow path of the first pipe 74, on the downstream side of the connection portion 76b (on the side of the first space supply port 18), The first flow rate adjustment valve 84 is attached. In the middle of the gas flow path of the second pipe 75, the second pressure reducing valve 83 and the second flow rate adjusting valve 85 are sequentially attached from the connecting portion 76a to the second space supply port 33.

第1氣體供給源71係供給第1氣體到第1配管74的連接部76b之裝置。此第1氣體係自連接部76b,透過第1配管74及第1空間供給口18,到達第1空間11a內。第2氣體供給源72係供給第2氣體到共通配管73之裝置。此第2氣體係自共通配管73流通在第1配管74內,在連接部76b與第1氣體混合後,自第1空間供給口18到達第1空間11a內。又,第2氣體係自共通配管73流通在第2配管75內,透過第2空間供給口33到達第2空間30a內。在此,第2氣體係包含在被處理物96之熱處理時,第1空間11a內的環境氣體的成分的至少一部份之氣體。在本實施形態中,熱處理時之第1空間11a內的環境氣體係還原環境氣體,具體說來,其係在氮氣混合微量氫氣之環境氣體(例如環境氣體中的氫氣濃度為數%等)。而且,第2氣體係氮氣。又,第1氣體係在熱處理時,第1空間11a內的環境氣體之中,至少包含不含在第2氣體中之成分者,在本實施形態係氫氣。 The first gas supply source 71 is a device that supplies the first gas to the connection portion 76b of the first pipe 74. The first gas system passes through the first pipe 74 and the first space supply port 18 from the connection portion 76b, and reaches the first space 11a. The second gas supply source 72 is a device that supplies the second gas to the common pipe 73. The second gas system flows through the first pipe 74 from the common pipe 73, and after the connection portion 76b is mixed with the first gas, it reaches the first space 11a from the first space supply port 18. In addition, the second gas system flows through the common pipe 73 in the second pipe 75, and passes through the second space supply port 33 and reaches the second space 30a. Here, the second gas system includes at least a part of the gas of the component of the ambient gas in the first space 11a during the heat treatment of the workpiece 96. In the present embodiment, the ambient gas system in the first space 11a during the heat treatment reduces the ambient gas, specifically, an ambient gas in which a small amount of hydrogen gas is mixed with nitrogen (for example, a hydrogen gas concentration in the ambient gas is several % or the like). Moreover, the second gas system is nitrogen. In the heat treatment of the first gas system, at least the component contained in the second gas is contained in the ambient gas in the first space 11a. In the present embodiment, hydrogen gas is used.

過濾器80係自供給自第2氣體供給源72之第2氣體,去除塵埃等微粒子之裝置。流量計81係測量流過共通配管73之第2氣體的流量之裝置。第1減壓閥82係被設於比第1流量調整閥84還要在氣體的上游側,使自第2氣體供給源72被供給到本身上游側之氣體的壓力,減壓至既定之第1壓力,以流到本身的下游側。此第1壓力係事先被決定為比被 處理物96熱處理時之第1空間11a的環境氣體還要高壓(例如第1空間11a的環境氣體的十數倍壓力)。雖然未特別侷限,但是,第1壓力也可以小於第2氣體供給源72供給之第2氣體的壓力的一半。第2減壓閥83係被設於比第2流量調整閥85還要在氣體的上游側,使被供給到本身的上游側之氣體的壓力,減壓至既定之第2壓力,以流到本身的下游側。而且,由第2圖可知:第1減壓閥82被設於第2減壓閥83的上游側,所以,氣體以第1壓力被供給到第2減壓閥83的上游側。亦即,第2減壓閥83係使第1壓力之氣體,減壓至第2壓力,以流到下游側。此第2壓力係被事先決定為比在被處理物96熱處理時之第1空間11a的環境氣體還要高壓(例如第1空間11a的環境氣體的數倍壓力)。雖然未特別侷限,但是,第2壓力也可以小於第1氣體的1/100。第1流量調整閥84係調整使得通過本身之氣體(混合第1氣體與第2氣體之氣體)的流量,成為既定之第1流量(使得不超過第1流量)之裝置。第2流量調整閥85係調整使得通過本身之第2氣體的流量,成為既定之第2流量(使得不超過第2流量)之裝置。 The filter 80 is a device that removes fine particles such as dust from the second gas supplied from the second gas supply source 72. The flow meter 81 is a device that measures the flow rate of the second gas flowing through the common pipe 73. The first pressure reducing valve 82 is provided on the upstream side of the gas, and the pressure of the gas supplied from the second gas supply source 72 to the upstream side of the first flow rate adjusting valve 84 is reduced to a predetermined level. 1 pressure to flow to the downstream side of itself. This first pressure system is determined in advance as the ratio The ambient gas of the first space 11a at the time of heat treatment of the processed material 96 is also high pressure (for example, ten times the pressure of the ambient gas in the first space 11a). Although not particularly limited, the first pressure may be less than half the pressure of the second gas supplied from the second gas supply source 72. The second pressure reducing valve 83 is provided on the upstream side of the gas than the second flow rate adjusting valve 85, and the pressure of the gas supplied to the upstream side of the gas is reduced to a predetermined second pressure. The downstream side of itself. In addition, as shown in FIG. 2, the first pressure reducing valve 82 is provided on the upstream side of the second pressure reducing valve 83. Therefore, the gas is supplied to the upstream side of the second pressure reducing valve 83 at the first pressure. In other words, the second pressure reducing valve 83 depressurizes the gas of the first pressure to the second pressure to flow to the downstream side. The second pressure system is determined in advance to be higher than the ambient gas of the first space 11a when the workpiece 96 is heat-treated (for example, several times the pressure of the ambient gas in the first space 11a). Although not particularly limited, the second pressure may be less than 1/100 of the first gas. The first flow rate adjustment valve 84 is a device that adjusts the flow rate of the gas passing through itself (mixing the gas of the first gas and the second gas) to a predetermined first flow rate (so that the first flow rate is not exceeded). The second flow rate adjustment valve 85 is a device that adjusts the flow rate of the second gas by itself to a predetermined second flow rate (so that the second flow rate is not exceeded).

排氣裝置86係被連接到排氣口19,以吸引第1空間11a內的環境氣體再排出之裝置。此排氣裝置86具有排氣閥87、吸氣閥88及排氣風扇89。排氣閥87係藉調整閥的開度,調整自第1空間11a透過排氣口19流動之環境氣體的流量之裝置。吸氣閥88係例如吸入周圍的大氣等,藉此,冷卻來自第1空間11a之環境氣體之裝置。排氣風扇89係透過排氣口19、排氣閥87及吸氣閥88,以吸引第1空間11a內的 環境氣體,將此排出。排氣風扇89也可以係可調整每單位時間之排氣量。 The exhaust unit 86 is connected to the exhaust port 19 to suck the apparatus for re-discharging the ambient gas in the first space 11a. This exhaust device 86 has an exhaust valve 87, an intake valve 88, and an exhaust fan 89. The exhaust valve 87 adjusts the opening degree of the regulating valve to adjust the flow rate of the ambient gas flowing through the exhaust port 19 from the first space 11a. The intake valve 88 is, for example, a device that sucks in the surrounding atmosphere or the like, thereby cooling the ambient gas from the first space 11a. The exhaust fan 89 passes through the exhaust port 19, the exhaust valve 87, and the intake valve 88 to attract the inside of the first space 11a. Ambient gas, this is discharged. The exhaust fan 89 can also adjust the amount of exhaust per unit time.

被處理物96係當通過爐體11內時,藉來自加熱器20之熱,進行例如燒製等之熱處理者。雖然未特別侷限,但是,在本實施形態中,被處理物96係層積陶瓷製的感應體與電極之層積體(尺寸係例如縱橫為1mm以內),在燒製後,其成為陶瓷電容器的晶片。 When the object to be processed 96 passes through the inside of the furnace body 11, the heat treatment from the heater 20 is performed, and heat treatment such as firing is performed. In the present embodiment, the workpiece 96 is a laminate of a ceramic inductor and an electrode (the size is, for example, within 1 mm in the vertical and horizontal directions), and after firing, it becomes a ceramic capacitor. Wafer.

以上,使用第1圖~第3圖說明輥道窯10的構成,但是,在第2圖及第3圖中,係圖示一個旋轉體60、貫穿有該旋轉體60之一個驅動側蓋體26及一個壁體30等。在本實施形態中,被配置於第1空間11a內之複數旋轉體60皆具有與第2圖及第3圖相同構成。亦即,輥道窯10係具有與被配置於第1空間11a內之旋轉體60的支數相同數量之驅動側蓋體26、壁體30、馬達90及被動側蓋體22等。又,第2配管75係在第2流量調整閥85的下游,以與壁體30相同之數量分歧者,分歧前端係分別連接到複數第2空間供給口33。 Although the configuration of the roller kiln 10 has been described above with reference to FIGS. 1 to 3, in the second and third drawings, one rotating body 60 and one driving side cover through which the rotating body 60 is inserted are illustrated. 26 and a wall 30 and the like. In the present embodiment, the plurality of rotating bodies 60 disposed in the first space 11a have the same configuration as that of the second and third figures. In other words, the roller kiln 10 has the same number of the drive side cover 26, the wall body 30, the motor 90, the passive side cover 22, and the like as the number of the rotation bodies 60 disposed in the first space 11a. Further, the second pipe 75 is downstream of the second flow rate adjusting valve 85, and is divided into the same number as the wall body 30, and the branch front ends are connected to the plurality of second space supply ports 33, respectively.

接著,說明使用如此構成之輥道窯10熱處理被處理物96之情形。首先,動作馬達90以旋轉驅動複數旋轉體60,同時通電到加熱器20以發熱加熱器20。自旋轉體60往旋轉體60之驅動力,在本實施形態中,係依據熱處理所需要時間而事先決定。加熱器20的輸出,係依據在第1空間11a內之被處理物96之熱處理時之溫度(例如1000℃前後等)而事先決定。接著,準備載置複數被處理物96之複數托盤95,依序載置到開口14側的端部的旋轉體60(搬運滾輪61)上。托盤95也可以 在與搬運方向垂直之方向(第2圖的左右方向)上,載置複數列。被載置於搬運滾輪61上之托盤95,係藉複數搬運滾輪61的旋轉,被搬入爐體11內,在搬運方向上依序被搬運。而且,托盤95係通過第1空間11a,自開口15側被搬出。如此一來,在輥道窯10中,一邊藉馬達90旋轉驅動旋轉體60,於第1空間11a內依序搬運被處理物96,一邊藉加熱器20進行熱處理。 Next, a case where the workpiece 96 is heat-treated using the roller kiln 10 thus constructed will be described. First, the motion motor 90 rotationally drives the plurality of rotating bodies 60 while being energized to the heater 20 to heat the heater 20. The driving force of the self-rotating body 60 to the rotating body 60 is determined in advance in accordance with the time required for the heat treatment in the present embodiment. The output of the heater 20 is determined in advance based on the temperature (for example, before and after 1000 ° C) of the heat treatment of the workpiece 96 in the first space 11a. Next, the plurality of trays 95 on which the plurality of objects 96 are placed are prepared, and are sequentially placed on the rotating body 60 (transport roller 61) at the end on the side of the opening 14. Tray 95 can also The plurality of columns are placed in a direction perpendicular to the conveyance direction (the horizontal direction in FIG. 2). The tray 95 placed on the conveyance roller 61 is carried into the furnace body 11 by the rotation of the plurality of conveyance rollers 61, and is sequentially conveyed in the conveyance direction. Further, the tray 95 is carried out from the opening 15 side through the first space 11a. In the roller kiln 10, the rotating body 60 is rotationally driven by the motor 90, and the workpiece 96 is sequentially conveyed in the first space 11a, and heat treatment is performed by the heater 20.

而且,在搬運被處理物96時,亦即,進行熱處理時,自第1氣體供給源71及第2氣體供給源72,分別供給第1氣體及第2氣體,同時藉排氣風扇89吸引第1空間11a內的環境氣體以排出。以下,說明氣體的流動。 In addition, when the workpiece 96 is conveyed, that is, when the heat treatment is performed, the first gas and the second gas are supplied from the first gas supply source 71 and the second gas supply source 72, respectively, and the exhaust fan 89 is sucked. 1 The ambient gas in the space 11a is discharged. Hereinafter, the flow of the gas will be described.

第2氣體供給源72係供給壓力超過第1壓力及第2壓力之第2氣體到共通配管73。被供給到共通配管73之第2氣體,係通過過濾器80及流量計81,以第1減壓閥82被減壓到第1壓力。以第1減壓閥82被減壓到第1壓力之第2氣體,係在連接部76a分歧成第1配管74與第2配管75以流動。流過第1配管74之第2氣體,係在連接部76b與來自第1氣體供給源71之第1氣體混合。而且,第1氣體供給源71係例如以與第1壓力相同或稍高之壓力,供給第1氣體到連接部76b。第1氣體與第2氣體被混合之氣體,係藉連接部76b的下游的第1流量調整閥84,流量被調整到第1流量,以此第1流量自第1空間供給口18流入第1空間11a內。 The second gas supply source 72 supplies the second gas having a pressure exceeding the first pressure and the second pressure to the common pipe 73. The second gas supplied to the common pipe 73 passes through the filter 80 and the flow meter 81, and is decompressed to the first pressure by the first pressure reducing valve 82. The second gas that has been decompressed to the first pressure by the first pressure reducing valve 82 is branched into the first pipe 74 and the second pipe 75 by the connecting portion 76a. The second gas flowing through the first pipe 74 is mixed with the first gas from the first gas supply source 71 at the connection portion 76b. Further, the first gas supply source 71 supplies the first gas to the connection portion 76b at a pressure equal to or slightly higher than the first pressure, for example. The gas in which the first gas and the second gas are mixed is the first flow rate adjusting valve 84 downstream of the connecting portion 76b, and the flow rate is adjusted to the first flow rate, whereby the first flow rate flows into the first space from the first space supply port 18. Within the space 11a.

另外,在連接部76a分歧到第2配管75之第2氣體,係以第2減壓閥83被減壓至第2壓力,以第2流量調整 閥85被調整成第2流量,以此第2流量自第2空間供給口33流入到第2空間30a內。在此,第2壓力係設定成比熱處理時之第1空間11a的環境氣體的壓力還要高,被供給到第2空間30a內之第2氣體的壓力,係被調整使得比第1空間11a(及與此連通之第3空間26a)的環境氣體的壓力還要高。又,壁體30係第2空間30a透過第1軸承40的間隙44a,45a,與第3空間26a連通,但是,此外皆被保持氣密。藉此,被供給到第2空間30a之第2氣體,係自第1軸承40的間隙44a,45a欲流向第1空間11a側。因此,第2空間30a內的第2氣體,係自間隙44a,45a經由第3空間26a內,流入第1空間11a內。 In addition, the second gas that has branched into the second pipe 75 in the connection portion 76a is depressurized to the second pressure by the second pressure reducing valve 83, and is adjusted by the second flow rate. The valve 85 is adjusted to the second flow rate, and the second flow rate flows into the second space 30a from the second space supply port 33. Here, the second pressure system is set to be higher than the pressure of the ambient gas in the first space 11a during the heat treatment, and the pressure of the second gas supplied into the second space 30a is adjusted to be larger than the first space 11a. The pressure of the ambient gas (and the third space 26a connected thereto) is also higher. Further, the wall 30 is configured such that the second space 30a passes through the gaps 44a and 45a of the first bearing 40 and communicates with the third space 26a. However, both of them are kept airtight. Thereby, the second gas supplied to the second space 30a is intended to flow from the gaps 44a and 45a of the first bearing 40 to the first space 11a side. Therefore, the second gas in the second space 30a flows into the first space 11a through the gaps 44a and 45a through the third space 26a.

如此一來,第1氣體及第2氣體係經由第1空間供給口18,被供給到第1空間11a,同時第2氣體係經由第2空間供給口33,被供給到第1空間11a,這些混合後之氣體成為第1空間11a內的環境氣體。在本實施形態中,使來自第1氣體供給源71之第1氣體的供給量、及來自第2氣體供給源72之第2氣體的供給量,事先藉實驗預先決定,使得熱處理時之第1空間11a內的環境氣體成為期望之組成(例如氫氣濃度為數%之氮氣環境氣體)。又,第1空間11a的環境氣體藉排氣風扇89被排出。因此,藉來自第1氣體供給源71及第2氣體供給源72之氣體的供給、與來自排氣風扇89之氣體的排氣之平衡,可調整第1空間11a內的壓力。在本實施形態中,使第1壓力、第2壓力、第1流量、第2流量、排氣閥87的開度及排氣風扇89的排氣量等,事先藉實驗預先決定,使得熱處理時之第1空間11a內的環境氣體被保持在期望之壓力(例 如數百PaG左右之加壓環境氣體)。而且,例如配置壓力計到第1空間11a及第2空間30a,輸入壓力計檢出之數值到電腦,電腦係控制第1壓力、第2壓力、第1流量、第2流量、排氣閥87的開度及排氣風扇89的排氣量,使得壓力接近期望之壓力。 In this way, the first gas and the second gas system are supplied to the first space 11a via the first space supply port 18, and the second gas system is supplied to the first space 11a via the second space supply port 33. The mixed gas becomes an ambient gas in the first space 11a. In the present embodiment, the supply amount of the first gas from the first gas supply source 71 and the supply amount of the second gas from the second gas supply source 72 are determined in advance by experiments, so that the first heat treatment is performed. The ambient gas in the space 11a becomes a desired composition (for example, a nitrogen atmosphere gas having a hydrogen concentration of several %). Further, the ambient gas in the first space 11a is exhausted by the exhaust fan 89. Therefore, the pressure in the first space 11a can be adjusted by the balance between the supply of the gas from the first gas supply source 71 and the second gas supply source 72 and the exhaust gas from the gas from the exhaust fan 89. In the present embodiment, the first pressure, the second pressure, the first flow rate, the second flow rate, the opening degree of the exhaust valve 87, and the exhaust amount of the exhaust fan 89 are determined in advance by experiments, so that heat treatment is performed. The ambient gas in the first space 11a is maintained at a desired pressure (for example) For example, pressurized ambient gas of several hundred PaG). Further, for example, the pressure gauge is placed in the first space 11a and the second space 30a, and the value detected by the pressure gauge is input to the computer, and the computer controls the first pressure, the second pressure, the first flow rate, the second flow rate, and the exhaust valve 87. The opening and the amount of exhaust of the exhaust fan 89 cause the pressure to approach the desired pressure.

而且,也可以在熱處理開始時,當第1空間11a內的環境氣體成為大氣環境氣體等之時,最初開始來自第1氣體供給源71及第2氣體供給源72之氣體的供給與由排氣風扇89所做之排氣,在第1空間11a的環境氣體成為熱處理時期望之環境氣體後,開始搬運被處理物96。 In addition, when the ambient gas in the first space 11a is an atmospheric environment gas or the like, the supply of the gas from the first gas supply source 71 and the second gas supply source 72 and the exhaust gas are first started. The exhaust gas by the fan 89 starts to convey the workpiece 96 after the ambient gas in the first space 11a becomes the desired ambient gas during the heat treatment.

在此,使本實施形態的構成要素及本發明的構成要素之對應關係更加清楚。本實施形態之輥道窯10係相當於本發明之熱處理裝置,爐體11相當於爐體,第1壁部31相當於第1壁部,第2壁部32相當於第2壁部,壁體30相當於壁體,旋轉體60相當於旋轉體,馬達60相當於驅動機構,第1軸承40相當於第1軸承,第2軸承50相當於第2軸承,第2空間供給口33相當於第2空間供給口。又,球體43,53相當於轉動體,驅動側蓋體26相當於第3空間形成構件,驅動側支撐滾輪28相當於支撐機構,第2氣體供給源72相當於氣體供給機構,排氣風扇89相當於排氣機構。而且,在本實施形態中,藉說明輥道窯10的動作,使本發明的熱處理方法的一例可以清楚。 Here, the correspondence between the constituent elements of the present embodiment and the constituent elements of the present invention will be more clearly understood. The roller kiln 10 of the present embodiment corresponds to the heat treatment apparatus of the present invention, and the furnace body 11 corresponds to the furnace body, the first wall portion 31 corresponds to the first wall portion, and the second wall portion 32 corresponds to the second wall portion and the wall. The body 30 corresponds to a wall body, the rotating body 60 corresponds to a rotating body, the motor 60 corresponds to a driving mechanism, the first bearing 40 corresponds to a first bearing, the second bearing 50 corresponds to a second bearing, and the second space supply port 33 corresponds to The second space supply port. Further, the balls 43, 53 correspond to a rotating body, the driving side cover 26 corresponds to a third space forming member, the driving side supporting roller 28 corresponds to a supporting mechanism, and the second gas supply source 72 corresponds to a gas supply mechanism, and the exhaust fan 89 Equivalent to the exhaust mechanism. Further, in the present embodiment, an example of the heat treatment method of the present invention can be clarified by explaining the operation of the roller kiln 10.

上述說明過之本實施形態的輥道窯10具有:爐體11,形成作為處理空間之第1空間11a;以及壁體30,使連通 到第1空間11a之第2空間30a形成在內部,其具有第1壁部31、第2壁部32及自外部可供給氣體到第2空間30a內之第2空間供給口33。又,在第1空間11a內可搬運被處理物96之旋轉體60,係自第1空間11a側往外部空間,依序貫穿第1壁部31、第2空間30a及第2壁部32,一端自第2壁部32突出。而且,與此旋轉體60的一端側相連接之馬達90旋轉驅動旋轉體60,藉此,一邊在第1空間11a內,藉旋轉體60搬運被處理物96,一邊在第1空間11a內進行被處理物96之熱處理。此時,在旋轉體60貫穿第1壁部31之部分,設有第1軸承40,第1軸承40係滾動軸承,可旋轉地支撐旋轉體60,而且,在旋轉體60的貫穿方向上,具有可流通氣體之間隙44a,45a。又,在旋轉體60貫穿第2壁部32之部分設有第2軸承50,第2軸承50係滾動軸承,可旋轉地支撐旋轉體60,而且,密封性比第1軸承40還要高。而且,在熱處理中,使壓力比第1空間11a的環境氣體還要高之氣體,透過第2空間供給口33供給到第2空間30a內。藉此,被供給到第2空間30a之氣體,係自密封性比第2軸承50還要低之第1軸承40的間隙44a,45a,欲往第1空間11a側。因此,使環境氣體自第1空間11a,通過穿孔16、第3空間26a及第1軸承40的間隙44a,45a流出之情形,被自第2空間30a欲往第1空間11a之氣體擠回。因此,可更加抑制環境氣體自爐體11的內部,往外部空間之流出。而且,旋轉體60係貫穿爐體11、驅動側蓋體26及壁體30以突出到外部空間,只要旋轉體60旋轉,即使使用例如套體等,也很難完全密封旋轉體60的周圍間的間隙。在 本實施形態之輥道窯10中,壁體30係阻塞成為來自第1空間11a之環境氣體的流出口之驅動側蓋體26的開口27,同時在旋轉體60的周圍形成有間隙44a,45a。藉此,使氣體積極地經由旋轉體60的貫穿部分,以流入第1空間11a內,其並非密封間隙,而係藉氣體的流動,抑制第1空間11a的環境氣體的流出。而且,在輥道窯10中,熱處理時,在第1空間11a的環境氣體含有氫氣,所以,抑制此環境氣體往外部空間流出之意義重大。 The roller kiln 10 of the present embodiment described above has a furnace body 11 and a first space 11a as a processing space, and a wall body 30 for communication. The second space 30a in the first space 11a is formed inside, and has a first wall portion 31, a second wall portion 32, and a second space supply port 33 through which gas can be supplied from the outside into the second space 30a. In addition, the rotating body 60 of the workpiece 96 is conveyed in the first space 11a, and the first wall portion 31, the second space 30a, and the second wall portion 32 are sequentially inserted from the first space 11a side to the external space. One end protrudes from the second wall portion 32. In addition, the motor 90 connected to the one end side of the rotating body 60 rotates and drives the rotating body 60, and the workpiece 96 is conveyed by the rotating body 60 in the first space 11a, and is carried out in the first space 11a. Heat treatment of the treated object 96. At this time, the first bearing 40 is provided in a portion where the rotating body 60 penetrates the first wall portion 31, and the first bearing 40 is a rolling bearing that rotatably supports the rotating body 60 and has a direction in which the rotating body 60 penetrates. The gaps 44a, 45a of the flowable gas. Moreover, the second bearing 50 is provided in a portion where the rotating body 60 penetrates the second wall portion 32, and the second bearing 50 is a rolling bearing that rotatably supports the rotating body 60, and the sealing property is higher than that of the first bearing 40. In the heat treatment, the gas having a higher pressure than the ambient gas in the first space 11a is supplied to the second space 30a through the second space supply port 33. In this way, the gas supplied to the second space 30a is intended to be closer to the first space 11a than the gaps 44a and 45a of the first bearing 40 which are lower in sealing than the second bearing 50. Therefore, when the ambient gas flows out from the first space 11a through the gaps 44a and 45a of the through hole 16, the third space 26a, and the first bearing 40, the gas from the second space 30a to the first space 11a is pushed back. Therefore, it is possible to further suppress the outflow of the ambient gas from the inside of the furnace body 11 to the external space. Further, the rotating body 60 penetrates the furnace body 11, the driving side cover 26, and the wall body 30 to protrude to the external space, and as long as the rotating body 60 rotates, it is difficult to completely seal the periphery of the rotating body 60 even if, for example, a casing or the like is used. Clearance. in In the roller kiln 10 of the present embodiment, the wall body 30 blocks the opening 27 of the drive side cover 26 which is the outlet of the ambient gas from the first space 11a, and a gap 44a, 45a is formed around the rotary body 60. . Thereby, the gas is actively flowed into the first space 11a via the penetrating portion of the rotating body 60, and the gas is prevented from flowing out of the first space 11a by the flow of the gas. Further, in the roller kiln 10, since the ambient gas in the first space 11a contains hydrogen gas during the heat treatment, it is important to suppress the outflow of the ambient gas into the external space.

又,第2軸承50具有:內輪51;外輪52;複數球體53,被收納在內輪51與外輪52之間;以及遮蔽構件54,55,在複數球體53偏移內輪51的軸向之位置上,被配置於內輪51與外輪52之間。而且,第2軸承50的遮蔽構件54,55,係密封內輪51與外輪52之間。藉此,可使用遮蔽構件54,55密封氣體可流通在第2軸承50中之旋轉體60的貫穿方向上之間隙。因此,可更加抑制第2空間30a的環境氣體(例如自第2空間供給口33被供給之第2氣體),通過第2軸承50的間隙以流出到外部空間。 Further, the second bearing 50 has an inner ring 51, an outer ring 52, a plurality of balls 53 housed between the inner ring 51 and the outer ring 52, and shielding members 54, 55 offset in the axial direction of the inner wheel 51 at the plurality of balls 53 The position is disposed between the inner wheel 51 and the outer wheel 52. Further, the shielding members 54, 55 of the second bearing 50 seal between the inner ring 51 and the outer ring 52. Thereby, the shielding member 54 and 55 can be used to allow the sealing gas to flow through the gap in the penetration direction of the rotating body 60 in the second bearing 50. Therefore, the ambient gas of the second space 30a (for example, the second gas supplied from the second space supply port 33) can be further suppressed, and the gap of the second bearing 50 can flow out to the external space.

而且,第1軸承40具有:內輪41;外輪42;複數球體43,被收納在內輪41與外輪42之間;以及遮蔽構件44,45,在複數球體43偏移內輪41的軸向之位置上,被配置於內輪41與外輪42之間。而且,第1軸承40的遮蔽構件44,45,係在內輪41與外輪42之間形成間隙44a,45a。藉此,可使用遮蔽構件44,45很容易使氣體可流通在第1軸承40中之旋轉體60的貫穿方向上之間隙44a,45a減小。藉此,氣體係 持續自第2空間30a欲往第1空間11a,透過第1軸承40的間隙,可很容易抑制塵埃等微粒子之自第2空間30a往第1空間11a之侵入。 Further, the first bearing 40 has an inner ring 41, an outer ring 42, a plurality of balls 43 housed between the inner wheel 41 and the outer wheel 42, and shielding members 44, 45 offset in the axial direction of the inner wheel 41 at the plurality of balls 43. The position is disposed between the inner wheel 41 and the outer wheel 42. Further, the shielding members 44 and 45 of the first bearing 40 form gaps 44a and 45a between the inner ring 41 and the outer ring 42. Thereby, the gaps 44a, 45a in the penetration direction of the rotating body 60 in which the gas can flow in the first bearing 40 can be easily reduced by using the shielding members 44, 45. Thereby, the gas system Since the second space 30a is intended to pass through the gap of the first bearing 40 in the first space 11a, it is possible to easily suppress the intrusion of fine particles such as dust from the second space 30a into the first space 11a.

而且,輥道窯10係進行包含被處理物96的加熱處理之熱處理。在此,在第1空間11a中,當進行包含加熱處理之熱處理時,旋轉體60在爐體11內被加熱等,藉此,有時第1軸承40被加熱。在這種情形下,自第2空間供給口33供給氣體到第2空間30a,產生自第2空間30a透過第1軸承40的間隙44a,45a,往第1空間11a之流動,藉此,藉此氣流冷卻第1軸承40,可以抑制加熱。 Further, the roller kiln 10 performs heat treatment including heat treatment of the workpiece 96. Here, in the first space 11a, when the heat treatment including the heat treatment is performed, the rotor 60 is heated in the furnace body 11 or the like, whereby the first bearing 40 may be heated. In this case, the gas is supplied from the second space supply port 33 to the second space 30a, and the gaps 44a and 45a that have passed through the first bearing 40 from the second space 30a flow into the first space 11a, thereby borrowing This airflow cools the first bearing 40, and heating can be suppressed.

而且,爐體11具有可排出第1空間11a的環境氣體之排氣口19。而且,在熱處理時,係自排氣口19排出第1空間11a的環境氣體,同時供給氣體到第2空間30a,使得第1空間11a的環境氣體被保持在既定壓力。因此,當透過第2空間供給口33、第2空間30a及第1軸承40的間隙44a,45a,供給氣體到第1空間11a內時,藉自排氣口19排出環境氣體,可調整第1空間11a內的環境氣體的壓力到既定壓力。又,爐體11具有可供給氣體到第1空間11a內之第1空間供給口18。而且,在熱處理時,自排氣口19排出第1空間11a的環境氣體,同時供給氣體到第1空間11a及第2空間30a,使得第1空間11a的環境氣體被保持在既定壓力。藉此,以不透過第2空間30a及第1軸承40的間隙44a,45a之路徑,供給氣體到第1空間11a,所以,很容易調整第1空間11a內的環境氣體。 Further, the furnace body 11 has an exhaust port 19 through which the ambient gas of the first space 11a can be discharged. In the heat treatment, the ambient gas in the first space 11a is discharged from the exhaust port 19, and the gas is supplied to the second space 30a, so that the ambient gas in the first space 11a is maintained at a predetermined pressure. Therefore, when the gas is supplied into the first space 11a through the gaps 44a and 45a of the second space supply port 33, the second space 30a, and the first bearing 40, the ambient gas can be discharged from the exhaust port 19, and the first adjustment can be made. The pressure of the ambient gas in the space 11a is to a predetermined pressure. Further, the furnace body 11 has a first space supply port 18 through which gas can be supplied into the first space 11a. In the heat treatment, the ambient gas in the first space 11a is discharged from the exhaust port 19, and the gas is supplied to the first space 11a and the second space 30a, so that the ambient gas in the first space 11a is maintained at a predetermined pressure. Thereby, the gas is supplied to the first space 11a without passing through the gaps 44a and 45a of the second space 30a and the first bearing 40. Therefore, the atmosphere in the first space 11a can be easily adjusted.

又,輥道窯10具有:第1配管74,被連接在第1 空間供給口18;第2配管75,被連接在第2空間供給口33;以及共通配管73,被連接在第1配管74與第2配管75上。而且,在熱處理時,藉供給氣體到共通配管73,使壓力比第1空間11a的環境氣體還要高壓之氣體,透過共通配管73及第2配管75,供給到第2空間30a內,使氣體透過共通配管73及第1配管74,供給到第1空間11a內。藉此,使透過第1空間供給口18之往第1空間11a之氣體的供給,與透過第2空間供給口33之往第2空間30a之氣體的供給,藉供給氣體到共通配管74,可一齊進行。又,在熱處理時,自共通配管以外的路徑,藉第1氣體供給源71供給第1氣體到第1配管74。因此,藉供給氣體到共通配管73,持續供給氣體到第1空間11a及第2空間30a,來自其他路徑之氣體也流通在第1配管74(與來自共通配管73之氣體混合),藉此,可使透過第1空間供給口18供給之氣體,與透過第2空間供給口33供給之氣體之組成不同。 Further, the roller kiln 10 has the first pipe 74 and is connected to the first pipe The space supply port 18; the second pipe 75 is connected to the second space supply port 33; and the common pipe 73 is connected to the first pipe 74 and the second pipe 75. In the heat treatment, the gas is supplied to the common pipe 73, and the gas having a higher pressure than the ambient gas of the first space 11a is supplied to the second space 30a through the common pipe 73 and the second pipe 75. The common pipe 73 and the first pipe 74 are supplied into the first space 11a. By this, the supply of the gas that has passed through the first space supply port 18 to the first space 11a and the supply of the gas that has passed through the second space supply port 33 to the second space 30a are supplied to the common pipe 74. Go together. In the heat treatment, the first gas is supplied from the first gas supply source 71 to the first pipe 74 from a path other than the common pipe. Therefore, by supplying the gas to the common pipe 73, the gas is continuously supplied to the first space 11a and the second space 30a, and the gas from the other path also flows through the first pipe 74 (mixed with the gas from the common pipe 73). The gas supplied through the first space supply port 18 can be made different from the composition of the gas supplied through the second space supply port 33.

又,輥道窯10具有:第1流量調整閥84,被連接在第1配管74,調整第1配管74的流量;以及第2流量調整閥85,被連接在第2配管75,調整第2配管75的流量。而且,在熱處理時,藉供給氣體到共通配管73,使透過共通配管73及第1配管74,以第1流量調整閥84調整流量之氣體供給到第1空間11a,同時使透過共通配管73及第2配管75,以第2流量調整閥85調整流量之氣體供給到第2空間30a。如此一來,可調整流入第1空間11a及第2空間30a之氣體的流量。 In addition, the first flow rate adjustment valve 84 is connected to the first pipe 74 to adjust the flow rate of the first pipe 74, and the second flow rate adjustment valve 85 is connected to the second pipe 75, and the second pipe is adjusted. The flow rate of the piping 75. In the heat treatment, the gas is supplied to the common pipe 73, and the gas that has passed through the common pipe 73 and the first pipe 74 is adjusted by the first flow rate adjusting valve 84, and the gas is supplied to the first space 11a, and the common pipe 73 is passed through. In the second pipe 75, the gas whose flow rate is adjusted by the second flow rate adjusting valve 85 is supplied to the second space 30a. In this way, the flow rate of the gas flowing into the first space 11a and the second space 30a can be adjusted.

又,輥道窯10具有:第1減壓閥82,被設於共通 配管73,而且,被設於比第1流量調整閥84還要上游側;以及第2減壓閥83,在第2配管75之中,被設於比第2流量調整閥85還要上游側;第1減壓閥82係使下游側的氣體的壓力,減壓至比第1空間11a的環境氣體還要高壓之第1壓力,第2減壓閥83係使下游側的氣體的壓力,減壓至比第1空間11a的環境氣體還要高壓之第2壓力。而且,在熱處理時,使壓力超過第1壓力及第2壓力之氣體供給到共通配管73。藉此,使壓力比減壓後之壓力(第1壓力及第2壓力)還要高之氣體,自共通配管供給,所以,即使使比第1減壓閥還要上游側或比第2減壓閥還要上游側的配管較細,也可確保必要之氣體流量。藉可使配管較細,可例如減少輥道窯10的設置面積等,使構成小型化,或者,可降低製造成本。 Further, the roller kiln 10 has a first pressure reducing valve 82 and is provided in common The piping 73 is provided on the upstream side of the first flow rate adjustment valve 84, and the second pressure reducing valve 83 is provided on the upstream side of the second flow rate adjustment valve 85 in the second piping 75. The first pressure reducing valve 82 reduces the pressure of the gas on the downstream side to a first pressure higher than the ambient gas of the first space 11a, and the second pressure reducing valve 83 sets the pressure of the gas on the downstream side. The pressure is reduced to a second pressure higher than the ambient gas of the first space 11a. Further, at the time of heat treatment, the gas having a pressure exceeding the first pressure and the second pressure is supplied to the common pipe 73. In this way, the gas whose pressure is higher than the pressure (the first pressure and the second pressure) after the pressure reduction is supplied from the common pipe, so that the upstream side or the second side is made smaller than the first pressure reducing valve. The pressure valve also has a thinner piping on the upstream side to ensure the necessary gas flow. By making the piping thinner, for example, the installation area of the roller kiln 10 can be reduced, and the configuration can be miniaturized, or the manufacturing cost can be reduced.

又,輥道窯10具有驅動側蓋體26,驅動側蓋體26係在第1空間11a與第2空間30a之間,形成連通第1空間11a與第2空間30a之第3空間26a,被旋轉體60貫穿。藉此,在第1空間11a與第2空間30a之間存在有第3空間26a,藉此,可更加抑制例如藉來自爐體11之熱傳導,壁體30的第1軸承40及第2軸承50的溫度產生變化等之自爐體11對壁體30之影響。 Further, the roller kiln 10 has a driving side cover 26, and the driving side cover 26 is interposed between the first space 11a and the second space 30a, and forms a third space 26a that communicates the first space 11a and the second space 30a. The rotating body 60 penetrates. Thereby, the third space 26a exists between the first space 11a and the second space 30a, whereby the first bearing 40 and the second bearing 50 of the wall body 30 can be more suppressed, for example, by heat conduction from the furnace body 11. The temperature changes, etc., from the influence of the furnace body 11 on the wall body 30.

又,旋轉體60具有:搬運滾輪61,可在第1空間11a內,搬運被處理物96;驅動軸65,被馬達90旋轉驅動,貫穿壁體30;保持器64,插入有驅動軸65之搬運滾輪61側的端部,與該端部連接,呈中空管狀;滾輪蓋體62,被固定到搬運滾輪61之驅動軸65側;以及連結軸63,被插入到保持器 64與滾輪蓋體62,以被連接到保持器64與滾輪蓋體62。而且,保持器64、滾輪蓋體62及連結軸63,係被配置於第3空間26a內,在滾輪蓋體62的內周面與連結軸63之間有間隙,連結軸63係藉間隙而可偏心地被連接到滾輪蓋體62上。連結軸63係藉間隙而可偏心地被連接到滾輪蓋體62上,藉此,即使搬運滾輪61與驅動軸65產生偏心(軸向偏移),透過驅動軸65,可傳遞來自馬達90之旋轉驅動力到搬運滾輪61。而且,當滾輪蓋體62與連結軸63不可能產生偏心時,當搬運滾輪61與驅動軸65產生偏心時,在旋轉體60之任何部分皆被施加過度之力量,有時旋轉體60會破損。連結軸63被可偏心地連接到滾輪蓋體62上,藉此,可更加抑制這種旋轉體60之破損。而且,輥道窯10係熱處理被處理物96者,藉第1空間11a內與外部空間之溫差,在搬運滾輪61與驅動軸65很容易產生偏心,所以,適用本發明之意義重大。 Further, the rotating body 60 has a conveyance roller 61 that can convey the workpiece 96 in the first space 11a, a drive shaft 65 that is rotationally driven by the motor 90, penetrates the wall body 30, and a holder 64 into which the drive shaft 65 is inserted. An end portion on the side of the conveyance roller 61 is connected to the end portion and has a hollow tubular shape; a roller cover 62 is fixed to the drive shaft 65 side of the conveyance roller 61; and a coupling shaft 63 is inserted into the holder 64 is coupled to the roller cover 62 to be coupled to the retainer 64 and the roller cover 62. Further, the retainer 64, the roller cover 62, and the connecting shaft 63 are disposed in the third space 26a, and a gap is formed between the inner peripheral surface of the roller cover 62 and the connecting shaft 63, and the connecting shaft 63 is separated by a gap. It can be eccentrically connected to the roller cover 62. The connecting shaft 63 is eccentrically connected to the roller cover 62 by a gap, whereby even if the conveying roller 61 and the driving shaft 65 are eccentric (axially offset), the driving shaft 65 can be transmitted from the motor 90. The driving force is rotated to the carrying roller 61. Moreover, when the roller cover 62 and the connecting shaft 63 are unlikely to be eccentric, when the carrying roller 61 and the driving shaft 65 are eccentric, excessive force is applied to any portion of the rotating body 60, and sometimes the rotating body 60 may be damaged. . The connecting shaft 63 is eccentrically coupled to the roller cover 62, whereby the breakage of the rotating body 60 can be further suppressed. Further, in the roller kiln 10, since the workpiece 96 is heat-treated, the temperature difference between the inside of the first space 11a and the external space is likely to cause eccentricity in the conveyance roller 61 and the drive shaft 65. Therefore, the present invention is significant.

又,輥道窯10係具有使壓力比第1空間11a的環境氣體還要高壓之氣體,供給到第2空間30a內之氣體供給裝置70,所以,可產生自第2空間30a,通過第1軸承40的間隙44a,45a而流向第1空間11a之氣體流動。 Further, the roller kiln 10 is provided with a gas having a higher pressure than the ambient gas of the first space 11a, and is supplied to the gas supply device 70 in the second space 30a. Therefore, the second space 30a can be generated by the first space 30a. The gas flowing into the first space 11a flows through the gaps 44a, 45a of the bearing 40.

而且,本發明並不侷限於上述實施形態,當然只要屬於本發明之技術性範圍,可藉種種態樣實施。 Further, the present invention is not limited to the above-described embodiments, and of course, it can be implemented in various aspects as long as it falls within the technical scope of the present invention.

例如在本實施形態中,雖然第2軸承50的遮蔽構件54,55係密封內輪51與外輪52之間者,但是,本發明並不侷限於此,只要第2軸承50的密封性高於第1軸承40即可。也可以例如第2軸承50的遮蔽構件54,55係與第1軸承40 的遮蔽構件44,45同樣地,其係在與內輪51之間形成間隙者。在此情形下,只要第2軸承50的間隙小於第1軸承40的間隙44a,45a等,第2軸承50的密封性高於第1軸承40(與第2軸承50相比較下,氣體較容易通過第1軸承40)即可。或者,第1軸承40可以不具備遮蔽構件44,45之至少一者,或者,第2軸承50可以不具備遮蔽構件54,55之至少一者。第1軸承40及第2軸承50也可以皆不具備遮蔽構件。在此情形下,也可以使第2軸承50的密封性高於第1軸承40,使得第1軸承40中之內輪41的外徑與外輪42的內徑之差,係大於第2軸承50中之內輪51的外徑與外輪52的內徑之差。或者,也可以調整球體43或球體53之數量或球徑,使第2軸承50的密封性高於第1軸承40。又,也可以第1軸承40的遮蔽構件44,45係與遮蔽構件54,55同樣地,不形成與內輪51的外周面之間隙者,而在遮蔽構件44,45另外形成孔,藉此,形成成為氣體流路之間隙。而且,當第2軸承50的遮蔽構件54,55在內輪51與外輪52之間形成間隙時等,在第2軸承50的內輪51與外輪52之間具有間隙時,有時自第2空間供給口33被供給到第2空間30a之氣體會流出到外部空間。但是,在本實施形態中,被供給到第2空間30a之第2氣體係氮氣,所以,即使流出到外部空間也無問題。而且,自第2空間供給口33供給到第2空間30a之氣體,係並不侷限於氮氣,最好係即使惰性氣體等流出也不構成問題之氣體。 For example, in the present embodiment, the shielding members 54 and 55 of the second bearing 50 seal between the inner ring 51 and the outer ring 52. However, the present invention is not limited thereto, as long as the sealing property of the second bearing 50 is higher than that. The first bearing 40 can be used. For example, the shielding members 54 and 55 of the second bearing 50 and the first bearing 40 may be used. Similarly, the shielding members 44, 45 are formed to form a gap with the inner ring 51. In this case, as long as the gap of the second bearing 50 is smaller than the gaps 44a, 45a of the first bearing 40, etc., the sealing property of the second bearing 50 is higher than that of the first bearing 40 (compared with the second bearing 50, the gas is easier It is sufficient to pass the first bearing 40). Alternatively, the first bearing 40 may not include at least one of the shielding members 44 and 45, or the second bearing 50 may not include at least one of the shielding members 54 and 55. Neither the first bearing 40 nor the second bearing 50 may have a shielding member. In this case, the sealing property of the second bearing 50 may be higher than that of the first bearing 40, so that the difference between the outer diameter of the inner ring 41 and the inner diameter of the outer ring 42 in the first bearing 40 is larger than that of the second bearing 50. The difference between the outer diameter of the inner wheel 51 and the inner diameter of the outer wheel 52. Alternatively, the number of the balls 43 or the balls 53 or the spherical diameter may be adjusted so that the sealing property of the second bearing 50 is higher than that of the first bearing 40. Further, similarly to the shielding members 54 and 55, the shielding members 44 and 45 of the first bearing 40 may form a hole in the shielding members 44 and 45 instead of forming a gap with the outer circumferential surface of the inner ring 51. Form a gap that becomes a gas flow path. When the shielding members 54 and 55 of the second bearing 50 form a gap between the inner ring 51 and the outer ring 52, the gap between the inner ring 51 and the outer ring 52 of the second bearing 50 may be from the second. The gas supplied to the second space 30a by the space supply port 33 flows out to the external space. However, in the present embodiment, since the nitrogen gas is supplied to the second gas system in the second space 30a, there is no problem even if it flows out into the external space. In addition, the gas supplied to the second space 30a from the second space supply port 33 is not limited to nitrogen gas, and it is preferable that the gas does not cause a problem even if an inert gas flows out.

在上述實施形態中,被配置於第1空間11a內之旋轉體60的支數,係與驅動側蓋體26或壁體30的數量相同, 但是,本發明並不侷限於此,也可以以複數旋轉體60共用驅動側蓋體26或壁體30。但是,藉使一個旋轉體60貫穿一個壁體30之構成,可使第2空間30a的容積盡量小,而可使供給到第2空間供給口33之氣體的流量減少。 In the above embodiment, the number of the rotating bodies 60 disposed in the first space 11a is the same as the number of the driving side cover 26 or the wall 30. However, the present invention is not limited thereto, and the drive side cover 26 or the wall body 30 may be shared by the plurality of rotating bodies 60. However, by the configuration in which one rotating body 60 is inserted through one wall 30, the volume of the second space 30a can be made as small as possible, and the flow rate of the gas supplied to the second space supply port 33 can be reduced.

在上述實施形態中,雖然係使旋轉體60一直線貫穿爐體11、驅動側蓋體26及壁體30者,但是,本發明並不侷限於此。當驅動軸65具有:第1構件,具有第3圖的左右方向的軸,貫穿第1壁部31;以及第2構件,具有第3圖的上下方向的軸,透過第1構件及傘齒輪,在第2空間30a內被連接,同時在下方向貫穿壁體30;旋轉體60的軸也可以非一直線。在此情形下,只要在第2構件在下方向貫穿壁體30之部分,配置第2軸承50即可。即使係這種構成,與上述實施形態同樣地,也可以抑制第1空間11a的環境氣體,沿著旋轉體60的軸向往外部空間流出。 In the above embodiment, the rotating body 60 is passed through the furnace body 11, the driving side cover 26, and the wall 30 in a straight line. However, the present invention is not limited thereto. The drive shaft 65 has a first member, has a shaft in the left-right direction of FIG. 3, penetrates the first wall portion 31, and has a second member having a shaft in the vertical direction of FIG. 3, and transmits the first member and the bevel gear. The second space 30a is connected and penetrates the wall body 30 in the downward direction; the axis of the rotating body 60 may be non-linear. In this case, the second bearing 50 may be disposed as long as the second member penetrates the wall body 30 in the downward direction. Even in such a configuration, as in the above-described embodiment, the ambient gas in the first space 11a can be suppressed from flowing out to the external space along the axial direction of the rotating body 60.

在上述實施形態中,雖然係在第1空間11a與第2空間30a之間形成有第3空間26a者,但是,只要第1空間11a與第2空間30a連通即可。也可以例如輥道窯10不具有驅動側蓋體26,未形成有第3空間26a。在此情形下,也可以藉壁體30的第1壁部31與爐體11彼此接觸等,第1空間11a及第2空間30a透過穿孔16及間隙44a,45a連通。在此情形下,滾輪蓋體62、連結軸63及保持器64等,也可以配置在第2空間30a內。 In the above-described embodiment, the third space 26a is formed between the first space 11a and the second space 30a. However, the first space 11a and the second space 30a may be connected to each other. For example, the roller kiln 10 may not have the drive side cover 26, and the third space 26a may not be formed. In this case, the first space 11a and the second space 30a may communicate with each other through the perforations 16 and the gaps 44a and 45a by the first wall portion 31 of the wall body 30 and the furnace body 11 being in contact with each other. In this case, the roller cover 62, the connecting shaft 63, the retainer 64, and the like may be disposed in the second space 30a.

在上述實施形態中,雖然驅動軸65與搬運滾輪61係透過滾輪蓋體62、連結軸63及保持器64連接,但是,也可 以省略這些構成的一個以上。又,滾輪蓋體62、連結軸63、保持器64及驅動軸65間之連接,並不侷限於使用插入銷67a~67c。 In the above embodiment, the drive shaft 65 and the transport roller 61 are connected to the roller cover 62, the connecting shaft 63, and the retainer 64. One or more of these configurations are omitted. Further, the connection between the roller cover 62, the connecting shaft 63, the retainer 64, and the drive shaft 65 is not limited to the use of the insertion pins 67a to 67c.

在上述實施形態中,雖然第1軸承40及第2軸承50係滾珠軸承,但是,其只要係具有內輪、外輪及被收納於內輪與外輪間之複數轉動體之滾動軸承即可。例如第1軸承40及第2軸承50之至少一者之構成,也可以轉動體不採用球體43,53而採用圓柱狀的構件。 In the above-described embodiment, the first bearing 40 and the second bearing 50 are ball bearings. However, the first bearing 40 and the second bearing 50 may be provided with an inner ring, an outer ring, and a rolling bearing that is housed in a plurality of rotating bodies between the inner ring and the outer ring. For example, at least one of the first bearing 40 and the second bearing 50 may be a cylindrical member instead of the spherical bodies 43 and 53.

在上述實施形態中,雖然藉加熱器20加熱處理被處理物96,但是,其只要係進行熱處理者即可。其也可以係例如進行冷卻處理者,或者,以既定順序進行加熱處理及冷卻處理者。 In the above embodiment, the workpiece 96 is heat-treated by the heater 20, but it may be any heat treatment. For example, the person who performs the cooling process or the heat treatment and the cooling process in a predetermined order may be used.

在上述實施形態中,雖然設置第1減壓閥82在共通配管73,但是,其也可以設在第1配管74。也可以例如設置第1減壓閥82在連接部76b與第1流量調整閥84之間等,設置第1減壓閥82在比第1流量調整閥84還要上游之第1配管74。又,也可以不具有第1減壓閥82及第2減壓閥83之任一者或兩個。 In the above embodiment, the first pressure reducing valve 82 is provided in the common pipe 73. However, the first pressure reducing valve 82 may be provided in the first pipe 74. For example, the first pressure reducing valve 82 may be provided between the connecting portion 76b and the first flow rate adjusting valve 84, and the first pressure reducing valve 82 may be provided in the first pipe 74 upstream of the first flow rate adjusting valve 84. Further, either or both of the first pressure reducing valve 82 and the second pressure reducing valve 83 may not be provided.

在上述實施形態中,雖然氣體供給裝置70具有第1流量調整閥84及第2流量調整閥85,但是,也可以不具有第1流量調整閥84及第2流量調整閥85之任一者或兩個。 In the above embodiment, the gas supply device 70 includes the first flow rate adjustment valve 84 and the second flow rate adjustment valve 85. However, the first flow rate adjustment valve 84 and the second flow rate adjustment valve 85 may not be provided. Two.

在上述實施形態中,雖然第1配管74及第2配管75被連接在共通配管73,但是,本發明並不侷限於此。也可以係其不具有共通配管73,第1氣體供給源71透過第1配管 74及第1空間供給口18,供給第1氣體到第1空間11a,第2氣體供給源72透過第2配管75及第2空間供給口33,供給第2氣體到第2空間30a。在此情形下,也可以例如使第1氣體為氮氣與氫氣之混合氣體,使第2氣體為氮氣。或者,也可以係其不具有第1空間供給口18,氣體供給裝置70自第2配管75透過第2空間供給口33,供給氣體到第2空間30a,透過第2空間30a供給氣體到第1空間11a。 In the above embodiment, the first pipe 74 and the second pipe 75 are connected to the common pipe 73. However, the present invention is not limited thereto. It is also possible that the common pipe 73 is not provided, and the first gas supply source 71 is transmitted through the first pipe. 74 and the first space supply port 18 supply the first gas to the first space 11a, and the second gas supply source 72 passes through the second pipe 75 and the second space supply port 33, and supplies the second gas to the second space 30a. In this case, for example, the first gas may be a mixed gas of nitrogen and hydrogen, and the second gas may be nitrogen. Alternatively, the first space supply port 18 may not be provided, and the gas supply device 70 may pass the second space supply port 33 from the second pipe 75, supply the gas to the second space 30a, and supply the gas to the first space 30a to the first space. Space 11a.

在上述實施形態中,雖然排氣裝置86的排氣風扇89透過排氣口19排出第1空間11a的環境氣體,但是,本發明並不侷限於此。也可以例如不具有排氣風扇89,不吸引第1空間11a的環境氣體。或者,也可以係不具有排氣口19。 In the above embodiment, the exhaust fan 89 of the exhaust device 86 discharges the ambient gas of the first space 11a through the exhaust port 19, but the present invention is not limited thereto. For example, the exhaust gas fan 89 may not be provided, and the ambient gas of the first space 11a may not be attracted. Alternatively, it is also possible to have no exhaust port 19.

在上述實施形態中,雖然熱處理時之第1空間11a的環境氣體係包含氮氣與氫氣之還原性環境氣體,但是,本發明並不侷限於此,其可以係任何氣體。只要對應進行熱處理之被處理物,適當決定熱處理時之環境氣體的組成、溫度及壓力等即可。 In the above embodiment, the ambient gas system of the first space 11a during the heat treatment contains a reducing atmosphere gas of nitrogen gas and hydrogen gas. However, the present invention is not limited thereto, and it may be any gas. The composition, temperature, pressure, and the like of the environmental gas at the time of heat treatment may be appropriately determined in accordance with the object to be processed which is subjected to the heat treatment.

在上述實施形態中,壁體30雖然係組合包含第1壁部31及第2壁部32之複數板狀構件之構造體,但是,本發明並不侷限於此。只要第1壁部31及第2壁部32係壁體30的一部分即可,其也可以非獨立構件。也可以例如壁體30係一體形成之構造體。 In the above-described embodiment, the wall body 30 is a structure in which a plurality of plate-like members including the first wall portion 31 and the second wall portion 32 are combined. However, the present invention is not limited thereto. The first wall portion 31 and the second wall portion 32 may be a part of the wall body 30, and they may be non-independent members. For example, a structure in which the wall body 30 is integrally formed may be used.

在上述實施形態中,雖然在旋轉體60貫穿第2壁部32之部分,設有密封性高於第1軸承40之第2軸承50,但是,本發明並不侷限於此。在旋轉體60貫穿第2壁部32之部 分,並不侷限於第2軸承50,只要設置密封性高於第1軸承40之密封構件即可。第4圖係此情形之變形例的輥道窯中之壁體30周邊之放大剖面圖。而且,在第4圖中,針對與上述輥道窯10相同之構成要素係賦予相同編號,省略詳細的說明。在第4圖中,壁體30的第2壁部132係被驅動軸65貫穿,在此貫穿部分安裝有一端側軸承150及軸封156。一端側軸承150係可旋轉地支撐旋轉體60(驅動軸65)之滾珠軸承,比第1軸承40及軸封156還要靠驅動軸65的一端側(第4圖的左側)配置。此一端側軸承150除了不具有遮蔽構件54,55之點外,其與上述第2軸承50之構成相同。軸封156係環狀的構件,驅動軸65貫穿中心。軸封156係油封,其係密封性比第1軸承40還要高之密封構件。此軸封156具有本體部157、金屬環158及彈簧159。本體部157係由橡膠等彈性體構成之環狀構件,外周面及第2空間30a側(第4圖的右側)的表面,係接觸到第2壁部132以被固定。在本體部157於本身的內周面側,形成有密封脣緣157a及防塵脣緣157b。密封脣緣157a當以驅動軸65的軸向剖面觀看時,愈往驅動軸65則尖端變細,以其尖端與驅動軸65相接觸。防塵脣緣157b係往驅動軸65突出,尖端係與驅動軸65的外周面接觸。防塵脣緣157b係完成防止塵埃等自外部空間侵入之任務。金屬環158係被配置使得包圍驅動軸65的周圍之環狀構件,壓抵本體部157到第2壁部132。因此,在本體部157與第2壁部132之間無間隙,軸封156與第2壁部132之間被密封。彈簧159係被設置使得包圍密封脣緣157a的周圍之環狀彈性體。藉彈簧159的彈力,密封脣緣 157a的尖端係壓抵在驅動軸65的外周面。因此,在驅動軸65與本體部157之間無間隙,驅動軸65與軸封156之間被密封。在如此構成之變形例的輥道窯中,於旋轉體60貫穿第2壁部132之部分,設有密封性高於第1軸承40之軸封156。因此,與上述實施形態相同地,被供給到第2空間30a之氣體係變得欲往第1空間11a側,自第1空間11a通過第1軸承40的間隙44a,45a以流出之環境氣體可被擠回。而且,在第4圖所示之變形例的輥道窯中,一端側軸承150擔負支撐驅動軸65之任務,軸封156擔負發揮比第1軸承40高之密封性。相對於此,上述實施形態之第2軸承50係兼具一端側軸承150之任務與軸封156之任務。而且,在第4圖所示之變形例的輥道窯中,在軸封156與第2壁部132之間,或軸封156與驅動軸65之間,無間隙地被密封,但是,只要軸封156的密封性高於第1軸承40,也可以形成有間隙。又,雖然軸封156係油封,但是,只要其密封性高於第1軸承40,也可以使用任何軸封。又,如第4圖所示,一端側軸承150係被配置成比軸封156還要靠近驅動軸65的一端側(第4圖的左側),但是,也可以使一端側軸承150被配置成比軸封156還要靠近驅動軸65的另端側(第4圖的右側)。也可以例如對調第4圖中之一端側軸承150與軸封156之配置。又,在第4圖中,雖然一端側軸承150不具有遮蔽構件54,55,一端側軸承150的密封性低於第1軸承40,但是,其密封性也可以高於第1軸承40。又,第4圖的一端側軸承150雖然係滾珠軸承,但是,本發明並不侷限於此,其只要其係具有內輪、外輪及被收納於內輪與外輪間之複數轉 動體之滾動軸承即可。 In the above-described embodiment, the second bearing 50 having a higher sealing property than the first bearing 40 is provided in a portion where the rotating body 60 penetrates the second wall portion 32. However, the present invention is not limited thereto. The rotating body 60 penetrates the second wall portion 32 It is not limited to the second bearing 50, and it is only required to provide a sealing member having a higher sealing property than the first bearing 40. Fig. 4 is an enlarged cross-sectional view showing the periphery of the wall body 30 in the roller kiln of a modification of this case. In the fourth embodiment, the same components as those of the above-described roller kiln 10 are denoted by the same reference numerals, and detailed description thereof will be omitted. In Fig. 4, the second wall portion 132 of the wall body 30 is penetrated by the drive shaft 65, and the one end side bearing 150 and the shaft seal 156 are attached to the penetrating portion. The one end side bearing 150 is a ball bearing that rotatably supports the rotating body 60 (drive shaft 65), and is disposed closer to one end side (the left side of FIG. 4) of the drive shaft 65 than the first bearing 40 and the shaft seal 156. The one end side bearing 150 has the same configuration as that of the second bearing 50 except that the shielding members 54 and 55 are not provided. The shaft seal 156 is an annular member, and the drive shaft 65 runs through the center. The shaft seal 156 is an oil seal which is a sealing member which is higher in sealing property than the first bearing 40. The shaft seal 156 has a body portion 157, a metal ring 158, and a spring 159. The main body portion 157 is an annular member made of an elastic body such as rubber, and the outer peripheral surface and the surface on the second space 30a side (the right side in FIG. 4) are in contact with the second wall portion 132 to be fixed. A sealing lip 157a and a dust lip 157b are formed on the inner peripheral surface side of the main body portion 157. When viewed in the axial section of the drive shaft 65, the sealing lip 157a tapers toward the drive shaft 65 and contacts the drive shaft 65 with its tip end. The dust lip 157b protrudes toward the drive shaft 65, and the tip end comes into contact with the outer peripheral surface of the drive shaft 65. The dust-removing lip 157b accomplishes the task of preventing dust or the like from entering the external space. The metal ring 158 is disposed such that an annular member surrounding the drive shaft 65 is pressed against the body portion 157 to the second wall portion 132. Therefore, there is no gap between the main body portion 157 and the second wall portion 132, and the shaft seal 156 and the second wall portion 132 are sealed. The spring 159 is configured to surround the annular elastomer around the sealing lip 157a. With the spring force of the spring 159, the sealing lip The tip end of the 157a is pressed against the outer peripheral surface of the drive shaft 65. Therefore, there is no gap between the drive shaft 65 and the body portion 157, and the drive shaft 65 and the shaft seal 156 are sealed. In the roller kiln according to the modification of the above configuration, the shaft seal 156 having a higher sealing property than the first bearing 40 is provided in a portion where the rotary body 60 penetrates the second wall portion 132. Therefore, in the same manner as in the above-described embodiment, the gas system supplied to the second space 30a is intended to be on the side of the first space 11a, and the ambient gas flowing out from the first space 11a through the gaps 44a and 45a of the first bearing 40 can be used. Being squeezed back. Further, in the roller kiln according to the modification shown in FIG. 4, the one end side bearing 150 is responsible for supporting the drive shaft 65, and the shaft seal 156 is responsible for exhibiting a higher sealing property than the first bearing 40. On the other hand, the second bearing 50 of the above embodiment has the task of both the task of the one end side bearing 150 and the shaft seal 156. Further, in the roller kiln according to the modification shown in Fig. 4, between the shaft seal 156 and the second wall portion 132, or between the shaft seal 156 and the drive shaft 65, there is no gap, but only The seal of the shaft seal 156 is higher than that of the first bearing 40, and a gap may be formed. Further, although the shaft seal 156 is an oil seal, any shaft seal may be used as long as the sealability is higher than that of the first bearing 40. Further, as shown in Fig. 4, the one end side bearing 150 is disposed closer to one end side (the left side in Fig. 4) of the drive shaft 65 than the shaft seal 156, but the one end side bearing 150 may be disposed so that It is closer to the other end side of the drive shaft 65 than the shaft seal 156 (the right side of Fig. 4). It is also possible, for example, to adjust the arrangement of one of the end side bearings 150 and the shaft seal 156 in Fig. 4. Further, in the fourth drawing, although the one end side bearing 150 does not have the shielding members 54, 55, the one end side bearing 150 has lower sealing performance than the first bearing 40, but the sealing property may be higher than that of the first bearing 40. Further, although the one end side bearing 150 of Fig. 4 is a ball bearing, the present invention is not limited thereto, and that it has an inner wheel, an outer wheel, and a plurality of turns accommodated between the inner wheel and the outer wheel. The rolling bearing of the moving body can be used.

在第4圖所示之變形例的輥道窯中,雖然在旋轉體60貫穿第2壁部132之部分設有一端側軸承150,但是,本發明並不侷限於此。也可以例如一端側軸承150在外部空間,支撐旋轉體60。第5圖係此情形之變形例的輥道窯中之壁體30周邊的放大剖面圖。而且,在第5圖中,針對與上述輥道窯10或第4圖的輥道窯相同之構成要素,係賦予相同編號,省略詳細的說明。在第5圖中,壁體30的第2壁部232係被驅動軸65貫穿。在此貫穿部分,安裝有軸封156。又,旋轉體60(驅動軸65)的一端側(第5圖的左側),係在外部空間貫穿支撐部294。在驅動軸65貫穿支撐部294之部分,設有一端側軸承250。一端側軸承250係在外部空間,可旋轉地支撐旋轉體60(驅動軸65)之滾珠軸承,其構成係與第4圖的一端側軸承150相同。又,在壁體30與支撐部294之間,設有凸輪離合器293a,293b。凸輪離合器293a被配置於凸輪離合器293b與壁體30之間。凸輪離合器293a,293b係環狀構件,驅動軸65貫穿中心。凸輪離合器293a,293b雖然圖示省略,但是,其係具有內輪與外輪,傳遞來自外輪之驅動力到內輪,另外,來自內輪之驅動力無法傳遞到外輪(相對於外輪而言,內輪係空轉)之機械式離合器。凸輪離合器293a,293b的內輪,係分別被連接在驅動軸65的外周面。凸輪離合器293a,293b的外輪,係分別同軸被連接到鏈輪266a,266b。在鏈輪266a,266b分別捲繞有滾子鏈條292a,292b。滾子鏈條292a係被配置使得橫跨捲繞鏈輪266a,與被配置於外部空間之未圖示低速馬達的驅動 軸。滾子鏈條292b係被配置使得橫跨捲繞鏈輪266b,與被配置於外部空間之未圖示高速馬達的驅動軸。自低速馬達被輸出之旋轉驅動力,係透過凸輪離合器293a被傳遞到驅動軸65,以使旋轉體60全體以低速旋轉。又,即使藉低速馬達而驅動軸65旋轉,凸輪離合器293b的內輪也空轉,所以,旋轉驅動力不傳遞到高速馬達。同樣地,自高速馬達被輸出之旋轉驅動力,係透過凸輪離合器293b被傳遞到驅動軸65,以使旋轉體60全體以高速旋轉。又,即使藉高速馬達而驅動軸65旋轉,凸輪離合器293a的內輪也空轉,所以,旋轉驅動力不傳遞到低速馬達。如此一來,第5圖的旋轉體60係藉低速馬達及高速馬達,可以不同速度旋轉。因此,由旋轉體60所做之被處理物96的搬運速度變成可以切換。在如此構成之變形例的輥道窯中,在旋轉體60貫穿第2壁部232之部分,設有密封性高於第1軸承40之軸封156。因此,與上述實施形態或第4圖的輥道窯同樣地,被供給到第2空間30a之氣體,變得欲往第1空間11a側,可擠回自第1空間11a通過第1軸承40的間隙44a,45a以流出之環境氣體。而且,雖然第5圖的一端側軸承250係滾珠軸承,但是,本發明並不侷限於此,也可以使用任何軸承。例如也可以使用滾珠軸承以外之滾動軸承。例如也可以如上述被動側支撐滾輪24或驅動側支撐滾輪28所示,其係可旋轉地自下側支撐驅動軸65之滾動軸承。或者,一端側軸承250也可以係滑動軸承。 In the roller kiln according to the modification shown in FIG. 4, the one end side bearing 150 is provided in a portion where the rotating body 60 penetrates the second wall portion 132, but the present invention is not limited thereto. It is also possible to support the rotating body 60 in the outer space, for example, the one end side bearing 150. Fig. 5 is an enlarged cross-sectional view showing the periphery of the wall body 30 in the roller kiln according to a modification of this case. In the fifth embodiment, the same components as those of the above-described roller kiln 10 or the roller kiln of the fourth embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. In Fig. 5, the second wall portion 232 of the wall body 30 is penetrated by the drive shaft 65. In this through portion, a shaft seal 156 is mounted. Further, one end side (the left side of FIG. 5) of the rotating body 60 (the drive shaft 65) penetrates the support portion 294 in the external space. An end-side bearing 250 is provided at a portion of the drive shaft 65 that penetrates the support portion 294. The one end side bearing 250 is a ball bearing that rotatably supports the rotating body 60 (drive shaft 65) in an external space, and has the same configuration as the one end side bearing 150 of Fig. 4 . Further, cam clutches 293a and 293b are provided between the wall body 30 and the support portion 294. The cam clutch 293a is disposed between the cam clutch 293b and the wall body 30. The cam clutches 293a, 293b are annular members, and the drive shaft 65 runs through the center. Although the cam clutches 293a and 293b are omitted from the drawings, they have an inner wheel and an outer wheel, and transmit the driving force from the outer wheel to the inner wheel. Further, the driving force from the inner wheel cannot be transmitted to the outer wheel (relative to the outer wheel, Mechanical clutch for the idling of the wheel. The inner rings of the cam clutches 293a, 293b are respectively connected to the outer peripheral surface of the drive shaft 65. The outer wheels of the cam clutches 293a, 293b are coaxially coupled to the sprockets 266a, 266b, respectively. Roller chains 292a, 292b are wound around the sprockets 266a, 266b, respectively. The roller chain 292a is disposed so as to straddle the winding sprocket 266a and drive a low speed motor (not shown) disposed in the external space. axis. The roller chain 292b is disposed so as to straddle the winding sprocket 266b and a drive shaft of a high speed motor (not shown) disposed in the external space. The rotational driving force outputted from the low speed motor is transmitted to the drive shaft 65 through the cam clutch 293a to rotate the entire rotating body 60 at a low speed. Further, even if the drive shaft 65 is rotated by the low speed motor, the inner wheel of the cam clutch 293b is idling, so that the rotational driving force is not transmitted to the high speed motor. Similarly, the rotational driving force output from the high speed motor is transmitted to the drive shaft 65 through the cam clutch 293b to rotate the entire rotating body 60 at a high speed. Further, even if the drive shaft 65 is rotated by the high speed motor, the inner wheel of the cam clutch 293a is idling, so that the rotational driving force is not transmitted to the low speed motor. In this way, the rotating body 60 of FIG. 5 can be rotated at different speeds by a low speed motor and a high speed motor. Therefore, the conveyance speed of the workpiece 96 by the rotating body 60 becomes switchable. In the roller kiln according to the modification of the above configuration, the shaft seal 156 having a higher sealing property than the first bearing 40 is provided in a portion where the rotating body 60 penetrates the second wall portion 232. Therefore, similarly to the roller kiln of the above-described embodiment or the fourth embodiment, the gas supplied to the second space 30a is intended to be on the side of the first space 11a, and can be pushed back from the first space 11a to the first bearing 40. The gaps 44a, 45a are the ambient gases flowing out. Further, although the one end side bearing 250 of Fig. 5 is a ball bearing, the present invention is not limited thereto, and any bearing may be used. For example, a rolling bearing other than a ball bearing can also be used. For example, as shown in the above-described passive side support roller 24 or drive side support roller 28, it is a rotatably supported rolling bearing of the drive shaft 65 from the lower side. Alternatively, the one end side bearing 250 may be a sliding bearing.

而且,也可以省略在第4圖中之一端側軸承150,也可以省略在第5圖中之一端側軸承250。即使在這種情形 下,只要有第1軸承40與一個以上之軸承(例如被動側支撐滾輪24及驅動側支撐滾輪28等),可以可旋轉地支撐驅動軸65。 Further, one end side bearing 150 in Fig. 4 may be omitted, and one end side bearing 250 in Fig. 5 may be omitted. Even in this situation Next, as long as the first bearing 40 and one or more bearings (for example, the passive side support roller 24 and the drive side support roller 28) are provided, the drive shaft 65 can be rotatably supported.

〔第2實施形態〕 [Second Embodiment]

第6圖係第2實施形態之輥道窯310的縱剖面圖。輥道窯310係在第1實施形態的輥道窯10還具有搬運通路329,429等。因此,針對與輥道窯10相同之構成要素,係賦予相同編號,省略其說明及圖示,在輥道窯310之中,主要說明搬運通路329,429等之不同構成要素。 Fig. 6 is a longitudinal sectional view showing a roller kiln 310 according to a second embodiment. The roller kiln 310 is further provided with conveyance paths 329, 429 and the like in the roller kiln 10 of the first embodiment. Therefore, the same components as those of the roller kiln 10 are denoted by the same reference numerals, and the description and illustration thereof are omitted. In the roller kiln 310, different components such as the conveyance paths 329 and 429 are mainly described.

首先,說明搬運通路329。搬運通路329係成為自外部至爐體11的開口14之被處理物96的搬入通路。在搬運通路329內,複數(在本實施形態中,係十個)搬運滾輪335係沿著搬運通路(第1圖的前後方向),自搬運口52橫跨配置至開口14。搬運滾輪335係藉未圖示之馬達等被旋轉驅動,以搬運托盤95及被處理物96。搬運通路329係自外部往爐體11(自前方往後方),依序並列第3搬運通路350、第1搬運通路330及第2搬運通路340。以下,以此順序做說明。 First, the conveyance path 329 will be described. The conveyance path 329 is a loading path of the workpiece 96 from the outside to the opening 14 of the furnace body 11. In the conveyance path 329, a plurality of (ten in the present embodiment) conveyance rollers 335 are disposed across the conveyance opening 52 to the opening 14 along the conveyance path (the front-rear direction of the first drawing). The conveyance roller 335 is rotationally driven by a motor or the like (not shown) to convey the tray 95 and the workpiece 96. The conveyance path 329 is externally directed to the furnace body 11 (from the front to the rear), and the third conveyance path 350, the first conveyance path 330, and the second conveyance path 340 are sequentially arranged in parallel. The following is explained in this order.

第3搬運通路350係用於自外部搬運托盤95及被處理物96至第1搬運通路330之搬入通路,其構成係管路。此第3搬運通路350係具有可自外部搬入工件之成為搬入口之搬運口352。在第3搬運通路350內部,於上述複數搬運滾輪335之中,配置有四個。 The third conveyance path 350 is used to carry the conveyance path from the external conveyance tray 95 and the workpiece 96 to the first conveyance path 330, and constitutes a piping. The third conveyance path 350 has a conveyance port 352 that is a carry-in port that can be carried into the workpiece from the outside. Inside the third conveyance path 350, four of the plurality of conveyance rollers 335 are disposed.

第1搬運通路330係用於自第3搬運通路350搬運托盤95及被處理物96至第2搬運通路340之搬入通路,其構成係管路。此第1搬運通路330內部,於上述複數搬運滾輪 335之中,配置有三個。 The first conveyance path 330 is a conveyance path for conveying the pallet 95 and the workpiece 96 to the second conveyance path 340 from the third conveyance path 350, and is configured as a piping. Inside the first conveyance path 330, the plurality of conveyance rollers Among the 335, there are three configurations.

在此第1搬運通路330的鉛直上側,設有上方空間形成部360。此上方空間形成部360具有下方向開口之箱狀外壁362,此外壁362的內部的空間,形成有在鉛直下側開口,連通到第1搬運通路330內之上方空間363。外壁362在下方向的開口以外,成氣密構造,使得不透過第1搬運通路330,氣流幾乎不與外部流通。而且,外壁362係前方(第1圖的左方)的壁部及後方(第1圖的右方)的壁部,相對於爐體11而言,上部往遠離方向傾斜。藉此,上方空間363係成為相對於爐體11而言,上部往遠離方向傾斜之形狀。又,上方空間形成部360係在外壁362的內部,具有相對於爐體11而言,往遠離方向傾斜之隔間構件364a,364b。此隔間構件364a,364b係自前方往後方依序配置之平板狀的構件,雖然省略圖示,但是,左右方向的兩端係藉例如熔接等,被安裝在外壁362的左右的壁部。隔間構件364a,364b、外壁362的前方的壁部及後方的壁部,皆自前方往上方僅傾斜相同的角度θ1。傾斜的角度θ1只要係0°<θ1<90°即可。尤其,雖然未特別侷限,但是,也可以例如角度θ1係30°~60°。在本實施形態中,係使角度θ1為45°。藉此隔間構件364a,364b,上方空間363的一部份被隔間成隔間空間365a~365c。隔間空間365a係被外壁362的前方的壁部與隔間構件364a隔間之空間。隔間空間365b係被隔間構件364a與隔間構件364b隔間之空間。隔間空間365c係被隔間構件364b與外壁362的後方的壁部隔間之空間。這些隔間空間365a~365c皆係下方開口到第1搬運通路330內。又, 隔間構件364a,364b皆係不連接外壁362的天花板。因此,隔間空間365a~365c係在上方空間363之中,於上方(外壁362的天花板附近)彼此連通。而且,在外壁362的上部,形成有與吸引裝置367連接,用於吸引上方空間363之吸引口366。吸引裝置367係透過吸引口366,吸引上方空間363內的氣體以排出之。 An upper space forming portion 360 is provided on the vertical upper side of the first conveyance path 330. The upper space forming portion 360 has a box-shaped outer wall 362 that is opened in the downward direction, and the space inside the wall 362 is formed with an opening in the vertical lower side and communicates with the upper space 363 in the first conveyance path 330. The outer wall 362 has an airtight structure other than the opening in the lower direction, so that the airflow is hardly transmitted to the outside without passing through the first conveyance path 330. Further, the outer wall 362 is a wall portion on the front side (to the left in the first drawing) and a wall portion on the rear side (the right side in the first drawing), and the upper portion is inclined in the direction away from the furnace body 11. Thereby, the upper space 363 is a shape inclined with respect to the furnace body 11 in the direction away from the direction. Further, the upper space forming portion 360 is formed inside the outer wall 362, and has partition members 364a and 364b that are inclined toward the away direction with respect to the furnace body 11. The partition members 364a and 364b are flat members that are arranged in order from the front to the rear. Although not shown, both ends in the left-right direction are attached to the left and right wall portions of the outer wall 362 by, for example, welding. The partition members 364a, 364b, the wall portion on the front side of the outer wall 362, and the wall portion on the rear side are all inclined at the same angle θ1 from the front to the upper side. The angle θ1 of the inclination may be 0° < θ1 < 90°. In particular, although not particularly limited, for example, the angle θ1 may be 30° to 60°. In the present embodiment, the angle θ1 is 45°. Thereby, a part of the upper space 363 is partitioned into compartment spaces 365a to 365c by the partition members 364a, 364b. The compartment space 365a is a space in which the wall portion in front of the outer wall 362 and the compartment member 364a are separated. The compartment space 365b is a space that is partitioned by the compartment member 364a and the compartment member 364b. The compartment space 365c is a space in which the partition member 364b and the wall portion at the rear of the outer wall 362 are separated. These compartment spaces 365a to 365c are opened below the first conveyance path 330. also, The compartment members 364a, 364b are all ceilings that are not connected to the outer wall 362. Therefore, the compartment spaces 365a to 365c are in the upper space 363 and communicate with each other on the upper side (near the ceiling of the outer wall 362). Further, on the upper portion of the outer wall 362, a suction port 366 that is connected to the suction device 367 for attracting the upper space 363 is formed. The suction device 367 passes through the suction port 366 to suck the gas in the upper space 363 to be discharged.

又,在此第1搬運通路330的鉛直上側,設有下方空間形成部370。此下方空間形成部370具有上方向開口之箱狀外壁372,此外壁372的內部的空間,形成有在鉛直上側開口,連通到第1搬運通路330內之下方空間373。外壁372在上方向的開口以外,成氣密構造,使得不透過第1搬運通路330,氣流幾乎不與外部流通。而且,外壁372係前方(第1圖的左方)的壁部及後方(第1圖的右方)的壁部,相對於爐體11而言,下部往接近方向(上部往遠離方向)傾斜。藉此,下方空間373係成為相對於爐體11而言,下部往接近方向傾斜之形狀。又,下方空間形成部370係在外壁372的內部,具有相對於爐體11而言,往接近方向傾斜之隔間構件374a,374b。此隔間構件374a,374b係自後方往前方依序配置之平板狀的構件,雖然省略圖示,但是,左右方向的兩端係藉例如熔接等,被安裝在外壁372的左右的壁部。隔間構件374a,374b、外壁372的前方的壁部及後方的壁部,皆自後方往下方僅傾斜相同的角度θ2。傾斜的角度θ2只要係0°<θ2<90°即可。尤其,雖然未特別侷限,但是,也可以例如角度θ2係30°~60°。也可以使角度θ2的數值與角度θ1相同,在本實施形態中,係使 角度θ2為45°。藉此隔間構件374a,374b,下方空間373的一部份被隔間成隔間空間375a~375c。隔間空間375a係被外壁372的後方的壁部與隔間構件374a隔間之空間。隔間空間375b係被隔間構件374a與隔間構件374b隔間之空間。隔間空間375c係被隔間構件374b與外壁372的前方的壁部隔間之空間。這些隔間空間375a~375c皆係上方開口到第1搬運通路330內。又,隔間構件374a,374b皆係不連接外壁372的底部。因此,隔間空間375a~375c係在下方空間373之中,於下方(外壁372的底部附近)彼此連通。而且,上述第1搬運通路330內的三個搬運滾輪335,係在隔間空間375a~375c的上方的開口部分分別配置一個。又,在外壁372的底部,形成有與吸引裝置377連接,用於吸引下方空間373之吸引口376。吸引裝置377係透過吸引口376,吸引下方空間373內的氣體以排出之。 Further, a lower space forming portion 370 is provided on the vertical upper side of the first conveyance path 330. The lower space forming portion 370 has a box-shaped outer wall 372 that is open in the upper direction, and a space inside the wall 372 is formed to open in a vertical upper side and communicate with the lower space 373 in the first conveyance path 330. The outer wall 372 has an airtight structure other than the opening in the upper direction so as not to pass through the first conveyance path 330, and the airflow hardly flows to the outside. Further, the outer wall 372 is a wall portion on the front side (to the left in the first drawing) and a wall portion on the rear side (the right side in the first drawing), and the lower portion is inclined in the approaching direction (the upper portion is away from the direction) with respect to the furnace body 11. . Thereby, the lower space 373 is a shape in which the lower portion is inclined toward the approaching direction with respect to the furnace body 11. Further, the lower space forming portion 370 is inside the outer wall 372, and has partition members 374a, 374b that are inclined toward the approaching direction with respect to the furnace body 11. The partition members 374a and 374b are flat members that are arranged in order from the rear to the front. Although not shown, both ends in the left-right direction are attached to the left and right wall portions of the outer wall 372 by, for example, welding. . The partition members 374a, 374b, the front wall portion of the outer wall 372, and the rear wall portion are all inclined at the same angle θ2 from the rear to the lower side. The angle θ2 of the inclination may be 0° < θ2 < 90°. In particular, although not particularly limited, for example, the angle θ2 may be 30° to 60°. The value of the angle θ2 may be the same as the angle θ1, and in the present embodiment, The angle θ2 is 45°. Thereby, a part of the lower space 373 is partitioned into compartment spaces 375a to 375c by the partition members 374a, 374b. The compartment space 375a is a space between the wall portion at the rear of the outer wall 372 and the compartment member 374a. The compartment space 375b is a space that is partitioned by the compartment member 374a and the compartment member 374b. The compartment space 375c is a space that is partitioned between the partition member 374b and the wall portion in front of the outer wall 372. Each of the compartment spaces 375a to 375c is opened upward into the first conveyance path 330. Further, the compartment members 374a, 374b are not connected to the bottom of the outer wall 372. Therefore, the compartment spaces 375a to 375c are in the lower space 373 and communicate with each other below (near the bottom of the outer wall 372). Further, the three transport rollers 335 in the first transport path 330 are disposed one above the opening portions above the compartment spaces 375a to 375c. Further, at the bottom of the outer wall 372, a suction port 376 that is connected to the suction device 377 for sucking the lower space 373 is formed. The suction device 377 passes through the suction port 376 to suck the gas in the lower space 373 to be discharged.

第2搬運通路340係用於搬運托盤95被處理物96自第1搬運通路330至爐體11的開口14之搬入通路,其構成係管路。此第2搬運通路340內部,於上述複數搬運滾輪335之中,配置有三個。 The second conveyance path 340 is a conveyance path for transporting the workpiece 95 of the tray 95 from the first conveyance path 330 to the opening 14 of the furnace body 11, and constitutes a piping. Inside the second conveyance path 340, three of the plurality of conveyance rollers 335 are disposed.

而且,第1搬運通路330與第3搬運通路350的構成係連續之管路。在本實施形態中,使連結上方空間形成部360的開口的前端部,與下方空間形成部370的開口的前端部之線段D1,當作第1搬運通路330與第3搬運通路350之邊界。同樣地,第1搬運通路330與第2搬運通路340的構成係連續之管路。在本實施形態中,使連結上方空間形成部360的 開口的後端部,與下方空間形成部370的開口的後端部之線段D2,當作第1搬運通路330與第2搬運通路340之邊界。而且,最好線段D1,D2僅分別傾斜角度θ1及角度θ2。換言之,在如第6圖所示之縱剖面觀看之狀態下,最好外壁362的前方的壁部與外壁372的前方的壁部係位於一直線上,最好外壁362的後方的壁部與外壁372的後方的壁部係位於一直線上。同樣地,最好隔間構件364a與隔間構件374b係位於一直線上,最好隔間構件364b與隔間構件374a係位於一直線上。又,上述複數搬運滾輪335的上端,皆位於與搬運口352的下端概略同高度之位置。而且,在第6圖中,上方空間形成部360及下方空間形成部370因為圖示的便利,複數搬運滾輪335的前後方向的間隔,係第1搬運通路330內與此外部者不同,但是實際上,複數搬運滾輪335係沿著搬運方向,被等間隔配置。 Further, the configuration of the first conveyance path 330 and the third conveyance path 350 is a continuous pipe. In the present embodiment, the line portion D1 connecting the front end portion of the opening of the upper space forming portion 360 and the front end portion of the opening of the lower space forming portion 370 is taken as the boundary between the first conveyance path 330 and the third conveyance path 350. Similarly, the configuration of the first conveyance path 330 and the second conveyance path 340 is a continuous pipe. In the present embodiment, the upper space forming portion 360 is connected. The line portion D2 of the rear end portion of the opening and the rear end portion of the opening of the lower space forming portion 370 serves as a boundary between the first conveyance path 330 and the second conveyance path 340. Further, it is preferable that the line segments D1, D2 are only inclined by the angle θ1 and the angle θ2, respectively. In other words, in the state of viewing in the longitudinal section as shown in Fig. 6, it is preferable that the front wall portion of the outer wall 362 and the front wall portion of the outer wall 372 are in a straight line, preferably the rear wall portion and the outer wall of the outer wall 362. The rear wall of the 372 is located on a straight line. Similarly, it is preferred that the compartment member 364a and the compartment member 374b are in a straight line, and preferably the compartment member 364b and the compartment member 374a are in a straight line. Further, the upper ends of the plurality of transport rollers 335 are located at substantially the same height as the lower end of the transport port 352. In addition, in the sixth embodiment, the space between the upper space forming portion 360 and the lower space forming portion 370 in the front-rear direction of the plurality of transport rollers 335 is different from the outside in the first transport path 330, but actually In the above, the plurality of transport rollers 335 are arranged at equal intervals along the transport direction.

接著,說明搬運通路429。搬運通路429係被處理物96自爐體11的開口15往外部之搬出通路。在搬運通路429的第1搬運通路430的鉛直上側,設有上方空間形成部460。在搬運通路429的第1搬運通路430的鉛直下側,設有下方空間形成部470。在上方空間形成部460的外壁462的上部,連接有吸引裝置467。在下方空間形成部470的外壁472的底部,連接有吸引裝置477。搬運通路429的第3搬運通路450,係具有成為往外部之搬出口之搬運口452。在搬運通路429內,複數(在本實施形態中係十個)搬運滾輪435沿著搬運方向(第1圖的前後方向),自開口15橫貫到搬運口452配置。而且,搬運通路429、上方空間形成部460、下方空間形成部470及吸 引裝置467,477,係分別與搬運通路329、上方空間形成部360、下方空間形成部370及吸引裝置367,377在前後方向上對稱之構造。因此,針對搬運通路429、上方空間形成部460、下方空間形成部470及吸引裝置467,477的構成要素,係賦予在搬運通路329、上方空間形成部360、下方空間形成部370及吸引裝置367,377上加上數值100之編號,其詳細說明則予以省略。而且,線段D3係連結上方空間形成部460的開口的後端部,與下方空間形成部470的開口的後端部之線段,其相當於搬運通路329中之線段D1。線段D4係連結上方空間形成部460的開口的前端部,與下方空間形成部470的開口的前端部之線段,其相當於搬運通路329中之線段D2。角度θ3係隔間構件464a,464b、外壁462的前方的壁部及後方的壁部的傾斜角度,其相當於上方空間形成部360中之角度θ1。角度θ4係隔間構件474a,474b、外壁472的前方的壁部及後方的壁部的傾斜角度,其相當於下方空間形成部370中之角度θ2。在本實施形態中,使角度θ1=角度θ3,角度θ2=角度θ4。 Next, the conveyance path 429 will be described. The conveyance path 429 is a conveyance path from the opening 15 of the furnace body 11 to the outside by the workpiece 96. An upper space forming portion 460 is provided on the vertical upper side of the first conveyance path 430 of the conveyance path 429. A lower space forming portion 470 is provided on the lower side of the first conveyance path 430 of the conveyance path 429. A suction device 467 is connected to an upper portion of the outer wall 462 of the upper space forming portion 460. A suction device 477 is connected to the bottom of the outer wall 472 of the lower space forming portion 470. The third conveyance path 450 of the conveyance path 429 has a conveyance port 452 that serves as an outlet to the outside. In the conveyance path 429, a plurality of (ten in the present embodiment) conveyance rollers 435 are disposed from the opening 15 to the conveyance port 452 in the conveyance direction (the front-rear direction of the first drawing). Further, the conveyance path 429, the upper space forming portion 460, the lower space forming portion 470, and the suction The guiding devices 467 and 477 are configured to be symmetrical with respect to the conveyance path 329, the upper space forming portion 360, the lower space forming portion 370, and the suction devices 367, 377 in the front-rear direction. Therefore, the components of the conveyance path 429, the upper space forming portion 460, the lower space forming portion 470, and the suction devices 467, 477 are provided to the conveyance path 329, the upper space forming portion 360, the lower space forming portion 370, and the suction device 367. The number of the number 100 is added to the 377, and the detailed description is omitted. Further, the line segment D3 is a line segment connecting the rear end portion of the opening of the upper space forming portion 460 and the rear end portion of the opening of the lower space forming portion 470, which corresponds to the line segment D1 in the conveyance path 329. The line segment D4 is a line segment connecting the front end portion of the opening of the upper space forming portion 460 and the front end portion of the opening of the lower space forming portion 470, and corresponds to the line segment D2 in the conveyance path 329. The angle θ3 is an inclination angle of the partition members 464a and 464b, the front wall portion and the rear wall portion of the outer wall 462, and corresponds to the angle θ1 in the upper space forming portion 360. The angle θ4 is an inclination angle of the partition members 474a and 474b, the front wall portion of the outer wall 472, and the rear wall portion, and corresponds to the angle θ2 in the lower space forming portion 370. In the present embodiment, the angle θ1 = angle θ3 and the angle θ2 = angle θ4.

在這種構成之輥道窯310中,當進行被處理物96之熱處理時,施加與輥道窯10相同之動作,旋轉搬運滾輪335,435。又,藉吸引裝置367,467,分別吸引上方空間363,463內的環境氣體以排出之,藉吸引裝置377,477,分別吸引下方空間373,473內的環境氣體以排出之。而且,自搬運通路329的搬運口352,依序搬入載置有複數被處理物96之托盤95。自搬運口352被搬入之托盤95,係藉複數搬運滾輪335的旋轉,依序通過第3搬運通路350、第1搬運通路330及第 2搬運通路340,自開口14被搬入爐體11內。接著,在托盤95通過第1空間11a,自開口15側被搬出為止,藉加熱器20進行被處理物96之熱處理。而且,自開口15被搬出之托盤95,係藉複數搬運滾輪435的旋轉,依序通過第2搬運通路440、第1搬運通路430及第3搬運通路450,自搬運口452被搬出到外部。 In the roller kiln 310 having such a configuration, when the heat treatment of the workpiece 96 is performed, the same operation as that of the roller kiln 10 is applied, and the conveyance rollers 335 and 435 are rotated. Further, the suction devices 367, 467 respectively attract the ambient gases in the upper spaces 363, 463 to be discharged, and the suction devices 377, 477 respectively attract the ambient gases in the lower spaces 373, 473 to be discharged. Further, the tray 95 on which the plurality of objects 96 are placed is sequentially loaded from the conveyance port 352 of the conveyance path 329. The tray 95 that has been carried in from the transport port 352 passes through the third transport path 350, the first transport path 330, and the first through the rotation of the plurality of transport rollers 335. The conveyance path 340 is carried into the furnace body 11 from the opening 14. Next, the heat treatment of the workpiece 96 is performed by the heater 20 until the tray 95 is carried out from the opening 15 side through the first space 11a. In addition, the tray 95 that has been carried out from the opening 15 is sequentially carried out from the conveyance port 452 to the outside through the second conveyance path 440, the first conveyance path 430, and the third conveyance path 450 by the rotation of the plurality of conveyance rollers 435.

在此,使本實施形態的構成要素與本發明的構成要素之對應關係更加清楚。而且,針對與第1實施形態相同之構成要素,係省略對應關係之說明。本實施形態的搬運通路329,429(第1搬運通路330,430)係相當於本發明的搬運通路,上方空間形成部360,460相當於上方空間形成部,下方空間形成部370,470相當於下方空間形成部,加熱器20相當於加熱機構,吸引裝置367,377,467,477相當於吸引機構。 Here, the correspondence between the constituent elements of the present embodiment and the constituent elements of the present invention will be made clearer. In addition, the description of the corresponding relationship is omitted for the same components as those of the first embodiment. The conveyance paths 329 and 429 (the first conveyance paths 330 and 430) of the present embodiment correspond to the conveyance path of the present invention, and the upper space forming portions 360 and 460 correspond to the upper space forming portion, and the lower space forming portions 370 and 470 correspond to In the lower space forming portion, the heater 20 corresponds to a heating mechanism, and the suction devices 367, 377, 467, and 477 correspond to a suction mechanism.

在以上說明過之本實施形態的輥道窯310中,在熱處理時,第1空間11a的環境氣體藉加熱器20,被加熱到比外部氣體還要高的溫度,所以,自第1空間11a流出到搬運通路329,429之環境氣體很容易往上方空間363,463,外部氣體很容易往下方空間373,473。又,在此狀態下,吸引裝置367,467,377,477吸引上方空間363,463及下方空間373,473,藉此,產生自搬運通路329,429往上方空間363,463之上方向氣流,與自搬運通路329,429往下方空間373,473之下方向氣流。藉此,第1空間11a的環境氣體或外部氣體,係在搬運通路329,429內,很容易在上下方向流動,所以,可更加抑制外部空間及第1空間11a之一者的環境氣體,通過 搬運通路329,429流到另一者(氣體在前後方向上流動)之情形。亦即,可更加抑制在爐體11內外之透過搬運通路329,429之環境氣體的流出入。又,即使係爐體11透過搬運通路329,429,總是往外部空間開口之狀態下,如上所述,可更加抑制在爐體11的內外之流出入。 In the roller kiln 310 of the present embodiment described above, the ambient gas in the first space 11a is heated to a temperature higher than the outside air by the heater 20 during the heat treatment, so that the first space 11a is used. The ambient gas flowing out to the transport passages 329, 429 is easily moved upwards to the space 363, 463, and the outside air is easily moved to the lower space 373, 473. Further, in this state, the suction devices 367, 467, 377, 477 attract the upper spaces 363, 463 and the lower spaces 373, 473, whereby the air flows from the transport paths 329, 429 to the upper space 363, 463, The air flow is directed downward from the transport path 329, 429 to the lower space 373, 473. In this way, the ambient gas or the outside air in the first space 11a is easily moved in the vertical direction in the conveyance paths 329 and 429. Therefore, the external space and the ambient gas of one of the first spaces 11a can be further suppressed. The conveyance path 329, 429 flows to the other (the gas flows in the front-rear direction). That is, it is possible to further suppress the inflow and outflow of the ambient gas passing through the conveyance paths 329 and 429 inside and outside the furnace body 11. In addition, even when the furnace body 11 is always opened to the external space through the conveyance paths 329 and 429, as described above, the outflow of the inside and the outside of the furnace body 11 can be further suppressed.

又,上方空間形成部360,460係形成有相對於爐體11而言,上部傾斜到遠離方向之上方空間363,463。當溫度高於外部氣體之環境氣體自爐體11流出後,此環境氣體的流動方向係變得相對於爐體11而言,愈遠離則愈上升。因此,上方空間363,463係相對於爐體11而言,上部傾斜到遠離方向,藉此,來自爐體11之環境氣體,變得很容易被導引到上方空間363,463,可更加抑制往外部之流出。又,上方空間形成部360,460係具有相對於爐體11而言,上部傾斜到遠離方向之構件,沿著被處理物96的搬運方向,隔間上方空間363,463成複數隔間空間365a~365c,465a~465c之隔間構件364a,364b,464a,464b。因此,複數隔間構件364a,364b,464a,464b係相對於爐體11而言,上部傾斜到遠離方向,藉此,來自爐體11之環境氣體很容易被導引到上方空間363,463。 Further, the upper space forming portions 360, 460 are formed with upper spaces 363, 463 which are inclined to the outward direction with respect to the furnace body 11. When the ambient gas having a temperature higher than the external gas flows out of the furnace body 11, the flow direction of the ambient gas becomes relative to the furnace body 11, and the farther away, the more it rises. Therefore, the upper space 363, 463 is inclined to the outward direction with respect to the furnace body 11, whereby the ambient gas from the furnace body 11 is easily guided to the upper space 363, 463, which can be further suppressed. Outflow to the outside. Further, the upper space forming portions 360, 460 have members that are inclined to the distal direction with respect to the furnace body 11, and the space 363, 463 in the upper space of the compartments becomes a plurality of compartment spaces 365a along the conveyance direction of the workpiece 96. ~365c, 465a~465c compartment members 364a, 364b, 464a, 464b. Therefore, the plurality of partition members 364a, 364b, 464a, 464b are inclined to the distal direction with respect to the furnace body 11, whereby the ambient gas from the furnace body 11 is easily guided to the upper spaces 363, 463.

而且,也可以下方空間形成部370,470係形成有相對於爐體11而言,下部傾斜到接近方向之下方空間373,473。當外部氣體流到搬運通路329,429後,爐體11的環境氣體的溫度較高,所以,此外部氣體的流動方向係變得相對於爐體11而言,愈接近則愈下降。因此,下方空間373,473係相對於爐體11而言,下部傾斜到接近方向,藉此,流到搬運 通路329,429之外部氣體,變得很容易被導引到下方空間373,473,可更加抑制往爐體11之流入。又,下方空間形成部370,470係具有相對於爐體11而言,下部傾斜到接近方向之構件,沿著被處理物96的搬運方向,隔間下方空間373,473成複數隔間空間375a~375c,475a~475c之隔間構件374a,374b,474a,474b。因此,複數隔間構件374a,374b,474a,474b係相對於爐體11而言,下部傾斜到接近方向,藉此,流到搬運通路329,429之外部氣體,很容易被導引到下方空間373,474。 Further, the lower space forming portions 370, 470 may be formed with the lower space 373, 473 which is inclined to the approach direction with respect to the furnace body 11. When the outside air flows to the conveyance paths 329 and 429, the temperature of the atmosphere of the furnace body 11 is high. Therefore, the flow direction of the outside air becomes lower with respect to the furnace body 11 as it approaches. Therefore, the lower space 373, 473 is inclined to the approach direction with respect to the furnace body 11, thereby flowing to the conveyance The external gases of the passages 329, 429 become easily guided to the lower spaces 373, 473, and the inflow to the furnace body 11 can be further suppressed. Further, the lower space forming portions 370, 470 have members that are inclined to the approach direction with respect to the furnace body 11, and the space 373, 473 in the space below the compartments becomes a plurality of compartment spaces 375a along the conveyance direction of the workpiece 96. ~375c, 475a~475c compartment members 374a, 374b, 474a, 474b. Therefore, the plurality of compartment members 374a, 374b, 474a, 474b are inclined to the approaching direction with respect to the furnace body 11, whereby the outside air flowing to the conveying passages 329, 429 can be easily guided to the lower space. 373,474.

而且,在上述第2實施形態中,也可以採用上述第1實施形態的種種變形例。 Further, in the second embodiment described above, various modifications of the first embodiment described above may be employed.

在上述實施形態中,可以省略吸引裝置367,377之任一者,也可以省略吸引裝置467,477之任一者。又,雖然上方空間形成部360具有兩個隔間構件364a,364b,但是,其可以具有一個或三個以上,也可以不具有任何隔間構件。關於上方空間形成部460及下方空間形成部370,470也係相同。又,也可以省略搬運通路329,429之任一者。 In the above embodiment, either of the suction devices 367, 377 may be omitted, or any of the suction devices 467, 477 may be omitted. Further, although the upper space forming portion 360 has two compartment members 364a, 364b, it may have one or three or more, and may not have any compartment members. The upper space forming portion 460 and the lower space forming portions 370 and 470 are also the same. Further, any of the conveyance paths 329 and 429 may be omitted.

在上述實施形態中,雖然搬運通路329等與搬運通路429等之構成係在前後方向對稱,但是,本發明並不侷限於此。也可以例如角度θ1與角度θ3不同,也可以角度θ2與角度θ4不同。又,關於上述隔間構件之數量或吸引裝置之有無等,也可以在前後方向不對稱。 In the above-described embodiment, the configuration such as the conveyance path 329 and the conveyance path 429 is symmetrical in the front-rear direction, but the present invention is not limited thereto. For example, the angle θ1 may be different from the angle θ3, or the angle θ2 may be different from the angle θ4. Further, the number of the above-described compartment members or the presence or absence of the suction means may be asymmetrical in the front-rear direction.

【實施例】 [Examples]

〔實施例1〕 [Example 1]

製作第1圖~第3圖所示之第1實施形態之輥道窯10,其當作實施例1。而且,壁體30的第2空間30a係上下高度為125mm,左右方向長度為53mm,前後方向長度為1100mm。第1軸承40係使用具有間隙44a及間隙45a之遮蔽型的滾珠軸承。第2軸承50係使用遮蔽構件54,55密封內輪51及外輪52間之密封型滾珠軸承。又,在爐體11的開口14,15與外部之間,分別配置有雙重百葉窗式的置換室。 The roller kiln 10 of the first embodiment shown in Figs. 1 to 3 was produced as the first embodiment. Further, the second space 30a of the wall body 30 has a vertical height of 125 mm, a length of 53 mm in the left-right direction, and a length of 1100 mm in the front-rear direction. The first bearing 40 is a shield type ball bearing having a gap 44a and a gap 45a. The second bearing 50 seals the sealed ball bearing between the inner ring 51 and the outer ring 52 by using the shielding members 54 and 55. Further, a double louver type replacement chamber is disposed between the openings 14, 15 of the furnace body 11 and the outside.

〔實施例2〕 [Example 2]

製作第6圖所示之第2實施形態之輥道窯310,其當作實施例2。而且,關於實施例2的構成要素之中,與輥道窯10相同之構成要素,係使用與實施例1相同之物件。 The roller kiln 310 of the second embodiment shown in Fig. 6 was produced as the second embodiment. Among the components of the second embodiment, the same components as those of the roller kiln 10 are the same as those of the first embodiment.

〔評估實驗1〕 [Evaluation Experiment 1]

在實施例1中,在使載置有被處理物96之複數托盤95,依序透過置換室搬入到爐體11之狀態下,調整加熱器20的輸出、來自第1氣體供給源71及第2氣體供給源72之第1氣體及第2氣體的供給量、第1壓力、第1流量、排氣閥87的開度及排氣風扇89的排氣量等,使得第1空間11a的環境氣體,保持在氫氣濃度1%,1250℃,150PaG之氮氣環境氣體。又,相對於壁體30的第2空間30a而言,供給使第2壓力為200PaG(第1空間11a的環境氣體的壓力+50Pa),使第2流量為1.2L/分鐘之第2氣體(氮氣)。在此狀態下,自壁體30的第2軸承50流出到外部之氫氣未被檢出。而且,第2壓力及第2流量之調整或流出之氫氣之測量,係針對一個壁體30進行。 In the first embodiment, the plurality of trays 95 on which the workpiece 96 is placed are sequentially loaded into the furnace body 11 through the replacement chamber, and the output of the heater 20 is adjusted, and the first gas supply source 71 and the (2) The supply amount of the first gas and the second gas in the gas supply source 72, the first pressure, the first flow rate, the opening degree of the exhaust valve 87, and the exhaust amount of the exhaust fan 89, etc., and the environment of the first space 11a The gas is maintained at a hydrogen atmosphere concentration of 1%, 1250 ° C, and 150 PaG of nitrogen atmosphere gas. In addition, the second space 30a of the wall body 30 is supplied with a second gas having a second pressure of 200 PaG (pressure of the ambient gas in the first space 11a + 50 Pa) and a second flow rate of 1.2 L/min ( Nitrogen). In this state, hydrogen gas flowing out from the second bearing 50 of the wall body 30 to the outside is not detected. Further, the measurement of the second pressure and the second flow rate or the measurement of the hydrogen gas flowing out is performed for one wall body 30.

在實施例2中,除了透過搬運通路329,429搬出 入托盤95到爐體11之點,藉吸引裝置367,467,377,477吸引之點,使得保持第1空間11a的環境氣體為氫氣濃度1%,1250℃,2PaG之氮氣環境氣體之點,相對於壁體30的第2空間30a而言,供給使第2壓力為5PaG(第1空間11a的環境氣體的壓力+3Pa),使第2流量為0.1L/分鐘以下(小於測量尺度之最小值)之第2氣體(氮氣)之點,其與實施例1進行相同之測量。在此狀態下,自壁體30的第2軸承50流出到外部之氫氣未被檢出。 In the second embodiment, in addition to moving through the transport path 329, 429 At the point of entering the tray 95 to the furnace body 11, the suction device 367, 467, 377, 477 attracts the point so that the ambient gas holding the first space 11a is a hydrogen gas concentration of 1%, 1250 ° C, 2 PaG of nitrogen atmosphere gas, With respect to the second space 30a of the wall body 30, the second pressure is 5 PaG (the pressure of the ambient gas in the first space 11a + 3 Pa), and the second flow rate is 0.1 L/min or less (less than the minimum measurement scale). The point of the second gas (nitrogen) of the value was measured in the same manner as in Example 1. In this state, hydrogen gas flowing out from the second bearing 50 of the wall body 30 to the outside is not detected.

由此可確認:在實施例1及2皆使壓力高於第1空間11a的環境氣體之氣體,透過第2空間供給口33供給到第2空間30a內,藉此,可抑制環境氣體自爐體11內部往外部空間,透過壁體30之流出。 In the first and second embodiments, the gas of the ambient gas having a higher pressure than the first space 11a is supplied to the second space 30a through the second space supply port 33, whereby the ambient gas can be suppressed from the furnace. The inside of the body 11 flows out to the outside space through the wall 30.

本申請案係將2013年4月24日提出申請之韓國專利申請第10-2013-0045596號,當作優先權主張之基礎,因為引用而其內容的全部包含在本專利說明書。 The present application is based on the Korean Patent Application No. 10-2013-0045596 filed on Apr. 24, 2013, which is hereby incorporated by reference.

【產業上之利用可能性】 [Industrial use possibilities]

本發明係可利用於必須一邊搬運被處理物,一邊進行燒製等熱處理之產業,例如陶瓷電容器等之陶瓷製品之製造業等。 The present invention can be used in an industry that requires heat treatment such as firing while transporting a workpiece, for example, a ceramic product such as a ceramic capacitor.

11‧‧‧爐體 11‧‧‧ furnace body

11a‧‧‧第1空間 11a‧‧‧1st space

16‧‧‧穿孔 16‧‧‧Perforation

26‧‧‧驅動側蓋體 26‧‧‧Drive side cover

26a‧‧‧第3空間 26a‧‧‧3rd space

27‧‧‧開口 27‧‧‧ openings

28‧‧‧驅動側支撐滾輪 28‧‧‧Drive side support roller

30‧‧‧壁體 30‧‧‧ wall

30a‧‧‧第2空間 30a‧‧‧Second space

31‧‧‧第1壁部 31‧‧‧1st wall

32‧‧‧第2壁部 32‧‧‧2nd wall

33‧‧‧第2空間供給口 33‧‧‧2nd space supply port

40‧‧‧第1軸承 40‧‧‧1st bearing

41‧‧‧內輪 41‧‧‧ Inner wheel

42‧‧‧外輪 42‧‧‧Outside

43‧‧‧球體 43‧‧‧ sphere

44‧‧‧遮蔽構件 44‧‧‧Shielding members

44a‧‧‧間隙 44a‧‧‧ gap

45‧‧‧遮蔽構件 45‧‧‧Shielding members

45a‧‧‧間隙 45a‧‧‧ gap

50‧‧‧第2軸承 50‧‧‧2nd bearing

51‧‧‧內輪 51‧‧‧Inner wheel

52‧‧‧外輪 52‧‧‧Outside

53‧‧‧球體 53‧‧‧ sphere

54‧‧‧遮蔽構件 54‧‧‧Shielding members

55‧‧‧遮蔽構件 55‧‧‧Shielding members

60‧‧‧旋轉體 60‧‧‧ rotating body

61‧‧‧搬運滾輪 61‧‧‧Handling roller

61a‧‧‧突出部 61a‧‧‧Protruding

62‧‧‧滾輪蓋體 62‧‧‧Roller cover

62a,62b‧‧‧切入部 62a, 62b‧‧‧cutting department

63‧‧‧連結軸 63‧‧‧Connected shaft

64‧‧‧保持器 64‧‧‧ Keeper

64a~64d‧‧‧切入部 64a~64d‧‧‧cutting department

65‧‧‧驅動軸 65‧‧‧Drive shaft

66‧‧‧鏈輪 66‧‧‧Sprocket

67a~67c‧‧‧插入銷 67a~67c‧‧‧Insert pin

68a~68c‧‧‧擋止螺絲 68a~68c‧‧‧stop screw

69a~69c‧‧‧C型環 69a~69c‧‧‧C-ring

92‧‧‧滾子鏈條 92‧‧‧Roller chain

Claims (13)

一種熱處理方法,其使用熱處理裝置,前述熱處理裝置具有:爐體,形成做為處理空間之第1空間;壁體,形成連通前述第1空間之第2空間,其具有:第1壁部、第2壁部及可自外部供給氣體到前述第2空間內之第2空間供給口;旋轉體,可在前述第1空間內搬運被處理物,自前述第1空間往外部空間,依序貫穿前述第1壁部、前述第2空間及前述第2壁部,以一端自前述第2壁部突出;驅動機構,與前述旋轉體的前述一端側相連接,可旋轉驅動前述旋轉體;第1軸承,被設於前述旋轉體貫穿前述第1壁部之部分,可旋轉地支撐前述旋轉體,而且,在前述旋轉體的貫穿方向上,具有可流通氣體之間隙,其係滾動軸承;以及密封構件,被設於前述旋轉體貫穿前述第2壁部之部分,其密封性高於前述第1軸承,其中包含藉前述驅動機構旋轉驅動前述旋轉體,在前述處理空間內,一邊搬運前述被處理物,一邊進行熱處理之工序,在前述工序中,使壓力比前述第1空間的環境氣體還要高之氣體,透過前述第2空間供給口,供給到前述第2空間內。 A heat treatment method using a heat treatment apparatus having a furnace body to form a first space as a processing space, and a wall body forming a second space communicating with the first space, the first heat treatment device having a first wall portion and a first wall portion a wall portion and a second space supply port for supplying gas from the outside into the second space; and the rotating body transporting the workpiece in the first space, and sequentially passing through the first space to the external space The first wall portion, the second space, and the second wall portion protrude from the second wall portion at one end, and the drive mechanism is connected to the one end side of the rotating body to rotatably drive the rotating body; the first bearing a rotating body is rotatably supported by a portion of the rotating body that penetrates the first wall portion, and has a gap in which a gas can flow in a direction in which the rotating body penetrates, and a sealing member; a portion of the rotating body that penetrates the second wall portion and has a higher sealing property than the first bearing, wherein the rotating body is rotationally driven by the driving mechanism in the processing space a step of performing heat treatment while transporting the object to be processed, and in the step, supplying a gas having a higher pressure than the ambient gas in the first space to the second space supply port and supplying the gas into the second space . 如申請專利範圍第1項所述之熱處理方法,其中,前述爐 體具有可排出前述第1空間內的環境氣體之排氣口,在前述工序中,自前述排氣口排出前述第1空間的環境氣體,同時供給氣體到前述第2空間,使得前述第1空間的環境氣體被保持在既定壓力。 The heat treatment method according to claim 1, wherein the furnace is The body has an exhaust port through which the ambient gas in the first space can be discharged, and in the step, the ambient gas in the first space is discharged from the exhaust port, and the gas is supplied to the second space to make the first space The ambient gas is maintained at a given pressure. 如申請專利範圍第2項所述之熱處理方法,其中,前述爐體具有可供給氣體到前述第1空間內之第1空間供給口,在前述工序中,自前述排氣口排出前述第1空間的環境氣體,同時供給氣體到前述第1空間及前述第2空間,使得前述第1空間的環境氣體被保持在既定壓力。 The heat treatment method according to claim 2, wherein the furnace body has a first space supply port through which a gas can be supplied into the first space, and in the step, the first space is discharged from the exhaust port The ambient gas simultaneously supplies the gas to the first space and the second space, so that the ambient gas in the first space is maintained at a predetermined pressure. 如申請專利範圍第3項所述之熱處理方法,其中,前述熱處理裝置具有:第1配管,被連接在前述第1空間供給口;第2配管,被連接在前述第2空間供給口;以及共通配管,被連接在前述第1配管及前述第2配管,在前述工序中,藉供給氣體到前述共通配管,透過前述共通配管及前述第2配管,供給比前述第1空間的環境氣體還要高壓的氣體到前述第2空間內,透過前述共通配管及前述第1配管,供給氣體到前述第1空間內。 The heat treatment method according to claim 3, wherein the heat treatment apparatus includes: a first pipe connected to the first space supply port; a second pipe connected to the second space supply port; and a common The piping is connected to the first pipe and the second pipe, and in the process, the supply gas is supplied to the common pipe, and the common pipe and the second pipe are transmitted through the common pipe to supply a higher pressure than the ambient gas in the first space. The gas flows into the second space, and the gas is supplied into the first space through the common pipe and the first pipe. 如申請專利範圍第4項所述之熱處理方法,其中,前述熱處理裝置具有:第1流量調整閥,被連接在前述第1配管,調整前述第1配管的流量;以及第2流量調整閥,被連接在前述第2配管,調整前述第2配管的流量, 在前述工序中,藉供給氣體到前述共通配管,透過前述共通配管及前述第1配管,供給以前述第1流量調整閥而流量被調整之氣體到前述第1空間,同時透過前述共通配管及前述第2配管,供給以前述第2流量調整閥而流量被調整之氣體到前述第2空間。 The heat treatment method according to claim 4, wherein the heat treatment device includes a first flow rate adjustment valve that is connected to the first pipe, adjusts a flow rate of the first pipe, and a second flow rate adjustment valve Connected to the second pipe to adjust the flow rate of the second pipe, In the above-described process, the gas is supplied to the common pipe, and the gas is adjusted to the first space by the first flow rate adjusting valve through the common pipe and the first pipe, and the common pipe and the aforementioned The second pipe supplies a gas whose flow rate is adjusted by the second flow rate adjustment valve to the second space. 如申請專利範圍第5項所述之熱處理方法,其中,前述熱處理裝置具有:第1減壓閥,被設於前述共通配管與前述第1配管之至少一者上,而且,被設於比前述第1流量調整閥還要上游側;以及第2減壓閥,在前述第2配管之中,被設於比前述第2流量調整閥還要上游側,前述第1減壓閥使下游側的氣體壓力,減壓到比前述第1空間的環境氣體還要高壓的第1壓力,前述第2減壓閥使下游側的氣體壓力,減壓到比前述第1空間的環境氣體還要高壓的第2壓力,在前述工序中,使壓力超過前述第1壓力及前述第2壓力之氣體,供給到前述共通配管。 The heat treatment method according to claim 5, wherein the heat treatment device includes a first pressure reducing valve provided on at least one of the common pipe and the first pipe, and is provided in the above-described The first flow rate adjustment valve is further provided on the upstream side, and the second pressure reducing valve is provided on the upstream side of the second flow rate adjustment valve in the second pipe, and the first pressure reducing valve is on the downstream side. The gas pressure is reduced to a first pressure higher than the ambient gas in the first space, and the second pressure reducing valve depressurizes the gas pressure on the downstream side to a higher pressure than the ambient gas in the first space. In the second step, the gas having a pressure exceeding the first pressure and the second pressure is supplied to the common pipe. 如申請專利範圍第1至6項中任一項所述之熱處理方法,其中,前述熱處理裝置具有:搬運通路,使前述被處理物在前述外部空間與前述第1空間之間搬運;上方空間形成部,被設於前述搬運通路的鉛直上側,形成在鉛直下側開口以連通到前述搬運通路內之上方空間;以 及下方空間形成部,被設於前述搬運通路的鉛直下側,形成在鉛直上側開口以連通到前述搬運通路內之下方空間,在前述工序中,加熱前述第1空間的環境氣體到比外部氣體還要高的溫度,吸引前述上方空間及前述下方空間之至少一者。 The heat treatment method according to any one of claims 1 to 6, wherein the heat treatment apparatus includes a conveyance path for conveying the workpiece between the external space and the first space, and forming an upper space The portion is provided on the vertical upper side of the transport path, and is formed to open vertically downward to communicate with the upper space in the transport path; And the lower space forming portion is provided on the vertical lower side of the transport path, and is formed in a vertically upper opening to communicate with a lower space in the transport path, and in the step, the ambient gas in the first space is heated to the outside air. A higher temperature is required to attract at least one of the aforementioned upper space and the aforementioned lower space. 一種熱處理裝置,在處理空間內,對於被處理物進行熱處理,其具有:爐體,形成做為前述處理空間之第1空間;壁體,形成連通前述第1空間之第2空間,其具有:第1壁部、第2壁部及可自外部供給氣體到前述第2空間內之第2空間供給口;旋轉體,可在前述第1空間內,可搬運被處理物,自前述第1空間側往外部空間,依序貫穿前述第1壁部、前述第2空間及前述第2壁部,一端自前述第2壁部突出;驅動機構,與前述旋轉體的前述一端側相連接,可旋轉驅動前述旋轉體;第1軸承,被設於前述旋轉體貫穿前述第1壁部之部分,可旋轉地支撐前述旋轉體,而且,在前述旋轉體的貫穿方向上,具有可流通氣體之間隙,其係滾動軸承;以及密封構件,被設於前述旋轉體貫穿前述第2壁部之部分,其密封性高於前述第1軸承。 A heat treatment apparatus for heat-treating a workpiece in a processing space, comprising: a furnace body forming a first space as the processing space; and a wall body forming a second space communicating with the first space, the method comprising: a first wall portion, a second wall portion, and a second space supply port that can supply gas from the outside into the second space; and the rotating body can transport the workpiece in the first space from the first space a side of the first wall portion, the second space, and the second wall portion are sequentially inserted into the external space, and one end protrudes from the second wall portion; and a drive mechanism is coupled to the one end side of the rotating body to be rotatable The first rotating body is provided to a portion of the rotating body that penetrates the first wall portion, and rotatably supports the rotating body, and has a gap in which a gas can flow in a direction in which the rotating body penetrates. The rolling bearing is provided, and the sealing member is provided in a portion where the rotating body penetrates the second wall portion, and the sealing property is higher than that of the first bearing. 如申請專利範圍第8項所述之熱處理裝置,其中,其具有比前述第1軸承還要可旋轉地支撐前述旋轉體的前述一端 側之一端側軸承,前述密封構件係軸封。 The heat treatment apparatus according to claim 8, wherein the one end of the rotating body is rotatably supported by the first bearing One of the side end bearings, the aforementioned sealing member is a shaft seal. 如申請專利範圍第8項所述之熱處理裝置,其中,前述密封構件係被設於前述旋轉體貫穿前述第2壁部之部分,可旋轉地支撐前述旋轉體,而且,密封性高於前述第1軸承之做為滾動軸承之第2軸承。 The heat treatment device according to claim 8, wherein the sealing member is provided in a portion of the rotating body that penetrates the second wall portion, rotatably supports the rotating body, and has a higher sealing property than the above 1 bearing is the second bearing of the rolling bearing. 如申請專利範圍第10項所述之熱處理裝置,其中,前述第2軸承具有:內輪;外輪;複數轉動體,被收納在前述內輪與前述外輪之間;以及遮蔽構件,在前述內輪的軸向上,於偏離前述複數轉動體之位置,被配置在前述內輪與前述外輪之間,第2軸承的遮蔽構件,係在前述內輪與前述外輪之間,形成比前述第1軸承的前述間隙還要小之間隙,或者,密封前述內輪與前述外輪之間。 The heat treatment device according to claim 10, wherein the second bearing includes: an inner wheel; an outer wheel; a plurality of rotating bodies housed between the inner ring and the outer wheel; and a shielding member at the inner wheel The axial direction is disposed between the inner ring and the outer wheel at a position deviated from the plurality of rotating bodies, and the shielding member of the second bearing is formed between the inner ring and the outer wheel to form a first bearing The gap is smaller than the gap, or between the inner wheel and the outer wheel. 如申請專利範圍第11項所述之熱處理裝置,其中,前述第1軸承具有:內輪;外輪;複數轉動體,被收納在前述內輪與前述外輪之間;以及遮蔽構件,在前述內輪的軸向上,於偏離前述複數轉動體之位置,被配置在前述內輪與前述外輪之間,前述第1軸承的遮蔽構件係在前述內輪與前述外輪之間形成有前述間隙。 The heat treatment apparatus according to claim 11, wherein the first bearing includes: an inner wheel; an outer wheel; a plurality of rotating bodies housed between the inner ring and the outer wheel; and a shielding member at the inner wheel The axial direction is disposed between the inner ring and the outer wheel at a position deviated from the plurality of rotating bodies, and the shielding member of the first bearing is formed with the gap between the inner ring and the outer wheel. 如申請專利範圍第10至12項中任一項所述之熱處理裝置,其中,前述第1軸承及前述第2軸承係滾珠軸承。 The heat treatment apparatus according to any one of claims 10 to 12, wherein the first bearing and the second bearing are ball bearings.
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