CN104121774B

CN104121774B - Heat treatment method and annealing device

Info

Publication number: CN104121774B
Application number: CN201410166530.3A
Authority: CN
Inventors: 桥本孝彦; 新井诚
Original assignee: NGK Insulators Ltd; NGK Kilntech Corp
Current assignee: NGK Insulators Ltd; NGK Kilntech Corp
Priority date: 2013-04-24
Filing date: 2014-04-23
Publication date: 2017-04-05
Anticipated expiration: 2034-04-23
Also published as: CN104121774A

Abstract

The roller kilns of the present invention possess：Body of heater, which forms the first space；Wall body, is internally formed the second space that connected with the first space at which, and has the first wall portion, the second wall portion.Furthermore it is possible to the rotary body of treated object is carried in the first space from the first space side towards the first wall portion of space outerpace successively insertion, second space and the second wall portion, and its one end is made to project from the second wall portion.First wall portion is provided with clutch shaft bearing, its gap that be pivotably supported rotary body and can circulate to the insertion direction of rotary body with gas.The second wall portion is provided with second bearing in addition, which is pivotably supported rotary body and sealing is higher compared with clutch shaft bearing.In second space, from the second space supply opening supply gas higher than the pressure of the atmosphere in the first space.

Description

Heat treatment method and annealing device

Technical field

The present invention relates to a kind of heat treatment method and annealing device.

Background technology

In prior art, it is known that have：To treated object while the treated objects such as ceramic are carried by roller Carry out the annealing device of heat treatment.For example, in patent documentation 1, a kind of roller kilns (roller-bottom type continuous oven) are disclosed, its tool It is standby：Tunnel-like body of heater；It is arranged on multiple rollers of the inner space of body of heater；And for burning till the gas burner of treated object.

Prior art literature：

Patent documentation

Patent documentation 1：The flat 4-270884 publications of Japanese Laid-Open

The content of the invention

Invention problem to be solved

But, generally, in this annealing device, the rotary body insertion body of heater including roller etc., and be configured in stove The drive shaft connection of the motor of external body.The reasons why by motor configurations outside body of heater is, due to there is body of heater inside for example Become situation of the condition of high temperature etc. so that the environment of furnace interior is not suitable for configuring motor.Therefore, rotary body is formed with body of heater The through hole of insertion.And, there is this through hole, cause the atmosphere of furnace interior to flow to outside stove along the axial direction of rotary body Situation.

The present invention proposes that in order to solve this problem its main purpose is more to suppress atmosphere from body of heater Portion goes out to outside spatial flow.

The method for solving problem

The heat treatment method of the present invention is heat treatment method using annealing device, and the annealing device possesses：

Body of heater, which is formed as the first space for processing space；

Wall body, is internally formed the second space that connected with first space at which, and has the first wall portion, the second wall Portion and can externally in the second space supply gas second space supply opening；

Rotary body, which can carry treated object in first space, and from the first space side towards outside sky Between the first wall portion, the second space and second wall portion described in insertion successively, and make its one end prominent from second wall portion Go out；

Driver element, which is connected with a side of the rotary body and the rotary body can be made to carry out rotation driving；

Clutch shaft bearing, which is arranged on the part of the first wall portion described in the rotary body insertion, is to be pivotably supported the rotation Swivel and the rolling bearing with the gap that gas can be made to circulate to the insertion direction of the rotary body；And

Containment member, which is arranged on the part of the second wall portion described in the rotary body insertion, and sealing and described One bearing compare it is higher, wherein,

The heat treatment method includes making the rotary body carry out rotation driving come at the place by the driver element Process of thermal treatment is carried out to which while the treated object is carried in reason space,

In the process, supply into the second space and first space via the second space supply opening Atmosphere compare the higher gas of pressure.

In the heat treatment method of the invention, the annealing device for heat treatment method possesses：Body of heater, which forms makees To process first space in space；Wall body, is internally formed the second space that connected with first space at which, and has first Wall portion, the second wall portion and can externally in second space supply gas second space supply opening.Furthermore it is possible to In one space carry treated object rotary body, its from the first space side towards the first wall portion of space outerpace successively insertion, second Space and the second wall portion, and its one end is projected from the second wall portion.And, the driving being connected by the side with the rotary body Unit makes rotary body carry out rotation driving, carries treated object by rotary body and carry out in the first space in the first space The heat treatment of treated object.Now, the part of the first wall portion of rotary body insertion is provided with clutch shaft bearing, the clutch shaft bearing is can Pivotally support rotary body and the rolling bearing with the gap that gas can be made to circulate to the insertion direction of rotary body.In addition, In the part of the second wall portion of rotary body insertion, the higher containment member compared with clutch shaft bearing of sealing is provided with.And, in heat In process, the higher gas of pressure compared with the atmosphere in the first space is supplied into the second space via second space supply opening Body.Thus, the gas to second space supply is with from the gap of the sealing clutch shaft bearing lower than containment member towards the The trend in one space side.Therefore, the gas with the trend from second space towards the first space is prevented：Atmosphere gas are from first The phenomenon that space is flowed out through the gap of clutch shaft bearing.Thus, it is possible to more suppress interior space of the atmosphere from body of heater Flow out.

Here, " sealing is higher compared with clutch shaft bearing " of containment member refers to, containment member can make gas to The gap of the insertion direction circulation of rotary body, the less implication compared with clutch shaft bearing.In addition, containment member " sealing with Clutch shaft bearing is compared higher " also include containment member have can be made (by sealing) insertion direction from gas to rotary body circulate Gap situation." second space connected with the first space " is included：Situation that first space is directly connected with second space, Or the first space and second space situation about connecting via other spaces (but, be the space in addition to space outerpace).

In the heat treatment method of the present invention, the body of heater has the aerofluxuss of the atmosphere that can be discharged in first space Mouthful, in the process, it is also possible in the way of the atmosphere in first space is maintained at authorized pressure, arrange from the air vent Go out the atmosphere in first space, and gas is supplied to the second space.Consequently, it is possible to supply via second space In the case that gas is supplied into the first space in the gap of mouth, second space and clutch shaft bearing, can be by discharging from air vent Atmosphere is adjusted to authorized pressure come the pressure for making the atmosphere in the first space.

In the heat treatment method of the present invention, the body of heater has can supply the first of gas into first space Space supply opening, in the process, can be in the way of the atmosphere in first space be maintained at authorized pressure, from described Air vent discharges the atmosphere in first space, and to first space and second space supply gas.Such one Come, supply gas to the first space by the path in the gap not via second space and clutch shaft bearing, therefore, it is easily adjusted Atmosphere (component or air pressure of atmosphere gas etc.) in first space.Additionally, in the process, to from the first space supply opening To for the gas and gas from second space supply opening to second space that supply from of the first space supply, both component and Pressure can be with identical, and at least one of component and pressure difference also may be used.

In the heat treatment method of the present invention, the annealing device possesses：First pipe arrangement, which is supplied with first space Mouth is answered to connect；Second pipe arrangement, which is connected with the second space supply opening；And shared pipe arrangement, itself and first pipe arrangement and institute The connection of the second pipe arrangement is stated, in the process, by gas being supplied to the shared pipe arrangement, by the atmosphere with first space Compare the higher gas of pressure to supply into the second space via the shared pipe arrangement and the second pipe arrangement, and by gas Jing Supplied into the first space and also may be used from the shared pipe arrangement and first pipe arrangement.Consequently, it is possible to for via the first space Gas supply from supply opening to the first space, and supply to the gas of second space via second space supply opening, both pass through Can carry out in the lump to shared pipe arrangement supply gas.Additionally, in the process, it is also possible to the path from beyond shared pipe arrangement Gas is supplied to first pipe arrangement.Consequently, it is possible to by supplying gas come to the first space and second space to shared pipe arrangement Both supply gases, while make from other paths gas also to the first pipe arrangement circulate (with the gas from shared pipe arrangement Mixing), the gas supplied is thus enabled that via the gas of the first space supply opening supply and via second space supply opening Component is different.

In the heat treatment method of the present invention, the annealing device possesses：First flow adjusts valve, and which is with described first Pipe arrangement connects and for adjusting the flow of first pipe arrangement；Valve is adjusted with second flow, which is connected with second pipe arrangement is used in combination In the flow for adjusting second pipe arrangement, in the process, by supplying gas to the shared pipe arrangement, will be by described first-class The gas of amount adjustment valve adjustment flow is supplied to first space via the shared pipe arrangement and first pipe arrangement, and will The gas that valve adjustment flow is adjusted from the second flow is empty to described second via the shared pipe arrangement and second pipe arrangement Between supply and also may be used.

In the heat treatment method of the present invention, the annealing device possesses：First air relief valve, which is arranged on described sharing At least one party in pipe arrangement and first pipe arrangement, and it is arranged on the position than first flow adjustment valve closer to upstream side Put；With the second air relief valve, which is arranged on second flow described in the ratio in second pipe arrangement and adjusts valve closer to the position of upstream side Put, wherein, the gas pressure of downstream side is decompressed to higher than the atmosphere pressures in first space by first air relief valve The gas pressure of downstream side is decompressed to higher than the atmosphere pressures in first space by first pressure, second air relief valve Second pressure, in the process, by the gas with the pressure more than the first pressure and the second pressure to described Shared pipe arrangement supply also may be used.Consequently, it is possible to from shared pipe arrangement supply pressure than pressure (first pressure and the second pressure after decompression Power) higher gas, therefore, even if by than the first air relief valve closer to upstream side, or than the second air relief valve closer to upstream The pipe arrangement of side attenuates, it is also possible to the gas flow needed for guaranteeing.

In the heat treatment method of the present invention, the annealing device possesses：Transport road, which is used in the space outerpace The treated object is carried and first space between；Superjacent air space forming portion, which is used to form superjacent air space, the top Space is arranged on the upside of the vertical of the transport road and forms opening on the downside of vertical and connect with the transport road；And lower section is empty Between forming portion, which is used to form underlying space, and the underlying space is arranged on the downside of the vertical of the transport road and on vertical Side forms opening and connects with the transport road, in the process, the atmosphere in first space is heated to above exogenous QI Temperature, and attract at least one party in the superjacent air space and the underlying space also may be used.Consequently, it is possible to the gas in the first space Atmosphere gas is heated above the temperature of exogenous QI, therefore, the atmosphere gas flowed out from the first space to transport road are easily upward Space, and the easy space downward of exogenous QI.In addition, in attracting superjacent air space and underlying space in this condition at least one Side, thus produce from transport road upward the gas flowing in the upper direction in space, and under transport road downward space At least one in the gas flowing in direction.Thus, the atmosphere or exogenous QI in the first space is easy in above-below direction in transport road Flowing, the atmosphere therefore, it is possible to the side in more suppressing space outerpace and the first space flow to its other party through transport road To the phenomenon in (gas flow is perpendicular to the direction of above-below direction).That is, more can suppress it is inside and outside body of heater, via transport road Atmosphere outflow flow into.Even if in addition, body of heater the Jing via transport road often to space outerpace formed opening in the state of, The outflow of the gas inside and outside body of heater can be more suppressed to flow into as described above.Now, the transport road can be used for The treated object is moved into externally to body of heater, it is also possible to for the treated object is taken out of from body of heater to outside.

Annealing device of the invention,

Which carries out heat treatment in process space to treated object, and the annealing device possesses：

Body of heater, which is formed as the first space for processing space；

Wall body, is internally formed the second space that connected with first space at which, and has the first wall portion, the second wall Portion and can externally in second space supply gas second space supply opening；

Rotary body, which can carry the treated object in first space, and from the first space side towards outside Portion space the first wall portion, the second space and second wall portion described in insertion successively, and its one end is made from second wall portion It is prominent；

Containment member, which is arranged on the part of the second wall portion described in the rotary body insertion, and sealing and described One bearing is compared higher.

The annealing device of the invention possesses：Body of heater, which is formed as the first space for processing space；Wall body, at which It is internally formed the second space connected with first space, and there is the first wall portion, the second wall portion and can be externally to the The second space supply opening of gas is supplied in two spaces.Furthermore it is possible to the first space carry treated object rotary body, its from First space side is towards the first wall portion of space outerpace successively insertion, second space and the second wall portion, and makes its one end from the second wall Portion projects.And, the driver element being connected by the side with the rotary body makes rotary body carry out rotation driving, can be first Treated object is carried by rotary body in space and the heat treatment of treated object is carried out in the first space.Now, in rotary body The part of the first wall portion of insertion is provided with clutch shaft bearing, and the clutch shaft bearing is to be pivotably supported rotary body and have to make gas The rolling bearing in the gap that body circulates to the insertion direction of rotary body.In addition, in the part of the second wall portion of rotary body insertion, arranging The containment member for having sealing higher compared with clutch shaft bearing.Thus, for example in heat treatment, by the atmosphere phase with the first space The gas higher than pressure is supplied into the second space via second space supply opening, thus to second space supply Gas is with the trend from the gap of the sealing clutch shaft bearing lower than containment member towards the first space side.Therefore, have Gas from second space towards the trend in the first space is prevented：Atmosphere gas clearance flow through between clutch shaft bearing from the first space The phenomenon for going out.Thus, it is possible to more suppress atmosphere to flow out from the interior space of body of heater.

In the annealing device of the present invention, possesses one end side bearing, which is pivotably supported than the clutch shaft bearing more Near a side of the rotary body, the containment member can also be axle envelope.In this case, one end side bearing The part of the second wall portion described in the rotary body insertion can also be arranged on.In addition, one end side bearing can also be in outside Rotary body described in space support.

In the annealing device of the present invention, the containment member can also be a kind of following second bearing：It is arranged on institute The part of the second wall portion described in rotary body insertion is stated, and is pivotably supported the rotary body and sealing and the clutch shaft bearing phase Than higher rolling bearing.In this way, second bearing can double as the effect of above-mentioned axle envelope and the work of one end side bearing With.

In the annealing device of the present invention, the second bearing has：Lubrication groove；Foreign steamer；Multiple rolling elements, which is contained in Between the lubrication groove and the foreign steamer；And shading member, its position deviateed with the plurality of rolling element in the axial direction of the lubrication groove, it is configured in Between the lubrication groove and the foreign steamer, for the shading member of the second bearing, formed between the lubrication groove and the foreign steamer There is less gap compared with the gap of the clutch shaft bearing or seal and also may be used between the lubrication groove and the foreign steamer. Consequently, it is possible to can easily be reduced with shading member or be sealed that gas be made in the insertion side of the rotary body of second bearing To the gap of circulation.Therefore, it is possible to more suppress atmosphere (for example gas, supplied from second space supply opening of second space Body) phenomenon that goes out to outside spatial flow through the gap of second bearing.Moreover it is preferred that the shading member of second bearing is close Between the lubrication groove and foreign steamer of envelope second bearing.

In the annealing device of the present invention of the scheme using second bearing with shading member, the clutch shaft bearing tool Have：Lubrication groove；Foreign steamer；Multiple rolling elements, which is contained between the lubrication groove and the foreign steamer；And shading member, its axle in the lubrication groove To the position deviateed with the plurality of rolling element, the shading member being configured between the lubrication groove and the foreign steamer, to the clutch shaft bearing For, it is also possible to the gap is formed between the lubrication groove and the foreign steamer.Consequently, it is possible to can be easy with shading member Ground reduces the gap that gas can be made to circulate in the insertion direction of the rotary body of clutch shaft bearing.Thus, easily make gas with from Trend of the second space towards the first space, while suppressing the micropartical such as dust via the gap of clutch shaft bearing from second space To the phenomenon that the first space invades.

In the annealing device of the present invention, the clutch shaft bearing and the second bearing can also be ball bearings.I.e., respectively The individual clutch shaft bearing and the second bearing can also have：Lubrication groove；Foreign steamer；And multiple spherical rolling elements, which is contained in this Between lubrication groove and the foreign steamer.Additionally, clutch shaft bearing and the second bearing are not limited to ball bearing, for example, the rolling element is allow to be It is cylindric.Rolling element is a kind of following component：By the rotation of itself, it is possible to achieve lubrication groove carry out the foreign steamer that rotates etc. and The relative position deviation of lubrication groove.

In the annealing device of the present invention, the heat treatment can also include the heat treated to the treated object. Here, in the case of the process of the heat treated for carrying out including the first space, existing and being heated in body of heater due to rotary body Deng and cause the heated phenomenon of clutch shaft bearing.In this case, gas is supplied from second space supply opening to second space, And produce from second space via clutch shaft bearing gap towards the first space flowing, the flowing thus, it is possible to pass through the gas To cool down clutch shaft bearing and suppress heating.

In the annealing device of the present invention, the body of heater has the row that discharge can the atmosphere in first space QI KOU also may be used.Consequently, it is possible in the gap via second space supply opening, second space and clutch shaft bearing into the first space In the case of supply gas, by the pressure that atmosphere of the atmosphere to be easily adjusted in the first space is discharged from air vent.In the feelings Under condition, the air vent is connected with air bleeding valve in the outside of the body of heater also may be used.In addition, the annealing device of the present invention, also may be used To possess the exhaust unit for being connected with air vent and attracting the atmosphere in the first space.

In the annealing device of the present invention, the body of heater can also have can supply gas into first space The first space supply opening.Consequently, it is possible to can come to the first space to supply not via the gap of second space and clutch shaft bearing Gas, therefore, the atmosphere (component or air pressure of atmosphere gas etc.) being easily adjusted in the first space.Additionally, empty for from first Between the gas supplied to the first space of supply opening and the gas supplied from second space supply opening to second space, both groups Point and pressure can be with identical, at least one of component and pressure difference also may be used.

The annealing device of the present invention can also possess：First pipe arrangement, which is connected with first space supply opening；Second Pipe arrangement, which is connected with the second space supply opening；And shared pipe arrangement, which is connected with first pipe arrangement and second pipe arrangement Connect.Consequently, it is possible to supply for the supply of the gas to the first space via the first space supply opening and via second space The supply of the gas to second space of mouth, both can be carried out in the lump by supplying gas to shared pipe arrangement.Additionally, first Pipe arrangement can also make the gas in the path beyond shared pipe arrangement circulate.Consequently, it is possible to by supplying gas to shared pipe arrangement Carry out both the supply gases to the first space and second space, while making the gas from other paths also circulate to the first pipe arrangement (with the gas mixing from shared pipe arrangement), thus enables that via the gas of the first space supply opening supply and via second The component of the gas of space supply opening supply is different.

The annealing device of the present invention can also possess：First flow adjusts valve, and which is connected with first pipe arrangement is used in combination In the flow for adjusting first pipe arrangement；Valve is adjusted with second flow, its be connected with second pipe arrangement and be used to adjusting this second The flow of pipe arrangement.Consequently, it is possible to the flow of the gas for flowing into can be adjusted to the first space and second space.

The annealing device of the present invention possesses：First air relief valve, which is arranged on the shared pipe arrangement and first pipe arrangement In at least one party, and be arranged on than the first flow adjust valve closer to upstream side position；With the second air relief valve, which sets Putting second flow described in the ratio in second pipe arrangement and valve being adjusted closer to the position of upstream side, first air relief valve is by under The gas pressure of stream side is decompressed to the first pressure higher than the pressure of the atmosphere in first space, and second air relief valve will The pressure of the gas of downstream side is to the higher second pressure of the pressure of the atmosphere than first space.Consequently, it is possible to energy Enough from the shared pipe arrangement supply pressure gas higher than the pressure (first pressure and second pressure) after decompression.Therefore, even if will Than the first air relief valve closer to upstream side, or attenuate closer to the pipe arrangement of upstream side than the second air relief valve, it is also possible to guarantee institute The gas flow for needing.

The annealing device of the present invention can also possess the 3rd space and form component, and the 3rd space forms component described The 3rd space connected with first space and the second space is formed between first space and the second space, and it is described Rotary body insertion.Consequently, it is possible to pass through the presence of the 3rd space between the first space and the second space, can more suppress body of heater Impact to wall body, for example, caused the clutch shaft bearing of wall body, the temperature of containment member to produce change by the conduction of heat from body of heater The impact of change etc..In addition, in this case, the annealing device of the present invention can also be further equipped with support unit, the support Unit is pivotably supported the rotary body in the 3rd space.

In using the annealing device of the present invention for possessing the scheme that the 3rd space forms component, the rotary body possesses： Roller is carried, which can carry the treated object in first space；Drive shaft, which is revolved by the driver element Turn to drive and wall body described in insertion；Hollow tubular retainer, which is inserted by the end of the carrying roll side of the drive shaft And be connected with the end；Roller bearing lid, which is fixed on the drive shaft side carried in roller；And connecting shaft, which is inserted Enter the retainer and the roller bearing lid and be connected with the retainer and the roller bearing lid, it is the retainer, described Roller bearing lid and the connecting shaft are configured in the 3rd space, in inner peripheral surface and the company of the roller bearing lid There is gap (clearance) between spindle, the connecting shaft is connected with the roller bearing lid cocoa axle by the gap with deviateing Connect.Consequently, it is possible to pass through connecting shaft can be connected to axle deviation with roller bearing lid, even if carrying roller and drive shaft generation bias (axle deviation), it is also possible to carry rotary driving force of the roller transmission from driver element via driving axial.In this case, originally The annealing device of invention can also be further equipped with support unit, the support unit rotatable twelve Earthly Branches in the 3rd space Support the roller bearing lid.

The annealing device of the present invention can also possess：By the higher gas of pressure compared with the atmosphere in first space The gas supply unit supplied into the second space.Consequently, it is possible to by the gas from gas supply unit, can produce Give birth to the flowing through the gas in the gap of clutch shaft bearing the first space of direction from second space.

The annealing device of the present invention can also possess the heating unit being configured in first space.In addition, this Bright annealing device can also have multiple rotary bodies that the treated object can be carried in the first space.In the situation Under, more than one in multiple rotary bodies can be with " from the first space side towards the first wall portion of space outerpace successively insertion, second empty Between, and the second wall portion, and its one end is projected from the second wall portion ".In addition, wall body is used as the constituting portion for being through with a rotary body Point, the annealing device of the present invention can also have multiple wall bodies.It can also be the wall body for being through with multiple rotary bodies.

The annealing device of the present invention can also possess：Transport road, which is used in the space outerpace and described first empty Between between carry the treated object；Heating unit, which makes the temperature of the atmosphere of the furnace interior higher than the temperature of exogenous QI；On Side space forming portion, which is used to form superjacent air space, and the superjacent air space is arranged on the upside of the vertical of the transport road and in lead Side formation of hanging down is open and connects with the transport road；Underlying space forming portion, which is used to form underlying space, and the lower section is empty Between be arranged on the downside of the vertical of the transport road and form opening on the upside of the vertical and connect with the transport road；And attract single Unit, which is used to attracting at least one party in the superjacent air space and the underlying space.Consequently, it is possible to as heat treatment of the present invention The explanation of method, can more suppress inside and outside body of heater, flow into via the outflow of the atmosphere of transport road.

In the annealing device of the present invention, the superjacent air space forming portion can also form the superjacent air space, described Direction of the superjacent air space to its top away from the body of heater inclines.When the atmosphere gas higher than outside air temperature are flowed out from body of heater, There is the trend then more risen further away from body of heater in the flow direction of the atmosphere gas.Therefore, by superjacent air space to its top away from stove The direction of body inclines, and the atmosphere gas from body of heater are easily directed to superjacent air space such that it is able to more suppress to outside Flow out.

In the annealing device of the present invention, the superjacent air space forming portion can also have division component, the division Component be to its top away from the body of heater the inclined component in direction, and by the superjacent air space along the treated object Carrying direction be divided into multiple division spaces.Consequently, it is possible to pass through it is multiple divide components to its top away from body of heater direction Incline, the atmosphere gas from body of heater are easily directed to superjacent air space.In this case, the plurality of division space can also Top in the superjacent air space interconnects.

In the annealing device of the present invention, the underlying space forming portion can also form the underlying space, described Underlying space is inclined to the direction that its underpart is close to the body of heater.When exogenous QI flows to transport road, the atmosphere gas of body of heater Temperature is higher, therefore, the flow direction of the exogenous QI is present then gets over downward trend closer to body of heater.Therefore, by underlying space to which Bottom is close to the direction of body of heater and inclines, and thus the exogenous QI to transport road flowing is easily directed to underlying space such that it is able to more Plus the inflow for suppressing to body of heater.

In the annealing device of the present invention, the underlying space forming portion can also have division component, the division Component is the inclined component in direction for being close to the body of heater to its underpart, and by the underlying space along the treated object Carrying direction be divided into multiple division spaces.Consequently, it is possible to pass through the direction that multiple division components are close to body of heater to its underpart Incline, the exogenous QI to transport road flowing is easily directed to underlying space.In this case, the plurality of division space can also Lower section in the underlying space interconnects.

Description of the drawings

Fig. 1 is the longitudinal section of the roller kilns 10 of the first embodiment.

Fig. 2 is the A-A sectional views of Fig. 1.

Fig. 3 is the amplification view of the periphery for driving side end cap 26 and wall body 30 of Fig. 2.

Fig. 4 is the amplification view of 30 periphery of wall body of the roller kilns of variation.

Fig. 5 is the amplification view of 30 periphery of wall body of the roller kilns of variation.

Fig. 6 is the longitudinal section of the roller kilns 310 of the second embodiment.

Specific embodiment

[the first embodiment]

Then, embodiment of the present invention is illustrated using accompanying drawing.Fig. 1 is heat treatment method of the present invention as use Annealing device an embodiment roller kilns 10 longitudinal section.Fig. 2 is the A-A sectional views of Fig. 1.Fig. 3 is the drive of Fig. 2 The amplification view of the periphery of dynamic side end cap 26 and wall body 30.Roller kilns 10 are to carry in the first space 11a of body of heater 11 and carry The pallet 95 of multiple treated objects 96 is equipped with, while heat-treating apparatus are carried out to treated object 96.Roller kilns 10 possess：Body of heater 11；Driven side end cap 22；Drive side end cap 26；Wall body 30；Including the multiple rotary bodies 60 for carrying roller 61；Gas supply device 70；And exhaust apparatus 86 (with reference to Fig. 1,2).

Body of heater 11 is the heat insulating structure body for showing greatly cuboid formation, is had：First space 11a, which is internally to carry out The process space of the heat treatment of treated object 96；With opening 14,15, which is respectively in the front end face 12 (left side of Fig. 1) of body of heater And rear end face 13 (right side of Fig. 1) is formed, and become the gateway (Fig. 1) externally to the first space 11a.The body of heater 11 Length from front end face 12 to rear end face 13 is, for example, 2-15m.In the first space 11a, multiple carrying rollers 61 are along carrying Direction (fore-and-aft direction of Fig. 1) is configured from opening 14 to opening 15.By the rotation of the carrying roller 61, multiple being located is placed with The pallet 95 of reason thing 96 is carried to opening 15 from opening 14 in the first space 11a.Additionally, as shown in Fig. 2 carrying roller 61 To direction (left and right directions of Fig. 2) the insertion body of heater 11 intersected vertically with carrying direction.Have in the left and right directions of body of heater 11 and pass through Through hole 16 and through hole 17, carry the through hole 16 of one end (left end of Fig. 2) the insertion body of heater 11 of roller 61 and to reaching driving In side end cap 26, the through hole 17 of the other end (right-hand member of Fig. 2) insertion body of heater 11 and to reaching in slave end end cap 22.In addition, In first space 11a, multiple heaters 20 are configured with the top and bottom of body of heater 11, so that from clamping multiple transport rollers up and down Son 61.Heater 20 is configured with carrying in the way of direction intersects vertically by its long dimensional directions, and is configured with along direction is carried It is multiple.Heater 20 is used for treated object 96 of the heating in the first space 11a, such as by ceramic heats such as SiC heaters Device is constituting.Additionally, heater 20 is not limited to, as long as gas burner etc. can carry out the heat treatment of treated object 96 Heater.As shown in Fig. 2 the top section in body of heater 11 is formed with The air vent 19 that the atmosphere of space 11a is discharged.In addition, being formed with the bottom of body of heater 11 be connected with gas supply device 70 and can So that the first space supply opening 18 of gas is supplied to the first space 11a.Additionally, body of heater 11 except opening 14,15, through hole 16, 17th, it is, in airtight construction, beyond these parts, to be nearly free from and outside outside the first space supply opening 18, air vent 19 The outflow of the gas in other spaces such as space is flowed into.In addition, opening 14, opening 15 can also be put in the (not shown) of airtight construction Change indoor formation opening.

Driven side end cap 22 is disposed on the substantially structure in cuboid on the right side (right side of Fig. 2) of body of heater 11.Should Driven side end cap 22 does not expose the side of the space outerpace in roller kilns 10 with the other end of the carrying roller 61 of insertion through hole 17 Formula covers the other end for carrying roller 61.Driven side end cap 22 is in addition to the opening that the through hole 17 with 11 side of body of heater is connected Airtight construction, therefore the space in driven side end cap 22 and space outerpace are nearly free from the outflow inflow of gas.In addition, It is configured with driven side end cap 22 from downside and supports the slave end support rollers 24 for carrying roller 61.To slave end support rollers 24 For, such as positioned at the downside for carrying roller 61 and from carry the central shaft of roller 61 towards in front and back (the paper surface of Fig. 2 and in Face) position deviateed arranges two rollers and forms, and is pivotably supported carrying roller 61 by the plurality of roller.

Side end cap 26 is driven to be disposed on the substantially structure in cuboid in the left side (left side of Fig. 2) of body of heater 11, Which has been internally formed the 3rd space 26a.11 side of body of heater (right side of Fig. 2) of side end cap 26 is being driven to be formed with opening, the 3rd is empty Between 26a connect with the first space 11a via through hole 16.One end of the carrying roller 61 of insertion through hole 16 is empty to reaching the 3rd Between in 26a, drive side end cap 26 to cover the one end for carrying roller 61.In addition, being formed with and the in the left side for driving side end cap 26 The opening 27 of three space 26a connections, 65 pass through openings 27 of drive shaft being connected with carrying roller 61 (with reference to Fig. 3).Drive side Lid 26 except opening 27, or the opening that is connected with the through hole 16 of 11 side of body of heater in addition in airtight construction, so as to remove these parts In addition, in the 3rd space 26a and the first space 11a, the outflow of gas is nearly free between second space 30a, space outerpace Flow into.The driving side support rollers 28 from downside supporting rotator 60 (roller bearing lid 62) are configured with the 3rd space 26a. Driving side support rollers 28 are and 24 identical structure of slave end support rollers that driving side support rollers are pivotably supported rotation Body 60 (roller bearing lid 62).

Wall body 30 is disposed on the substantially structure in cuboid in the left side (left side of Fig. 2) for driving side end cap 26.Such as Shown in Fig. 3, for wall body 30, which has first wall portion 31 and the second wall portion 32 of tabular component, is by including many of these Individual tabular component fastens etc. to combine and the substantially structure in cuboid by binding agent or bolt.Thus in wall body 30 Portion is formed with second space 30a.First wall portion 31 and the second wall portion 32 are with along the axial direction of rotary body 60 (left and right directions of Fig. 3) The mode of clamping second space 30a is opposed and configures.For the first wall portion 31, face and the drive on 11 side of body of heater (right side of Fig. 3) The face contact of 30 side of wall body (left side of Fig. 3) of dynamic side end cap 26, and matched somebody with somebody in the way of blocking the opening 27 for driving side end cap 26 Put.Thus, for the first wall portion 31, the face of 11 side of body of heater towards the 3rd space 26a being connected with the first space 11a, with stove The face of 11 opposition side of body is then towards second space 30a.That is, the first wall portion 31 divides the 3rd space 26a and second space 30a.Separately Outward, for the second wall portion 32, the face of 11 side of body of heater towards second space 30a, with the face of 11 opposition side of body of heater then facing external Space.That is, the second wall portion 32 divides second space 30a and space outerpace.The top (top of Fig. 3) of wall body 30 be formed with Gas supply device 70 connects, and the second space supply opening 33 of gas can be supplied to second space 30a.In addition, the first wall Portion's 31 driven shaft, 65 insertions, are provided with clutch shaft bearing 40 in the insertion portion.In the same manner, 32 driven shaft 65 of the second wall portion Insertion, is provided with second bearing 50 in the insertion portion.Additionally, wall body 30 is except second space supply opening 33, clutch shaft bearing 40 Gap 44a, 45a (with reference to Fig. 3 amplifier section) outside be in airtight construction, so as to, in addition to these parts, be nearly free from Outflow with space outerpace or the gas of the 3rd space 26a is flowed into.

Clutch shaft bearing 40 is as ball bearing and the rolling bearing that constitutes, and is pivotably supported rotary body 60 and (drives Axle is 65).Clutch shaft bearing 40 has：Lubrication groove 41；Foreign steamer 42；Multiple spheroids 43；And shading member 44,45.Lubrication groove 41 is with such as lower section Formula is constituted：65 its centers of insertion of drive shaft, it is possible to integrally rotated with drive shaft 65.Foreign steamer 42 is with same with lubrication groove 41 The component of heart round shape configuration.The outer peripheral face of foreign steamer 42 is mounted and fixed on the first wall portion 31.The outer peripheral face of foreign steamer 42 and the first wall Between the inner peripheral surface of the insertion portion in portion 31, for example, sealed by encapsulant etc..Spheroid 43 be lubrication groove 41 and foreign steamer 42 it Between the component that rotatably configures.The spheroid 43 along the outer peripheral face and foreign steamer 42 of lubrication groove 41 inner peripheral surface in circumferencial direction To be configured with multiple at equal intervals.If lubrication groove 41 is rotated with the rotation of drive shaft 65, by the rotation of spheroid 43 To eliminate the relative position deviation of the lubrication groove 41 and the foreign steamer 42 fixed of rotation.Thus, clutch shaft bearing 40 is pivotably supported Drive shaft 65.Shading member 44,45 is annular component, shading member 44,45 the axial direction (left and right directions of Fig. 3) of lubrication groove 41 with The position that multiple spheroids 43 deviate, is configured between lubrication groove 41 and foreign steamer 42.Additionally, shading member 44 is configured in than spheroid 43 more Near the position of the first space 11a sides, shading member 45 is configured in the position than spheroid 43 closer to second space 30a sides.Hide Cover component 44,45 be, for example, make the elastomer bondeds such as synthetic rubber in the component of surface of steel plate, and by by shading member 44, The circular protrusion of 45 outer peripheral face is embedded in the groove of the inner peripheral surface for being formed in foreign steamer 42, is thereby secured to foreign steamer 42.In addition, hiding The inner peripheral surface for covering component 44,45 is also formed with circular protrusion, and the projection is formed between the groove of the outer peripheral face of lubrication groove 41 respectively Gap 44a, 45a.That is, shading member 44,45 retention gap 44a, 45a and block the gap between lubrication groove 41 and foreign steamer 42.Should Gap 44a, 45a in the groove by lubrication groove 41 and shading member 44,45 projection and the labyrinth shape clamped.Gap 44a and gap Gaps of the 45a between multiple spheroids 43 and connect.Therefore, clutch shaft bearing 40 is formed from second space 30a via gap Gap and gap 44a between 45a, multiple spheroids 43 and reach the gas flow of the 3rd space 26a, thus with second space 30a and the 3rd space 26a connections.

Second bearing 50 is as ball bearing and the rolling bearing that constitutes, and is pivotably supported rotary body 60 and (drives Axle is 65).Second bearing 50 has：Lubrication groove 51；Foreign steamer 52；Multiple spheroids 53；And shading member 54,55.Lubrication groove 51 is with such as lower section Formula is constituted：Its center of 65 insertion of drive shaft, it is possible to integrally rotated with drive shaft 65.Foreign steamer 52 is with concentric with lubrication groove 51 The component of round shape configuration.The outer peripheral face of foreign steamer 52 is mounted and fixed on the second wall portion 32.The outer peripheral face of foreign steamer 52 and the second wall portion Between the inner peripheral surface of 32 insertion portion, for example, sealed by encapsulant etc..Spheroid 53 is between lubrication groove 51 and foreign steamer 52 The component for rotatably configuring.The spheroid 53 along the outer peripheral face and foreign steamer 52 of lubrication groove 51 inner peripheral surface circumferencial direction with It is configured with equal intervals multiple.If lubrication groove 51 is rotated with the rotation of drive shaft 65, by spheroid 53 rotation come Eliminate the relative position deviation of the lubrication groove 51 and the foreign steamer 52 fixed of rotation.Thus, second bearing 50 is pivotably supported drive Moving axis 65.Shading member 54,55 is annular component, shading member 54,55 the axial direction (left and right directions of Fig. 3) of lubrication groove 51 with it is many The position that individual spheroid 53 deviates, is configured between lubrication groove 51 and foreign steamer 52.Additionally, shading member 54 is configured in more leaning on than spheroid 53 The position of nearly second space 30a sides, shading member 55 are configured in the position than spheroid 53 closer to space outerpace side.Shading member 54th, 55 is, for example, to make the elastomer bondeds such as synthetic rubber in the component of surface of steel plate, and by by outside shading member 54,55 The circular protrusion of side face is embedded in the groove of the inner peripheral surface for being formed in foreign steamer 52, is thereby secured to foreign steamer 52.In addition, and clutch shaft bearing Differently, the circular protrusion for being formed in the inner peripheral surface of shading member 54,55 is embedded into the outer of lubrication groove 51 to 40 shading member 44,45 Contact with the bottom of groove in the groove of side face.Thus, very close to each other, the shading member between shading member 54,55 and lubrication groove 51 54th, between 55 sealing lubrication grooves 51 and foreign steamer 52.

Rotary body 60 has：Carry roller 61, roller bearing lid 62, connecting shaft 63, retainer 64, and drive shaft 65.Should Rotary body 60 can carry treated object 96 in the first space 11a by carrying roller 61, and from the first space 11a sides court Side end cap 26 (the 3rd space 26a), the first wall portion 31, second space 30a and the second wall portion are driven to space outerpace successively insertion 32, and make its one end (left end of Fig. 3) prominent to space outerpace from the second wall portion 32.More specifically, roller 61 is carried from the One space 11a insertions through hole 16 and reach in the 3rd space 26a, and roller bearing lid 62, connecting shaft 63, and retainer 64 It is arranged in order in the 3rd space 26a with this from the first space 11a sides successively towards second space 30a sides.In addition, drive shaft 65 Pass through openings 27, the first wall portion 31 (clutch shaft bearing 40), second space 30a and the second wall portion 32 successively from the 3rd space 26a (second bearing 50) and it is prominent to space outerpace from the second wall portion 32.Sprocket wheel is formed with a side of drive shaft 65 (sprocket) 66, roller chain 92 is hung with the sprocket wheel 66.Roller chain 92 is with the drive across the motor 90 for being configured in space outerpace The mode of moving axis 91 and sprocket wheel 66 is configured, and for connecting rotary body 60 and motor 90.Motor 90 is via drive shaft 91, roller chain 92 transmit rotary driving force to sprocket wheel 66.By the rotation driving of sprocket wheel 66 come the entirety of rotating bodies 60, carrying is thus made Roller 61 carries treated object 96.

Each element and its connection to rotary body 60 is illustrated.It is, for example, the hollow of ceramic to carry roller 61 Pipe, and there is the little columned protuberance 61a of external diameter in its one end (left end of Fig. 3) side.Roller bearing lid 62 is axially Two ends define the cylindrical member of opening.Protrusion has been inserted in the opening of carrying 61 side end of roller of roller bearing lid 62 Portion 61a, by the fixed salient such as bolt (not shown) 61a and roller bearing lid 62.Thus, roller 61 and roller bearing are carried Lid 62 is fixed with coaxial manner.

Connecting shaft 63, its be with (such as 1/2nd etc.) less than the opening diameter at 62 two ends of roller bearing lid outward Footpath and the cylindrical element with the external diameter less than the opening diameter at 64 two ends of retainer.Retainer 64 is its axial two ends Define the hollow tubular member of opening.The end of 11 side of body of heater of connecting shaft 63 is inserted in 30 side of wall body of roller bearing lid 62 In the opening of end.In addition, near the end of 11 side of body of heater of connecting shaft 63, the central shaft of insertion pin 67a and connecting shaft 63 Vertically insertion connecting shaft 63.Connecting shaft 63 and insertion pin 67a are by the positioning with insertion pin 67a vertically insertion connecting shafts 63 Screw 68a is fixing.Insertion pin 67a is the component longer than the external diameter of roller bearing lid 62, and which is formed through in roller axle Hold a pair of notches portion 62a, 62b of 30 side end of wall body of lid 62.Notch 62a, 62b are, from the wall body of roller bearing lid 62 The end face of 30 sides axially roller bearing lid 62 barrel formed otch and formed, groove (depth axially Direction is axial groove).Therefore, in the state of with Positioning screw 68a fixed connection shaft 63 and insertion pin 67a, can be by even Spindle 63 is inserted into the inside of roller bearing lid 62, and can be by insertion pin 67a from 30 side of wall body of roller bearing lid 62 End face is inserted in notch 62a, 62b.In addition, selling 67a closer to the left part side (otch of roller bearing lid 62 than insertion The open side of portion 62a, 62b) position c-type back-up ring 69a is installed, thus prevent insert after insertion pin 67a from notch The phenomenon that 62a, 62b come off to axial direction.Thus, by insertion pin 67a, notch 62a, 62b and c-type back-up ring 69a come connection roll Sub- bearing cap 62 and connecting shaft 63.Identically with the end of 11 side of body of heater, the end of 30 side of wall body of connecting shaft 63 is inserted into pin 67b insertions are simultaneously positioned screw 68b fixation insertion pin 67b.Thus, with above-mentioned roller bearing lid 62 and the connection phase of connecting shaft 63 With ground, by the notch 64a of 11 side of body of heater of retainer 64,64b, insertion pin 67b and c-type back-up ring 69b come in cylindrical shape Retainer 64 is inserted into connecting retainer 64 and connecting shaft 63 while connecting shaft 63.

Drive shaft 65 is the less external diameter of opening diameter with the two ends than retainer 64 (for example, with 63 phase of connecting shaft With external diameter) cylindrical element.The end of 11 side of body of heater of drive shaft 65 is inserted into pin 67c insertions identically with connecting shaft 63 And it is positioned screw 68c fixation insertion pin 67c.Thus, identically with the connection of above-mentioned retainer 64 and connecting shaft 63, by protecting Hold the notch 64c of 30 side of wall body of frame 64,64d, insertion pin 67c and c-type back-up ring 69c to come in cylindric retainer 64 Connect retainer 64 and drive shaft 65 while insertion drive shaft 65.

Additionally, in the present embodiment, the internal diameter of retainer 64 is compared with the difference of connecting shaft 63 and the external diameter of drive shaft 65 Little (such as less than 1mm etc.), the internal diameter of roller bearing lid 62 is with the difference of the external diameter of connecting shaft 63 than larger (such as more than ten centimetres Deng).Thus, the internal diameter of retainer 64 is smaller with the gap of connecting shaft 63 and the external diameter of drive shaft 65, and roller bearing lid 62 Internal diameter it is larger with the gap-ratio of the external diameter of connecting shaft 63.Therefore, retainer 64 and connecting shaft 63 and drive shaft 65 almost keep Coaxially connecting, in contrast, connecting shaft 63 and roller bearing lid 62 sell the long size side of 67a by the gap to insertion Can axle deviation ground connection to (above-below direction of Fig. 3).Additionally, insertion pin 67a has：Even if connecting shaft 63 and roller bearing lid 62 Produce axle to deviate, the sufficient length that also will not be come off from notch 62a, 62b.67a-67c is sold using this insertion and make roller Sub- bearing cap 62, connecting shaft 63, retainer 64, and drive shaft 65 connection structure, such as flat No. 9-26264 in Japanese Laid-Open Disclosed in publication (or No. 3556739 publication of Japan's patent).

As shown in Fig. 2 gas supply device 70 possesses：First gas source of supply 71, which is used to supply first gas；With Two gas supply sources 72, which is used to supply second gas.In addition, gas supply device 70 possesses：Shared pipe arrangement 73, its formed from The first gas runner of second gas source of supply 72 to connecting portion 76a；First pipe arrangement 74, which is formed from connecting portion 76a via even The gas flow of socket part 76b to the first space supply opening 18；And second pipe arrangement 75, its formation is from connecting portion 76a to second space The gas flow of supply opening 33.In the midway of the gas flow for sharing pipe arrangement 73, from second gas source of supply 72 towards connecting portion 76a is sequentially installed with filter 80, effusion meter 81, and the first air relief valve 82.In addition, in the gas flow of the first pipe arrangement 74 On the way, first flow adjustment valve 84 is being installed closer to the position of downstream side (18 side of the first space supply opening) than connecting portion 76b. In the midway of the gas flow of the second pipe arrangement 75, second is sequentially installed with towards second space supply opening 33 from connecting portion 76a and is subtracted Pressure valve 83, and second flow adjustment valve 85.

First gas source of supply 71 is the device that first gas are supplied to the connecting portion 76b of the first pipe arrangement 74.First gas Body is reached in the first space 11a from connecting portion 76b via the first pipe arrangement 74, the first space supply opening 18.Second gas are supplied Source 72 is the device that second gas are supplied to shared pipe arrangement 73.The second gas are flowed in the first pipe arrangement 74 from shared pipe arrangement 73, And after connecting portion 76b is mixed with first gas, reach in the first space 11a from the first space supply opening 18.In addition, second Gas is flowed in the second pipe arrangement 75 from shared pipe arrangement 73, and is reached in second space 30a via second space supply opening 33.This When, second gas are in the first space 11a when including the heat treatment of treated object 96, atmosphere constituent at least one of Gas.In the present embodiment, the atmosphere in the first space 11a during heat treatment employs reducing atmosphere, specifically in nitrogen The atmosphere (such as the density of hydrogen in atmosphere is position % etc.) of trace hydrogen is mixed with gas.And, second gas are employed Nitrogen.In addition, first gas are at least including the second gas in the atmosphere in the first space 11a when being not included in heat treatment Composition, employs hydrogen in the present embodiment.

Filter 80 is microgranules such as the second gas, dust supplied since second gas source of supply 72 for removing The device of son.Effusion meter 81 is the device for measurement in the second gas flow for sharing the flowing of pipe arrangement 73.To the first air relief valve For 82, which is arranged on and adjusts valve 84 closer to the position of the upstream side of gas than first flow, and will supply from second gas Source 72 is answered to the pressure of the gas of the upstream side supply of itself to the first pressure for specifying, and flows to the downstream side of itself. The first pressure is redefined for, than treated object 96 heat treatment when the first space 11a the higher pressure of atmosphere pressures (such as pressure of more than ten times of the atmosphere of the first space 11a).Although there is no particular limitation, first pressure can also be Less than half of the pressure of the second gas of the supply of two gas supply source 72.Second air relief valve 83 is arranged on and adjusts than second flow Position of the valve 85 closer to the upstream side of gas, and the pressure of the gas supplied to the upstream side of itself is to for specifying Two pressure, and flow to the downstream side of itself.In addition it is also possible to learn from Fig. 2, the first air relief valve 82 is arranged on the second air relief valve 83 Upstream side, therefore, gas with upstream side from first pressure to the second air relief valve 83 supply.That is, the second air relief valve 83 is by first The gas decompression of pressure is to second pressure cocurrent to downstream side.The second pressure is redefined for, at the heat of treated object 96 The higher pressure (such as pressure of the several times of the atmosphere of the first space 11a) of the pressure of the atmosphere of the first space 11a during reason.Though So there is no particular limitation, but second pressure can also be less than 1/the 100 of first pressure.First flow adjusts valve 84 Be formed as the first flow for specifying with the flow of the gas (gases of mixing first gas and second gas) through itself (not surpass Cross first flow) the device that is adjusted of mode.Second flow adjustment valve 85 is with the second gas flow shape through itself Become the device that the mode of the second flow (less than second flow) of regulation is adjusted.

Exhaust apparatus 86 is the device for being connected and attract and discharge the atmosphere in the first space 11a with air vent 19.The row Device of air 86 has air bleeding valve 87, inlet valve 88, and exhaust fan 89.Air bleeding valve 87 is, adjusted by adjusting the aperture of valve from The device of the flow of the atmosphere gas that the first space 11a flows via air vent 19.Inlet valve 88 is, such as by sucking week Air for enclosing etc. come cool down from the first space 11a flow into atmosphere gas device.Exhaust fan 89 is via air vent 19, air bleeding valve 87th, and inlet valve 88 and attract the atmosphere in the first space 11a, and discharge it.Exhaust fan 89 can also can be that adjustment is every The device of the capacity in the unit interval.

At the heat for example burnt till by the heat from heater 20 when in body of heater 11 by treated object 96 Reason.Although there is no particular limitation, in the present embodiment, treated object 96 is the electrolyte and electrode of laminated ceramic Duplexer (for size, for example length and width are within 1mm), and the chip of ceramic capacitor is formed after burning till.

More than, be illustrated using the structure of Fig. 1-3 pair of roller kilns 10, show in Fig. 2,3 rotary body 60, One of the insertion rotary body 60 drives side end cap 26, an and wall body 30 etc..In the present embodiment, it is configured in the first space Any one in multiple rotary bodies 60 in 11a is respectively provided with and Fig. 2,3 identical structures.That is, roller kilns 10 with configuration The number identical quantity of the rotary body 60 in the first space 11a, and have drive side end cap 26, wall body 30, motor 90, and Driven side end cap 22 etc..In addition, the second pipe arrangement 75 second flow adjust valve 85 downstream side with 30 identical quantity of wall body And branch, and bifurcation is connected with multiple second space supply openings 33 respectively.

Then, the state to carrying out the heat treatment of treated object 96 using the roller kilns 10 for constituting by this way is carried out Explanation.First, make motor 90 work and make multiple rotary bodies 60 carry out rotation driving, and heater is made to the energization of heater 20 20 heatings.The driving force that rotary body 60 is transmitted to from rotary body 60 is the time in the present embodiment according to needed for heat treatment and pre- First set.The output of heater 20 is temperature (example of the basis when the treated object 96 in the first space 11a carries out heat treatment Such as 1000 DEG C or so etc.) and it is set in advance.Then, prepare multiple pallets 95 for being placed with multiple treated objects 96, and by its On the rotary body 60 (carrying roller 61) of the end for being positioned in 14 sides of opening successively.Pallet 95 can also be vertical with direction is carried Direction (left and right directions of Fig. 2) mounting multiple row.The pallet 95 for carrying roller 61 is positioned in by multiple rotations for carrying roller 61 Transfer and move into body of heater 11 and carried to direction is carried successively.And, pallet 95 is removed from 15 side of opening through the first space 11a Go out.Thus, in roller kilns 10, make rotary body 60 carry out rotation driving by motor 90, quilt is carried successively in the first space 11a By heater 20 carrying out heat treatment while processed material 96.

And, during the carrying of treated object 96, i.e. during heat treatment is carried out, from first gas source of supply 71 and Second gas source of supply 72 supplies first gas and second gas respectively, and is attracted by exhaust fan 89 and discharge the first space Atmosphere in 11a.Below, the flowing to gas is illustrated.

The second gas that pressure exceedes first pressure and second pressure are supplied by second gas source of supply 72 to shared pipe arrangement 73 Should.Second gas to the supply of shared pipe arrangement 73 are through filter 80, effusion meter 81, and are decompressed to first by the first air relief valve 82 Pressure.The second gas reduced pressure by the first air relief valve 82, which is in connecting portion 76a to 75 branch of the first pipe arrangement 74 and the second pipe arrangement And flow.The second gas of the first pipe arrangement 74 are flowed to, in connecting portion 76b and the first gas supplied by first gas source of supply 71 Body mixes.Additionally, first gas source of supply 71, such as supplied to connecting portion 76b with identical with first pressure or somewhat high pressure Answer first gas.For being mixed with the gas of first gas and second gas, the of the downstream side of its flow connection portion 76b One flow rate regulating valve 84 is adjusted to first flow, with the first flow from the first space supply opening 18 to the first space 11a in flow Enter.

On the other hand, is decompressed to by the second air relief valve 83 to the second gas of 75 branch of the second pipe arrangement in connecting portion 76a Two pressure, and its flow is adjusted to second flow by second flow adjustment valve 85, and supplied from second space with second flow Mouth 33 is answered to flow into into second space 30a.Now, second pressure is formed as the atmosphere than the first space 11a during heat treatment The higher value of pressure, the pressure of the second gas supplied into second space 30a be adjusted to than the first space 11a (and The 3rd space 26a for communicating therewith) atmosphere the higher value of pressure.In addition, for wall body 30, second space 30a via Gap 44a, 45a of clutch shaft bearing 40 and connect with the 3rd space 26a, but in addition to that keeping in a gastight manner.Thus, to The second gas of second space 30a supplies are with gap 44a, 45a the becoming towards the first space 11a sides from clutch shaft bearing 40 Gesture.Therefore, the second gas in second space 30a from gap 44a, 45a via the 3rd space 26a in and to the first space 11a Interior inflow.

Thus, first gas and second gas are supplied to the first space 11a via the first space supply opening 18, and the Two gases are supplied to the first space 11a via second space supply opening 33, and the gas for being mixed with these gases forms the Atmosphere gas in one space 11a.In the present embodiment, by being tested in advance determining from first gas source of supply The supply of the supply of 71 first gas and the second gas from second gas source of supply 72, so that during heat treatment Atmosphere in one space 11a becomes required component (such as density of hydrogen is the nitrogen atmosphere of a position %).In addition, the first space The atmosphere of 11a is discharged by exhaust fan 89.Therefore, by the gas from first gas source of supply 71 and second gas source of supply 72 The supply of body and from exhaust fan 89 gas discharge balance, the pressure in the first space 11a can be adjusted.In this reality Apply in scheme, first pressure, second pressure, first flow, second flow, air bleeding valve 87 are determined by testing in advance Capacity of aperture and exhaust fan 89 etc., so that the pressure needed for the atmosphere in the first space 11a during heat treatment is maintained at (for example, the pressured atmosphere of hundreds of PaG degree).Additionally, for example piezometer is configured in the first space 11a, second space 30a, to The value detected by computer input piezometer, and by computer controls first pressure, second pressure, first flow, second flow, The capacity of the aperture and exhaust fan 89 of air bleeding valve 87 so that pressure is close to required pressure and also may be used.

Additionally, in the case that the atmosphere of the first space 11a when heat treatment starts is air atmosphere etc., starting at first to come Discharge from the gas supply of first gas source of supply 71 and second gas source of supply 72 and based on exhaust fan 89, in the first space After the atmosphere of 11a becomes atmosphere required during heat treatment, the carrying for proceeding by treated object 96 also may be used.

Here, making the corresponding relation of the element of the element and the present invention of the present embodiment become clear and definite.This reality The annealing device of the roller kilns 10 of scheme equivalent to the present invention is applied, equivalent to body of heater, the first wall portion 31 is equivalent to for body of heater 11 One wall portion, equivalent to the second wall portion, equivalent to wall body, rotary body 60 is equivalent to rotary body, motor 90 for wall body 30 for the second wall portion 32 Equivalent to driver element, equivalent to clutch shaft bearing, second bearing 50 is equivalent to second bearing, second space supply for clutch shaft bearing 40 Mouth 33 is equivalent to second space supply opening.In addition, spheroid 43,53 is equivalent to rolling element, drive side end cap 26 empty equivalent to the 3rd Between form component, driving side support rollers 28 equivalent to support unit, second gas source of supply 72 equivalent to gas supply unit, Exhaust fan 89 is equivalent to exhaust unit.Additionally, in the present embodiment, illustrated by the work to roller kilns 10, make this One example of the heat treatment method of invention also becomes clear and definite.

The roller kilns 10 of the present embodiment discussed above have：Body of heater 11, which forms first as process space Space 11a；With wall body 30, be internally formed the second space 30a that connects with the first space 11a at which, and have the first wall portion 31, Second wall portion 32, and can externally in second space 30a supply gas second space supply opening 33.In addition, to can be with For the rotary body 60 of treated object 96 is carried in the first space 11a, passed through from the first space 11a sides successively towards space outerpace Logical first wall portion 31, second space 30a and the second wall portion 32, and its one end is projected from the second wall portion 32.And, by with The motor 90 of the one side connection of the rotary body 60 makes rotary body 60 carry out rotation driving, by rotation in the first space 11a Body 60 carries out the heat treatment of treated object 96 in the first space 11a carrying while treated object 96.Now, in rotation The part of 60 the first wall portion of insertion 31 of body is provided with clutch shaft bearing 40, and the clutch shaft bearing 40 is to be pivotably supported rotary body 60 And the rolling bearing with gap 44a, 45a that gas can be made to circulate to the insertion direction of rotary body 60.In addition, in rotary body The part of 60 the second wall portions of insertion 32 is provided with second bearing 50, the second bearing 50 be pivotably supported rotary body 60 and The higher rolling bearing compared with clutch shaft bearing 40 of sealing.And, in heat treatment, by the atmosphere phase with the first space 11a The gas higher than pressure is supplied into second space 30a via second space supply opening 33.Thus, to second space 30a The gas supplied is with gap 44a, the 45a from the sealing clutch shaft bearing 40 lower than second bearing 50 towards the first space The trend of 11a sides.Therefore, prevented by the gas from second space 30a towards the first space 11a：Atmosphere gas are from the first space 11a is through through hole 16, gap 44a, 45a of the 3rd space 26a and clutch shaft bearing 40 and the phenomenon that flows out.Thus, it is possible to more Plus suppress outflow of the atmosphere from the inside of body of heater 11 towards space outerpace.Additionally, 60 insertion body of heater 11 of rotary body, driving side end cap 26th, and wall body 30 and it is prominent to space outerpace, as long as rotary body 60 is rotated, even if for example also difficult using axle bush (bushing) etc. With the gap between fully sealing around rotary body 60.In the roller kilns 10 of the present embodiment, the blocking of wall body 30 becomes From the opening 27 flow export, driving side end cap 26 of the atmosphere of the first space 11a, and intentional landform around rotary body 60 Into gap 44a, 45a.Thus, gas is made energetically to flow in the first space 11a via the insertion portion of rotary body 60, from And the outflow of the atmosphere of the first space 11a is suppressed by the flowing of gas by not being the sealing gap.Additionally, Roller kilns 10, the atmosphere of the first space 11a in heat treatment include hydrogen, therefore, suppressing the atmosphere to outside spatial flow The aspect for going out is highly significant.

In addition, second bearing 50 has：Lubrication groove 51；Foreign steamer 52；Multiple spheroids 53, its be contained in lubrication groove 51 and foreign steamer 52 it Between；And shading member 54,55, which is configured in lubrication groove 51 and foreign steamer 52 in the position of the multiple spheroids of axial arrangement 53 of lubrication groove 51 Between.Also, between the sealing lubrication groove 51 of shading member 54,55 of second bearing 50 and foreign steamer 52.Thereby, it is possible to use masking structure Part 54,55 come seal can make insertion direction from gas to the rotary body 60 of second bearing 50 circulate gap.Therefore, it is possible to more Plus suppress the atmosphere (second gas for example supplied from second space supply opening 33) of second space 30a through second bearing 50 Gap and the outflow to space outerpace.

Further, clutch shaft bearing 40 has：Lubrication groove 41；Foreign steamer 42；Multiple spheroids 43, which is contained in lubrication groove 41 and foreign steamer Between 42；And shading member 44,45, its position deviateed with the plurality of spheroid 43 in the axial direction of lubrication groove 41, it is configured in lubrication groove 41 And foreign steamer 42 between.Also, the shading member 44,45 of clutch shaft bearing 40 formed between lubrication groove 41 and foreign steamer 42 gap 44a, 45a.Easily reduce passing through for the rotary body 60 that gas can be made to clutch shaft bearing 40 thereby, it is possible to using shading member 44,45 Gap 44a, 45a of logical direction circulation.Thus, gas with from second space 30a towards the first space 11a trend, while Easily suppress the micropartical such as dust via the gap of clutch shaft bearing 40 from second space 30a to the intrusion of the first space 11a.

Yet further, roller kilns 10 carry out the heat treatment of the heat treated for including treated object 96.Now, it is empty first Between in the case that 11a carries out including the process of heat treated, clutch shaft bearing 40 by rotary body 60 in the body of heater 11 heating etc. come It is heated.In this case, gas is supplied from second space supply opening 33 to second space 30a, and is produced empty from second Between 30a via clutch shaft bearing 40 gap 44a, 45a and towards the first space 11a flowing, thus, it is possible to pass through the gas Flowing suppresses heating to cool down clutch shaft bearing 40.

Yet further, body of heater 11 has the air vent 19 that can be discharged the atmosphere in the first space 11a.Also, During heat treatment, in the way of the atmosphere of the first space 11a is maintained at authorized pressure, from air vent 19 by the gas of the first space 11a Atmosphere is discharged, and supplies gas to second space 30a.Therefore, via second space supply opening 33, second space 30a and Gap 44a, 45a of one bearing 40 and into the first space 11a supply gas in the case of, by by atmosphere from 19 row of air vent Go out, the pressure of the atmosphere in the first space 11a can be adjusted to authorized pressure.In addition, body of heater 11 have can by gas to First space supply opening 18 of supply in first space 11a.And, in heat treatment, it is maintained at the atmosphere of the first space 11a The atmosphere of the first space 11a is discharged by the mode of the pressure of regulation from air vent 19, and empty to the first space 11a and second Between 30a supply gas.Thus, by the path of gap 44a, 45a not via second space 30a and clutch shaft bearing 40 to One space 11a supplies gas, therefore, the atmosphere being easily adjusted in the first space 11a.

In addition, roller kilns 10 possess：First pipe arrangement 74, which is connected with the first space supply opening 18；Second pipe arrangement 75, its with Second space supply opening 33 connects；And shared pipe arrangement 73, which is connected with the first pipe arrangement 74 and the second pipe arrangement 75.Also, in Re Chu During reason, by supplying gas to shared pipe arrangement 73, by the higher gas of pressure compared with the atmosphere of the first space 11a via shared Pipe arrangement 73 and the second pipe arrangement 75 and supply to 30a in second space, gas is via shared pipe arrangement 73 and the first pipe arrangement 74 to first Supply in the 11a of space.Accordingly, for via the first space supply opening 18 to the supply of the gas of the first space 11a and via Supply of the two space supply openings 33 to the gas of second space 30a, both are by supplying gas come can one to shared pipe arrangement 74 And carry out.In addition, in heat treatment, being supplied from path of the first gas source of supply 71 from beyond shared pipe arrangement to the first pipe arrangement 74 First gas.Therefore, by supplying gas come both supplies to the first space 11a and second space 30a to shared pipe arrangement 73 Gas, while make the gas from other paths also circulate (with the gas mixing from shared pipe arrangement 73) to the first pipe arrangement 74, The gas for thus enabling that the gas supplied via the first space supply opening 18 and supplying via second space supply opening 33 Component it is different.

In addition, roller kilns 10 possess：First flow adjusts valve 84, and which is connected with the first pipe arrangement 74 and is matched somebody with somebody for adjustment first The flow of pipe 74；Valve 85 is adjusted with second flow, which is connected with the second pipe arrangement 75 and for adjusting the flow of the second pipe arrangement 75.And And, in heat treatment, by supplying gas to shared pipe arrangement 73, will be via shared pipe arrangement 73 and the first pipe arrangement 74 and flow is the One flow rate regulating valve, 84 controlled gas is supplied to the first space 11a, and will be via shared pipe arrangement 73 and the second pipe arrangement 75 And flow adjusts 85 controlled gas of valve in second flow and supplies to second space 30a.First is flowed into thereby, it is possible to adjust The flow of the gas of space 11a and second space 30a.

In addition, roller kilns 10 possess：First air relief valve 82, which is arranged on shared pipe arrangement 73 and is arranged on and adjusts than first flow Position of the whole valve 84 closer to upstream side；With the second air relief valve 83, which is arranged on and adjusts than the second flow in the second pipe arrangement 75 Position of the valve 85 closer to upstream side.The gas pressure of downstream side is decompressed to the gas than the first space 11a by the first air relief valve 82 The gas pressure of downstream side is decompressed to the atmosphere than the first space 11a by the higher first pressure of atmosphere pressure, the second air relief valve 83 The higher second pressure of pressure.Also, in heat treatment, to the supply of shared pipe arrangement 73 with more than first pressure and second pressure Pressure gas.Thus, it is higher than the pressure (first pressure and second pressure) after decompression from shared pipe arrangement supply pressure Gas, therefore, even if by than the first air relief valve closer to upstream side, or than the second air relief valve closer to upstream side pipe arrangement become Carefully, it is also possible to the gas flow needed for guaranteeing.As pipe arrangement can attenuate, therefore can for example make setting for reduction roller kilns 10 The structure for putting area etc. is realized densification or can reduce manufacturing cost.

And, roller kilns 10 possess：3rd space 26a, which is formed simultaneously between the first space 11a and second space 30a Connect with the first space 11a and second space 30a；With driving side end cap 26, which is by 60 insertion of rotary body.Thus, by There is the 3rd space 26a between one space 11a and second space 30a, can more suppress impact of the body of heater 11 to wall body 30, example The phenomenon such as such as suppress the clutch shaft bearing 40 of wall body 30, the temperature of second bearing 50 to be changed by the conduction of heat from body of heater 11.

In addition, rotary body 60 possesses：Roller 61 is carried, which can carry treated object 96 in the first space 11a；Drive shaft 65, which is carried out rotation driving insertion wall body 30 by motor 90；The retainer 64 of hollow tubular, the transport roller of its driven shaft 65 The end insertion of sub 61 sides is simultaneously connected with its end；Roller bearing lid 62, which is fixed on 65 side of drive shaft for carrying roller 61；And Connecting shaft 63, which is inserted into retainer 64 and roller bearing lid 62 and is connected with retainer 64 and roller bearing lid 62.Also, protect Hold frame 64, roller bearing lid 62, and connecting shaft 63 be configured in the 3rd space 26a, in inner peripheral surface and the company of roller bearing lid 62 There is gap between spindle 63, connecting shaft 63 can be connected to axle deviation with roller bearing lid 62 by the gap.Thus, by connection Axle 63 can be connected to axle deviation with roller bearing lid 62, even if carrying roller 61 and drive shaft 65 produce eccentric (axle deviation), Rotary driving force from motor 90 can be transmitted to roller 61 is carried via drive shaft 65.Additionally, roller bearing lid 62 and company Spindle 63 can not deviate if carrying roller 61 and drive shaft 65 and producing axle, can exist to rotary body 60 in the case that axle deviates The excessive power of the partial action of deviation the situation of 60 breakage of rotary body.Can axle deviation with roller bearing lid 62 by connecting shaft 63 Ground connection, can more suppress the breakage of this rotary body 60.Additionally, roller kilns 10 are to carry out the heat treatment to treated object 96 Device, carrying roller 61 and drive shaft 65 is easily produced by the temperature difference between the inner and outer portion spaces of the first space 11a Axle deviate, therefore be applied to the present invention aspect highly significant.

In addition, roller kilns 10 possess the higher gas of pressure compared with the atmosphere of the first space 11a to second space 30a The gas supply device 70 of interior supply, therefore, it is possible to produce gap 44a, 45a from second space 30a through clutch shaft bearing 40 And the flowing of the gas towards the first space 11a.

Additionally, the present invention is not limited to any of above embodiment, as long as the technical scope for belonging to the present invention then can It is natural enough to implement various schemes.

For example, in the above-described embodiment, second bearing 50 shading member 54,55 sealing lubrication groove 51 and foreign steamer 52 it Between, but this is not limited to, as long as the sealing of second bearing 50 is higher compared with clutch shaft bearing 40.For example, second bearing 50 shading member 54,55 can also be formed between lubrication groove 51 at which identically with the shading member 44,45 of clutch shaft bearing 40 Gap.In this case, gap 44a, 45a of the gap-ratio clutch shaft bearing 40 of second bearing 50 are little etc., compared with clutch shaft bearing 40 The sealing higher (gas is easier through clutch shaft bearing 40 than second bearing 50) of second bearing 50.Or, first axle 40 at least one party that can not also possess shading member 44,45 are held, second bearing 50 can not also possess shading member 54,55 At least one party.Clutch shaft bearing 40, second bearing 50 do not possess shading member and may be used yet.In this case, make clutch shaft bearing 40 Difference of the difference of the internal diameter of the external diameter and foreign steamer 42 of lubrication groove 41 more than the internal diameter of the external diameter and foreign steamer 52 of the lubrication groove 51 of second bearing 50, The sealing of second bearing 50 is made higher than clutch shaft bearing 40 also may be used.Or, the number or sphere diameter of spheroid 43 or spheroid 53 are adjusted, Thus the sealing of second bearing 50 is made higher than clutch shaft bearing 40 also may be used.In addition, the shading member 44,45 of clutch shaft bearing 40 with Shading member 54,55 does not form gap in the outer peripheral face of lubrication groove 51 in the same manner, but by forming other in shading member 44,45 Also may be used come the gap formed as gas flow in hole.Additionally, the shading member 54,55 of second bearing 50 is in lubrication groove 51 and foreign steamer 52 Between form the situation etc. in gap, in the case of having gap between the lubrication groove 51 and foreign steamer 52 of second bearing 50, exist from the The situation that two space supply openings 33 go out to the gas that second space 30a is supplied to outside spatial flow.But, in the present embodiment In, the second gas to second space 30a supplies employ nitrogen, therefore, even if go out to outside spatial flow also having no problem.This Outward, the gas supplied from second space supply opening 33 to second space 30a is not limited to nitrogen, it is preferred to use even if flowing out The gases such as the noble gases having no problem.

In the above-described embodiment, with the 60 number identical number of rotary body being configured in the first space 11a Side end cap 26 or wall body 30 are driven, but is not limited to this, it is also possible in 60 common drive side end cap 26 of multiple rotary bodies or wall Body 30.But, by the structure using 60 one wall body 30 of insertion of a rotary body, can be using second space 30a as making body The space that product diminishes as far as possible, thus reduces the gas flow to the supply of second space supply opening 33.

In the above-described embodiment, rotary body 60 be point-blank insertion body of heater 11, drive side end cap 26, wall body 30 Component, but be not limited to this.For example, drive shaft 65 has：First component, which has the axle of the left and right directions of Fig. 3, and passes through Logical first wall portion 31；And second component, which has the axle of the above-below direction of Fig. 3, and via first component and bevel gear Connection in two space 30a, and by the insertion in downward direction of wall body 30, in such case etc., the axle of rotary body 60 can not also be On straight line.In this case, second component in downward direction insertion wall body 30 part configuration second bearing 50. In this structure, identically with the embodiment above, it is also possible to suppress the axial direction of the atmosphere of the first space 11a along rotary body 60 To the outflow of space outerpace.

In the above-described embodiment, the 3rd space 26a is formed between the first space 11a and second space 30a, but only The first space 11a is wanted to connect with second space 30a.For example, roller kilns 10 do not possess driving side end cap 26, and are not formed 3rd space 26a also may be used.In this case, contacted by the first wall portion 31 of wall body 30 and body of heater 11 etc., the first space 11a and Second space 30a also may be used via through hole 16 and gap 44a, 45a connection.In this case, roller bearing lid 62, connecting shaft 63rd, and retainer 64 etc. is configured in second space 30a and also may be used.

In the above-described embodiment, drive shaft 65 and carry roller 61 via roller bearing lid 62, connecting shaft 63, and keep Frame 64 connects, but omits more than one of these structures and also may be used.In addition, roller bearing lid 62, connecting shaft 63, retainer 64, and Connection between drive shaft 65 is not limited to the structure using insertion pin 67a-67c.

In the above-described embodiment, clutch shaft bearing 40, second bearing 50 are ball bearings, but as long as be possess lubrication groove, foreign steamer, And the rolling bearing of the multiple rolling elements being contained between lubrication groove and foreign steamer.For example, clutch shaft bearing 40 and second bearing 50 At least one party be will to replace spheroid 43,53 with cylindrical element and also may be used as the structure of rolling element.

In the above-described embodiment, heat treated is carried out to treated object 96 based on heater 20, but as long as carrying out hot place Reason.For example carry out cooling treatment also can, heat treated is carried out and cooling treatment also may be used with the order for specifying.

In the above-described embodiment, the first air relief valve 82 is arranged on into shared pipe arrangement 73, but is arranged on the first pipe arrangement 74 Can.For example, by the first air relief valve 82 be arranged on connecting portion 76b and first flow adjustment valve 84 between etc., by the first air relief valve 82 It is arranged on and also may be used closer to the first upper pipe arrangement 74 than first flow adjustment valve 84.In addition, do not possess the first air relief valve 82, Second the of any one or more of air relief valve 83 also may be used.

In the above-described embodiment, gas supply device 70 possesses first flow adjustment valve 84 and second flow adjustment valve 85, but do not possess first flow adjustment valve 84 and second flow adjustment the of any one or more of valve 85 also may be used.

In the above-described embodiment, the first pipe arrangement 74 and the second pipe arrangement 75 are connected with shared pipe arrangement 73, but are not limited to This.For example, do not possess shared pipe arrangement 73, and first gas source of supply 71 is via the first pipe arrangement 74 and the first space supply opening 18 And first gas are supplied to the first space 11a, and second gas source of supply 72 is supplied via the second pipe arrangement 75 and second space Mouthfuls 33 and also may be used to second space 30a supplies second gas.In this case, for example, first gas adopt nitrogen and hydrogen Mixed gas, second gas also may be used using nitrogen.Or, not possessing the first space supply opening 18, gas supply device 70 is from Two pipe arrangements 75 supply gas to second space 30a via second space supply opening 33, and via second space 30a to the One space 11a supply gases also may be used.

In the above-described embodiment, the exhaust fan 89 of exhaust apparatus 86 discharges the first space 11a's via air vent 19 Atmosphere, but it is not limited to this.For example, the attraction for not possessing exhaust fan 89 and not carrying out the atmosphere of the first space 11a also may be used.Or Person, does not possess air vent 19 and may be used yet.

In the above-described embodiment, the atmosphere of the first space 11a during heat treatment employ including nitrogen and hydrogen also Primordial Qi atmosphere, but this is not limited to, using any atmosphere.As long as with carry out the treated object of heat treatment accordingly, it is suitable The component of local atmosphere when determining heat treatment, temperature, pressure etc..

In the above-described embodiment, wall body 30 is multiple tabular components that combination includes the first wall portion 31 and the second wall portion 32 Structure, but be not limited to this.As long as the first wall portion 31 and the second wall portion 32 are a parts for wall body 30, no It is that independent component also may be used.For example, the structure that wall body 30 is integrally formed also may be used.

In the above-described embodiment, in the part of 60 the second wall portion of insertion 32 of rotary body, it is provided with and 40 phase of clutch shaft bearing The second bearing 50 higher than sealing, but it is not limited to this.In the part of 60 the second wall portion of insertion 32 of rotary body, it is not limited to Second bearing 50, as long as being provided with the higher containment member of sealing compared with clutch shaft bearing 40.In this case Fig. 4 is The amplification view of 30 periphery of wall body in the roller kilns of variation.Additionally, in the diagram, to 10 identical of above-mentioned roller kilns Element gives identical reference, and detailed.In the diagram, 132 driven shaft of the second wall portion of wall body 30 65 insertions, are provided with one end side bearing 150 and axle envelope 156 in the insertion portion.For one end side bearing 150, which is can The ball bearing of rotary body 60 (drive shaft 65) is pivotally supported, and is configured in than clutch shaft bearing 40 and axle envelope 156 closer to driving The position of one side (left side of Fig. 4) of axle 65.One end side bearing 150 is adopted in addition to not possessing shading member 54,55 With with 50 identical structure of above-mentioned second bearing.Axle envelope 156 is annular component, its 65 insertion of center driven shaft.Axle envelope 156 is Oil sealing, which is constituted as the higher containment member of the sealing compared with clutch shaft bearing 40.The axle envelope 156 possess main part 157, Becket 158, and spring 159.Main part 157 is by the annular component of the elastomers such as rubber, outer peripheral face and second space The face of 30a sides (right side of Fig. 4) is contacted with the second wall portion 132 and is fixed.In main part 157, in the inner peripheral surface side of its own It is formed with sealed lip 157a, dirt lip 157b.For sealed lip 157a, from terms of the section of the axial direction of drive shaft 65 When, the shape attenuated towards drive shaft 65 in top, and contact with drive shaft 65 on the top.For dirt lip 157b, Which is projected towards drive shaft 65, and top is contacted with the outer peripheral face of drive shaft 65.Dirt lip 157b is played and is prevented from outer The effect of the intrusion of the dust in portion space etc..The ring-type structure that becket 158 is configured in the way of surrounding around drive shaft 65 Part, and main part 157 is pushed to the second wall portion 132.Therefore, it is very close to each other between main part 157 and the second wall portion 132, from And sealed between axle envelope 156 and the second wall portion 132.What spring 159 was arranged to surround around sealed lip 157a Endless elastomeric.By the elastic force of spring 159, the top of sealed lip 157a is pushed to the outer peripheral face of drive shaft 65.By This, it is very close to each other between drive shaft 65 and main part 157, sealed between drive shaft 65 and axle envelope 156.By this way In the roller kilns of the variation of composition, in the part of 60 the second wall portion of insertion 132 of rotary body, it is provided with compared with clutch shaft bearing 40 The higher axle envelope 156 of sealing.Therefore, identically with the embodiment above, the gas to second space 30a supplies has direction The trend in the first space 11a sides, and can prevent atmosphere gas from the first space 11a through clutch shaft bearing 40 gap 44a, The phenomenon that 45a flows out.Additionally, in the roller kilns of variation shown in Fig. 4, supporting the effect of drive shaft 65 by one end side bearing 150 undertake, and are played by axle envelope 156 and play the higher effect of sealing compared with clutch shaft bearing 40.In this regard, the embodiment above The effect of effect and axle envelope 156 of the second bearing 50 as one end side bearing 150.Additionally, the roller kilns of the variation shown in Fig. 4 In, between axle envelope 156 and the second wall portion 132, or axle envelope 156 and drive shaft 65 between sealed very close to each otherly, if axle envelope 156 sealing is higher compared with clutch shaft bearing 40, then form gap and also may be used.In addition, axle envelope 156 employs oil sealing, if axle envelope 156 sealing is higher compared with clutch shaft bearing 40, then using any axle envelope.In addition, as shown in figure 4, one end side bearing 150 are configured in the position than axle envelope 156 closer to a side (left side of Fig. 4) of drive shaft 65, but it is also possible to by one end side axle Hold 150 and be configured in the position than axle envelope 156 closer to the another side (right side of Fig. 4) of drive shaft 65.For example, it is also possible to make figure The allocation position of one end side bearing 150 and axle envelope 156 in 4 is contrary.In addition, in the diagram, one end side bearing 150 does not possess screening Component 54,55 is covered, the sealing of one end side bearing 150 is lower than clutch shaft bearing 40, but sealing is higher than clutch shaft bearing 40 Can.In addition, one end side bearing 150 of Fig. 4 is ball bearing, but this is not limited to, as long as possess lubrication groove, foreign steamer, its receiving The rolling bearing of the multiple rolling elements between lubrication groove and foreign steamer.

In the roller kilns of the variation shown in Fig. 4, the part of 60 the second wall portion of insertion 132 of rotary body is provided with a side Bearing 150, but it is not limited to this.For example, one end side bearing 150 also may be used in outside space support rotary body 60.Fig. 5 is the feelings The amplification view of 30 periphery of wall body in the roller kilns of the variation under condition.Additionally, in Figure 5, to above-mentioned roller kilns 10 Or the roller kilns identical element of Fig. 4 gives identical reference, and detailed.In Figure 5, wall body 30 Second wall portion, 232 driven shaft, 65 insertions.Axle envelope 156 is installed in the insertion portion.In addition, rotary body 60 (drive shaft 65) A side (left side of Fig. 5) in space outerpace insertion supporting part 294.Arrange in the part of 65 insertion supporting part 294 of drive shaft There is one end side bearing 250.One end side bearing 250 is the ball axle that rotary body 60 (drive shaft 65) is pivotably supported in space outerpace Hold, which is identical structure with one end side bearing 150 of Fig. 4.In addition, be provided between wall body 30 and supporting part 294 cam from Clutch 293a, 293b.Cam clutch 293a is configured between cam clutch 293b and wall body 30.Cam clutch 293a, 293b is annular component, its center of 65 insertion of drive shaft.Cam clutch 293a, 293b are the mechanical types for constituting as follows Clutch：Although omitting diagram, which has lubrication groove and foreign steamer, and the only driving force from foreign steamer is transmitted to lubrication groove, and from The driving force of lubrication groove is not to foreign steamer transmission (for foreign steamer, lubrication groove is idle running).The lubrication groove of cam clutch 293a, 293b point It is not connected with the outer peripheral face of drive shaft 65.The foreign steamer of cam clutch 293a, 293b is respectively with sprocket wheel 266a, 266b with coaxial side Formula connects.Roller chain 292a, 292b are hung with respectively in sprocket wheel 266a, 266b.Roller chain 292a is with across sprocket wheel 266a and configuration Configure in the mode of the drive shaft of the zero motor (not shown) of space outerpace.Roller chain 292b is across sprocket wheel 266b and matching somebody with somebody The mode for putting the drive shaft of the high-speed motor (not shown) in space outerpace is configured.From the rotary driving force Jing of zero motor output Transmitted to drive shaft 65 from cam clutch 293a, and make 60 overall low speed rotation of rotary body.Even if in addition, being sent out by low speed Motivation as the lubrication groove of cam clutch 293b is dallied, therefore also will not be passed to high-speed motor rotating drive shaft 65 Pass rotary driving force.Equally, the rotary driving force from high-speed motor output is passed to drive shaft 65 via cam clutch 293b Pass, and make the overall rotation at a high speed of rotary body 60.Even if in addition, rotate drive shaft 65 by high speed engine, due to cam The lubrication groove of clutch 293a is dallied, therefore also will not transmit rotary driving force to zero motor.Thus, the rotary body of Fig. 5 60 can pass through low speed engine and high speed engine is rotated with friction speed.Therefore, it can switching to be located based on rotary body 60 The transporting velocity of reason thing 96.In the roller kilns of the variation for constituting by this way, in 60 the second wall portion of insertion 232 of rotary body Part, be provided with the higher axle envelope 156 compared with clutch shaft bearing 40 of sealing.Therefore, with the embodiment above or the roller of Fig. 4 Road kiln in the same manner, has the trend towards the first space 11a sides to the gas supplied by second space 30a, can prevent atmosphere The phenomenon that gas is flowed out from the first space 11a through gap 44a, 45a of clutch shaft bearing 40.Additionally, one end side bearing of Fig. 5 250 is ball bearing, but is not limited to this, using any bearing.Rolling bearing e.g. beyond ball bearing also may be used.Example Such as, such as the slave end support rollers 24 or driving side support rollers 28 of above-mentioned embodiment, adopt and be pivotably supported from downside The rolling bearing of drive shaft 65 also may be used.Or, one end side bearing 250 is that sliding bearing also may be used.

In addition it is also possible to omit one end side bearing 250 in one end side bearing 150 and the Fig. 5 in Fig. 4.In this case, If having clutch shaft bearing 40 and more than one bearing (such as slave end support rollers 24, driving side support rollers 28 etc.), Drive shaft 65 can be pivotably supported.

[the second embodiment]

Fig. 6 is the longitudinal section of the roller kilns 310 of the second embodiment.For roller kilns 310, in the first embodiment Roller kilns 10 on the basis of be further equipped with transport road 329,429 etc..Therefore, to assigning with 10 identical element of roller kilns Give identical reference and omit the description or illustrate, it is main in roller kilns 310 that the differently composed of transport road 329,429 etc. is wanted Element is illustrated.

First, transport road 329 is illustrated.Transport road 329 be formed as the opening 14 from outside to body of heater 11 by from That manages thing 96 moves into road.In transport road 329, multiple (being ten in the present embodiment) carries roller 335 along carrying side Configure to opening 14 to (fore-and-aft direction of Fig. 1) from carrying port 352.Carry roller 335 to be revolved by motor (not shown) etc. Turn to drive, and transportation tray 95 and treated object 96.From outside towards body of heater 11 (from front towards rear), transport road 329 with 3rd transport road 350, the first transport road 330, and the second transport road 340 order arrangement.Hereinafter, sequentially illustrated with this.

3rd transport road 350 is for pallet 95 and treated object 96 are carried to removing for the first transport road 330 from outside Approach, which is constituted as pipeline.3rd transport road 350 has as from the outside carrying port 352 for moving into mouth.The 3rd The inside of transport road 350 is configured with above-mentioned multiple four carried in roller 335.

First transport road 330 is for pallet 95 and treated object 96 are carried to the second carrying from the 3rd transport road 350 Road is moved on road 340, and which is constituted as pipeline.The inside of first transport road 330 is configured with above-mentioned multiple carrying rollers 335 In three.

Superjacent air space forming portion 360 is provided with the upside of the vertical of first transport road 330.To the superjacent air space forming portion For 360, which has the outer wall 362 of the box like in lower direction formation opening, and the space of the inside as the outer wall 362, and And be formed with the downside of vertical formed opening and with the superjacent air space 363 connected in the first transport road 330.Outer wall 362 is except under It is in airtight construction beyond the opening in direction, the outflow inflow of gas is nearly free from the outside not via the first transport road 330. Additionally, in outer wall 362, the wall portion of front (left of Fig. 1) and the wall portion of rear (right of Fig. 1), to its top away from stove The direction of body 11 inclines.Thus, superjacent air space 363 is formed as the sky with its top away from the inclined shape in direction of body of heater 11 Between.In addition, for superjacent air space forming portion 360, possessing division component 364a, 364b, the division structure in the inside of outer wall 362 Its top of part 364a, 364b is inclined away from the direction of body of heater 11.The division component 364a, 364b are with this from front towards rear The plate-like members being arranged in order, although omit diagram, but the two ends of left and right directions are for example arranged on outer wall 362 by welding etc. Left and right wall portion.Divide component 364a, 364b, the front wall portion of outer wall 362 and rear wall portion, from front upward with Identical angle, θ 1 is inclined.Inclined angle, θ 1 is more than 0 ° and is less than 90 °.Although there is no particular limitation, such as angle, θ 1 is 30 ° -60 ° also may be used.In the present embodiment, angle, θ 1 is 45 °.By the division component 364a, 364b, superjacent air space 363 A part be divided into division space 365a-365c.It is by the front wall portion and division component of outer wall 362 to divide space 365a The space that 364a is divided.It is by the space for dividing component 364a and the 364b divisions of division component to divide space 365b.Divide space 365c is the space divided by the rear wall portion for dividing component 364b and outer wall 362.These divide space 365a-365c the Opening formed below in one transport road 330.In addition, dividing component 364a, 364b top contact not with outer wall 362.Therefore, Divide tops (near top of outer wall 362) of the space 365a-365c up in space 363 to interconnect.Additionally, in outer wall 362 top is formed with suction port 366 be connected with suction device 367, for attracting superjacent air space 363.Suction device 367 Attract and discharge the gas in superjacent air space 363 via suction port 366.

In addition, being provided with underlying space forming portion 370 on the downside of the vertical of the first transport road 330.To the underlying space shape Into for portion 370, there is upper direction to form the outer wall 372 of the box like of opening, and the space of the inside as the outer wall 372 for which, And be formed with the upside of vertical formed opening and with the underlying space 373 connected in the first transport road 330.Outer wall 372 except It is in airtight construction beyond the opening in upper direction, the flowing out stream of gas is nearly free from the outside not via the first transport road 330 Enter.Additionally, in outer wall 372, the wall portion of front (left of Fig. 1) and the wall portion of rear (right of Fig. 1) are close to its underpart The direction of (top be away from) body of heater 11 inclines.Thus, underlying space 373 is formed as the direction that body of heater 11 is close to its underpart The space of inclined shape.In addition, for underlying space forming portion 370, possessing division component in the inside of outer wall 372 374a, 374b, division component 374a, the 374b are inclined to the direction that its underpart is close to body of heater 11.The division component 374a, 374b It is the plate-like members configured towards front successively from rear, although omit diagram, but the two ends of left and right directions for example by weldering The left and right wall portion for being arranged on outer wall 372 such as connect.Divide component 374a, 374b, the front wall portion of outer wall 372 and rear wall portion equal Inclined with identical angle, θ 2 from below rear direction.Inclined angle, θ 2 is greater than 0 ° and less than 90 °.Although without special Restriction, but such as angle, θ 2 can also be 30 ° -60 °.Angle, θ 2 be with 1 identical value of angle, θ also can, in the present embodiment In, angle, θ 2 is 45 °.By the division component 374a, 374b, a part for underlying space 373 is divided into division space 375a-375c.It is the space divided by the wall portion and division component 374a at the rear of outer wall 372 to divide space 375a.Divide empty Between 375b be by dividing component 374a and divide the space that component 374b is divided.Divide space 375c be by divide component 374b and The space that the wall portion in the front of outer wall 372 is divided.These are square under dividing space 375a-375c in the first transport road 330 Into opening.In addition, divide component 374a, 374b not contacting with the bottom of outer wall 372.Therefore, divide space 375a-375c to exist Lower section (near the bottom of outer wall 372) in underlying space 373 interconnects.Additionally, three in above-mentioned first transport road 330 Carry roller 335 one is each configured with the opening portion of the top of each division space 375a-375c.In addition, in outer wall 372 bottom is formed with suction port 376 be connected with suction device 377, for attracting underlying space 373.Suction device 377 Attract and discharge the gas in underlying space 373 via suction port 376.

For the second transport road 340, which is for 14 transportation tray 95 of opening from the first transport road 330 to body of heater 11 And treated object 96 moves into road, and constitute as pipeline.In the inside of second transport road 340, it is configured with above-mentioned multiple Carry three in roller 335.

Additionally, the first transport road 330 and the 3rd transport road 350 constitute continuous pipeline.In the present embodiment, will link The line segment D1 conducts of the leading section of the leading section of the opening of superjacent air space forming portion 360 and the opening of underlying space forming portion 370 The border of the first transport road 330 and the 3rd transport road 350.Equally, the first transport road 330 and the second transport road 340 are constituted continuously Pipeline.In the present embodiment, the rearward end and underlying space forming portion of the opening of superjacent air space forming portion 360 will be linked The line segment D2 of the rearward end of 370 opening is used as the first transport road 330 and the border of the second transport road 340.Moreover it is preferred that Line segment D1, D2 are only inclined with angle, θ 1, angle, θ 2 respectively.In other words, it is in the state of such as Fig. 6 is from terms of vertical section, preferably outer The front wall portion of the front wall portion and outer wall 372 of wall 362 is located on straight line, the rear wall portion of preferred outer wall 362 and outer wall 372 rear wall portion is located on straight line.In the same manner, it is preferred to divide component 364a and divide component 374b positioned at straight line On, preferred component 364b and the division component 374a of dividing is on straight line.In addition, above-mentioned multiple carrying rollers 335 is upper End is respectively positioned on and is generally in mutually level position with the lower end of carrying port 352.Additionally, superjacent air space forming portion 360 in figure 6 And on the basis of the diagram of underlying space forming portion 370, multiple fore-and-aft directions for carrying rollers 335 are spaced in the first transport road It is respectively different in 330, but actually multiple carrying rollers 335 are along carrying direction configuring at equal intervals.

Then, transport road 429 is illustrated.Transport road 429 is formed as from the opening 15 of body of heater 11 to outside by from That manages thing 96 takes out of road.Superjacent air space forming portion 460 is provided with the upside of the vertical of the first transport road 430 of transport road 429. Underlying space forming portion 470 is provided with the downside of the vertical of the first transport road 430 of transport road 429.Up space forming portion 460 The top of outer wall 462 be connected with suction device 467.Attraction is connected with the bottom of the outer wall 472 of underlying space forming portion 470 Device 477.There is the carrying port 452 for taking out of mouth become towards outside in the 3rd transport road 450 of transport road 429.Carrying In road 429, multiple (being ten in the present embodiment) carries roller 435 along carrying direction (fore-and-aft direction of Fig. 1) from opening Mouth 15 is configured to carrying port 452.Additionally, transport road 429, superjacent air space forming portion 460, underlying space forming portion 470, and attract Device 467,477, respectively with transport road 329, superjacent air space forming portion 360, underlying space forming portion 370, suction device 367, 377 is symmetrical in fore-and-aft direction.Therefore, to transport road 429, superjacent air space forming portion 460, underlying space forming portion 470, and attract The element of device 467,477 gives：In transport road 329, superjacent air space forming portion 360, underlying space forming portion 370, suction The numerical value of leading-in device 367,377 adds 100 reference, and detailed.Additionally, line segment D3 is to link superjacent air space The line segment of the rearward end of the opening of the rearward end and underlying space forming portion 470 of the opening of forming portion 460, equivalent to transport road 329 line segment D1.Line segment D4 is the leading section of the opening for linking superjacent air space forming portion 460 and underlying space forming portion 470 The line segment of the leading section of opening, equivalent to the line segment D2 of transport road 329.Angle, θ 3 is to divide component 464a, 464b, outer wall 462 Front wall portion and rear wall portion angle of inclination, equivalent to the angle, θ 1 of superjacent air space forming portion 360.Angle, θ 4 is to divide The angle of inclination of component 474a, 474b, the front wall portion of outer wall 472 and rear wall portion, equivalent to underlying space forming portion 370 Angle, θ 2.In the present embodiment, angle, θ 1=angle, θs 3, angle, θ 2=angle, θs 4.

In the roller kilns 310 for constituting by this way, when the heat treatment of treated object 96 is carried out, with roller kilns 10 On the basis of identical action, also rotate carrying roller 335,435.In addition, being attracted respectively simultaneously by suction device 367,467 Discharge superjacent air space 363,463 in atmosphere, attracted by suction device 377,477 respectively and discharged underlying space 373, Atmosphere in 473.Also, move into the pallet 95 for being placed with multiple treated objects 96 from the carrying port 352 of transport road 329 successively. From the pallet 95 moved into by carrying port 352, sequentially passed through by multiple rotations for carrying rollers 335 the 3rd transport road 350, the One transport road 330, and the second transport road 340, and from opening 14 to body of heater 11 in move into.Then, in pallet 95 through first Space 11a simultaneously takes out of period from 15 side of opening, carries out the heat treatment of treated object 96 by heater 20.And, from opening 15 The pallet 95 for being taken out of, sequentially passes through the second transport road 440, the first transport road by multiple rotations for carrying roller 435 430th, and the 3rd transport road 450, and take out of from carrying port 452 to outside.

Now, make the present embodiment element and the present invention element between corresponding relation become clear and definite. Additionally, for the first embodiment identical element, omit corresponding relation explanation.The transport road of the present embodiment 329th, transport road of 429 (the first transport roads 330,430) equivalent to the present invention, superjacent air space forming portion 360,460 is equivalent to upper Side space forming portion, equivalent to underlying space forming portion, heater 20 is single equivalent to heating for underlying space forming portion 370,470 Unit, suction device 367,377,467,477 is equivalent to attraction unit.

In the roller kilns 310 of above-described the present embodiment, in heat treatment, the atmosphere gas of the first space 11a lead to Cross heater 20 to be heated above the temperature of exogenous QI, therefore, the atmosphere flowed out from the first space 11a to transport road 329,429 Easy space 363,463 upward of gas, easy space 373,473 downward of exogenous QI.In addition, in this condition, attract Device 367,467,377,477 attracts superjacent air space 363,463 and underlying space 373,473, thus produce from transport road 329, 429 upward the gas flowing in the upper direction in space 363,463, and from space 373,473 downward of transport road 329,429 Lower direction gas flowing.Thus, the atmosphere or exogenous QI of the first space 11a is easily in transport road 329,429 with upper and lower To flowing, therefore, it is possible to more suppress the atmosphere of a side of space outerpace and the first space 11a through transport road 329,429 to Flow (gas flows in front-rear direction) in other directions.That is, more can suppress it is inside and outside body of heater 11, via transport road 329th, the outflow of 429 atmosphere is flowed into.In addition, the opening in outside portion space is commonly formed when body of heater 11 is via transport road 329,429 In the state of, it is also possible to more suppress outflow as mentioned above inside and outside the body of heater 11 to flow into.

In addition, superjacent air space forming portion 360,460 formed to its top away from body of heater 11 the inclined superjacent air space in direction 363、463.When flowing out from body of heater 11 higher than the atmosphere gas of outside air temperature, the flow direction of the atmosphere gas further away from body of heater 11 just More there is the trend for rising.Therefore, the direction by superjacent air space 363,463 to its top away from body of heater 11 inclines, from stove The atmosphere gas of body 11 are easily directed to superjacent air space 363,463, more can suppress to outside outflow.In addition, top Space forming portion 360,460 have divide component 364a, 364b, 464a, 464b, division component 364a, 364b, 464a, 464b be to its top away from body of heater 11 the inclined component in direction, and by superjacent air space 363,463 along treated object 96 Carrying direction and be divided into multiple division space 365a-365c, 465a-465c.Therefore, by multiple division component 364a, The direction of 364b, 464a, 464b to its top away from body of heater 11 inclines, and is easily directed to from the atmosphere gas of body of heater 11 Side space 363,463.

Further, underlying space forming portion 370,470 can also form the direction for being close to body of heater 11 to its underpart and incline Underlying space 373,473.When exogenous QI flows to transport road 329,429, the temperature of the atmosphere gas of body of heater 11 is higher, therefore, should The flow direction of exogenous QI more has a declining tendency closer to body of heater 11.Therefore, stove is close to its underpart by underlying space 373,473 The direction of body 11 inclines, and the exogenous QI for flowing to transport road 329,429 is easily directed to underlying space 373,473, and can be more Suppress the inflow to body of heater 11.In addition, underlying space forming portion 370,470 has divides component 374a, 374b, 474a, 474b, The division component 374a, 374b, 474a, 474b are the inclined components in direction for being close to body of heater 11 to its underpart, and by lower section Space 373,474 is divided into multiple division space 375a-375c, 475a-475c along the carrying direction of treated object 96.Cause This, is inclined to the direction that its underpart is close to body of heater 11 by multiple component 374a, 374b, 474a, 474b of dividing, flows to transport road 329th, 429 exogenous QI is easily directed to underlying space 373,474.

Additionally, in above-mentioned second embodiment, it would however also be possible to employ the various modifications example of above-mentioned first embodiment.

In the above-described embodiment, it is convenient to omit any one party of suction device 367,377, it is also possible to omit suction device 467th, 477 any one party.In addition, superjacent air space forming portion 360 is that possess two equipment for dividing component 364a, 364b, but Possess the division component of or more than three also can, one does not possess and also may be used.For superjacent air space forming portion 460, under Side space forming portion 370,470 is also identical.In addition, any one party for omitting transport road 329,429 also may be used.

In the above-described embodiment, 329 grade of transport road and transport road 429 etc. are symmetrical in fore-and-aft direction, but are not limited to This.For example, angle, θ 1 can also be different from angle, θ 3, and angle, θ 2 can also be different from angle, θ 4.In addition, for above-mentioned division structure The presence or absence of number or suction device of part etc., also may be used fore-and-aft direction is asymmetric.

【Embodiment】

[embodiment 1]

The roller kilns 10 of the first embodiment shown in Fig. 1-3 have been manufactured, and as embodiment 1.Additionally, to wall body 30 For second space 30a, upper-lower height be 125mm, left and right directions length be 53mm, fore-and-aft direction length be 1100mm.As Clutch shaft bearing 40, has used the closed type ball bearing with gap 44a and gap 45a.As second bearing 50, masking has been used Component 54,55 seals the closed type ball bearing between lubrication groove 51 and foreign steamer 52.In addition, in opening 14,15 and the outside of body of heater 11 Between, it is respectively configured the displacement room of dual bar gate type.

[embodiment 2]

The roller kilns 310 of the second embodiment shown in Fig. 6 have been manufactured, and as embodiment 2.Additionally, in embodiment 2 Element in 10 identical element of roller kilns, used element same as Example 1.

[evaluation test 1]

In embodiment 1, in the multiple pallets 95 by treated object 96 is placed with successively via displacement room to body of heater 11 In the state of moving into, in order that the atmosphere of the first space 11a is maintained at 1%, 1250 DEG C of density of hydrogen, the nitrogen gas of 150PaG Atmosphere, have adjusted the output of heater 20, from the first gas and of first gas source of supply 71 and second gas source of supply 72 Capacity of the supply of two gases, first pressure, first flow, the aperture of air bleeding valve 87 and exhaust fan 89 etc..In addition, to The second space 30a of wall body 30 supplied second pressure for 200PaG (pressure+50Pa of the atmosphere of the first space 11a), second Flow is 1.2L/ point of second gas (nitrogen).In this condition, do not detect from the second bearing 50 of wall body 30 and flow to outside The hydrogen for going out.Additionally, the measurement of the hydrogen of the adjustment or outflow of second pressure and second flow has been carried out to a wall body 30.

In example 2, except taking out of and moving into pallet 95 via transport road 329,429 to body of heater 11；It is based on The attraction of suction device 367,467,377,477；By the atmosphere of the first space 11a be maintained at 1%, 1250 DEG C of density of hydrogen, The nitrogen atmosphere of 2PaG；It is the 5PaG (pressures of the atmosphere of the first space 11a to the second space 30a supply second pressures of wall body 30 Power+3Pa), beyond the second gas (nitrogen) that second flow is 0.1L/ point following (below the minima of Measurement scales), carry out Measurement same as Example 1.In a state, the hydrogen for flowing out to outside for the second bearing 50 detected from wall body 30 Gas.

From the foregoing, in any one of embodiment 1,2, can determine：By by the atmosphere with the first space 11a Compare the higher gas of pressure to supply into second space 30a via second space supply opening 33, atmosphere can be suppressed from stove The inside of body 11 is via wall body 30 to the outflow of space outerpace.

This application with korean patent application filed in 24 days April in 2013 the 10-2013-0045596th as priority, And quote entire contents.

【Industrial applicability】

The present invention can be used in the industry for the heat treatment such as needing to carry out burning till to which while carrying treated object, for example, make pottery Manufacturing industry of the ceramics such as porcelain condenser etc..

Claims

1. a kind of heat treatment method of use annealing device, the annealing device possess：

Body of heater, which is formed as the first space for processing space；

Wall body, is internally formed the second space that connects with first space at which, and have the first wall portion, the second wall portion and Can be externally to the second space supply opening that gas is supplied in the second space；

Rotary body, which can carry treated object in first space, and from the first space side towards space outerpace according to First wall portion, the second space and second wall portion described in secondary insertion, and its one end is projected from second wall portion；

Clutch shaft bearing, which is arranged on the part of the first wall portion described in the rotary body insertion, is to be pivotably supported the rotary body And the rolling bearing with the gap that gas can be made to circulate to the insertion direction of the rotary body, and

Containment member, which is arranged on the part of the second wall portion described in the rotary body insertion, and sealing and the first axle Hold compare it is higher, wherein,

The heat treatment method includes making the rotary body carry out rotation driving to process empty described by the driver element Between process of thermal treatment is carried out to which while carry the treated object,

In the process, the gas with first space is supplied into the second space via the second space supply opening Atmosphere compares the higher gas of pressure.

2. heat treatment method according to claim 1, wherein,

The body of heater has the air vent of the atmosphere that can be discharged in first space,

In the process, in the way of the atmosphere in first space is maintained at authorized pressure, institute is discharged from the air vent State the atmosphere in the first space and gas is supplied to the second space.

3. heat treatment method according to claim 2, wherein,

The body of heater has the first space supply opening that gas can be supplied into first space,

In the process, in the way of the atmosphere in first space is maintained at authorized pressure, institute is discharged from the air vent State the atmosphere in the first space and to first space and second space supply gas.

4. heat treatment method according to claim 3, wherein,

The annealing device possesses：

First pipe arrangement, which is connected with first space supply opening；

Second pipe arrangement, which is connected with the second space supply opening；And

Shared pipe arrangement, which is connected with first pipe arrangement and second pipe arrangement,

In the process, by supplying gas to the shared pipe arrangement, by the pressure compared with the atmosphere in first space more High gas is supplied into the second space via the shared pipe arrangement and the second pipe arrangement, and gas is shared via described Pipe arrangement and first pipe arrangement are supplied into the first space.

5. heat treatment method according to claim 4

The annealing device possesses：

First flow adjusts valve, and which is connected with first pipe arrangement and for adjusting the flow of first pipe arrangement；With

Second flow adjusts valve, and which is connected with second pipe arrangement and for adjusting the flow of second pipe arrangement,

In the process, by gas being supplied to the shared pipe arrangement, valve adjustment flow will be adjusted by the first flow Gas is supplied to first space via the shared pipe arrangement and first pipe arrangement, and will be adjusted by the second flow The gas of valve adjustment flow is supplied to the second space via the shared pipe arrangement and second pipe arrangement.

6. heat treatment method according to claim 5,

The annealing device possesses：

First air relief valve, which is arranged at least one party in the shared pipe arrangement and first pipe arrangement, and is arranged on than described First flow adjusts valve closer to the position of upstream side；With

Second air relief valve, which is arranged on second flow described in the ratio in second pipe arrangement and adjusts valve closer to the position of upstream side Put, wherein,

The gas pressure of downstream side is decompressed to first higher than the atmosphere pressures in first space by first air relief valve Pressure,

The gas pressure of downstream side is decompressed to second higher than the atmosphere pressures in first space by second air relief valve Pressure,

In the process, exceed the gas of the first pressure and the second pressure to the shared pipe arrangement supply pressure.

7. the heat treatment method according to any one of claim 1-6, wherein,

The annealing device possesses：

Transport road, which is used to carry the treated object between the space outerpace and first space；

Superjacent air space forming portion, which is used to form superjacent air space, and the superjacent air space is arranged on the upside of the vertical of the transport road And form opening on the downside of the vertical and connect with the transport road；

Underlying space forming portion, which is used to form underlying space, and the underlying space is arranged on the downside of the vertical of the transport road And form opening on the upside of the vertical and connect with the transport road,

In the process, the atmosphere in first space is heated above the temperature of exogenous QI, and attracts the superjacent air space With at least one party in the underlying space.

8. a kind of annealing device, which carries out heat treatment to treated object processing in space,

The annealing device possesses：

Body of heater, which is formed as the first space for processing space；

Wall body, is internally formed the second space that connects with first space at which, and have the first wall portion, the second wall portion and The second space supply opening of gas can be supplied in the second space from outside；

Rotary body, which can carry the treated object in first space, and from the first space side towards outside sky Between the first wall portion, the second space and second wall portion described in insertion successively, and make its one end prominent from second wall portion Go out；

Clutch shaft bearing, which is arranged on the part of the first wall portion described in the rotary body insertion, is to be pivotably supported the rotary body And the rolling bearing with the gap that gas can be made to circulate to the insertion direction of the rotary body；And

Containment member, which is arranged on the part of the second wall portion described in the rotary body insertion, and sealing and the first axle Hold and compare height.

9. annealing device according to claim 8, wherein,

The annealing device possesses one end side bearing, and one end side bearing is pivotably supported and more leans on than the clutch shaft bearing One side of the nearly rotary body,

The containment member is axle envelope.

10. annealing device according to claim 8, wherein,

The containment member is second bearing, and second bearing is provided in the part of the second wall portion described in the rotary body insertion, And it is pivotably supported the rotary body and the higher rolling bearing compared with the clutch shaft bearing of sealing.

11. annealing devices according to claim 10, wherein,

The second bearing has：Lubrication groove；Foreign steamer；Multiple rolling elements, which is contained between the lubrication groove and the foreign steamer；And masking structure Part, its position deviateed with the plurality of rolling element in the axial direction of the lubrication groove are configured between the lubrication groove and the foreign steamer,

For the shading member of the second bearing, the institute with the clutch shaft bearing is formed between the lubrication groove and the foreign steamer State gap and compare less gap, or seal between the lubrication groove and the foreign steamer.

12. annealing devices according to claim 11, wherein,

The clutch shaft bearing has：Lubrication groove；Foreign steamer；Multiple rolling elements, which is contained between the lubrication groove and the foreign steamer；Masking structure Part, its position deviateed with the plurality of rolling element in the axial direction of the lubrication groove are configured between the lubrication groove and the foreign steamer,

For the shading member of the clutch shaft bearing, the gap is formed between the lubrication groove and the foreign steamer.

13. annealing devices according to any one of claim 10-12, wherein,

The clutch shaft bearing and the second bearing are ball bearings.