KR102069904B1 - 오브젝트의 3d 구조를 검출하는 장치 - Google Patents

오브젝트의 3d 구조를 검출하는 장치 Download PDF

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KR102069904B1
KR102069904B1 KR1020140045594A KR20140045594A KR102069904B1 KR 102069904 B1 KR102069904 B1 KR 102069904B1 KR 1020140045594 A KR1020140045594 A KR 1020140045594A KR 20140045594 A KR20140045594 A KR 20140045594A KR 102069904 B1 KR102069904 B1 KR 102069904B1
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radiation
laser
irradiation
detector
emitter
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KR20140127753A (ko
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알렉산더 크뉘텔
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보코 게엠베하
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
    • G—PHYSICS
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    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
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    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
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    • G—PHYSICS
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    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G—PHYSICS
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/50—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment specially adapted for specific body parts; specially adapted for specific clinical applications
    • A61B6/51—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment specially adapted for specific body parts; specially adapted for specific clinical applications for dentistry
    • A61B6/512—Intraoral means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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    • G01N2021/213—Spectrometric ellipsometry
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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Theoretical Computer Science (AREA)
  • Computing Systems (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
KR1020140045594A 2013-04-25 2014-04-16 오브젝트의 3d 구조를 검출하는 장치 Active KR102069904B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13165409.7 2013-04-25
EP13165409.7A EP2796938B1 (de) 2013-04-25 2013-04-25 Vorrichtung zum Erfassen einer 3D-Struktur eines Objekts

Publications (2)

Publication Number Publication Date
KR20140127753A KR20140127753A (ko) 2014-11-04
KR102069904B1 true KR102069904B1 (ko) 2020-01-23

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KR1020140045594A Active KR102069904B1 (ko) 2013-04-25 2014-04-16 오브젝트의 3d 구조를 검출하는 장치

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Country Link
US (1) US9297647B2 (https=)
EP (1) EP2796938B1 (https=)
JP (1) JP6283562B2 (https=)
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CN (1) CN104121851B (https=)
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Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2947417B1 (de) 2014-05-23 2019-12-18 VOCO GmbH Vorrichtung und Verfahren zum Erfassen einer 3D-Struktur eines Objekts
WO2016031424A1 (ja) * 2014-08-25 2016-03-03 株式会社東京精密 距離測定装置、及び距離測定方法
KR101628730B1 (ko) * 2015-04-30 2016-06-21 주식회사 투아이스펙트라 치과용 3차원 이미징 방법 및 그 시스템
US10765383B2 (en) * 2015-07-14 2020-09-08 Koninklijke Philips N.V. Imaging with enhanced x-ray radiation
TWI564772B (zh) * 2015-07-31 2017-01-01 Infilm Optoelectronic Inc An apparatus for detecting an object and a light guide plate touch device using the same
US10510624B2 (en) 2016-03-29 2019-12-17 Applied Materials, Inc. Metrology systems with multiple derivative modules for substrate stress and deformation measurement
EP3242107B1 (de) * 2016-05-04 2020-04-08 VOCO GmbH Optische interferometrische vorrichtung zum erfassen einer 3d-struktur eines objekts
DE102016220468B4 (de) * 2016-10-19 2025-12-11 Robert Bosch Gmbh Lidar-Sensor zur Erfassung eines Objektes
FR3064354B1 (fr) * 2017-03-24 2021-05-21 Univ Du Mans Systeme de projection pour la mesure de vibrations
US11892292B2 (en) 2017-06-06 2024-02-06 RD Synergy Ltd. Methods and systems of holographic interferometry
DE102017210101A1 (de) * 2017-06-16 2018-12-20 Robert Bosch Gmbh Filtereinrichtung für einen optischen Sensor
DE102018200363B3 (de) * 2018-01-11 2019-03-21 Robert Bosch Gmbh Messvorrichtung zur Füllstandüberwachung und differenziellen Messung des optischen Brechungsindex
CN108413872B (zh) * 2018-04-10 2020-03-10 天津科技大学 基于法布里-珀罗多光束干涉的三维尺寸精密测量方法
TWI663376B (zh) * 2018-06-26 2019-06-21 宏碁股份有限公司 三維感測系統
TWI805795B (zh) * 2018-07-20 2023-06-21 美商應用材料股份有限公司 基板定位設備與方法
DE102018118501A1 (de) * 2018-07-31 2020-02-06 Precitec Gmbh & Co. Kg Messvorrichtung zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück
US11719531B2 (en) 2018-10-30 2023-08-08 RD Synergy Ltd. Methods and systems of holographic interferometry
CN109506599A (zh) * 2018-12-21 2019-03-22 天活松林光学（广州）有限公司 一种非接触式平面度测量装置及测量方法
DE102019103814B3 (de) * 2019-02-14 2020-07-02 Hochschule Trier - Trier University of Applied Sciences Vorrichtung zum optischen Messen einer Oberfläche
GB2581834A (en) * 2019-03-01 2020-09-02 Elident Gmbh Process and apparatus for intra-oral holography imaging
CN109828261B (zh) * 2019-04-01 2022-02-01 南昌航空大学 大气激光雷达的探测方法及装置
CN109967388B (zh) * 2019-04-23 2024-03-01 无锡奥特维科技股份有限公司 检测装置和硅片分选设备
DE102019209213A1 (de) * 2019-06-26 2020-12-31 Q.ant GmbH Sensoranordnung zur Charakterisierung von Partikeln
TWI740224B (zh) * 2019-10-01 2021-09-21 台灣海博特股份有限公司 光資訊三維空間量測方法
CN111308547B (zh) * 2020-03-21 2022-09-27 哈尔滨工程大学 一种基于复合干涉仪的六维地震波测量装置
CN111721236B (zh) * 2020-05-24 2022-10-25 奥比中光科技集团股份有限公司 一种三维测量系统、方法及计算机设备
CN112097679B (zh) * 2020-09-10 2022-04-19 厦门海铂特生物科技有限公司 一种基于光信息三维空间测量方法
DE102020124521B3 (de) 2020-09-21 2021-09-30 Agrippa Holding & Consulting Gmbh Optische Vorrichtung und Verfahren zur Untersuchung eines Gegenstandes
JP7442145B2 (ja) * 2021-02-25 2024-03-04 Ckd株式会社 三次元計測装置
CN113899320B (zh) * 2021-09-30 2023-10-03 中国科学院光电技术研究所 一种基于空间结构光场的高精度微纳三维形貌测量方法
GB202214343D0 (en) * 2022-09-30 2022-11-16 Univ Nottingham Optical path length characterisation
US12487075B2 (en) 2024-04-18 2025-12-02 Saudi Arabian Oil Company Characterizing rock properties with optical energy sources in a wellbore

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004094942A2 (en) * 2003-04-23 2004-11-04 Ut-Battelle, Llc Recording multiple spatially-heterodyned direct to digital holograms in one digital image
JP2008151941A (ja) * 2006-12-15 2008-07-03 Sharp Corp 波長制御方法、ホログラム情報処理装置およびホログラム記録媒体

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541238A (en) * 1968-11-29 1970-11-17 Bell Telephone Labor Inc Real time three dimensional television system utilizing wave front reconstruction techniques
DE2546007B2 (de) * 1975-10-14 1977-12-29 Siemens AG, 1000 Berlin und 8000 München Faelschungssichere ausweiskarte und verfahren zu ihrer herstellung
US4583228A (en) * 1983-11-21 1986-04-15 At&T Bell Laboratories Frequency stabilization of lasers
US5127731A (en) * 1991-02-08 1992-07-07 Hughes Aircraft Company Stabilized two-color laser diode interferometer
WO2002080157A1 (fr) * 2001-03-30 2002-10-10 Sony Corporation Dispositif de reproduction optique et d'enregistrement sur disques optiques
US6809845B1 (en) 2002-09-25 2004-10-26 University Of South Florida Phase imaging using multi-wavelength digital holography
US20090040527A1 (en) * 2007-07-20 2009-02-12 Paul Dan Popescu Method and apparatus for speckle noise reduction in electromagnetic interference detection
US8068235B1 (en) 2007-07-24 2011-11-29 Lockheed Martin Corporation Systems and methods for multi-function coherent imaging
US9116504B2 (en) * 2010-09-07 2015-08-25 Dai Nippon Printing Co., Ltd. Scanner device and device for measuring three-dimensional shape of object
JP2012104586A (ja) * 2010-11-09 2012-05-31 Elpida Memory Inc 半導体計測装置
KR20130039005A (ko) * 2011-10-11 2013-04-19 (주)미래컴퍼니 3차원 형상 및 두께 측정 장치
CN102508362A (zh) * 2011-11-15 2012-06-20 深圳市光大激光科技股份有限公司 一种双光束耦合装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004094942A2 (en) * 2003-04-23 2004-11-04 Ut-Battelle, Llc Recording multiple spatially-heterodyned direct to digital holograms in one digital image
JP2008151941A (ja) * 2006-12-15 2008-07-03 Sharp Corp 波長制御方法、ホログラム情報処理装置およびホログラム記録媒体

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