CA2849502A1 - Apparatus for detecting a 3d structure of an object - Google Patents

Apparatus for detecting a 3d structure of an object Download PDF

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Publication number
CA2849502A1
CA2849502A1 CA2849502A CA2849502A CA2849502A1 CA 2849502 A1 CA2849502 A1 CA 2849502A1 CA 2849502 A CA2849502 A CA 2849502A CA 2849502 A CA2849502 A CA 2849502A CA 2849502 A1 CA2849502 A1 CA 2849502A1
Authority
CA
Canada
Prior art keywords
radiation
laser
illuminating
emitter
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA2849502A
Other languages
English (en)
French (fr)
Inventor
Alexander Knuttel
Original Assignee
VOCO GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VOCO GmbH filed Critical VOCO GmbH
Publication of CA2849502A1 publication Critical patent/CA2849502A1/en
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02047—Interferometers characterised by particular imaging or detection techniques using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
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    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • G—PHYSICS
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    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0486—Improving or monitoring the quality of the record, e.g. by compensating distortions, aberrations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
    • G03H1/2645—Multiplexing processes, e.g. aperture, shift, or wavefront multiplexing
    • G03H1/265—Angle multiplexing; Multichannel holograms
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/50—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment specially adapted for specific body parts; specially adapted for specific clinical applications
    • A61B6/51—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment specially adapted for specific body parts; specially adapted for specific clinical applications for dentistry
    • A61B6/512—Intraoral means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
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    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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    • G—PHYSICS
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    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
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    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
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    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
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    • G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
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    • G—PHYSICS
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    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
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    • G03H2001/0491—Improving or monitoring the quality of the record, e.g. by compensating distortions, aberrations by monitoring the hologram formation, e.g. via a feed-back loop
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    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
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    • G03H2210/00—Object characteristics
    • G03H2210/63—Environment affecting the recording, e.g. underwater
    • G—PHYSICS
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    • G—PHYSICS
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    • G03H2222/31—Polarised light
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    • G03H2223/00—Optical components
    • G03H2223/23—Diffractive element

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Theoretical Computer Science (AREA)
  • Computing Systems (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CA2849502A 2013-04-25 2014-04-16 Apparatus for detecting a 3d structure of an object Abandoned CA2849502A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13165409.7 2013-04-25
EP13165409.7A EP2796938B1 (de) 2013-04-25 2013-04-25 Vorrichtung zum Erfassen einer 3D-Struktur eines Objekts

Publications (1)

Publication Number Publication Date
CA2849502A1 true CA2849502A1 (en) 2014-10-25

Family

ID=48288781

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2849502A Abandoned CA2849502A1 (en) 2013-04-25 2014-04-16 Apparatus for detecting a 3d structure of an object

Country Status (9)

Country Link
US (1) US9297647B2 (https=)
EP (1) EP2796938B1 (https=)
JP (1) JP6283562B2 (https=)
KR (1) KR102069904B1 (https=)
CN (1) CN104121851B (https=)
AU (1) AU2014202103B2 (https=)
BR (1) BR102014009312A2 (https=)
CA (1) CA2849502A1 (https=)
TW (1) TWI618915B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN113899320A (zh) * 2021-09-30 2022-01-07 中国科学院光电技术研究所 一种基于空间结构光场的高精度微纳三维形貌测量方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2947417B1 (de) 2014-05-23 2019-12-18 VOCO GmbH Vorrichtung und Verfahren zum Erfassen einer 3D-Struktur eines Objekts
WO2016031424A1 (ja) * 2014-08-25 2016-03-03 株式会社東京精密 距離測定装置、及び距離測定方法
KR101628730B1 (ko) * 2015-04-30 2016-06-21 주식회사 투아이스펙트라 치과용 3차원 이미징 방법 및 그 시스템
US10765383B2 (en) * 2015-07-14 2020-09-08 Koninklijke Philips N.V. Imaging with enhanced x-ray radiation
TWI564772B (zh) * 2015-07-31 2017-01-01 Infilm Optoelectronic Inc An apparatus for detecting an object and a light guide plate touch device using the same
US10510624B2 (en) 2016-03-29 2019-12-17 Applied Materials, Inc. Metrology systems with multiple derivative modules for substrate stress and deformation measurement
EP3242107B1 (de) * 2016-05-04 2020-04-08 VOCO GmbH Optische interferometrische vorrichtung zum erfassen einer 3d-struktur eines objekts
DE102016220468B4 (de) * 2016-10-19 2025-12-11 Robert Bosch Gmbh Lidar-Sensor zur Erfassung eines Objektes
FR3064354B1 (fr) * 2017-03-24 2021-05-21 Univ Du Mans Systeme de projection pour la mesure de vibrations
US11892292B2 (en) 2017-06-06 2024-02-06 RD Synergy Ltd. Methods and systems of holographic interferometry
DE102017210101A1 (de) * 2017-06-16 2018-12-20 Robert Bosch Gmbh Filtereinrichtung für einen optischen Sensor
DE102018200363B3 (de) * 2018-01-11 2019-03-21 Robert Bosch Gmbh Messvorrichtung zur Füllstandüberwachung und differenziellen Messung des optischen Brechungsindex
CN108413872B (zh) * 2018-04-10 2020-03-10 天津科技大学 基于法布里-珀罗多光束干涉的三维尺寸精密测量方法
TWI663376B (zh) * 2018-06-26 2019-06-21 宏碁股份有限公司 三維感測系統
TWI805795B (zh) * 2018-07-20 2023-06-21 美商應用材料股份有限公司 基板定位設備與方法
DE102018118501A1 (de) * 2018-07-31 2020-02-06 Precitec Gmbh & Co. Kg Messvorrichtung zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung eines Abstands zwischen einem Laserbearbeitungskopf und einem Werkstück
US11719531B2 (en) 2018-10-30 2023-08-08 RD Synergy Ltd. Methods and systems of holographic interferometry
CN109506599A (zh) * 2018-12-21 2019-03-22 天活松林光学（广州）有限公司 一种非接触式平面度测量装置及测量方法
DE102019103814B3 (de) * 2019-02-14 2020-07-02 Hochschule Trier - Trier University of Applied Sciences Vorrichtung zum optischen Messen einer Oberfläche
GB2581834A (en) * 2019-03-01 2020-09-02 Elident Gmbh Process and apparatus for intra-oral holography imaging
CN109828261B (zh) * 2019-04-01 2022-02-01 南昌航空大学 大气激光雷达的探测方法及装置
CN109967388B (zh) * 2019-04-23 2024-03-01 无锡奥特维科技股份有限公司 检测装置和硅片分选设备
DE102019209213A1 (de) * 2019-06-26 2020-12-31 Q.ant GmbH Sensoranordnung zur Charakterisierung von Partikeln
TWI740224B (zh) * 2019-10-01 2021-09-21 台灣海博特股份有限公司 光資訊三維空間量測方法
CN111308547B (zh) * 2020-03-21 2022-09-27 哈尔滨工程大学 一种基于复合干涉仪的六维地震波测量装置
CN111721236B (zh) * 2020-05-24 2022-10-25 奥比中光科技集团股份有限公司 一种三维测量系统、方法及计算机设备
CN112097679B (zh) * 2020-09-10 2022-04-19 厦门海铂特生物科技有限公司 一种基于光信息三维空间测量方法
DE102020124521B3 (de) 2020-09-21 2021-09-30 Agrippa Holding & Consulting Gmbh Optische Vorrichtung und Verfahren zur Untersuchung eines Gegenstandes
JP7442145B2 (ja) * 2021-02-25 2024-03-04 Ckd株式会社 三次元計測装置
GB202214343D0 (en) * 2022-09-30 2022-11-16 Univ Nottingham Optical path length characterisation
US12487075B2 (en) 2024-04-18 2025-12-02 Saudi Arabian Oil Company Characterizing rock properties with optical energy sources in a wellbore

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541238A (en) * 1968-11-29 1970-11-17 Bell Telephone Labor Inc Real time three dimensional television system utilizing wave front reconstruction techniques
DE2546007B2 (de) * 1975-10-14 1977-12-29 Siemens AG, 1000 Berlin und 8000 München Faelschungssichere ausweiskarte und verfahren zu ihrer herstellung
US4583228A (en) * 1983-11-21 1986-04-15 At&T Bell Laboratories Frequency stabilization of lasers
US5127731A (en) * 1991-02-08 1992-07-07 Hughes Aircraft Company Stabilized two-color laser diode interferometer
WO2002080157A1 (fr) * 2001-03-30 2002-10-10 Sony Corporation Dispositif de reproduction optique et d'enregistrement sur disques optiques
US6809845B1 (en) 2002-09-25 2004-10-26 University Of South Florida Phase imaging using multi-wavelength digital holography
WO2004094942A2 (en) * 2003-04-23 2004-11-04 Ut-Battelle, Llc Recording multiple spatially-heterodyned direct to digital holograms in one digital image
JP4919790B2 (ja) * 2006-12-15 2012-04-18 シャープ株式会社 波長制御方法、ホログラム情報処理装置およびホログラム記録媒体
US20090040527A1 (en) * 2007-07-20 2009-02-12 Paul Dan Popescu Method and apparatus for speckle noise reduction in electromagnetic interference detection
US8068235B1 (en) 2007-07-24 2011-11-29 Lockheed Martin Corporation Systems and methods for multi-function coherent imaging
US9116504B2 (en) * 2010-09-07 2015-08-25 Dai Nippon Printing Co., Ltd. Scanner device and device for measuring three-dimensional shape of object
JP2012104586A (ja) * 2010-11-09 2012-05-31 Elpida Memory Inc 半導体計測装置
KR20130039005A (ko) * 2011-10-11 2013-04-19 (주)미래컴퍼니 3차원 형상 및 두께 측정 장치
CN102508362A (zh) * 2011-11-15 2012-06-20 深圳市光大激光科技股份有限公司 一种双光束耦合装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113899320A (zh) * 2021-09-30 2022-01-07 中国科学院光电技术研究所 一种基于空间结构光场的高精度微纳三维形貌测量方法
CN113899320B (zh) * 2021-09-30 2023-10-03 中国科学院光电技术研究所 一种基于空间结构光场的高精度微纳三维形貌测量方法

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