KR102024946B1 - In-line Test Handler - Google Patents

Abstract

Can reduce the load of the control server for controlling the inline test handler Inline test handler according to the present invention, a plurality of chamber unit is made a test process for the semiconductor device; At least one sorting unit connected in-line with the plurality of chamber units and accommodating a semiconductor device to be tested in a test tray or separating a semiconductor device from which a test is completed from the test tray; A main control server that divides the inline test handler into a plurality of cell regions, and generates a movement route for each cell region by dividing the movement paths to which the test tray is transferred by cell region; And a plurality of cell control servers controlling the movement of the test tray in each cell area according to the movement path for each cell area.

Description

In-line Test Handler}

The present invention relates to a test handler, and more particularly to an inline test handler.

Memory or non-memory semiconductor devices, module ICs, etc. (hereinafter referred to as "semiconductor devices") are manufactured through devices that perform various processes. One of these devices, a test handler, is a device for connecting a semiconductor device to a test apparatus so that the semiconductor device is tested, and performing a process of classifying the tested semiconductor device into classes according to test results. The semiconductor device is classified as a good product by the test result, and manufacture is completed.

1 is a schematic plan view of a test handler according to the prior art.

Referring to FIG. 1, a test handler 1000 according to the related art may include a loading unit 1100 for accommodating a semiconductor device contained in a customer tray into a test tray 200, and test equipment for semiconductor devices stored in a test tray 200. The test unit 1200 to be connected to, and the unloading unit 1300 for classifying the tested semiconductor device according to the test result according to the class and stored in the customer tray.

The loading unit 1100 performs a loading process of accommodating a semiconductor device to be tested in the test tray 200. The loading unit 1100 includes a loading stacker 1110 for storing a customer tray containing a semiconductor device to be tested, and a loading picker 1120 for transferring the semiconductor device to be tested from the customer tray to the test tray 200. . The test tray 200 is transferred to the test unit 1200 when the semiconductor device to be tested is accommodated.

The test unit 1200 performs a test process of connecting the semiconductor device accommodated in the test tray 200 to the test equipment 400. Accordingly, the test equipment 400 is electrically connected to the semiconductor device housed in the test tray 200, thereby testing the semiconductor device housed in the test tray 200. When the test for the semiconductor device is completed, the test tray 200 is transferred to the unloading unit 1300.

The unloading unit 1300 performs an unloading process of separating the tested semiconductor device from the test tray 200. The unloading unit 1300 may include an unloading stacker 1310 for storing a customer tray for containing the tested semiconductor device, and an unloading picker 1320 for transferring the tested semiconductor device from the test tray 200 to the customer tray. ). When the test tray 200 becomes empty as the tested semiconductor device is transferred to the customer tray, the empty test tray 200 is transferred to the loading unit 1100 again.

As described above, the test handler 1000 according to the related art sequentially performs the loading process, the test process, and the unloading process while circularly moving the test tray 200 in one apparatus. The test handler 1000 according to the related art has the following problems.

First, according to the recent technology development, the time required for the loading unit 1100 to perform the loading process on the basis of one test tray 200 is shortened. On the other hand, the test equipment 400 is increasing the time required to perform the test process on the basis of one test tray 200 due to the variety of semiconductor devices, the structure of the semiconductor device is complicated.

Accordingly, the test process based on one test tray 200 takes longer than the loading process. Therefore, the test handler 1000 according to the related art does not immediately transfer the test tray 200 in which the loading process is completed to the test unit 1200, and the test tray until the test process is completed in the test unit 1200. Since 200 has to wait in the loading unit 1100, there is a problem that the working time is delayed. As the test tray 200 waits for the loading unit 1100, the test handler 1000 according to the related art performs the loading process for the loading unit 1100 to the next test tray 200. There is also a problem that the time it takes to delay.

Second, as in the loading process, the time taken by the unloading unit 1300 to perform the unloading process is also shortened. However, as described above, since the test tray 200 has to wait in the loading unit 1100 until the test process is completed, the test handler 1000 according to the related art has a test tray 200 in which the unloading process is completed. It may not be immediately transferred to the loading unit 1100, the test tray 200 must be waited in the unloading unit 1300. Accordingly, the test handler 1000 according to the related art has a problem in that the time taken until the unloading unit 1100 performs the unloading process on the next test tray 200 is delayed.

Third, the test handler 1000 according to the related art works even if a failure occurs in only one of the loading unit 1100, the test unit 1200, and the unloading unit 1300, and the rest of the components that operate normally also work. There is a problem that can not be performed.

The present invention has been made to solve the problems described above, and provides an inline test handler that can prevent the work time is delayed even if a difference in the time taken to perform each of the loading process, unloading process and the test process occurs. It is to.

The present invention is to provide an inline test handler and an inline test handler that can prevent affecting the overall working time even if a failure occurs in at least one of the devices that perform each of the loading process, the test process and the unloading process. .

The present invention is to provide an inline test handler that can reduce the load of the control server for controlling the inline test handler.

The present invention is to provide an inline test handler in which the control server for controlling the inline test handler is duplicated.

The present invention is to provide an inline test handler that can set the movement path of the target chamber unit and the test tray to minimize the working time of the test tray in each of the loading process, the test process, and the unloading process.

An object of the present invention is to provide an inline test handler capable of adaptively responding to a change in state of a chamber unit generated during transfer of a test tray.

In order to solve the problems as described above, the present invention may include the following configuration.

An inline test handler according to the present invention includes a plurality of chamber units in which a test process is performed on a semiconductor device; At least one sorting unit connected in-line with the plurality of chamber units and accommodating a semiconductor device to be tested in a test tray or separating a semiconductor device from which a test is completed from the test tray; A main control server that divides the inline test handler into a plurality of cell regions, and generates a movement route for each cell region by dividing the movement paths to which the test tray is transferred by cell region; And a plurality of cell control servers controlling the movement of the test tray in each cell area according to the movement path for each cell area.

According to the present invention can achieve the following effects.

According to the present invention, even if a difference occurs in the time required to perform each of the loading process, the unloading process, and the test process, the working time can be prevented from being delayed, thereby improving the manufacturing yield of the semiconductor device.

The present invention can prevent the entire system from stopping even if a failure occurs in any one of the devices that perform each of the loading process, the unloading process and the test process, thereby preventing a loss of working time.

The present invention can improve the ease of operation and the degree of freedom of arrangement of the device for performing the loading and unloading process and the device for performing the test process, and thus the ease of operation to expand or reduce the process line The additional cost of work can be reduced.

In addition, the present invention divides the inline test handler into a plurality of cell areas, and includes the cell control server for controlling each cell area and the main control server for integrated control of the cell control servers so that the inline test handler is controlled by the plurality of cell control servers. The distributed control can reduce the load of the control server.

In addition, the present invention has an effect that the in-line test handler can operate normally even if an accident occurs in the cell control server or the main control server by duplexing the cell control server and the main control server.

The present invention moves the test tray so that the test of the semiconductor device can be performed in the target chamber unit in which the waiting time of the test tray and the moving time of the test tray can be minimized in performing the loading process, the test process, and the unloading process. Setting up the route has the effect of minimizing the work time.

The present invention can transfer the test tray according to the reset movement path by resetting the movement path to which the test tray is transferred according to the state change information of the chamber unit transmitted from each cell control server during the transfer of the test tray. There is an effect that it can adapt to the change of state.

1 is a schematic plan view of a test handler according to the prior art
2A is a schematic block diagram of an inline test handler according to an embodiment of the present invention.
FIG. 2B is a block diagram schematically showing the configuration of the main control server shown in FIG. 2A; FIG.
FIG. 2C is a diagram illustrating a redundant structure of the main control server and the cell control server shown in FIG. 2A; FIG.
3a and 3b is a conceptual diagram for explaining the operation and effect of the spin apparatus according to the present invention
4 is a schematic plan view of an inline test handler including a spin apparatus in accordance with the present invention.
5 is a schematic perspective view of a spin apparatus according to the present invention;
6 is a schematic exploded perspective view of the spin apparatus according to the present invention;
7 to 12 are schematic side views for explaining the operation of the spin apparatus according to the present invention
13 and 14 are schematic bottom view for explaining the operation of the shock absorbing mechanism according to the present invention.
15 and 16 are schematic side views for explaining an embodiment in which the spin apparatus according to the present invention includes a lifting unit.
17 and 18 are schematic side views for explaining the operation of changing the transport path of the test tray by the spin apparatus according to the present invention
19 is a schematic plan view of a chamber unit according to the present invention;
20 and 21 is a conceptual diagram illustrating an embodiment of a chamber unit according to the present invention.
22 is a schematic plan view of the sorting unit according to the invention.
Figure 23 is a schematic side view of a conveyor unit according to the present invention
24 is a schematic top view of an inline test handler according to the present invention.

Hereinafter, an inline test handler according to the present invention will be described in detail with reference to the accompanying drawings.

2A is a block diagram schematically illustrating a configuration of an inline test handler 100 according to an embodiment of the present invention.

As shown in FIG. 2A, an inline test handler 100 according to an exemplary embodiment of the present invention may include a spin process 1 for rotating a test tray (not shown) and a test process for a semiconductor device housed in the test tray. It comprises a plurality of chamber unit 110, at least one sorting unit 120 for performing the loading and unloading process for the semiconductor device, and a conveyor unit 130 for transporting the test tray.

The sorting unit 120 is spaced apart from each of the chamber units 110. The conveyor unit 130 carries the test tray such that the test tray in which the loading process is completed in the sorting unit 120 is performed through at least one of the chamber units 110. In addition, the conveyor unit 130 carries the test tray such that the test tray, which has been completed by the test process through at least one of the chamber units 110, is unloaded from the sorting unit 120. That is, the conveyor unit 130 connects the chamber units 110 and the sorting unit 120 in-line.

Accordingly, the inline test handler 100 according to the present invention may independently perform the test process of the chamber units 11 for the sorting unit 120 to perform the loading process and the unloading process. have. Therefore, the inline test handler 100 according to the present invention can achieve the following effects.

First, since the inline test handler 100 according to the present invention sets the movement path of the test tray so as to minimize the waiting time and the movement time of the test tray before starting the operation, and transfers the test tray according to the set movement path, Time can be minimized.

Second, since the in-line test handler 100 according to the present invention can independently perform the test process for the loading process and the unloading process, any of the chamber units 110 and the sorting unit 120. If one fails, the rest of the working devices can continue to work. Accordingly, the inline test handler 100 according to the present invention prevents the entire system from stopping when a failure occurs in any one of the chamber units 110 and the sorting unit 120, thereby reducing work time. You can prevent it.

Third, the in-line test handler 100 according to the present invention allows the semiconductor devices accommodated in the test trays in the chamber units 110 to be tested in the same arrangement with each other by using the spin apparatus 1. It is possible to remove the limitation that the 110 must be installed so that they all face the same direction. Accordingly, the inline test handler 100 according to the present invention may improve the ease and freedom of operation of arranging the chamber units 110. In addition, the inline test handler 100 according to the present invention may be implemented in a configuration of minimizing a copper wire for transporting the test tray 200 between the sorting unit 120 and the chamber unit 110.

Fourth, the inline test handler 100 according to the present invention can freely rearrange the chamber unit 110 regardless of the direction when expanding or contracting the process line by adding or removing the chamber unit 110, the process The ease of operation of expanding or contracting the line can be improved.

Fifth, since the sorting unit 120 and the chamber unit 110 are configured as separate devices, the inline test handler 100 according to the present invention reduces the number of devices or devices installed in the sorting unit 120. Can be. Accordingly, the inline test handler 100 according to the present invention may reduce the jam rate for the sorting unit 120. Therefore, the inline test handler 100 according to the present invention increases the operating time for the sorting unit 120 by reducing the time that the sorting unit 120 stops as the jam occurs in the sorting unit 120. You can.

In particular, the inline test handler 100 according to the present invention is a control server as shown in Figure 2a to reduce the load of the control server generated during the control of the inline test handler, the main control server 101 and a plurality of cell control server It is implemented at 102.

Specifically, the main control server 101 divides the inline test handler 100 into a plurality of cell areas 102a, matches each cell area 102a with the cell control server 102b in a 1: 1 manner, and controls the cells. The server 102b controls the cell area 102a matched with itself.

According to this configuration, the control of each cell area 102a is performed by the cell control server 102b matching the cell area 102a, so that the inline test handler 100 can be distributedly controlled. The load can be reduced.

For the implementation of this embodiment, the inline test handler 100 according to the present invention is provided with a plurality of identifications for checking whether the test tray enters or exits each cell region 102a, as shown in FIG. 2A. The information confirmation unit 103 further includes.

Hereinafter, each configuration of the inline test handler 100 will be described in more detail. Hereinafter, the main control server 101, the cell control server 102b, and the identification information checking unit 103, which are the key features of the present invention, will be described first, and then the remaining components will be described.

The main control server 101 divides the inline test handler 100 into a plurality of cell regions 102a. In an exemplary embodiment, the main control server 101 may divide the inline test handler 100 into a plurality of cell regions 102a such that a predetermined number of chamber units 110 are included in one cell region 102a. . At this time, since the chamber units 110 are connected inline with each other through the conveyor unit 130, each cell region 102a includes a conveyor unit 130. In addition, since the chamber units 110 are also connected inline with the sorting unit 120, the sorting unit 120 may be included in each cell region 102a. On the other hand, the main control server 101 may configure one cell area 102a with only one sorting unit 120 and the conveyor unit 130.

On the other hand, the main control server 101 sets the movement path of the test tray on the inline test handler 100, and generates the movement path for each cell area by dividing the set movement path by cell area 102a.

That is, the main control server 101 sets the movement path of the test tray, selects the cell regions 102a included in the set movement paths, and divides the set movement paths by the cell regions 102a. Create

For example, when there are four cell regions 102a included in the set movement route, the main control server 101 generates four movement regions for each cell region by dividing the set movement route into four cell regions.

Thereafter, the main control server 101 transmits the movement path for each cell area to the cell control server 102b that controls the cell area 102a.

In one embodiment, the main control server 101, when a test tray transfer control authority request from the cell control server 102b that controls the cell area 102a is received, the cell area to the cell control server 102b. By transmitting the transfer control authority including the respective movement path and the token for the transfer control of the test tray, the corresponding cell control server 102b can control the transfer of the test tray in the cell area 102b.

In addition, when the main control server 101 receives the handover request of the test tray transfer control authority from the cell control server 102b, the cell control server 102b recovers the transfer control authority of the cell control server 102b. It is no longer possible to control the transport of the test tray.

According to this embodiment, only the cell control server 102b holding the token can control the transfer of the test tray.

As described above, the main control server 101 according to the present invention calculates the entire movement path of the test tray, but divides the entire movement path by each cell area and regenerates the movement path for each cell area to each cell control server 102b. It is possible to reduce the load by providing each cell control server 102b to control the transfer of the test tray.

In one embodiment, the main control server 101, in setting the movement path of the test tray, selects a destination to which the test tray is to be transferred on the inline test handler 10, and based on the selected destination, the movement path of the test tray. Set. Here, the main control server 101 may select a next chamber unit (hereinafter, referred to as a “target chamber unit”) to which the test tray is to be transferred among the plurality of chamber units 110 as a destination to which the test tray is to be transferred. . In this case, a plurality of such target chamber units may be selected according to the type of test to be performed on the semiconductor device.

In particular, the main control server 101 according to the present invention in real time whether the change of the target chamber unit is necessary based on the monitoring result of the state change of the chamber unit transmitted from each cell control server 102b selected during the transfer of the test tray. To judge. If it is determined that the target chamber unit needs to be changed, the main control server 101 selects a new target chamber unit and resets the movement path of the test tray based on the selected new target chamber unit. It is possible to adaptively cope with the change in the state of the target chamber unit, resulting in minimizing the work delay.

The configuration of the main control server 101 will be described in more detail with reference to FIG. 2B.

Figure 2b is a block diagram schematically showing the configuration of the main control server according to an embodiment of the present invention.

As shown in Figure 2b, the main control server 101 according to an embodiment of the present invention is the interface unit 104, the target chamber unit selection unit 105, the movement path setting unit 106, the movement path for each cell region The generation unit 107 and the transfer control authority management unit 108 may be further included, and may further include a database 109.

First, the interface unit 104 may include other components (eg, the spin apparatus 1 and the chamber unit 110) in which the main control server 101 is included in the cell control server 102b and the inline test handler 100. , So that the sorting unit 120, the conveyor unit 130, or the identification information check unit 103 can be connected.

In addition, the interface unit 104 receives the information indicating that the semiconductor device to be tested is stored in the test tray from the sorting unit 120 and transmits the information to the target chamber unit selector 104 so that the target chamber unit selector 105 receives the corresponding test. It is possible to select a target chamber unit for setting the movement path of the tray. In this case, the information that the semiconductor device to be tested is stored in the test may include identification information of the test tray, and the identification information of the test tray may be identified by the identification information confirming unit 103 that is installed to match the sorting unit 120. Can be obtained.

In particular, when the interface control unit 104 according to the present invention receives a transfer control authority request from each cell control server 102b, the interface unit 104 transfers the transfer control authority management unit 108 to the transfer control authority management unit 108 and transmits the cell from the transfer control authority management unit 108. Receives a transfer control authority including a movement path for each zone and a token for controlling transfer of the test tray and transmits it to the cell control server 102b.

When the transfer control authority handover request is received from each cell control server 102b, the interface unit 104 transfers the transfer control authority handover request to the transfer control authority management unit 108 so that the transfer control authority management unit 108 transfers the transfer control authority hand. Allows the token included in the over request to be retrieved.

Next, when the target chamber unit selector 105 receives the information that the semiconductor device to be tested is stored in the test tray, the target chamber unit selector 105 selects the target chamber unit 110 to which the corresponding test tray is to be transferred. Choose.

In one embodiment, the target chamber unit selection unit 105 is a chamber unit 110 in the test type for the semiconductor element contained in the test tray, the available state of each chamber unit 110, and the position of the test tray. The target chamber unit may be selected from among the plurality of chamber units 110 based on the distance to).

For example, the target chamber unit selector 105 obtains the information of the semiconductor device stored in the test tray and the test type for the semiconductor device from the identification information of the test tray received from the interface unit 104, and the plurality of chambers. Among the units, the chamber units capable of performing the corresponding test type are first selected. Thereafter, the target chamber unit selector 105 secondarily selects chamber units having a utilization rate equal to or less than a predetermined reference value among the first selected chamber units. Thereafter, the target chamber unit selector 105 selects a chamber unit located closest to the corresponding test tray position among the second selected chamber units as the target chamber unit. In this case, when there are a plurality of chamber units located closest to the test tray position, the target chamber unit selecting unit 105 may select a chamber unit having a lower utilization rate, or randomly select one when the utilization rate is also the same.

As another example, the target chamber unit selector 105 obtains the information of the semiconductor device stored in the test tray and the test types for the semiconductor device from the identification information of the test tray received from the interface unit 104, Among the chamber units, the chamber units capable of performing the test type are first selected. Thereafter, the target chamber unit selector 105 secondarily selects a chamber unit having a distance from the test tray position of the first selected chamber units less than or equal to the threshold value. Thereafter, the target chamber unit selecting unit 105 selects the chamber unit having the lowest utilization rate among the second selected chamber units as the target chamber unit. In this case, when there are a plurality of chamber units having the lowest utilization rate, the target chamber unit selecting unit 105 selects a chamber unit located closest to the test tray position, or randomly selects any one when the distance to the chamber unit is also the same. You can choose.

Meanwhile, when it is determined that a plurality of tests are to be performed on the semiconductor device, the target chamber unit selector 105 may select the target chamber unit 110 for each test to be performed. Therefore, in this case, the target chamber unit selector 105 selects a plurality of target chamber units 110.

In one embodiment, the target chamber unit selection unit 105 according to the present invention determines whether to change the target chamber unit 110 according to the chamber unit state conversion monitoring results transmitted from the cell control server 102b, the target If it is determined that the chamber unit 110 is to be changed, the target chamber unit 110 for the corresponding test tray is reselected.

For example, the ticket chamber unit selection unit 105 may perform a test on a semiconductor device stored in a test tray when a failure occurs in the target chamber unit 110, the utilization rate of the target chamber unit 110 increases by more than a reference value, or is stored in a test tray. When there is a chamber unit 110 having a lower utilization rate than the target chamber unit 110 among the available chamber units, or a test tray to be processed prior to the corresponding test tray is assigned to the selected target chamber unit 110. It is determined that the selected target chamber unit 110 is changed to a new target chamber unit 110.

  In this case, the reselecting of the target chamber unit 110 with respect to the corresponding test tray is because the state of the previously selected target chamber unit 110 is changed, so that the target chamber unit selecting unit 105 is selected from among the plurality of chamber units. The new target chamber unit 110 is determined in the chamber units other than the selected target chamber unit 110. Since the method of determining the new target chamber unit 110 by the target chamber unit selection unit 105 is the same as the method of selecting the previously selected target chamber unit 110, a detailed description thereof will be omitted.

Next, the movement path setting unit 106 sets the movement path of the test tray based on the target chamber unit 110 selected by the target chamber unit selection unit 105.

Specifically, the movement path setting unit 106 moves the test tray from the sorting unit 120 to the first movement path and the test tray for transferring the test tray from the sorting unit 120 to the target chamber unit 110. The movement path of the test tray configured as the second movement path for transferring up to may be set.

Meanwhile, when the plurality of target chamber units 110 are selected by the target chamber unit selection unit 105, the movement path setting unit 106 moves the test tray from the sorting unit 120 to the target chamber unit 110. The first movement path for moving the test tray from the target chamber unit 110 to the target chamber unit 110 on which the next test is to be performed, and the target chamber unit 110 on which the test tray was last tested. ) Can be set to the movement path of the test tray consisting of a third movement path for transferring to the sorting unit (120). According to this embodiment, when the movement path setting unit 106 sets the second movement path between the target chamber units 110, the information about the type of test to be performed is performed on the way through the target chamber units 110. And the distance to the target chamber unit 110 may be determined.

In addition, the movement path setting unit 106 selects a new target chamber unit 110 when the new target chamber unit 110 is selected for the test tray by the target chamber unit selection unit 105 during the transfer of the test tray. Reset the movement path of the corresponding test tray as a basis.

Thereafter, the movement path setting unit 106 stores the information of the selected target chamber unit 110 and the movement path of the set or reset test tray in the database 109 together with the identification information of the corresponding test tray, and set or reset The movement path is transferred to the movement path generation unit 107 for each cell area.

Next, the movement path generation unit 107 for each cell region divides the inline test handler 100 into a plurality of cell regions 102a. At this time, the movement path generation unit 107 for each cell area generates an identifier of the divided cell area 102a and matches the cell area 102a with the cell control server 102b to be managed. The movement path generation unit 107 for each cell region matches the identifier of the cell region 102a with the identifier of the cell control server 102b that will manage the cell region 102a and records it in the database 109.

In addition, the movement path generation unit 107 for each cell region generates a movement path for each cell region by dividing the movement path set by the movement path setting unit 106 for each cell cell region existing on the movement path. The cell path movement path generation unit 107 matches the identifier of the cell control server 102b that manages the cell area existing on the cell path with the cell path to be transmitted to the cell control server 102b. Record at 109.

Next, when the transfer control authority request unit 108 receives the transfer control authority request from the interface unit 104, the movement control for each cell area matched to the cell control server 102b that requested the transfer control authority from the database 109. Extracts and transfers the extracted movement path for each cell area to the interface unit 103 together with the token for controlling the transfer of the test tray and the identifier of the corresponding cell control server 102b.

In addition, when the transfer control authority handover request is received from the interface 104, the transfer control authority management unit 108 collects the tokens included in the transfer control authority handover request, and newly transfers the tokens to which the collected tokens are requested. Transfer to control server 102b.

As described above, the transfer control authority management unit 108 according to the present invention transmits the token area for controlling the transfer of the test tray according to the transfer control authority request and the transfer control authority handover request transmitted from the cell control server 102b. By transmitting to the cell control server 102b along with the separate movement path, only the cell control server 102b having the token can control the transfer of the test tray.

Next, in the database 109, the identifier of each cell area 102a is recorded matching with the identifier of the cell control server 102b which manages each cell area 102b.

In addition, the database 109 records the identification information of the test tray matched with the identification information of the target chamber unit selected for the test tray and the set or reset movement path.

In addition, the database 109 records the identification information of the test tray in correspondence with the identifier and the movement path for each cell area generated for the test tray and the cell control server 102b that manages the cell area.

As described above, the in-line test handler 100 according to the present invention provides an optimal moving path to which the test tray is to be transported during the loading process, the test process, and the unloading process to the test type, the state of the chamber unit, or the chamber unit. Since the distance can be determined in advance, the waiting time of the test tray and the moving time of the test tray can be minimized, thereby minimizing the working time.

In addition, the inline test handler 100 according to the present invention, the main control server 101 generates the movement path of the test tray and the movement path for each cell area, and the transfer control of the test tray according to the generated movement path is each cell control server Since it is performed by the 102b, it is possible to reduce the load of the main control server 101.

In addition, the inline test handler 100 according to the present invention is a target chamber unit 110 previously selected from the cell control server 102b based on the state change monitoring result of the chamber unit 110 included in the cell area 102a. If it is necessary to change whether the previously selected target chamber unit 110 needs to be changed, the previously selected target chamber unit 110 is changed to a new target chamber unit 110, and the new target chamber unit 110 moves on the basis of the new target chamber unit 110. By resetting the path, the test tray can adaptively respond to a change in the state of the target chamber unit 110 during the transfer.

Referring back to FIG. 2A, the plurality of cell control servers 102b monitor the state change of equipment included in the cell area 102a that they manage, and the test tray enters the cell area 102a that they manage. In this case, the transfer of the test tray is controlled in the cell area 102a.

Specifically, when the cell control server 102b checks the identification information of the test tray by the first identification information confirming unit 103 that is installed in correspondence with the cell control server 102b, the cell control server 102b enters into its cell area 102a. In response to the determination, the main control server 101 requests transfer control authority for the test tray. At this time, the transfer control authority request includes the identification information of the test tray.

When the cell control server 102b receives the transfer control right including the movement path and token for each cell area from the main control server 101, the cell control server 102b transfers the test tray based on the movement path for each cell area in the cell area 102a. To control.

Specifically, when the cell control server 102b receives the movement path for each cell area, the cell control server 102b generates an operation command for operating each conveyor unit 130 in which the corresponding test tray is located according to the received movement path for each cell area. By transferring to the conveyor unit 130, if the target chamber unit 110 for the test tray is located in its cell area 102a, the conveyor unit 130 brings the test tray into the target chamber unit 110. If the target chamber unit 110 is not located in the cell region 102a, the conveyor unit 130 moves the test tray out of its cell region 102a.

In addition, when the identification information of the test tray is confirmed by the second identification information confirming unit 103 that is installed in correspondence with the cell control server 102b, the test tray moves out of its cell area 102a. In response, the main control server 101 requests handover of the transfer control authority for the corresponding test tray. At this time, the transfer control authority handover request includes identification information of the corresponding test tray and a token for transfer control of the corresponding test tray. When the token is transferred to the main control server 101 through the transfer of the handover request of the transfer control authority, the corresponding cell control server 102b ends the transfer control of the test tray.

Meanwhile, the cell control server 102b monitors a state change of equipment (eg, a chamber unit) included in its cell area 102a at predetermined intervals or in real time and transmits the state control to the main control server 101. According to this embodiment, the main control server 101 determines whether or not to change the selected target chamber unit on the basis of the state change monitoring result of the chamber unit transmitted from the cell control server 102b, and if the target chamber unit is changed The movement path of the test tray is reset based on the target chamber unit.

In the above-described embodiment, it has been described that only the main control server 101 can reset the movement path of the test tray. However, in the modified embodiment, each cell control server 102b may also reset the movement path of the test tray. Can be.

Specifically, when the test tray enters the cell area 102a that the test tray manages, the cell control server 102b includes the target chamber unit 110 selected for the test tray in its cell area 102a. If not, change the target chamber unit 110 for the corresponding test tray to the chamber unit included in the cell area 102a according to the state of the chamber unit included in the cell area 102a. By resetting the movement path based on 110, the test tray may be loaded into the changed target chamber unit 110.

In addition, even if the cell control unit 102b includes the target chamber unit 110 for the test tray in its cell area 102a, the cell control server 102b moves the corresponding test tray to the target chamber unit according to the state of the target chamber unit 110. The test tray may be passed through the target chamber unit 110 by changing a moving path of the test tray without being carried in.

In this case, the specific method of changing the chamber unit 110 and the method of resetting the movement path of the test tray are the same as those performed by the main control server 101, and thus detailed description thereof will be omitted.

In one embodiment, as shown in Figure 2c, both the main control server 101 and the plurality of cell control server 102b as described above may be implemented in a redundant structure. That is, the main server 101 is implemented as two main control servers, one of which is driven in the standby mode and the other is operated in the standby mode, and in the standby mode when an error occurs in the active server in the active mode. The main controller server, which was being driven, transitions the state to the active mode to control the inline test handler 100.

In addition, each of the plurality of cell control servers 102b is also implemented as two cell control servers, when one is driven in the active mode, the other is driven in the standby mode, and an error occurs in the cell control server driven in the active mode. When it occurs, the cell control server, which has been driven in the standby mode, transitions the state to the active mode, thereby controlling and controlling each cell area 102a.

In the above-described embodiment, the functions of the main control server 101 and the cell control server 102b have been described in terms of movement of the test tray, but the present invention is not limited thereto, and the cell control server 102b has its own cell area 102a. By monitoring whether the failure of the included equipment, such as when the failure occurs to the main control server 101 so that the failure can be delivered to the operator.

In addition, the main control server 101 has a cell control server 102b in which a failure has occurred among the cell control server 102b, and the two cell control servers constituting the cell control server 102b are driven in the active mode. When a failure occurs in both the cell control server and the cell control server driven in the standby mode, the cell area 102a managed by the corresponding cell control server 102b may be directly controlled.

In addition, in the above-described embodiment, the main control server 101 and the plurality of cell control servers 102b have been described as being physically separated, but in the modified embodiment, the cell control server 102b uses the main control server 101. It may be implemented in the form of a plurality of processors operating within.

Referring again to FIG. 2A, the identification information confirming unit 103 is installed at each predetermined point on the inline test handler 100, recognizes identification information of the test tray transferred on the inline test handler 100, and recognizes the identification of the test tray. Whenever the identification information is recognized, the identification information of the recognized test tray is transmitted to the cell control server 102b.

In one embodiment, as shown in FIG. 2A, two identification information confirming units 102 are installed in each cell region 102a, one for confirming the entry of the test tray into the corresponding cell region 102a, The other is to check the advance of the test tray in the cell area 102a.

In addition, as shown in FIG. 2A, the identification information confirming unit 102 is installed to match the sorting unit 120 to display information indicating that the semiconductor device is stored in the test tray in the sorting unit 120. You can also pass it.

The identification information confirming unit 103 may be implemented using an RFID reader, a barcode reader, or a Bluetooth module. According to this embodiment, the test tray may be equipped with an RFID tag, a barcode, or a Bluetooth module including identification information of the test tray.

In this case, the test tray may be equipped with an RFID tag, a barcode, or a Bluetooth module including identification information of the test tray.

In one embodiment, the identification information of the test tray includes a basic ID and COK (Change Over Kit) information of the test tray. In this case, the COK information includes information such as the type of semiconductor device stored in the test tray or the type of test to be performed on the semiconductor device stored in the test tray.

The spin apparatus 1 is for rotating the test tray in the inline test handler 100. Here, as shown in FIG. 2A, the inline test handler 100 includes a first chamber unit 111 and a second chamber unit 112 spaced apart from each other to face different directions. . The spin apparatus 1 according to the present invention rotates the test tray 200 carried between the first chamber unit 111 and the second chamber unit 112 spaced apart from each other to face different directions. Accordingly, the spin apparatus 1 according to the present invention may be implemented such that the semiconductor devices accommodated in the test tray 200 in the first chamber unit 111 and the second chamber unit 112 are tested in the same arrangement. have.

Hereinafter, the spin apparatus 1 will be described in detail.

First, as shown in FIGS. 3A and 3B, the first chamber unit 111 and the second chamber unit 112 may be spaced apart from each other to face in opposite directions. In this case, unless the test tray 200, which is carried out from the first chamber unit 111 and supplied to the second chamber unit 112, is not rotated, the semiconductor devices accommodated in the test tray 200 are stored in the first chamber. The unit 111 and the second chamber unit 112 are tested in different arrangements. To clearly illustrate this, any one of semiconductor devices 300 of the semiconductor devices accommodated in the test tray 200 is shown as hatched rectangles in FIGS. 3A and 3B.

As shown in FIG. 3A, the test tray 200 is connected to the semiconductor device (111) in the first chamber unit 111 based on the direction in which the first chamber unit 111 is viewed from the front (A arrow direction). The test process is performed with 300) positioned on the upper left side. However, if the test tray 200 carried out from the first chamber unit 111 is not rotated, the second chamber is based on a direction (B arrow direction) facing the second chamber unit 112 from the front. In the unit 112, the test tray 200 may perform a test process with the semiconductor device 300 positioned below the right side. That is, the semiconductor devices accommodated in the test tray 200 are tested in different arrangements in the first chamber unit 111 and the second chamber unit 112.

Accordingly, the sorting unit 120 has a problem in that it is difficult to separate the semiconductor device 300 by grade in performing the unloading process. The grade according to the test process performed in the chamber unit 110 is given based on the coordinates at which the semiconductor device is located, and the semiconductor device 300 is tested at the first coordinate C1 in the first chamber unit 111. This is because the second chamber unit 112 is tested at a second coordinate C2 different from the first coordinate C1. Accordingly, since the grades of the semiconductor devices positioned in the first coordinate C1 in the first chamber unit 111 and the second chamber unit 112 are given to different semiconductor devices, the sorting unit ( 120 may not accurately perform the unloading process.

In order to solve this problem, the spin apparatus 1 according to the present invention tests the semiconductor devices accommodated in the test tray 200 in the first chamber unit 111 and the second chamber unit 112 in the same arrangement. The test tray 200 is rotated so as to.

Accordingly, as shown in FIG. 3B, the test tray 200 is connected to the first chamber unit 111 based on the direction (A arrow direction) facing the first chamber unit 111. The test process is performed with the semiconductor device 300 positioned on the upper left side. In addition, in the second chamber unit 112, the test tray 200 has a corresponding semiconductor element 300 on the left upper side of the second chamber unit 112 based on the direction of looking at the front side of the second chamber unit 112. The test process is performed in the positioned state. That is, the semiconductor device 300 is tested in a state in which the first chamber unit 11 and the second chamber unit 112 are positioned at the same first coordinate C1. As such, the semiconductor devices accommodated in the test tray 200 are tested in the same arrangement in the first chamber unit 111 and the second chamber unit 112.

Therefore, the spin apparatus 1 according to the present invention allows the semiconductor elements accommodated in the test tray 200 in the first chamber unit 111 and the second chamber unit 112 to be tested in the same arrangement, thereby sorting the sorting. The accuracy and ease of the unloading process performed by the unit 120 may be improved. In addition, the spin apparatus 1 according to the present invention can achieve the following effects.

First, the spin apparatus 1 according to the present invention allows the semiconductor devices accommodated in the test tray 200 in the chamber units 110 to be tested in the same arrangement, and thus, the chamber in the inline test handler 100. It is possible to remove the restriction that the units 110 must be installed so that they all face the same direction. Accordingly, the spin apparatus 1 according to the present invention may improve the ease and freedom of the work of arranging the chamber units 110 in the inline test handler 100. In addition, the spin apparatus 1 according to the present invention is arranged in such a way that the inline test handler 100 minimizes the copper wire for transporting the test tray 200 between the sorting unit 120 and the chamber unit 110. Can contribute to implementation.

Second, the spin apparatus 1 according to the present invention, when the in-line test handler 100 adds or removes the chamber unit 110 to expand or contract the process line, regardless of the direction of the chamber unit 110. Since it can be rearranged freely, it is possible to improve the ease of operation to expand or shrink the process line.

Third, the spin apparatus 1 according to the present invention allows the semiconductor devices accommodated in the test tray 200 in the chamber units 110 to be tested in the same arrangement, so that the loading process, the unloading process and the test are performed. In consideration of the time taken to perform each process, the conveyor unit 130 may be implemented to distribute the test tray 200 efficiently regardless of the direction in which the chamber units 110 are installed. Accordingly, the spin apparatus 1 according to the present invention can contribute to improving the equipment operation rate in the inline test handler 100 and reducing the time taken for the loading process, the test process and the sorting process to be completed for the semiconductor device. have.

To this end, the spin apparatus 1 according to the present invention may include the following configuration.

4 to 6, the spin apparatus 1 according to the present invention includes a support mechanism 2 for supporting the test tray 200, and a base mechanism 3 rotatably coupled to the support mechanism 2. And a rotation mechanism 4 (shown in FIG. 6) for rotating the support mechanism 2 to rotate the test tray 200 supported by the support mechanism 2.

The support mechanism 2 supports the test tray 200 (shown in FIG. 4) carried out from the chamber units 110 (shown in FIG. 4). The support mechanism 2 may support the test tray 200 carried out from the first chamber unit 111 (shown in FIG. 4). In this case, the test tray 200 is carried out from the first chamber unit 111 and rotated while being supported by the support mechanism 2, and then the second tray unit 112 (shown in FIG. 4) is rotated. Can be supplied. The support mechanism 2 may support the test tray 200 carried out from the second chamber unit 112. In this case, the test tray 200 may be removed from the second chamber unit 112, rotated while being supported by the support mechanism 2, and then supplied to the first chamber unit 111.

The support mechanism 2 may be installed to be positioned between the first chamber unit 111 and the second chamber unit 112. The support mechanism 2 may connect the first chamber unit 111 and the second chamber unit 112 in-line via the conveyor unit 130 (shown in FIG. 4). For example, the conveyor unit 130 may include a first conveyor mechanism 131 (shown in FIG. 4) connecting the first chamber unit 111 and the sorting unit 120 inline, and the second chamber unit ( 112 may include a second conveyor mechanism 132 (shown in FIG. 4) that connects the sorting unit 120 inline. In this case, the support mechanism 2 is installed between the first conveyor mechanism 131 and the second conveyor mechanism 132, thereby providing the first conveyor mechanism 131 and the second conveyor mechanism 132. You can connect inline. Accordingly, the support mechanism 2 may connect the first chamber unit 111 and the second chamber unit 112 inline.

The support mechanism 2 may include a passage hole 21 through which the test tray 200 passes. By the through hole 21, the support mechanism 2 may be formed in a form in which one side is open. The test tray 200 may be carried into the support mechanism 2 through the through hole 21, and may be carried out from the support mechanism 2.

The support mechanism 2 may include guide members 22 and 22 ′ for guiding the movement of the test tray 200. Both sides of the test tray 200 may be inserted into the guide members 22 and 22 'to move along the guide members 22 and 22'. Accordingly, the spin apparatus 1 according to the present invention provides the accuracy of the process of bringing the test tray 200 into the support mechanism 2 and the process of carrying out the test tray 200 from the support mechanism 2. Can be improved. The guide members 22 and 22 'may also perform a function of supporting the test tray 200 in parallel. The guide members 22 and 22 'may be formed in the form of digital devices.

4 to 6, the base mechanism 3 supports the support mechanism 2. The support mechanism 2 is rotatably coupled to the base mechanism 3. The support mechanism 2 may be rotatably coupled to the base mechanism 3 via a bearing (not shown). The base mechanism 3 is coupled to the body 10. The main body 10 has the support mechanism 2 at a height at which a test tray 200 (shown in FIG. 4) can be transferred between the support mechanism 2 and the conveyor unit 130 (shown in FIG. 4). It can support the base mechanism (3) to be located. The main body 10 includes the base mechanism such that the support mechanism 2 is positioned between the first conveyor mechanism 131 (shown in FIG. 4) and the second conveyor mechanism 132 (shown in FIG. 4). 3) can be supported.

3 to 6, the rotation mechanism 4 is installed in the base mechanism 3. The rotary mechanism 4 may rotate the support mechanism 2. Accordingly, the rotation mechanism 4 may rotate the test tray 200 supported by the support mechanism 2. Accordingly, the rotation mechanism 4 rotates the test tray 200 such that the semiconductor devices accommodated in the test tray 200 are tested in the same arrangement in the first chamber unit 111 and the second chamber unit 112. You can.

The rotating mechanism 4 may be installed to be located below the base mechanism 3. In this case, the base mechanism 3 may be installed to be located between the rotary mechanism 4 and the support mechanism 2. The rotary mechanism 4 may be coupled to the support mechanism 2 through the base mechanism 3. The rotating mechanism 4 is supported by the support mechanism 2 about a rotation axis 4a (shown in FIG. 6) formed in the vertical direction (Z-axis direction) from the base mechanism 3 toward the support mechanism 2. Can be rotated. Accordingly, the rotary mechanism 4 can rotate while maintaining the test tray 200 in a horizontal state.

As shown in FIG. 3B, when the first chamber unit 111 and the second chamber unit 112 are installed to face in opposite directions to each other, the rotating mechanism 4 and 6 shown in FIG. The tray 200 may be rotated 180 degrees. Accordingly, the test tray 100 may be supplied to the second chamber unit 112 in a direction reversed by 180 degrees as compared with when it is carried out from the first chamber unit 111. Therefore, the rotating mechanism 4 may allow the semiconductor devices accommodated in the test tray 200 to be tested in the same arrangement in the first chamber unit 111 and the second chamber unit 112.

Although not shown, when the first chamber unit 111 and the second chamber unit 112 are installed to face different directions at a 90 degree angle, the rotating mechanism 4 rotates the test tray 200 by 90 degrees. Can also be rotated. That is, the rotation mechanism 4 may rotate the test tray 200 at an angle corresponding to the angle formed by the first chamber unit 111 and the second chamber unit 112 in different directions. have. The rotation mechanism 4 may rotate the test tray 200 in a clockwise or counterclockwise direction about the rotation shaft 4a (shown in FIG. 6).

The rotary mechanism 4 may include a motor (not shown) for generating a rotational force for rotating the support mechanism (2). The motor may be directly coupled to the support mechanism 2 to rotate the support mechanism 2. When the motor and the support mechanism 2 are spaced apart from each other by a predetermined distance, the rotation mechanism 4 may further include connecting means for connecting the motor and the support mechanism 2. The connecting means may be a pulley and a belt.

3, 6 to 12, the spin apparatus 1 according to the present invention may further include a transfer mechanism 5 installed in the support mechanism 2 to transfer the test tray 200. have.

The transfer mechanism 5 transfers the test tray 200 carried out from the first chamber unit 111 (shown in FIG. 4) to the support mechanism 2. The transfer mechanism 5 may transfer the test tray 200 carried out from the first conveyor mechanism 131 (shown in FIG. 4) to the support mechanism 2. In this case, the test tray 200 carried out from the first conveyor mechanism 131 is carried out from the first chamber unit 111. When the test tray 200 is supported by the support mechanism 2, the rotary mechanism 4 rotates the support mechanism 2 to rotate the test tray 200 supported by the support mechanism 2.

The transfer mechanism 5 is a test tray from the support mechanism 2 such that the test tray 200 rotated by the rotation mechanism 4 is supplied to the second chamber unit 112 (shown in FIG. 4). Export 200). The transfer mechanism 5 may carry out the test tray 200 rotated by the rotation mechanism 4 to the second conveyor mechanism 132 (shown in FIG. 4). In this case, the test tray 200 carried out from the second conveyor mechanism 131 may be supplied to the second chamber unit 111.

As described above, the spin apparatus 1 according to the present invention tests the semiconductor devices accommodated in the test tray 200 in the first chamber unit 111 and the second chamber unit 112 to be tested in the same arrangement. In addition to rotating the tray 200, a function of transporting the test tray 200 between the first chamber unit 111 and the second chamber unit 112 may be performed. In the above description, a case in which the test tray 200 is carried out from the first chamber unit 111 and supplied to the second chamber unit 112 has been described. However, the transfer mechanism 5 may include the second chamber unit 112. Rotation and transfer may also be performed on the test tray 200 which is carried out from the first tray unit 111 and is supplied to the first chamber unit 111.

3, 6 to 12, the transfer mechanism 5 is an insertion member 51 (shown in FIG. 6) to be inserted into the test tray 200, and the lifting member to which the insertion member 51 is coupled. The member 52 (shown in FIG. 6), the elevating mechanism 53 (shown in FIG. 6) for elevating the elevating member 52, and the drive mechanism 54 for moving the elevating mechanism 53. , As shown in FIG. 6).

The insertion member 51 is formed to protrude from the elevating member 52 in an upward direction (D arrow direction, shown in FIG. 7) from the base mechanism 3 toward the support mechanism 2. When the elevating mechanism 53 raises the elevating member 52, the insertion member 51 is inserted into a transfer groove 210 (shown in FIG. 7) formed in the test tray 200. Accordingly, the test tray 200 is in a state that can be transferred as the insertion member 51 moves. When the elevating mechanism 53 lowers the elevating member 52, the insertion member 51 is separated from the conveying groove 210. Accordingly, the test tray 200 is in a state that can be carried out from the support mechanism 2 to the conveyor unit 130 (shown in FIG. 3B) without being disturbed by the insertion member 51. In addition, the test tray 200 may be transferred from the conveyor unit 130 to the support mechanism 2 without being disturbed by the insertion member 51.

The insertion member 51 may be formed in a cylindrical shape as a whole, but is not limited thereto. If the insertion member 51 is inserted into the transfer groove 210 or may be separated from the transfer groove 210, the insertion member 51 may be formed in another form such as a rectangular parallelepiped. It may be. The transfer mechanism 5 may include a plurality of insertion members 51. In this case, the insertion members 51 may be formed to be spaced apart from each other by a predetermined distance. 6, the transfer mechanism 5 is illustrated as including three insertion members 51, but is not limited thereto. The transfer mechanism 5 may include two or four or more insertion members 51. It may be. The test tray 200 may include a transfer groove 210 having a number approximately equal to the number of the insertion members 51.

The elevating member 52 is coupled to the elevating mechanism 53. The insertion member 51 is coupled to the lifting member 52. Accordingly, when the elevating mechanism 53 raises the elevating member 52, the insertion member 51 is raised together. When the elevating mechanism 53 lowers the elevating member 52, the insertion member 51 is lowered together. The lifting member 52 may include a supporting member 521 to which the insertion member 51 is coupled, and a supporting member 522 for supporting the test tray 200.

The support member 521 is coupled to the lifting mechanism 53. The insertion member 51 is formed in the support member 521 to protrude from the support member 521 in the upper direction (D arrow direction). The support member 521 may be formed in a rectangular plate shape as a whole.

The support member 522 is coupled to the support member 521. The support member 522 is coupled to the support member 521 to protrude from the support member 521 in the upward direction (D arrow direction). The support member 522 supports the side of the test tray 200 supported by the support mechanism 2 when the rotation mechanism 4 rotates the support mechanism 2. The separation by centrifugal force can be prevented. The support member 522 may support the test tray 200 such that the test tray 200 transferred to the support mechanism 2 by the conveyor unit 130 is stopped at the loading position. The loading position is a position where the transfer groove 210 of the test tray 200 is positioned above the insertion member 51. That is, the support member 522 may function as a stopper for the test tray 200 to stop the test tray 200 accurately at the loading position.

The support member 522 and the support member 521 may be integrally formed. By the support member 522 and the support member 521, the lifting member 52 may be formed in the shape of a needle. The support member 522, the support member 521, and the insertion member 51 may be integrally formed.

The lifting mechanism 53 is coupled to the drive mechanism 54. The elevating mechanism 53 may elevate the elevating member 52. The lifting mechanism 53 may insert the insertion member 51 into the transfer groove 210 by raising the lifting member 52 when the test tray 200 is positioned at the carrying position. When the rotating mechanism 4 rotates the support mechanism 2 to rotate the test tray 200 supported by the support mechanism 2, the lifting mechanism 53 lowers the lifting member 52. The insertion member 51 may be separated from the transfer groove 210.

The lifting mechanism 53 is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, etc., a motor and a rack gear and a pinion gear, etc. The elevating member 52 may be elevated by using a gear method, a belt method using a motor, a pulley, a belt, or the like, or a linear motor using a coil, a permanent magnet, or the like.

The drive mechanism 54 moves the lifting mechanism 53. As the lifting mechanism 53 moves, the lifting member 52 and the insertion member 51 move. The drive mechanism 54 is coupled to the support mechanism 2. The driving mechanism 54 may move the lifting mechanism 53 so that the test tray 200 located at the loading position is transferred to the rotation position. The rotation position is a position where the test tray 200 is located inside the support mechanism 2 and does not protrude from the support mechanism 2. Accordingly, when the rotary mechanism 4 rotates the support mechanism 2, it is possible to prevent the test tray 200 from colliding with another mechanism. When the rotary mechanism 4 rotates the test tray 200 located at the rotational position, the driving mechanism 54 moves the lifting mechanism (the lift mechanism) such that the test tray 200 located at the rotational position is transported to the unloading position. 53) can be moved. The carrying out position is a position where the test tray 200 can be taken out from the support mechanism 2 by the conveyor unit 130.

The drive mechanism 54 is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, a belt using a motor, a pulley and a belt, and the like. The lifting mechanism 53 may be moved using a linear motor using a method, a coil, a permanent magnet, or the like. The driving mechanism 54 may include an LM Guide Rail and an LM Guide Block for guiding the lifting mechanism 53 to linearly move. The LM guide rail may be coupled to the support mechanism 2. The LM guide block is linearly coupled to the LM guide rail. The lifting mechanism 53 may be coupled to the LM guide block.

As described above, the feed mechanism 5 and the rotation mechanism 4 including the insertion member 51, the lifting member 52, the lifting mechanism 53, and the driving mechanism 54 are as follows. It can work.

First, when the first conveyor mechanism 131 (shown in FIG. 4) carries the test tray 200 to the support mechanism 2, as shown in FIG. 7, the drive mechanism 54 moves the elevator. The sphere 53 is moved toward the first conveyor mechanism 131 (shown in FIG. 4). In this case, the lifting mechanism 53 is in a state in which the lifting member 52 is lowered so that the insertion member 51 does not collide with the test tray 200. The elevating mechanism 53 is provided with the elevating member (a) such that the support member 522 can support the side of the test tray 200 without the insertion member 51 colliding with the test tray 200. 52) height can also be adjusted. Accordingly, the support member 522 may support the test tray 200 such that the test tray 200 stops accurately at the loading position.

Next, when the test tray 200 is located in the loading position, the lifting mechanism 53 raises the lifting member 52 as shown in FIG. 8. Accordingly, the insertion member 51 is inserted into the transfer groove 210.

Next, when the insertion member 51 is inserted into the transfer groove 210, as shown in FIG. 9, the driving mechanism 54 is configured such that the test tray 200 is transferred from the loading position to the rotation position. The lifting mechanism 53 is moved. Accordingly, the test tray 200 is located inside the support mechanism 2 so as not to protrude from the support mechanism 2.

Next, when the test tray 200 is located in the rotation position, the rotary mechanism 4 rotates the support mechanism 2 as shown in FIG. Accordingly, the test tray 200 is rotated in a direction in which the semiconductor devices can be tested in the same arrangement in the first chamber unit 111 and the second chamber unit 112. For example, the rotation mechanism 4 may rotate the support mechanism 2 by 180 degrees about the rotation shaft 4a. While the rotary mechanism 4 rotates the support mechanism 2, the elevating mechanism 53 maintains the elevating member 52 such that the insertion member 51 is inserted into the transfer groove 210. ) Can be kept raised. Accordingly, the insertion member 51 and the support member 522 can prevent the test tray 200 from being separated by the centrifugal force.

Next, when the test tray 200 is rotated, as shown in FIG. 11, the driving mechanism 54 moves the lifting mechanism 53 so that the test tray 200 is transferred from the rotational position to the carrying out position. Let's do it. Accordingly, the test tray 200 is positioned at a position where the second conveyor mechanism 132 (shown in FIG. 3B) can be taken out of the test tray 200 from the support mechanism 2.

Next, when the test tray 200 is located in the carrying out position, as shown in FIG. 12, the lifting mechanism 53 lowers the lifting member 52. Accordingly, the insertion member 51 is separated from the transfer groove 210. When the insertion member 51 is separated from the transfer groove 210, the second conveyor mechanism 132 (shown in FIG. 3B) is a test tray for carrying out the test tray 200 from the support mechanism 2. 200 may be carried.

Next, when the test tray 200 is taken out from the support mechanism 2, as shown in FIG. 7, the rotating mechanism 4 is another test tray from the first conveyor mechanism 131 (shown in FIG. 4). The support mechanism 2 can be rotated so that the 200 can be carried in. The rotary mechanism 4 may stand by without rotating the support mechanism 2 so that another test tray 200 can be loaded from the second conveyor mechanism 132 (shown in FIG. 3B).

6, 13 and 14, the spin apparatus 1 according to the present invention is a projection (6, shown in Figure 13) formed in the support mechanism 2, and the base mechanism (3, Fig. It may further comprise a shock absorbing mechanism (7) coupled to 6).

The projection 6 is formed to protrude from the support mechanism 2 in a downward direction (E arrow direction, shown in FIG. 6) from the support mechanism 2 toward the base mechanism 3. That is, the projection 6 is located between the support mechanism 2 and the base mechanism 3. The protrusion 6 is formed to be positioned in contact with the buffer mechanism 7 when the rotary mechanism 4 stops after rotating the support mechanism 2 to rotate the test tray 200. do. The protrusion 6 may be formed in a rectangular parallelepiped shape as a whole, but is not limited thereto and may be formed in other shapes such as a disc shape as long as the protrusion 6 may be in contact with the buffer mechanism 7.

The shock absorbing mechanism 7 elastically supports the projection 6 in the process of stopping the rotation mechanism 4 after the rotating mechanism 4 rotates the support mechanism 2 and the support mechanism. The impact applied to the test tray 200 supported by (2) can be alleviated. Accordingly, the shock absorbing mechanism 7 may prevent the semiconductor device accommodated in the test tray 200 from being separated from the test tray 200 by vibration, shaking, or the like. The shock absorbing mechanism 7 may include an elastic member (not shown) for elastically supporting the protrusion 6. The elastic member may be a spring. The shock absorbing mechanism 7 is coupled to one surface facing the support mechanism 2 in the base mechanism 3. That is, the shock absorbing mechanism 7 is located between the supporting mechanism 2 and the base mechanism 3.

When the rotating mechanism 4 rotates the test tray 200 supported by the supporting mechanism 2 by 180 degrees, the shock absorbing mechanism 7 rotates by 180 degrees as the supporting mechanism 2 is rotated 180 degrees. The protrusion 6 can be elastically supported. When the rotating mechanism 4 rotates the test tray 200 supported by the supporting mechanism 2 by 90 degrees, the shock absorbing mechanism 7 rotates by 90 degrees as the supporting mechanism 2 is rotated by 90 degrees. It is also possible to elastically support the protrusions 6.

15 to 18, the spin apparatus 1 according to the present invention may further include an elevating unit 8 (shown in FIG. 15) for elevating the support mechanism 2.

The lifting unit 8 may be coupled to the main body 10. The base mechanism 3 may be coupled to the lifting unit 8. Accordingly, the elevating unit 8 can elevate the support mechanism 2 by elevating the base mechanism 3. As the lifting unit 8 lifts and lowers the base mechanism 3, the support mechanism 2, the rotation mechanism 4, and the transfer mechanism 5 may move up and down together.

The lifting unit 8 is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, a belt using a motor, a pulley and a belt, and the like. The base mechanism 3 can be elevated by using a linear motor or the like using a method, a coil and a permanent magnet. When the lifting unit 8 raises and lowers the base mechanism 3 by using a cylinder method, the base mechanism 3 is coupled to the rod of the cylinder, and thus can be lifted as the rod of the cylinder moves. Although not shown, the lifting unit 8 may be directly coupled to the support mechanism 2 to elevate the support mechanism 2.

Here, the first conveyor mechanism 131 (shown in FIG. 17) and the second conveyor mechanism 132 (shown in FIG. 17) are each a plurality of conveyors 130a (FIG. 17) for carrying a test tray 200. Shown in the figure).

The first conveyor mechanism 131 may include a plurality of conveyors 130a formed to be spaced apart from each other in the vertical direction (Z-axis direction). Accordingly, the first conveyor mechanism 131 may individually transport the plurality of test trays 200 along the plurality of transport paths formed in the vertical direction (Z-axis direction). For example, the first conveyor mechanism 131 may include a conveyor 130a for carrying the test tray 200 along the first transportation path P1 (shown in FIG. 17), and the second transportation path P2 (FIG. 17). It may include a conveyor (130a) for carrying the test tray 200 along the (shown). The second transportation path P2 is formed in a lower direction (E arrow direction) than the first transportation path P1. In this case, the first conveyor mechanism 131 forms the second transportation path P2 even when the conveyor 130a forming the first transportation path P1 stops the test tray 200. The conveyor 130a may be operated to carry the test tray 200.

The second conveyor mechanism 132 may include a plurality of conveyors 130a spaced apart from each other in the vertical direction (Z-axis direction). Accordingly, the second conveyor mechanism 132 may individually transport the plurality of test trays 200 along the plurality of transport paths formed in the vertical direction (Z-axis direction). For example, the second conveyor mechanism 132 may include a conveyor 130a for carrying the test tray 200 along the first transport path P1, and a test tray 200 along the second transport path P2. It may include a conveyor (130a) for transporting. In this case, the second conveyor mechanism 132 forms the second transportation path P2 even when the conveyor 130a forming the first transportation path P1 stops the test tray 200. The conveyor 130a may be operated to carry the test tray 200.

The lifting unit 8 may raise and lower the support mechanism 2 to adjust the height at which the test tray 200 is transferred between the support mechanism 2 and the conveyor unit 130 (shown in FIG. 4). have. In this case, the elevating unit 8 can elevate the support mechanism 2 by elevating the base mechanism 3. Accordingly, the spin apparatus 1 according to the present invention can change the transport path of the test tray 200 carried between the first conveyor mechanism 131 and the second conveyor mechanism 132.

For example, as illustrated in FIG. 17, the test tray 200 transported along the first transport path P1 by the first conveyor mechanism 131 may have a height corresponding to the first transport path P1. It can be conveyed to the positioned support mechanism 2. In this case, the lifting unit 8 is in a state in which the base mechanism 3 is raised so that the support mechanism 2 is positioned at a height corresponding to the first transportation path P1. The test tray 200 includes a support mechanism 2 positioned at a height corresponding to the first transportation path P1 from the conveyor 130a of the first conveyor mechanism 131 forming the first transportation path P1. By being transferred to, it can be supported by the guide member 22 of the support mechanism (2).

When the test tray 200 is supported by the support mechanism 2, the lifting unit 8 adjusts the height of the test tray 200 supported by the support mechanism 2 by elevating the base mechanism 3. Can be. For example, as shown in FIG. 18, the lifting unit 8 may lower the base mechanism 3 so that the support mechanism 2 is positioned at a height corresponding to the second transportation path P2. Accordingly, the test tray T supported by the support mechanism 2 may be lowered to a height corresponding to the second transport path P2. The test tray 200 is a conveyor 130a of the second conveyor mechanism 132 which forms the second transportation path P2 from the support mechanism 2 located at a height corresponding to the second transportation path P2. Can be transferred to. Accordingly, the spin apparatus 1 according to the present invention transfers the transport path of the test tray 200 transferred from the first conveyor mechanism 131 to the second conveyor mechanism 132 in the first transportation path P1. It may be changed to the second transport path (P2) in.

Although not shown, the spin apparatus 1 according to the present invention transfers the transport path of the test tray 200 transferred from the first conveyor mechanism 131 to the second conveyor mechanism 132 in the second transportation path P2. ) May be changed to the first transport path P1. Spin device 1 according to the present invention is the first conveying path (P1) and the first conveying path of the test tray 200 is transferred from the second conveyor mechanism 132 to the first conveyor mechanism (131) It is also possible to change between two transport paths (P2). In the spin apparatus 1 according to the present invention, the test tray 200 is transported without changing the transport path of the test tray 200 transferred between the first conveyor mechanism 131 and the second conveyor mechanism 132. It may be operable to transfer between the first conveyor mechanism 131 and the second conveyor mechanism 132 while maintaining a path.

Referring back to FIG. 2A, the chamber unit 110 performs the test process. The configuration of the chamber unit 110 will be described in more detail with reference to FIGS. 19 to 21.

The chamber unit 110 may perform the test process by connecting the semiconductor device accommodated in the test tray 200 to the test equipment 400 as shown in FIG. 19. When the test device 400 is electrically connected to the semiconductor device as the semiconductor device is connected, the test device 400 tests the semiconductor device. The test tray 200 may accommodate a plurality of semiconductor devices. In this case, the chamber unit 110 may connect a plurality of semiconductor devices to the test equipment 400, and the test equipment 400 may test a plurality of semiconductor devices. The test equipment 400 may include a hi-fix board.

As shown in FIG. 19, the chamber unit 110 includes a first chamber 110a in which the test process is performed. The test equipment 400 is installed in the first chamber 110a. The test equipment 400 is installed so that some or all of the test equipment 400 is inserted into the first chamber 110a. The test equipment 400 includes test sockets (not shown) to which semiconductor devices stored in the test tray 200 are connected. The test equipment 400 may include a number of test sockets approximately equal to the number of semiconductor devices accommodated in the test tray 200. For example, the test tray 200 may accommodate 64, 128, 256, and 512 semiconductor devices. When the semiconductor devices stored in the test tray 200 are connected to the test sockets, the test equipment 400 may test the semiconductor devices connected to the test sockets. The first chamber 110a may be formed in a rectangular parallelepiped shape in which a portion into which the test equipment 400 is inserted is opened.

As illustrated in FIG. 19, the chamber unit 110 includes a contact unit 110b for connecting the test tray 200 to the test equipment 400. The contact unit 110b is installed in the first chamber 110a. The contact unit 110b connects the semiconductor devices accommodated in the test tray 200 to the test equipment 400. The contact unit 110b may move the semiconductor devices stored in the test tray 200 in a direction closer to or farther from the test equipment 400. When the contact unit 110b moves the semiconductor devices stored in the test tray 200 in a direction closer to the test equipment 400, the semiconductor devices stored in the test tray 200 are transferred to the test equipment 400. Connected. Accordingly, the test equipment 400 may test the semiconductor devices. When the test for the semiconductor devices is completed, the contact unit 110b may move the semiconductor devices accommodated in the test tray 200 in a direction away from the test equipment 400.

The test tray 200 is provided with carrier modules for accommodating semiconductor devices. Each of the carrier modules may accommodate at least one semiconductor device. The carrier modules are elastically movable to the test tray 200 by springs (not shown), respectively. When the contact unit 110b pushes the semiconductor devices accommodated in the test tray 200 in a direction close to the test equipment 400, the carrier modules may move in a direction close to the test equipment 400. When the contact unit 110b removes the force pushing the semiconductor elements stored in the test tray 200, the carrier modules may move away from the test equipment 400 by the restoring force of the spring. While the contact unit 110b moves the carrier modules and the semiconductor devices, the test tray 200 may move together.

Although not shown, the contact unit 110b may include a plurality of contact sockets for contacting the semiconductor devices accommodated in the test tray 200. The contact sockets may contact the semiconductor devices stored in the test tray 200 to move the semiconductor devices, thereby connecting the semiconductor devices to the test equipment 400. The contact unit 110b may include a number of contact sockets approximately equal to the number of semiconductor devices accommodated in the test tray 200. The contact unit 110b is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, a belt using a motor, a pulley and a belt, and the like. It can be moved by a linear motor using a method, a coil and a permanent magnet or the like.

Referring to FIGS. 2A, 20, and 21, the chamber unit 110 may allow the test equipment 400 to test the semiconductor device not only at room temperature but also at high or low temperature. It further includes a chamber 110c and a third chamber 110d.

The second chamber 110c adjusts the semiconductor device accommodated in the test tray 200 to a first temperature. The test tray 200 located in the second chamber 110c is a semiconductor device to be tested by the sorting unit 120, and is conveyed toward the chamber unit 110 by the conveyor unit 130. It is then transferred to the second chamber (110c). The first temperature is a temperature range of the semiconductor devices to be tested when the semiconductor device to be tested is tested by the test equipment 400. The second chamber 110c includes at least one of an electrothermal heater and a liquefied nitrogen injection system to adjust the semiconductor device to be tested to the first temperature. When the semiconductor device to be tested is adjusted to the first temperature, the test tray 200 is transferred from the second chamber 110c to the first chamber 110a.

The third chamber 110d adjusts the semiconductor device accommodated in the test tray 200 to a second temperature. The test tray 200 positioned in the third chamber 110d is a semiconductor device tested through the test process, and is transferred from the first chamber 110a. The second temperature is a temperature range including or close to room temperature. The third chamber 110d includes at least one of an electrothermal heater and a liquefied nitrogen injection system to adjust the tested semiconductor device to the second temperature. When the tested semiconductor device is adjusted to the second temperature, the test tray 200 is transferred to the conveyor unit 130.

Although not shown, the chamber unit 110 may include a transfer unit (not shown) for transferring the test tray 200. The transfer means may push the test tray 200 or pull the test tray 200 to transfer. The transfer means may transfer the test tray 200 containing the semiconductor device to be tested from the second chamber 110c to the first chamber 110a. The transfer means may transfer the test tray 200 containing the tested semiconductor device from the first chamber 110a to the third chamber 110d. The conveying means may be a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, a belt method using a motor, a pulley and a belt, a coil, and the like. And the test tray 200 can be transferred using a linear motor using a permanent magnet or the like.

As shown in FIG. 20, the chamber unit 110 may include the second chamber 110c, the first chamber 110a, and the third chamber 110d side by side in a horizontal direction. In this case, the chamber unit 110 may include a plurality of first chambers 110a. A plurality of the first chambers 110a may be stacked up and down.

As shown in FIG. 21, the chamber unit 110 may have the second chamber 110c, the first chamber 110a, and the third chamber 110d stacked in a vertical direction. That is, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be stacked up and down. The second chamber 110c may be installed to be positioned above the first chamber 110a, and the third chamber 110d may be installed to be positioned below the first chamber 110a.

2A, 20, and 21, the chamber unit 110 may include a rotator 110e for rotating the test tray 200 between a horizontal state and a vertical state.

The rotator 110e is installed in the chamber unit 110. The rotator 110e may rotate the test tray 200 containing the semiconductor device to be tested from a horizontal state to a vertical state. Accordingly, the first chamber 110a may perform the test process with respect to the test tray 200 standing in a vertical state. In addition, the sorting unit 120 may perform the loading process on the test tray 200 laid down in a horizontal state. The rotator 110e may rotate the test tray 200 containing the tested semiconductor device from a vertical state to a horizontal state. Accordingly, the sorting unit 120 may perform the unloading process on the test tray 200 laid down in a horizontal state.

The chamber unit 110 may include one rotator 110e, as shown in FIGS. 20 and 21. In this case, the rotator 110e may be installed between the second chamber 110c and the third chamber 110d. The test tray 200 containing the semiconductor device to be tested is rotated to be vertical by the rotator 110e and then transferred from the rotator 110e to the second chamber 110c by the transfer means. have. The test tray 200 in which the tested semiconductor device is accommodated may be rotated to be horizontal by the rotator 110e after being transferred from the third chamber 110d to the rotator 110e by the transfer means. have.

Although not shown, the chamber unit 110 may include a first rotator for rotating the test tray 200 containing the semiconductor device to be tested and a second rotator for rotating the test tray 200 containing the tested semiconductor device. It may also include. The first rotator may be installed to be located inside the second chamber 110c or outside the second chamber 110c. The second rotator may be installed to be located inside the third chamber 110d or outside the third chamber 110d.

Although not shown, the chamber unit 110 may perform a test process on the test tray 200 in a horizontal state without the rotator 110e. In this case, the test tray 200 may be transferred between the second chamber 110c, the first chamber 110a, and the third chamber 110d in a horizontal state to perform the test process.

2A, 3B, and 4, the transfer means may transfer the test tray 200 supported by the conveyor unit 130 to the chamber unit 110. The transfer means may transfer the test tray 200 supported by the conveyor unit 130 to the first chamber 110a. When the chamber unit 110 includes the second chamber 110c, the transfer means may include a test tray 200 supported by the conveyor unit 130 via the second chamber 110c. It can be transferred to one chamber (110a).

The transfer means may transfer the test tray 200 in which the test process is completed, to the conveyor unit 130. The transfer means may transfer the test tray 200 in which the test process is completed, from the first chamber 110a to the conveyor unit 130. When the chamber unit 110 includes the third chamber 110d, the transfer means may include a test tray 200 in which the test process is completed, and the third chamber 110d in the first chamber 110a. It can be transferred to the conveyor unit 130 via.

2A, 3B, and 4, a plurality of chamber units 110 are installed along the conveyor unit 130. The inline test handler 1 according to the present invention includes the first chamber unit 111 and the second chamber unit 112 installed to face different directions.

The first chamber unit 111 is connected inline with the sorting unit 120 by the first conveyor mechanism 131. The transfer means of the first chamber unit 111 may transfer the test tray 200 supported by the first conveyor mechanism 131 to the first chamber 110a (refer to FIG. 19). When the first chamber unit 111 includes the second chamber 110c (shown in FIG. 19), the transport means of the first chamber unit 111 is supported by the first conveyor mechanism 131. The test tray 200 may be transferred to the first chamber 110a (shown in FIG. 19) via the second chamber 110c (shown in FIG. 19).

The transfer means of the first chamber unit 111 may transfer the test tray 200 in which the test process is completed, to the first conveyor mechanism 131. The transfer means of the first chamber unit 111 may transfer the test tray 200 in which the test process is completed from the first chamber 110a (shown in FIG. 19) to the first conveyor mechanism 131. have. When the first chamber unit 111 includes the third chamber 110d (shown in FIG. 19), the transfer means of the first chamber unit 111 may include a test tray 200 in which the test process is completed. May be transferred from the first chamber 110a (shown in FIG. 19) to the first conveyor mechanism 131 via the third chamber 110d (shown in FIG. 19).

The inline test handler 1 according to the present invention may include a plurality of first chamber units 111. In this case, the first chamber units 111 may be installed to be spaced apart from each other in a first axial direction (X-axis direction) along the first conveyor mechanism 131.

2A, 3B, and 4, the second chamber unit 112 is connected inline with the sorting unit 120 by the second conveyor mechanism 132. The transfer means of the second chamber unit 112 may transfer the test tray 200 supported by the second conveyor mechanism 132 to the first chamber 110a (FIG. 19). When the second chamber unit 112 includes the second chamber 110c (shown in FIG. 19), the conveying means of the second chamber unit 112 is supported by the second conveyor mechanism 132. The test tray 200 may be transferred to the first chamber 110a (shown in FIG. 19) via the second chamber 110c (shown in FIG. 19).

The transfer means of the second chamber unit 112 may transfer the test tray 200 in which the test process is completed, to the second conveyor mechanism 132. The transfer means of the second chamber unit 112 may transfer the test tray 200 in which the test process is completed, from the first chamber 110a (shown in FIG. 19) to the second conveyor mechanism 132. have. When the second chamber unit 112 includes the third chamber 110d (shown in FIG. 19), the transfer means of the second chamber unit 112 may include a test tray 200 in which the test process is completed. May be transferred from the first chamber 110a (shown in FIG. 19) to the second conveyor mechanism 132 via the third chamber 110d (shown in FIG. 19).

The inline test handler 1 according to the present invention may include a plurality of the second chamber units 112. In this case, the second chamber units 112 may be installed to be spaced apart from each other in the first axial direction (X-axis direction) along the second conveyor mechanism 132. The second chamber units 112 and the first chamber units 111 may be spaced apart from each other in a second axis direction (Y axis direction) perpendicular to the first axis direction (X axis direction). . In this case, the first conveyor mechanism 131 and the second conveyor mechanism 132 may be installed to be spaced apart from each other in the second axial direction (Y-axis direction). The spin device 1 is located between the first conveyor mechanism 131 and the second conveyor mechanism 132 to connect the first conveyor mechanism 131 and the second conveyor mechanism 132 inline. Can be installed.

The second chamber unit 112 and the first chamber unit 111 may test the semiconductor device in different temperature environments. For example, the first chamber unit 111 may test the semiconductor device in a high temperature environment, and the second chamber unit 112 may be implemented to test the semiconductor device in a low temperature environment. In this case, the conveyor unit 130 carries the test tray 200 toward the first chamber unit 111 so that the semiconductor device is first tested in a high temperature environment, and then a test process is performed from the first chamber unit 111. When the completed test tray 200 is discharged, the semiconductor device may be tested in a low temperature environment by carrying it toward the second chamber unit 112. The conveyor unit 130 carries a test tray 200 toward the second chamber unit 112 so that the semiconductor device is first tested in a low temperature environment, and then a test tray in which the test process is completed from the second chamber unit 112. When 200 is discharged, the semiconductor device may be tested in a high temperature environment by transporting it toward the first chamber unit 111. In this process, the spin apparatus 1 includes the first chamber unit such that the semiconductor elements accommodated in the test tray 200 are tested in the same arrangement in the first chamber unit 111 and the second chamber unit 112. The test tray 200 carried between the 111 and the second chamber unit 112 may be rotated.

2A, 3B, 4, and 22, the sorting unit 120 performs the loading process and the unloading process. The sorting unit 120 is installed to be spaced apart from the chamber units 110. The sorting unit 120 may include a loading unit 121 (shown in FIG. 22) for performing the loading process.

The loading unit 121 transfers the semiconductor device to be tested from the customer tray to the test tray 200. The loading unit 121 may include a loading stacker 1211 (shown in FIG. 22) and a loading picker 1212 (shown in FIG. 22).

The loading stacker 1211 supports the customer tray. The customer tray supported by the loading stacker 1211 contains semiconductor devices to be tested. The loading stacker 1211 may store a plurality of customer trays containing semiconductor devices to be tested. The customer trays may be stacked up and down and stored in the loading stacker 1211.

The loading picker 1212 may pick up the semiconductor device to be tested from the customer tray located in the loading stacker 1211 and store it in the test tray 200. When the semiconductor device to be tested is accommodated in the test tray 200, the test tray 200 may be positioned at a loading position 121a (shown in FIG. 22). The loading picker 1212 may transfer the semiconductor device to be tested while moving in the first axis direction (X axis direction) and the second axis direction (Y axis direction). The loading picker 1212 may move up and down.

The loading unit 121 may further include a loading buffer 1213 (shown in FIG. 22) to temporarily receive the semiconductor device to be tested. In this case, the loading picker 1212 picks up the semiconductor device to be tested from the customer tray, and then, the test tray 200 located at the loading position 121a via the loading buffer 1213. Can be stored in. The loading picker 1212 may include a first loading picker 1212a (shown in FIG. 22) for transferring the semiconductor device to be tested from the customer tray to the loading buffer 1213, and the loading buffer 1213. The second loading picker 1212b (shown in FIG. 22) may be included in the test tray 200.

Although not shown, the loading unit 121 may include a loading transfer means for transferring the test tray 200. The loading transfer means may transfer the test tray 200 or by pulling the test tray 200. The loading transfer means may transfer the test tray 200 in which the loading process is completed, to the conveyor unit 130 at the loading position 121a. The loading transfer means may transfer the empty test tray 200 from the conveyor unit 130 to the loading position 121a. The loading transfer means may be a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, a belt method using a motor, a pulley and a belt, The test tray 200 may be transferred using a linear motor using a coil and a permanent magnet.

2A, 3B, 4, and 22, the sorting unit 120 may include an unloading unit 122 (shown in FIG. 22) for performing the unloading process.

The unloading unit 122 separates the tested semiconductor device from the test tray 200 and transfers it to the customer tray. The unloading unit 122 may include an unloading stacker 1221 (shown in FIG. 22) and an unloading picker 1222 (shown in FIG. 22).

The unloading stacker 1221 supports the customer tray. The customer tray supported by the unloading stacker 1221 contains the tested semiconductor devices. The unloading stacker 1221 may store a plurality of customer trays containing the tested semiconductor devices. The customer trays may be stacked up and down and stored in the unloading stacker 1221.

The unloading picker 1222 may pick up the tested semiconductor device from the test tray 200 and store it in a customer tray located in the unloading stacker 1221. When the tested semiconductor device is picked up from the test tray 200, the test tray 200 may be located at an unloading position 122a (shown in FIG. 22). The unloading picker 1222 may store the tested semiconductor device in a customer tray corresponding to the grade for each grade according to the test result. The unloading picker 1222 may transfer the tested semiconductor device while moving in the first axis direction (X axis direction) and the second axis direction (Y axis direction). The unloading picker 1222 may move up and down. When the test tray 200 becomes empty as the unloading unit 122 separates all the tested semiconductor devices from the test tray 200, the sorting unit 120 unloads the empty test tray 200. The unit 122 may be transferred to the loading unit 121.

The unloading unit 122 may further include an unloading buffer 1223 (shown in FIG. 22) to temporarily receive the tested semiconductor device. In this case, the unloading picker 1222 picks up the tested semiconductor device from the test tray 200 located at the unloading position 122a and passes the picked-up semiconductor device through the unloading buffer 1223. It can be stored in the customer tray. The unloading picker 1222 may include a first unloading picker 1223a (shown in FIG. 22) that transfers the tested semiconductor device from the test tray 200 to the unloading buffer 1223, and the tested semiconductor device. The unloading buffer 1223 may include a second unloading picker 1223b (shown in FIG. 22) transferred to the customer tray.

Although not shown, the unloading unit 122 may include an unloading transport means for transporting the test tray 200. The unloading transfer means may transfer the test tray 200 by pulling the test tray 200 or by pulling the test tray 200. The unloading transfer means may transfer the test tray 200 in which the test process is completed, from the conveyor unit 130 (shown in FIG. 21) to the unloading position 122a. The unloading transfer means may transfer the test tray 200, which is empty as the unloading process is completed, from the unloading position 122a to the conveyor unit 130. The unloading transfer means may transfer the test tray 200, which becomes empty as the unloading process is completed, from the unloading position 122a to the loading position 121a. The unloading transfer means is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, and a belt method using a motor, a pulley and a belt. The test tray 200 may be transferred using a linear motor using a coil, a permanent magnet, or the like.

Although not shown, the inline test handler 1 according to the present invention may include a plurality of the sorting units 120. In this case, the sorting units 120 may be spaced apart from each other along the conveyor unit 130. According to a modified embodiment of the present invention, the sorting unit 120 may be installed spaced apart from the loading unit 121 and the unloading unit 122. Accordingly, the inline test handler 100 according to the present invention may be implemented to perform the loading process and the unloading process independently of each other. Therefore, the inline test handler 100 according to the present invention can minimize the work time required for each process as the loading process, the unloading process and the test process are performed independently of each other. . The loading unit 121 and the unloading unit 122 may be spaced apart from each other along the conveyor unit 130.

2A, 3B, and 4, the conveyor unit 130 carries the test tray 200 such that the test tray 200 is transferred between the sorting unit 120 and the chamber units 110. do. The conveyor unit 130 carries the test tray 200 such that the test tray 200 discharged from the sorting unit 120 is supplied to the chamber unit 110. The conveyor unit 130 carries the test tray 200 such that the test tray 200 discharged from the chamber unit 110 is supplied to the sorting unit 120. Therefore, the inline test handler 100 according to the present invention circulates the test tray 200 between the sorting unit 120 and the chamber unit 110 installed to be spaced apart from each other through the conveyor unit 130, the test tray The loading process, the test process, and the unloading process may be performed on the semiconductor device accommodated in the 200.

Referring to FIG. 23, the conveyor unit 130 includes a conveyor 130a for carrying the test tray 200. The conveyor 130a may include a plurality of rotating members 130b installed to be spaced apart from each other by a predetermined distance. The conveyor 130a rotates the rotating members 130b about their respective rotation shafts. The test tray 200 may be transported as the rotating members 130b rotate while being supported by the rotating members 130b. The conveyor 130a may rotate the rotating members 130b in a clockwise and counterclockwise direction with respect to their respective rotation shafts. Accordingly, the conveyor 130a may adjust the direction in which the test tray 200 is transported by adjusting the direction in which the rotating members 130b rotate. The rotating members 130b may be formed in a cylindrical shape, respectively.

Although not shown, the conveyor 130a may include a power source for rotating the rotating members 130b about respective rotation shafts. The power source may be a motor. The conveyor 130a may include a connecting means for connecting the rotating shaft of each of the power source and the rotating member 130b. The connecting means may be a pulley and a belt. The conveyor 130a may further include a circulation member (not shown) coupled to surround the rotating members 130b. The test tray 200 is supported by the circulation member. The circulation member may carry the test tray 200 while circularly moving as the rotation members 130b located therein rotate about the respective rotation shafts.

The conveyor 130a includes an installation mechanism 130c for supporting the rotating members 130b. The installation mechanism 130c supports the rotating members 130b such that the test tray 200 supported by the rotating members 130b is positioned at a predetermined height. The installation mechanism 130c has a test tray 200 supported by the rotating members 130b as the chamber unit 110 (shown in FIG. 4) and the sorting unit 120 (shown in FIG. 4). The rotating members 130b are supported to be positioned at a height that can be transferred. The installation mechanism 130c includes a test tray 200 discharged from the chamber units 110 (shown in FIG. 4) and the sorting unit 120 (shown in FIG. 3B) as the rotating members 130b. The rotating members 130b are supported to be positioned at a height that can be transferred.

The conveyor unit 130 may include a plurality of the conveyor (130a). The conveyors 130a are installed adjacent to each other. The test tray 200 may be transported along the conveyors 130a to be transported between the chamber unit 110 (shown in FIG. 4) and the sorting unit 120 (shown in FIG. 4). The conveyors 130a may move the test tray 200 individually while operating individually. For example, while at least one of the conveyors 130a is stopped, the other conveyor 130a may operate to carry the test tray 200. The first conveyor mechanism 131 and the second conveyor mechanism 132 may include a plurality of the conveyor (130a), respectively.

2A and 24, the conveyor unit 130 may include the first conveyor mechanism 131 and the second conveyor mechanism 132.

The first conveyor mechanism 131 connects the sorting unit 120 and the first chamber unit 111 inline. The first conveyor mechanism 131 may include a plurality of conveyors 130a (shown in FIG. 23). When the inline test handler 100 according to the present invention includes a plurality of first chamber units 111, the first chamber units 111 may be installed along the first conveyor mechanism 131. One side of the spin device 1 is connected to the first conveyor mechanism 131. Accordingly, the test tray 200 may be transported between the first conveyor mechanism 131 and the spin apparatus 1.

Although not shown, the first conveyor mechanism 131 may include a first transfer means for transferring the test tray 200. The first transfer means may transfer the test tray 200 or by pulling the test tray 200. The first transfer means may transfer the test tray 200 in which the loading process is completed, to the first chamber unit 111. The first transfer means may carry out the test tray 200 from which the test process is completed, from the first chamber unit 111. The test tray 200 may be transported between the first chamber unit 111 and the first conveyor mechanism 131 by operating a combination of the first transfer means and the transfer means of the first chamber unit 111. Can be.

The first transfer means may transfer the test tray 200 carried out from the first chamber unit 111 to the spin apparatus 1. The first transfer means may carry out the test tray 200 carried out from the second chamber unit 112 from the spin apparatus 1. The test tray 200 is operated by a combination of the first transfer means and the transfer mechanism 5 (shown in FIG. 5) of the spin apparatus 1, thereby providing the first conveyor mechanism 131 and the spin apparatus 1. ) Can be carried between.

The first transfer means is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, and a belt method using a motor, a pulley and a belt. In addition, the test tray 200 may be transferred using a linear motor using a coil and a permanent magnet, a conveyor method using a roller, a belt, or the like.

The second conveyor mechanism 132 connects the sorting unit 120 and the second chamber unit 112 inline. The second conveyor mechanism 132 may include a plurality of conveyors 130a (shown in FIG. 23). When the inline test handler 100 according to the present invention includes a plurality of second chamber units 112, the second chamber units 112 may be installed along the second conveyor mechanism 132. The second conveyor mechanism 132 and the first conveyor mechanism 131 may be installed to be spaced apart from each other in the second axial direction (Y-axis direction). The other side of the spin device 1 is connected to the second conveyor mechanism 132. Accordingly, the test tray 200 may be transported between the second conveyor mechanism 132 and the spin apparatus 1. The spin apparatus 1 may have one side connected to the first conveyor mechanism 131 and the other side connected to the second conveyor mechanism 132. Accordingly, the test tray 200 may be transported between the first conveyor mechanism 131, the spin apparatus 1, and the second conveyor mechanism 132.

Inline test handler 100 according to the present invention may include a plurality of the spin device (1). In this case, the spin devices 1 are along the first conveyor mechanism 131 and the second conveyor mechanism 132 so as to be located between the first conveyor mechanism 131 and the second conveyor mechanism 132. Can be installed. The spin devices 1 may be installed to be spaced apart from each other in the first axial direction (X-axis direction). Therefore, the inline test handler 100 according to the present invention takes the loading process, the unloading process, and the test process, respectively, regardless of the direction in which the chamber units 110 are installed through the spin devices 1. In consideration of time, the test tray 200 may be efficiently distributed. Accordingly, the inline test handler 100 according to the present invention can improve the equipment operation rate and reduce the time taken for the loading process, the test process and the sorting process to be completed for the semiconductor device.

Although not shown, the second conveyor mechanism 132 may include a second transfer means for transferring the test tray 200. The second transfer means may transfer the test tray 200 or by pulling the test tray 200. The second transfer means may transfer the test tray 200 in which the loading process is completed, to the second chamber unit 112. The second transfer means may carry out the test tray 200 from which the test process is completed, from the second chamber unit 112. The test tray 200 may be transported between the second chamber unit 112 and the second conveyor mechanism 132 by combining the second transfer means and the transfer means of the second chamber unit 112. Can be.

The second transfer means may transfer the test tray 200 carried out from the second chamber unit 112 to the spin apparatus 1. The second transfer means may carry out the test tray 200 carried out from the second chamber unit 112 from the spin apparatus 1. The test tray 200 is operated by a combination of the second transfer means and the transfer mechanism 5 (shown in FIG. 5) of the spin apparatus 1, thereby providing the second conveyor mechanism 132 and the spin apparatus 1. ) Can be carried between.

The second transfer means is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a motor and a ball screw, a gear method using a motor, a rack gear and a pinion gear, and a belt method using a motor, a pulley and a belt. In addition, the test tray 200 may be transferred using a linear motor using a coil and a permanent magnet, a conveyor method using a roller, a belt, or the like.

2A, 17, and 18, the first conveyor mechanism 131 and the second conveyor mechanism 132 are each a plurality of conveyors 130a formed to be spaced apart from each other in the vertical direction (Z-axis direction). , As shown in FIG. 17).

The first conveyor mechanism 131 may individually transport the plurality of test trays 200 along the plurality of transport paths formed in the vertical direction (Z-axis direction). For example, the first conveyor mechanism 131 may include a conveyor 130a for carrying a test tray 200 along the first transportation path P1 (shown in FIG. 17), and the second transportation path P2 (FIG. And a conveyor 130a for carrying the test tray 200 along the side (shown in FIG. 17). In this case, the first conveyor mechanism 131 forms the second transportation path P2 even when the conveyor 130a forming the first transportation path P1 stops the test tray 200. The conveyor 130a may be operated to carry the test tray 200.

The second conveyor mechanism 132 may individually transport the plurality of test trays 200 along the plurality of transport paths formed in the vertical direction (Z-axis direction). For example, the second conveyor mechanism 132 may include a conveyor 130a for carrying the test tray 200 along the first transport path P1, and a test tray 200 along the second transport path P2. It may include a conveyor (130a) for transporting. In this case, the second conveyor mechanism 132 forms the second transportation path P2 even when the conveyor 130a forming the first transportation path P1 stops the test tray 200. The conveyor 130a may be operated to carry the test tray 200.

The inline test handler 100 according to the present invention transfers a test tray 200 from the conveyor unit 130 to the chamber unit 110, or transfers a test tray 200 from the chamber unit 110 to the conveyor unit. When transferring to 130, the test tray 200 may be transferred using the first transport path P1. The inline test handler 100 according to the present invention avoids the test tray 200 in which another test tray 200 is waiting when there is a test tray 200 waiting in the first transport path P1. The test tray 200 may be transferred using the second transportation path P2 to move.

When the inline test handler 100 according to the present invention transfers the test tray 200 passing through the first chamber unit 111 directly to the sorting unit 120 without passing through the second chamber unit 112. In addition, the test tray 200 may be transferred using the second transportation path P2. When the inline test handler 100 according to the present invention transfers the test tray 200 which has passed through the second chamber unit 112 directly to the sorting unit 120 without passing through the first chamber unit 111. In addition, the test tray 200 may be transferred using the second transportation path P2. In this case, the spin apparatus 1 may change a transport path of the test tray 200 transported between the first conveyor mechanism 131 and the second conveyor mechanism 132.

Those skilled in the art to which the present invention pertains will understand that the above-described present invention can be implemented in other specific forms without changing the technical spirit or essential features.

For example, the main control server 101 of the inline test handler 100 may perform scheduling for each lot unit, which is a bundle of semiconductor devices to be tested. That is, the main control server 101 determines how to supply the entire lots to the inline test handler 100 so that the work time can be optimized to schedule the supply of each lot. In this case, the main control server 101 may supply the lots according to the schedule, and when the new lot is added or the lot is required to be changed, the main server 101 may change the schedule for each lot.

Therefore, it is to be understood that the embodiments described above are exemplary in all respects and not restrictive. The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention. do.

DESCRIPTION OF SYMBOLS 1 Spin apparatus 2 Support mechanism 3 Base mechanism 4 Rotation mechanism
5 Transfer Mechanism 6 Projection 7 Shock Absorber 10 Body
100: inline test handler 101: control server 102: identification information confirmation unit
110: chamber unit 111: first chamber unit
112: second chamber unit 120: sorting unit 121: loading unit 122: unloading unit
130: conveyor unit 131: first conveyor mechanism 132: second conveyor mechanism
200: test tray 300: semiconductor device 400: test equipment

Claims (13)

In the inline test handler,
A plurality of chamber units in which a test process for a semiconductor device is performed;
At least one sorting unit connected in-line with the plurality of chamber units and accommodating a semiconductor device to be tested in a test tray or separating a semiconductor device from which a test is completed from the test tray;
A main control server that divides the inline test handler into a plurality of cell regions, and generates a movement route for each cell region by dividing the movement paths to which the test tray is transferred by cell region; And
A plurality of cell control server for controlling the movement of the test tray in each cell area according to the movement path for each cell area,
The cell control server,
If it is determined that the test tray has entered the cell area, request transfer control authority of the test tray to the main control server, and the movement path for each cell region and the test tray from the main control server in response to the request for transfer control authority. When the token for the transfer control of the received inline test handler, characterized in that for controlling the transfer of the test tray in the cell area according to the movement path for each cell area. delete The method of claim 1,
Installed to match the cell control server further comprises an identification information confirmation unit for confirming whether the test tray enters or exits the cell area,
And the cell control server determines that the test tray has entered the cell area when the identification information of the test tray is recognized by the identification information checker matched with the cell control server. The method of claim 1,
The cell control server,
When it is determined that the test tray has exited the cell area, the transfer control authority handover request of the test tray including the token for controlling the transfer of the test tray is transmitted to the main control server to terminate transfer control of the test tray. Inline test handler, characterized in that. The method of claim 4, wherein
It is installed to match the cell control server further comprises an identification information confirmation unit for confirming whether the test tray entry and exit into the cell area,
And the cell control server determines that the test tray has entered the cell area when the identification information of the test tray is recognized by the identification information check unit matched with the cell control server. The method according to claim 3 or 5,
The identification information confirmation unit is implemented using an RFID reader, a barcode reader, or a Bluetooth module,
And an RFID tag, a barcode, or a Bluetooth module including identification information of the test tray is mounted on the test tray. The method of claim 1,
The main control server may select a target chamber unit in which the semiconductor device accommodated in the test tray is to be tested from among the plurality of chamber units, and set a movement path to which the test tray is transferred based on the selected target chamber unit. Inline test handler. The method of claim 7, wherein
The main control server selects the target chamber unit based on at least one of a test type for a semiconductor device stored in the test tray, an available state of a chamber unit, and a distance to the chamber unit. Handler. The method of claim 7, wherein
The cell control server monitors the state change of the chamber unit included in the cell area and transmits it to the main control server.
The main control server determines whether to change the selected target chamber unit based on the monitoring result transmitted from the cell control server, and when the target chamber unit is changed, moves the movement path of the test tray based on the new target chamber unit. Inline test handler, characterized in that the reset. The method of claim 1,
The cell control server,
When the test tray enters the cell region, the chamber includes the test tray in the cell region by changing a movement path of the test tray determined to pass through the cell region according to the state of the chamber unit included in the cell region. Bring into the unit, or change the movement path of the test tray to be carried into the target chamber unit according to the state of the target chamber unit included in the cell region so that the test tray passes through the target chamber unit. Inline test handler. The method of claim 1,
Further comprising a conveyor unit comprising a plurality of conveyor mechanisms for transporting the test tray to connect the plurality of chamber units and the at least one sorting unit inline, or the test tray to connect the plurality of chamber units inline. Inline test handler, characterized in that it comprises. The method of claim 1,
The main control server selects a plurality of target chamber units according to the test type of the device of the semiconductor,
A movement path of the test tray, a first movement path for transferring the test tray from the sorting unit to the target chamber unit, a second movement path for transferring the test tray between the plurality of target chamber units, And a third movement path for transferring the test tray from the target chamber unit in which the last test was performed to the sorting unit,
The main control server, the first to third movement paths, characterized in that for distinguishing the cell area. The method of claim 1,
And the main control server and the cell control server are configured in a redundant structure.

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