KR102013426B1 - 기판들의 두께 제어 - Google Patents

기판들의 두께 제어 Download PDF

Info

Publication number
KR102013426B1
KR102013426B1 KR1020157014445A KR20157014445A KR102013426B1 KR 102013426 B1 KR102013426 B1 KR 102013426B1 KR 1020157014445 A KR1020157014445 A KR 1020157014445A KR 20157014445 A KR20157014445 A KR 20157014445A KR 102013426 B1 KR102013426 B1 KR 102013426B1
Authority
KR
South Korea
Prior art keywords
glass
ribbon
laser beam
thickness
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020157014445A
Other languages
English (en)
Korean (ko)
Other versions
KR20150083098A (ko
Inventor
필립 로버트 르블랑
코레이 로버트 유스타니크
Original Assignee
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20150083098A publication Critical patent/KR20150083098A/ko
Application granted granted Critical
Publication of KR102013426B1 publication Critical patent/KR102013426B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/064Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/067Forming glass sheets combined with thermal conditioning of the sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00Shaping glass in contact with the surface of a liquid
    • C03B18/02Forming sheets
    • C03B18/04Changing or regulating the dimensions of the molten glass ribbon
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/02Re-forming glass sheets
    • C03B23/037Re-forming glass sheets by drawing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
KR1020157014445A 2012-11-06 2013-10-31 기판들의 두께 제어 Active KR102013426B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/669,994 US8904822B2 (en) 2012-11-06 2012-11-06 Thickness control of substrates
US13/669,994 2012-11-06
PCT/US2013/067714 WO2014074384A1 (en) 2012-11-06 2013-10-31 Thickness control of substrates

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020197023987A Division KR102176561B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Publications (2)

Publication Number Publication Date
KR20150083098A KR20150083098A (ko) 2015-07-16
KR102013426B1 true KR102013426B1 (ko) 2019-08-22

Family

ID=50621108

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020157014445A Active KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어
KR1020197023987A Active KR102176561B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020197023987A Active KR102176561B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Country Status (6)

Country Link
US (1) US8904822B2 (enExample)
JP (1) JP6158342B2 (enExample)
KR (2) KR102013426B1 (enExample)
CN (1) CN104768883B (enExample)
TW (1) TWI588305B (enExample)
WO (1) WO2014074384A1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290403B2 (en) 2013-02-25 2016-03-22 Corning Incorporated Repositionable heater assemblies for glass production lines and methods of managing temperature of glass in production lines
US9556051B2 (en) * 2014-09-22 2017-01-31 Corning Incorporated Methods for controlling the thickness wedge in a glass ribbon
DE102014119064A1 (de) 2014-12-18 2016-06-23 Schott Ag Glasfilm mit speziell ausgebildeter Kante, Verfahren zu dessen Herstellung sowie dessen Verwendung
JP6498933B2 (ja) * 2014-12-29 2019-04-10 AvanStrate株式会社 ディスプレイ用ガラス基板の製造方法および製造装置
WO2017053843A1 (en) * 2015-09-24 2017-03-30 Corning Incorporated Methods and apparatus for manufacturing glass
JP2017119617A (ja) * 2015-12-28 2017-07-06 AvanStrate株式会社 ガラス基板の製造方法、及び、ガラス基板の製造装置
DE102017101808B4 (de) * 2016-02-04 2024-12-24 Schott Ag Verfahren zur Dickenkontrolle eines Substrates
DE102018111543A1 (de) * 2017-05-22 2018-11-22 Schott Ag Verfahren und Vorrichtung zur Dickenkontrolle eines Materialbands
TW201912597A (zh) * 2017-08-24 2019-04-01 美商康寧公司 用於選擇性地改變玻璃基製品的虛擬溫度之方法及設備
CN112088146A (zh) * 2018-03-06 2020-12-15 康宁公司 控制基板厚度的设备和方法
WO2020005555A1 (en) 2018-06-28 2020-01-02 Corning Incorporated Continuous methods of making glass ribbon and as-drawn glass articles from the same
JP2022523654A (ja) 2019-01-25 2022-04-26 コーニング インコーポレイテッド 融合下方ドローガラス形成のためのデュアル高さ縁ロールシステム
KR20210142012A (ko) * 2019-04-12 2021-11-23 코닝 인코포레이티드 리본을 제조하기 위한 방법들 및 장치
JP2022548842A (ja) * 2019-09-13 2022-11-22 コーニング インコーポレイテッド 加熱デバイスを用いてガラスリボンを形成するためのシステム及び方法
WO2021080766A1 (en) * 2019-10-22 2021-04-29 Corning Incorporated Energy delivery optimization for laser thickness control of fusion glass system and methods
US20220396517A1 (en) * 2019-12-02 2022-12-15 Corning Incorporated Methods and apparatus for manufacturing a glass ribbon
KR102894833B1 (ko) * 2020-06-19 2025-12-02 코닝 인코포레이티드 유리 리본의 제조 방법
CN112279499B (zh) * 2020-10-22 2022-06-07 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
US20250011216A1 (en) * 2021-11-23 2025-01-09 Corning Incorporated Systems and methods for glass streak improvement via high resolution heating
WO2024258546A1 (en) * 2023-06-14 2024-12-19 Corning Incorporated Laser thickness control of fusion glass

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694181A (en) * 1971-06-01 1972-09-26 Ppg Industries Inc Apparatus for controlling glass fractures
JP3589486B2 (ja) * 1994-06-29 2004-11-17 株式会社町田製作所 マイクロレンズの製造方法
US5604635A (en) * 1995-03-08 1997-02-18 Brown University Research Foundation Microlenses and other optical elements fabricated by laser heating of semiconductor doped and other absorbing glasses
US5768022A (en) * 1995-03-08 1998-06-16 Brown University Research Foundation Laser diode having in-situ fabricated lens element
US5742026A (en) * 1995-06-26 1998-04-21 Corning Incorporated Processes for polishing glass and glass-ceramic surfaces using excimer laser radiation
JPH1097715A (ja) * 1996-07-31 1998-04-14 Asahi Komagu Kk 磁気記録媒体用基板および磁気記録媒体
US6291797B1 (en) 1996-08-13 2001-09-18 Nippon Sheet Glass Co., Ltd. Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
DE19918936A1 (de) * 1999-04-27 2000-11-02 Schott Glas Verfahren und Vorrichtung zur Herstellung von Einzelglasscheiben
DE10128636C1 (de) * 2001-06-13 2002-08-01 Schott Glas Verfahren zur selektiven Beeinflussung der Glasdicke bei der Herstellung von Flachglas und Vorrichtung zur Durchführung des Verfahrens
JP2003307602A (ja) * 2002-04-18 2003-10-31 Nippon Sheet Glass Co Ltd 平板レンズおよび平板レンズアレイの製造方法
US20050160767A1 (en) * 2004-01-28 2005-07-28 Robert Novak Horizontal sheet movement control in drawn glass fabrication
JP4998265B2 (ja) * 2005-04-15 2012-08-15 旭硝子株式会社 ガラス板の内部に存在する泡の径を縮小する方法
US20070140311A1 (en) * 2005-12-20 2007-06-21 House Keith L Method and apparatus for characterizing a glass ribbon
JP5115475B2 (ja) * 2006-05-11 2013-01-09 旭硝子株式会社 溶融ガラスの泡除去方法およびガラスの製造方法
US7570366B2 (en) * 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
TWI370894B (en) * 2007-02-26 2012-08-21 Corning Inc Method for measuring distortion
JP5378376B2 (ja) * 2007-07-16 2013-12-25 コーニング インコーポレイテッド レーザ軟化ガラスバンプを用いる微細位置合せ
JP5327702B2 (ja) 2008-01-21 2013-10-30 日本電気硝子株式会社 ガラス基板の製造方法
US20090217705A1 (en) * 2008-02-29 2009-09-03 Filippov Andrey V Temperature control of glass fusion by electromagnetic radiation
CN102076621B (zh) * 2008-05-01 2016-03-02 康宁股份有限公司 透明基材上的凸起特征及相关方法
US7920257B2 (en) * 2008-08-27 2011-04-05 Corning Incorporated Systems and methods for determining the shape of glass sheets
US8899078B2 (en) * 2008-11-26 2014-12-02 Corning Incorporated Glass sheet stabilizing system, glass manufacturing system and method for making a glass sheet
DE102009008292B4 (de) * 2009-02-10 2014-09-25 Schott Ag Kondensator und Verfahren zur Herstellung eines solchen
US8037716B2 (en) 2009-02-27 2011-10-18 Corning Incorporated Thermal control of the bead portion of a glass ribbon
CN102414134B (zh) * 2009-02-27 2015-01-21 康宁股份有限公司 对玻璃带上的区域成形的方法
US8590873B2 (en) * 2009-04-08 2013-11-26 Corning Incorporated Method and device for restraining movement of continuously traveling glass sheet
ATE551304T1 (de) * 2009-05-13 2012-04-15 Corning Inc Verfahren und anlagen zum formen von endlosen glasscheiben
TWI395630B (zh) 2009-06-30 2013-05-11 Mitsuboshi Diamond Ind Co Ltd 使用雷射光之玻璃基板加工裝置
WO2011047008A1 (en) * 2009-10-14 2011-04-21 Corning Incorporated Method and apparatus for controlling sheet thickness
US20110100058A1 (en) * 2009-10-30 2011-05-05 Dickinson Jr James Edward Formation of glass bumps with increased height using thermal annealing
CN102725238B (zh) 2009-11-24 2015-07-01 康宁股份有限公司 用于制造具有受控厚度的玻璃板的方法和装置
WO2011102175A1 (ja) * 2010-02-18 2011-08-25 日本電気硝子株式会社 ガラスフィルムの製造方法およびその製造装置
JP5720885B2 (ja) * 2010-03-03 2015-05-20 日本電気硝子株式会社 ガラスロール、及びガラスロールの製造方法
US9656901B2 (en) * 2010-03-03 2017-05-23 Nippon Electric Glass Co., Ltd. Method of manufacturing a glass roll
JP5778761B2 (ja) * 2010-05-26 2015-09-16 コーニング インコーポレイテッド 流れている溶融ガラスリボンの厚さを制御する装置および方法
US8397536B2 (en) 2010-05-26 2013-03-19 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass
US9676649B2 (en) * 2011-08-26 2017-06-13 Corning Incorporated Glass substrates with strategically imprinted B-side features and methods for manufacturing the same
US8459062B2 (en) * 2011-09-27 2013-06-11 Corning Incorporated Apparatus and methods for producing a glass ribbon
US8677783B2 (en) * 2011-11-28 2014-03-25 Corning Incorporated Method for low energy separation of a glass ribbon

Also Published As

Publication number Publication date
US8904822B2 (en) 2014-12-09
WO2014074384A1 (en) 2014-05-15
KR102176561B1 (ko) 2020-11-10
KR20190099098A (ko) 2019-08-23
CN104768883A (zh) 2015-07-08
CN104768883B (zh) 2018-01-16
JP2015536895A (ja) 2015-12-24
JP6158342B2 (ja) 2017-07-05
US20140123703A1 (en) 2014-05-08
KR20150083098A (ko) 2015-07-16
TWI588305B (zh) 2017-06-21
TW201420822A (zh) 2014-06-01

Similar Documents

Publication Publication Date Title
KR102013426B1 (ko) 기판들의 두께 제어
US8383983B2 (en) Substrate cutting apparatus and method of cutting substrate using the same
US12398060B2 (en) Apparatus and method for controlling substrate thickness
WO2012099286A1 (ko) 레이저를 이용한 도광판 가공장치 및 그 가공방법
KR102787576B1 (ko) 레이저 데빗 제거 시스템 및 방법들
US12304851B2 (en) Energy delivery optimization for laser thickness control of fusion glass system and methods
KR20240115274A (ko) 고해상도 가열을 통한 유리 줄무늬 개선을 위한 시스템들 및 방법들
KR101011325B1 (ko) 레이저를 이용한 도광판 가공장치 및 그 가공방법
WO2024102275A1 (en) Method of processing green tape ceramic material to form ceramic ribbon and battery comprising the ceramic material of the ribbon
US5268776A (en) System for partially erasing thermally written liquid crystal element
KR20100133528A (ko) 레이저를 이용한 도광판 가공장치 및 그 가공방법

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20150529

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20181024

Comment text: Request for Examination of Application

PA0302 Request for accelerated examination

Patent event date: 20181024

Patent event code: PA03022R01D

Comment text: Request for Accelerated Examination

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20190214

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20190610

PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20190814

PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20190816

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20190819

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20220622

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20230626

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20240624

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20250625

Start annual number: 7

End annual number: 7