JP6158342B2 - 基板の厚さ制御 - Google Patents

基板の厚さ制御 Download PDF

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Publication number
JP6158342B2
JP6158342B2 JP2015540781A JP2015540781A JP6158342B2 JP 6158342 B2 JP6158342 B2 JP 6158342B2 JP 2015540781 A JP2015540781 A JP 2015540781A JP 2015540781 A JP2015540781 A JP 2015540781A JP 6158342 B2 JP6158342 B2 JP 6158342B2
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JP
Japan
Prior art keywords
ribbon
glass
laser beam
thickness
preselected
Prior art date
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Active
Application number
JP2015540781A
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English (en)
Japanese (ja)
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JP2015536895A (ja
JP2015536895A5 (enExample
Inventor
ロバート ルブラン，フィリップ
ロバート ルブラン，フィリップ
ロバート ウスタニク，コーリー
ロバート ウスタニク，コーリー
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Corning Inc
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Corning Inc
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Publication of JP2015536895A5 publication Critical patent/JP2015536895A5/ja
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06—Forming glass sheets
    • C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00—Shaping glass in contact with the surface of a liquid
    • C03B18/02—Forming sheets
    • C03B18/04—Changing or regulating the dimensions of the molten glass ribbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/02—Re-forming glass sheets
    • C03B23/037—Re-forming glass sheets by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
JP2015540781A 2012-11-06 2013-10-31 基板の厚さ制御 Active JP6158342B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/669,994 2012-11-06
US13/669,994 US8904822B2 (en) 2012-11-06 2012-11-06 Thickness control of substrates
PCT/US2013/067714 WO2014074384A1 (en) 2012-11-06 2013-10-31 Thickness control of substrates

Publications (3)

Publication Number Publication Date
JP2015536895A JP2015536895A (ja) 2015-12-24
JP2015536895A5 JP2015536895A5 (enExample) 2016-12-15
JP6158342B2 true JP6158342B2 (ja) 2017-07-05

Family

ID=50621108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015540781A Active JP6158342B2 (ja) 2012-11-06 2013-10-31 基板の厚さ制御

Country Status (6)

Country Link
US (1) US8904822B2 (enExample)
JP (1) JP6158342B2 (enExample)
KR (2) KR102176561B1 (enExample)
CN (1) CN104768883B (enExample)
TW (1) TWI588305B (enExample)
WO (1) WO2014074384A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290403B2 (en) 2013-02-25 2016-03-22 Corning Incorporated Repositionable heater assemblies for glass production lines and methods of managing temperature of glass in production lines
US9556051B2 (en) * 2014-09-22 2017-01-31 Corning Incorporated Methods for controlling the thickness wedge in a glass ribbon
DE102014119064A1 (de) 2014-12-18 2016-06-23 Schott Ag Glasfilm mit speziell ausgebildeter Kante, Verfahren zu dessen Herstellung sowie dessen Verwendung
JP6498933B2 (ja) * 2014-12-29 2019-04-10 ＡｖａｎＳｔｒａｔｅ株式会社 ディスプレイ用ガラス基板の製造方法および製造装置
JP2018529615A (ja) * 2015-09-24 2018-10-11 コーニング インコーポレイテッド ガラスの製造方法及び装置
JP2017119617A (ja) * 2015-12-28 2017-07-06 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法、及び、ガラス基板の製造装置
DE102017101808B4 (de) * 2016-02-04 2024-12-24 Schott Ag Verfahren zur Dickenkontrolle eines Substrates
DE102018111543B4 (de) 2017-05-22 2026-07-02 Schott Ag Verfahren und Vorrichtung zur Dickenkontrolle eines Materialbands
TW201912597A (zh) * 2017-08-24 2019-04-01 美商康寧公司 用於選擇性地改變玻璃基製品的虛擬溫度之方法及設備
US12151962B2 (en) 2018-03-06 2024-11-26 Corning Incorporated Apparatus and method for controlling substrate thickness
WO2020005555A1 (en) 2018-06-28 2020-01-02 Corning Incorporated Continuous methods of making glass ribbon and as-drawn glass articles from the same
US11485667B2 (en) 2019-01-25 2022-11-01 Corning Incorporated Dual-elevation edge roll system for fused downdraw glass forming
CN113825729A (zh) * 2019-04-12 2021-12-21 康宁公司 制造带的方法和设备
KR20220063202A (ko) * 2019-09-13 2022-05-17 코닝 인코포레이티드 가열 장치를 이용하여 유리 리본을 형성하는 시스템 및 방법
EP4045469A1 (en) 2019-10-14 2022-08-24 Corning Incorporated Foldable apparatus and methods of making
CN114599615B (zh) * 2019-10-22 2024-10-18 康宁公司 用于熔融玻璃系统及方法的激光厚度控制的能量传递优化
CN114929635B (zh) * 2019-12-02 2025-02-21 康宁公司 制造玻璃带之方法及设备
KR102894833B1 (ko) * 2020-06-19 2025-12-02 코닝 인코포레이티드 유리 리본의 제조 방법
CN112279499B (zh) * 2020-10-22 2022-06-07 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
KR20240115274A (ko) * 2021-11-23 2024-07-25 코닝 인코포레이티드 고해상도 가열을 통한 유리 줄무늬 개선을 위한 시스템들 및 방법들
US20260193122A1 (en) * 2022-12-15 2026-07-09 Corning Incorporated Methods for manufacturing a glass ribbon
KR20260025093A (ko) * 2023-06-14 2026-02-23 코닝 인코포레이티드 융합 유리의 레이저 두께 제어

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694181A (en) * 1971-06-01 1972-09-26 Ppg Industries Inc Apparatus for controlling glass fractures
JP3589486B2 (ja) * 1994-06-29 2004-11-17 株式会社町田製作所 マイクロレンズの製造方法
US5604635A (en) * 1995-03-08 1997-02-18 Brown University Research Foundation Microlenses and other optical elements fabricated by laser heating of semiconductor doped and other absorbing glasses
US5768022A (en) * 1995-03-08 1998-06-16 Brown University Research Foundation Laser diode having in-situ fabricated lens element
US5742026A (en) * 1995-06-26 1998-04-21 Corning Incorporated Processes for polishing glass and glass-ceramic surfaces using excimer laser radiation
JPH1097715A (ja) * 1996-07-31 1998-04-14 Asahi Komagu Kk 磁気記録媒体用基板および磁気記録媒体
EP0959051A4 (en) 1996-08-13 1999-12-15 Nippon Sheet Glass Co Ltd Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
DE19918936A1 (de) * 1999-04-27 2000-11-02 Schott Glas Verfahren und Vorrichtung zur Herstellung von Einzelglasscheiben
DE10128636C1 (de) 2001-06-13 2002-08-01 Schott Glas Verfahren zur selektiven Beeinflussung der Glasdicke bei der Herstellung von Flachglas und Vorrichtung zur Durchführung des Verfahrens
JP2003307602A (ja) * 2002-04-18 2003-10-31 Nippon Sheet Glass Co Ltd 平板レンズおよび平板レンズアレイの製造方法
US20050160767A1 (en) * 2004-01-28 2005-07-28 Robert Novak Horizontal sheet movement control in drawn glass fabrication
KR100910952B1 (ko) * 2005-04-15 2009-08-05 아사히 가라스 가부시키가이샤 유리판 내부에 존재하는 기포의 직경을 축소시키는 방법
US20070140311A1 (en) * 2005-12-20 2007-06-21 House Keith L Method and apparatus for characterizing a glass ribbon
WO2007132590A1 (ja) * 2006-05-11 2007-11-22 Asahi Glass Company, Limited 溶融ガラスの泡除去方法および除去装置、並びにガラスの製造方法
US7570366B2 (en) * 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
TWI370894B (en) * 2007-02-26 2012-08-21 Corning Inc Method for measuring distortion
WO2009011834A2 (en) * 2007-07-16 2009-01-22 Corning Incorporated Microalignment using laser-softened glass bumps
JP5327702B2 (ja) 2008-01-21 2013-10-30 日本電気硝子株式会社 ガラス基板の製造方法
US20090217705A1 (en) * 2008-02-29 2009-09-03 Filippov Andrey V Temperature control of glass fusion by electromagnetic radiation
JP5465235B2 (ja) * 2008-05-01 2014-04-09 コーニング インコーポレイテッド 透明基板上の隆起特徴構造および関連方法
US7920257B2 (en) * 2008-08-27 2011-04-05 Corning Incorporated Systems and methods for determining the shape of glass sheets
US8899078B2 (en) * 2008-11-26 2014-12-02 Corning Incorporated Glass sheet stabilizing system, glass manufacturing system and method for making a glass sheet
DE102009008292B4 (de) * 2009-02-10 2014-09-25 Schott Ag Kondensator und Verfahren zur Herstellung eines solchen
US8037716B2 (en) 2009-02-27 2011-10-18 Corning Incorporated Thermal control of the bead portion of a glass ribbon
CN102414134B (zh) * 2009-02-27 2015-01-21 康宁股份有限公司 对玻璃带上的区域成形的方法
US8590873B2 (en) * 2009-04-08 2013-11-26 Corning Incorporated Method and device for restraining movement of continuously traveling glass sheet
ATE551304T1 (de) * 2009-05-13 2012-04-15 Corning Inc Verfahren und anlagen zum formen von endlosen glasscheiben
TWI395630B (zh) 2009-06-30 2013-05-11 Mitsuboshi Diamond Ind Co Ltd 使用雷射光之玻璃基板加工裝置
CN102648164B (zh) * 2009-10-14 2014-07-23 康宁股份有限公司 用于控制平板厚度的方法和装置
US20110100058A1 (en) * 2009-10-30 2011-05-05 Dickinson Jr James Edward Formation of glass bumps with increased height using thermal annealing
CN102725238B (zh) 2009-11-24 2015-07-01 康宁股份有限公司 用于制造具有受控厚度的玻璃板的方法和装置
JP5717053B2 (ja) * 2010-02-18 2015-05-13 日本電気硝子株式会社 ガラスフィルムの製造方法およびその製造装置
JP5720885B2 (ja) * 2010-03-03 2015-05-20 日本電気硝子株式会社 ガラスロール、及びガラスロールの製造方法
US9656901B2 (en) * 2010-03-03 2017-05-23 Nippon Electric Glass Co., Ltd. Method of manufacturing a glass roll
US8397536B2 (en) 2010-05-26 2013-03-19 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass
KR101850164B1 (ko) * 2010-05-26 2018-04-18 코닝 인코포레이티드 흐르는 녹은 유리 리본의 두께를 제어하는 장치 및 방법
US9676649B2 (en) * 2011-08-26 2017-06-13 Corning Incorporated Glass substrates with strategically imprinted B-side features and methods for manufacturing the same
US8459062B2 (en) * 2011-09-27 2013-06-11 Corning Incorporated Apparatus and methods for producing a glass ribbon
US8677783B2 (en) * 2011-11-28 2014-03-25 Corning Incorporated Method for low energy separation of a glass ribbon

Also Published As

Publication number Publication date
KR20190099098A (ko) 2019-08-23
KR20150083098A (ko) 2015-07-16
TW201420822A (zh) 2014-06-01
JP2015536895A (ja) 2015-12-24
KR102176561B1 (ko) 2020-11-10
US20140123703A1 (en) 2014-05-08
WO2014074384A1 (en) 2014-05-15
KR102013426B1 (ko) 2019-08-22
CN104768883A (zh) 2015-07-08
US8904822B2 (en) 2014-12-09
CN104768883B (zh) 2018-01-16
TWI588305B (zh) 2017-06-21

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