KR101997020B1 - 근자외선 발광 소자 - Google Patents
근자외선 발광 소자 Download PDFInfo
- Publication number
- KR101997020B1 KR101997020B1 KR1020130025989A KR20130025989A KR101997020B1 KR 101997020 B1 KR101997020 B1 KR 101997020B1 KR 1020130025989 A KR1020130025989 A KR 1020130025989A KR 20130025989 A KR20130025989 A KR 20130025989A KR 101997020 B1 KR101997020 B1 KR 101997020B1
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- South Korea
- Prior art keywords
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- barrier
- gan
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910002601 GaN Inorganic materials 0.000 claims abstract description 85
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims abstract description 23
- 230000005855 radiation Effects 0.000 claims abstract description 3
- 230000004888 barrier function Effects 0.000 claims description 87
- 239000012535 impurity Substances 0.000 claims description 24
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims 10
- 239000010410 layer Substances 0.000 description 319
- 239000000203 mixture Substances 0.000 description 19
- 239000013078 crystal Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 8
- 229910002704 AlGaN Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000031700 light absorption Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- -1 gallium nitride compound Chemical class 0.000 description 4
- 239000012792 core layer Substances 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3033—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Led Devices (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015503124A JP6484551B2 (ja) | 2012-03-29 | 2013-03-29 | 発光素子 |
| US13/853,361 US9224913B2 (en) | 2012-03-29 | 2013-03-29 | Near UV light emitting device |
| PCT/KR2013/002647 WO2013147552A1 (en) | 2012-03-29 | 2013-03-29 | Near uv light emitting device |
| CN201380017852.5A CN104205367B (zh) | 2012-03-29 | 2013-03-29 | 近紫外发光装置 |
| US14/526,110 US9312447B2 (en) | 2012-03-29 | 2014-10-28 | Near UV light emitting device |
| US14/811,253 US10177273B2 (en) | 2012-03-29 | 2015-07-28 | UV light emitting device |
| US15/096,252 US10164150B2 (en) | 2012-03-29 | 2016-04-11 | Near UV light emitting device |
| JP2017241150A JP6587673B2 (ja) | 2012-03-29 | 2017-12-15 | 発光素子 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120032195 | 2012-03-29 | ||
| KR20120032195 | 2012-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130111294A KR20130111294A (ko) | 2013-10-10 |
| KR101997020B1 true KR101997020B1 (ko) | 2019-07-08 |
Family
ID=49632874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020130025989A Active KR101997020B1 (ko) | 2012-03-29 | 2013-03-12 | 근자외선 발광 소자 |
Country Status (3)
| Country | Link |
|---|---|
| JP (2) | JP6484551B2 (enExample) |
| KR (1) | KR101997020B1 (enExample) |
| CN (1) | CN104205367B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102160070B1 (ko) * | 2013-10-28 | 2020-09-25 | 서울바이오시스 주식회사 | 근자외선 발광 소자 |
| DE102016112294A1 (de) * | 2016-07-05 | 2018-01-11 | Osram Opto Semiconductors Gmbh | Halbleiterschichtenfolge |
| DE102016117477A1 (de) * | 2016-09-16 | 2018-03-22 | Osram Opto Semiconductors Gmbh | Halbleiterschichtenfolge |
| DE102017104370A1 (de) * | 2017-03-02 | 2018-09-06 | Osram Opto Semiconductors Gmbh | Halbleiterkörper |
| FR3076399B1 (fr) * | 2017-12-28 | 2020-01-24 | Aledia | Dispositif optoelectronique comprenant des diodes electroluminescentes tridimensionnelles |
| JP6927112B2 (ja) * | 2018-03-27 | 2021-08-25 | 豊田合成株式会社 | 半導体装置の製造方法 |
| CN110581204A (zh) * | 2019-08-28 | 2019-12-17 | 映瑞光电科技(上海)有限公司 | GaN基发光二极管外延结构及其制备方法 |
| CN111403564B (zh) * | 2020-03-31 | 2024-11-05 | 厦门乾照半导体科技有限公司 | 一种红外发光二极管外延结构、芯片及其制作方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003115642A (ja) | 2001-03-28 | 2003-04-18 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
| US20050127391A1 (en) * | 2001-11-05 | 2005-06-16 | Nichia Corporation | Semiconductor element |
| US20110017976A1 (en) * | 2008-03-27 | 2011-01-27 | Nitek, Inc | Ultraviolet light emitting diode/laser diode with nested superlattice |
| US20110253974A1 (en) | 2008-11-20 | 2011-10-20 | Mitsubishi Chemical Corporation | Nitride semiconductor |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09232629A (ja) * | 1996-02-26 | 1997-09-05 | Toshiba Corp | 半導体素子 |
| JP3551101B2 (ja) * | 1999-03-29 | 2004-08-04 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| JP2003046127A (ja) * | 2001-05-23 | 2003-02-14 | Sanyo Electric Co Ltd | 窒化物系半導体発光素子 |
| JP3946541B2 (ja) * | 2002-02-25 | 2007-07-18 | 三菱電線工業株式会社 | 発光装置およびそれを用いた照明装置、ならびに該発光装置の製造方法と設計方法 |
| JP4385746B2 (ja) * | 2003-11-28 | 2009-12-16 | 三菱化学株式会社 | 窒化物系半導体素子の製造方法 |
| KR100957750B1 (ko) * | 2008-08-12 | 2010-05-13 | 우리엘에스티 주식회사 | 발광 소자 |
| KR101017396B1 (ko) * | 2008-08-20 | 2011-02-28 | 서울옵토디바이스주식회사 | 변조도핑층을 갖는 발광 다이오드 |
| JP5330040B2 (ja) * | 2009-03-17 | 2013-10-30 | 株式会社東芝 | 半導体素子、半導体装置、半導体ウェーハ及び半導体結晶の成長方法 |
| EP2523228B1 (en) * | 2010-01-05 | 2017-04-26 | Seoul Viosys Co., Ltd | Light emitting diode |
-
2013
- 2013-03-12 KR KR1020130025989A patent/KR101997020B1/ko active Active
- 2013-03-29 CN CN201380017852.5A patent/CN104205367B/zh active Active
- 2013-03-29 JP JP2015503124A patent/JP6484551B2/ja active Active
-
2017
- 2017-12-15 JP JP2017241150A patent/JP6587673B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003115642A (ja) | 2001-03-28 | 2003-04-18 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
| US20050127391A1 (en) * | 2001-11-05 | 2005-06-16 | Nichia Corporation | Semiconductor element |
| US20110017976A1 (en) * | 2008-03-27 | 2011-01-27 | Nitek, Inc | Ultraviolet light emitting diode/laser diode with nested superlattice |
| US20110253974A1 (en) | 2008-11-20 | 2011-10-20 | Mitsubishi Chemical Corporation | Nitride semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130111294A (ko) | 2013-10-10 |
| JP2015511776A (ja) | 2015-04-20 |
| CN104205367B (zh) | 2017-06-16 |
| JP2018074173A (ja) | 2018-05-10 |
| JP6587673B2 (ja) | 2019-10-09 |
| JP6484551B2 (ja) | 2019-03-13 |
| CN104205367A (zh) | 2014-12-10 |
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Legal Events
| Date | Code | Title | Description |
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| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20130312 |
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| PG1501 | Laying open of application | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20180226 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20130312 Comment text: Patent Application |
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| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20190128 Patent event code: PE09021S01D |
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| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20190401 |
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| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20190701 Patent event code: PR07011E01D |
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| PR1002 | Payment of registration fee |
Payment date: 20190702 End annual number: 3 Start annual number: 1 |
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