KR101991990B1 - 액추에이터 및 점착 척 장치 - Google Patents

액추에이터 및 점착 척 장치 Download PDF

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Publication number
KR101991990B1
KR101991990B1 KR1020157020240A KR20157020240A KR101991990B1 KR 101991990 B1 KR101991990 B1 KR 101991990B1 KR 1020157020240 A KR1020157020240 A KR 1020157020240A KR 20157020240 A KR20157020240 A KR 20157020240A KR 101991990 B1 KR101991990 B1 KR 101991990B1
Authority
KR
South Korea
Prior art keywords
actuator
mover
metal bellows
workpiece
base
Prior art date
Application number
KR1020157020240A
Other languages
English (en)
Korean (ko)
Other versions
KR20150099607A (ko
Inventor
요시카즈 오타니
겐지 사토
히로시 미나모토
가즈나리 아오키
유지 노부야스
Original Assignee
신에츠 엔지니어링 가부시키가이샤
이리에 고켕 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신에츠 엔지니어링 가부시키가이샤, 이리에 고켕 가부시키가이샤 filed Critical 신에츠 엔지니어링 가부시키가이샤
Publication of KR20150099607A publication Critical patent/KR20150099607A/ko
Application granted granted Critical
Publication of KR101991990B1 publication Critical patent/KR101991990B1/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
    • F15B15/149—Fluid interconnections, e.g. fluid connectors, passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/24—Other details, e.g. assembly with regulating devices for restricting the stroke
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Actuator (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Liquid Crystal (AREA)
  • Manipulator (AREA)
KR1020157020240A 2012-12-25 2012-12-25 액추에이터 및 점착 척 장치 KR101991990B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/083536 WO2014102913A1 (ja) 2012-12-25 2012-12-25 アクチュエータ及び粘着チャック装置

Publications (2)

Publication Number Publication Date
KR20150099607A KR20150099607A (ko) 2015-08-31
KR101991990B1 true KR101991990B1 (ko) 2019-06-21

Family

ID=50112324

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157020240A KR101991990B1 (ko) 2012-12-25 2012-12-25 액추에이터 및 점착 척 장치

Country Status (5)

Country Link
JP (1) JP5395313B1 (zh)
KR (1) KR101991990B1 (zh)
CN (1) CN104919189B (zh)
TW (1) TWI598991B (zh)
WO (1) WO2014102913A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101838681B1 (ko) * 2014-07-07 2018-03-14 에이피시스템 주식회사 지지척 및 기판 처리 장치
JP6942908B1 (ja) * 2020-11-13 2021-09-29 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
TW202320152A (zh) * 2021-11-02 2023-05-16 美商蘭姆研究公司 升降銷止擋件

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346009A (ja) 1999-06-03 2000-12-12 Sumitomo Heavy Ind Ltd 一軸アクチュエータ
WO2006046379A1 (ja) 2004-10-28 2006-05-04 Shin-Etsu Engineering Co., Ltd. 粘着チャック装置
JP2008263731A (ja) 2007-04-12 2008-10-30 Utsunomiya Univ 変位変換ユニット、加工機械

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476777A (en) * 1977-11-30 1979-06-19 Nihon Plast Co Ltd Bellows type double acting actuator
JPH0827450B2 (ja) * 1993-03-29 1996-03-21 日本電気株式会社 液晶表示パネルの冷却機構
JPH0922017A (ja) * 1995-07-07 1997-01-21 Sanyo Electric Co Ltd 液晶表示器及びその製造方法
JP3574865B2 (ja) 1999-11-08 2004-10-06 株式会社 日立インダストリイズ 基板の組立方法とその装置
JP3773866B2 (ja) * 2002-03-14 2006-05-10 株式会社 日立インダストリイズ 基板の組立方法およびその装置
JP3726091B2 (ja) * 2003-07-31 2005-12-14 テクノダイイチ株式会社 平板材端面の切削加工方法および切削加工装置
JP3963879B2 (ja) * 2003-08-04 2007-08-22 三洋電機株式会社 レンズシフト機構及び投写型映像表示装置
JP4801389B2 (ja) * 2005-07-22 2011-10-26 Ｈｏｙａ株式会社 駆動装置
JP2008298232A (ja) * 2007-06-01 2008-12-11 Shimadzu Corp 圧空アクチュエータ
JP5380225B2 (ja) * 2009-09-24 2014-01-08 株式会社日立ハイテクノロジーズ ガラス基板の検査装置
KR101303919B1 (ko) * 2011-03-31 2013-09-05 주식회사 케이에스엠컴포넌트 벨로우즈 조립체.
CN102664512B (zh) * 2012-05-09 2014-01-29 林贵生 一种无源永磁耦合传动、制动或负载装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346009A (ja) 1999-06-03 2000-12-12 Sumitomo Heavy Ind Ltd 一軸アクチュエータ
WO2006046379A1 (ja) 2004-10-28 2006-05-04 Shin-Etsu Engineering Co., Ltd. 粘着チャック装置
JP2008263731A (ja) 2007-04-12 2008-10-30 Utsunomiya Univ 変位変換ユニット、加工機械

Also Published As

Publication number Publication date
TWI598991B (zh) 2017-09-11
CN104919189B (zh) 2017-04-12
CN104919189A (zh) 2015-09-16
KR20150099607A (ko) 2015-08-31
JPWO2014102913A1 (ja) 2017-01-12
JP5395313B1 (ja) 2014-01-22
TW201442145A (zh) 2014-11-01
WO2014102913A1 (ja) 2014-07-03

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