KR101972196B1 - 적외선 센서 - Google Patents

적외선 센서 Download PDF

Info

Publication number
KR101972196B1
KR101972196B1 KR1020147021179A KR20147021179A KR101972196B1 KR 101972196 B1 KR101972196 B1 KR 101972196B1 KR 1020147021179 A KR1020147021179 A KR 1020147021179A KR 20147021179 A KR20147021179 A KR 20147021179A KR 101972196 B1 KR101972196 B1 KR 101972196B1
Authority
KR
South Korea
Prior art keywords
film
wiring
insulating film
infrared
wiring film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020147021179A
Other languages
English (en)
Korean (ko)
Other versions
KR20140128973A (ko
Inventor
가즈요시 다리
모토타카 이시카와
게이지 시라타
겐조 나카무라
Original Assignee
미쓰비시 마테리알 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시 마테리알 가부시키가이샤 filed Critical 미쓰비시 마테리알 가부시키가이샤
Publication of KR20140128973A publication Critical patent/KR20140128973A/ko
Application granted granted Critical
Publication of KR101972196B1 publication Critical patent/KR101972196B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/20—Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat
    • G03G15/2098—Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat using light, e.g. UV photohardening
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J2005/103—Absorbing heated plate or film and temperature detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/206—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices on foils
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/20—Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat
    • G03G15/2003—Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat using heat
    • G03G15/2014—Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat using heat using contact heat
    • G03G15/2039—Apparatus for electrographic processes using a charge pattern for fixing, e.g. by using heat using heat using contact heat with means for controlling the fixing temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G2215/00—Apparatus for electrophotographic processes
    • G03G2215/00362—Apparatus for electrophotographic processes relating to the copy medium handling
    • G03G2215/00535—Stable handling of copy medium
    • G03G2215/00717—Detection of physical properties
    • G03G2215/00772—Detection of physical properties of temperature influencing copy sheet handling
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/189—Printed circuits structurally associated with non-printed electric components characterised by the use of a flexible or folded printed circuit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/06—Thermal details
    • H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09136—Means for correcting warpage
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09781—Dummy conductors, i.e. not used for normal transport of current; Dummy electrodes of components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Radiation Pyrometers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
KR1020147021179A 2012-02-01 2013-01-29 적외선 센서 Expired - Fee Related KR101972196B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2012-019431 2012-02-01
JP2012019431A JP5892368B2 (ja) 2012-02-01 2012-02-01 赤外線センサ
PCT/JP2013/000467 WO2013114861A1 (ja) 2012-02-01 2013-01-29 赤外線センサ

Publications (2)

Publication Number Publication Date
KR20140128973A KR20140128973A (ko) 2014-11-06
KR101972196B1 true KR101972196B1 (ko) 2019-04-24

Family

ID=48904908

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147021179A Expired - Fee Related KR101972196B1 (ko) 2012-02-01 2013-01-29 적외선 센서

Country Status (8)

Country Link
US (1) US9568371B2 (enExample)
EP (1) EP2811271B1 (enExample)
JP (1) JP5892368B2 (enExample)
KR (1) KR101972196B1 (enExample)
CN (1) CN104011519B (enExample)
IN (1) IN2014DN05780A (enExample)
TW (1) TWI568997B (enExample)
WO (1) WO2013114861A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5488751B1 (ja) * 2013-08-30 2014-05-14 富士ゼロックス株式会社 温度センサ、定着装置、および画像形成装置
WO2017131151A1 (ja) * 2016-01-29 2017-08-03 三菱マテリアル株式会社 赤外線センサ
JP6677925B2 (ja) * 2016-01-29 2020-04-08 三菱マテリアル株式会社 赤外線センサ
JP6860812B2 (ja) * 2017-01-05 2021-04-21 三菱マテリアル株式会社 赤外線センサ
CN106525270A (zh) * 2016-11-22 2017-03-22 合肥舒实工贸有限公司 温度传感器
CN106556470A (zh) * 2016-11-22 2017-04-05 合肥舒实工贸有限公司 温度传感器
JP6743737B2 (ja) * 2017-03-24 2020-08-19 三菱マテリアル株式会社 赤外線センサ
JP6743741B2 (ja) * 2017-03-29 2020-08-19 三菱マテリアル株式会社 赤外線センサ
JP7030420B2 (ja) * 2017-04-10 2022-03-07 日本特殊陶業株式会社 保持装置
EP3734242B1 (en) * 2017-12-28 2023-12-13 Murata Manufacturing Co., Ltd. Photodetector
WO2019155565A1 (ja) * 2018-02-08 2019-08-15 株式会社芝浦電子 赤外線温度センサ
JP7188436B2 (ja) 2018-03-07 2022-12-13 Tdk株式会社 電磁波センサ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962854A (en) 1996-06-12 1999-10-05 Ishizuka Electronics Corporation Infrared sensor and infrared detector
JP2002071451A (ja) 2000-08-29 2002-03-08 Sharp Corp 熱型赤外線検出素子及びそれを用いた赤外線撮像素子
JP2009180682A (ja) 2008-01-31 2009-08-13 Ritsumeikan 赤外線センサ
JP2011013213A (ja) 2009-06-02 2011-01-20 Mitsubishi Materials Corp 赤外線センサ
JP2011102791A (ja) 2009-10-17 2011-05-26 Mitsubishi Materials Corp 赤外線センサ及びこれを備えた回路基板

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763585A (ja) * 1993-08-26 1995-03-10 Hokuriku Electric Ind Co Ltd 環境センサ
JP3327668B2 (ja) * 1994-03-24 2002-09-24 石塚電子株式会社 赤外線検出器
JP3494747B2 (ja) * 1995-03-31 2004-02-09 石塚電子株式会社 薄膜温度センサ及びその製造方法
JPH08278192A (ja) * 1995-04-07 1996-10-22 Ishizuka Denshi Kk 赤外線検出器
JP4628540B2 (ja) 2000-11-20 2011-02-09 石塚電子株式会社 赤外線温度センサ
JP2003194630A (ja) * 2001-12-27 2003-07-09 Ishizuka Electronics Corp 非接触温度センサおよび非接触温度センサ用検出回路
JP5079211B2 (ja) * 2004-10-13 2012-11-21 浜松ホトニクス株式会社 赤外線検出装置及びその製造方法
JP4483521B2 (ja) 2004-10-21 2010-06-16 Ｔｄｋ株式会社 非接触温度センサ
JP5832007B2 (ja) * 2009-12-25 2015-12-16 三菱マテリアル株式会社 赤外線センサ及びその製造方法
JP2011220939A (ja) * 2010-04-13 2011-11-04 Panasonic Electric Works Co Ltd 赤外線センサの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962854A (en) 1996-06-12 1999-10-05 Ishizuka Electronics Corporation Infrared sensor and infrared detector
JP2002071451A (ja) 2000-08-29 2002-03-08 Sharp Corp 熱型赤外線検出素子及びそれを用いた赤外線撮像素子
JP2009180682A (ja) 2008-01-31 2009-08-13 Ritsumeikan 赤外線センサ
JP2011013213A (ja) 2009-06-02 2011-01-20 Mitsubishi Materials Corp 赤外線センサ
JP2011102791A (ja) 2009-10-17 2011-05-26 Mitsubishi Materials Corp 赤外線センサ及びこれを備えた回路基板

Also Published As

Publication number Publication date
JP5892368B2 (ja) 2016-03-23
EP2811271A1 (en) 2014-12-10
TW201344166A (zh) 2013-11-01
IN2014DN05780A (enExample) 2015-04-10
KR20140128973A (ko) 2014-11-06
US20140374596A1 (en) 2014-12-25
WO2013114861A1 (ja) 2013-08-08
US9568371B2 (en) 2017-02-14
JP2013156235A (ja) 2013-08-15
CN104011519B (zh) 2016-03-23
TWI568997B (zh) 2017-02-01
CN104011519A (zh) 2014-08-27
EP2811271A4 (en) 2015-09-30
EP2811271B1 (en) 2019-04-24

Similar Documents

Publication Publication Date Title
KR101972196B1 (ko) 적외선 센서
JP5640529B2 (ja) 赤外線センサ及びこれを備えた回路基板
JP5832007B2 (ja) 赤外線センサ及びその製造方法
KR101972197B1 (ko) 적외선 센서 및 적외선 센서 장치
KR101729370B1 (ko) 적외선 센서
JP2011013213A (ja) 赤外線センサ
KR20140012697A (ko) 적외선 센서
JP6319406B2 (ja) 赤外線センサ装置
JP5720999B2 (ja) 赤外線センサ及びこれを備えた回路基板

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20230419

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20230419

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000