KR101957957B1 - 정전 인코더 - Google Patents

정전 인코더 Download PDF

Info

Publication number
KR101957957B1
KR101957957B1 KR1020177019622A KR20177019622A KR101957957B1 KR 101957957 B1 KR101957957 B1 KR 101957957B1 KR 1020177019622 A KR1020177019622 A KR 1020177019622A KR 20177019622 A KR20177019622 A KR 20177019622A KR 101957957 B1 KR101957957 B1 KR 101957957B1
Authority
KR
South Korea
Prior art keywords
electrode
electrodes
detection
rotor
transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020177019622A
Other languages
English (en)
Korean (ko)
Other versions
KR20170095989A (ko
Inventor
다이키 콘도
Original Assignee
오리엔탈모터가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오리엔탈모터가부시끼가이샤 filed Critical 오리엔탈모터가부시끼가이샤
Publication of KR20170095989A publication Critical patent/KR20170095989A/ko
Application granted granted Critical
Publication of KR101957957B1 publication Critical patent/KR101957957B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/10—Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance
    • G01R21/12—Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance in circuits having distributed constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/14—Measuring resistance by measuring current or voltage obtained from a reference source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2648—Characterising semiconductor materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2837—Characterising or performance testing, e.g. of frequency response

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
KR1020177019622A 2014-12-17 2015-12-04 정전 인코더 Active KR101957957B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014255350A JP6156747B2 (ja) 2014-12-17 2014-12-17 静電エンコーダ
JPJP-P-2014-255350 2014-12-17
PCT/JP2015/084130 WO2016098613A1 (ja) 2014-12-17 2015-12-04 静電エンコーダ

Publications (2)

Publication Number Publication Date
KR20170095989A KR20170095989A (ko) 2017-08-23
KR101957957B1 true KR101957957B1 (ko) 2019-07-04

Family

ID=56126506

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177019622A Active KR101957957B1 (ko) 2014-12-17 2015-12-04 정전 인코더

Country Status (7)

Country Link
US (1) US10551219B2 (https=)
EP (2) EP3486614B1 (https=)
JP (1) JP6156747B2 (https=)
KR (1) KR101957957B1 (https=)
CN (1) CN107003154B (https=)
TW (2) TWI699515B (https=)
WO (1) WO2016098613A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017126271A1 (de) * 2017-11-09 2019-05-09 Webasto SE Positionierung von Motoren mittels kapazitiver Messung
JP2021055997A (ja) * 2017-12-13 2021-04-08 株式会社村田製作所 回転型エンコーダ
CN109211092B (zh) * 2017-12-15 2019-06-21 重庆理工大学 一种基于交变电场的绝对式时栅角位移传感器
CN108253882A (zh) * 2018-04-10 2018-07-06 中国工程物理研究院电子工程研究所 一种微马达的角度测量装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
JP2530252B2 (ja) * 1989-10-08 1996-09-04 株式会社ミツトヨ 角度位置および軸線方向の位置を同時に検知する方法および装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429307A (en) 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
US4477860A (en) * 1983-09-19 1984-10-16 Cain Encoder Company Electrode array
CH690043A5 (de) * 1994-11-23 2000-03-31 Heidenhain Gmbh Dr Johannes Verfahren zum Lagebestimmen eines sich bewegenden Körpers.
JP3625530B2 (ja) 1995-06-12 2005-03-02 ヒューレット・パッカード・カンパニー 位置検出装置及び位置検出方法
US6492911B1 (en) 1999-04-19 2002-12-10 Netzer Motion Sensors Ltd. Capacitive displacement encoder
JP2001183163A (ja) * 1999-12-28 2001-07-06 Mitsutoyo Corp 変位測定装置
GB0121934D0 (en) * 2001-09-12 2001-10-31 Europ Technology For Business Angular rate sensors
JP4090939B2 (ja) * 2002-05-29 2008-05-28 ニッタ株式会社 静電容量式センサおよびその製造方法
JP2005061964A (ja) * 2003-08-11 2005-03-10 Yazaki Corp 回転角センサ
JP3956369B2 (ja) * 2004-02-16 2007-08-08 本田技研工業株式会社 静電容量型センサ
KR100972623B1 (ko) 2008-04-16 2010-07-28 (주)케이엠비앤센서 비접촉 정전용량식 회전 센서 및 그를 이용한 각도검출회로
JP5263822B2 (ja) * 2008-08-20 2013-08-14 株式会社青電舎 回転式静電型エンコーダ
DE102009043977A1 (de) * 2008-12-12 2010-06-17 Fanuc Ltd. Kapazitiver Codierer
US20100148802A1 (en) * 2008-12-15 2010-06-17 Fanuc Ltd Capacitance-type encoder
EP2330388B1 (en) 2009-12-04 2013-09-04 Hengstler GmbH Method of determining an absolute angle of rotation of a capacitive motion encoder
CN103017803A (zh) * 2011-09-27 2013-04-03 常州科教城新能源汽车工程技术研究院 编码器码盘

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
JP2530252B2 (ja) * 1989-10-08 1996-09-04 株式会社ミツトヨ 角度位置および軸線方向の位置を同時に検知する方法および装置

Also Published As

Publication number Publication date
EP3236214A4 (en) 2018-05-30
TW201632838A (zh) 2016-09-16
EP3236214B1 (en) 2020-08-12
CN107003154B (zh) 2019-09-10
JP2016114559A (ja) 2016-06-23
WO2016098613A1 (ja) 2016-06-23
JP6156747B2 (ja) 2017-07-05
EP3486614A1 (en) 2019-05-22
US20170350731A1 (en) 2017-12-07
TWI681172B (zh) 2020-01-01
EP3236214A1 (en) 2017-10-25
TW201945694A (zh) 2019-12-01
US10551219B2 (en) 2020-02-04
KR20170095989A (ko) 2017-08-23
CN107003154A (zh) 2017-08-01
EP3486614B1 (en) 2020-01-29
TWI699515B (zh) 2020-07-21

Similar Documents

Publication Publication Date Title
CN112113585B (zh) 编码器及编码器绝对角度的检测方法
JP6821288B2 (ja) 交番電界に基づくアブソリュート形タイムグレーティング角変位センサ
KR101957957B1 (ko) 정전 인코더
KR101078078B1 (ko) 자기식 회전각 검출기
JP4836058B2 (ja) 磁気式エンコーダ装置
KR102481561B1 (ko) 인코더 및 회전 각도 위치 산출 방법
US11512977B2 (en) Redundant resolver and rotation angle detection device using same
JP6969581B2 (ja) 回転角度検出装置
JP2023523149A (ja) 多重位相レゾルバ装置および差動位相合成装置
JP7338099B2 (ja) 誘導センサを用いるマルチレベル回転リゾルバー
GB2517152A (en) Position sensor
US4199800A (en) Brushless DC tachometer
WO2014195424A1 (en) Rotary encoder
CN104823026B (zh) 具有减小的偏差电压的位置检测组件以及使用这样的组件的方法
JP5994407B2 (ja) 回転角検出装置
JP6320098B2 (ja) 可変インダクタンス型位置センサシステムおよび可変インダクタンス型方法
Kennel New developments in capacitive encoders for servo drives
CN114061513B (zh) 基于纳米圆时栅的自标定方法
JP6636769B2 (ja) リラクタンスレゾルバのロータ芯出し方法
WO2025175571A1 (en) Capacitive encoder
CN221826070U (zh) 一种带温度补偿的绝对式角位移传感器
JP6371643B2 (ja) 静電エンコーダ
CN110233034A (zh) 相位调制方式的冗余系统2相输出型旋转变压器以及其信号输出方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 8