CN107003154B - 静电编码器 - Google Patents

静电编码器 Download PDF

Info

Publication number
CN107003154B
CN107003154B CN201580068399.XA CN201580068399A CN107003154B CN 107003154 B CN107003154 B CN 107003154B CN 201580068399 A CN201580068399 A CN 201580068399A CN 107003154 B CN107003154 B CN 107003154B
Authority
CN
China
Prior art keywords
electrode
electrodes
detection
rotor
relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580068399.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN107003154A (zh
Inventor
近藤大生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oriental Motor Co Ltd
Original Assignee
Oriental Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oriental Motor Co Ltd filed Critical Oriental Motor Co Ltd
Publication of CN107003154A publication Critical patent/CN107003154A/zh
Application granted granted Critical
Publication of CN107003154B publication Critical patent/CN107003154B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00Arrangements for measuring electric power or power factor
    • G01R21/10Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance
    • G01R21/12Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance in circuits having distributed constants
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/14Measuring resistance by measuring current or voltage obtained from a reference source
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2648Characterising semiconductor materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836Fault-finding or characterising
    • G01R31/2837Characterising or performance testing, e.g. of frequency response

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CN201580068399.XA 2014-12-17 2015-12-04 静电编码器 Active CN107003154B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014-255350 2014-12-17
JP2014255350A JP6156747B2 (ja) 2014-12-17 2014-12-17 静電エンコーダ
PCT/JP2015/084130 WO2016098613A1 (ja) 2014-12-17 2015-12-04 静電エンコーダ

Publications (2)

Publication Number Publication Date
CN107003154A CN107003154A (zh) 2017-08-01
CN107003154B true CN107003154B (zh) 2019-09-10

Family

ID=56126506

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580068399.XA Active CN107003154B (zh) 2014-12-17 2015-12-04 静电编码器

Country Status (7)

Country Link
US (1) US10551219B2 (https=)
EP (2) EP3486614B1 (https=)
JP (1) JP6156747B2 (https=)
KR (1) KR101957957B1 (https=)
CN (1) CN107003154B (https=)
TW (2) TWI699515B (https=)
WO (1) WO2016098613A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017126271A1 (de) * 2017-11-09 2019-05-09 Webasto SE Positionierung von Motoren mittels kapazitiver Messung
JP2021055997A (ja) * 2017-12-13 2021-04-08 株式会社村田製作所 回転型エンコーダ
CN109211092B (zh) * 2017-12-15 2019-06-21 重庆理工大学 一种基于交变电场的绝对式时栅角位移传感器
CN108253882A (zh) * 2018-04-10 2018-07-06 中国工程物理研究院电子工程研究所 一种微马达的角度测量装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
US4477860A (en) * 1983-09-19 1984-10-16 Cain Encoder Company Electrode array
EP0435429A1 (en) * 1989-10-10 1991-07-03 Mitutoyo Corporation Method and apparatus for simultaneous sensing of angular and axial position
CN1347493A (zh) * 1999-04-19 2002-05-01 内茨精密运动传感器有限公司 电容式位移编码器
JP2005061964A (ja) * 2003-08-11 2005-03-10 Yazaki Corp 回転角センサ
CN101750105A (zh) * 2008-12-15 2010-06-23 发那科株式会社 电容型编码器
CN102713526A (zh) * 2009-12-04 2012-10-03 亨斯特勒有限公司 确定电容式运动编码器的绝对位置角的方法
CN103017803A (zh) * 2011-09-27 2013-04-03 常州科教城新能源汽车工程技术研究院 编码器码盘

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429307A (en) 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
CH690043A5 (de) * 1994-11-23 2000-03-31 Heidenhain Gmbh Dr Johannes Verfahren zum Lagebestimmen eines sich bewegenden Körpers.
JP3625530B2 (ja) 1995-06-12 2005-03-02 ヒューレット・パッカード・カンパニー 位置検出装置及び位置検出方法
JP2001183163A (ja) * 1999-12-28 2001-07-06 Mitsutoyo Corp 変位測定装置
GB0121934D0 (en) * 2001-09-12 2001-10-31 Europ Technology For Business Angular rate sensors
JP4090939B2 (ja) * 2002-05-29 2008-05-28 ニッタ株式会社 静電容量式センサおよびその製造方法
JP3956369B2 (ja) * 2004-02-16 2007-08-08 本田技研工業株式会社 静電容量型センサ
KR100972623B1 (ko) 2008-04-16 2010-07-28 (주)케이엠비앤센서 비접촉 정전용량식 회전 센서 및 그를 이용한 각도검출회로
JP5263822B2 (ja) * 2008-08-20 2013-08-14 株式会社青電舎 回転式静電型エンコーダ
DE102009043977A1 (de) * 2008-12-12 2010-06-17 Fanuc Ltd. Kapazitiver Codierer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
US4477860A (en) * 1983-09-19 1984-10-16 Cain Encoder Company Electrode array
EP0435429A1 (en) * 1989-10-10 1991-07-03 Mitutoyo Corporation Method and apparatus for simultaneous sensing of angular and axial position
CN1347493A (zh) * 1999-04-19 2002-05-01 内茨精密运动传感器有限公司 电容式位移编码器
JP2005061964A (ja) * 2003-08-11 2005-03-10 Yazaki Corp 回転角センサ
CN101750105A (zh) * 2008-12-15 2010-06-23 发那科株式会社 电容型编码器
CN102713526A (zh) * 2009-12-04 2012-10-03 亨斯特勒有限公司 确定电容式运动编码器的绝对位置角的方法
CN103017803A (zh) * 2011-09-27 2013-04-03 常州科教城新能源汽车工程技术研究院 编码器码盘

Also Published As

Publication number Publication date
EP3236214A4 (en) 2018-05-30
TW201632838A (zh) 2016-09-16
EP3236214B1 (en) 2020-08-12
JP2016114559A (ja) 2016-06-23
WO2016098613A1 (ja) 2016-06-23
JP6156747B2 (ja) 2017-07-05
EP3486614A1 (en) 2019-05-22
US20170350731A1 (en) 2017-12-07
TWI681172B (zh) 2020-01-01
EP3236214A1 (en) 2017-10-25
KR101957957B1 (ko) 2019-07-04
TW201945694A (zh) 2019-12-01
US10551219B2 (en) 2020-02-04
KR20170095989A (ko) 2017-08-23
CN107003154A (zh) 2017-08-01
EP3486614B1 (en) 2020-01-29
TWI699515B (zh) 2020-07-21

Similar Documents

Publication Publication Date Title
JP7586585B2 (ja) 多重位相レゾルバ装置および差動位相合成装置
KR101078078B1 (ko) 자기식 회전각 검출기
US8736259B2 (en) Rotation position sensor
EP3004808B1 (en) Rotary encoder
CN107003154B (zh) 静电编码器
CN109297517B (zh) 一种基于组合调制原理的绝对式时栅角位移传感器
JP7338099B2 (ja) 誘導センサを用いるマルチレベル回転リゾルバー
CN102798405A (zh) 电容式旋转编码器和感应旋转角度的方法
CN103727873A (zh) 旋转角检测设备
CN109211095A (zh) 一种基于交变电场的绝对式时栅角位移传感器
JP2016031332A (ja) 静電容量式角度検出装置
CN206583464U (zh) 绝对式电容编码器
JP2012230021A (ja) 回転角度計測装置
CN206160931U (zh) 角度位置传感器及角度位置测量系统
CN204555993U (zh) 转角位置检测装置
Kennel New developments in capacitive encoders for servo drives
CN114061513B (zh) 基于纳米圆时栅的自标定方法
WO2025175571A1 (en) Capacitive encoder
CN119594842A (zh) 一种基于电场调制的绝对式时栅角位移传感器及测量方法
JP2009014374A (ja) レゾルバ

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: Tokyo, Japan

Patentee after: Oriental Motor Co., Ltd.

Address before: Tokyo, Japan

Patentee before: Dongfang Motor Co., Ltd.