CN109297517B - 一种基于组合调制原理的绝对式时栅角位移传感器 - Google Patents
一种基于组合调制原理的绝对式时栅角位移传感器 Download PDFInfo
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- CN109297517B CN109297517B CN201811335057.1A CN201811335057A CN109297517B CN 109297517 B CN109297517 B CN 109297517B CN 201811335057 A CN201811335057 A CN 201811335057A CN 109297517 B CN109297517 B CN 109297517B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 33
- 230000006698 induction Effects 0.000 claims abstract description 76
- 239000011159 matrix material Substances 0.000 claims abstract description 43
- 238000005259 measurement Methods 0.000 claims abstract description 19
- 230000005284 excitation Effects 0.000 claims description 67
- 238000000034 method Methods 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 11
- 238000005859 coupling reaction Methods 0.000 description 11
- 230000005684 electric field Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2497—Absolute encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
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CN201811335057.1A CN109297517B (zh) | 2018-11-10 | 2018-11-10 | 一种基于组合调制原理的绝对式时栅角位移传感器 |
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CN201811335057.1A CN109297517B (zh) | 2018-11-10 | 2018-11-10 | 一种基于组合调制原理的绝对式时栅角位移传感器 |
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CN109297517A CN109297517A (zh) | 2019-02-01 |
CN109297517B true CN109297517B (zh) | 2024-04-30 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113008129B (zh) * | 2019-12-19 | 2022-11-25 | 通用技术集团国测时栅科技有限公司 | 多圈绝对式时栅角位移传感器 |
CN113008119B (zh) * | 2019-12-19 | 2022-11-25 | 通用技术集团国测时栅科技有限公司 | 一种分时复用的绝对式时栅直线位移传感器 |
CN114061427A (zh) * | 2020-08-04 | 2022-02-18 | 通用技术集团国测时栅科技有限公司 | 具有空间耦合传感结构的时栅角位移传感器 |
CN114061426B (zh) * | 2020-08-04 | 2024-03-19 | 通用技术集团国测时栅科技有限公司 | 离散型绝对式时栅角位移传感器 |
CN113405575B (zh) * | 2021-07-21 | 2023-06-13 | 重庆理工大学 | 一种机械多圈绝对式时栅编码器 |
CN114353659B (zh) * | 2022-01-06 | 2023-06-09 | 重庆理工大学 | 一种基于单交变电场的时栅角位移传感器 |
CN114777637B (zh) * | 2022-03-29 | 2023-06-09 | 重庆理工大学 | 一种双层正弦补偿式时栅角位移传感器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102620657A (zh) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | 线位移测量方法及测量装置 |
CN104075740A (zh) * | 2013-03-27 | 2014-10-01 | 西门子公司 | 一种电容式旋转编码器及确定绝对旋转角度的方法 |
CN106643470A (zh) * | 2016-12-26 | 2017-05-10 | 清华大学 | 一种绝对式电容角位移测量传感器 |
CN208075882U (zh) * | 2018-05-15 | 2018-11-09 | 重庆中电天时精密装备技术有限公司 | 反射式绝对位置时栅角度位移编码器 |
CN208887655U (zh) * | 2018-11-10 | 2019-05-21 | 重庆理工大学 | 基于组合调制原理的绝对式时栅角位移传感器 |
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2018
- 2018-11-10 CN CN201811335057.1A patent/CN109297517B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102620657A (zh) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | 线位移测量方法及测量装置 |
CN104075740A (zh) * | 2013-03-27 | 2014-10-01 | 西门子公司 | 一种电容式旋转编码器及确定绝对旋转角度的方法 |
CN106643470A (zh) * | 2016-12-26 | 2017-05-10 | 清华大学 | 一种绝对式电容角位移测量传感器 |
WO2018120335A1 (zh) * | 2016-12-26 | 2018-07-05 | 清华大学 | 一种绝对式电容角位移测量传感器 |
CN208075882U (zh) * | 2018-05-15 | 2018-11-09 | 重庆中电天时精密装备技术有限公司 | 反射式绝对位置时栅角度位移编码器 |
CN208887655U (zh) * | 2018-11-10 | 2019-05-21 | 重庆理工大学 | 基于组合调制原理的绝对式时栅角位移传感器 |
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