WO2015168992A1 - 一种电场式时栅角位移传感器 - Google Patents

一种电场式时栅角位移传感器 Download PDF

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Publication number
WO2015168992A1
WO2015168992A1 PCT/CN2014/083215 CN2014083215W WO2015168992A1 WO 2015168992 A1 WO2015168992 A1 WO 2015168992A1 CN 2014083215 W CN2014083215 W CN 2014083215W WO 2015168992 A1 WO2015168992 A1 WO 2015168992A1
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Prior art keywords
stator
rotor
electrode
electrodes
phase
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PCT/CN2014/083215
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English (en)
French (fr)
Inventor
刘小康
彭东林
于治成
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重庆理工大学
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Application filed by 重庆理工大学 filed Critical 重庆理工大学
Priority to JP2016533611A priority Critical patent/JP6086517B2/ja
Priority to DE112014006647.8T priority patent/DE112014006647B4/de
Publication of WO2015168992A1 publication Critical patent/WO2015168992A1/zh
Priority to US15/228,810 priority patent/US10359299B2/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/243—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of ac

Definitions

  • the invention belongs to a precision angular displacement measuring sensor.
  • the alternating-gate electric field-based time-gear angular displacement sensor uses a single-layer differential capacitor as a signal coupling channel. It is required to form two standing wave signals through two turns of electrodes, and then combine the traveling wave signals by the adding circuit. Since the length-to-width ratio of the two coil electrodes processed on the cylindrical end face is inconsistent, the variation law of the two standing wave signals is different, and the two coil electrode signals interfere with each other, which causes the measurement error to increase, which hinders the further precision. improve. It is difficult to ensure the consistency of the electrodes of the two turns in the manufacturing process. It is also difficult to ensure that the electric field coupling strength of the two coil electrodes is consistent in the installation, resulting in inconsistent amplitudes of the two standing wave signals, resulting in measurement errors, and the adaptability to the industrial site is degraded.
  • the object of the present invention is to solve the above-mentioned deficiencies of the prior art, and propose an electric field type time grid angular displacement sensor based on a single-turn multilayer structure, which adopts an electrode based on a single-turn multilayer structure to solve the mutual signal between the two turns.
  • Interference and electrode length-to-width ratio inconsistency avoiding the problem of inconsistent coupling strength between two electric fields caused by machining and installation; directly acquiring the traveling wave signal by using the electric field coupling principle, eliminating the need for adding circuit; thus reducing measurement error and reducing installation accuracy Request, simplify system structure.
  • An electric field type time grid angular displacement sensor based on a single-turn multilayer structure includes a rotor and a stator.
  • the rotor base and the stator base can be implemented in a cylindrical or cylindrical ring.
  • the first implementation of the sensor is to arrange the electrodes by using the upper and lower end faces of the cylinder or the cylindrical ring: the rotor base and the stator base adopt a cylinder or a cylindrical ring, and the lower surface of the rotor base (ie, the cylindrical end face) is covered with two sines a double sinusoidal shape formed by vertically symmetrical (which is a shape that is expanded in the circumferential direction)
  • the electrode, the number of rotor electrodes is m, uniformly distributed in one turn, and the rotor electrodes are connected by leads.
  • the upper surface of the stator base (ie, the end surface of the cylinder) is sequentially covered with four dielectric films, the first layer is a metal film, and four excitation signal leads are processed; the second layer is an insulating film; the third layer is a metal film, and the stator electrode is processed.
  • the shape is a fan ring shape (that is, a rectangle which is expanded in the circumferential direction), and the size is the same, and a certain insulation pitch is maintained between adjacent electrodes, the number of stator electrodes is 4 m, and they are evenly distributed one turn; the fourth layer is insulated Protective film.
  • the rotor base body is coaxially mounted with the stator base body, and the lower surface of the rotor base body is placed in parallel with the upper surface of the stator base body such that the rotor electrode and the stator electrode face each other with a certain gap ⁇ to form a coupling capacitor.
  • the second implementation of the sensor is to arrange the electrodes on the inner and outer cylinders of the cylinder or the cylindrical ring: the rotor base adopts a cylinder, and the outer surface of the rotor base is covered with two double sinusoidal shapes formed by sinusoidal upper and lower symmetry
  • the rotor electrode (which is a shape developed in the circumferential direction) has a number of rotor electrodes of m, uniformly distributed in one turn, and the rotor electrodes are connected by wires.
  • the stator base adopts a cylindrical ring, and the inner cylindrical surface thereof is sequentially covered with four dielectric films, the first layer is a metal film, and four excitation signal leads are processed; the second layer is an insulating film; the third layer is a metal film, and the stator electrode is processed.
  • the shape is a curved rectangle (that is, a rectangle which is expanded in the circumferential direction) and has the same size, and a certain insulation pitch is maintained between adjacent electrodes, the number of stator electrodes is 4 m, and they are evenly distributed one turn; the fourth layer is insulated Protective film.
  • the rotor base body is coaxially mounted with the stator base body, and the rotor electrode and the stator electrode are facing each other with a certain gap ⁇ to form a coupling capacitor.
  • the length is slightly smaller than the length of the stator electrode
  • the width is the sum of one electrode width and one insulation interval of the stator
  • the distance between the two electrodes is three rotor electrode widths.
  • the shape of the rotor electrode is composed of a region surrounded by a sinusoidal curve on the [ ⁇ , ⁇ ] section and a region surrounded by a sine curve and a X-axis region in the [ ⁇ , 2 ⁇ ] section, thereby A coupling capacitor whose sinusoidal law changes in area is obtained, and an angular displacement modulation signal is further obtained.
  • the equal-amplitude equal-frequency sinusoidal excitation voltages Ua, Ub, Uc, Ud whose phases are sequentially different by 90° are respectively connected, and the rotor electrode generates a traveling wave signal Uo, and the traveling wave signal is shaped by a shaping circuit with a phase-fixed same-frequency reference signal Ur.
  • phase-phase circuit the phase difference between the two signals is represented by the number of interpolated high-frequency clock pulses, and the angular displacement of the rotor base relative to the stator base is obtained by scaling.
  • the above four excitation voltages and one reference signal Ur of the same frequency are digital waveform synthesis techniques. Generated.
  • the facing area of the four excitation phases of the rotor electrode and the stators A, B, C, and D will be from small to small, from small to large, from small to small, from small to non-periodic.
  • the capacitance value changes periodically accordingly.
  • the A excitation phase electrode of the stator forms a coupling capacitance d with the rotor electrode
  • the B excitation phase electrode forms a coupling capacitance C 2 with the rotor electrode
  • the C excitation phase electrode forms a coupling capacitance with the rotor electrode C 3
  • D excites the phase electrode and the rotor electrode
  • a coupling capacitor C 4 is formed ; the coupling capacitors d, C 2 , C 3 , . 4 two or two alternate work, when two capacitors work, the other two capacitance values are zero, the traveling wave signal Uo is output on the rotor electrode.
  • the traveling wave signal Uo and the same frequency reference signal Ur are formed into a square wave by a shaping circuit, and then the phase is compared, and the phase difference between the two signals is represented by the number of interpolated high frequency clock pulses, and then scaled to obtain The angular displacement of the rotor base relative to the stator base.
  • the technical solution of the present invention is a method for directly forming an electric traveling wave based on electric field coupling based on a single-turn multilayer structure, which combines the advantages of the existing various grating displacement sensors.
  • a stator with a multi-layer structure is used to construct a single-coupling electric field for measurement, and a single-ring double-sinusoidal sensor rotor electrode is used to directly induce an electric traveling wave, and a high-frequency clock pulse is used as a displacement measurement reference;
  • the sensor has low power consumption, high precision, simple structure, low requirements on mechanical installation accuracy, and strong adaptability to industrial site environment.
  • Fig. 1 (a) and Fig. 1 (b) are schematic views of the first structural form of the sensor, the electrodes of which are arranged on the cylindrical end faces of the stator base and the rotor base.
  • Figure 2 (a) and Figure 2 (b) are schematic views of the second configuration of the sensor, the electrodes of which are arranged on the cylindrical surface of the stator base and the rotor base.
  • Figure 3 is a diagram showing the positional relationship between the electrodes on the stator base and the electrodes on the rotor base.
  • Fig. 4 is a diagram showing the signal connection relationship of the stator electrodes.
  • Fig. 5 is a schematic view showing a coupling capacitance formed by a rotor electrode and a stator electrode.
  • Figure 6 is a schematic diagram of the circuit model of the present invention.
  • FIG. 7 is a block diagram showing the principle of signal processing of the present invention.
  • the sensor comprises two parts of the rotor base 1 and the stator base 2; using ceramic as the base material, there are two embodiments by spraying a layer of iron-nickel alloy as an electrode on the surface of the ceramic.
  • a rotor electrode 1-1 On the lower end surface of the cylindrical body of the rotor base 1, a rotor electrode 1-1 having the same size and shape is equally spaced in the circumferential direction, a total of 36 rotors
  • the shape of the electrode in the circumferential direction is a double sinusoidal shape formed by two sinusoidal upper and lower symmetry.
  • the lead wire with a width of 1.8 mm connects the respective rotor electrodes.
  • the two vertices and vertices of the double sinusoidal electrode are located at a radius of 37.2 mm and 49 mm, respectively.
  • the corresponding central angle at the maximum width of each electrode is 2.5 °.
  • the upper end surface of the stator base cylinder is sequentially covered with four dielectric films, the first layer is a metal film, the second layer is an insulating film, the third layer is a metal film, and the fourth layer is an insulating protective film; the first layer of the metal film is 4 flat ring-shaped wires, that is, excitation signal leads 2-2, respectively, the corresponding electrodes of the respective excitation phases of A, B, C, and D are connected into one group, and the third layer of metal film has the same radial height and the same central angle.
  • the fan ring electrode that is, the stator electrode 2-1, a total of 144, the inner ring radius of each electrode is 36.2mm, the outer ring radius is 50mm, the central angle is 2.4°, and the insulation spacing between adjacent electrodes is 0. Oh.
  • the shape that is expanded in the circumferential direction is a rectangle.
  • a rotor electrode 1-1 having the same size and shape is equally spaced in the circumferential direction, a total of 36 rotors
  • the outer circle has a radius of 44.5 mm, the height of the electrode in the axial direction of the cylinder is 11.8 mm, and the center of each electrode in the radial direction of the cylinder is 2.5 °.
  • the shape of the rotor electrode in the circumferential direction is two sinusoidal symmetry. The double sinusoidal shape, with a width of 1.8 mm, connects the individual rotor electrodes.
  • the cylindrical surface of the cylindrical ring of the stator base is sequentially covered with four dielectric films, the first layer is a metal film, the second layer is an insulating film, the third layer is a metal film, and the fourth layer is an insulating protective film; the first layer of metal
  • the film is four ring-shaped wires, that is, the excitation signal leads 2-2, and the corresponding electrodes of the respective excitation phases of A, B, C, and D are respectively connected into one group, and the third metal film is a curved rectangle having the same height and the same width.
  • the electrode that is, the stator electrode 2-1, a total of 144, the radius of the stator base is 45mm, the height of the electrode in the axial direction of the cylinder is 13.8mm, and the center of each electrode in the radial direction of the cylinder is 2.4°, the adjacent electrode The insulation spacing between them is 0. ⁇ .
  • the rotor base is mounted coaxially with the stator base, and the rotor electrode 1-1 is facing the stator electrode 2-1 with a clearance of 0.5 mm.
  • the length of the rotor electrode is slightly smaller than the length of the stator electrode, and the width is the sum of one stator electrode width and one insulation interval, and the distance between the two rotor electrodes is three rotor electrode widths.
  • the stator electrodes are 4, 8, 12, ..., electrode 144 is connected into a group by an excitation signal lead 2-2 to form a D excitation phase, and Ud
  • the relative coverage area of the capacitor decreases from large to small, and the relative coverage area of the C 2 capacitor changes from small to large; after rotating the angle corresponding to one rotor electrode, the relative coverage area of the capacitor becomes zero, C 2
  • the relative coverage area of the capacitor begins to change from large to small, and the relative coverage area of the C 3 capacitor changes from small to large.
  • the relative coverage area of the C 2 capacitor becomes zero, and the relative capacitance of the C 3 capacitor The coverage area begins to change from large to small, and the relative coverage area of the C 4 capacitor changes from small to large.
  • the relative coverage area of the C 3 capacitor becomes zero, and the relative coverage area of the C 4 capacitor begins to be As the size becomes larger and smaller, the relative coverage area of the d capacitor changes from small to large; thus, the rotation of d, C 2 , C 3 , and C 4 periodically changes in accordance with the rotation of a mechanical cycle.
  • the rotor electrode outputs a traveling wave signal Uo, and the fundamental wave expression is:
  • Ke is the electric field coupling coefficient
  • X is the relative angular displacement between the rotor and the stator
  • W is 4 times the angle corresponding to the rotor electrode.
  • the sensed sinusoidal traveling wave signal Uo and a phase-fixed intra-frequency reference sinusoidal signal Ur are processed by the shaping circuit, converted into two-way square wave signals of the same frequency, and sent to the phase-phase circuit for processing.
  • the high-frequency clock interpolation technique is used to obtain the phase difference between the two signals, and the angular displacement between the sensor rotor base and the stator base can be obtained after calculation.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

一种电场式时栅角位移传感器，包括转子和定子，转子基体（1）表面覆有一圈等间距的双正弦形电极（1-1）；定子基体（2）表面均匀地覆有一圈扇环形或曲面矩形电极（2-1），电极（2-1）底部有定子引线，电极（2-1）与引线之间有绝缘层，电极（2-1）表面覆有绝缘保护层，形成一种多层结构；转子基体（1）与定子基体（2）同轴安装，并留有一定间隙δ；转子基体（1）绕轴心相对转动；定子一个周期内的4个电极分别连接相位为0°、90°、180°、270°的等幅等频正弦激励电压，转子电极（1-1）上产生的行波信号Uo与一路相位固定的同频参考信号Ur进行比相；两路信号的相位差由插补的时钟脉冲表示，再通过变换得到角位移值。它结构简单，功耗低，对机械安装精度要求低，可实现任意360°范围内的高精度角位移测量。

Description

一种电场式时栅角位移传感器 技术领域
本发明属于精密角位移测量传感器。
背景技术
在精密角位移测量领域，近年来研制出了一种以时钟脉冲作为位移测量基准 的时栅传感器， 并在此基础上研制出了一种基于交变电场的时栅角位移传感器。 此传感器专利于 2012年 4月 25日公开，专利名称： 一种基于交变电场的时栅角 位移传感器， 专利文献号： C 102425987A。
这种基于交变电场的时栅角位移传感器采用了单层结构的差动电容作为信 号耦合通道， 要求通过两圈电极来形成两路驻波信号， 再由加法电路合成一路行 波信号。 由于在圆柱端面加工的两圈电极的长宽比不一致，相应地两路驻波信号 的变化规律有差异， 并且两圈电极信号之间会相互干扰， 致使测量误差增大， 阻 碍了精度的进一步提高。在加工制造上难以保证两圈电极的一致性，在安装上也 难以保证两圈电极的电场耦合强度一致，造成两路驻波信号振幅不一致， 带来测 量误差， 对工业现场的适应性下降。
发明内容
本发明的目的在于针对上述现有技术的不足，提出一种基于单圈多层结构的 电场式时栅角位移传感器， 它采用基于单圈多层结构的电极，解决两圈之间的信 号相互干扰及电极长宽比不一致问题，避免加工及安装导致的两圈电场耦合强度 不一致的问题； 利用电场耦合原理直接获取行波信号， 无需加法电路； 因而可以 减小测量误差， 降低对安装精度的要求， 简化系统结构。
本发明的技术方案如下：
基于单圈多层结构的电场式时栅角位移传感器，包括转子和定子两部分，转 子基体和定子基体可以采用圆柱体或圆柱环两种实现方式。
所述传感器的第一种实现方式是利用圆柱体或圆柱环的上下端面来布置电 极:转子基体和定子基体均采用圆柱体或圆柱环，转子基体下表面（即圆柱端面） 覆有两个正弦上下对称形成的双正弦形（其为沿圆周方向展开后的形状）的转子 电极， 转子电极数量为 m， 均布为一圈， 转子电极之间由引线连接。 在定子基体 上表面（即圆柱端面）依次覆有 4层介质膜， 第一层为金属膜， 加工 4条激励信 号引线；第二层为绝缘膜；第三层为金属膜，加工定子电极，其形状为扇环形（即 沿圆周方向展开后为矩形），且大小相同，相邻两电极之间保持一定的绝缘间距， 定子电极的数量为 4m， 它们均匀分布一圈； 第四层为绝缘保护膜。 转子基体与 定子基体同轴安装，转子基体的下表面与定子基体的上表面相对平行放置， 使得 转子电极与定子电极正对， 并留有一定间隙 δ， 形成耦合电容。
所述传感器的第二种实现方式是圆柱体或圆柱环的内外柱面来布置电极： 转 子基体采用圆柱体，在转子基体外圆柱面覆有两个正弦上下对称形成的双正弦形
(其为沿圆周方向展开后的形状）的转子电极，转子电极数量为 m，均布为一圈， 转子电极之间由引线连接。定子基体采用圆柱环，在其内圆柱面依次覆有 4层介 质膜， 第一层为金属膜， 加工 4条激励信号引线； 第二层为绝缘膜； 第三层为金 属膜， 加工定子电极， 其形状为曲面矩形（即沿圆周方向展开后为矩形）且大小 相同， 相邻两电极之间保持一定的绝缘间距， 定子电极的数量为 4m， 它们均匀 分布一圈； 第四层为绝缘保护膜。转子基体与定子基体同轴安装， 转子电极与定 子电极正对， 并留有一定间隙 δ， 形成耦合电容。
上述两种结构中， 转子电极有 m个， 长度略小于定子电极长度， 宽度为定 子一个电极宽度与一个绝缘间隔之和， 相邻两电极之间间隔 3个转子电极宽度。 具体地，所述转子电极的形状是由 [Ο,π]区间上的正弦曲线与 X轴围成的区域和 [π, 2π]区间上的正弦曲线与 X轴围成区域共同构成， 由此获得正对面积按正弦规律 变化的耦合电容， 进一步获取角位移调制信号。 所述定子电极有 4m个， 其中第 4η + 1 (η = 0，2，3，·· ·，ηι-1)号电极连成一组， 组成 Α激励相， 第 4n + 2号电极连成一组， 组成 B激励相， 第 4n + 3号电极连成 一组，组成 C激励相，第 4n + 4号电极连成一组，组成 D激励相； 定子的 A、 B、 C、 D四个激励相分别连接相位依次相差 90°的等幅等频正弦激励电压 Ua、 Ub、 Uc、 Ud， 转子电极产生一路行波信号 Uo， 该行波信号与一路相位固定的同频率 参考信号 Ur经整形电路整形后， 由比相电路进行比相； 两路信号的相位差由插 补的高频时钟脉冲个数表示，再经过标度变换得到转子基体相对于定子基体的角 位移值。 以上四路激励电压和一路同频率的参考信号 Ur是采用数字波形合成技 术产生。
当转子基体与定子基体相对转动， 转子电极与定子 A、 B、 C、 D 四个激励 相的正对面积将由无到小、 由小变大、 由大变小、 由小到无呈周期性变化， 电容 值也随之相应地呈周期性变化。 所述定子的 A激励相电极与转子电极形成耦合 电容 d， B激励相号电极与转子电极形成耦合电容 C2， C激励相电极与转子电 极形成耦合电容 C3， D激励相电极与转子电极形成耦合电容 C4 ; 所述耦合电容 d、 C2、 C3、 。4两两交替工作， 其中两个电容工作时， 另外两个容值为零， 转 子电极上输出行波信号 Uo。所述行波信号 Uo与同频率参考信号 Ur经整形电路 整形成方波后，再进行比相，两路信号的相位差由插补的高频时钟脉冲个数表示， 再经过标度变换得到转子基体相对于定子基体的角位移值。
本发明的技术方案是采用基于单圈多层结构的电场耦合直接形成电行波的 方法， 融合了现有的多种栅式位移传感器的优点。
本发明的有益效果是： 采用多层结构的定子构建单圈耦合电场进行测量，利 用单圈双正弦形的传感器转子电极，直接感应电行波， 以高频时钟脉冲作为位移 计量基准； 因此，本传感器功耗低，精度高，结构简单，对机械安装精度要求低， 对工业现场环境适应性强。
附图说明
图 1 (a) 和图 1 (b) 是本传感器的第一种结构形式的示意图， 其电极布置 在定子基体和转子基体的圆柱体端面上。
图 2 (a) 和图 2 (b) 是本传感器的第二种结构形式的示意图， 其电极布置 在定子基体和转子基体的圆柱体柱面上。
图 3是定子基体上的电极与转子基体上的电极的位置关系图。
图 4是定子电极的信号连接关系图。
图 5是转子电极与定子电极形成的耦合电容示意图。
图 6是本发明的电路模型原理图。
图 7是本发明信号处理原理框图。
具体实肺式
下面结合附图对本发明作进一步说明。
如图 1 (a)、 图 1 (b)、 图 2 (a)、 图 2 (b) 和图 3所示， 本发明所述的传 感器包括转子基体 1和定子基体 2两部分； 采用陶瓷作为基体材料，通过在陶瓷 表面喷镀一层铁镍合金作为电极， 有两种实施方式。
结构形式 1， 图 1 ( a) 和图 1 (b): 在转子基体 1的圆柱体下端面沿圆周方 向等间距地覆有一圈大小和形状相同的转子电极 1-1，共 36个，转子电极沿圆周 方向展开后的形状为两个正弦上下对称形成的双正弦形， 宽度为 1.8mm的引线 将各个转子电极相连， 双正弦形电极的两个顶点和顶点分别位于半径为 37.2mm 和 49mm的两个圆周上， 每个电极最大宽度处对应的圆心角为 2.5 ° 。 在定子基 体圆柱体上端面依次覆有 4层介质膜， 第一层为金属膜， 第二层为绝缘膜， 第三 层为金属膜， 第四层为绝缘保护膜； 第一层金属膜为 4条扁平环状导线， 即激励 信号引线 2-2， 分别将 A、 B、 C、 D各个激励相的对应电极连成一组， 第三层金 属膜为一圈径向高度相同圆心角大小相等的扇环形电极，即定子电极 2-1，共 144 个， 每个电极的内环半径为 36.2mm， 外环半径为 50mm， 圆心角为 2.4° ， 相邻 电极之间的绝缘间距为 0. Γ 。 转子基体与定子基体同轴安装， 转子基体 1的下 端面与定子基体 2的上端面相对平行， 转子电极 1-1与定子电极 2-1正对， 并留 有间隙 δ = 0.5mm。 沿圆周方向展开后的形状为矩形，
结构形式 2， 图 2 ( a)、 图 2 (b): 在转子基体 1的圆柱体外圆柱面沿圆周 方向等间距地覆有一圈大小和形状相同的转子电极 1-1，共 36个，转子基体外圆 半径为 44.5mm， 电极在圆柱轴向上的高度为 11.8mm，每个电极在圆柱径向上的 圆心度为 2.5 ° ， 转子电极沿圆周方向展开后的形状为两个正弦上下对称形成的 双正弦形， 宽度为 1.8mm的引线将各个转子电极相连。 在定子基体的圆柱环内 圆柱面依次覆有 4层介质膜， 第一层为金属膜， 第二层为绝缘膜， 第三层为金属 膜，第四层为绝缘保护膜；第一层金属膜为 4条环状导线，即激励信号引线 2-2， 分别将 A、 B、 C、 D各个激励相的对应电极连成一组， 第三层金属膜为一圈高 度相同宽度相等的曲面矩形电极， 即定子电极 2-1， 共 144个， 定子基体内圆半 径为 45mm， 电极在圆柱轴向上的高度为 13.8mm， 每个电极在圆柱径向上的圆 心度为 2.4° ，相邻电极之间的绝缘间距为 0.Γ 。转子基体与定子基体同轴安装， 转子电极 1-1与定子电极 2-1正对， 并留有间隙 = 0.5mm。
上述两种实施方式中，转子电极长度略小于定子电极长度， 宽度为一个定子 电极宽度与一个绝缘间隔之和，相邻两转子电极之间间隔 3个转子电极宽度。定 子电极的第 1,5,9,…… ,141号电极通过一条激励信号引线 2-2连成一组， 组成 A 激励相，在 A激励相加上 Ua =Umsin«t激励信号；定子电极的第 2,6,10,…… ,142 号电极通过一条激励信号引线 2-2连成一组， 组成 B激励相， 在 B激励相加上 Ub=UmcOS«t激励信号； 定子电极的第 3,7,11,…… ,143号电极通过一条激励信 号引线 2-2连成一组，组成 C激励相，在 C激励相加上 Uc = -Umsin cat激励信号； 定子电极的第 4,8,12,…… ,144号电极通过一条激励信号引线 2-2连成一组，组成 D 激励相， 在 D 激励相加上 Ud =-UmcOS«t激励信号。 其中激励信号峰值
Um = 5V， 频率 f =40KHz， 角频率 ω = 2 r f = 8χ 104 τ。 如图 5和图 6所示，转子电极 1-1与定子基体的 Α激励相的电极形成耦合电 容 ClQ 转子电极与定子基体的 B激励相的电极形成耦合电容 C2。 转子电极与定 子基体的 C激励相的电极形成耦合电容 C3。 转子电极与定子基体的 D激励相的 电极形成耦合电容 C4。 当转子基体 1顺时针转动时， 电容的相对覆盖面积由 大变小， C2电容的相对覆盖面积由小变大； 转动一个转子电极对应的角度后， 电容的相对覆盖面积变为零， C2电容的相对覆盖面积开始由大变小， C3电容 的相对覆盖面积由小变大； 再转动一个转子电极对应的角度后， C2电容的相对 覆盖面积变为零， C3电容的相对覆盖面积开始由大变小， C4电容的相对覆盖面 积由小变大； 又转动一个转子电极对应的角度后， C3电容的相对覆盖面积变为 零， C4电容的相对覆盖面积开始由大变小， d电容的相对覆盖面积由小变大； 如此完成一个机械周期的转动， d、 C2、 C3、 C4的电容值也随之相应地呈周期 性变化。 转子电极输出行波信号 Uo， 基波表达式为：
Uo = KeUmsin((¾t +— ) (1)
W
式中： Ke为电场耦合系数， X为转子和定子之间的相对角位移， W为转子电极 对应的角度值的 4倍。
如图 7所示， 感应到的正弦行波信号 Uo与一路相位固定的同频参考正弦信 号 Ur接入整形电路处理， 转换为同频的两路方波信号后， 送入比相电路进行处 理，利用高频时钟插补技术得到两路信号的相位差， 经计算处理后即可得到传感 器转子基体与定子基体之间的角位移值。

Claims

权 利 要 求 书
1、 一种电场式时栅角位移传感器， 包括转子和定子两部分， 其特征是：
所述转子的转子电极 （1-1 )数量为 m， 它们在转子基体 （1 )表面等间距地 覆有一圈； 所述定子的定子电极 （2-1 ) 数量为 4m， 它们在定子基体 （2) 表面 均匀地覆有一圈， 其中定子电极的第 4n + l号电极连成一组， 组成 A激励相， 定 子电极的第 4n + 2号电极连成一组， 组成 B激励相， 定子电极的第 4n + 3号电极 连成一组， 组成 C激励相， 定子电极的第 4n + 4号电极连成一组， 组成 D激励 相， 其中 η = 0，2，3，···，ηι-1 ; 定子的 A、 B、 C、 D四个激励相分别连接相位依次 相差 90°的等幅等频正弦激励电压 Ua、 Ub、 Uc、 Ud; 转子基体与定子基体同轴 安装， 转子电极 （1-1 ) 与定子电极 （2-1 ) 正对， 并留有一定间隙 δ， 形成耦合 电容；
当转子基体与定子基体相对转动， 在转子电极上产生一路行波信号 Uo， 该 行波信号和一路同频率的参考信号 Ur经整形电路整形后，由比相电路进行比相； 两路信号的相位差由插补的高频时钟脉冲个数表示，再经过标度变换得到转子基 体相对于定子基体的角位移值。
2、 根据权利要求 1所述的电场式时栅角位移传感器， 其特征是： 所述定子 电极 （2-1 ) 为扇环形或曲面矩形， 它们大小相同， 相邻两电极之间保持一定的 绝缘间距。
3、 根据权利要求 1所述的基于单圈多层结构的电场式时栅角位移传感器， 其特征是： 所述转子电极 （1-1 ) 沿圆周方向展开后的形状为两个正弦向下相对 形成的双正弦形， 相邻转子电极 （1-1 ) 之间通过引线连接， 转子电极长度略小 于定子电极长度， 宽度为一个定子电极宽度与一个绝缘间隔之和，相邻两转子电 极之间间隔 3个转子电极宽度。
4、 根据权利要求 1、 2或 3所述的电场式时栅角位移传感器， 其特征是： 所 述转子电极（1-1 )的形状是由 [Ο,π]区间上的正弦曲线与 X轴围成的区域和 [π, 2π] 区间上的正弦曲线与 X轴围成区域共同构成。
5、 根据权利要求 1、 2或 3所述的电场式时栅角位移传感器， 其特征是： 所 述定子基体表面依次覆有 4层介质膜，第一层为金属膜，加工有 4条激励信号引 线 （2-2)， 分别将 A、 B、 C、 D 各个激励相的对应定子电极连成一组； 第二层 为绝缘膜；第三层为金属膜，加工成所述定子电极（2-1 );第四层为绝缘保护膜。
6、 根据权利要求 1、 2或 3所述的电场式时栅角位移传感器， 其特征是： 所 述转子基体（1 )和定子基体（2)采用圆柱体或圆柱环， 利用其圆柱上下端面或 圆柱环的内外柱面来布置电极。
7、 根据权利要求 1、 2或 3所述的电场式时栅角位移传感器， 其特征是： 所 述定子电极（2-1 ) 的 A激励相与转子电极（1-1 )形成耦合电容 d， B激励相与 转子电极形成耦合电容 C2， C激励相与转子电极形成耦合电容 C3， D激励相与 转子电极形成耦合电容 C4; 所述循环交替变化的电容 d、 C2、 C3、 C4两两交替 工作， 构成交变电场的耦合通道， 使得转子电极输出行波信号 Uo。
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