CN103822571A - 基于单排多层结构的电场式时栅直线位移传感器 - Google Patents
基于单排多层结构的电场式时栅直线位移传感器 Download PDFInfo
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- CN103822571A CN103822571A CN201410102437.6A CN201410102437A CN103822571A CN 103822571 A CN103822571 A CN 103822571A CN 201410102437 A CN201410102437 A CN 201410102437A CN 103822571 A CN103822571 A CN 103822571A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
- G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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CN201410102437.6A CN103822571B (zh) | 2014-03-19 | 2014-03-19 | 基于单排多层结构的电场式时栅直线位移传感器 |
PCT/CN2014/083125 WO2015139403A1 (zh) | 2014-03-19 | 2014-07-28 | 基于单排多层结构的电场式时栅直线位移传感器 |
DE112014006476.9T DE112014006476B4 (de) | 2014-03-19 | 2014-07-28 | Auf einer einreihigen und mehrschichtigen Struktur basierter linearer Zeit-auflösender Wegsensor (Time-grating-Wegsensor) mittels eines elektrischen Feldes |
JP2016533612A JP6086518B2 (ja) | 2014-03-19 | 2014-07-28 | 単列多層構造に基づく電界式タイムグレーティング直線変位センサ |
US15/228,733 US10495488B2 (en) | 2014-03-19 | 2016-08-04 | Electric field time-grating linear displacement sensors based on single row multilayer structure |
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CN201410102437.6A CN103822571B (zh) | 2014-03-19 | 2014-03-19 | 基于单排多层结构的电场式时栅直线位移传感器 |
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CN103822571A true CN103822571A (zh) | 2014-05-28 |
CN103822571B CN103822571B (zh) | 2016-11-02 |
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CN201410102437.6A Active CN103822571B (zh) | 2014-03-19 | 2014-03-19 | 基于单排多层结构的电场式时栅直线位移传感器 |
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US (1) | US10495488B2 (zh) |
JP (1) | JP6086518B2 (zh) |
CN (1) | CN103822571B (zh) |
DE (1) | DE112014006476B4 (zh) |
WO (1) | WO2015139403A1 (zh) |
Cited By (11)
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WO2015139403A1 (zh) * | 2014-03-19 | 2015-09-24 | 重庆理工大学 | 基于单排多层结构的电场式时栅直线位移传感器 |
WO2015168992A1 (zh) * | 2014-05-09 | 2015-11-12 | 重庆理工大学 | 一种电场式时栅角位移传感器 |
CN106197240A (zh) * | 2016-07-06 | 2016-12-07 | 重庆理工大学 | 基于交变电场的绝对式直线时栅位移传感器 |
CN106338235A (zh) * | 2016-09-09 | 2017-01-18 | 重庆理工大学 | 一种单列式时栅直线位移传感器 |
CN106338234A (zh) * | 2016-09-09 | 2017-01-18 | 重庆理工大学 | 一种双列式时栅直线位移传感器 |
CN106441059A (zh) * | 2016-09-09 | 2017-02-22 | 重庆理工大学 | 一种单列双排式时栅直线位移传感器 |
CN106643455A (zh) * | 2016-12-26 | 2017-05-10 | 清华大学 | 一种电容式旋变位移传感器 |
US9995602B2 (en) | 2013-11-29 | 2018-06-12 | Chongqing University Of Technology | Time grating linear displacement sensor based on alternating light field |
CN108895970A (zh) * | 2018-07-13 | 2018-11-27 | 重庆理工大学 | 一种基于交变光场的直线位移测量系统 |
WO2020140476A1 (zh) | 2019-01-04 | 2020-07-09 | 重庆理工大学 | 一种基于交变电场的平面二维时栅位移传感器 |
CN113008120A (zh) * | 2019-12-19 | 2021-06-22 | 重庆理工大学 | 一种电容式直线位移传感器及其动尺 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107356189B (zh) * | 2017-07-05 | 2019-04-02 | 重庆理工大学 | 一种时栅直线位移传感器 |
CN107844119A (zh) * | 2017-12-14 | 2018-03-27 | 中国计量大学 | 基于时空转换的视觉导引方法及视觉导引车 |
CN108267072B (zh) * | 2018-01-31 | 2019-09-13 | 重庆理工大学 | 一种时栅直线位移传感器 |
CN109211097B (zh) * | 2018-07-05 | 2019-06-14 | 重庆理工大学 | 一种基于交变电场的差极反射型绝对式时栅角位移传感器 |
CN113008119B (zh) * | 2019-12-19 | 2022-11-25 | 通用技术集团国测时栅科技有限公司 | 一种分时复用的绝对式时栅直线位移传感器 |
CN114087968B (zh) * | 2021-11-18 | 2023-10-20 | 重庆理工大学 | 一种基于组合调制原理的拼接式绝对直线位移传感器 |
CN114087970B (zh) * | 2021-11-18 | 2023-10-20 | 重庆理工大学 | 一种分时复用型拼接式绝对直线位移传感器 |
CN114608431B (zh) * | 2022-03-29 | 2023-06-09 | 重庆理工大学 | 一种双层正弦式时栅直线位移传感器 |
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US3873916A (en) * | 1972-09-07 | 1975-03-25 | Maag Zahnraeder & Maschinen Ag | Capacitive sensor for measuring displacement or position |
US4449179A (en) * | 1980-05-27 | 1984-05-15 | Meyer Hans Ulrich | Means for capacitive measurement of displacements |
US4633249A (en) * | 1983-05-18 | 1986-12-30 | Mitutoyo Mfg. Co., Ltd. | Displacement detector utilizing change of capacitance |
CN2869768Y (zh) * | 2005-02-24 | 2007-02-14 | 张珂 | 一种基于电场合成原理的电容式线位移传感器 |
CN102288100A (zh) * | 2011-06-01 | 2011-12-21 | 重庆理工大学 | 一种基于交变电场的时栅直线位移传感器 |
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CN103822571B (zh) | 2014-03-19 | 2016-11-02 | 重庆理工大学 | 基于单排多层结构的电场式时栅直线位移传感器 |
CN103968750B (zh) | 2014-05-09 | 2017-01-18 | 重庆理工大学 | 一种电场式时栅角位移传感器 |
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2014
- 2014-03-19 CN CN201410102437.6A patent/CN103822571B/zh active Active
- 2014-07-28 JP JP2016533612A patent/JP6086518B2/ja active Active
- 2014-07-28 WO PCT/CN2014/083125 patent/WO2015139403A1/zh active Application Filing
- 2014-07-28 DE DE112014006476.9T patent/DE112014006476B4/de active Active
-
2016
- 2016-08-04 US US15/228,733 patent/US10495488B2/en active Active
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US3873916A (en) * | 1972-09-07 | 1975-03-25 | Maag Zahnraeder & Maschinen Ag | Capacitive sensor for measuring displacement or position |
US4449179A (en) * | 1980-05-27 | 1984-05-15 | Meyer Hans Ulrich | Means for capacitive measurement of displacements |
US4633249A (en) * | 1983-05-18 | 1986-12-30 | Mitutoyo Mfg. Co., Ltd. | Displacement detector utilizing change of capacitance |
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Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9995602B2 (en) | 2013-11-29 | 2018-06-12 | Chongqing University Of Technology | Time grating linear displacement sensor based on alternating light field |
JP2016538554A (ja) * | 2014-03-19 | 2016-12-08 | 重慶理工大学 | 単列多層構造に基づく電界式タイムグレーティング直線変位センサ |
WO2015139403A1 (zh) * | 2014-03-19 | 2015-09-24 | 重庆理工大学 | 基于单排多层结构的电场式时栅直线位移传感器 |
US10495488B2 (en) | 2014-03-19 | 2019-12-03 | Chongqing University Of Technology | Electric field time-grating linear displacement sensors based on single row multilayer structure |
WO2015168992A1 (zh) * | 2014-05-09 | 2015-11-12 | 重庆理工大学 | 一种电场式时栅角位移传感器 |
JP2016540207A (ja) * | 2014-05-09 | 2016-12-22 | 重慶理工大学 | 電界式タイムグレーティング角変位センサ |
US10359299B2 (en) | 2014-05-09 | 2019-07-23 | Chongqing University Of Technology | Electric field type time-grating angular displacement sensors |
CN106197240A (zh) * | 2016-07-06 | 2016-12-07 | 重庆理工大学 | 基于交变电场的绝对式直线时栅位移传感器 |
CN106197240B (zh) * | 2016-07-06 | 2018-10-09 | 重庆理工大学 | 基于交变电场的绝对式直线时栅位移传感器 |
CN106338235A (zh) * | 2016-09-09 | 2017-01-18 | 重庆理工大学 | 一种单列式时栅直线位移传感器 |
CN106338234A (zh) * | 2016-09-09 | 2017-01-18 | 重庆理工大学 | 一种双列式时栅直线位移传感器 |
CN106441059B (zh) * | 2016-09-09 | 2018-11-13 | 重庆理工大学 | 一种单列双排式时栅直线位移传感器 |
CN106338234B (zh) * | 2016-09-09 | 2018-11-13 | 重庆理工大学 | 一种双列式时栅直线位移传感器 |
CN106338235B (zh) * | 2016-09-09 | 2019-04-30 | 重庆理工大学 | 一种单列式时栅直线位移传感器 |
CN106441059A (zh) * | 2016-09-09 | 2017-02-22 | 重庆理工大学 | 一种单列双排式时栅直线位移传感器 |
CN106643455A (zh) * | 2016-12-26 | 2017-05-10 | 清华大学 | 一种电容式旋变位移传感器 |
CN106643455B (zh) * | 2016-12-26 | 2018-11-30 | 清华大学 | 一种电容式旋变位移传感器 |
CN108895970A (zh) * | 2018-07-13 | 2018-11-27 | 重庆理工大学 | 一种基于交变光场的直线位移测量系统 |
CN108895970B (zh) * | 2018-07-13 | 2020-07-24 | 重庆理工大学 | 一种基于交变光场的直线位移测量系统 |
WO2020140476A1 (zh) | 2019-01-04 | 2020-07-09 | 重庆理工大学 | 一种基于交变电场的平面二维时栅位移传感器 |
US11371822B2 (en) | 2019-01-04 | 2022-06-28 | Genertec Guoce Time Grating Technology Co., Ltd | Alternating electric field based plane 2D time-grating displacement sensor |
CN113008120A (zh) * | 2019-12-19 | 2021-06-22 | 重庆理工大学 | 一种电容式直线位移传感器及其动尺 |
CN113008120B (zh) * | 2019-12-19 | 2023-09-22 | 通用技术集团国测时栅科技有限公司 | 一种电容式直线位移传感器及其动尺 |
Also Published As
Publication number | Publication date |
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WO2015139403A1 (zh) | 2015-09-24 |
DE112014006476T5 (de) | 2016-11-24 |
JP2016538554A (ja) | 2016-12-08 |
JP6086518B2 (ja) | 2017-03-01 |
DE112014006476B4 (de) | 2021-04-01 |
US10495488B2 (en) | 2019-12-03 |
CN103822571B (zh) | 2016-11-02 |
US20170003145A1 (en) | 2017-01-05 |
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