KR101868703B1 - Reactor for coating powder - Google Patents

Abstract

The present invention relates to a powder coating reactor for performing functional coating on the powder surface. The powder coating reactor according to an embodiment of the present invention comprises: a hollow cylindrical chamber defining a reaction space therein and having first and second ends communicating with the reaction space; a gas supply unit for supplying precursor gas for forming a compound to be coated on powder to be loaded in an inner space of the hollow cylindrical chamber; a precursor flow passage for communicating at least one of the first and second ends of the hollow cylindrical chamber with the gas supply unit; and a gas discharge unit for discharging exhaust gas from the reaction space of the hollow cylindrical chamber.

Description

Reactor for coating powder < RTI ID = 0.0 >

The present invention relates to vapor deposition techniques and, more particularly, to a powder coating reactor for forming a functional coating on a powder by vapor deposition.

BACKGROUND OF THE INVENTION [0002] Powdered materials have been extensively applied to various technical fields such as powders for ultraviolet or electromagnetic shielding, toners, paints, magnetic materials, active materials for cells or functional coating films. The surface modification of the powdered material can improve the performance or the life of the powdered material through improvement or alteration of its electrical, chemical, or mechanical properties through its surface modification. Usually, Or by forming a reactive layer or etching the powder surface.

Recently, a vapor deposition method such as chemical vapor deposition (CVD) or atomic layer deposition (ALD) has been applied as a method of forming a functional coating such as a functional thin film or a reactive layer on the powder. In order to form a uniform functional coating layer on the powder through the vapor deposition method, it is necessary to ensure a uniform flow of the gaseous precursor and ensure uniformity in frequency and degree of exposure of the powder to the gaseous precursor. However, since the above-described vapor deposition method has been conventionally applied to a planar substrate, the technology relating to a reactor for forming a uniform functional coating layer on a powder having flowability and inter-particle separability is becoming more and more urgent.

It is an object of the present invention to provide a method and apparatus for uniformly supplying a gaseous precursor to form a functional coating layer on a powder surface by a vapor deposition method and to provide uniformity of the degree and frequency of exposure of the powder to a gaseous precursor And to provide a powder coating reactor capable of applying various process parameters and ease of maintenance while forming a uniform functional coating layer.

According to an aspect of the present invention, there is provided a powder coating reactor comprising: a hollow cylindrical chamber defining a reaction space therein and having first and second ends communicating with the reaction space; A gas supply unit for supplying a precursor gas for forming a compound to be coated on the powder loaded in the inner space of the hollow cylindrical chamber; A precursor flow passage for communicating at least one of the first and second ends of the hollow cylindrical chamber with the gas supply section; And a gas discharge portion for discharging the exhaust gas from the reaction space of the hollow cylindrical chamber. Further comprising a chamber housing which holds the hollow cylindrical chamber so as to be hermetically sealed with the outside air, wherein the gas supply section is connected to one side of the chamber housing and the gas discharge section is connected to the other side of the chamber housing , The precursor flow path may be formed between the inner wall of the chamber housing and the hollow cylindrical chamber.

In one embodiment, the precursor flow path may be provided between an outer wall of the hollow cylindrical chamber and an inner wall of the chamber housing. In one embodiment, the hollow cylindrical chamber further comprises an intermediate opening between the first end and the second end for communicating the reaction space with the exterior of the hollow cylindrical chamber, Gas or the exhaust gas can flow out. The intermediate opening may be shielded by a filter that allows entry and exit of the precursor gas or the exhaust gas into and out of the reaction space and prevents the outflow of the powder.

In one embodiment, the impeller includes a first impeller and a second impeller, respectively, disposed at the first end and the second end of the hollow cylindrical chamber, wherein the rotation of the first impeller and the second impeller, Can be controlled to move the powder biased to one end in the reaction space to the other end during the coating process.

The hollow cylindrical chamber rotates for agitation of the powder loaded in the reaction space and the transmission of the rotational force of the hollow cylindrical chamber from the rotary power section is performed by a friction pulley in contact with the outer periphery of the hollow cylindrical chamber .

According to another aspect of the present invention, there is provided a powder coating reactor including a reaction space defined therein and having first and second ends communicating with the reaction space, A plurality of hollow cylindrical chambers; A gas supply unit for supplying a precursor gas for forming a compound to be coated on a powder loaded in each of the plurality of hollow cylindrical chambers; A precursor flow path communicating at least any one of the first and second end portions of the plurality of hollow cylindrical chambers with the gas supply portion; And a gas discharge portion for discharging exhaust gas from each reaction space of the plurality of hollow cylindrical chambers. And homogeneous or heterogeneous powders may be loaded in the respective reaction spaces inside the plurality of hollow cylindrical chambers.

In one embodiment, the apparatus further comprises a chamber housing that holds the plurality of hollow cylindrical chambers in place so as to be disconnected from the outside air, wherein the gas supply section is connected to one side of the chamber housing, And the precursor flow path may be formed between the inner wall of the chamber housing and the plurality of hollow cylindrical chambers. The plurality of hollow cylindrical chambers may be aligned so that the flow direction of the precursor gas flowing along the precursor flow path is parallel to the extending direction of the plurality of hollow cylindrical chambers. The plurality of hollow cylindrical chambers are arranged so that the flow direction of the precursor gas flowing along the precursor flow path is perpendicular to the extending direction of the plurality of hollow cylindrical chambers.

In one embodiment, at least one of the plurality of hollow cylindrical chambers has an intermediate opening between the first end and the second end for communicating the reaction space with the outside of the hollow cylindrical chamber, So that the precursor gas or the exhaust gas can flow in and out. In addition, the intermediate opening may be shielded by a filter that allows entry and exit of the precursor gas or the exhaust gas into and out of the reaction space, and prevents the outflow of the powder.

In one embodiment, the impeller includes a first impeller and a second impeller, respectively, disposed at the first and second ends of the hollow cylindrical chamber, wherein rotation of the first impeller and the second impeller is performed by a powder coating May be controlled to move the powder biased to one end in the reaction space to the other end during the process. Wherein at least one of the plurality of hollow cylindrical chambers is rotated for agitation of the powder loaded in each reaction space and the transmission of rotational force of the hollow cylindrical chamber from the rotational power section is in contact with the periphery of the hollow cylindrical chamber And may be performed by at least one friction pulley.

According to an aspect of the present invention, there is provided a powder coating reactor including a hollow cylindrical chamber having a reaction space defined therein and having first and second ends communicating with the reaction space, A precursor flow path is formed between the inner wall of the chamber housing and the hollow cylindrical chamber rather than a separate closed flow path directly connected to the hollow cylindrical chamber to uniformly transfer the vapor precursor into the reaction space of the hollow cylindrical chamber And a homogeneous functional coating layer can be formed by ensuring the uniformity of the degree and frequency of exposure of the powder to the gaseous precursor through the impeller or the rotating mechanism.

Also, according to the embodiment of the present invention, it is possible to tighten the hollow cylinder type chamber only by contacting the outer circumference of the hollow cylinder type chamber on the friction pulley in spite of the addition of the impeller or the rotation mechanism of the hollow cylinder type chamber, It is possible to ensure ease of detachment of the hollow cylindrical chamber for maintenance or cleaning and to provide a powder coating reactor in which the advantages described above can be maintained even when a plurality of hollow cylindrical chambers are formed.

Figures 1a and 1b illustrate powder coating reactors according to various embodiments of the present invention.
FIG. 2A is a perspective view showing a hollow cylindrical chamber according to an embodiment of the present invention, and FIGS. 2B and 2C are sectional views showing a method of driving an impeller of a hollow cylindrical chamber.
3 is a perspective view illustrating a hollow cylindrical chamber according to another embodiment of the present invention.
4A and 4B are perspective views illustrating powder coating reactors according to various embodiments of the present invention.
5 is a perspective view showing hollow cylindrical chambers according to another embodiment of the present invention.
6A and 6B are views for explaining the arrangement of the friction pulleys according to various embodiments of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.

In the following drawings, thickness and size of each layer are exaggerated for convenience and clarity of description, and the same reference numerals denote the same elements in the drawings. As used herein, the term "and / or" includes any and all combinations of any of the listed items.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise "and / or" comprising "when used herein should be interpreted as specifying the presence of stated shapes, numbers, steps, operations, elements, elements, and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

Figures 1A and 1B illustrate powder coating reactors 100 in accordance with various embodiments of the present invention.

1A and 1B, a powder coating reactor 100 includes a hollow cylindrical chamber 100, a gas supply unit 200 for supplying a gaseous precursor, a precursor flow path FR, and a gas discharge unit 400). The inside of the hollow cylindrical chamber 100 is provided with the powder to be treated, and a functional coating or surface modification can be made on the powder through the treatment process.

The hollow cylindrical chamber 100 may be horizontally disposed. A reaction space RS is defined inside the hollow cylindrical chamber 100 and the powder is loaded in the reaction space RS to form a functional coating or a functional coating on the powder by vapor deposition such as chemical vapor deposition or atomic layer deposition Surface modification (hereinafter collectively referred to as functional coating) is performed. The reaction space RS communicates with the outside through the opening 11a of the first end portion 100A of the hollow cylindrical chamber 100 and the opening 11b of the second end portion 100B.

In one embodiment, filters 11a and 11b may be coupled to the first end 100A and second end 100B of the hollow cylindrical chamber 100, respectively. The filters 11a and 11b allow the entry and exit of the gaseous precursor for the functional coating of the powder and the exit and exit of the reaction gas and unreacted residual gaseous precursor, The outflow is the blocking structure. The filters 11a and 11b may be a structure such as a breathable membrane or a mesh that covers the openings 11a and 11b, but the present invention is not limited thereto. 1A and 1B illustrate meshes as filters 1a and 11b.

The gas supply unit 200 may include a flow regulator or a valve system capable of supplying a gaseous precursor with powder loaded in the internal space RS of the hollow cylinder chamber 100 to perform flow control conforming to chemical vapor deposition or atomic layer deposition And, in this regard, publicly known techniques may be taken into consideration. The gaseous precursor having a controlled flow from the gas supply unit 200 is supplied to the first opening 11a side of the hollow cylindrical chamber 100 as shown by the arrow P without a separate closed supply line.

The hollow cylindrical chamber 100 is disposed within the chamber housing 300 and may be enclosed by the housing 100 to be disconnected from ambient air and may be connected to the chamber 100 to maintain a suitable pressure level below the atmospheric pressure. The housing 300 can be kept airtight. In one embodiment, the chamber housing 300 may include an upper or side portion of the chamber housing 300 to facilitate access to the hollow cylindrical chamber 100 to be placed therein, (Not shown) that can be opened easily. The shape, position, and size of the sealing lid can be determined so as to facilitate loading and unloading of the hollow cylindrical chamber 100, but the present invention is not limited thereto.

In one embodiment, the hollow cylindrical chamber 100 may be spaced apart from the inner wall of the chamber housing 300. As a result, the precursor flow path FR can be formed not only inside the hollow cylindrical chamber 100 but also between the outer wall of the hollow cylindrical chamber 100 and the inner wall of the chamber housing 300. The gas precursor P supplied from the gas supply unit 200 is supplied to the inside of the hollow cylindrical chamber 100 through the opening 11a of the first end portion 100A of the hollow cylindrical chamber 100, And the remaining gaseous precursor P may flow between the outer wall of the hollow cylindrical chamber 100 and the inner wall of the chamber housing 300 as indicated by arrow U2. In another embodiment, to prevent unnecessary waste of the gaseous precursor through the precursor flow path FR between the outer wall of the hollow cylindrical chamber 100 and the inner wall of the chamber housing 300, the chamber housing 300 and the hollow cylindrical chamber 300, The distance between the inner wall of the chamber housing 300 and the outer wall of the hollow cylindrical chamber 100 can be controlled so that the distance between the outer walls of the chamber 100 and the chamber housing 300 is minimized or absent.

The powder coating reactor 1000 may be operated such that the unreacted gaseous precursor, reaction product gas, or other reaction product gas exiting the inner space RS through the opening 10b of the second end portion 100B of the hollow cylindrical chamber 100 And these gases can be discharged to the outside through the gas discharging part 400 as indicated by the arrow Q. [ The gas exhaust portion 400 may include a vacuum system such as a vacuum pump capable of controlling the purging of the gas in the reaction space or the process pressure.

As shown in Figure IB, the powder coating reactor 1000 may include an impeller 13 as a means for agitating the powder loaded in the internal space RS during the process. The impeller 13 may have a three-ply blade 13B as shown, but this is merely an example, and the present invention is not limited thereto, and may have one-ply, two-ply, or four-ply blades. In another embodiment, the powder coating reactor 1000 may further include a vibrator capable of mechanically vibrating the hollow cylindrical chamber 100 at regular intervals to facilitate stirring and fluidization of the blast. With respect to the vibrator of the powder coating reactor 1000, a known technique can be referred to.

In the above-described embodiment, not only the internal space inside the hollow cylindrical chamber 100 but also the space between the hollow cylindrical chamber 100 and the chamber housing 300 are communicated with each other to form uniform equal pressure regions Thereby forming a substantially uniform pressure distribution in the hollow cylindrical chamber 100. As a result, according to the embodiment of the present invention, the flow of a uniform gaseous precursor without irregular flow to the powder in the reaction space RS , For example, laminar flow, whereby coating layer or surface modification can occur uniformly.

FIG. 2A is a perspective view showing a hollow cylindrical chamber 100 'according to an embodiment of the present invention, and FIGS. 2B and 2C are sectional views showing a method of driving an impeller of a hollow cylindrical chamber 100'.

Referring to FIG. 2A, the hollow cylindrical chamber 100 'may further include one or more impellers 13a and 13b for stirring the powder loaded in the reaction space RS. The impellers 13a and 13b may include a first impeller 13a and a second impeller 13b disposed at the first end 100A and the second end 100B of the hollow cylindrical chamber 100 ' have. In one embodiment, the first impeller 13a and the second impeller 13b may be fixed by a lid support 14 which is fastened to each end of the hollow cylindrical chamber 100 '. The shaft of the impellers 13a and 13b may be exposed out of the lid support 14 and coupled to a driving member such as a motor.

The lid support 14 may be fastened to the hollow cylindrical chamber 100 'by any structure capable of rotational coupling or fitting coupling by a threaded or concave-convex pattern, but the present invention is not limited thereto. The impellers 13a and 13b are easily separated from the hollow cylindrical chamber 100 'by simply releasing the lid support 14 from the hollow cylindrical chamber 100' The ease of cleaning and maintenance of the hollow cylindrical chamber 100 'can be improved.

 The first impeller 13a and the second impeller 13b may be rotated independently of each other and may rotate in opposite directions or in the same direction as shown in FIG. In one embodiment, each rotation of the first impeller 13a and the second impeller 13b is applied to either the first end 100A or the second end 100B in the reaction space RS during the powder coating process Can be controlled to move the biased powder to the other side. Referring to FIG. 2B, when the powder PD is unevenly distributed to the first end portion 100A side in the process, the first impeller 13a rotates to rotate the powder PD toward the second end portion 100B side as indicated by arrow K1 . Referring to FIG. 2C, when the powder PD is unified toward the second end portion 100B side, the second impeller 13b rotates to move the powder PD toward the first end portion 100A as indicated by arrow K2 .

In this way, during the process, the powder PD can be prevented from being unevenly distributed to one side through the reciprocating motion in the reaction space by the impellers 13a and 13b provided at each end of the hollow cylindrical chamber 100 '. The rotation of the impellers 13a and 13b allows uniform dispersion of the powder in the reaction space RS and allows the gaseous precursor P introduced into the reaction space RS to uniformly contact the powder and the unreacted gaseous precursor or reaction The generated gas Q can be easily discharged in the reaction space RS so that the functional coating process of the powder occurs uniformly over the entire volume of the powder.

3 is a perspective view illustrating a hollow cylindrical chamber 100 "in accordance with another embodiment of the present invention.

3, the hollow cylindrical chamber 100 '' may further include an intermediate opening 11c between the first end portion 100A and the second end portion 100B. The intermediate opening portion 11c is provided with a gas- And a filter 12 to prevent the outflow of the powder in the reaction space while permitting the inflow of the exhaust gas P and the outflow of the exhaust gas Q. The filter 12 may be a breathable membrane or mesh, The invention is not limited thereto.

A uniform pressure distribution can be obtained in the reaction space through the intermediate opening 11c so that the coating or surface treatment of the powder can be uniformly performed over the entire volume. In one embodiment, the above-described first and second impellers 13a and 13b may be further provided to further improve the uniformity of the processing process.

4A and 4B are perspective views illustrating powder coating reactors 4000A and 4000B in accordance with various embodiments of the present invention.

Referring to FIG. 4A, a bottom coating reactor 4000A includes four hollow cylindrical chambers 100 within a chamber housing 3000. As shown in FIG. The number of hollow cylindrical chambers 100 is illustrative and may be two or more.

The hollow cylindrical chambers 100 may be arranged so that the flow direction of the gaseous precursor P flowing along the precursor flow path is parallel to the extending direction of the hollow cylindrical chambers 100. These hollow cylindrical chambers 100 may be disposed apart from each other, but the present invention is not limited thereto.

Referring to FIG. 4B, a powder coating reactor 4000B includes four hollow cylindrical chambers 100 in a chamber housing 3000. The number of hollow cylindrical chambers 100 is illustrative and may be two or more.

The hollow cylindrical chambers 100 may be aligned so that the flow direction of the gaseous precursor P flowing along the precursor flow path is perpendicular to the extending direction of the hollow cylindrical chambers 100. Likewise, the hollow cylindrical chambers 100 may be disposed in the chamber housing 300, spaced from or in contact with each other.

As described above with reference to FIGS. 4A and 4B, by arranging a plurality of hollow cylindrical chambers 100 in the chamber housing 300 without separate precursor flow paths, the respective hollow cylindrical chambers 100 ) Can be ensured evenly. Although the hollow cylindrical chambers 100 may have the same size and shape, the present invention is not limited thereto. The size and shape of the hollow cylindrical chambers 100 may differ from each other in consideration of a variety of capacities and powder characteristics . The powders loaded in the hollow cylindrical chambers 100 may be homogeneous powders or different powders. In the case of homogeneous powders, there is an advantage that throughput can be improved in a single process, and in the case of different powders, it is advantageous in producing a small quantity of multiple products because a plurality of independent processes can be performed in a single process. Further, as shown in FIG. 4B, the hollow cylindrical chambers 100 may further include impellers 13a and 13b.

5 is a perspective view showing a hollow cylindrical chamber 100 according to another embodiment of the present invention.

Referring to FIG. 5, hollow cylindrical chambers 100 may be rotated to agitate powders within the reaction space. To this end, the powder coating reactor may further comprise a rotating power section, such as a motor (MT). The rotational force of the rotary power unit can be transmitted by the friction pulleys PU1 to PU4, which are power transmission devices. Since the friction pulleys PU to PU4 can transmit rotational force only by the contact between the outer circumference of the hollow cylindrical chambers 100 and the friction pulleys PU to PU4, It is not necessary to assemble or disengage the rotary power section and the power transmission device for maintenance or cleaning of the hollow cylindrical chambers 100. [ As a result, it is possible to attach and detach the hollow cylindrical chambers 1000 from the power system only by moving the hollow cylindrical chambers 100 vertically upward from the rotary power unit and the power transmission apparatus, The mounting of the mold chambers 100 can complete the rotational force transmission mechanism and improve the ease of maintenance.

The hollow cylindrical chambers 100 may be fixed and aligned with the support frame 500 within the chamber housing. The hollow cylindrical chambers 100 may be fixed on the support frame 500 to accommodate various arrangements and variations in the diameter of the hollow cylindrical chambers 100. In one embodiment, the pulley support body FB is disposed at a predetermined position so that the positions and the number of the friction pulleys PU1 to PU4 can be variously changed in accordance with the arrangement or diameter change of the hollow cylindrical chambers 100 A guide member that can be fixed can be provided.

As shown in FIG. 5, the guide member may be an ampule including a plurality of grooves 500H provided on the support frame 500. The plurality of grooves 500H may be formed on the support frame 500 so as to be spaced apart from each other. The plurality of grooves 500H are not limited to the grooves shown, but may be any through holes or any pattern that can be easily moved and fixed at defined intervals while the pulley support FB is easily detachable. In one embodiment, the poly support FB may be fixed on the support frame 500 by a fixing member FC, such as a bolt, which is inserted into the plurality of grooves 500H.

In one embodiment, to prevent the rotating hollow cylindrical chamber 100 from being displaced by vibration or being separated from the frictional pulley FB during rotation, the hollow cylindrical chamber 100 includes a hollow cylindrical chamber 100, And a rotation guide member to which the rotation of the friction pulleys PU1 to PU4 can be guided. The rotation guide member may be a concavo-convex pattern that is engaged with the friction pulleys PU1 to PU4 provided on the lid support (see 14 in FIG. 2A) or the end portions 100A and 100B of the hollow cylindrical chamber 100. 5, a trench pattern TP capable of accommodating the outer periphery of the friction pulleys PU1 to PU4 in the lid support 15 of the hollow cylindrical chamber 100 is described as the relief pattern. The above-described concavo-convex pattern can be formed to be capable of being engaged with at least one of the friction pulleys PU1 to PU4 and the lid support member 14, and the present invention is not limited to the size and shape.

6A and 6B are views for explaining the arrangement of the friction pulleys PU1 to PU4 according to various embodiments of the present invention.

6A and 6B, the rotational force transmission between the rotating hollow cylindrical chambers 100_1 and 100_2 is performed by a friction pulley. As a result, when the first friction pulley PU1 is coupled to the rotary power unit MT and rotates, the first frictional pulleys PU2 to PU4 and the hollow cylindrical cylinders 100_2 The rotational force can be transmitted in a chain manner.

The friction pulleys PU2 and PU3 may be applied to one or more friction pulleys for transmitting the rotational force between the adjacent hollow cylindrical chambers 100_1 and 100_2, ≪ / RTI > friction pulley PU2 is applied. The rotation directions b of the hollow cylindrical chambers 100_1 and 100_2 may be changed as the number of the friction pulleys PU2 and PU3 between the adjacent hollow cylindrical chambers 100_1 and 100_2 is changed. The arrow a indicates the direction of rotation of the friction pulleys PU1 to PU4.

Even if the number and size of the hollow cylindrical chambers 100_1 and 100_2 are variously changed, if the number and size of the friction pulleys between the adjacent hollow cylindrical chambers 100_1 and 100_2 are changed, a design change It is possible to provide a rotation mechanism for rotating the hollow cylindrical chambers without the need for such a mechanism. Also, according to the embodiment of the present invention, it is possible to fasten between the constituent elements by simply placing the hollow cylindrical chambers 100_1 and 100_2 on the support frame 500P without complicated rotation mechanism, It is easy to disassemble and assemble for maintenance.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be clear to those who have knowledge of.

Claims (16)

Chamber housing;
A hollow cylindrical chamber disposed within the chamber housing and defining a reaction space therein and having first and second ends communicating with the reaction space;
A gas supply unit for supplying a precursor gas for forming a compound to be coated on the powder loaded in the inner space of the hollow cylindrical chamber;
A precursor flow passage for communicating at least one of the first and second ends of the hollow cylindrical chamber with the gas supply section; And
And a gas discharging portion for discharging the exhaust gas from the reaction space of the hollow cylindrical chamber,
Wherein said precursor flow path includes a space defined between an inner wall of said chamber housing and an outer wall of said hollow cylindrical chamber and wherein said space and said pressure in said hollow cylindrical chamber have a uniform pressure distribution, . The method according to claim 1,
Further comprising a chamber housing that holds the hollow cylindrical chamber so as to be hermetically sealed with the outside air,
A powder coating reactor in which the gas supply part is connected to one side of the chamber housing and the gas discharge part is connected to the other side of the chamber housing and the precursor flow path is formed between the inner wall of the chamber housing and the hollow cylindrical chamber; . delete The method according to claim 1,
Wherein the hollow cylindrical chamber further comprises an intermediate opening between the first end and the second end for communicating the reaction space and the outside of the hollow cylindrical chamber,
Wherein the precursor gas or the exhaust gas flows in and out through the intermediate opening. 5. The method of claim 4,
Wherein the intermediate opening permits entry and exit of the precursor gas or the exhaust gas into and out of the reaction space and is shielded by a filter that prevents the outflow of the powder. The method according to claim 1,
Further comprising a first impeller and a second impeller disposed respectively at the first end and the second end of the hollow cylindrical chamber,
Wherein the rotation of the first impeller and the second impeller is controlled during the powder coating process to move the powder biased to one end in the reaction space to the other end. The method according to claim 1,
Wherein the hollow cylindrical chamber rotates for agitation of the powder loaded in the reaction space and the transmission of the rotational force of the hollow cylindrical chamber from the rotational power section is performed by a friction pulley in contact with the periphery of the hollow cylindrical chamber Powder Coating Reactor. Chamber housing;
A plurality of hollow cylindrical chambers disposed in the chamber housing and defining a reaction space therein and having first and second ends communicating with the reaction space, the first hollow cylindrical chambers being laterally spaced apart;
A gas supply unit for supplying a precursor gas for forming a compound to be coated on a powder loaded in each of the plurality of hollow cylindrical chambers;
A precursor flow path communicating at least any one of the first and second end portions of the plurality of hollow cylindrical chambers with the gas supply portion; And
And a gas discharge portion for discharging exhaust gas from each reaction space of the plurality of hollow cylindrical chambers,
Wherein said precursor flow path includes a space defined between an inner wall of said chamber housing and an outer wall of said hollow cylindrical chamber and wherein said space and said pressure in said hollow cylindrical chamber have a uniform pressure distribution, . 9. The method of claim 8,
Wherein a powder of the same or different kind is loaded in each reaction space in the plurality of hollow cylindrical chambers. 9. The method of claim 8,
Further comprising a chamber housing that holds the plurality of hollow cylindrical chambers so as to be airtight so as to be disconnected from the outside air,
The gas supply portion is connected to one side of the chamber housing and the gas discharge portion is connected to the other side of the chamber housing so that the precursor flow path is formed between the inner wall of the chamber housing and the plurality of hollow cylindrical chambers Powder Coating Reactor. 11. The method of claim 10,
Wherein the plurality of hollow cylindrical chambers are aligned and arranged so that the flow direction of the precursor gas flowing along the precursor flow path is parallel to the extending direction of the plurality of hollow cylindrical chambers. 11. The method of claim 10,
Wherein the plurality of hollow cylindrical chambers are aligned and arranged such that the flow direction of the precursor gas flowing along the precursor flow path is perpendicular to the extending direction of the plurality of hollow cylindrical chambers. 9. The method of claim 8,
At least one of the plurality of hollow cylindrical chambers having an intermediate opening between the first end and the second end for communicating the reaction space with the outside of the hollow cylindrical chamber,
Wherein the precursor gas or the exhaust gas flows in and out through the intermediate opening. 14. The method of claim 13,
Wherein the intermediate opening permits entry and exit of the precursor gas or the exhaust gas into and out of the reaction space and is shielded by a filter that prevents the outflow of the powder. 9. The method of claim 8,
Further comprising a first impeller and a second impeller disposed respectively at said first and second ends of said hollow cylindrical chamber,
Wherein the rotation of the first impeller and the second impeller is controlled during the powder coating process to move the powder biased to one end in the reaction space to the other end. 9. The method of claim 8,
Wherein at least one of the plurality of hollow cylindrical chambers is rotated for agitation of the powder loaded in each reaction space and the transmission of rotational force of the hollow cylindrical chamber from the rotational power section is in contact with the periphery of the hollow cylindrical chamber Wherein at least one friction pulley is used.

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