KR20220095389A - Batch-type powder ALD and usage system - Google Patents

Abstract

The present invention relates to a batch type powder ALD apparatus and an application system thereof. The batch type powder ALD apparatus according to the present invention comprises: a driving unit; a power conversion unit transferring power of the driving unit to a plurality of driven rotation shafts; and a plurality of reactors connected to the driven rotation shafts. Therefore, the apparatus is advantageous to proceed an ALD process in large quantities.

Description

Batch-type powder ALD and usage system

The present invention relates to a batch-type powder ALD apparatus and a system for utilizing the same, and more particularly, to a batch-type powder ALD apparatus capable of increasing the efficiency of an ALD process and a system for utilizing the same.

In order to coat a specific material on the surface of the powder, an Atomic Layer Deposition (ALD) method may be used. This ALD method is also called a powder ALD (P-ALD) method.

The powder ALD process is performed by inserting a powder, which is a material to be coated, into the reactor, and then introducing a metal precursor gas or the like into the reactor. As the particle surface of the powder is exposed to the metal precursor gas in the reactor, the metal precursor gas is deposited on the surface of the powder particle.

Among the powder ALD apparatuses, the rotary type has a structure in which a rotating tubular reactor is disposed inside a tubular heat source.

More specifically, the reactor 2 of the rotary powder ALD apparatus has a cylindrical tube shape as shown in FIG. 1 and is configured to rotate about an axis in a horizontal direction. In such a powder ALD apparatus, the ALD process is performed by supplying powder into the reactor 2 and then injecting gas through one end of the reactor 2 while rotating the reactor 2 .

The rotary type powder ALD apparatus rotates the reactor, so the powder is stirred with the gas, so the deposition efficiency is high. Therefore, it can be a burden in terms of economy or space.

KR 10-2086574 B1

An object of the present invention is to solve the problems of the prior art as described above, and an object of the present invention is to provide a batch type powder ALD apparatus and a system for utilizing the same, advantageous for performing an ALD process in large quantities.

The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

The above object, according to the present invention, the driving unit; a driving force conversion unit transmitting the driving force of the driving unit to a plurality of driven rotating shafts; and a plurality of reactors connected to the driven rotation shaft.

The driving force conversion unit may change a direction of the driving force of the driving unit.

The driving force conversion unit may include a first bevel gear fixed to the driving rotation shaft of the driving unit, and a second bevel gear engaged with the first bevel gear and connected to the driven rotation shaft.

The batch-type powder ALD apparatus according to the present invention includes: a heat transfer unit provided for each reactor and surrounding the periphery of the reactor; a heat source that heats the fluid; and a heat supply line for dispersing and supplying the fluid heated by the heat source to the heat transfer unit.

The batch type powder ALD apparatus according to the present invention may further include a chamber enclosing a plurality of the reactors at once.

The inner peripheral surface of the reactor may be formed to be inclined upwardly from one end toward the other end.

The diameter of the inner circumferential surface of the reactor may decrease from one end to the other end.

The center of the inner peripheral surface of one end and the center of the inner peripheral surface of the other end of the reactor may be formed to alternate with each other.

Concavities and convexities may be formed on the inner circumferential surface of the reactor.

A protrusion may protrude toward the center of the reactor in the concavo-convex, and the concavo-convex may extend in parallel with a circumferential direction of the reactor.

The protrusion may protrude toward the center of the reactor in the concavo-convex, and the concavo-convex may extend spirally.

The reactor may include an inner tube having a space in which the reaction occurs, and an outer tube surrounding the inner tube.

The inner tube and the outer tube may be made of different materials.

The inner tube may include a plurality of blocks, and adjacent ones of the blocks may be made of different materials.

According to another embodiment of the present invention, the above-described batch type powder ALD apparatus; and

An analyzer for analyzing the powder inside the reactor is provided, including a batch-type powder ALD device utilization system.

According to the batch time powder ALD apparatus according to the present invention, it is possible to rotate a plurality of reactors through one driving unit.

Accordingly, economic feasibility can be secured in performing the ALD process for a large amount of powder, and it is advantageous in terms of space utilization.

In addition, various deposition results can be quickly obtained by differently controlling the amount of powder or gas composition supplied to each reactor.

When the batch time powder ALD apparatus according to the present invention further includes a heat transfer unit, a heat source, and a heat supply line, a plurality of reactors can be heated through one heat source.

When a slope or unevenness is formed on the inner circumferential surface of the reactor, it is possible to prevent non-uniform reactions from occurring at one end and the other end of the reactor and clogging of the filter at the other end of the reactor.

And when the reaction tube of the reactor is formed of an inner tube and an outer tube, it is possible to increase the ease of management and the efficiency of the reaction.

1 is a cross-sectional view of an ALD apparatus reactor according to the prior art;
2 is an overall perspective view of a batch type powder ALD apparatus according to the present invention;
3 is a partial perspective view of a batch type powder ALD apparatus according to the present invention;
4 is an explanatory view of a case in which the batch type powder ALD apparatus according to the present invention further includes a chamber;
5 is a cross-sectional view of a reactor constituting a batch type powder ALD apparatus according to the present invention;
6 is an explanatory view of a case in which a slope is formed on the inner circumferential surface of a reactor constituting the batch type powder ALD apparatus according to the present invention;
7 is an explanatory view of a case in which irregularities are formed on the inner peripheral surface of a reactor constituting the batch type powder ALD apparatus according to the present invention;
8 is an explanatory view of a case in which the reactor constituting the batch-type powder ALD apparatus according to the present invention includes an inner tube and an outer tube;
9 and 10 are explanatory views for a case in which the inner tube constituting the type powder ALD apparatus according to the present invention consists of several blocks;
11 is a schematic configuration diagram of a system utilizing a batch type powder ALD apparatus according to the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

2 is an overall perspective view of the batch-type powder ALD apparatus 10 according to the present invention, and FIG. 3 is a partial perspective view of the batch-type powder ALD apparatus 10 according to the present invention.

The batch type powder ALD apparatus 10 according to the present invention includes a driving unit 100 , a driving force conversion unit 200 , and a plurality of reactors 300 .

The driving unit 100 is a part that generates a driving force, and includes, for example, a rotary motor.

The driving force conversion unit 200 transmits the driving force of the driving unit 100 to the plurality of driven rotation shafts 230 . That is, the driving force conversion unit 200 may include a plurality of gears, and may distribute and transmit the driving force generated by one driving unit 100 to the plurality of driven rotation shafts 230 .

The reactor 300 is formed for each driven rotational shaft 230 according to the number of the driven rotational shafts 230 . The reactor 300 is connected to the driven rotation shaft 230 and rotates by receiving the driving force of the driving unit 100 . 2, it can be seen that four reactors 300 are provided by way of example.

According to the batch-time powder ALD apparatus 10 according to the present invention, the driving force of one driving unit 100 is transferred to the plurality of reactors 300 through the driving force converting unit 200 and a plurality of them through one driving unit 100 . It is possible to rotate two reactors 300 .

Accordingly, economic feasibility can be secured in performing the ALD process for a large amount of powder, and it is advantageous in terms of space utilization.

In addition, various deposition results can be quickly obtained by differently controlling the amount of powder or gas composition supplied to each reactor 300 .

The driving force conversion unit 200 according to the present invention may change the direction of the driving force of the driving unit 100 .

For example, the driving force conversion unit 200 may convert the rotational force of the driving unit 100 with respect to a vertical axis to a rotational force with respect to a horizontal axis.

In this case, it is possible to increase the space efficiency of the arrangement of the driving unit 100 and the plurality of reactors 300 .

The driving force conversion unit 200 may include, for example, a first bevel gear 210 and a second bevel gear 220 . The first bevel gear 210 is fixed to the driving rotation shaft 110 of the driving unit 100 , and the second bevel gear 220 is engaged with the first bevel gear 210 and is connected to the driven rotation shaft 230 . Since the first bevel gear 210 and the second bevel gear 220 have an overall shape of a truncated cone and mesh with each other in a state where their axes intersect, it is possible to change the direction of the driving force.

Vibration generated while the first bevel gear 210 and the second bevel gear 220 rotate is transmitted to the reactor 300 through the driving rotation shaft 110 to more efficiently stir the powder and gas in the reactor 300 . can

Since the second bevel gear 220 is formed for each of a plurality of driven rotation shafts 230 and each has to be meshed with the first bevel gear 210 , it is preferably formed to have a smaller diameter than the first bevel gear 210 .

The batch type powder ALD apparatus 10 according to the present invention may further include a heat transfer unit 400 , a heat source 500 , and a heat supply line 600 .

The heat source 500 generates heat for generating a reaction in the reactor 300 by heating a fluid made of a liquid or gas.

The heat transfer unit 400 serves to heat the reactor 300 by receiving heat generated from the heat source 500 , and is provided for each reactor 300 and is formed to surround the circumference of the reactor 300 .

The heat supply line 600 distributes and supplies the fluid heated by the heat source 500 to each heat transfer unit 400 . That is, by the heat supply line 600 , the batch type powder ALD apparatus 10 according to the present invention can heat a plurality of reactors 300 through one heat source 500 .

As shown in FIG. 4 , the batch type powder ALD apparatus 10 according to the present invention may further include a chamber 700 .

The chamber 700 contains the reactor 300 to make the reactor 300 in a vacuum state. The chamber 700 may be formed to surround the plurality of reactors 300 at once, and may make the plurality of reactors 300 in a vacuum state at once.

As shown in FIG. 5 , the reactor 300 includes a reaction tube 340 in which an ALD process is performed, a first filter 350 covering one end of the reaction tube 340 , and the first filter 350 . ) while covering the first cover 360 for supplying gas into the reaction tube 340 through the inlet 361 , the second filter 370 covering the other end of the reaction tube 340 , and the second filter 370 . ) is provided with a second cover 380 connected to the driven rotation shaft 230 while covering. In addition, a plurality of stirring blades 390 may be formed to protrude from the inner circumferential surface of the reaction tube 340 to help agitate the powder.

The gas introduced into the reaction tube 340 through the inlet 361 of the first cover 360 reacts with the powder and then exits the reaction tube 340 through the other end of the reaction tube 340 .

The inner peripheral surface of the reactor 300, that is, the inner peripheral surface of the reaction tube 340 may be formed to be inclined upwardly from one end toward the other end.

Since the gas is supplied to one end of the reactor 300 and discharged to the other end, the metal precursor and powder contained in the gas may be driven to the other end of the reactor 300 by the flow of the gas, thereby The reaction may occur non-uniformly at one end and the other end, and the second filter 370 at the other end of the reactor 300 may be clogged.

When the inner circumferential surface of the reactor 300 is formed to be inclined upwardly from one end to the other end, the powder, etc. that have moved to the other end of the reactor 300 can move to one end of the reactor 300 along the inclination, so the above problems can be prevented. have.

As shown in (a) of Figure 6, the inner peripheral surface diameter of the reactor 300 decreases from one end to the other end, so that the inner peripheral surface of the reactor 300 can be formed to be inclined upwardly from one end to the other end. .

Alternatively, as shown in (b) of FIG. 6, the inner peripheral surface of the reactor 300 is formed so that the center of the inner peripheral surface of one end and the center of the inner peripheral surface of the other end of the reactor 300 are alternately formed so that the inner peripheral surface of the reactor 300 is inclined upwardly from one end to the other end. can be In this case, the direction of the inclination may be changed while the reactor 300 rotates, but the agitation of the powder, etc. can be made more effectively in that the powder, etc. continue to move while the direction of the inclination is continuously changed by the rotation, Non-uniform reaction or clogging of the second filter 370 can be prevented.

Concave-convex 310 may be formed on the inner peripheral surface of the reactor 300 .

The unevenness 310 prevents powder, etc. from moving from one end of the reactor 300 to the other end of the reactor 300 , thereby preventing the powder, etc. from being concentrated on the other end of the reactor 300 .

As shown in (a) of FIG. 7 , the protrusion 311 in the concavo-convex 310 protrudes toward the center of the reactor 300 , and the concavo-convex 310 extends in parallel with the circumferential direction of the reactor 300 . can be formed. That is, a plurality of protrusions 311 of the unevenness 310 may be formed, and each may be formed in a ring shape.

Alternatively, as shown in (b) of FIG. 7 , the protrusion 311 in the concavo-convex 310 protrudes toward the center of the reactor 300 , and the concavo-convex 310 may be formed to extend spirally. That is, the protrusion 311 of the concavo-convex 310 may be formed in a continuous spiral shape on the inner circumferential surface of the reactor 300 . These irregularities 310 may move the powder or the like in the direction of one end of the reactor 300 according to the rotation direction of the reactor 300 .

The inclination of the inner circumferential surface of the reactor 300 and the unevenness 310 are applied together, so that a non-uniform reaction in the reactor 300 or clogging of the second filter 370 can be prevented more effectively.

The reaction tube 340 of the reactor 300 may include an inner tube 320 and an outer tube 330 . 8 is a perspective view of the reaction tube 340 in this case.

The inner tube 320 has a space in which a reaction occurs, and forms an inner peripheral surface of the reaction tube 340 . The outer tube 330 is formed so as to surround the inner tube 320 so that its inner peripheral surface is in close contact with the outer peripheral surface of the inner tube 320 .

In this case, the inner tube 320 and the outer tube 330 may be separated according to the degree of pollution to remove or replace the pollution. That is, it is possible to more easily manage the degree of contamination of the reactor 300 .

When the reactor 300 includes the inner tube 320 and the outer tube 330 , the inner tube 320 and the outer tube 330 may be made of different materials. For example, the inner tube 320 may be made of an aluminum material and the outer tube 330 may be made of a stainless steel material. Accordingly, the outer tube 330 not only efficiently transfers heat from the heat transfer unit 400 by a stainless steel material having a high thermal emissivity, but also prevents the heat transferred into the reactor 300 from escaping to the outside. can be prevented In addition, the inner tube 320 may rapidly transfer heat transferred from the outer tube 330 into the reactor 300 by an aluminum material having a high thermal conductivity. As a result, the internal space of the reactor 300 may effectively receive heat from the heat transfer unit 400 to reach the target temperature within a short time.

A key (k) and a keyway (g) of a shape corresponding to each other are formed on the outer peripheral surface of the inner tube 320 and the inner peripheral surface of the outer tube 330, so that the inner tube 320 and the outer tube 330 can be fitted with each other. have. The key (k) and the keyway (g) may extend long along the axial direction of the reaction tube (340).

The inner tube 320 is made of a plurality of blocks 321, and in this case, adjacent ones of the blocks 321 may be made of different materials.

As the reactor 300 rotates, when the powder and the inner peripheral surface of the reactor 300 rub against each other, the powder is charged with a specific electric charge and has a polarity, which may cause a problem in that the powder is agglomerated with each other or adsorbed to the inner peripheral surface of the reactor 300. .

When the inner tube 320 is made of a plurality of blocks 321, some of the blocks 321 are formed of a material that positively charges the powder, and the rest of the blocks 321 are formed of a material that negatively charges the powder. , the specific charge values charged negatively or positively by friction between the inner peripheral surface of the reactor 300 and the powder may be offset from each other. Accordingly, it is possible to minimize agglomeration of the powders or adsorption to the inner peripheral surface of the reactor 300 .

The inner tube 320 is composed of a plurality of blocks 321 divided in the axial direction of the inner tube 320 as shown in FIG. 9, or the circumference of the inner tube 320 as shown in FIG. It may be composed of a plurality of blocks 321 divided in the direction.

In the inner tube 320, the powder may move along the axial direction of the inner tube 320 by the flow of gas or may move along the circumferential direction of the inner tube 320 by the rotation of the reactor 300, so that the block Even if the 321 is divided in any direction of the inner tube 320, the specific charge value of the powder may be offset.

9 and 10 exemplarily show the case in which the inner tube 320 consists of four blocks 321, respectively, but the inner tube 320 is composed of less than four or more than four blocks 321. It is also possible However, it is preferable that the inner circumferential area of the block 321 made of a material for positively electrifying powder and the inner circumferential area of the block 321 from a material for negatively electrifying the powder are the same to offset the specific charge value of the powder.

Hereinafter, the batch type powder ALD apparatus utilization system 1 according to the present invention will be described. While describing the batch-type powder ALD apparatus utilization system 1 according to the present invention, detailed descriptions of the parts mentioned in the description of the batch-type powder ALD apparatus 10 according to the present invention may be omitted.

11 is a schematic configuration diagram of the batch-type powder ALD device utilization system 1 according to the present invention is shown.

The batch-type powder ALD apparatus utilization system 1 according to the present invention includes the above-described batch-type powder ALD apparatus 10 and the analyzer 20 .

The batch type powder ALD apparatus 10 includes a driving unit 100, a driving force conversion unit 200, and a plurality of reactors 300 to rotate a plurality of reactors 300 through one driving unit 100, A heat transfer unit 400 , a heat source 500 , and a heat supply line 600 may be further provided to heat the plurality of reactors 300 through one heat source 500 . In addition, slopes or irregularities 310 are formed on the inner circumferential surface of the reactor 300 to prevent non-uniform reactions from occurring at one end and the other end of the reactor 300 and clogging of the filter at the other end of the reactor 300 can be prevented. In addition, the reaction tube 340 of the reactor 300 may be formed of an inner tube 320 and an outer tube 330 to increase the ease of management and the efficiency of the reaction.

The analyzer 20 analyzes the properties of the powder inside the reactor 300 . For example, the analyzer 20 includes a physical property measurement system (PPMS) 21 , and a mass analyzer 20 such as PM-TOF, to in-situ powder can be analyzed for the chemical composition of

By immediately analyzing the properties of the powder by the analyzer 20 , it is possible to adjust the state of the gas supplied to the reactor 300 or determine whether to continue the operation of the reactor 300 .

The scope of the present invention is not limited to the above-described embodiments, but may be implemented in various types of embodiments within the scope of the appended claims. Without departing from the gist of the present invention claimed in the claims, it is considered to be within the scope of the claims of the present invention to various extents that can be modified by any person skilled in the art to which the invention pertains.

1: Batch type powder ALD device utilization system
10: batch type powder ALD device 20: analyzer
100: driving unit 200: driving force conversion unit
210: first bevel gear 220: second bevel gear
230: driven rotation shaft 300: reactor
310: uneven 311: protrusion
320: inner tube 321: block
330: outer tube 400: heat transfer unit
500: heat source 600: heat supply line
700: chamber

Claims (15)

drive unit;
a driving force conversion unit for transmitting the driving force of the driving unit to a plurality of driven rotating shafts; and
A batch type powder ALD apparatus comprising a; a plurality of reactors connected to the driven rotation shaft.
The method of claim 1,
The driving force conversion unit, a batch type powder ALD device, characterized in that for switching the direction of the driving force of the driving unit.
3. The method of claim 2,
The driving force conversion unit,
A first bevel gear fixed to the driving rotation shaft of the driving unit, and
and a second bevel gear engaged with the first bevel gear and connected to the driven rotation shaft.
According to claim 1,
a heat transfer unit provided for each reactor and surrounding the periphery of the reactor;
a heat source that heats the fluid; and
The batch type powder ALD apparatus further comprising a; a heat supply line for dispersing and supplying the fluid heated by the heat source to the heat transfer unit.
The method of claim 1,
Batch type powder ALD apparatus, characterized in that it further comprises a chamber enclosing the plurality of reactors at once.
According to claim 1,
Batch type powder ALD apparatus, characterized in that the inner peripheral surface of the reactor is inclined upwardly from one end toward the other end.
7. The method of claim 6,
A batch type powder ALD apparatus, characterized in that the inner peripheral diameter of the reactor decreases from one end to the other.
7. The method of claim 6,
A batch type powder ALD apparatus, characterized in that the center of the inner peripheral surface of one end and the center of the inner peripheral surface of the other end of the reactor are formed to be alternated with each other.
The method of claim 1,
A batch type powder ALD apparatus, characterized in that unevenness is formed on the inner peripheral surface of the reactor.
10. The method of claim 9,
The protrusion in the irregularities protrudes toward the center of the reactor,
The batch type powder ALD apparatus, characterized in that the unevenness extends parallel to the circumferential direction of the reactor.
10. The method of claim 9,
The protrusion in the irregularities protrudes toward the center of the reactor,
The batch type powder ALD apparatus, characterized in that the unevenness extends in a spiral.
According to claim 1,
The reactor is a batch type powder ALD apparatus, characterized in that it comprises an inner tube having a space in which the reaction takes place, and an outer tube surrounding the inner tube.
13. The method of claim 12,
The batch type powder ALD apparatus, characterized in that the inner tube and the outer tube are made of different materials.
13. The method of claim 12,
The inner tube is made of a plurality of blocks,
A batch type powder ALD apparatus, characterized in that adjacent ones of the blocks are made of different materials.
A batch type powder ALD apparatus according to any one of claims 1 to 14; and
Batch-type powder ALD device utilization system comprising a; analyzer to analyze the powder inside the reactor.

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