KR102517256B1 - Reactor with wrinkled inner circumference and powder ALD device including the same - Google Patents

Abstract

The present invention relates to a reactor with a corrugated inner circumferential surface capable of suppressing the problem of powder moving in the moving direction of gas and gathering at the outlet side or clogging of a filter installed at the outlet side by the powder collected at the outlet side, and a powder ALD device including the same. A reactor for a powder ALD device rotatably installed in a horizontal direction according to the present invention includes an outer circumferential surface having a cylindrical shape and an inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape. A first opening into which gas is injected is formed on one side of the inner circumferential surface, and a second opening through which gas injected into the first opening is discharged is formed on the other side. And the inner circumferential surface is formed to be wrinkled from the first opening toward the second opening.

Description

Reactor with wrinkled inner circumference and powder ALD device including the same}

The present invention relates to a powder atomic layer deposition (ALD) apparatus, and more particularly, to a reactor having a corrugated inner circumferential surface so as to uniformly distribute powder in the reactor in an ALD process, and to a powder ALD apparatus including the same .

In order to coat a specific material on the surface of the powder, an atomic layer deposition (ALD) method may be used. This ALD method is also referred to as a powder ALD (P-ALD) method.

Among powder ALD devices, a rotary type has a structure in which a tubular reactor rotated by a motor is disposed inside a tubular heat source. The powder ALD process is performed by introducing a metal precursor gas or the like into the reactor after inserting powder, which is a material to be coated, into the reactor. As the particle surfaces of the powder are exposed to the metal precursor gas, the metal precursor gas is deposited on the particle surfaces.

As shown in FIG. 1, the reactor 2 for a powder ALD device has a cylindrical tube shape and is configured to rotate in a horizontal direction. The reactor 2 has an inner circumferential surface 3 having the same inner diameter, and a plurality of stirring blades 9 capable of uniformly stirring the powder are formed on the inner circumferential surface 3. The inner circumferential surface 3 of the rotating reactor 2 is formed horizontally to the rotation shaft. In the ALD process, after supplying powder into the reactor 2, gas is injected into the first opening 5 on one side of the reactor 2 while rotating the reactor 2 in an axial direction horizontal to the ground It can proceed in the form of being discharged to the second opening 7 on the other side. 1 is a cross-sectional view showing a conventional reactor 2 for a powder ALD device having a constant inner diameter. IN represents a direction in which gas is injected, and OUT represents a direction in which gas is discharged. R represents the direction of rotation of the reactor 2, and S represents the direction in which the powder is stirred.

Since such a conventional reactor 2 is arranged in a horizontal direction and the inner circumferential surface 3 has a constant inner diameter, when there is no gas injected into the reactor 2, the powder is not stirred up and down rather than generally. It is made in a local form such as movement (S). Due to this, a difference in thickness may occur depending on the position of the inside of the reactor 2 when the powder is deposited as a thin film. That is, a problem in that the thin film is not uniformly deposited on the powder may occur.

And, when gas is injected into one side of the reactor 2 and discharged to the other side of the reactor 2, the movement of the powder may occur in the direction in which the gas moves. As a result, as shown in FIGS. 2 to 4, the powder gathers toward the second opening 7 of the reactor 2 through which the gas is discharged, causing a problem that the filter installed on the second opening 7 is clogged. can Here, FIG. 2 is a photograph of the reactor 2 of FIG. 1, showing the second opening 7 of the reactor before the ALD process. FIG. 3 is a photograph showing the second opening 7 of the reactor 2 after the ALD process of FIG. 2 . And FIG. 4 is a photograph showing filters respectively installed in the first opening and the second opening of the reactor 2 of FIG. 2 .

That is, comparing FIGS. 2 and 3 , it can be confirmed that the powder is collected in the second opening 7 of the reactor after the ALD process. As a result, it can be confirmed that more powder is deposited on the filter installed in the second opening of the reactor shown in FIG. 4(b) than on the filter installed in the first opening of the reactor shown in FIG. can

Registered Patent No. 10-2086574 (2020.03.09. Notice)

Therefore, an object of the present invention is to suppress the problem that the powder is moved toward the second opening, which is the outlet, in the direction of gas movement, or the filter installed on the second opening is clogged by the powder moving toward the second opening. It is to provide a reactor having a corrugated inner circumferential surface and a powder ALD device including the same.

In order to achieve the above object, the present invention is a reactor for a powder ALD device rotatably installed in a horizontal direction, comprising: an outer circumferential surface having a cylindrical shape; And an inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side. It includes; the inner circumferential surface formed to be wrinkled from the first opening toward the second opening.

The inner circumferential surface is formed of wrinkles in which valleys and crests are repeated.

The inner circumferential surface may be separated from the valleys and the ridges, respectively.

The inner circumferential surface may be formed in a spiral shape in which the valleys and the crests are respectively connected.

The inner circumferential surface may be formed as a conical surface such that an inner diameter of the first opening part is larger than an inner diameter of the second opening part, so that an inclination may be formed between the first opening part and the second opening part.

In the inner circumferential surface, an inclination may be formed between the first opening and the second opening when the first opening and the second opening are vertically offset from each other with respect to a central axis in a horizontal direction.

The present invention is also a reactor for a powder ALD device installed rotatably in a horizontal direction, comprising: a tubular external reactor; and an internal reactor coupled to an inner circumferential surface of the external reactor to form a tubular shape.

The inner reactor has an outer circumferential surface having a cylindrical shape; And an inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side. It includes; the inner circumferential surface formed to be wrinkled from the first opening toward the second opening.

The internal reactor may include a plurality of blocks divided in a horizontal central axis direction.

And the present invention is a powder ALD device rotatably installed in the horizontal direction, a heat source for supplying heat; and the reactor rotatably installed inside the heat source in a horizontal direction and receiving heat from the heat source to perform atomic layer deposition (ALD) on the surface of the powder provided therein.

According to the present invention, by forming the inner circumferential surface of the rotating reactor in a corrugated manner, it is possible to suppress the problem that the powder is moved toward the second opening, which is the discharge port, in the direction of gas movement, and the filter installed on the second opening is clogged with powder. That is, the wrinkles formed on the inner circumferential surface of the reactor suppress the movement of the powder toward the second opening, which is the outlet, in the direction of gas movement, so that the powder moves toward the second opening, which is the outlet, in the direction of gas movement, or gathers in the second opening. It is possible to suppress the problem of clogging of the filter installed on the side of the second opening due to the powder moving toward the side.

In addition, the wrinkles formed on the inner circumferential surface of the reactor suppress the movement of the powder toward the second opening, which is the outlet, in the direction of gas movement, thereby uniformly distributing the powder in the reactor, so that the powder is stirred throughout the reactor. can Because of this, since the powder is generally stirred in the reactor, it is possible to deposit a thin film on the powder with a uniform thickness.

In addition, by forming the inner surface of the reactor as an inclined surface, the powder can be uniformly distributed in the reactor so that the powder can be stirred throughout the reactor. That is, even when there is no gas injected into the reactor, stirring by the up-and-down movement of the powder by the rotation of the reactor and stirring by the left-right movement of the powerder by the inclined surface are performed together, so the powder is stirred in the reactor. This can be done in general.

1 is a cross-sectional view showing a conventional reactor for a powder ALD device having a constant inner diameter.
FIG. 2 is a photograph of the reactor of FIG. 1, showing an outlet of the reactor before an ALD process.
FIG. 3 is a photograph showing the outlet of the reactor after the ALD process of FIG. 2 .
FIG. 4 is a photograph showing filters respectively installed at the inlet and outlet of the reactor of FIG. 2 .
5 is a view showing a powder ALD device including a reactor having a corrugated inner circumferential surface according to a first embodiment of the present invention.
6 is a cross-sectional view showing a reactor having a corrugated inner circumferential surface according to a first embodiment of the present invention.
7 is a schematic cross-sectional view showing a reactor having a corrugated inner circumferential surface according to a second embodiment of the present invention.
8 is a cross-sectional view showing a reactor having a corrugated inner circumferential surface according to a third embodiment of the present invention.
9 is a schematic cross-sectional view showing a reactor having a corrugated inner circumferential surface according to a fourth embodiment of the present invention.
10 is an exploded perspective view showing a reactor according to a fifth embodiment of the present invention.
11 is a combined perspective view showing the reactor of FIG. 10;
12 is an exploded perspective view showing a reactor according to a sixth embodiment of the present invention.
13 is a combined perspective view showing the reactor of FIG. 12;

It should be noted that in the following description, only parts necessary for understanding the embodiments of the present invention are described, and descriptions of other parts will be omitted without departing from the gist of the present invention.

The terms or words used in this specification and claims described below should not be construed as being limited to ordinary or dictionary meanings, and the inventors have appropriately used the concept of terms to describe their inventions in the best way. It should be interpreted as a meaning and concept consistent with the technical spirit of the present invention based on the principle that it can be defined in the following way. Therefore, the embodiments described in this specification and the configurations shown in the drawings are only preferred embodiments of the present invention, and do not represent all of the technical spirit of the present invention, so various equivalents that can replace them at the time of the present application. It should be understood that there may be variations and variations.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

[First Embodiment]

5 is a view showing a powder ALD device including a reactor having a corrugated inner circumferential surface according to a first embodiment of the present invention. 6 is a cross-sectional view showing a reactor having a corrugated inner circumferential surface according to the first embodiment of the present invention.

Referring to FIGS. 5 and 6 , the powder ALD device 100 according to the first embodiment includes a heat source 10 for supplying heat, and ALD is applied to the surface of the powder provided therein by receiving heat from the heat source 10. It includes a reactor 20 that performs. Here, the reactor 20 includes an outer circumferential surface 21 having a cylindrical shape and an inner circumferential surface 23 opposite to the outer circumferential surface 21 and having a cylindrical shape. The inner circumferential surface 23 has a first opening 25 through which gas is injected on one side and a second opening 27 through which the gas injected into the first opening 25 is discharged on the other side. there is. The inner circumferential surface 23 is wrinkled from the first opening 25 toward the second opening 27 .

The powder ALD apparatus 100 according to the first embodiment may further include a motor 50 rotating the reactor 20 and a chamber 80 .

The reactor 20 is rotatably installed in a horizontal direction, and may be implemented as a single tube including an outer circumferential surface 21 and an inner circumferential surface 23. The reactor 20 may have the shape of a cylindrical tube having first and second openings 25 and 27 formed on both sides. The first opening 25 may be used as an inlet through which gas is injected, and the second opening 27 may be used as a discharge through which gas is discharged.

The reactor 20 may further include a plurality of stirring blades formed on the inner circumferential surface 23 . A plurality of stirring blades may be formed to protrude toward the center of the inner circumferential surface 23 .

The first and second openings 25 and 27 of the reactor 20 are sealed by first and second covers 35 and 41, respectively.

The first cover 35 is coupled to the first opening 25 via the first filter 31 . An injection shaft 37 having an injection port 39 communicating with the inside of the reactor 20 is formed on the first cover 35 . A gas required for the ALD process is injected into the reactor 20 through the inlet 39 . The injection shaft 37 is supported so that the reactor 20 can rotate.

The second cover 41 is coupled to the second opening 27 via the second filter 33 . A connection shaft 43 is formed on the same line as the injection shaft 37 in the second cover 41 . The connecting shaft 43 is coupled to the driving shaft 51 of the motor 50 that rotates the reactor 20 .

And the chamber 80 contains the heat source 10 and the reactor 20 . The chamber 80 makes the reactor 20 in a vacuum state during the ALD process.

The inner circumferential surface 23 of the reactor 20 according to the first embodiment is formed with wrinkles in which valleys and peaks are repeated. That is, the inner circumferential surface 23 of the reactor 20 may be formed as a corrugated pipe. For example, the wrinkles of the inner circumferential surface 23 may be formed in a form in which valleys and peaks are separated from each other. The corrugations may be formed to have valleys and crests at various intervals and heights. The wrinkles may be formed in the form of a sine wave or a sharp triangular wave.

The wrinkles formed on the inner circumferential surface 23 of the reactor 20 according to the first embodiment suppress the movement of the powder from the first opening 25 to the second opening 27 by the gas flow.

In this way, by forming the inner circumferential surface 23 of the reactor 20 to be corrugated, the movement of the powder from the first opening 25 to the second opening 27 in the direction of gas movement is suppressed, so that the second opening ( 27) can suppress the problem that the second filter 33 installed on the side is clogged with powder.

In addition, by suppressing the powder from moving toward the second opening 27, the powder can be uniformly distributed in the reactor 20 so that the powder can be generally stirred in the reactor 20. Because of this, since the powder is generally stirred in the reactor 20, it is possible to deposit a thin film on the powder with a uniform thickness.

[Second Embodiment]

Meanwhile, in the first embodiment, an example in which wrinkles are formed on the inner circumferential surface 23 in a form in which valleys and peaks are separated from each other has been disclosed, but is not limited thereto. For example, as shown in FIG. 7 , wrinkles may be spirally formed on the inner circumferential surface 23 .

7 is a schematic cross-sectional view showing a reactor having a corrugated inner circumferential surface according to a second embodiment of the present invention.

Referring to FIG. 7 , the reactor 120 according to the second embodiment is rotatably installed in a horizontal direction and may be implemented as a single tube including an outer circumferential surface 21 and an inner circumferential surface 23 . The inner circumferential surface 23 has a first opening 25 through which gas is injected on one side and a second opening 27 through which the gas injected into the first opening 25 is discharged on the other side. there is. The inner circumferential surface 23 is wrinkled from the first opening 25 toward the second opening 27 .

The inner circumferential surface 23 of the reactor 120 according to the second embodiment is formed with wrinkles in which valleys and peaks are repeated. For example, the wrinkles of the inner circumferential surface 23 may be formed in a spiral shape in which valleys and crests are connected to each other. The wrinkles formed on the inner circumferential surface 23 suppress the movement of the powder from the first opening 25 toward the second opening 27 by the gas flow.

In this way, by forming the inner circumferential surface 23 of the reactor 120 to be wrinkled, the movement of the powder from the first opening 25 to the second opening 27 in the direction of gas movement is suppressed and the second opening ( 27) can suppress the problem that the second filter 33 installed on the side is clogged with powder.

In addition, by suppressing the powder from moving toward the second opening 27, the powder can be uniformly distributed in the reactor 120 so that the powder can be generally stirred in the reactor 120. Because of this, since the stirring of the powder is generally performed in the reactor 120, it is possible to deposit a thin film on the powder with a uniform thickness.

[Third and Fourth Embodiments]

Meanwhile, in the first and second embodiments, an example of forming wrinkles on the inner circumferential surface 23 of the reactors 20 and 120 is disclosed, but is not limited thereto. For example, as shown in FIGS. 8 and 9 , the inner circumferential surfaces 23 of the reactors 220 and 320 may be formed as inclined surfaces.

8 is a cross-sectional view showing a reactor 220 having a corrugated inner circumferential surface 23 according to a third embodiment of the present invention.

Referring to FIG. 8 , the reactor 220 according to the third embodiment is rotatably installed in a horizontal direction and may be implemented as a single tube including an outer circumferential surface 21 and an inner circumferential surface 23 . The inner circumferential surface 23 has a first opening 25 through which gas is injected on one side and a second opening 27 through which the gas injected into the first opening 25 is discharged on the other side. there is. The inner circumferential surface 23 is inclined from the first opening 25 toward the second opening 27 while being wrinkled.

The inner circumferential surface 23 of the reactor 220 according to the third embodiment is formed with wrinkles in which valleys and peaks are repeated. For example, the wrinkles of the inner circumferential surface 23 may be formed in a form in which valleys and peaks are separated from each other, as in the first embodiment. Alternatively, the wrinkles of the inner circumferential surface 23 may be formed in a spiral shape in which valleys and crests are connected, respectively, as in the second embodiment. The wrinkles formed on the inner circumferential surface 23 suppress the movement of the powder from the first opening 25 toward the second opening 27 by the gas flow.

In the reactor 20 according to the third embodiment, the inner diameter of the first opening 25 is formed as a conical surface larger than the inner diameter of the second opening 27 so that the inner peripheral surface 23 can be formed as an inclined surface. That is, the reactor 220 is thicker from the first opening 25 toward the second opening 27 in the direction of the rotation axis.

As a result, since the inner circumferential surface 23 is formed with a relatively lower slope than the first opening 25 and the second opening 27, the powder is uniformly distributed in the reactor 220 so that the inside of the reactor 220 In the agitation of the powder can be made generally. That is, even when there is no gas injected into the reactor 220, since the stirring by the vertical movement of the powder by the rotation of the reactor 220 and the left-right movement of the powerder by the inclined surface are performed together, Agitation of the powder in the reactor 220 may be performed throughout.

In the reactor 220 according to the third embodiment, even when gas flows from the first opening 25 to the second opening 27, powder flows from the first opening 25 to the second opening along the inclined surface. Movement to the opening 27 can be suppressed. That is, even if the powder moves from the first opening 25 to the second opening 27 by the flow of gas, the powder moves from the second opening 27 to the inclined surface formed by the first opening 25. Since stirring is performed while moving toward one opening 25, stirring can be made uniformly throughout the inside of the reactor 20 to the powder. The problem that the second filter installed in the second opening 27 is clogged with powder can be suppressed.

Specifically, in a state where powder is supplied into the reactor 220, gas is injected into the reactor 20 rotating in the R direction through the first opening 25 and discharged through the second opening 27. Assuming that it is, basically, the agitation (S) of the powder is made up and down.

Therefore, by forming the inner circumferential surface of the rotating reactor 220 as an inclined surface, regardless of whether gas is injected, the powder is uniformly distributed in the reactor 220 so that the powder is stirred in the reactor 220 generally can do.

In this way, since the inner peripheral surface 23 of the reactor 220 according to the third embodiment is formed to be inclined while being wrinkled, stirring of the powder is generally performed in the reactor 220, so that a thin film can be deposited on the powder with a uniform thickness. can

And, by uniformly distributing the powder in the reactor 220, the powder moves toward the second opening 27 in the moving direction of the gas, thereby solving the problem that the second filter installed on the side of the second opening 27 is clogged with powder. can be suppressed

9 is a schematic cross-sectional view showing a reactor having a corrugated inner circumferential surface according to a fourth embodiment of the present invention.

Referring to FIG. 9 , the reactor 320 according to the fourth embodiment is rotatably installed in a horizontal direction and may be implemented as a single tube including an outer circumferential surface 21 and an inner circumferential surface 23 . The inner circumferential surface 23 has a first opening 25 through which gas is injected on one side and a second opening 27 through which the gas injected into the first opening 25 is discharged on the other side. there is. The inner circumferential surface 23 is inclined from the first opening 25 toward the second opening 27 while being wrinkled.

The inner circumferential surface 23 of the reactor 320 according to the fourth embodiment is formed with wrinkles in which valleys and peaks are repeated. For example, the wrinkles of the inner circumferential surface 23 may be formed in a form in which valleys and peaks are separated from each other, as in the first embodiment. Alternatively, the wrinkles of the inner circumferential surface 23 may be formed in a spiral shape in which valleys and crests are connected, respectively, as in the second embodiment. The wrinkles formed on the inner circumferential surface 23 suppress the movement of the powder from the first opening 25 toward the second opening 27 by the gas flow.

In the reactor 320 according to the fourth embodiment, the inner circumferential surface 23 has a first opening 25 and a second opening 27 with respect to the central axis in the horizontal direction so that the inner circumferential surface 23 can be formed as an inclined surface. May be arranged vertically offset from each other to form an inclined surface. The inner diameters of the first opening 25 and the second opening 27 may be the same.

Since the inner peripheral surface 23 of the reactor 320 according to the fourth embodiment is also formed as an inclined surface, similar to the reactor (220 in FIG. 8) according to the third embodiment, the stirring of the powder in the reactor 320 is generally Since it is made of, it is possible to deposit a thin film with a uniform thickness on the powder.

In this way, since the inner peripheral surface 23 of the reactor 320 according to the fourth embodiment is formed to be inclined while being wrinkled, stirring of the powder is generally performed in the reactor 320, so that a thin film can be deposited on the powder with a uniform thickness. can

And, by uniformly distributing the powder in the reactor 320, the powder moves toward the second opening 27 in the moving direction of the gas, thereby solving the problem that the second filter installed on the side of the second opening 27 is clogged with powder. can be suppressed

[Fourth and Fifth Embodiments]

Meanwhile, in the first to fourth embodiments, an example in which the reactors 20, 120, 220, and 320 are formed as a single tube is disclosed, but is not limited thereto. For example, the reactors 420 and 520 may be implemented as double tubes including an external reactor 60 and an internal reactor 70, as shown in FIGS. 10 to 13 .

10 is an exploded perspective view showing a reactor 420 according to a fifth embodiment of the present invention. And Figure 11 is a combined perspective view showing the reactor 420 of Figure 10.

10 and 11, the reactor 420 according to the fifth embodiment has a structure in which a tubular external reactor 60 and a tubular internal reactor 70 are coupled to the inside of the external reactor 60. can be implemented At this time, wrinkles may be formed on the inner circumferential surface of the inner reactor 70 and a slope may be further formed. The inner reactor 70 may be wrinkled or inclined like the reactors according to the first to fourth embodiments.

The external reactor 60 and the internal reactor 70 are fitted and installed so that the outer circumferential surface of the internal reactor 70 is in close contact with the inner circumferential surface of the external reactor 60 . For example, the inner circumferential surface of the external reactor 60 and the outer circumferential surface of the internal reactor 70 may be fitted using keys formed to correspond to each other and a key groove coupled to the key. The key and the keyway may be formed long in the axial direction of the external reactor 60 and the internal reactor 70 .

In this way, when the reactor 420 according to the fifth embodiment is implemented as a double pipe, the following effects can be expected. For example, the reactor 420 includes an external reactor 60 made of stainless steel and an internal reactor 70 made of aluminum coupled to the inside of the external reactor 60 . That is, the external reactor 60 is made of stainless steel having a high thermal emissivity, thereby increasing the amount of heat transferred from the heat source to the reactor 420 . In addition, since the internal reactor 70 is made of aluminum having a high thermal conductivity, heat received by the external reactor 60 is quickly transferred to the inside, thereby increasing the temperature rise rate inside the reactor 420 . Therefore, the reactor 420 can reach the target temperature in a shorter time by effectively receiving heat from the heat source.

In addition, the double tube type reactor 420 may be separated according to the degree of contamination of the external reactor 60 and the internal reactor 70 to remove or replace the contamination. That is, compared to the conventional single-material reactor, the double-tube type reactor 420 can more efficiently manage internal and external contamination levels.

12 is an exploded perspective view showing a reactor 520 according to a sixth embodiment of the present invention. 13 is a combined perspective view showing the reactor of FIG. 12;

12 and 13, the reactor 520 according to the sixth embodiment includes a tubular external reactor 60 and an internal reactor 70 coupled to the inner circumferential surface of the external reactor 60 to form a tubular shape. includes At this time, wrinkles may be formed on the inner circumferential surface of the inner reactor 70 and a slope may be further formed. The inner reactor 70 may be wrinkled or inclined like the reactors according to the first to fourth embodiments.

Here, the internal reactor 70 is implemented in a tubular shape by combining two blocks 70a and 70b. The inner reactor 70 includes two axially divided blocks 70a and 70b. Cross sections of the two blocks 70a and 70b may have a semicircular shape. The two blocks 70a and 70b include a first block 70a and a second block 70b.

The internal reactor 70 according to the sixth embodiment has the same structure as the internal reactor according to the fifth embodiment, except that it has a structure divided into two blocks 70a and 70b.

As such, since the internal reactor 70 according to the sixth embodiment is implemented in substantially the same form as the reactors according to the first to fourth embodiments, the same effects as those of the reactors according to the first to fourth embodiments can be expected. there is.

That is, the internal reactor 70 according to the sixth embodiment may have the same structure as the reactor according to the first embodiment. That is, the internal reactor 70 is rotatably installed in a horizontal direction and includes an outer circumferential surface 71 and an inner circumferential surface 73 . The inner circumferential surface 73 has a first opening 75 through which gas is injected on one side and a second opening 77 through which the gas injected into the first opening 75 is discharged on the other side. there is. The inner circumferential surface 73 is wrinkled from the first opening 75 toward the second opening 77 .

The inner circumferential surface 73 of the reactor 70 according to the sixth embodiment is formed with wrinkles in which valleys and peaks are repeated. For example, the wrinkles of the inner circumferential surface 73 may be formed in a form in which valleys and peaks are separated from each other. The wrinkles formed on the inner circumferential surface 73 suppress the movement of the powder from the first opening 75 toward the second opening 77 by the gas flow.

In addition, the reactor 520 according to the sixth embodiment is implemented as a double tube, but when the internal reactor 70 is implemented as a plurality of blocks 70a and 70b, the following effects can be expected. That is, the split-type reactor 520 includes a tubular external reactor 60 and a plurality of heterogeneous material blocks 70a and 70b coupled to the inner circumferential surface of the external reactor 60 to form a tubular internal reactor 70. includes As a result, in the powder ALD process, the internal reactor 70 of the split reactor 520 alternately includes a first region positively charged for the powder and a second region negatively charged, so that the internal reactor 70 and the powder It is possible to converge to 0 by canceling the specific charge values that are negatively or positively charged by the friction of Due to this, in the powder ALD process, it is possible to minimize the powder agglomeration or adsorption to the inner wall of the internal reactor 70 . That is, since the powder ALD process proceeds while generating a flow of gas in the axial direction or the circumferential direction of the internal reactor 70, the first and second regions are formed in a direction perpendicular to the direction of the gas flow. By alternately arranging the blocks 70a and 70b to form the internal reactor 70, the specific charge values that are negatively or positively charged by friction between the internal reactor 70 and the powder can be converged to 0 by canceling each other. there is.

On the other hand, the embodiments disclosed in this specification and drawings are only presented as specific examples to aid understanding, and are not intended to limit the scope of the present invention. In addition to the embodiments disclosed herein, it is obvious to those skilled in the art that other modifications based on the technical idea of the present invention can be implemented.

10, : heat source 20,120,220,320,420,520 : reactor
21: outer circumference 23: inner circumference
25: first opening 27: second opening
31: first filter 33: second filter
35: first cover 37: injection shaft
39: inlet 41: second cover
43: connecting shaft 50: motor
51: drive shaft 60: external reactor
70: internal reactor 70a: first block
70b: second block 71: outer circumference
73: inner peripheral surface 75: first opening
77: second opening 80: chamber
100: powder ALD device

Claims (11)

A reactor for a powder ALD device installed rotatably in a horizontal direction,
An outer circumferential surface having a cylindrical shape; and
An inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side, and the first Including; the inner circumferential surface wrinkled from the opening toward the second opening;
In the inner surface,
A reactor for a powder ALD device with a corrugated inner circumferential surface, characterized in that the corrugations are formed in the form of repeated valleys and crests, and the corrugations are formed in an axial direction from the first opening portion to the second opening portion. The method of claim 1, wherein the inner circumferential surface,
A reactor for a powder ALD device having a wrinkled inner circumferential surface, characterized in that the wrinkles are formed in the form of a triangular wave. The method of claim 1, wherein the inner circumferential surface,
A reactor for a powder ALD device with a wrinkled inner circumferential surface, characterized in that the wrinkles are formed in the form of a sine wave. The method of claim 1, wherein the inner circumferential surface,
A reactor for a powder ALD device with a corrugated inner circumferential surface, characterized in that the valleys and the peaks are formed in a spiral shape connected to each other. The method of claim 1, wherein the inner circumferential surface,
A reactor for a powder ALD device with a wrinkled inner circumferential surface, characterized in that the inner diameter of the first opening is formed as a conical surface that is larger than the inner diameter of the second opening, so that it is inclined upward from the first opening toward the second opening. The method of claim 1, wherein the inner circumferential surface,
The powder ALD device with a corrugated inner circumferential surface, characterized in that the first opening and the second opening are vertically offset from each other with respect to the central axis in the horizontal direction, and are inclined upward from the first opening to the second opening. dragon reactor. A reactor for a powder ALD device installed rotatably in a horizontal direction,
tubular external reactor; and
Including; an internal reactor coupled to the inner circumferential surface of the external reactor to form a tubular shape;
The internal reactor,
An outer circumferential surface having a cylindrical shape; and
An inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side, and the first Including; the inner circumferential surface wrinkled from the opening toward the second opening;
In the inner surface,
A reactor for a powder ALD device with a corrugated inner circumferential surface, characterized in that the corrugations are formed in the form of repeated valleys and crests, and the corrugations are formed in an axial direction from the first opening portion to the second opening portion. The method of claim 7, wherein the inner circumferential surface,
A reactor for a powder ALD device with a wrinkled inner circumferential surface, characterized in that the wrinkles are formed in the form of a sine wave or triangular wave. The method of claim 7, wherein the internal reactor,
A reactor for a powder ALD device having an inclined surface, characterized in that it comprises a plurality of blocks divided in the direction of the central axis in the horizontal direction. As a powder ALD device rotatably installed in the horizontal direction,
a heat source that supplies heat; and
A reactor rotatably installed in the horizontal direction inside the heat source and receiving heat from the heat source to perform atomic layer deposition (ALD) on the surface of the powder provided therein; includes,
The reactor is
An outer circumferential surface having a cylindrical shape; and
An inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side, and the first Including; the inner circumferential surface wrinkled from the opening toward the second opening;
In the inner surface,
A powder ALD device with a corrugated inner circumferential surface, characterized in that the corrugations are formed in the form of repeating valleys and crests, and the corrugations are formed in an axial direction from the first opening part to the second opening part. The method of claim 10, wherein the reactor,
Powder ALD device with a wrinkled inner circumferential surface, characterized in that the wrinkles on the inner circumferential surface are formed in the form of a sine wave or triangular wave.

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