KR102517262B1 - Reactor having an inclined surface and powder ALD apparatus including the same - Google Patents

Abstract

The present invention relates to a reactor having an inclined surface and a powder ALD device including the same to deposit a thin film on powder with a uniform thickness in an ALD process. The reactor according to the present invention has an outer circumferential surface having a cylindrical shape and an inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape. A first opening into which gas is injected is formed on one side of the inner circumferential surface, and a second opening through which gas injected into the first opening is discharged is formed on the other side. And the inner circumferential surface is formed as an inclined surface from the first opening toward the second opening.

Description

Reactor having an inclined surface and powder ALD apparatus including the same}

The present invention relates to a powder atomic layer deposition (ALD) apparatus, and more particularly, to a reactor having an inclined surface so as to deposit a thin film on powder with a uniform thickness in an ALD process, and a powder ALD apparatus including the same it's about

In order to coat a specific material on the surface of the powder, an atomic layer deposition (ALD) method may be used. This ALD method is also referred to as a powder ALD (P-ALD) method.

Among powder ALD devices, a rotary type has a structure in which a tubular reactor rotated by a motor is disposed inside a tubular heat source. The powder ALD process is performed by introducing a metal precursor gas or the like into the reactor after inserting powder, which is a material to be coated, into the reactor. As the particle surfaces of the powder are exposed to the metal precursor gas, the metal precursor gas is deposited on the particle surfaces.

As shown in FIG. 1, the reactor 2 for a powder ALD device has a cylindrical tube shape and is configured to rotate in a horizontal direction. The reactor 2 has an inner circumferential surface 3 having the same inner diameter, and a plurality of stirring blades 9 capable of uniformly stirring the powder are formed on the inner circumferential surface 3. The inner circumferential surface 3 of the rotating reactor 2 is formed horizontally to the rotation shaft. In the ALD process, after supplying powder into the reactor 2, gas is injected into the first opening 5 on one side of the reactor 2 while rotating the reactor 2 in an axial direction horizontal to the ground It can proceed in the form of being discharged to the second opening 7 on the other side. 1 is a cross-sectional view showing a conventional reactor 2 for a powder ALD device having a constant inner diameter. IN represents a direction in which gas is injected, and OUT represents a direction in which gas is discharged. R represents the direction of rotation of the reactor 2, and S represents the direction in which the powder is stirred.

Since such a conventional reactor 2 is arranged in a horizontal direction and the inner circumferential surface 3 has a constant inner diameter, when there is no gas injected into the reactor 2, the powder is not stirred up and down rather than generally. It is made in a local form such as movement (S). Due to this, a difference in thickness may occur depending on the position of the inside of the reactor 2 when the powder is deposited as a thin film. That is, a problem in that the thin film is not uniformly deposited on the powder may occur.

And, when gas is injected into one side of the reactor 2 and discharged to the other side of the reactor 2, the movement of the powder may occur in the direction in which the gas moves. As a result, as shown in FIGS. 2 to 4, the powder gathers toward the second opening 7 of the reactor 2 through which the gas is discharged, causing a problem that the filter installed on the second opening 7 is clogged. can Here, FIG. 2 is a photograph of the reactor 2 of FIG. 1, showing the second opening 7 of the reactor before the ALD process. FIG. 3 is a photograph showing the second opening 7 of the reactor 2 after the ALD process of FIG. 2 . And FIG. 4 is a photograph showing filters respectively installed in the first opening and the second opening of the reactor 2 of FIG. 2 .

That is, comparing FIGS. 2 and 3 , it can be confirmed that the powder is collected in the second opening 7 of the reactor after the ALD process. As a result, it can be confirmed that more powder is deposited on the filter installed in the second opening of the reactor shown in FIG. 4(b) than on the filter installed in the first opening of the reactor shown in FIG. can

Registered Patent No. 10-2086574 (2020.03.09. Notice)

Accordingly, an object of the present invention is to provide a reactor having an inclined surface and a powder ALD device including the same so that a thin film can be deposited on powder with a uniform thickness in an ALD process.

Another object of the present invention is to provide a reactor having an inclined surface for uniformly distributing the powder in the reactor so that the powder is generally stirred in the reactor, and a powder ALD device including the same.

Another object of the present invention is a reactor having an inclined surface capable of suppressing the problem that a filter installed on the second opening side is clogged with powder by moving the powder in the direction of gas movement toward the second opening, which is an outlet, and a powder ALD including the same to provide the device.

In order to achieve the above object, the present invention is a reactor for a powder ALD device rotatably installed in a horizontal direction, comprising: an outer circumferential surface having a cylindrical shape; And an inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side. It provides a reactor for a powder ALD device having an inclined surface including; the inner circumferential surface formed as an inclined surface from one opening toward the second opening.

The inner circumferential surface may be formed as a conical surface in which an inner diameter of the first opening is larger than an inner diameter of the second opening.

The inner circumferential surface may be formed as an inclined surface such that the first opening part and the second opening part are vertically offset from each other with respect to a central axis in a horizontal direction.

The reactor for a powder ALD device according to the present invention further includes a plurality of stirring blades formed on the inner circumferential surface and protruding toward the center of the inner circumferential surface.

The reactor may include a plurality of blocks divided in a horizontal central axis direction.

The present invention also, a tubular external reactor; and an internal reactor coupled to an inner circumferential surface of the external reactor to form a tubular shape.

The inner reactor has an outer surface having a cylindrical shape, and an inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape. The inner circumferential surface has a first opening through which gas is injected on one side and a second opening through which the gas injected into the first opening is discharged on the other side. The inner circumferential surface is formed as an inclined surface from the first opening toward the second opening.

The internal reactor may further include a plurality of stirring blades formed on the inner circumferential surface and protruding toward the center of the inner circumferential surface.

The internal reactor may include a plurality of blocks divided in an axial direction.

And the present invention, a heat source for supplying heat; And the reactor rotatably installed in the horizontal direction inside the heat source, receiving heat from the heat source and performing atomic layer deposition (ALD) on the surface of the powder provided therein; A powder ALD device is provided.

According to the present invention, by forming the inner circumferential surface of the rotating reactor as an inclined surface, it is possible to uniformly distribute the powder in the reactor so that the powder is generally stirred in the reactor. That is, even when there is no gas injected into the reactor, stirring by the up-and-down movement of the powder by the rotation of the reactor and stirring by the left-right movement of the powerder by the inclined surface are performed together, so the powder is stirred in the reactor. This can be done in general.

When there is gas injection into the reactor, the movement of the powder may occur in the direction of gas movement, but as in the present invention, by forming an inclined surface from the first opening toward the second opening of the reactor, the movement direction of the gas It is possible to suppress the powder from moving toward the second opening. This allows the powder to be evenly distributed in the reactor.

Since the powder is generally stirred in the reactor, a thin film can be deposited on the powder with a uniform thickness.

In addition, by uniformly distributing the powder in the reactor, it is possible to suppress a problem in which the powder is moved toward the second opening in the direction of movement of the gas and the filter installed at the second opening is clogged with the powder.

1 is a cross-sectional view showing a conventional reactor for a powder ALD device having a constant inner diameter.
FIG. 2 is a photograph of the reactor of FIG. 1, showing an outlet of the reactor before an ALD process.
FIG. 3 is a photograph showing the outlet of the reactor after the ALD process of FIG. 2 .
FIG. 4 is a photograph showing filters respectively installed at the inlet and outlet of the reactor of FIG. 2 .
5 is a view showing a powder ALD device including a reactor having an inclined surface according to a first embodiment of the present invention.
6 is a cross-sectional view showing a reactor having an inclined surface according to a first embodiment of the present invention.
7 is a schematic cross-sectional view showing a reactor having an inclined surface according to a second embodiment of the present invention.
FIG. 8 is a view showing powder on which a thin film is deposited after an ALD process in the reactor of FIG. 1 .
9 is a view showing powder on which a thin film is deposited after an ALD process in a reactor according to the first embodiment.
10 is a view showing powder on which a thin film is deposited after an ALD process in a reactor according to a second embodiment.
11 is an exploded perspective view showing a reactor according to a third embodiment of the present invention.
12 is a combined perspective view showing the reactor of FIG. 11;
13 is a perspective view showing a block of the inner reactor of FIG. 11;
14 is a cross-sectional view along line 14-14 of FIG. 12;
15 is an exploded perspective view showing a reactor according to a fourth embodiment of the present invention.
16 is a combined perspective view showing the reactor of FIG. 15;
17 is a perspective view showing a block of the inner reactor of FIG. 15;
FIG. 18 is a cross-sectional view along line 18-18 of FIG. 16 .

It should be noted that in the following description, only parts necessary for understanding the embodiments of the present invention are described, and descriptions of other parts will be omitted without departing from the gist of the present invention.

The terms or words used in this specification and claims described below should not be construed as being limited to ordinary or dictionary meanings, and the inventors have appropriately used the concept of terms to describe their inventions in the best way. It should be interpreted as a meaning and concept consistent with the technical spirit of the present invention based on the principle that it can be defined in the following way. Therefore, the embodiments described in this specification and the configurations shown in the drawings are only preferred embodiments of the present invention, and do not represent all of the technical spirit of the present invention, so various equivalents that can replace them at the time of the present application. It should be understood that there may be variations and variations.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

[First Embodiment]

5 is a view showing a powder ALD device including a reactor having an inclined surface according to a first embodiment of the present invention. And Figure 6 is a cross-sectional view showing a reactor having an inclined surface according to the first embodiment of the present invention.

Referring to FIGS. 5 and 6 , the powder ALD device 100 according to the first embodiment includes a heat source 10 for supplying heat, and ALD is applied to the surface of the powder provided therein by receiving heat from the heat source 10. It includes a reactor 20 that performs. Here, the reactor 20 includes an outer circumferential surface 21 having a cylindrical shape and an inner circumferential surface 23 opposite to the outer circumferential surface 21 and having a cylindrical shape. The inner circumferential surface 23 has a first opening 25 through which gas is injected on one side and a second opening 27 through which the gas injected into the first opening 25 is discharged on the other side. there is. The inner circumferential surface 23 is formed as an inclined surface from the first opening 25 toward the second opening 27 .

The powder ALD apparatus 100 according to the first embodiment may further include a motor 50 rotating the reactor 20 and a chamber 80 .

The reactor 20 is rotatably installed in a horizontal direction, and may be implemented as a single tube including an outer circumferential surface 21 and an inner circumferential surface 23. The reactor 20 may have the shape of a cylindrical tube having first and second openings 25 and 27 formed on both sides. The first opening 25 may be used as an inlet through which gas is injected, and the second opening 27 may be used as a discharge through which gas is discharged.

The reactor 20 may include a plurality of stirring blades 29 formed on the inner circumferential surface 23 . A plurality of stirring blades 29 may be formed to protrude toward the center of the inner circumferential surface 23 .

The first and second openings 25 and 27 of the reactor 20 are sealed by first and second covers 35 and 41, respectively.

The first cover 35 is coupled to the first opening 25 via the first filter 31 . An injection shaft 37 having an injection port 39 communicating with the inside of the reactor 20 is formed on the first cover 35 . A gas required for the ALD process is injected into the reactor 20 through the inlet 39 . The injection shaft 37 is supported so that the reactor 20 can rotate.

The second cover 41 is coupled to the second opening 27 via the second filter 33 . A connection shaft 43 is formed on the same line as the injection shaft 37 in the second cover 41 . The connecting shaft 43 is coupled to the driving shaft 51 of the motor 50 that rotates the reactor 20 .

And the chamber 80 contains the heat source 10 and the reactor 20 . The chamber 80 makes the reactor 20 in a vacuum state during the ALD process.

In the reactor 20 according to the first embodiment, the inner diameter of the first opening 25 is formed as a conical surface larger than the inner diameter of the second opening 27 so that the inner peripheral surface 23 can be formed as an inclined surface. . That is, the reactor 20 is thicker from the first opening 25 toward the second opening 27 in the rotation axis direction.

As a result, since the inner circumferential surface 23 is formed with a relatively lower slope than the first opening 25 and the second opening 27, the powder is uniformly distributed in the reactor 20 so that the inside of the reactor 20 In the agitation of the powder can be made generally. That is, even when there is no gas injected into the reactor 20, agitation by the vertical movement of the powder by the rotation of the reactor 20 and agitation by the left-right movement of the powerder by the inclined surface are performed together, Agitation of the powder in the reactor 20 can be made generally.

In the reactor 20 according to the first embodiment, even when a gas flow occurs from the first opening 25 to the second opening 27, the powder flows from the first opening 25 to the second opening along the inclined surface. Movement to the opening 27 can be suppressed. That is, even if the powder moves from the first opening 25 to the second opening 27 by the flow of gas, the powder moves from the second opening 27 to the inclined surface formed by the first opening 25. Since stirring is performed while moving toward one opening 25, stirring can be made uniformly throughout the inside of the reactor 20 to the powder. The problem that the second filter 33 installed in the second opening 27 is clogged with powder can be suppressed.

Specifically, in a state in which powder is supplied into the reactor 20, gas is injected into the reactor 20 rotating in the R direction through the first opening 25 and discharged through the second opening 27. Assuming that, basically, the stirring (S) of the powder is performed up and down by the stirring blades of the reactor (20).

Therefore, by forming the inner circumferential surface of the rotating reactor 20 as an inclined surface, regardless of whether gas is injected, the powder is uniformly distributed in the reactor 20 so that the powder is stirred in the reactor 20 generally can do.

In this way, since the powder is generally stirred in the reactor 20 according to the first embodiment, it is possible to deposit a thin film on the powder with a uniform thickness.

In addition, by uniformly distributing the powder in the reactor 20, the powder moves toward the second opening 27 in the moving direction of the gas, and the second filter 33 installed at the second opening 27 turns into powder. Blockage problems can be curbed.

[Second Embodiment]

Meanwhile, in the first embodiment, an example in which an inclined surface is formed on an inner circumferential surface by forming an inner diameter of the second opening portion narrower than that of the first opening portion has been disclosed, but is not limited thereto. For example, as shown in FIG. 7 , the first and second openings 125 and 127 have the same inner diameter, and the inner circumferential surface 123 is an inclined surface having a slope from the first opening 125 to the second opening 127. ) can be formed.

7 is a schematic cross-sectional view showing a reactor 120 having an inclined surface according to a second embodiment of the present invention.

Referring to FIG. 7 , the reactor 120 according to the second embodiment is rotatably installed in a horizontal direction and may be implemented as a single tube including an outer circumferential surface 121 and an inner circumferential surface 123 .

Here, the inner circumferential surface 121 may be formed as an inclined surface in which the first opening 125 and the second opening 127 are displaced vertically from each other with respect to a central axis in a horizontal direction. The inner diameters of the first opening 125 and the second opening 127 may be the same.

Since the reactor 120 according to the second embodiment also has an inner circumferential surface 123 formed as an inclined surface, similar to the reactor (20 in FIG. 6) according to the first embodiment, stirring of the powder in the reactor 120 is generally Since it is made of, it is possible to deposit a thin film with a uniform thickness on the powder.

In the reactor 120 according to the second embodiment, since the first opening 125 and the second opening 127 are displaced from each other in the direction of the rotation axis, the first opening 125 when the reactor 120 rotates ) and the second opening 127 move up and down in opposite directions. Because of this, since the stirring of the powder is generally performed in the reactor 120, it is possible to deposit a thin film on the powder with a uniform thickness.

FIG. 8 is a view showing the powders P1, P2, and P3 on which thin films are deposited after the ALD process in the reactor 2 of FIG. FIG. 9 is a view showing powders P11, P12, and P13 on which thin films are deposited after the ALD process in the reactor 20 according to the first embodiment. 10 is a view showing powders P21, P22, and P23 on which thin films are deposited after the ALD process in the reactor 120 according to the second embodiment.

Referring to FIG. 8 , since the inner circumferential surface 3 of the existing reactor 2 is formed as a plane horizontal to the rotational axis without inclination, the flow of gas from the first opening 5 to the second opening 7 When this occurs, a problem may occur in that thin films are thickly deposited on the powders P1 , P2 , and P3 toward the second opening 7 from the first opening 5 . The thickness of the thin film deposited on the powders P1, P2, and P3 may be in the order of P1<P2<P3.

However, as shown in FIGS. 9 and 10, since the inner peripheral surfaces 23 and 123 of the reactors 20 and 120 according to the first and second embodiments are formed as inclined surfaces with respect to the rotating shaft, the first openings 25 and 125 Even if a flow of gas is generated toward the second openings 27 and 127, thin films may be uniformly deposited on the powders P11, P12, and P13 (P21, P22, and P23) throughout the inside of the reactors 20 and 120. That is, the thicknesses of the thin films deposited on the powders P11, P12, and P13 (P21, P22, and P23) may be substantially the same as P11 ≒ P12 ≒ P13 and P21 ≒ P22 ≒ P23.

Meanwhile, in the first and second embodiments, an example in which the reactors 20 and 120 are formed of a single tube is disclosed, but is not limited thereto. For example, the reactors 20 and 120 may be implemented as a double tube including an external reactor and an internal reactor. That is, the reactor may be implemented in a structure in which a tubular external reactor and a tubular internal reactor are coupled to the inside of the external reactor. At this time, the inner circumferential surface of the inner reactor may be formed as an inclined surface. The internal reactor may be implemented as a single tube as in the first and second embodiments.

The outer reactor and the inner reactor are fitted and installed so that the outer circumferential surface of the inner reactor is in close contact with the inner circumferential surface of the outer reactor. For example, it may be fitted and coupled using keys formed to correspond to each other on the inner circumferential surface of the external reactor and the outer circumferential surface of the internal reactor, and a key groove coupled to the key. The key and the keyway may be formed long in the axial direction of the outer reactor and the inner reactor.

In the case of implementing the double pipe in this way, the following effects can be expected. For example, the reactor includes an external reactor made of stainless steel and an internal reactor made of aluminum coupled to the inside of the external reactor. That is, the external reactor is made of stainless steel having a high heat radiation rate, thereby increasing the amount of heat transferred from the heat source to the reactor. In addition, since the internal reactor is made of aluminum having high thermal conductivity, heat received by the external reactor is quickly transferred to the inside, thereby increasing the temperature rise rate inside the reactor. Therefore, the reactor can reach the target temperature in a shorter time by effectively receiving heat from the heat source.

In addition, the double tube type reactor can be separated or replaced according to the degree of contamination of the external reactor and the internal reactor. That is, compared to the conventional single-material reactor, the double-tube type reactor can more efficiently manage internal and external contamination levels.

Alternatively, the internal reactor may be implemented in a tubular shape by combining a plurality of blocks, as in the third and fourth embodiments below.

In this way, when implemented as a double tube, but when the internal reactor is implemented as a plurality of blocks, the following effects can be expected. That is, the split-type reactor includes a tubular outer reactor and an inner reactor in which a plurality of blocks of different materials are coupled to the inner circumferential surface of the outer reactor to form a tubular shape. As a result, in the powder ALD process, the internal reactor of the split reactor alternately includes a first region in which the powder is positively charged and a second region in which the powder is negatively charged, so that the internal reactor is negatively or positively charged by friction between the internal reactor and the powder. It is possible to converge to 0 by canceling each other. As a result, in the powder ALD process, it is possible to minimize the powder agglomeration or adsorption on the inner wall of the internal reactor. That is, since the powder ALD process proceeds while generating a flow of gas in the axial direction or circumferential direction of the internal reactor, the first and second blocks forming the first and second regions are alternately formed in a direction perpendicular to the direction of the gas flow. By arranging to form an internal reactor, it is possible to converge to zero by canceling the specific charge values that are negatively or positively charged by friction between the internal reactor and the powder.

[Third Embodiment]

11 is an exploded perspective view showing a reactor 220 according to a third embodiment of the present invention. 12 is a combined perspective view showing the reactor 220 of FIG. 11 . FIG. 13 is a perspective view showing a block 270a of the inner reactor of FIG. 11 . And FIG. 14 is a cross-sectional view along line 14-14 of FIG. 12.

11 to 14, the reactor 220 according to the third embodiment includes a tubular external reactor 260 and an internal reactor 270 coupled to the inner circumferential surface of the external reactor 260 to form a tubular shape. includes

Here, the internal reactor 270 is implemented in a tubular shape by combining two blocks 270a and 270b. The inner reactor 270 includes two blocks 270a and 270b divided in the axial direction. Cross sections of the two blocks 270a and 270b may have a semicircular shape. The two blocks 270a and 270b include a first block 270a and a second block 270b.

Although the internal reactor 270 according to the third embodiment has disclosed an example in which the first and second blocks 270a and 270b are divided into left and right corresponding structures, it is not limited thereto. Of course, the internal reactor 270 according to the third embodiment can be divided so that the first and second blocks have an asymmetric structure left and right.

The internal reactor 270 according to the third embodiment has the same structure as the reactor according to the first embodiment. That is, the inner circumferential surface 273 is formed as a conical surface in which the inner diameter of the first opening 275 is larger than that of the second opening 277 to form an inclined surface. The thickness of the portion forming the first opening 275 shown in FIG. 13 (a) is smaller than the thickness of the portion forming the second opening 277 shown in FIG. 13 (b).

A plurality of stirring blades 279 are formed on the inner circumferential surface 273 toward the center. The plurality of stirring blades 279 have the same height from the outer circumferential surface 271 . As a result, the height of the stirring blades 279 protruding from the inner circumferential surface 273 may be implemented in a form in which the height decreases from the first opening 275 to the second opening 277 . By forming a plurality of agitation blades 279 in this way, agitation of the powder within the reactor 220 can be performed generally.

As described above, since the internal reactor 270 according to the third embodiment is implemented in substantially the same form as the reactor according to the first embodiment, the same effect as that of the reactor according to the first embodiment can be expected.

[Fourth Embodiment]

15 is an exploded perspective view showing a reactor 320 according to a fourth embodiment of the present invention. 16 is a combined perspective view showing the reactor 320 of FIG. 15 . FIG. 17 is a perspective view showing a block 370a of the inner reactor of FIG. 15 . 18 is a cross-sectional view along line 18-18 of FIG. 16 .

15 to 18, the reactor 320 according to the fourth embodiment includes a tubular external reactor 360 and an internal reactor 370 coupled to an inner circumferential surface of the external reactor 360 to form a tubular shape. includes

Here, the internal reactor 370 is implemented in a tubular shape by combining two blocks 370a and 370b. The inner reactor 370 includes two blocks 370a and 370b divided in the axial direction. Cross sections of the two blocks 370a and 370b may have a semicircular shape. The two blocks 370a and 370b include a first block 370a and a second block 370b.

Although the internal reactor 270 according to the fourth embodiment has disclosed an example in which the first and second blocks 370a and 370b are divided to have an asymmetric structure in left and right directions, it is not limited thereto. For example, the internal reactor may be divided into first and second blocks so as to have left and right corresponding structures. That is, when the internal reactor is divided in a direction passing through the center of the first opening and the second opening, the first and second blocks may have a symmetrical structure.

The internal reactor 370 according to the fourth embodiment has the same structure as the reactor according to the second embodiment. That is, the inner circumferential surface 373 may be formed as an inclined surface in which the first opening 375 and the second opening 377 are displaced vertically from each other with respect to a central axis in a horizontal direction. The inner diameters of the first opening 375 and the second opening 377 may be substantially the same.

A plurality of stirring blades 379 are formed on the inner circumferential surface 373 toward the center. The plurality of stirring blades 379 have the same height from the outer circumferential surface 371 . For this reason, with respect to the inner circumferential surface 373, the height of the thin agitation blades 379 is higher than the height of the thick agitation blades 379. By forming a plurality of agitation blades 379 in this way, agitation of the powder within the reactor 320 can be performed generally.

Since the internal reactor 370 according to the fourth embodiment is implemented in substantially the same form as the reactor according to the second embodiment, the same effect as that of the reactor according to the second embodiment can be expected.

On the other hand, the embodiments disclosed in this specification and drawings are only presented as specific examples to aid understanding, and are not intended to limit the scope of the present invention. In addition to the embodiments disclosed herein, it is obvious to those skilled in the art that other modifications based on the technical idea of the present invention can be implemented.

10: heat source 20,120,220,320: reactor
21,121,221,321: outer circumference 23,123,223,323: inner circumference
25,125,225,325: first opening 27,127,227,327: second opening
29,129,229,329: stirring blade 31: first filter
33: second filter 35: first cover
37: injection shaft 39: injection port
41: second cover 43: connecting shaft
50: motor 51: drive shaft
260,360: external reactor 270,370: internal reactor
270a, 370a: first block 270b, 370b: second block
271,371: Outer circumference 273,373: Inner circumference
275,375: first opening 277,377: second opening
279,379: stirring wing 80: chamber
100: powder ALD device

Claims (11)

A reactor for a powder ALD device installed rotatably in a horizontal direction,
An outer circumferential surface having a cylindrical shape; and
An inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side, and the first The inner circumferential surface formed as an inclined surface inclined upward from the opening toward the second opening;
A reactor for a powder ALD device having an inclined surface comprising a. The method of claim 1, wherein the inner circumferential surface,
A reactor for a powder ALD device having an inclined surface, characterized in that the inner diameter of the first opening is formed as a conical surface larger than the inner diameter of the second opening. The method of claim 1, wherein the inner circumferential surface,
A reactor for a powder ALD device having an inclined surface, characterized in that the first opening part and the second opening part are vertically offset from each other with respect to a central axis in a horizontal direction and formed as the inclined surface. According to claim 1,
a plurality of stirring blades formed on the inner circumferential surface and protruding toward the center of the inner circumferential surface;
A reactor for a powder ALD device having an inclined surface, characterized in that it further comprises. According to claim 1,
The reactor is a reactor for a powder ALD device having an inclined surface, characterized in that it comprises a plurality of blocks divided in the direction of the central axis of the horizontal direction. A reactor for a powder ALD device installed rotatably in a horizontal direction,
tubular external reactor; and
Including; an internal reactor coupled to the inner circumferential surface of the external reactor to form a tubular shape;
The internal reactor,
An outer circumferential surface having a cylindrical shape; and
An inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side, and the first The inner circumferential surface formed as an inclined surface inclined upward from the opening toward the second opening;
A reactor for a powder ALD device having an inclined surface comprising a. The method of claim 6, wherein the inner circumferential surface,
A reactor for a powder ALD device having an inclined surface, characterized in that the inner diameter of the first opening is formed as a conical surface larger than the inner diameter of the second opening. The method of claim 6, wherein the inner circumferential surface,
A reactor for a powder ALD device having an inclined surface, characterized in that the first opening part and the second opening part are vertically offset from each other with respect to a central axis in a horizontal direction and formed as the inclined surface. The method of claim 6, wherein the internal reactor,
a plurality of stirring blades formed on the inner circumferential surface and protruding toward the center of the inner circumferential surface;
A reactor for a powder ALD device having an inclined surface, characterized in that it further comprises. The method of claim 6, wherein the internal reactor,
A reactor for a powder ALD device having an inclined surface, characterized in that it comprises a plurality of blocks divided in the axial direction. As a powder ALD device rotatably installed in the horizontal direction,
a heat source that supplies heat; and
A reactor rotatably installed in the horizontal direction inside the heat source and receiving heat from the heat source to perform atomic layer deposition (ALD) on the surface of the powder provided therein; includes,
The reactor is
An outer circumferential surface having a cylindrical shape; and
An inner circumferential surface opposite to the outer circumferential surface and having a cylindrical shape, a first opening portion into which gas is injected is formed on one side, and a second opening portion through which the gas injected into the first opening portion is discharged is formed on the other side, and the first The inner circumferential surface formed as an inclined surface inclined upward from the opening toward the second opening;
A powder ALD device having an inclined surface comprising a.

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