KR102517247B1 - Batch-type powder ALD and usage system - Google Patents

Abstract

The present invention relates to a batch-type powder ALD device and a system for utilizing the same, and the batch-type powder ALD device according to the present invention includes a driving unit; a driving force conversion unit for transmitting the driving force of the driving unit to a plurality of driven rotary shafts; and a plurality of reactors connected to the driven rotational shaft.
Accordingly, it is advantageous to proceed with the ALD process in large quantities.

Description

Batch-type powder ALD device and usage system thereof {Batch-type powder ALD and usage system}

The present invention relates to a batch-type powder ALD device and a utilization system thereof, and more particularly, to a batch-type powder ALD device capable of increasing the efficiency of an ALD process and a utilization system thereof.

In order to coat a specific material on the surface of the powder, an atomic layer deposition (ALD) method may be used. This ALD method is also referred to as a powder ALD (P-ALD) method.

The powder ALD process is performed by introducing a metal precursor gas or the like into the reactor after inserting powder, which is a material to be coated, into the reactor. As the particle surface of the powder is exposed to the metal precursor gas in the reactor, the metal precursor gas is deposited on the surface of the powder particle.

Among powder ALD devices, a rotary type has a structure in which a rotating tubular reactor is disposed inside a tubular heat source.

More specifically, the reactor 2 of the rotary powder ALD device has a cylindrical tube shape as shown in FIG. 1 and is configured to rotate about a horizontal axis. In this powder ALD device, the ALD process proceeds by supplying powder into the reactor 2 and then injecting gas through one end of the reactor 2 while rotating the reactor 2 .

The rotary type powder ALD device has a high deposition efficiency because the reactor is rotated so that the powder is stirred with the gas, but a motor is required to rotate the reactor. This can be a burden from an economic or spatial perspective.

KR 10-2086574 B1

The present invention is to solve the problems of the prior art as described above, and an object of the present invention is to provide a batch-type powder ALD device and a system for utilizing the same, which are advantageous for performing an ALD process in large quantities.

The problem to be solved by the present invention is not limited to the above-mentioned problem, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

The above object, according to the present invention, the driving unit; a driving force conversion unit for transmitting the driving force of the driving unit to a plurality of driven rotary shafts; and a plurality of reactors connected to the driven rotary shaft.

The driving force conversion unit may change a driving force direction of the driving unit.

The driving force conversion unit may include a first bevel gear fixed to the driving rotational shaft of the driving unit, and a second bevel gear engaged with the first bevel gear and connected to the driven rotational shaft.

The batch-type powder ALD device according to the present invention includes a heat transfer unit provided for each reactor and surrounding the circumference of the reactor; a heat source that heats the fluid; and a heat supply line distributing and supplying the fluid heated by the heat source to the heat transfer unit.

The batch-type powder ALD apparatus according to the present invention may further include a chamber that encloses a plurality of the reactors at once.

An inner circumferential surface of the reactor may be formed to be inclined upward from one end toward the other end.

The inner circumferential diameter of the reactor may decrease from one end to the other end.

The center of the inner circumferential surface of one end of the reactor and the center of the inner circumferential surface of the other end may be staggered from each other.

An irregularity may be formed on an inner circumferential surface of the reactor.

A protruding portion of the unevenness may protrude toward the center of the reactor, and the unevenness may extend parallel to a circumferential direction of the reactor.

A protruding portion of the unevenness may protrude toward the center of the reactor, and the unevenness may spirally extend.

The reactor may include an inner tube having a space in which the reaction takes place, and an outer tube surrounding the inner tube.

The inner tube and the outer tube may be made of different materials.

The inner pipe is made of a plurality of blocks, and adjacent ones of the blocks may be made of different materials.

According to another embodiment of the present invention, the above batch type powder ALD device; and

A batch-type powder ALD device utilization system including an analyzer for analyzing the powder inside the reactor is provided.

According to the batch time powder ALD device according to the present invention, it is possible to rotate a plurality of reactors through one drive unit.

Accordingly, it is possible to secure economic feasibility in performing the ALD process for a large amount of powder, and it is advantageous in terms of space utilization.

In addition, various deposition results can be quickly obtained by differently adjusting the amount of powder or the composition of the gas supplied to each reactor.

When the batch time powder ALD apparatus according to the present invention further includes a heat transfer unit, a heat source, and a heat supply line, a plurality of reactors can be heated through one heat source.

When slopes or irregularities are formed on the inner circumferential surface of the reactor, it is possible to prevent a problem in which a reaction occurs non-uniformly at one end and the other end of the reactor and the filter at the other end of the reactor is clogged.

In addition, when the reaction tube of the reactor is formed of an inner tube and an outer tube, it is possible to increase the ease of management and the efficiency of the reaction.

1 is a cross-sectional view of an ALD device reactor according to the prior art;
2 is an overall perspective view of a batch-type powder ALD device according to the present invention;
3 is a partial perspective view of a batch type powder ALD device according to the present invention;
4 is an explanatory view of a case where the batch type powder ALD device according to the present invention further includes a chamber;
5 is a cross-sectional view of a reactor constituting a batch-type powder ALD device according to the present invention;
6 is an explanatory view of the case where an inclination is formed on the inner circumferential surface of the reactor constituting the batch-type powder ALD device according to the present invention;
7 is an explanatory view of the case where irregularities are formed on the inner circumferential surface of the reactor constituting the batch-type powder ALD device according to the present invention;
8 is an explanatory view of the case where the reactor constituting the batch-type powder ALD device according to the present invention has an inner tube and an outer tube;
9 and 10 are explanatory views of the case where the inner tube constituting the type powder ALD device according to the present invention is composed of several blocks;
11 is a schematic configuration diagram of a batch-type powder ALD device utilization system according to the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

2 shows an overall perspective view of the batch-type powder ALD device 10 according to the present invention, and FIG. 3 shows a partial perspective view of the batch-type powder ALD device 10 according to the present invention.

The batch type powder ALD apparatus 10 according to the present invention includes a driving unit 100, a driving force conversion unit 200, and a plurality of reactors 300.

The driving unit 100 is a part that generates a driving force, and is composed of, for example, a rotary motor.

The driving force conversion unit 200 transmits the driving force of the driving unit 100 to the plurality of driven rotary shafts 230 . That is, the driving force conversion unit 200 is composed of a plurality of gears, so that the driving force generated by one driving unit 100 can be dispersed and transmitted to the plurality of driven rotary shafts 230 .

The reactor 300 is formed for each driven rotational shaft 230 according to the number of driven rotational shafts 230 . The reactor 300 rotates by being connected to the driven rotational shaft 230 and receiving the driving force of the driving unit 100 . 2, it can be seen that four reactors 300 are illustratively provided.

According to the batch time powder ALD device 10 according to the present invention, the driving force of one driving unit 100 is transmitted to a plurality of reactors 300 through the driving force conversion unit 200, It is possible to rotate one reactor 300.

Accordingly, it is possible to secure economic feasibility in performing the ALD process for a large amount of powder, and it is advantageous in terms of space utilization.

In addition, various deposition results can be quickly obtained by differently adjusting the amount of powder or the composition of the gas supplied to each reactor 300 .

The driving force conversion unit 200 according to the present invention may change the direction of the driving force of the driving unit 100 .

For example, the driving force conversion unit 200 may convert rotational force of the driving unit 100 based on a vertical axis into rotational force based on a horizontal axis.

In this case, it is possible to increase the space efficiency of disposing the driving unit 100 and the plurality of reactors 300 .

The driving force conversion unit 200 may include, for example, a first bevel gear 210 and a second bevel gear 220 . The first bevel gear 210 is fixed to the driving rotational shaft 110 of the driving unit 100, and the second bevel gear 220 is engaged with the first bevel gear 210 and connected to the driven rotational shaft 230. The overall shape of the first bevel gear 210 and the second bevel gear 220 is made of a truncated cone shape and meshes with each other in a state in which respective axes intersect, so that it is possible to change the direction of the driving force.

Vibrations generated while the first bevel gear 210 and the second bevel gear 220 rotate are transmitted to the reactor 300 through the drive shaft 110 to more efficiently stir the powder and gas in the reactor 300. can

Since the second bevel gear 220 is formed for each of the plurality of driven rotational shafts 230 and must engage with the first bevel gear 210, it is preferable to have a diameter smaller than that of the first bevel gear 210.

The batch type powder ALD apparatus 10 according to the present invention may further include a heat transfer unit 400, a heat source 500, and a heat supply line 600.

The heat source 500 heats a fluid composed of liquid or gas to generate heat for generating a reaction in the reactor 300 .

The heat transfer unit 400 serves to heat the reactor 300 by receiving heat generated from the heat source 500, and is provided for each reactor 300 and is formed to surround the circumference of the reactor 300, respectively.

The heat supply line 600 disperses and supplies the fluid heated by the heat source 500 to each heat transfer unit 400 . That is, by the heat supply line 600, the batch type powder ALD apparatus 10 according to the present invention can heat a plurality of reactors 300 through one heat source 500.

As shown in FIG. 4 , the batch type powder ALD device 10 according to the present invention may further include a chamber 700 .

The chamber 700 houses the reactor 300 to make the reactor 300 in a vacuum state. The chamber 700 is formed to enclose a plurality of reactors 300 at once, and can make a plurality of reactors 300 into a vacuum state at once.

As shown in FIG. 5, the reactor 300 includes a reaction tube 340 in which an ALD process is performed, a first filter 350 covering one end of the reaction tube 340, and the first filter 350 ) while supplying gas into the reaction tube 340 through the inlet 361 while covering the first cover 360, the second filter 370 covering the other end of the reaction tube 340, the second filter 370 ) It is provided with a second cover 380 connected to the driven rotation shaft 230 while covering. In addition, a plurality of agitation blades 390 may protrude from the inner circumferential surface of the reaction tube 340 to help agitation of powder or the like.

The gas entering the inside of the reaction tube 340 through the inlet 361 of the first cover 360 reacts with the powder and then exits the reaction tube 340 through the other end of the reaction tube 340 .

The inner circumferential surface of the reactor 300, that is, the inner circumferential surface of the reaction tube 340 may be inclined upward from one end toward the other end.

Since the gas is supplied to one end of the reactor 300 and discharged to the other end, the metal precursor and powder included in the gas may be driven to the other end of the reactor 300 by the flow of the gas, thereby The reaction may occur non-uniformly at one end and the other end, and the second filter 370 at the other end of the reactor 300 may be clogged.

When the inner circumferential surface of the reactor 300 is inclined upward from one end toward the other end, the powder or the like that has moved to the other end of the reactor 300 can move to one end of the reactor 300 along the inclination, thus preventing the above problem. there is.

As shown in (a) of FIG. 6, the inner circumferential diameter of the reactor 300 decreases from one end to the other, so that the inner circumferential surface of the reactor 300 is inclined upward from one end to the other end. .

Alternatively, as shown in (b) of FIG. 6, the center of the inner circumferential surface of one end of the reactor 300 and the center of the inner circumferential surface of the other end are alternately formed so that the inner circumferential surface of the reactor 300 is inclined upward from one end toward the other end. It can be. In this case, although the direction of the inclination may change as the reactor 300 rotates, since the direction of the inclination continues to change due to rotation and the powder etc. continues to move, the powder etc. can be stirred more effectively. Problems in which the reaction occurs non-uniformly or the second filter 370 is clogged can be prevented.

An uneven surface 310 may be formed on an inner circumferential surface of the reactor 300 .

The unevenness 310 prevents powder or the like from moving toward the other end of the reactor 300 from one end of the reactor 300, thereby preventing the powder or the like from flocking to the other end of the reactor 300.

As shown in (a) of FIG. 7, protrusions 311 of the irregularities 310 protrude toward the center of the reactor 300, and the irregularities 310 extend parallel to the circumferential direction of the reactor 300. can be formed That is, a plurality of protrusions 311 of the unevenness 310 may be formed, and each may be formed in a ring shape.

Alternatively, as shown in (b) of FIG. 7 , the protrusion 311 of the concavo-convex 310 protrudes toward the center of the reactor 300, and the concavo-convex 310 may extend in a spiral shape. That is, the protruding portion 311 of the unevenness 310 may be formed in a continuous spiral on the inner circumferential surface of the reactor 300 . The irregularities 310 may also move powder or the like toward one end of the reactor 300 according to the rotation direction of the reactor 300 .

The inclination of the inner circumferential surface of the reactor 300 and the unevenness 310 are applied together, so that the problem of uneven reaction in the reactor 300 or clogging of the second filter 370 can be more effectively prevented.

The reaction tube 340 of the reactor 300 may consist of an inner tube 320 and an outer tube 330. 8 shows a perspective view of the reaction tube 340 in this case.

The inner tube 320 has a space where the reaction takes place and forms an inner circumferential surface of the reaction tube 340 . The outer tube 330 is formed to surround the inner tube 320 so that its inner circumferential surface adheres to the outer circumferential surface of the inner tube 320 .

In this case, the inner tube 320 and the outer tube 330 may be separated according to the degree of contamination to remove or replace the contamination. That is, it is possible to more easily manage the contamination level of the reactor 300 .

When the reactor 300 includes an inner tube 320 and an outer tube 330, the inner tube 320 and the outer tube 330 may be made of different materials. For example, the inner tube 320 may be made of aluminum and the outer tube 330 may be made of stainless steel. Accordingly, the outer tube 330 not only efficiently transfers heat from the heat transfer unit 400 by a stainless steel material having a high heat emissivity, but also prevents the heat transferred to the inside of the reactor 300 from escaping to the outside. It can be prevented. In addition, the inner tube 320 can quickly transfer the heat transferred from the outer tube 330 to the inside of the reactor 300 by using an aluminum material having a high thermal conductivity. As a result, the inner space of the reactor 300 can reach the target temperature within a short time by effectively receiving heat from the heat transfer unit 400 .

Keys (k) and key grooves (g) having corresponding shapes are formed on the outer circumferential surface of the inner tube 320 and the inner circumferential surface of the outer tube 330 so that the inner tube 320 and the outer tube 330 can be fitted to each other. there is. The key k and the key groove g may extend along the axial direction of the reaction tube 340 .

The inner tube 320 is made of a plurality of blocks 321, and at this time, adjacent ones of the blocks 321 may be made of different materials.

As the reactor 300 rotates, when the powder and the inner circumferential surface of the reactor 300 rub against each other, the powder is charged with a specific charge and has polarity, which causes a problem in that the powder clumps together or is adsorbed on the inner circumferential surface of the reactor 300. .

When the inner tube 320 is composed of a plurality of blocks 321, some of the blocks 321 are formed of a material that positively charges the powder, and the rest of the blocks 321 are formed of a material that negatively charges the powder. , the specific charge values that are negatively or positively charged by friction between the inner circumferential surface of the reactor 300 and the powder can be offset with each other. Accordingly, it is possible to minimize aggregation of the powder or adsorption of the powder to the inner circumferential surface of the reactor 300 .

The inner tube 320 is composed of a plurality of blocks 321 divided in the axial direction of the inner tube 320 as shown in FIG. 9, or as shown in FIG. 10, the circumference of the inner tube 320 It may be composed of a plurality of blocks 321 divided in a direction.

In the inner tube 320, the powder may move along the axial direction of the inner tube 320 by the flow of gas or along the circumferential direction of the inner tube 320 by the rotation of the reactor 300, so that the block Even if 321 is divided in any direction of the inner tube 320, the specific charge value of the powder can be offset.

9 and 10 illustratively shows the case where the inner pipe 320 is made of four blocks 321, respectively, but the inner pipe 320 is made of less than four or more than four blocks 321. It is also possible. However, it is preferable that the inner circumferential area of the block 321 made of a material that positively charges the powder is equal to the area of the inner circumferential surface of the block 321 made of a material that negatively charges the powder so as to offset the specific charge value of the powder.

Hereinafter, a batch type powder ALD device utilization system 1 according to the present invention will be described. While the batch-type powder ALD apparatus utilization system 1 according to the present invention is described, detailed descriptions of parts mentioned in the description of the batch-type powder ALD apparatus 10 according to the present invention may be omitted.

11 shows a schematic configuration diagram of a batch type powder ALD device utilization system 1 according to the present invention.

A batch-type powder ALD device utilization system 1 according to the present invention includes the above-described batch-type powder ALD device 10 and an analyzer 20.

The batch-type powder ALD device 10 includes a driving unit 100, a driving force conversion unit 200, and a plurality of reactors 300, so that a plurality of reactors 300 can be rotated through one driving unit 100, A heat transfer unit 400, a heat source 500, and a heat supply line 600 are further provided to heat a plurality of reactors 300 through one heat source 500. In addition, slopes or irregularities 310 are formed on the inner circumferential surface of the reactor 300 to prevent uneven reactions between one end and the other end of the reactor 300 and clogging of the filter at the other end of the reactor 300. In addition, the reaction tube 340 of the reactor 300 is formed of an inner tube 320 and an outer tube 330 to increase the ease of management and the efficiency of the reaction.

The analyzer 20 analyzes the properties of the powder inside the reactor 300. For example, the analyzer 20 includes a physical property measurement system (PPMS) 21 and a mass spectrometer 20 such as PM-TOF to in-situ powder The chemical composition of can be analyzed.

The analyzer 20 can immediately analyze the properties of the powder to adjust the state of the gas supplied to the reactor 300 or determine whether the operation of the reactor 300 is to be continued.

The scope of the present invention is not limited to the above-described embodiments, but may be implemented in various forms of embodiments within the scope of the appended claims. Anyone with ordinary knowledge in the art to which the invention pertains without departing from the subject matter of the invention claimed in the claims is considered to be within the scope of the claims of the present invention to various extents that can be modified.

1: Batch type powder ALD device utilization system
10: batch type powder ALD device 20: analyzer
100: driving unit 200: driving force conversion unit
210: first bevel gear 220: second bevel gear
230: driven rotary shaft 300: reactor
310: unevenness 311: protrusion
320: inner tube 321: block
330: outer tube 400: heat transfer unit
500: heat source 600: heat supply line
700: chamber

Claims (15)

driving unit;
a driving force conversion unit for transmitting the driving force of the driving unit to a plurality of driven rotary shafts;
a plurality of reactors connected to the driven rotation shaft;
a heat transfer unit provided for each reactor and surrounding the circumference of the reactor;
a heat source that heats the fluid; and
A batch-type powder ALD device comprising a; heat supply line for distributing and supplying the fluid heated by the heat source to the heat transfer unit.
According to claim 1,
The batch-type powder ALD device, characterized in that the driving force conversion unit switches the driving force direction of the driving unit.
According to claim 2,
The driving force conversion unit,
A first bevel gear fixed to the drive shaft of the drive unit, and
A batch type powder ALD device, characterized in that it comprises a second bevel gear engaged with the first bevel gear and connected to the driven rotation shaft.
delete According to claim 1,
Batch-type powder ALD device further comprising a chamber surrounding a plurality of the reactors at once.
According to claim 1,
Batch type powder ALD device, characterized in that the inner circumferential surface of the reactor is formed inclined upward from one end located at the inlet side toward the other end located at the outlet side.
According to claim 6,
The batch type powder ALD device, characterized in that the inner circumferential diameter of the reactor decreases from one end located at the inlet side to the other end located at the outlet side.
According to claim 6,
Batch type powder ALD device, characterized in that the center of the inner circumferential surface of one end located at the inlet side of the reactor and the center of the inner circumferential surface of the other end located at the outlet side are alternately formed.
According to claim 1,
Batch type powder ALD device, characterized in that irregularities are formed on the inner circumferential surface of the reactor.
According to claim 9,
The protruding portion of the unevenness protrudes toward the center of the reactor,
The unevenness is a batch type powder ALD device, characterized in that extending in parallel with the circumferential direction of the reactor.
According to claim 9,
The protruding portion of the unevenness protrudes toward the center of the reactor,
The unevenness is a batch type powder ALD device, characterized in that extended in a spiral.
According to claim 1,
The batch type powder ALD device, characterized in that the reactor has an inner tube having a space in which the reaction occurs, and an outer tube surrounding the inner tube.
According to claim 12,
Batch type powder ALD device, characterized in that the inner tube and the outer tube are made of different materials.
According to claim 12,
The inner tube is made of a plurality of blocks,
Batch-type powder ALD device, characterized in that adjacent ones of the blocks are made of different materials.
A batch type powder ALD device according to any one of claims 1 to 3 and 5 to 14; and
A batch-type powder ALD device utilization system comprising a; analyzer for analyzing the powder inside the reactor.

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