KR101822990B1 - 블랭킹 애퍼처 어레이 및 하전 입자빔 묘화 장치 - Google Patents

블랭킹 애퍼처 어레이 및 하전 입자빔 묘화 장치 Download PDF

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KR101822990B1
KR101822990B1 KR1020150134578A KR20150134578A KR101822990B1 KR 101822990 B1 KR101822990 B1 KR 101822990B1 KR 1020150134578 A KR1020150134578 A KR 1020150134578A KR 20150134578 A KR20150134578 A KR 20150134578A KR 101822990 B1 KR101822990 B1 KR 101822990B1
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Prior art keywords
blanking
film
insulating film
aperture array
ground electrode
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Korean (ko)
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KR20160040427A (ko
Inventor
히로시 야마시타
히로시 마츠모토
카즈히로 치바
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가부시키가이샤 뉴플레어 테크놀로지
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H01L21/0275—Photolithographic processes using lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31774—Multi-beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020150134578A 2014-10-03 2015-09-23 블랭킹 애퍼처 어레이 및 하전 입자빔 묘화 장치 Active KR101822990B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014204873A JP6500383B2 (ja) 2014-10-03 2014-10-03 ブランキングアパーチャアレイ及び荷電粒子ビーム描画装置
JPJP-P-2014-204873 2014-10-03

Publications (2)

Publication Number Publication Date
KR20160040427A KR20160040427A (ko) 2016-04-14
KR101822990B1 true KR101822990B1 (ko) 2018-01-29

Family

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Family Applications (1)

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KR1020150134578A Active KR101822990B1 (ko) 2014-10-03 2015-09-23 블랭킹 애퍼처 어레이 및 하전 입자빔 묘화 장치

Country Status (4)

Country Link
US (1) US9530616B2 (enExample)
JP (1) JP6500383B2 (enExample)
KR (1) KR101822990B1 (enExample)
TW (2) TWI594289B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018063331A1 (en) 2016-09-30 2018-04-05 Intel Corporation Fill pattern to enhance ebeam process margin
CN111108582B (zh) 2017-08-08 2024-07-05 Asml荷兰有限公司 带电粒子阻挡元件、包括这样的元件的曝光装置以及使用这样的曝光装置的方法
JP6977528B2 (ja) * 2017-12-14 2021-12-08 株式会社ニューフレアテクノロジー マルチビーム用アパーチャセット
JP6847886B2 (ja) 2018-03-20 2021-03-24 株式会社東芝 荷電粒子ビーム偏向デバイス
CN109321849B (zh) * 2018-10-12 2021-04-02 燕山大学 一种适用于高低温的Fe基自润滑复合材料及其制备方法
JP7296274B2 (ja) * 2019-08-20 2023-06-22 株式会社ニューフレアテクノロジー 描画装置および偏向器
JP7359050B2 (ja) * 2020-03-18 2023-10-11 株式会社ニューフレアテクノロジー マルチビーム用のブランキング装置及びマルチ荷電粒子ビーム描画装置
JP7492929B2 (ja) * 2021-02-19 2024-05-30 株式会社東芝 半導体装置、荷電粒子ビーム描画装置及びマルチ荷電粒子ビーム照射装置
JP7592556B2 (ja) 2021-06-02 2024-12-02 株式会社ニューフレアテクノロジー ブランキングアパーチャアレイユニット
KR20240007062A (ko) * 2022-07-07 2024-01-16 가부시키가이샤 뉴플레어 테크놀로지 실장 기판, 블랭킹 애퍼처 어레이 칩, 블랭킹 애퍼처 어레이 시스템 및 멀티 하전 입자 빔 조사 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012182294A (ja) * 2011-03-01 2012-09-20 Canon Inc 偏向器アレイ、偏向器アレイの製造方法、描画装置、および物品の製造方法
JP2013165200A (ja) * 2012-02-13 2013-08-22 Canon Inc 荷電粒子線レンズ

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JP2617993B2 (ja) * 1988-06-20 1997-06-11 富士通株式会社 電子ビーム露光装置のブランキングアレーアパーチャの製造方法
JP2000164495A (ja) * 1998-11-26 2000-06-16 Advantest Corp 荷電粒子ビーム露光装置及びそこで使用するブランキング・アパーチャ・アレイ
JP2000268755A (ja) * 1999-03-18 2000-09-29 Fujitsu Ltd 薄型静電偏向器及び走査型荷電粒子ビーム装置
JP3763446B2 (ja) * 1999-10-18 2006-04-05 キヤノン株式会社 静電レンズ、電子ビーム描画装置、荷電ビーム応用装置、および、デバイス製造方法
JP2001283756A (ja) * 2000-03-31 2001-10-12 Canon Inc 電子光学系アレイ、これを用いた荷電粒子線露光装置ならびにデバイス製造方法
JP2001319854A (ja) * 2000-05-09 2001-11-16 Advantest Corp マスク、半導体素子製造方法、電子ビーム露光装置、荷電ビーム処理装置において用いられる部材
JP2002190437A (ja) * 2000-12-20 2002-07-05 Advantest Corp 電子ビーム露光装置及び校正方法
CN101630623B (zh) * 2003-05-09 2012-02-22 株式会社荏原制作所 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法
JP4704702B2 (ja) * 2004-06-30 2011-06-22 キヤノン株式会社 ブランキングアパーチャアレイおよびその製造方法
DE102008010123B4 (de) * 2007-02-28 2024-11-28 Ims Nanofabrication Gmbh Vielstrahl-Ablenkarray-Einrichtung für maskenlose Teilchenstrahl-Bearbeitung
EP2251893B1 (en) * 2009-05-14 2014-10-29 IMS Nanofabrication AG Multi-beam deflector array means with bonded electrodes
JP4874384B2 (ja) * 2009-12-25 2012-02-15 株式会社ニューフレアテクノロジー 基板カバーおよびそれを用いた荷電粒子ビーム描画方法
JP5679774B2 (ja) * 2010-11-09 2015-03-04 キヤノン株式会社 偏向器アレイ、荷電粒子描画装置、デバイス製造方法、偏向器アレイの製造方法
EP2750165B1 (en) * 2011-10-03 2016-07-13 Param Corporation Electron beam lithographic method
TWI477925B (zh) * 2011-10-04 2015-03-21 紐富來科技股份有限公司 Multi - beam charged particle beam mapping device and multi - beam charged particle beam rendering method
JP2013168396A (ja) * 2012-02-14 2013-08-29 Canon Inc 静電型の荷電粒子線レンズ及び荷電粒子線装置

Patent Citations (2)

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JP2012182294A (ja) * 2011-03-01 2012-09-20 Canon Inc 偏向器アレイ、偏向器アレイの製造方法、描画装置、および物品の製造方法
JP2013165200A (ja) * 2012-02-13 2013-08-22 Canon Inc 荷電粒子線レンズ

Also Published As

Publication number Publication date
TWI647734B (zh) 2019-01-11
TW201742097A (zh) 2017-12-01
TWI594289B (zh) 2017-08-01
JP2016076548A (ja) 2016-05-12
US9530616B2 (en) 2016-12-27
JP6500383B2 (ja) 2019-04-17
KR20160040427A (ko) 2016-04-14
US20160099129A1 (en) 2016-04-07
TW201626424A (zh) 2016-07-16

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