KR101791197B1 - Dry cleaner - Google Patents

Abstract

The present invention relates to a dry cleaning apparatus, and more particularly, to a dry cleaning apparatus using an ionizer and a roll brush for cleaning a substrate adhering a foreign object by static electricity in a dry state. To this end, the dry cleaning apparatus according to the present invention comprises: a charging unit into which a substrate to be cleaned is charged; A first cleaner for preventing the substrate from being charged by static electricity and cleaning the surface of the substrate using a brush; And a discharge portion for discharging the substrate cleaned through the first cleaning portion.

Description

[0001] DRY CLEANER [0002]

The present invention relates to a cleaning apparatus for cleaning a substrate, and more particularly to a dry cleaning apparatus for cleaning a surface of a substrate in a dry state.

A process for manufacturing a substrate used for a flat panel display such as a liquid crystal display (LCD) or a plasma display (PDP) includes a cleaning process for removing various organic contaminants or inorganic contaminants from a substrate having been subjected to a predetermined surface treatment And this cleaning process is performed by a cleaning device.

The cleaning process is intended to prevent defects by removing various contaminants from the substrate surface before or during the main process.

On the other hand, the cleaning apparatus may be classified into a wet cleaning apparatus for cleaning a substrate using liquid material such as ozone, and a dry cleaning apparatus for spraying high-pressure air onto a substrate or cleaning a substrate using ultraviolet rays. That is, the wet cleaning apparatus is an apparatus for cleaning a substrate in a wet state, and the dry cleaning apparatus is an apparatus for cleaning a substrate in a dry state.

Fig. 1 is a perspective view showing an extrusion type light guide plate, and the extrusion type light guide plate 3 refers to a light guide plate in which a protective paper 2 is extruded and attached to the surface of the light guide plate panel 1. Fig.

The light guide plate is generally cleaned through a wet cleaning apparatus.

The wet cleaning apparatus includes a shower unit for spraying an ozone solution on the entire surface of the light guide plate through an injection nozzle to remove foreign substances from the light guide plate, a light guide plate having a primary foreign substance removed from the shower unit, A roll brush cleaner for physically cleaning the light guide plate with a roll brush to remove foreign substances from the light guide plate, a light guide plate that has been physically cleaned by the roll brush cleaner, receives the light guide plate from a final rinse through a spray nozzle, And a drying unit for drying and drying the rinsing unit for cleaning and the light guide plate for which the cleaning operation has been completed. In the conventional wet type cleaning apparatus as described above, the substrate is conveyed to each section by a roller serving as a conveying means.

That is, in the conventional wet cleaning apparatus, ozone solution or DI water is sprayed on the entire surface of the light guide plate conveyed to the shower unit to remove foreign matters formed on the light guide plate in the shower.

Next, in the wet type cleaning apparatus, after the light guide plate having been subjected to the primary foreign matters removing process in the shower is conveyed to the roll brush cleaning section by a roller, the light guide plate conveyed into the roll brush cleaning section is physically cleaned with two rows of roll brushes Secondarily, the foreign substance of the light guide plate is removed.

Finally, in the wet cleaning apparatus, the light guide plate surface-treated in the roll brush cleaning section is transported to the cleaning section by a roller, the front surface of the light guide plate is cleaned using deionized water (DIW), and the light guide plate is dried ), And then dried.

However, the conventional wet cleaning apparatus as described above can not clean all light guide plates currently used.

That is, the light guide plate shown in Fig. 1 is an extruded light guide plate (model name V11) 3 in which the protective paper 2 is attached to the surface of the light guide panel 1 in an extrusion manner. In this extruded light guide plate, When the extruded light guide plate is cleaned through the wet type cleaning apparatus, water is not allowed to enter the space between the small gaps, so that the surface of the light guide plate is smudged and the light guide plate is not completely dried by the penetrated cleaning liquid do.

Therefore, the conventional wet cleaning apparatus can not clean the light guide plate having gaps with which water can permeate during the wet cleaning process, like the extrusion light guide plate 3.

However, as described above, there is a problem that the light guide plate which can not be cleaned by the wet type cleaning apparatus can not be cleaned by the conventional general dry type cleaning apparatus.

That is, since the dry cleaning apparatus is an apparatus for cleaning the substrate by spraying high-pressure air onto the substrate (including the light guide plate) as described above, in the case of the light guide plate made of transparent synthetic resin such as plastic, There is a problem that it is impossible to completely remove foreign substances sticking to the surface of the light guide plate by simply injecting high-pressure air.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is a technical object of the present invention to provide a dry cleaning apparatus using an ionizer and a roll brush for cleaning a substrate adhered with a foreign substance by static electricity in a dry state.

According to an aspect of the present invention, there is provided a dry cleaning apparatus comprising: a charging unit to which a substrate to be cleaned is charged; A first cleaner for preventing the substrate from being charged by static electricity and cleaning the surface of the substrate using a brush; And a discharge portion for discharging the substrate cleaned through the first cleaning portion.

The present invention according to the above-mentioned solution uses an ionizer and a brush to clean a substrate adhered with a foreign substance by static electricity in a dry state. Therefore, the substrate, which has been conventionally cleaned by a chemical wet cleaning process, Cleaning effect can be obtained.

That is, according to the present invention, since the foreign substances adhering to the substrate are separated from the substrate by using the ionizer, the substrate which can not be cleaned by the conventional general wet type cleaning apparatus and general dry type cleaning apparatus can be easily Cleaning effect can be obtained.

1 is a perspective view showing an extruded light guide plate;
2 is a perspective view showing the external appearance of the dry cleaning apparatus according to the present invention.
3 is a front view showing the construction of the dry cleaning apparatus according to the present invention in detail.
4 is a cross-sectional view showing a configuration of a first cleaning section of a dry cleaning apparatus according to the present invention.
5 is a cross-sectional view showing a configuration of a first cleaning part and a second cleaning part of the dry cleaning device according to the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a perspective view showing the appearance of a dry cleaning apparatus according to the present invention, and FIG. 3 is a front view showing a detailed structure of a dry cleaning apparatus according to the present invention.

The dry cleaning apparatus according to the present invention is for cleaning a substrate which can not be wet-cleaned in a dry state, and in particular, like a light guide plate, is made of a plastic material so that foreign matter of an inorganic component easily sticks to static air, To clean a substrate that can not be cleaned by the cleaning process.

That is, the present invention is to clean a substrate in a dry environment where the foreign matter easily adheres to the static electricity, so that the substrate may be cleaned with a cleaning liquid in a humid environment, but the cleaning liquid may penetrate through gaps formed in the substrate, May be an extrusion type light guide plate in which the protective paper is attached to the surface of the light guide plate panel in an extrusion manner. However, the present invention can be applied not only to such an extruded light guide plate but also to all substrates having the above-mentioned characteristics. Hereinafter, a substrate to be cleaned by the present invention is simply referred to as a substrate.

2 and 3, the dry cleaning apparatus according to the present invention includes a charging unit 10 into which a substrate 90 to be cleaned is charged, A first cleaner 20 for physically cleaning the upper and lower end surfaces of the substrate and sucking and discharging the foreign materials separated from the substrate to the outside, a step for preventing the substrate from being electrostatically charged, A third cleaning unit 40 for removing foreign substances separated from the substrate by spraying the ionized air at a high pressure, a cleaning unit 40 for cleaning the cleaned substrate 40, A discharge unit 50 for discharging the substrate, and a transfer unit 60 for continuously moving the substrate to the respective units.

First, the charging unit 10 is a portion into which a substrate to be cleaned by the present invention is charged. Such a substrate is a glass substrate used as an upper substrate or a lower substrate of a flat panel display device, a plastic substrate such as a light guide plate In particular, a foreign matter (hereinafter, simply referred to as a "foreign matter") of an inorganic component is easily adhered by static electricity and needs to be cleaned by a wet cleaning method. However, when wet cleaning is used, A substrate having properties that can be generated. As such a substrate, there is an extrusion-type light guide plate.

Next, the first cleaning unit 20 is used for primarily cleaning the substrate. In order to prevent the substrate from being electrostatically charged, an ionized air is ionized by using a front end upper ionizer and a front end lower ionizer, The top and bottom surfaces of the substrate are cleaned physically by using the upper roll brush and the lower roll brush and the upper and lower surfaces of the substrate on which the ionized air is sprayed are cleaned from the substrate by the upper roll brush and the brush of the lower roll brush, The upper and lower brush knives are separated by the upper brush knife and the lower brush knife. Then, the upper and lower brush knives are separated from the brushes of the upper roll brush and the lower roll brush by the upper suction brush and the lower suction brush, And discharges it to the outside.

The first cleaning unit 20 may further include a rear end top ionizer for spraying again ionized air onto the upper surface of the substrate in a state where the foreign matter is sucked through the suction.

3, the front end lower ionizer for injecting the ionized air is not shown in the lower end surface of the introduced substrate. However, as described above, May be included in the first-generation unit 20.

The detailed configuration and function of the first cleaning section 20 will be described in detail with reference to FIG.

Next, the second cleaning section 30 is for cleaning the substrate 2, and may be constituted by only a part of the constituent elements of the first cleaning section. That is, the second cleaning part is for cleaning the upper surface of the substrate, and the front part of the substrate flowing into the second cleaning part, among the components of the first cleaning part, An upper roll brush for physically cleaning the upper surface of the substrate on which the ionized air is blown through the upper end ionizer at the upper stage by using a brush, a brush roller for brushing the upper surface of the upper roll brush, An upper brush knife for shaking off foreign matter moved by the brush of the upper brush knife, and an upper suction for sucking the foreign matter cleaned by the upper brush knife to discharge the foreign matter to the outside.

The detailed configuration and function of the second cleansing unit 30 can be corresponded to the respective components of the first cleansing unit described below with reference to FIG. 4, and a detailed description thereof will be omitted.

Next, the third cleaning part 40 is for cleaning the substrate 3, and may be formed of an ionizing air knife. That is, the third cleaning unit removes foreign matter remaining around the substrate from the substrate by colliding the ionized air with the substrate at a high pressure, and it is possible to remove only the upper ionizing air knife And the like.

That is, the upper ionizing air knife causes the ionized air to collide with the upper surface of the substrate cleaned through the second cleaner at a high pressure, so that the foreign matter adhered to the substrate or the substrate adhered to the substrate by the static electricity, And removes foreign matter having static electricity remaining in the space.

However, in addition to the upper Ionizing Air Knife, the third-tier government may also include a configuration that can be mapped to each component of the first tier government.

Next, the discharge portion 50 is a portion through which the substrate 90 cleaned while passing through the first to third cleaning portions is discharged, and the discharged substrate is transferred to another process line.

Lastly, the transfer unit 60 is for transferring the substrate, which has been inserted through the loading unit, to the discharge unit 50 via the first to third cleaning units, and may be constituted by a roller.

That is, the substrate is cleaned while being moved along the rollers of the conveyance unit, and finally discharged through the discharge unit.

On the other hand, the present invention is not necessarily constructed in the order of the first taxing part 20, the second taxing part 30, and the third taxing part 40 as described above. That is, the configurations of the first to third government may be changed in position. For example, if a second-tier government performs a first-tier process, a first-tier government performs a second-tier process, and a third-tier government performs a third-tier process, The position of the government may change.

Further, the configurations of the respective cleaning units are not limited to those described above. For example, in the case of the first weft section 20, it may be further comprised of a rear end lower ionizer, and in the case of the second weft section 30, it may be further comprised of a front end lower ionizer And in the case of the third cleaning part 40, a lower Ionizing air knife may be further included.

4 is a cross-sectional view showing a configuration of a first cleaning unit of the dry cleaning apparatus according to the present invention. 5 is a cross-sectional view showing a configuration of a first cleaning part and a second cleaning part of the dry cleaning device according to the present invention.

The first cleaning part 20 applied to the dry cleaning device according to the present invention is for cleaning the substrate introduced through the charging part 10 in a primary way. As described above, the first cleaning part 20 includes a front end upper ionizer 21, The lower end ionizer 22, the upper roll brush 23, the lower roll brush 24, the upper brush knife 25, the lower brush knife 26, the upper suction 27, the lower suction 28, And a top ionizer 29, the components being mounted to the frame.

First, the front end upper ionizer 21 and the front end lower ionizer 22 inject ionized air onto the upper end surface and the lower end surface of the substrate in a state of being introduced into the first cleaning part, And is used for separating a foreign substance from a substrate, particularly for the purpose of efficiently separating foreign substances attached to the substrate by static electricity.

That is, as described above, the dry cleaning apparatus according to the present invention is for cleaning a substrate which must be wet-cleaned but can not be wet-cleaned due to its structure, and more particularly to a method for cleaning a substrate of a plastic material . On the other hand, in the case of a foreign matter of an inorganic component, it can be easily adhered to a substrate by static electricity, and a foreign matter of such an inorganic component can not be easily separated from the substrate even if high pressure air is injected.

Therefore, in order to separate the foreign matter of the inorganic component attached to the substrate from the substrate by the static electricity before the foreign matter is shaken from the substrate by using the roll brushes 23 and 24, the first cleaning part 20 And a front end upper ionizer 21 and a front end lower ionizer 22 at the upper and lower ends of the front end portion into which the substrate is inserted.

Meanwhile, as described above, the first cleaner may be configured without the front end lower ionizer 22. That is, the front end lower ionizer 22 is for spraying the ionized air to the lower end surface of the substrate. In the case where the substrate which is not required to precisely clean the lower end surface is to be cleaned, the front end lower ionizer 22 is omitted It is possible.

Next, the upper roll brush 23 and the lower roll brush 24 are used for brushing off foreign substances having weakened electrostatic force due to jetting of ionized air and having a weak adhesive force with the substrate, And a brush mounted on the outer peripheral surface.

That is, the upper roll brush and the lower roll brush perform a function of sweeping the foreign object floating on the substrate by using the brush while passing through the ionizer.

On the other hand, like the front-end lower ionizer, the lower roll brush 24 may be omitted.

Next, the upper brush knife 25 and the lower brush knife 26 are disposed at positions where the brushes of the upper roll brush 23 and the lower roll brush 24 can be touched, respectively, It carries out the function of shaking out.

That is, the foreign matter separated from the surface of the substrate by the upper roll brush and the lower roll brush may be attached to the brush again, and in this case, the foreign substances attached to the brush may be transferred again to the surface of the substrate.

4, the upper brush knife and the lower brush knife are provided at positions that can be brought into contact with the upper roll brush and the lower roll brush near the rear end of the first washing machine, So that foreign matter attached to each brush is whitened in space.

As shown in the enlarged view of FIG. 4, the upper brush knife 25 and the lower brush knife 26 are provided with knives 25a and 26a for contacting foreign objects adhering to the brush, (25b, 26b) for allowing the knife to come into contact with the brush or from the brush so that the knife can be rotated, and suction portions (25c, 26c) for sucking in foreign substances spatially separated by the knife have.

The suction portion 25c of the upper brush knife 25 is located at the lower end of the knife as shown in Fig. 4 and the suction portion 26c of the lower end brush knife 26 is located at the upper end of the knife have.

Therefore, the foreign matter coming off the brush through the upper brush knife 25 can not be moved to the upper surface of the substrate again by being sucked into the suction portion located at the lower end of the knife. Similarly, Foreign matter that has fallen off is sucked into the suction portion located at the upper end of the knife 26a, so that it can not be moved to the lower end surface of the substrate again. On the other hand, just as the suction to be described below sucks foreign substances and discharges them to the outside, the suction unit also functions to suck foreign substances and discharge them to the outside.

In addition, the foreign matter falling in the upper direction by the upper brush knife 25 is sucked by the upper suction 27 to be discharged to the outside before being dropped by the gravity to the upper surface of the substrate, and the lower brush knife 26 are lowered in the lower direction by gravity and sucked by the lower suction 28 and discharged to the outside.

The upper suction brush 27 and the lower suction brush 28 are attached to the upper end of the upper brush knife 25 and the lower end of the lower brush knife 26 as described above. And separates foreign matter transferred to the air from the brush through the knife 26 and discharges the foreign substance to the outside.

Finally, the rear end upper ionizer 29 completes the cleaning by the first cleaner, and the ionized air is sprayed onto the upper surface of the substrate discharged from the first cleaner, so that the foreign material floating in the air is returned to the substrate To prevent the phenomenon of sticking to the surface.

The first cleaner 20 may further comprise a rear end lower ionizer (not shown) for performing the same function as the rear end top ionizer 29 on the bottom surface of the substrate.

As described above, the second cleaner 30 shown in FIG. 3 is configured such that at least one of the above-described configurations is mounted, And performs a function of cleaning the substrate in a tertiary manner.

That is, the second cleaning part 30 is provided for cleaning the substrate at the rear end of the first cleaning part 20, and may be variously formed with at least one of the components of the first cleaning part In Fig. 5, the first washing unit 20 constructed as described above is provided with a front end top ionizer, an upper roll brush, an upper brush knife, an upper suction and a rear end upper ionizer Is shown in Fig.

That is, the second cleansing portion 930 may be configured without a lower end ionizer at the lower end, a lower roll brush, a lower brush knife, and a lower suction.

Although not shown in FIG. 5, as described above, the third cleaning section 40 is constituted by an ionizing air knife for removing foreign matter remaining around the substrate by colliding the ionized air with the substrate at a high pressure And may further include components corresponding to those of the first-tier government. That is, the third cleaning unit 40 may perform a function of ultimately removing foreign substances remaining around the substrate cleaned through the first cleaning unit and the second cleaning unit, and then discharging the substrate to the outside.

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

10: Input section 20: 1st generation government
30: The Second Government 40: The Third Government
50: discharge part 60: transfer part
21: upper end front end ionizer 22: lower end ionizer at the front end
23: Upper roll brush 24: Lower roll brush
25: Upper Brush Knife 26: Lower Brush Knife
27: Upper suction 28: Lower suction
29: rear end top ionizer 90: substrate

Claims (13)

A charging unit into which a substrate to be cleaned is charged;
A first cleaning unit for cleaning the surface of the substrate with a brush after jetting ionized air to prevent the substrate from being charged by static electricity; And
And a discharge unit for discharging the substrate cleaned through the first cleaning unit,
The first three-
A front end ionizer mounted on a front end of the substrate through which the substrate is introduced to inject ionized air into the substrate; And
And a roll brush disposed at a rear end of the front end ionizer for cleaning the surface of the substrate on which the air is ejected using a brush. delete The method according to claim 1,
The first three-
Further comprising: a suction unit for sucking a foreign substance moved from the substrate to the brush and discharging the foreign substance to the outside. The method of claim 3,
The first three-
Further comprising: a brush knife for removing foreign matter adhering to the brush from the brush,
Wherein the suction discharges the foreign matter discharged in a space by the brush knife. 5. The method of claim 4,
Wherein the brush knife comprises:
A knife for contact with the brush to remove foreign matter adhering to the brush;
A rotating portion for allowing the knife to rotate so that the knife is brought into close contact with the brush or separated from the brush; And
And a suction unit for sucking the foreign matter separated in space by the knife and discharging the foreign matter to the outside. The method according to claim 1,
The front end ionizer may be configured to:
A front end top ionizer for spraying the air onto the top of the substrate; And
And a front end lower stage ionizer for spraying the air to the lower end of the substrate. The method according to claim 1,
The first three-
And a rear end ionizer mounted on a rear end of the substrate cleaned by the roll brush for ejecting ionized air to the discharged substrate. 8. The method of claim 7,
The rear end ionizer,
And a rear end upper ionizer for spraying the air onto the upper end of the substrate. The method according to claim 1,
The roll brush includes:
An upper roll brush for cleaning the upper surface of the substrate on which the air is sprayed by using a brush; And
And a lower roll brush for cleaning the lower end surface of the substrate on which the air is sprayed by using a brush. The method according to claim 1,
And a second cleaner for cleaning the substrate cleaned through the first cleaner using a brush. 11. The method of claim 10,
The second taxing unit includes:
A front end top ionizer mounted on a front end of the substrate through which the substrate flows to eject the ionized air to the top surface of the substrate through the first cleaning part;
An upper roll brush for cleaning the upper surface of the substrate on which the air is sprayed by using a brush;
An upper brush knife for removing foreign matter adhering to the brush from the brush, And
And an upper suction unit for sucking a foreign substance separated from the brush by the upper brush knife and discharging the foreign substance to the outside. 11. The method of claim 10,
And a third cleaning unit for spraying the ionized air at a high pressure on the substrate cleaned through the second cleaning unit to remove foreign substances around the substrate. 13. The method of claim 12,
The third taxing unit includes:
And a top ionizing air knife for removing foreign matter remaining around the substrate by colliding the ionized air with the upper surface of the substrate at a high pressure.

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