KR101759213B1 - 최적화된 유전체 반사 회절격자 - Google Patents

최적화된 유전체 반사 회절격자 Download PDF

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Publication number
KR101759213B1
KR101759213B1 KR1020127018362A KR20127018362A KR101759213B1 KR 101759213 B1 KR101759213 B1 KR 101759213B1 KR 1020127018362 A KR1020127018362 A KR 1020127018362A KR 20127018362 A KR20127018362 A KR 20127018362A KR 101759213 B1 KR101759213 B1 KR 101759213B1
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South Korea
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layer
thickness
sio
silica
grating
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English (en)
Korean (ko)
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KR20130008513A (ko
Inventor
니콜라 보노드
장 폴 샹바레
Original Assignee
에꼴레 폴리테크닉
쌩뜨레 나티오날 데 라 르세르쉬 생띠끄 (씨. 엔. 알. 에스)
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Publication of KR20130008513A publication Critical patent/KR20130008513A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
KR1020127018362A 2009-12-17 2010-12-13 최적화된 유전체 반사 회절격자 Expired - Fee Related KR101759213B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0959157 2009-12-17
FR0959157A FR2954524B1 (fr) 2009-12-17 2009-12-17 Reseau de diffraction reflechissant dielectrique optimise
PCT/FR2010/052684 WO2011073554A1 (fr) 2009-12-17 2010-12-13 Réseau de diffraction réfléchissant diélectrique optimisé

Publications (2)

Publication Number Publication Date
KR20130008513A KR20130008513A (ko) 2013-01-22
KR101759213B1 true KR101759213B1 (ko) 2017-07-18

Family

ID=42091521

Family Applications (1)

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KR1020127018362A Expired - Fee Related KR101759213B1 (ko) 2009-12-17 2010-12-13 최적화된 유전체 반사 회절격자

Country Status (7)

Country Link
US (1) US20120300302A1 (https=)
EP (1) EP2513688A1 (https=)
JP (1) JP6005522B2 (https=)
KR (1) KR101759213B1 (https=)
CN (1) CN102812388A (https=)
FR (1) FR2954524B1 (https=)
WO (1) WO2011073554A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102314040B (zh) * 2011-09-05 2013-04-17 青岛大学 一种宽光谱金属介质膜光栅及其优化方法
CN102313920B (zh) * 2011-09-05 2013-06-05 青岛大学 一种基于非规整膜层结构的宽光谱金属介质膜光栅
CN103592714B (zh) * 2013-10-17 2015-07-08 同济大学 一种易于制备的反射式多通道滤光元件的设计方法
CN104777532B (zh) * 2015-04-03 2017-02-22 中国科学院上海光学精密机械研究所 基于级联光栅结构的超窄带te偏振光谱选择性吸收器
US11112618B2 (en) 2015-09-03 2021-09-07 Asml Netherlands B.V. Beam splitting apparatus
US10241244B2 (en) 2016-07-29 2019-03-26 Lumentum Operations Llc Thin film total internal reflection diffraction grating for single polarization or dual polarization
WO2018226539A1 (en) * 2017-06-08 2018-12-13 Lawrence Livermore National Security, Llc Metal-overcoated grating and method
WO2019086770A1 (en) * 2017-11-06 2019-05-09 Aalto University Foundation Sr A field-enhancing device
JP2019120500A (ja) * 2017-12-28 2019-07-22 株式会社ミツトヨ スケールおよびその製造方法
US11747528B2 (en) * 2018-08-31 2023-09-05 Samsung Electronics Co., Ltd. Diffraction grating device, method of manufacturing the same, and optical apparatus including the diffraction grating device
DE102018220629A1 (de) * 2018-11-29 2020-06-04 Carl Zeiss Smt Gmbh Spiegel für eine Beleuchtungsoptik einer Projektionsbelichtungsanlage mit einem Spektralfilter in Form einer Gitterstruktur und Verfahren zur Herstellung eines Spektralfilters in Form einer Gitterstruktur auf einem Spiegel
CN111366999B (zh) * 2020-03-26 2021-11-26 合肥工业大学 一种基于三氧化钼渐变光栅的宽带极化敏感吸收器
WO2022032234A1 (en) * 2020-08-07 2022-02-10 Ram Photonics, LLC Method and system for high bandwidth immersion grating
CN114460676B (zh) * 2022-03-03 2024-01-09 福建睿创光电科技有限公司 一种1030nm正弦型介质光栅及其制作方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504677A (ja) * 1999-07-07 2003-02-04 フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 分散性多層ミラー
US20090059375A1 (en) * 2007-08-27 2009-03-05 John Hoose Grating Device with Adjusting Layer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5907436A (en) * 1995-09-29 1999-05-25 The Regents Of The University Of California Multilayer dielectric diffraction gratings
US6400509B1 (en) * 2000-04-07 2002-06-04 Zolo Technologies, Inc. Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices
JP2002098820A (ja) * 2000-09-21 2002-04-05 Nippon Sheet Glass Co Ltd 反射型回折格子
ATE447171T1 (de) * 2002-12-19 2009-11-15 Oerlikon Trading Ag Vorrichtung und verfahren zur erzeugung elektromagnetischer feldverteilungen
CN100526918C (zh) * 2003-02-18 2009-08-12 住友电气工业株式会社 衍射光栅元件
CN100476476C (zh) * 2004-03-24 2009-04-08 Enablence有限公司 平面波导反射衍射光栅
JP5050594B2 (ja) * 2007-03-20 2012-10-17 旭硝子株式会社 分光装置
JP5311757B2 (ja) * 2007-03-29 2013-10-09 キヤノン株式会社 反射光学素子、露光装置およびデバイス製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504677A (ja) * 1999-07-07 2003-02-04 フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 分散性多層ミラー
US20090059375A1 (en) * 2007-08-27 2009-03-05 John Hoose Grating Device with Adjusting Layer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOSA A Vol.14, No.5, 1124~1136(1997)*
Optics Express Vol.17, No.26, 23809~23816(2009)*

Also Published As

Publication number Publication date
EP2513688A1 (fr) 2012-10-24
CN102812388A (zh) 2012-12-05
KR20130008513A (ko) 2013-01-22
FR2954524B1 (fr) 2012-09-28
JP2013514542A (ja) 2013-04-25
US20120300302A1 (en) 2012-11-29
FR2954524A1 (fr) 2011-06-24
WO2011073554A1 (fr) 2011-06-23
JP6005522B2 (ja) 2016-10-12

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