KR101721965B1 - Device and method for inspecting appearance of transparent substrate - Google Patents

Device and method for inspecting appearance of transparent substrate Download PDF

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KR101721965B1
KR101721965B1 KR1020150106617A KR20150106617A KR101721965B1 KR 101721965 B1 KR101721965 B1 KR 101721965B1 KR 1020150106617 A KR1020150106617 A KR 1020150106617A KR 20150106617 A KR20150106617 A KR 20150106617A KR 101721965 B1 KR101721965 B1 KR 101721965B1
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image
light
color light
transparent substrate
positive
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KR20160019365A (en
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다카유키 아키모토
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가부시키가이샤 도쿄 웰드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics

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  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • General Physics & Mathematics (AREA)
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  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Theoretical Computer Science (AREA)
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  • Signal Processing (AREA)

Abstract

An object of the present invention is to accurately detect a scratch on a quartz blank.
As a means for solving such a problem, a quartz blank (1) is placed on a glass plate (2) to irradiate the glass plate (2) and the quartz blank (1) with red light deviating from positive light from below the glass plate And irradiates green light as the positive transmitted light. And irradiates blue light as reflected light from the upper side of the glass plate 2. [ The image pickup device 20 generates the diffusion transmitted image 30a by red light, the positive image 30b by green light, and the diffuse reflection image 30c by blue light in the image processing device 30, The diffusion transmission image 30a, the positive transmission image 30b and the diffusion reflection image 30c are synthesized to obtain a composite image 30d. The composite image 30d detects the scratch portion 1a of the quartz blank 1.

Description

TECHNICAL FIELD [0001] The present invention relates to a transparent substrate inspection apparatus and a method of inspecting a transparent substrate,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus for inspecting the appearance of a transparent substrate and a method for inspecting the appearance of the transparent substrate.

Conventionally, a quartz-type quartz crystal blank has been used as a quartz crystal. Further, an appearance inspection method for detecting such scratches of the quartz blank has been developed.

As such a conventional appearance inspection method, there is a method in which light is transmitted through a quartz blank placed on a transparent support, and the appearance inspection is carried out by detecting light that is irregularly reflected at a portion such as a scratch (see Patent Document 1) .

Alternatively, light is transmitted through a quartz blank placed on a transparent support, and a light whose polarization state changes in a portion such as a scratch is detected by using a polarizing plate to perform the appearance inspection (see Patent Document 2).

However, according to the method described in Patent Document 1, all irregularities on the quartz blank are whitened as a scratch. In particular, since the periphery of the quartz crystal blank is in a concave shape, it is whitened. Therefore, it is difficult to reliably detect the scratch on the periphery of the quartz blank.

According to the method described in Patent Document 2, since the quartz blank has strong polarization characteristics, the polarization state is changed only by changing the direction when the quartz blank is placed on the transparent support. Therefore, depending on the direction of the quartz blank on the transparent support, scratches of the quartz blank may not be reliably detected.

In both of Patent Document 1 and Patent Document 2, a quartz blank is placed on a transparent support, but it is difficult to distinguish between a scratch on the transparent support and a scratch on the quartz blank.

Japanese Patent Application Laid-Open No. 9-288063 Japanese Patent Application Laid-Open No. 2000-81312

It is an object of the present invention to provide an apparatus for inspecting the appearance of a transparent substrate and a method for inspecting the appearance of the transparent substrate, which can accurately and surely detect the appearance of the crystal blank.

The present invention provides an apparatus for inspecting the appearance of a transparent substrate, comprising: a transparent support on which a transparent substrate is placed; imaging means disposed above the transparent support for generating an image by imaging the transparent substrate and the transparent support; A first illuminating means disposed below the transparent support for illuminating the transparent support and the transparent substrate with the first color light deviating from the positive transmitted light (positive transmitted light) with respect to the imaging means, and a second illuminating means disposed below the transparent support, A third illuminating means disposed above the transparent support and for illuminating the transparent substrate with the third color light which is to be reflected light, and a second illuminating means for illuminating the transparent substrate with the second color light, Based on the obtained diffuse transmission image by the first color light, the positive transmission image by the second color light, and the diffuse reflection image by the third color light, And an image processing device for generating a sex image to detect a scratch on the transparent substrate.

The present invention is characterized in that the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light Which is an apparatus for inspecting the appearance of a substrate.

In the present invention, when the output of the diffusion transmitted image is P1, the output of the positive-going image is P2, and the output of the diffuse reflection image is P3, the image processing apparatus calculates -k1xP1 + k2xP2 + k3xP3 , and k2 and k3 are positive numbers), the scratch of the transparent substrate is detected.

The present invention is an apparatus for inspecting the appearance of a transparent substrate, characterized in that a scratch on a transparent substrate is detected based on a calculation formula of -P1 + P2 + P3.

The present invention is characterized in that the imaging means receives one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or the first color light, the second color light and the third color light to generate an image And a CCD camera or a CMOS camera having two or more imaging plates for performing a visual inspection of the transparent substrate.

The present invention relates to a method of inspecting the appearance of a transparent substrate, comprising: a step of placing a transparent substrate on a transparent support; a step of irradiating the light from the first illumination means disposed below the transparent support to the imaging means disposed above the transparent support, A step of generating an image by imaging means by irradiating the one-color light onto the transparent support and the transparent substrate; and a step of irradiating a second color light, which is positive light transmission from the second illumination means disposed below the transparent support, A step of generating an image by the image pickup means by irradiating the transparent substrate with the third color light which is the reflection light from the third illumination means disposed above the transparent support, A diffusion transmitted image by the first color light obtained by the imaging means, Information transmission image, based on the diffuse reflection image by the third color, a visual inspection method for a transparent substrate, characterized in that it includes a step of generating a composite image by image processing by the apparatus detecting the scratches on the transparent substrate.

The present invention is characterized in that the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light A method for inspecting the appearance of a substrate.

In the present invention, when the output of the diffusion transmitted image is P1, the output of the positive-going image is P2, and the output of the diffuse reflection image is P3, the image processing apparatus calculates -k1xP1 + k2xP2 + k3xP3 , and k2 and k3 are positive numbers), the scratch of the transparent substrate is detected.

According to the present invention, the image processing apparatus is a method for inspecting the appearance of a transparent substrate, characterized in that a scratch on a transparent substrate is detected based on a calculation formula of -P1 + P2 + P3.

The present invention is characterized in that the imaging means receives one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or the first color light, the second color light and the third color light to generate an image A CCD camera or a CMOS camera having two or more image pickup plates for performing a visual inspection of a transparent substrate.

INDUSTRIAL APPLICABILITY According to the present invention, a transparent substrate can be inspected accurately and reliably.

1 is a schematic view showing an apparatus for inspecting the appearance of a transparent substrate according to the present invention.
2 is a view showing a state in which red light is incident on a transparent substrate;
3 is a view showing a state in which green light is incident on a transparent substrate;
4 is a view showing a state in which blue light is incident on a transparent substrate;
5 is a diagram showing image processing in the visual inspection apparatus.
Figures 6 (a), 6 (b) and 6 (c) show image processing in the visual inspection apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 to 4 are views showing an embodiment of an apparatus for inspecting the appearance of a transparent substrate according to the present invention.

First, a transparent substrate to be inspected by a visual inspection apparatus for a transparent substrate will be described.

As a transparent substrate to be inspected by a visual inspection apparatus for a transparent substrate, a quartz crystal blank for a quartz crystal is used.

As shown in Fig. 1, a quartz crystal blank (transparent substrate) 1 to be inspected is a double-convex convex-shaped quartz crystal blank placed on a glass plate (transparent support) 2 and having a thick central portion, And a modified blank of a beveling process in which the entire surface is a smooth surface except for the peripheral portion.

Next, the outline of the transparent substrate inspection apparatus 10 will be described with reference to Fig.

1, the apparatus for inspecting the appearance of a transparent substrate 10 comprises a glass plate 2 on which a quartz blank 1 is placed, a glass plate 2 arranged above the glass blank 2, And a first color light (red light), which is disposed below the glass plate 2 and deviates from the positive light for the image pickup means 20, to the glass plate 2 and the quartz crystal blank (Green light), which is disposed below the glass plate 2 and serves as positive light for the image pickup means 20, to the glass plate 2 and the quartz blank 1 (Blue light) deviating from the specularly reflected light with respect to the image sensing means 20 is incident on the quartz crystal blank 1 with respect to the quartz crystal blank 1. The second illumination means 12 is provided above the glass plate 2, And a third illuminating means 13 for illuminating the first illuminating means. Here, the first color light (red light) deviating from the positive light is a first color light other than the positive light, and the third color light (blue light) deviating from the regular reflection light is third color light other than regularly reflected light.

The image pickup means 20 is made up of a CCD camera. The CCD camera includes one image pickup plate for receiving the first color light, the second color light and the third color light to generate an image, And two or more imaging plates for receiving the color light and the third color light to generate an image. The image obtained by the imaging means 20 is also sent to the image processing apparatus 30 having the display portion 30A.

Based on the diffusion transmitted image 30a by red light, the positive light transmission image 30b by green light, and the diffuse reflection image 30c by blue light generated by the imaging means 20, the image processing apparatus 30 And the outputs P1, P2, and P3 of the images 30a, 30b, and 30c are calculated by a calculation formula to be described later to detect a scratch on the quartz blank 1.

Next, the operation of this embodiment having such a configuration will be described.

First, the crystal blank 1 is placed on the glass plate 2. Then, as shown in Fig. 2, the glass plate 2 and the quartz blank 1 are irradiated with red light as a long wavelength from the first illuminating means 11. In this case, the first illumination means 11 irradiates the glass plate 2 and the quartz blank 1 with red light so as to deviate from the positive light transmitted to the imaging means 20.

Here, the positive transmitted light to the imaging means 20 refers to the light that is irradiated to the image pickup means 20 through the glass plate 2 and the quartz blank 1, and the light that deviates from the positive transmitted light, Refers to light that is transmitted through the glass plate 2 and the quartz crystal blank 1 but does not directly enter the image sensing means 20. [

In this case, for example, four types of red light 1-1, 1-2, 1-3, 1-4 are emitted from the first illuminating means 11 to the imaging means 20.

As shown in Fig. 2, the red light 1-1 from the first illumination means 11 passes through the glass plate 2, and further exits the modified blank 1. The glass plate 2 is made of a transparent material and has high transparency. Therefore, most of the red light 1-1 passes through the glass plate 2 and does not reach the imaging means 20. [ Therefore, the diffusion transmission image 30a obtained by the red light 1-1 is blackened.

Further, the red light 1-2 passes through the glass plate 2 and advances in the modified blank 1. The inside of the quartz crystal blank 1 is made of a translucent body, the red light 1-2 is diffused and transmitted through the quartz crystal blank 1, and a part of the diffused and transmitted light reaches the image pickup means 20. Therefore, the diffusion transmitted image 30a obtained by the red light 1-2 becomes a uniform dark gray.

Further, the red light 1-3 passes through the glass plate 2 and advances in the modified blank 1. The inside of the quartz crystal blank 1 is made of a translucent body, and the red light 1-3 is diffused and transmitted through the quartz crystal blank 1. At this time, the red light 1-3 diffuses strongly in the scratch portion 1a of the quartz blank 1 and enters the image pick-up means 20. Therefore, the diffusion transmitted image 30a obtained by the red light 1-3 exhibits white in the scratch area 1a.

Further, the red light 1-4 passes through the glass plate 2 and enters the quartz crystal blank 1. In this case, the red light 1-4 is strongly diffused in the scratch area 2a of the glass plate 2 and enters the image pick-up means 20. Therefore, the diffusion transmitted image 30a obtained by the red light 1-4 exhibits white in the scratch area 2a.

Since the quartz blank 1 spreads the light largely as compared with the glass plate 2, the scratch portion 1a of the quartz blank 1 in the diffusion transmitted image 30a is located on the flaw portion 2a).

Next, as shown in Fig. 3, the glass plate 2 and the quartz blank 1 are irradiated with green light from the second illuminating means 12 as a medium wavelength. In this case, the second illumination means 12 irradiates the glass plate 2 and the quartz crystal blank 1 with green light which becomes positive light to the imaging means 20.

Here, the positive transmitted light to the imaging means 20 refers to light that is irradiated directly to the image pickup means 20 through the glass plate 2 and the quartz blank 1.

In this case, for example, four types of green light (2-1, 2-2, 2-3, 2-4) which become positive light for the imaging means (20) are irradiated from the second illuminating means (12).

As shown in Fig. 3, the green light 2-1 from the second illumination means 12 passes through the glass plate 2, and further exits the modified blank 1. The glass plate 2 is made of a transparent material and has a high transparency. Therefore, most of the green light 2-1 passes through the glass plate 2 and reaches the imaging means 20. [ Therefore, the positive-transmission image 30b obtained by the green light 2-1 becomes dark.

Further, the green light 2-2 passes through the glass plate 2 and advances in the modified blank 1. [ The inside of the quartz crystal blank 1 is made of a translucent material. The green light 2-2 is diffused and transmitted through the quartz crystal blank 1, and the diffused and transmitted light reaches the image pick-up means 20. Therefore, the positive-transmission image 30b obtained by the green light 2-2 becomes a uniform white color.

Further, the green light 2-3 passes through the glass plate 2 and advances in the modified blank 1. [ The inside of the quartz crystal blank 1 is made of a translucent body, and the green light 2-3 is diffused and transmitted through the quartz crystal blank 1. At this time, the green light 2-3 diffuses strongly in the scratch portion 1a of the quartz blank 1, reduces the amount of light, and enters the image pick-up means 20. For this reason, the positive-transmission image 30b obtained by the green light 2-3 exhibits black because the amount of light is reduced in the scratch portion 1a.

Further, the green light (2-4) passes through the glass plate (2) and enters the quartz blank (1). In this case, the green light 2-4 diffuses strongly in the scratch area 2a of the glass plate 2, reduces the amount of light, and then enters the image pick-up means 20. [ For this reason, the positive-transmission image 30b obtained by the green light 2-4 exhibits black because the amount of light is reduced in the scratch area 2a.

In addition, since the quartz crystal blank 1 diffuses light largely as compared with the glass plate 2, the quantity of light is greatly reduced in the scratch portion 1a of the quartz crystal blank 1 in the positive-transmission image 30b. Therefore, the scratch portion 1a of the quartz blank 1 exhibits a stronger black than the scratch portion 2a of the glass plate 2. [

Next, as shown in Fig. 4, the glass plate 2 and the quartz crystal blank 1 are irradiated with blue light as a short wavelength from the third illumination means 13. In this case, the third illumination means 13 irradiates the glass plate 2 and the quartz crystal blank 1 with blue light deviating from the regularly reflected light for the image sensing means 20.

Here, the regularly reflected light to the imaging means 20 refers to the light that is irradiated by the irradiated light reflected by the quartz blank 1 and directly incident on the imaging means 20. The light exiting from the regularly reflected light means that the irradiated light is corrected Refers to light that is reflected by the blank 1 and does not directly enter the imaging means 20. [

In this case, for example, three types of blue light beams 3-1, 3-2 and 3-3 are regularly reflected from the third illumination means 13 to the imaging means 20. [

As shown in Fig. 4, the blue light 3-1 from the third illuminating means 13 emits the crystal blank 1 and also passes through the glass plate 2. Fig. The blue light 3-1 does not reach the image pickup means 20 because most of the blue light is transmitted through the glass plate 2 and is not reflected by the glass plate 2 because the glass plate 2 is made of a transparent material and has high transparency . Therefore, the diffused reflection image 30c obtained by the blue light 3-1 is blackened.

Further, the blue light 3-2 is uniformly diffused and reflected by the surface of the quartz blank 1, and reaches the image pick-up means 20. Therefore, the diffused reflection image 30c obtained by the blue light 3-2 becomes a uniform light gray.

Further, the blue light 3-3 is diffused and reflected at the surface of the quartz crystal blank 1. At this time, the blue light 3-3 is diffused and reflected nonuniformly in the scratch area 1a of the quartz blank 1, and enters the image pick-up means 20. Therefore, the diffused reflection image 30c obtained by the blue light 3-3 shows black in the portion of the scratch portion 1a.

Next, the operation of the image processing apparatus 30 will be described with reference to Figs. 5 and 6. Fig. (Color images) 30a, 30b, and 30c generated by the image pickup unit 20 are sent to the image processing apparatus 30 as shown in Figs. 5 and 6. The image sent to the image processing apparatus 30 includes a diffusion transmission image 30a obtained by the red light, a positive transmission image 30b obtained by the green light, and a diffuse reflection image 30c obtained by the blue light, Images 30a, 30b, and 30c are extracted individually.

When the output of the diffusion transmitted image 30a is P1, the output of the positive-transmission image 30b is P2, and the output of the diffuse reflection image 30c is P3 in the image processing apparatus 30, -P1 + P2 + A composite image (a flawed enhanced image) 30d can be obtained by performing calculation based on the calculation formula (1) of P3 to detect a flawed portion 1a of the modified blank 1 by the synthesized image 30d.

That is, in the calculation formula (1), the scratch portion 1a of the quartz blank 1 can be represented as black by -P1 + P2 among -P1 + P2 + P3, The scratch portion 1a can be clearly shown.

On the other hand, not only the scratch portion 1a of the quartz blank 1 but also the scratch portion 2a of the glass plate 2 is black due to -P1 + P2.

Therefore, by further adding the output of the diffuse reflection image P3 to (-P1 + P2), the scratch portion 1a of the quartz blank 1 is displayed as stronger black, and the scratch of the quartz blank 1 It is possible to differentiate the portion 1a and the scratch portion 2a of the glass plate 2 from each other.

Next, in the image processing apparatus 30, the synthesized image 30d obtained by the above-described calculation formula (1) is subjected to binarization processing so that the binarized image A processed image 30e is obtained.

Next, the binarization processed image 30e is subjected to extraction processing for eliminating a portion having a small area and a short length, and a resulting image 30f is obtained. Only the scratch portion 1a of the quartz blank 1 is clearly shown on the resulting image 30f.

Here, the operation and effect of the present embodiment will be described with reference to Figs. 6 (a), 6 (b) and 6 (c).

6A, when the output of the diffusion transmitted image 30a is P1, the output of the positive-transmission image 30b is P2, and the output of the diffuse reflection image 30c is P3, -P1 + By obtaining the composite image 30d by P2 + P3, the scratch portion 1a of the quartz blank 1 can be clearly displayed.

On the other hand, as shown in Fig. 6B, when the composite image 30d is generated by calculating as -P1 + P2, not only the scratch portion 1a of the correction blank 1 on the composite image 30d A scratch portion 2a of the glass plate 2 also appears.

6 (c), when the composite image 30d is generated by calculation as in the case of P2 + P3, the flaw portion 2a of the glass plate 2 is thinned on the composite image 30d, The scratch portion 1a of the blank 1 does not become thin and remains at the same level. Therefore, the scratch portion 1a of the quartz blank 1 can be clearly shown.

According to the present embodiment as described above, by obtaining the composite image 30d by the calculation formula (1) of -P1 + P2 + P3 described above, the scratch portion 1a of the quartz blank 1 can be emphasized.

Further, as shown in Fig. 1, the red light can be surely transmitted through the glass plate 2 and guided into the quartz crystal blank 1 by irradiating red light as a long wavelength which is difficult to scatter from the lower side of the glass plate 2, So that a diffusion-transmitted image 30a can be obtained. In addition, by emitting blue light as a short wavelength easily scattered from the upper side of the quartz blank 1, the blue light can be reliably diffused and reflected on the quartz blank 1 to obtain a diffused reflection image 30c precisely.

In the above-described embodiment, the example in which the image processing apparatus 30 generates the composite image 30d using the calculation formula (1) of -P1 + P2 + P3 is shown. However, (2) of + k2 x P2 + k3 x P3 (k1, k2, k3 are positive numbers).

For example, in the equation (2), k1 = 1.0, k2 = 0.5, and k3 = 0.8.

Further, when k1, k2, and k3 are set to 1 in the calculation formula (2), the calculation formula (2) becomes the same as the calculation formula (1).

In the above embodiment, the image pickup means 20 is a CCD camera. However, if it is possible to pick up a diffusion transmission image, a positive transmission image, and a diffusion reflection image using light of three different colors, (2) that receives an image of the first color light, the second color light, and the third color light to generate an image by receiving the first color light, the second color light, and the third color light, Or a CMOS camera having more than two image pickup plates.

1: quartz blank
2: Glass plate
10: Appearance inspection apparatus of transparent substrate
11: first lighting means
12: second lighting means
13: Third lighting means
20:
30: Image processing device
30a: diffusion transmission image
30b: positive transmission image
30c: diffuse reflection image
30d: composite image

Claims (10)

An apparatus for inspecting the appearance of a transparent substrate,
A transparent support on which a transparent substrate is placed,
An imaging means disposed above the transparent support and configured to generate an image by imaging the transparent substrate and the transparent support,
A first illuminating means disposed below the transparent support and configured to emit first color light deviating from positive transmittance light (positive transmittance light) to the image sensing means with respect to the transparent support and the transparent substrate;
A second illuminating means disposed below the transparent support for illuminating the transparent support and the transparent substrate with the second color light as the positive transmitted light with respect to the imaging means,
A third illuminating means disposed above the transparent support for illuminating the transparent substrate with the third color light to be reflected light,
An image processing apparatus for generating a composite image based on a diffusion transmission image by the first color light, a positive transmission image by the second color light, and a diffuse reflection image by the third color light obtained by the imaging means and detecting a scratch on the transparent substrate Wherein the transparent substrate is a transparent substrate. The method according to claim 1,
Wherein the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light. Device. 3. The method according to claim 1 or 2,
When the output of the diffusion transmission image is P1, the output of the positive transmission image is P2, and the output of the diffusion reflection image is P3,
-k1 x P1 + k2 x P2 + k3 x P3 (k1, k2, k3 are positive numbers)
Wherein a scratch on the transparent substrate is detected on the basis of a calculation formula of the transparent substrate. The method of claim 3,
The image processing apparatus includes:
And a scratch on the transparent substrate is detected on the basis of a formula of -P1 + P2 + P3. The method according to claim 1,
The image pickup means includes one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or two or more image pickups for receiving the first color light, the second color light and the third color light to generate an image An apparatus for inspecting the appearance of a transparent substrate, comprising a CCD camera or a CMOS camera having an image pickup plate. A method for inspecting the appearance of a transparent substrate,
Placing a transparent substrate on a transparent support,
A step of generating an image by imaging means by irradiating a first color light deviating from positive light with respect to the imaging means disposed above the transparent support from the first illumination means disposed below the transparent support to the transparent support and the transparent substrate,
A step of irradiating the transparent support and the transparent substrate with the second color light as positive light transmission from the second illuminating means disposed under the transparent support to the imaging means to generate an image by the imaging means,
A step of irradiating the transparent substrate with a third color light, which is a reflection light from the third illuminating means disposed above the transparent support, to generate an image by the imaging means,
A composite image is generated by the image processing apparatus on the basis of the diffuse transmission image by the first color light, the positive transmission image by the second color light, and the diffuse reflection image by the third color light obtained by the imaging means, And a step of detecting the appearance of the transparent substrate. The method according to claim 6,
Wherein the first illumination means emits red light as the first color light, the second illumination means emits green light as the second color light, and the third illumination means emits blue light as the third color light. Way. 8. The method according to claim 6 or 7,
When the output of the diffusion transmission image is P1, the output of the positive transmission image is P2, and the output of the diffusion reflection image is P3,
-k1 x P1 + k2 x P2 + k3 x P3 (k1, k2, k3 are positive numbers)
Wherein a scratch on the transparent substrate is detected on the basis of a calculation formula of the transparent substrate. 9. The method of claim 8,
The image processing apparatus includes:
And a scratch on the transparent substrate is detected on the basis of the equation of -P1 + P2 + P3. The method according to claim 6,
The image pickup means includes one imaging plate for receiving the first color light, the second color light and the third color light to generate an image, or two or more image pickups for receiving the first color light, the second color light and the third color light to generate an image A method for inspecting the appearance of a transparent substrate, the method comprising: a CCD camera or a CMOS camera having an image pickup plate.
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