KR101697720B1 - 연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 - Google Patents

연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 Download PDF

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KR101697720B1
KR101697720B1 KR1020127023803A KR20127023803A KR101697720B1 KR 101697720 B1 KR101697720 B1 KR 101697720B1 KR 1020127023803 A KR1020127023803 A KR 1020127023803A KR 20127023803 A KR20127023803 A KR 20127023803A KR 101697720 B1 KR101697720 B1 KR 101697720B1
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South Korea
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well
ties
concentration
dopant
implant
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English (en)
Korean (ko)
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KR20120121914A (ko
Inventor
앤드류 칼슨
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어드밴스드 마이크로 디바이시즈, 인코포레이티드
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H10D84/212Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/62Capacitors having potential barriers
    • H10D1/66Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/68Capacitors having no potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H10D84/212Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
    • H10D84/217Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors of only conductor-insulator-semiconductor capacitors

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  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
KR1020127023803A 2010-02-12 2011-02-11 연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 Expired - Fee Related KR101697720B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/705,185 US8227846B2 (en) 2010-02-12 2010-02-12 Systems and methods for a continuous-well decoupling capacitor
US12/705,185 2010-02-12
PCT/US2011/024522 WO2011106176A1 (en) 2010-02-12 2011-02-11 Systems and methods for a continuous-well decoupling capacitor

Publications (2)

Publication Number Publication Date
KR20120121914A KR20120121914A (ko) 2012-11-06
KR101697720B1 true KR101697720B1 (ko) 2017-01-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127023803A Expired - Fee Related KR101697720B1 (ko) 2010-02-12 2011-02-11 연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법

Country Status (6)

Country Link
US (1) US8227846B2 (https=)
EP (1) EP2534690B1 (https=)
JP (1) JP2013520016A (https=)
KR (1) KR101697720B1 (https=)
CN (1) CN102754214A (https=)
WO (1) WO2011106176A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9082886B2 (en) * 2011-05-12 2015-07-14 Taiwan Semiconductor Manufacturing Company, Ltd. Adding decoupling function for tap cells
US10157910B2 (en) * 2015-12-30 2018-12-18 Taiwan Semiconductor Manufacturing Company Limited Circuits and structures including tap cells and fabrication methods thereof
US10032763B2 (en) 2016-06-02 2018-07-24 Qualcomm Incorporated Bulk cross-coupled high density power supply decoupling capacitor
US10740527B2 (en) 2017-09-06 2020-08-11 Apple Inc. Semiconductor layout in FinFET technologies
US11244895B2 (en) 2020-06-01 2022-02-08 Qualcomm Incorporated Intertwined well connection and decoupling capacitor layout structure for integrated circuits
TW202604262A (zh) * 2024-03-12 2026-01-16 日商新唐科技日本股份有限公司 去耦合電容元件

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223722A (ja) * 1998-02-25 2000-08-11 Citizen Watch Co Ltd Mis型可変容量コンデンサおよびそれを用いた温度補償型発振器
US20020117720A1 (en) * 2001-02-28 2002-08-29 David Lee Method of fabricating a MOS capacitor
JP2007157892A (ja) * 2005-12-02 2007-06-21 Nec Electronics Corp 半導体集積回路およびその製造方法
JP2007299860A (ja) * 2006-04-28 2007-11-15 Nec Electronics Corp 半導体装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0174313B1 (ko) * 1994-07-27 1999-02-01 스기야마 가즈히꼬 Mos 커패시터와 그 제조방법
US6239662B1 (en) * 1998-02-25 2001-05-29 Citizen Watch Co., Ltd. Mis variable capacitor and temperature-compensated oscillator using the same
US6475838B1 (en) * 2000-03-14 2002-11-05 International Business Machines Corporation Methods for forming decoupling capacitors
JP2003297940A (ja) * 2002-03-29 2003-10-17 Kawasaki Microelectronics Kk Mos型可変容量素子および集積回路
US20050035410A1 (en) 2003-08-15 2005-02-17 Yee-Chia Yeo Semiconductor diode with reduced leakage
US7301217B2 (en) 2004-04-23 2007-11-27 Taiwan Semiconductor Manufacturing Co., Ltd. Decoupling capacitor design
US7825447B2 (en) * 2004-04-28 2010-11-02 Semiconductor Energy Laboratory Co., Ltd. MOS capacitor and semiconductor device
US7378705B2 (en) 2005-09-01 2008-05-27 Honeywell International, Inc. Single-poly EEPROM cell with lightly doped MOS capacitors

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223722A (ja) * 1998-02-25 2000-08-11 Citizen Watch Co Ltd Mis型可変容量コンデンサおよびそれを用いた温度補償型発振器
US20020117720A1 (en) * 2001-02-28 2002-08-29 David Lee Method of fabricating a MOS capacitor
JP2007157892A (ja) * 2005-12-02 2007-06-21 Nec Electronics Corp 半導体集積回路およびその製造方法
JP2007299860A (ja) * 2006-04-28 2007-11-15 Nec Electronics Corp 半導体装置

Also Published As

Publication number Publication date
CN102754214A (zh) 2012-10-24
EP2534690B1 (en) 2021-03-31
EP2534690A1 (en) 2012-12-19
KR20120121914A (ko) 2012-11-06
WO2011106176A1 (en) 2011-09-01
JP2013520016A (ja) 2013-05-30
US8227846B2 (en) 2012-07-24
US20110198677A1 (en) 2011-08-18

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