KR101697720B1 - 연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 - Google Patents
연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 Download PDFInfo
- Publication number
- KR101697720B1 KR101697720B1 KR1020127023803A KR20127023803A KR101697720B1 KR 101697720 B1 KR101697720 B1 KR 101697720B1 KR 1020127023803 A KR1020127023803 A KR 1020127023803A KR 20127023803 A KR20127023803 A KR 20127023803A KR 101697720 B1 KR101697720 B1 KR 101697720B1
- Authority
- KR
- South Korea
- Prior art keywords
- well
- ties
- concentration
- dopant
- implant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/62—Capacitors having potential barriers
- H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/68—Capacitors having no potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
- H10D84/217—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors of only conductor-insulator-semiconductor capacitors
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/705,185 US8227846B2 (en) | 2010-02-12 | 2010-02-12 | Systems and methods for a continuous-well decoupling capacitor |
| US12/705,185 | 2010-02-12 | ||
| PCT/US2011/024522 WO2011106176A1 (en) | 2010-02-12 | 2011-02-11 | Systems and methods for a continuous-well decoupling capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20120121914A KR20120121914A (ko) | 2012-11-06 |
| KR101697720B1 true KR101697720B1 (ko) | 2017-01-18 |
Family
ID=43937842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127023803A Expired - Fee Related KR101697720B1 (ko) | 2010-02-12 | 2011-02-11 | 연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8227846B2 (https=) |
| EP (1) | EP2534690B1 (https=) |
| JP (1) | JP2013520016A (https=) |
| KR (1) | KR101697720B1 (https=) |
| CN (1) | CN102754214A (https=) |
| WO (1) | WO2011106176A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9082886B2 (en) * | 2011-05-12 | 2015-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Adding decoupling function for tap cells |
| US10157910B2 (en) * | 2015-12-30 | 2018-12-18 | Taiwan Semiconductor Manufacturing Company Limited | Circuits and structures including tap cells and fabrication methods thereof |
| US10032763B2 (en) | 2016-06-02 | 2018-07-24 | Qualcomm Incorporated | Bulk cross-coupled high density power supply decoupling capacitor |
| US10740527B2 (en) | 2017-09-06 | 2020-08-11 | Apple Inc. | Semiconductor layout in FinFET technologies |
| US11244895B2 (en) | 2020-06-01 | 2022-02-08 | Qualcomm Incorporated | Intertwined well connection and decoupling capacitor layout structure for integrated circuits |
| TW202604262A (zh) * | 2024-03-12 | 2026-01-16 | 日商新唐科技日本股份有限公司 | 去耦合電容元件 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223722A (ja) * | 1998-02-25 | 2000-08-11 | Citizen Watch Co Ltd | Mis型可変容量コンデンサおよびそれを用いた温度補償型発振器 |
| US20020117720A1 (en) * | 2001-02-28 | 2002-08-29 | David Lee | Method of fabricating a MOS capacitor |
| JP2007157892A (ja) * | 2005-12-02 | 2007-06-21 | Nec Electronics Corp | 半導体集積回路およびその製造方法 |
| JP2007299860A (ja) * | 2006-04-28 | 2007-11-15 | Nec Electronics Corp | 半導体装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0174313B1 (ko) * | 1994-07-27 | 1999-02-01 | 스기야마 가즈히꼬 | Mos 커패시터와 그 제조방법 |
| US6239662B1 (en) * | 1998-02-25 | 2001-05-29 | Citizen Watch Co., Ltd. | Mis variable capacitor and temperature-compensated oscillator using the same |
| US6475838B1 (en) * | 2000-03-14 | 2002-11-05 | International Business Machines Corporation | Methods for forming decoupling capacitors |
| JP2003297940A (ja) * | 2002-03-29 | 2003-10-17 | Kawasaki Microelectronics Kk | Mos型可変容量素子および集積回路 |
| US20050035410A1 (en) | 2003-08-15 | 2005-02-17 | Yee-Chia Yeo | Semiconductor diode with reduced leakage |
| US7301217B2 (en) | 2004-04-23 | 2007-11-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Decoupling capacitor design |
| US7825447B2 (en) * | 2004-04-28 | 2010-11-02 | Semiconductor Energy Laboratory Co., Ltd. | MOS capacitor and semiconductor device |
| US7378705B2 (en) | 2005-09-01 | 2008-05-27 | Honeywell International, Inc. | Single-poly EEPROM cell with lightly doped MOS capacitors |
-
2010
- 2010-02-12 US US12/705,185 patent/US8227846B2/en active Active
-
2011
- 2011-02-11 EP EP11704012.1A patent/EP2534690B1/en active Active
- 2011-02-11 JP JP2012553032A patent/JP2013520016A/ja active Pending
- 2011-02-11 KR KR1020127023803A patent/KR101697720B1/ko not_active Expired - Fee Related
- 2011-02-11 CN CN2011800087480A patent/CN102754214A/zh active Pending
- 2011-02-11 WO PCT/US2011/024522 patent/WO2011106176A1/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223722A (ja) * | 1998-02-25 | 2000-08-11 | Citizen Watch Co Ltd | Mis型可変容量コンデンサおよびそれを用いた温度補償型発振器 |
| US20020117720A1 (en) * | 2001-02-28 | 2002-08-29 | David Lee | Method of fabricating a MOS capacitor |
| JP2007157892A (ja) * | 2005-12-02 | 2007-06-21 | Nec Electronics Corp | 半導体集積回路およびその製造方法 |
| JP2007299860A (ja) * | 2006-04-28 | 2007-11-15 | Nec Electronics Corp | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102754214A (zh) | 2012-10-24 |
| EP2534690B1 (en) | 2021-03-31 |
| EP2534690A1 (en) | 2012-12-19 |
| KR20120121914A (ko) | 2012-11-06 |
| WO2011106176A1 (en) | 2011-09-01 |
| JP2013520016A (ja) | 2013-05-30 |
| US8227846B2 (en) | 2012-07-24 |
| US20110198677A1 (en) | 2011-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9443843B2 (en) | Integrated circuit device | |
| US8896087B2 (en) | Shallow trench isolation area having buried capacitor | |
| US20090166721A1 (en) | Quasi-vertical gated npn-pnp esd protection device | |
| KR101697720B1 (ko) | 연속적인 웰 디커플링 커패시터를 위한 시스템 및 방법 | |
| CN106952943A (zh) | 包括分接头单元的电路 | |
| US20140176216A1 (en) | Integrated circuit comprising a clock tree cell | |
| KR101055710B1 (ko) | 평면 후면 게이트 cmos의 고성능 커패시터 | |
| US7301217B2 (en) | Decoupling capacitor design | |
| CN103943612B (zh) | 静电放电保护装置 | |
| US9337179B2 (en) | Electrostatic discharge protection circuit | |
| TWI648860B (zh) | 具有降低電容可變性的半導體設備中的電容結構 | |
| US8143644B2 (en) | Bipolar device compatible with CMOS process technology | |
| KR20160149430A (ko) | 고비저항 기판 상에 형성된 수동 소자 및 무선 주파수 모듈 | |
| US9972673B2 (en) | Electrostatic discharge protection device | |
| US9679889B2 (en) | Semiconductor device including electrostatic discharge (ESD) protection circuit and manufacturing method thereof | |
| CN101635298B (zh) | 平面工艺的三维集成电路 | |
| US20080093677A1 (en) | Semiconductor devices and methods of fabricating the same | |
| JP2007157892A (ja) | 半導体集積回路およびその製造方法 | |
| US20200013901A1 (en) | Substrate contact for a transistor, intended in particular for a matrix-array arrangement | |
| US7420248B2 (en) | Programmable random logic arrays using PN isolation | |
| CN121357999A (zh) | 高压pnp结构静电防护器件 | |
| JP2012174999A (ja) | 半導体装置及びその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| AMND | Amendment | ||
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-3-3-R10-R18-oth-X000 |
|
| A201 | Request for examination | ||
| AMND | Amendment | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| A302 | Request for accelerated examination | ||
| PA0302 | Request for accelerated examination |
St.27 status event code: A-1-2-D10-D17-exm-PA0302 St.27 status event code: A-1-2-D10-D16-exm-PA0302 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| T11-X000 | Administrative time limit extension requested |
St.27 status event code: U-3-3-T10-T11-oth-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
|
| AMND | Amendment | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
St.27 status event code: N-2-6-B10-B15-exm-PE0601 |
|
| X091 | Application refused [patent] | ||
| T11-X000 | Administrative time limit extension requested |
St.27 status event code: U-3-3-T10-T11-oth-X000 |
|
| AMND | Amendment | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PX0901 | Re-examination |
St.27 status event code: A-2-3-E10-E12-rex-PX0901 |
|
| PX0701 | Decision of registration after re-examination |
St.27 status event code: A-3-4-F10-F13-rex-PX0701 |
|
| X701 | Decision to grant (after re-examination) | ||
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U12-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: A-4-4-U10-U13-oth-PC1903 Not in force date: 20200113 Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date: 20200113 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |