JP2013520016A - 連続ウェルデカップリングコンデンサのためのシステムおよび方法 - Google Patents
連続ウェルデカップリングコンデンサのためのシステムおよび方法 Download PDFInfo
- Publication number
- JP2013520016A JP2013520016A JP2012553032A JP2012553032A JP2013520016A JP 2013520016 A JP2013520016 A JP 2013520016A JP 2012553032 A JP2012553032 A JP 2012553032A JP 2012553032 A JP2012553032 A JP 2012553032A JP 2013520016 A JP2013520016 A JP 2013520016A
- Authority
- JP
- Japan
- Prior art keywords
- well
- connections
- high dose
- conductor
- dose implant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims description 14
- 239000007943 implant Substances 0.000 claims abstract description 40
- 239000004020 conductor Substances 0.000 claims abstract description 30
- 239000002019 doping agent Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims description 19
- 238000009792 diffusion process Methods 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000013461 design Methods 0.000 description 7
- 238000002513 implantation Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002999 depolarising effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/62—Capacitors having potential barriers
- H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/68—Capacitors having no potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
- H10D84/217—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors of only conductor-insulator-semiconductor capacitors
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/705,185 US8227846B2 (en) | 2010-02-12 | 2010-02-12 | Systems and methods for a continuous-well decoupling capacitor |
| US12/705,185 | 2010-02-12 | ||
| PCT/US2011/024522 WO2011106176A1 (en) | 2010-02-12 | 2011-02-11 | Systems and methods for a continuous-well decoupling capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013520016A true JP2013520016A (ja) | 2013-05-30 |
| JP2013520016A5 JP2013520016A5 (https=) | 2014-03-13 |
Family
ID=43937842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012553032A Pending JP2013520016A (ja) | 2010-02-12 | 2011-02-11 | 連続ウェルデカップリングコンデンサのためのシステムおよび方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8227846B2 (https=) |
| EP (1) | EP2534690B1 (https=) |
| JP (1) | JP2013520016A (https=) |
| KR (1) | KR101697720B1 (https=) |
| CN (1) | CN102754214A (https=) |
| WO (1) | WO2011106176A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025192500A1 (ja) * | 2024-03-12 | 2025-09-18 | ヌヴォトンテクノロジージャパン株式会社 | デカップリング容量素子 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9082886B2 (en) * | 2011-05-12 | 2015-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Adding decoupling function for tap cells |
| US10157910B2 (en) * | 2015-12-30 | 2018-12-18 | Taiwan Semiconductor Manufacturing Company Limited | Circuits and structures including tap cells and fabrication methods thereof |
| US10032763B2 (en) | 2016-06-02 | 2018-07-24 | Qualcomm Incorporated | Bulk cross-coupled high density power supply decoupling capacitor |
| US10740527B2 (en) | 2017-09-06 | 2020-08-11 | Apple Inc. | Semiconductor layout in FinFET technologies |
| US11244895B2 (en) | 2020-06-01 | 2022-02-08 | Qualcomm Incorporated | Intertwined well connection and decoupling capacitor layout structure for integrated circuits |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223722A (ja) * | 1998-02-25 | 2000-08-11 | Citizen Watch Co Ltd | Mis型可変容量コンデンサおよびそれを用いた温度補償型発振器 |
| JP2003297940A (ja) * | 2002-03-29 | 2003-10-17 | Kawasaki Microelectronics Kk | Mos型可変容量素子および集積回路 |
| JP2005340791A (ja) * | 2004-04-28 | 2005-12-08 | Semiconductor Energy Lab Co Ltd | Mos容量素子及び半導体装置 |
| JP2007157892A (ja) * | 2005-12-02 | 2007-06-21 | Nec Electronics Corp | 半導体集積回路およびその製造方法 |
| JP2007299860A (ja) * | 2006-04-28 | 2007-11-15 | Nec Electronics Corp | 半導体装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0174313B1 (ko) * | 1994-07-27 | 1999-02-01 | 스기야마 가즈히꼬 | Mos 커패시터와 그 제조방법 |
| US6239662B1 (en) * | 1998-02-25 | 2001-05-29 | Citizen Watch Co., Ltd. | Mis variable capacitor and temperature-compensated oscillator using the same |
| US6475838B1 (en) * | 2000-03-14 | 2002-11-05 | International Business Machines Corporation | Methods for forming decoupling capacitors |
| US6621128B2 (en) | 2001-02-28 | 2003-09-16 | United Microelectronics Corp. | Method of fabricating a MOS capacitor |
| US20050035410A1 (en) | 2003-08-15 | 2005-02-17 | Yee-Chia Yeo | Semiconductor diode with reduced leakage |
| US7301217B2 (en) | 2004-04-23 | 2007-11-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Decoupling capacitor design |
| US7378705B2 (en) | 2005-09-01 | 2008-05-27 | Honeywell International, Inc. | Single-poly EEPROM cell with lightly doped MOS capacitors |
-
2010
- 2010-02-12 US US12/705,185 patent/US8227846B2/en active Active
-
2011
- 2011-02-11 EP EP11704012.1A patent/EP2534690B1/en active Active
- 2011-02-11 JP JP2012553032A patent/JP2013520016A/ja active Pending
- 2011-02-11 KR KR1020127023803A patent/KR101697720B1/ko not_active Expired - Fee Related
- 2011-02-11 CN CN2011800087480A patent/CN102754214A/zh active Pending
- 2011-02-11 WO PCT/US2011/024522 patent/WO2011106176A1/en not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223722A (ja) * | 1998-02-25 | 2000-08-11 | Citizen Watch Co Ltd | Mis型可変容量コンデンサおよびそれを用いた温度補償型発振器 |
| JP2003297940A (ja) * | 2002-03-29 | 2003-10-17 | Kawasaki Microelectronics Kk | Mos型可変容量素子および集積回路 |
| JP2005340791A (ja) * | 2004-04-28 | 2005-12-08 | Semiconductor Energy Lab Co Ltd | Mos容量素子及び半導体装置 |
| JP2007157892A (ja) * | 2005-12-02 | 2007-06-21 | Nec Electronics Corp | 半導体集積回路およびその製造方法 |
| JP2007299860A (ja) * | 2006-04-28 | 2007-11-15 | Nec Electronics Corp | 半導体装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025192500A1 (ja) * | 2024-03-12 | 2025-09-18 | ヌヴォトンテクノロジージャパン株式会社 | デカップリング容量素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102754214A (zh) | 2012-10-24 |
| EP2534690B1 (en) | 2021-03-31 |
| EP2534690A1 (en) | 2012-12-19 |
| KR20120121914A (ko) | 2012-11-06 |
| WO2011106176A1 (en) | 2011-09-01 |
| US8227846B2 (en) | 2012-07-24 |
| US20110198677A1 (en) | 2011-08-18 |
| KR101697720B1 (ko) | 2017-01-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8021941B2 (en) | Bias-controlled deep trench substrate noise isolation integrated circuit device structures | |
| KR20240045354A (ko) | Finfet 기술의 반도체 레이아웃 | |
| JP5000055B2 (ja) | 半導体装置 | |
| JP2013520016A (ja) | 連続ウェルデカップリングコンデンサのためのシステムおよび方法 | |
| TWI502702B (zh) | 半導體裝置 | |
| US9627502B2 (en) | Circuit arrangement and method of forming a circuit arrangement | |
| CN106952943A (zh) | 包括分接头单元的电路 | |
| US11935828B2 (en) | Integrated filler capacitor cell device and corresponding manufacturing method | |
| US9136264B2 (en) | MOS transistors having low offset values, electronic devices including the same, and methods of fabricating the same | |
| CN107564970A (zh) | Mos电容器、半导体制造方法以及mos电容器电路 | |
| KR100503937B1 (ko) | 반도체장치 | |
| KR101146201B1 (ko) | 용량 셀, 집적회로, 집적회로 설계 방법 및 집적회로 제조 방법 | |
| JP4149109B2 (ja) | 半導体集積回路装置およびその製造方法 | |
| CN114068725B (zh) | Pip电容器及pip电容器的制造方法 | |
| US9893049B2 (en) | Electrostatic discharge protection device | |
| US7417277B2 (en) | Semiconductor integrated circuit and method of manufacturing the same | |
| US6914300B2 (en) | Semiconductor device | |
| TWI506776B (zh) | 半導體裝置及其製造方法 | |
| JP2009071007A (ja) | 集積回路のレイアウト方法 | |
| JP2666712B2 (ja) | 半導体記憶装置 | |
| CN105355594A (zh) | 集成电路结构 | |
| JP2015005546A (ja) | 半導体装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140121 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140121 |
|
| A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20140121 |
|
| A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20140218 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140226 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140526 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140602 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140626 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140806 |