KR101674155B1 - Mlp(molded laser package) 상의 쓰루 몰드 비아 완화 거터를 갖는 장치 및 이를 형성하는 방법 - Google Patents
Mlp(molded laser package) 상의 쓰루 몰드 비아 완화 거터를 갖는 장치 및 이를 형성하는 방법 Download PDFInfo
- Publication number
- KR101674155B1 KR101674155B1 KR1020157021338A KR20157021338A KR101674155B1 KR 101674155 B1 KR101674155 B1 KR 101674155B1 KR 1020157021338 A KR1020157021338 A KR 1020157021338A KR 20157021338 A KR20157021338 A KR 20157021338A KR 101674155 B1 KR101674155 B1 KR 101674155B1
- Authority
- KR
- South Korea
- Prior art keywords
- solder balls
- molded package
- package device
- gutters
- molding layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/1012—Auxiliary members for bump connectors, e.g. spacers
- H01L2224/10122—Auxiliary members for bump connectors, e.g. spacers being formed on the semiconductor or solid-state body to be connected
- H01L2224/10145—Flow barriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/119—Methods of manufacturing bump connectors involving a specific sequence of method steps
- H01L2224/1191—Forming a passivation layer after forming the bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13021—Disposition the bump connector being disposed in a recess of the surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13022—Disposition the bump connector being at least partially embedded in the surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81193—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
- H01L2224/81815—Reflow soldering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/38—Effects and problems related to the device integration
- H01L2924/384—Bump effects
- H01L2924/3841—Solder bridging
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0302—Properties and characteristics in general
- H05K2201/0305—Solder used for other purposes than connections between PCB or components, e.g. for filling vias or for programmable patterns
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361751313P | 2013-01-11 | 2013-01-11 | |
| US61/751,313 | 2013-01-11 | ||
| US13/777,298 | 2013-02-26 | ||
| US13/777,298 US9313881B2 (en) | 2013-01-11 | 2013-02-26 | Through mold via relief gutter on molded laser package (MLP) packages |
| PCT/US2014/011230 WO2014110482A1 (en) | 2013-01-11 | 2014-01-13 | Through mold via relief gutter on molded laser package (mlp) packages |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20150104190A KR20150104190A (ko) | 2015-09-14 |
| KR101674155B1 true KR101674155B1 (ko) | 2016-11-08 |
Family
ID=51164316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020157021338A Active KR101674155B1 (ko) | 2013-01-11 | 2014-01-13 | Mlp(molded laser package) 상의 쓰루 몰드 비아 완화 거터를 갖는 장치 및 이를 형성하는 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9313881B2 (enExample) |
| EP (1) | EP2943977A1 (enExample) |
| JP (1) | JP6019252B2 (enExample) |
| KR (1) | KR101674155B1 (enExample) |
| CN (1) | CN104919587B (enExample) |
| WO (1) | WO2014110482A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140139332A (ko) * | 2013-05-27 | 2014-12-05 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
| JP6544354B2 (ja) * | 2014-06-27 | 2019-07-17 | ソニー株式会社 | 半導体装置の製造方法 |
| US10032652B2 (en) * | 2014-12-05 | 2018-07-24 | Advanced Semiconductor Engineering, Inc. | Semiconductor package having improved package-on-package interconnection |
| US10090241B2 (en) * | 2015-05-29 | 2018-10-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Device, package structure and method of forming the same |
| CN106872575B (zh) * | 2017-01-05 | 2020-01-14 | 航天科工防御技术研究试验中心 | 一种塑封器件分层缺陷的分级风险评价方法 |
| TW201837420A (zh) * | 2017-04-14 | 2018-10-16 | 雙鴻科技股份有限公司 | 均溫板 |
| US10629536B2 (en) | 2018-04-05 | 2020-04-21 | Micron Technology, Inc. | Through-core via |
| CN111112835A (zh) * | 2018-10-31 | 2020-05-08 | 东莞新科技术研究开发有限公司 | 一种激光分束装置和激光焊接方法 |
| KR102688571B1 (ko) | 2019-06-20 | 2024-07-25 | 삼성전자주식회사 | 반도체 패키지 |
| US12027467B2 (en) * | 2021-01-29 | 2024-07-02 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method of manufacturing the same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020167085A1 (en) | 1999-04-06 | 2002-11-14 | Shinji Ohuchi | Semiconductor device and method of fabricating the same |
| US20100100706A1 (en) | 2006-11-02 | 2010-04-22 | Nec Corporation | Multiple processor system, system structuring method in multiple processor system and program thereof |
| US20120153499A1 (en) | 2010-12-21 | 2012-06-21 | Samsung Electronics Co., Ltd. | Semiconductor package and package on package having the same |
| US8222538B1 (en) | 2009-06-12 | 2012-07-17 | Amkor Technology, Inc. | Stackable via package and method |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4706167A (en) * | 1983-11-10 | 1987-11-10 | Telemark Co., Inc. | Circuit wiring disposed on solder mask coating |
| US4996391A (en) * | 1988-09-30 | 1991-02-26 | Siemens Aktiengesellschaft | Printed circuit board having an injection molded substrate |
| US5386627A (en) * | 1992-09-29 | 1995-02-07 | International Business Machines Corporation | Method of fabricating a multi-layer integrated circuit chip interposer |
| US5784782A (en) | 1996-09-06 | 1998-07-28 | International Business Machines Corporation | Method for fabricating printed circuit boards with cavities |
| US6329605B1 (en) * | 1998-03-26 | 2001-12-11 | Tessera, Inc. | Components with conductive solder mask layers |
| JP2001053111A (ja) * | 1999-08-10 | 2001-02-23 | Matsushita Electric Works Ltd | フリップチップ実装構造 |
| US20020093089A1 (en) | 1999-12-01 | 2002-07-18 | Dau-Tsyong Lu | Compliant mounting interface for electronic devices |
| US6562656B1 (en) * | 2001-06-25 | 2003-05-13 | Thin Film Module, Inc. | Cavity down flip chip BGA |
| US6854633B1 (en) * | 2002-02-05 | 2005-02-15 | Micron Technology, Inc. | System with polymer masking flux for fabricating external contacts on semiconductor components |
| JP3819806B2 (ja) * | 2002-05-17 | 2006-09-13 | 富士通株式会社 | バンプ電極付き電子部品およびその製造方法 |
| US6787443B1 (en) * | 2003-05-20 | 2004-09-07 | Intel Corporation | PCB design and method for providing vented blind vias |
| TWI230994B (en) * | 2004-02-25 | 2005-04-11 | Via Tech Inc | Circuit carrier |
| US20090071707A1 (en) * | 2007-08-15 | 2009-03-19 | Tessera, Inc. | Multilayer substrate with interconnection vias and method of manufacturing the same |
| JP2009302505A (ja) * | 2008-05-15 | 2009-12-24 | Panasonic Corp | 半導体装置、および半導体装置の製造方法 |
| US8507376B2 (en) * | 2008-10-21 | 2013-08-13 | Atotech Deutschland Gmbh | Method to form solder deposits on substrates |
| WO2010100706A1 (ja) | 2009-03-05 | 2010-09-10 | パナソニック株式会社 | 半導体装置 |
| JP5379527B2 (ja) * | 2009-03-19 | 2013-12-25 | パナソニック株式会社 | 半導体装置 |
| JP5481724B2 (ja) * | 2009-12-24 | 2014-04-23 | 新光電気工業株式会社 | 半導体素子内蔵基板 |
| CN102237330B (zh) * | 2010-05-07 | 2015-08-05 | 三星电子株式会社 | 晶片级封装 |
| KR101680082B1 (ko) * | 2010-05-07 | 2016-11-29 | 삼성전자 주식회사 | 웨이퍼 레벨 패키지 및 웨이퍼 레벨 패키지의 형성방법 |
| US8492896B2 (en) * | 2010-05-21 | 2013-07-23 | Panasonic Corporation | Semiconductor apparatus and semiconductor apparatus unit |
-
2013
- 2013-02-26 US US13/777,298 patent/US9313881B2/en active Active
-
2014
- 2014-01-13 JP JP2015552852A patent/JP6019252B2/ja not_active Expired - Fee Related
- 2014-01-13 CN CN201480004416.9A patent/CN104919587B/zh not_active Expired - Fee Related
- 2014-01-13 KR KR1020157021338A patent/KR101674155B1/ko active Active
- 2014-01-13 EP EP14702151.3A patent/EP2943977A1/en not_active Withdrawn
- 2014-01-13 WO PCT/US2014/011230 patent/WO2014110482A1/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020167085A1 (en) | 1999-04-06 | 2002-11-14 | Shinji Ohuchi | Semiconductor device and method of fabricating the same |
| US20100100706A1 (en) | 2006-11-02 | 2010-04-22 | Nec Corporation | Multiple processor system, system structuring method in multiple processor system and program thereof |
| US8222538B1 (en) | 2009-06-12 | 2012-07-17 | Amkor Technology, Inc. | Stackable via package and method |
| US20120153499A1 (en) | 2010-12-21 | 2012-06-21 | Samsung Electronics Co., Ltd. | Semiconductor package and package on package having the same |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014110482A1 (en) | 2014-07-17 |
| US20140196940A1 (en) | 2014-07-17 |
| KR20150104190A (ko) | 2015-09-14 |
| CN104919587B (zh) | 2019-12-13 |
| EP2943977A1 (en) | 2015-11-18 |
| CN104919587A (zh) | 2015-09-16 |
| JP2016503242A (ja) | 2016-02-01 |
| US9313881B2 (en) | 2016-04-12 |
| JP6019252B2 (ja) | 2016-11-02 |
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