KR101660056B1 - Method for provisional fixing/release of member and adhesive for provisional fixing suitable therefor - Google Patents

Abstract

The present invention provides a temporary fixing method capable of obtaining a special effect in terms of dimensional accuracy of a processed member. A step of applying a fixing adhesive to the fixing member; a mounting step of mounting the member to be processed on the temporary fixing adhesive; and a step of irradiating at least one of visible light or ultraviolet light to the temporary fixing adhesive after the mounting step to increase the adhesive force of the fixing adhesive And a pressure step of applying pressure at one or both of the stationary member and the member to be processed, wherein the pressure step and the irradiation step are carried out at least for a predetermined period of time. The temporary fixing adhesive is a composition containing (A) a polyfunctional (meth) acrylate, (B) a monofunctional (meth) acrylate and (C) a photopolymerization initiator.

Description

TECHNICAL FIELD [0001] The present invention relates to a method for temporarily fixing and peeling a member, and an adhesive suitable for the same. BACKGROUND OF THE INVENTION 1. Field of the Invention [0001]

The present invention relates to a temporary fixing / peeling method for processing various members, and also relates to a temporary fixing adhesive for temporary fixing. For example, a method and a peeling method for temporarily fixing the member when processing an optical member, and an adhesive for hardening the photo-curable hard coat suitable for the application.

BACKGROUND ART [0002] Double-sided tape or hot melt adhesive is used as an adhesive for temporarily fixing optical lenses, prisms, arrays, silicon wafers, and semiconductor mounting parts. Thereby manufacturing a member. For example, in a semiconductor mounting component, these components are fixed to a substrate with a double-sided tape, then a desired component is cut, and ultraviolet rays are further applied to the double-sided tape to peel off the component. In the case of a hot-melt adhesive, after the member is bonded, the adhesive is infiltrated into the gap by heating, and then a desired part is cut and the adhesive is peeled off from the organic solvent.

However, in the case of the double-sided tape, it is difficult to obtain dimensional accuracy or the bonding strength is weak, so that there is a problem that chipping can not be performed at the time of part processing or peeling can not be performed unless heat of 100 deg. There has been a problem in that when peeling is performed by ultraviolet irradiation, peeling can not be performed if the permeability of the adherend is insufficient.

In the case of the hot-melt adhesive, it is necessary to use an organic solvent at the time of peeling, and the cleaning process of the alkali solution and the halogen-based organic solvent is troublesome, and also has a problem in terms of work environment.

In order to solve such drawbacks, a photo-curing or heating type adhesive for temporary fixing containing a water-soluble compound such as a water-soluble vinyl monomer has been proposed. In the temporary fixation method using these adhesives, the peelability in water (water) is solved, but the adhesive strength at the time of component fixation is low and the dimensional accuracy of the member after cutting is insufficient.

An adhesive for temporarily fixing has been proposed in which adhesiveness is improved by using a specific (meth) acrylate having a high hydrophilicity and at the same time, the releasability is improved by swelling or partial dissolution. The adhesive for temporary fixing needs to be cooled with a large amount of water to generate frictional heat between the component and a cutting jig such as a blade or a diamond cutter at the time of cutting. In the above-mentioned composition having a high hydrophilicity, the cured product swells and becomes flexible at the time of cutting, so that there is a problem that a higher dimensional precision can not be attained. In addition, since the cured product partially dissolved in the peeled member remains the adhesive, it is apparently problematic (see Patent Documents 1, 2 and 3).

Japanese Patent Application Laid-Open No. 6-116534 Japanese Patent Application Laid-Open No. 11-71553 Japanese Patent Application Laid-Open No. 2001-226641

It is hydrophobic and has high adhesive strength to improve the dimensional accuracy of the member after cutting, and has excellent peeling property in water, so that there is no residual adhesive on the member after peeling, and the peeling method and the peeling method There has been a demand for a temporary fixing adhesive.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the prior art, and as a result, it has been found that it is necessary to apply pressure to one or both of the stationary member and the member to be processed, It is possible to obtain an excellent dimensional accuracy at the time of processing, and thus the present invention can be achieved.

That is, the present invention has the following constitution.

(1) applying a fixing adhesive to a fixing member (hereinafter referred to as a coating process), mounting a member to be processed on a temporary fixing adhesive (hereinafter referred to as mounting process), and (Hereinafter referred to as an irradiating step) for irradiating at least one of a light beam and an ultraviolet ray and increasing the adhesive force of the fixing adhesive, and applying pressure from one or both of the fixing member and the member to be processed Wherein the applying of the pressure and the irradiation are performed for at least a predetermined time at the same time.

(2) applying a fixing adhesive to a member to be processed (hereinafter referred to as a coating process), mounting a fixing member on a temporary fixing adhesive (hereinafter referred to as a mounting process), and (Hereinafter referred to as an irradiating step) for irradiating at least one of a light beam and an ultraviolet ray and increasing the adhesive force of the fixing adhesive, and applying pressure from one or both of the fixing member and the member to be processed Wherein the applying of the pressure and the irradiation are performed for at least a predetermined time at the same time.

(3) The temporary fixing method according to the above (1) or (2), wherein the pressure applied from one or both of the fixing member and the member to be processed is controlled to 1 g / cm 2 to 1000 kg / cm 2.

(4) The temporary fixing method according to the above (1) or (3), wherein at least one of the fixing member, the temporary fixing adhesive, and the member to be processed is controlled at 0 캜 or more and 150 캜 or less.

(5) The adhesive for temporary fixation according to any one of (1) to (4) above, which is a composition containing (A) a polyfunctional (meth) acrylate, (B) a monofunctional (meth) acrylate and (C) ≪ / RTI >

(6) The temporary fixing method according to (5) above, wherein (A) and (B) are both hydrophobic.

(7) The temporary fixing method according to any one of (1) to (6) above, wherein the adhesive agent for temporary fixing has a glass transition temperature of -50 占 폚 to 50 占 폚.

(8) The adhesive for fixing comprises 1 to 90 parts by weight of (A), 10 to 99 parts by weight of (B), and a total amount of (A) and (B) in 100 parts by weight of the total amount of (A) The temporary fixing method according to any one of (5) to (7) above, which comprises (C) in an amount of 0.1 to 30 parts by weight per 100 parts by weight.

(9) The adhesive for temporary fixing according to any one of (5) to (6), wherein the particulate material (D) which is insoluble in (A) to (C) is contained in an amount of 0.1 to 20 parts by weight based on 100 parts by weight of the total amount of (A) (8). ≪ / RTI >

(10) The temporary fixing method according to (9), wherein the particulate material (D) not soluble in (A) to (C) has a spherical shape.

(11) A process for producing a particulate material, wherein the particulate material (D) which is not soluble in (A) to (C) is any one of crosslinked polymethyl methacrylate particles, crosslinked polystyrene particles and crosslinked polymethyl methacrylate methylpolystyrene copolymer particles or a mixture thereof The temporary fixing method according to (9) or (10) above.

(12) The temporary fixing method according to any one of (9) to (11), wherein the particulate material (D) not soluble in (A) to (C) has an average particle diameter of 5 to 200 μm.

(13) When the standard deviation of the particle volume distribution with respect to the particle diameter when the particle diameter (mu m) according to the laser diffraction method of the particulate material (D) not soluble in (A) to (C) (12) above, in the range of from 10 to 20% by weight.

(14) The temporarily fixed member is processed by using the temporary fixing method according to any one of the above items (1) to (13), and the processed member is immersed in hot water at 100 DEG C or less, And a method of temporarily fixing and separating a member including removing the member.

(15) The temporarily fixed member is processed by using the temporary fixing method described in any one of (1) to (13) above, and visible light or ultraviolet light is applied to the temporary fixing adhesive, Or less, and removing the cured product of the composition.

(16) The temporary fixing method according to any one of (1) to (13), wherein the irradiation amount of visible light or ultraviolet light is in a range of 1 mJ / cm2 to 4000 mJ / cm2 at a wavelength of 365 nm.

(17) The method according to (15), wherein the irradiation amount of the visible light or ultraviolet light irradiated after the temporarily fixed member is in the range of 1000 mJ / cm2 to 40000 mJ / cm2 at a wavelength of 365 nm Peeling method.

(18) The positive resist composition as described in any one of (5) to (13) above, wherein (A) the polyfunctional (meth) acrylate contains a polyfunctional (meth) acrylate oligomer / polymer and / or a bifunctional (meth) ≪ / RTI >

(19) The polymerizable monomer as described in any one of (5) to (13) above, wherein (A) the polyfunctional (meth) acrylate contains a polyfunctional (meth) acrylate oligomer / polymer and a bifunctional (meth) Fixed method.

(20) The temporary fixing agent according to the above (18) or (19), wherein the polyfunctional (meth) acrylate oligomer / polymer contains polyester-based urethane (meth) acrylate and / or polyether- Way.

(21) The process according to (18) or (19) above, wherein the bifunctional (meth) acrylate monomer comprises 1,6-hexanediol di (meth) acrylate and / or dicyclopentanyl di The correct method.

(22) The positive resist composition as described in the above item (1), wherein the monofunctional (meth) acrylate (B) is at least one compound selected from the group consisting of phenol ethylene oxide 2-moles modified (meth) acrylate and / or 2- (1,2-cyclohexacarboximide) ethyl The temporary fixing method according to any one of (5) to (13).

(23) The positive resist composition as described in (5) above, wherein (B) the monofunctional (meth) acrylate contains 2 mol of a phenol ethylene oxide-modified (meth) acrylate and 2- (1,2-cyclohexacarboximide) ethyl To (13).

(24) The method according to (24), wherein the photopolymerization initiator is selected from the group consisting of benzyldimethyl ketal, oxy-phenyl-acetic acid 2- [2-oxo-2-phenyl-acetoxy- ethoxy] (5) to (13) above, which contains at least one member selected from the group consisting of esters, esters, and esters thereof.

According to the temporary fixing method of the present invention, by performing the pressure process and the irradiation process at least for a predetermined period of time, special effects can be obtained in terms of dimensional accuracy of the member to be processed.

In the present invention, the coating step applies a temporary adhesive to the fixing member or the member to be processed. In the present coating step, any known coating method may be used, but it is preferable to apply an appropriate amount of adhesive to the bonding surface of one fixed member or the fixed member to be fixed. The application amount of the adhesive is preferably 0.00000001 to 0.1 mg / mm2, more preferably 0.000001 to 0.001 mg / mm2. The method of applying an appropriate amount is not particularly limited as long as it is a known method, and for example, a method using a coater is preferable in terms of convenience, accuracy, and productivity.

In the present invention, the mounting step is a step of mounting the member to be processed or the fixing member on the fixed member coated with the temporary fixing adhesive or the adhesive for temporarily fixing on the member to be processed after the coating process. The mounting step is not particularly limited as long as it is a known method, and for example, a process using an automatic mounting apparatus such as an industrial robot is preferable in terms of simplicity, accuracy, and productivity.

In the temporary fixing method of the present invention, the fluidity of the temporary fixing adhesive can be controlled by controlling at least one of the fixing member, the temporary fixing adhesive, and the member to be processed at 0 캜 or more and 150 캜 or less. When the fixing member, the fixing agent for temporary fixing, and the member to be processed have a temperature of 0 ° C or more, the fluidity is excellent. When the temperature is 150 ° C or less, the temporary fixing agent does not polymerize due to thermal curing. But is preferably 10 ° C or more and 100 ° C or less, and still more preferably 20 ° C or more and 80 ° C or less from the viewpoints of fluidity and dimensional accuracy. Still more preferably 20 deg. C or more and 60 deg. C or less.

The pressure process of the present invention is preferably a process of applying pressure at one or both of the stationary member and the member to be processed and more preferably a process of applying pressure at one or both sides so as to make the distance between the stationary member and the member to be processed uniform. In the present pressure step, there is no particular limitation as long as it is a known method. For example, a method of pressurizing by using a vacuum press or a press press is preferable.

The uniformity in the present invention means that the difference obtained by subtracting the smallest portion from the largest gap between the fixing member and the member to be processed is within a range of 40 占 퐉 or less. Within this range, good dimensional accuracy can be obtained when the member to be processed is machined. The difference obtained by subtracting the smallest portion from the largest gap between the fixing member and the member to be processed is preferably within a range of 20 占 퐉 or less and more preferably within a range of 10 占 퐉 or less from the viewpoint of dimensional accuracy, And still more preferably within the following range.

In the pressure step of the present invention, it is preferable to apply pressure of 1 g / cm 2 or more and 1000 kg / cm 2 or less at one or both of the stationary member and the member to be processed. When the distance between the fixing member and the member to be processed is uniform, there is no problem even if a pressure is locally applied to the fixing member and the member to be processed. However, it is preferable from the viewpoint of the distance between the fixing member and the member to be processed. If the applied pressure is 1 g / cm 2 or more, the distance between the fixing member and the member to be processed can be made uniform. If the pressure is 1000 kg / cm 2 or less, the fixing member and the member to be processed are not damaged. More preferably not less than 3 g / cm 2 and not more than 800 kg / cm 2, more preferably not less than 5 g / cm 2 and not more than 500 kg / cm 2 from the viewpoints of uniformity of the distance between the fixing member and the member to be processed, Or more and 300 kg / cm 2 or less.

Further, in the present invention, an irradiation step for irradiating at least one of visible light or ultraviolet light to the temporary fixing adhesive is required to increase the adhesive force of the fixing adhesive. The lamp used in the irradiation step and the re-examination step to be described later is not particularly limited as long as it increases the adhesive force of the temporary fixing adhesive. However, a black lamp, a metal halide lamp, a high pressure mercury lamp, an LED lamp, or the like capable of irradiating ultraviolet rays having a wavelength of 365 nm desirable. The wavelength of ultraviolet rays is preferably 10 to 430 nm, more preferably 200 to 420 nm, and most preferably 330 to 405 nm.

In the irradiation step of the present invention, the irradiation amount of visible light or ultraviolet light is preferably in the range of 1 mJ / cm 2 to 4000 mJ / cm 2 at a wavelength of 365 nm. Within this range, good dimensional accuracy can be obtained when the member to be processed is machined. Is preferably in the range of 10 mJ / cm 2 to 3000 mJ / cm 2 from the viewpoint of dimensional accuracy, more preferably in the range of 100 mJ / cm 2 to 2,000 mJ / cm 2, more preferably in the range of from 300 mJ / Even more preferable.

In the present invention, it is preferable to carry out the irradiation process during the pressure process at least for a predetermined time. The interval between the fixing member and the member to be processed becomes uniform by performing the irradiation process during the pressure process at least for a predetermined period of time, so that a remarkable effect can be obtained in terms of dimensional accuracy during processing of the member to be processed. The term "machining" as used herein refers to, for example, cutting, grinding, polishing, drilling, or the like into a desired shape of a member to be machined. The constant time referred to herein is not particularly limited as long as it includes a period of hardening. It is preferable to perform the pressure process and the irradiation process at the same time after the pressure process is performed in advance because the interval between the fixing member and the member to be processed can be made uniform.

In the present invention, the material of the member to be processed and the fixing member is not particularly limited, but a member made of a material capable of transmitting ultraviolet rays or visible light is preferable. Such materials include a crystal member, a glass member, a plastic member, and the like.

(A) polyfunctional (meth) acrylates used in the present invention include polyfunctional (meth) acrylate oligomers / polymers having two or more (meth) acryloylated oligomers / polymer terminals or side chains or two or more ) Acryloyl groups may be used.

Examples of the polyfunctional (meth) acrylate oligomer / polymer include 1,2-polybutadiene-terminated urethane (meth) acrylate (for example, TE-2000 and TEA- Polybutadiene-terminated urethane (meth) acrylate (e.g., "BAC-45" manufactured by Osaka Organic Chemical Industry Co., Ltd.), polyisoprene terminal (meth) acrylate, poly UV-2000B "," UV-3000B "," UV-7000B "," KHP-11 "and" KHP-17 "manufactured by Negami Chemical Industries, Ltd.) UV-3700B ", " UV-6100B ") and bis A type epoxy (meth) acrylate. Of these, polyester-based urethane (meth) acrylate and / or polyether-based urethane (meth) acrylate are preferable, and polyester-based urethane (meth) acrylate is more preferable.

The weight average molecular weight of the polyfunctional (meth) acrylate oligomer / polymer is preferably from 10,000 to 600,000, more preferably from 13,000 to 40,000. The weight average molecular weight was obtained by preparing a calibration curve with a commercially available standard polystyrene using a GPC system (SC-8010 manufactured by Toso Co., Ltd.).

Examples of the bifunctional (meth) acrylate monomer include 1,3-butylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6- , Neopentyl glycol di (meth) acrylate, dicyclopentanyl di (meth) acrylate, 2-ethyl-2-butyl-propanediol (meth) acrylate, neopentyl (Meth) acrylate, glycol-modified trimethylolpropane di (meth) acrylate, stearic acid-modified pentaerythritol diacrylate, polypropylene glycol di (meth) acrylate, 2,2- Bis (4- (meth) acryloxytetraethoxyphenyl) propane, 2- (1,2-cyclohexacarboxyimide) ) Ethyl acrylate, hexanediol diacrylate, and the like. Of these, 1,6-hexanediol di (meth) acrylate and / or dicyclopentanyl di (meth) acrylate are preferable from the standpoint of effectiveness, and dicyclopentanyl di (meth) acrylate is more preferable.

Examples of the trifunctional (meth) acrylate monomer include trimethylolpropane tri (meth) acrylate and tris [(meth) acryloyloxyethyl] isocyanurate.

Examples of the tetrafunctional or higher (meth) acrylate monomer include dimethylol propane tetra (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol ethoxytetra (meth) acrylate, dipentaerythritol penta ) Acrylate, and dipentaerythritol hexa (meth) acrylate.

The polyfunctional (meth) acrylate (A) is more preferably hydrophobic. The term hydrophobicity as used herein refers to properties that are difficult to dissolve in water or that are difficult to mix with water. Examples of the hydrophobic polyfunctional (meth) acrylate include 1,3-butylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6- Acrylate, dicyclopentanyl di (meth) acrylate, 2-ethyl-2-butyl-propanediol (meth) acrylate, neopentyl glycol di , Neopentyl glycol modified trimethylol propane di (meth) acrylate, stearic acid modified pentaerythritol diacrylate, polypropylene glycol di (meth) acrylate, 2,2-bis (4- (meth) acryloxy diethoxyphenyl Propane, 2,2-bis (4- (meth) acryloxypropoxyphenyl) propane, 2,2-bis (4- (meth) acryloxytetraethoxyphenyl) Hexacarboximide) ethyl acrylate, hexanediol diacrylate, and the like. Examples of hydrophobic trifunctional (meth) acrylate monomers include trimethylolpropane tri (meth) acrylate and tris [(meth) acryloyloxyethyl] isocyanurate. Examples of the hydrophobic (tetrafunctional) or more (meth) acrylate monomers include dimethylol propane tetra (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol ethoxytetra (meth) acrylate, dipentaerythritol penta (Meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like. In the case of water-solubility, since the cured body of the resin composition swells during cutting, the positional deviation may occur and the dimensional accuracy during processing may be lowered. Even if it is hydrophilic, it may be used as long as the cured product of the composition does not swell or partially dissolve by water.

Among the polyfunctional (meth) acrylates, polyfunctional (meth) acrylate oligomers / polymers and / or bifunctional (meth) acrylate monomers are preferably contained in view of the large effect, / Polymer and a bifunctional (meth) acrylate monomer are more preferably used in combination.

When the polyfunctional (meth) acrylate oligomer / polymer and the bifunctional (meth) acrylate monomer are used in combination, the total content of the polyfunctional (meth) acrylate oligomer / polymer and the bifunctional (meth) (Meth) acrylate oligomer / polymer: bifunctional (meth) acrylate monomer = 30 to 95: 5 to 70, more preferably 40 to 90: 60 to 10, more preferably 60 to 80 : 40 to 20 is most preferable.

The amount of the (A) polyfunctional (meth) acrylate used is preferably 1 to 90 parts by weight, more preferably 30 to 85 parts by weight, based on 100 parts by weight of the total amount of (A) and (B). If the amount is 1 part by weight or more, the property of the cured product to peel off from the adherend (hereinafter simply referred to as " peelability ") is sufficiently promoted when the cured product of the composition is immersed in hot water to ensure that the cured product of the composition peels off . If the amount is 90 parts by weight or less, there is no fear that the initial adhesion property will deteriorate.

As the monofunctional (meth) acrylate (B), a monofunctional (meth) acrylate monomer may be used. Examples of monofunctional (meth) acrylate monomers include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, 2- (Meth) acrylate, cyclohexyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isodecyl (meth) acrylate, lauryl (Meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, isobonyl (meth) acrylate, methoxylated cyclodecatriene (Meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, tetrahydrofurfuryl Hydroxypropyl (meth) acrylate, glycidyl (meth) acrylate, caprolactone-modified tetrahydrofurfuryl (meth) acrylate, 3-chloro-2-hydroxypropyl (Meth) acrylate, N, N-dimethylaminoethyl (meth) acrylate, N, N-diethylaminoethyl (meth) acrylate, ) Acrylate, phenol ethylene oxide modified acrylate, phenol (ethylene oxide 2 mol modified) acrylate, phenol (ethylene oxide 4 mol modified) acrylate, para-cumylphenol ethylene oxide modified acrylate, nonylphenol ethylene oxide modified acrylate, Nonylphenol (ethylene oxide 4 mole modified) acrylate, nonylphenol (ethylene oxide 8 mole modified) acrylate, nonylphenol (propylene oxide 2.5 mole modified) acrylate, 2- (Meth) acrylate, ethylhexylcarbitol acrylate, ethylene oxide modified phthalic acid (meth) acrylate, ethylene oxide modified succinic acid (meth) acrylate, trifluoroethyl (meth) acrylate, acrylic acid, methacrylic acid, maleic acid, (Meth) acrylic acid dimer,? - (meth) acryloyloxyethylhydrogen succinate, n- (meth) acryloyloxyethyl methacrylate, Acryloyloxyalkylhexahydrophthalimide, and 2- (1,2-cyclohexacarboxyimide) ethyl acrylate.

(B) the monofunctional (meth) acrylate is more preferably hydrophobic as in (A). The term hydrophobicity as used herein refers to properties that are difficult to dissolve in water or difficult to mix with water. Examples of the hydrophobic monofunctional (meth) acrylate include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (Meth) acrylate, cyclohexyl (meth) acrylate, dicyclopentanyl (meth) acrylate, isodecyl (meth) acrylate, lauryl Acrylate, dicyclopentenyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, isobonyl (meth) acrylate, methoxylated cyclodecatriene (meth) acrylate, tetrahydrofurfuryl (Meth) acrylate, 3-phenoxypropyl (meth) acrylate, glycidyl (meth) acrylate, caprolactone-modified tetrahydrofurfuryl (Meth) acrylate, N, N-dimethylaminoethyl (meth) acrylate, N, N-diethylaminoethyl (Meth) acrylate, phenol ethylene oxide modified acrylate, phenol (ethylene oxide 2 mol modified) acrylate, phenol (ethylene oxide 4 mol modified) acrylate, para-cumylphenol ethylene oxide modified acrylate, Nonylphenol ethylene oxide modified acrylate, nonylphenol ethylene oxide modified acrylate, nonylphenol (ethylene oxide 4 mol modified) acrylate, nonylphenol (ethylene oxide 8 mol modified) acrylate, nonylphenol (propylene oxide 2.5 mol modified) acrylate, 2-ethylhexylcarbitol Acrylate, ethylene oxide modified phthalic acid (meth) acrylate, ethylene oxide modified succinic acid (meth) acrylate, trifluoro (Meth) acrylate,? - carboxypolycaprolactone mono (meth) acrylate, phthalic acid monohydroxyethyl (meth) acrylate, (meth) acrylic acid dimer, (Meth) acryloyloxyhexahydrophthalimide, 2- (1,2-cyclohexacarboximide) ethyl acrylate, and the like. In the case of water-solubility, the cured product of the resin composition swells during the cutting process, thereby causing positional shift, which may undesirably lower processing accuracy. In addition, even if it is hydrophilic, it may be used as long as the cured product of the resin composition does not swell or partially dissolve in water.

(Meth) acrylate and / or 2- (1, 2-cyclohexacarboximide) ethyl (meth) acrylate in view of the large effect of the monofunctional , And it is more preferable to use a combination of phenol ethylene oxide 2 -modified (meth) acrylate and 2- (1,2-cyclohexa carboxyimide) ethyl (meth) acrylate. In the case of using phenol ethylene oxide 2 -modified (meth) acrylate and 2- (1,2-cyclohexa carboxyimide) ethyl (meth) acrylate in combination, the content ratio of phenol ethylene oxide 2 mol-modified (meth) acrylate and (Meth) acrylate: 2- (1, 2-cyclohexacarboxyimide) 2-moles modified phenol ethylene oxide at a weight ratio in the total 100 parts by weight of 2- (1,2- Ethyl (meth) acrylate is preferably from 30 to 90:10 to 70, more preferably from 40 to 80:20 to 60, and most preferably from 50 to 70:30 to 50.

The amount of the monofunctional (meth) acrylate (B) to be used is preferably 10 to 99 parts by weight, more preferably 15 to 70 parts by weight, based on 100 parts by weight of the total amount of (A) and (B). If it is 10 parts by weight or more, there is no possibility of deterioration of initial adhesion. If it is 99 parts by weight or less, peelability can be ensured and the cured product of the composition peels off in a film form.

(Meth) acryloyloxyethyl acid phosphate, dibutyl 2- (meth) acryloyloxyethyl acid phosphate, dioctyl 2- (meth) acryloyloxyethyl acid phosphate, (Meth) acryloyloxyethyl phosphate, and (meth) acryloyloxyethyl polyethylene glycol acid phosphate, or a phosphoric acid ester having a (meth) acrylic group, The adhesion can be further improved.

The photopolymerization initiator (C) is added in order to accelerate the photo-curing of the resin composition by increasing or decreasing by the actinic ray of visible light or ultraviolet light, and various known photopolymerization initiators can be used. Examples of the photopolymerization initiator include benzophenone and derivatives thereof, benzyl and derivatives thereof, anthraquinone and derivatives thereof, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, benzoin isobutyl ether and benzyl dimethyl ketal Benzoin derivatives, acetophenone derivatives such as diethoxyacetophenone and 4-t-butyltrichloroacetophenone, 2-dimethylaminoethylbenzoate, p-dimethylaminoethylbenzoate, diphenyl disulfide, thioxanthone and its derivatives 2,7-dimethyl-2,3-dioxobicyclo [2.2.1] heptane-1-carboxylic acid, 1-carboxy-2-bromoethyl ester, 7,7-dimethyl-2,3-dioxobicyclo [2.2.1] heptane- -Dioxobicyclo [2.2.1] heptane-1-carboxylate chloride, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinop 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, benzoyldiphenylphosphine oxide, 2,4- An acylphosphine oxide such as 6-trimethylbenzoyldiphenylphosphine oxide, benzoyldiethoxyphosphine oxide, 2,4,6-trimethylbenzoyldimethoxyphenylphosphine oxide and 2,4,6-trimethylbenzoyldiethoxyphenylphosphine oxide Phenyl-acetic acid 2- [2-oxo-2-phenyl-acetoxy-ethoxy] -ethyl ester and / or oxy-phenylacetic acid 2- [2-hydroxy-ethoxy] And the like. The photopolymerization initiator may be used alone or in combination of two or more. Among these compounds, benzyl dimethyl ketal, oxy-phenyl-acetic acid 2- [2-oxo-2-phenyl-acetoxy-ethoxy] -ethyl ester and oxy-phenylacetic acid 2- [2- -Ethoxy] -ethyl ester, and the like.

The amount of the photopolymerization initiator (C) to be used is preferably 0.1 to 30 parts by weight per 100 parts by weight of the total of (A) and (B). More preferably 0.5 to 25 parts by weight. When the amount is 0.1 parts by weight or more, a curing accelerating effect can be surely obtained, and a sufficient curing speed can be obtained when the amount is 25 parts by weight or less. By using more than 1 part by weight of the component (C) as a more preferable form, it becomes possible to cure without depending on the amount of light irradiation, and furthermore, the cross-linking density of the cured product of the composition becomes high and the positional deviation does not occur at the time of cutting, .

In the present invention, it is preferable that the glass transition temperature of the cured product obtained from the temporary fixing adhesive is in the range of -50 캜 to 50 캜. When the glass transition temperature of the cured product obtained from the temporary fixing adhesive is within this range, the member is fixedly adhered, and after the temporarily fixed member is processed, the processed member is immersed in hot water at 100 ° C or less. Lt; / RTI > As a result, the reduction of the bonding area is achieved and the bonding strength is lowered, so that only the member can be easily recovered. When the glass transition temperature of the cured product obtained from the temporary fixing adhesive is -50 DEG C or more, it is hard to cause deviation in the processing of the temporarily fixed member, and it is excellent in dimensional accuracy. When the temperature is 50 DEG C or less, the water-repelling property is excellent. From the viewpoints of peelability and dimensional accuracy, the glass transition temperature of the cured product obtained from the temporary fixing adhesive is more preferably -25 ° C to 45 ° C, further preferably -20 ° C to 42 ° C, and still more preferably Is 0 ° C to 40 ° C.

The method of measuring the glass transition temperature of the cured product obtained from the temporary fixing adhesive used in the present invention is not particularly limited, but is measured by a known method such as DSC or dynamic viscoelastic spectrum. A preferred method is by dynamic viscoelastic spectrum.

In the present invention, it is preferable to use a particulate material which is not soluble in (D) (A) to (C) together with (A) and (B). This makes it easier for the composition after curing to maintain a constant thickness, and it is possible to improve the dimensional accuracy at the time of processing more easily. In addition, since the coefficient of linear expansion of the cured product of the temporary fixing adhesive is different from that of the particulate material which is not soluble in (A) to (C), the member is fixedly adhered using the adhesive composition, When the immersed member is immersed in hot water at 100 DEG C or less, wavy or three-dimensional deformation occurs at the interface between the member and the cured body of the temporary fixing adhesive, resulting in reduction of the bonding area and further improvement of the releasability.

(D) The material of the particulate material which is not soluble in (A) to (C) may be organic or inorganic particles generally used. Examples of the organic particles include polyethylene particles, polypropylene particles, crosslinked polymethyl methacrylate particles, and crosslinked polystyrene particles. Examples of the inorganic particles include glass, silica, alumina, and titanium.

(D) The particulate materials which are not dissolved in (A) to (C) are spherical from the viewpoint of improvement of dimensional accuracy during processing, that is, control of the thickness of the adhesive. Examples of the organic particles include crosslinked polymethyl methacrylate particles obtained as monodispersed particles by a known emulsion polymerization method of methyl methacrylate monomer, styrene monomer and crosslinkable monomer, crosslinked polystyrene particles, crosslinked polystyrene particles and crosslinked polymethacrylate methyl polystyrene copolymer Particles are preferred. As the inorganic particles, the spherical silica is preferable because the deformation of the particles is small and the unevenness of the film thickness of the composition after the curing due to the unevenness of the particle diameter is small. Among them, crosslinked polymethyl methacrylate particles, crosslinked polystyrene particles, crosslinked polymethyl methacrylate methyl polystyrene copolymer particles, crosslinked polymethyl methacrylate particles, crosslinked polymethyl methacrylate particles, A crosslinked polystyrene particle, a crosslinked polymethyl methacrylate copolymer particle, or a mixture thereof. More preferably any one of crosslinked polymethyl methacrylate particles, crosslinked polystyrene particles and crosslinked polymethyl methacrylate polystyrene copolymer particles, or a mixture thereof.

(D) The average particle diameter of the particulate material which is not soluble in (A) to (C) according to the laser method is preferably in the range of 5 to 200 탆. When the average particle diameter of the particulate material is 5 mu m or more, the peelability is excellent. When the average particle diameter of the particulate material is 200 mu m or less, misalignment is unlikely to occur at the time of processing the temporarily fixed member. From the viewpoints of peelability and dimensional accuracy, the average particle diameter is more preferably 8 to 150 占 퐉, and more preferably 9 to 120 占 퐉. The standard deviation of the particle diameter and the particle size distribution in the present invention was measured by a laser diffraction particle size distribution measurement apparatus SALD-2200 manufactured by Shimadzu Corporation. Particle diameter is based on volume.

(D) The standard deviation of the particle volume distribution with respect to the particle diameter when the particle diameter (탆) according to the laser method of the particle diameter of the particulate material not soluble in (A) to (C) is expressed as a logarithm is from 0.0001 to 0.25 Range. ≪ / RTI > If there is a standard deviation of the particle size of the particulate material in this range, unevenness of the film thickness of the composition after curing becomes small due to unevenness of the particle size, and deviation in processing of the fixed member is hardly caused and not only in terms of dimensional accuracy, Improvement. From the viewpoints of dimensional accuracy and releasability, the standard deviation of the particle diameter of the particulate material is more preferably from 0.0001 to 0.15, still more preferably from 0.0001 to 0.1, still more preferably from 0.0001 to 0.08, still more preferably from 0.0001 to 0.072 .

(D) The amount of the particulate material which is not dissolved in (A) to (C) is preferably 0.1 to 20 parts by weight based on 100 parts by weight of the total amount of (A) and (B) from the viewpoints of adhesion strength, More preferably 0.2 to 10 parts by weight, still more preferably 0.2 to 6 parts by weight.

In order to improve the storage stability of the temporarily fixing adhesive of the present invention, a small amount of a polymerization inhibitor may be used. Examples of the polymerization inhibitor include methylhydroquinone, hydroquinone, 2,2-methylene-bis (4-methyl-6-tertiary-butylphenol), catechol, hydroquinone monomethyl ether, mono tertiary butyl hydroquinone, 2 , 2,5-di-tert-butyl-p-benzoquinone, picric acid, citric acid, phenothiazine, Butyl catechol, 2-butyl-4-hydroxy anisole and 2,6-di-tertiary-butyl p-cresol.

The amount of these polymerization inhibitors to be used is preferably 0.001 to 3 parts by weight, more preferably 0.01 to 2 parts by weight, per 100 parts by weight of the total amount of (A) and (B). Storage stability is ensured at not less than 0.001 part by weight, good adhesiveness can be obtained at not more than 3 parts by weight, and there is no possibility of unhardened.

In the temporary fixing adhesive of the present invention, a polar organic solvent may be used together.

The adhesive for temporary fixation of the present invention may be added to various kinds of elastomers such as acrylic rubber, urethane rubber, acrylonitrile-butadiene-styrene rubber, inorganic fillers, solvents, fillers, reinforcing materials, plasticizers , A thickener, a dye, a pigment, a flame retardant, a silane coupling agent, and a surfactant may be used.

The present invention relates to a temporary fixing / peeling method of a member for temporarily fixing a temporary fixing member by using the temporary fixing adhesive and then removing the temporary fixing adhesive by immersing the processed member in hot water at 100 DEG C or less. According to the present invention, it is possible to increase the processing precision of various members such as optical members without using an organic solvent.

According to a preferred embodiment of the present invention, when the workpiece is detached from the hardened body of the temporary fixing adhesive, the hardened body of the temporary fixing adhesive is immersed in hot water of 100 DEG C or lower by irradiating the temporary fixing adhesive with visible light or ultraviolet ray, The time for removing the adhesive can be shortened.

In the present invention, when the irradiation amount of the visible ray or the ultraviolet ray for irradiating the temporary adhesive to the temporary adhesive is 365 nm to 1000 mJ / cm2 or more and 40000 mJ / cm2 or less when peeling the processed member from the hardened body of the temporary fixing adhesive, The effect of reducing the time for peeling the hardened adhesive for hardening by immersing the hardened product of the hardened adhesive in hot water of 100 DEG C or less is large and preferable (re-examination step). The dose is more preferably not less than 2000 mJ / cm2 and not more than 38000 mJ / cm2, still more preferably not less than 4000 mJ / cm2 and not more than 36,000 mJ / cm2.

In the present invention, when hot water appropriately heated, for example, hot water of 100 deg. C or lower is used, peelability in water can be attained in a short time and productivity is improved. Preferably 30 to 100 占 폚, more preferably 40 to 99 占 폚, the cured product of the adhesive thermally expands in a short time and the residual strain stress generated when the composition is cured is released. Further, since the coefficient of linear expansion of the cured product of the temporary fixing adhesive is different from that of the particulate material, the member is adhered and fixed by using the adhesive composition, and after the temporarily fixed member is processed, the processed member is immersed in hot water Wavy or three-dimensional distortion occurs at the interface between the member and the cured product of the temporary fixing adhesive. As a result, a reduction in the adhesion area is achieved and the adhesive strength is reduced, so that the cured product of the fixing adhesive can be peeled off the film. It is recommended that the method of contacting the cured product of temporary fixing adhesive with water is simple since the method of immersing each bonded body in water is simple.

Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples. The present invention is not limited to these examples.

Example

(Example 1)

( Go and go  Preparation of adhesive)

An adhesive for temporarily fixing was produced in the following procedure. UV-3000B "(polyester-based urethane acrylate, hereinafter abbreviated as" UV-3000B ", hydrophobic (meth) acrylate, weight average molecular weight 15,000) as a polyfunctional , 15 parts by weight of dicyclopentanyl diacryate (KAYARAD R-684, hereinafter abbreviated as R-684, hydrophobic (meth) acrylate), (B) monofunctional (Aronix M-140, hereinafter abbreviated as " M-140 ", hydrophobic (meth) acrylate) ), 35 parts by weight of phenol ethylene oxide 2-mole modified acrylate (ARONIX M-101A, manufactured by Toa Synthetic Co., Ltd., hydrophobic (meth) acrylate), (C) benzyl dimethyl ketal IRGACURE 651 manufactured by Specialty Chemicals Co. , 10 parts by weight of "BDK" (hereinafter abbreviated as "BDK"), and (D) 100 parts by weight of a particulate material which is not soluble in (A) to (C) (4-methyl-6-tert-butylphenol) as a polymerization inhibitor, 1 part by weight of spherical crosslinked polystyrene particles having a standard deviation of the particle volume distribution of 0.063 (GS-100S manufactured by Gansu Co., (Sumilizer MDP-S manufactured by Sumitomo Chemical Co., Ltd., hereinafter abbreviated as " MDP ") was used to prepare a resin composition.

Using the obtained resin composition, the glass transition temperature, tensile shear bond strength and peel test were carried out by the following evaluation methods. The results are shown in Table 1. Also, the standard deviation of the particle volume distribution with respect to the particle diameter when the average particle diameter and the particle diameter (占 퐉) of the particulate material not soluble in (D) (A) to (C)

(Assessment Methods)

Glass transition temperature: The resin composition was sandwiched by a PET sheet with a 1 mm thick silicone sheet as a mold. The resin composition was cured from the upper surface (under the condition of an accumulated light quantity of 2000 mJ / cm 2 at a wavelength of 365 nm) by using a Fusion-type curing apparatus using a non-electrode discharge lamp, To prepare a cured resin composition having a thickness of 1 mm. The prepared cured product was cut into a length of 50 mm and a width of 5 mm with a cutter to obtain a cured product for measuring the glass transition temperature. The obtained cured product was subjected to stress and strain in a tensile direction of 1 Hz to the cured product in a nitrogen atmosphere by a dynamic viscoelasticity measuring device "DMS210" manufactured by Seiko Electronic Industries Co., Ltd., and the tan δ was measured while raising the temperature at a rate of 2 ° C per minute , And the temperature of the peak top of this tan delta was taken as the glass transition temperature.

Tensile shear bond strength ("Adhesion strength" in the table): Measured according to JIS K 6850. Specifically, a heat-resistant glass (25 mm x 25 mm x thickness 2.0 mm) made of an adherent material was used, and two pieces of heat-resistant glass were adhered to a resin composition having a bonding area of 8 mm in diameter, Curing was carried out under the conditions of an integrated light quantity of 2000 mJ / cm < 2 > at a wavelength of 365 nm by a fusion curing apparatus to produce a tensile shear bond strength test piece. The tensile shear bond strength was measured at a tensile speed of 10 mm / min under a temperature of 23 ° C and a humidity of 50% using a universal testing machine.

Except that the composition was applied to the heat-resistant glass and adhered to a glass plate (150 mm x 150 mm x thickness 1.7 mm) as a support, the same conditions as those described above were used The produced resin composition was cured to prepare a peeling test piece. The obtained test piece was immersed in hot water (80 DEG C) to measure the time for peeling the heat-resisting glass, and the peeling state was also observed.

The standard deviation of the particle volume distribution with respect to the particle diameter when the average particle diameter and the particle diameter (mu m) of the particulate matter are expressed in logarithmic form (the standard of the particle diameter of the particulate material not soluble in (A), (B) Deviation "): Measured by a laser diffraction particle size distribution measuring apparatus (" SALD-2200 "manufactured by Shimadzu Corporation).

( Go-go · Removal method)

(150 mm x 150 mm x 1.7 mm thick) as a fixing member was heated to 80 DEG C on a hot plate, and 1 g of the prepared temporary fixing adhesive was applied (coating step). Subsequently, a sheet glass (80 mm x 80 mm x 1.1 mm in thickness) as a member to be processed was mounted from above (mounting process). Next, quartz glass (80 mm x 80 mm x thickness 5 mm) having a thickness of 50 mm was mounted on the chevron glass as the member to be processed from above, and the weight of the quartz glass was weighed by 12.5 g / Cm < 2 >, and left for 5 minutes (pressure step). The interval between the fixing member and the member to be processed was 5 mu m or less in the difference from the greatest point to the smallest point.

Subsequently, while applying a pressure of 12.5 g / cm < 2 >, UV light having a wavelength of 365 nm was irradiated with 300 mJ / cm < 2 > from black plate glass as a fixing member (irradiation process was performed simultaneously with the pressure process (30 seconds) . Only the sheet glass which is the member to be processed of the obtained adhesion test sample was cut into a 10 mm square using a dicing machine. The cut glass plate as a member to be processed did not fall off during cutting, and showed good workability. The adhesion test piece cut only the glass plate to be processed member was irradiated with UV light of 365 nm wavelength at 16000 mJ / cm 2 using a metal halide lamp (re-examination process (40 seconds)) and immersed in hot water at 80 ° C Peeled (hot water peeling time). 10 pieces of the peeled cut test specimens were arbitrarily taken out, and each side of the back surface of the cut test specimen (surface fixed with the temporary fixing adhesive) was observed with an optical microscope, and the maximum width of the portion where the glass was defective was measured, The mean value and the standard deviation were obtained. In addition, since a cured film of an adhesive for temporary fixation can be obtained from the cut test piece of the peeled temporary fixing adhesive, ten peeled cut test pieces are taken out randomly, and the film thickness of the cured product is measured by a micro gauge, Deviations were obtained. Table 1 shows measurement results of the average value and standard deviation of the maximum width of the portions where the glass of each side is defective and the average value and standard deviation of the film thickness of the cured product of the temporary fixing adhesive.

(Examples 2 to 7 and Comparative Examples 1 and 2)

The average value and the standard deviation of the maximum width of the portions where the glass on each side was defective and the standard deviation and the average value of the maximum width of the portions where the glass was defective were measured in the same manner as in Example 1 except that the fixing and peeling methods were performed under the conditions shown in Tables 1 to 2 and 4, The average value and the standard deviation of the film thickness were measured. The measurement results are shown in Tables 1 to 2 and 4.

(Examples 8 to 11)

In the same manner as in Example 1 except that the raw materials of the kinds shown in Tables 2 and 3 were used in the compositions shown in Tables 2 and 3, the average value and standard deviation of the maximum width of the portions where the glass on each side was defective, The average value and standard deviation of the film thickness of the cargo film were measured. The measurement results are shown in Tables 2 and 3.

(Example 12)

(D) a spherical crosslinked polymethyl methacrylate having a mean particle size of 140 mu m and a standard deviation of a particle volume distribution with respect to a particle diameter when the particle diameter (mu m) was logarithmically measured as 0.086, as particulate materials not soluble in (A) to (C) Except that the raw materials of the kind shown in Table 3 were used in the composition shown in Table 3 using the crylate particles ("GM-5003" manufactured by Gansu Kasei Kogyo Co., Ltd., manufactured by sieving the mixture using a sieve body having a size of 150 μm and a body having a size of 125 μm) An adhesive for temporary fixing was prepared in the same manner as in Example 1. [ The obtained temporary fixing adhesive was subjected to a glass transition temperature, a tensile shear adhesive strength and a peel test in the same manner as in Example 1. Also, the standard deviation of the particle volume distribution with respect to the particle diameter when the average particle diameter and the particle diameter (占 퐉) of the particulate material not soluble in (D) (A) to (C) The results are shown in Table 3.

The average value and the standard deviation of the maximum width of the portions where the glass on each side was defective and the standard deviation and the average value of the maximum width of the portions where the glass was defective were measured in the same manner as in Example 1 except that the temporarily fixing and adhesive- The average value and the standard deviation of the cured film thickness of the cured film were measured. The measurement results are shown in Table 3.

(Example 13)

(D) Spherical crosslinked polystyrene particles having a mean particle size of 40 mu m and a standard deviation of a particle volume distribution with respect to particle diameter of 0.062 when the particle diameter (mu m) was logarithmically measured as particulate materials (A) to (C) Except that the raw materials of the kind shown in Table 3 were used in the compositions shown in Table 3 using the " GS-240 " manufactured by Sekisui Chemical Co., Ltd.). The obtained temporary fixing adhesive was subjected to a glass transition temperature, a tensile shear adhesive strength and a peel test in the same manner as in Example 1. Also, the standard deviation of the particle volume distribution with respect to the particle diameter when the average particle diameter and the particle diameter (占 퐉) of the particulate material not soluble in (D) (A) to (C) The results are shown in Table 3.

The average value and the standard deviation of the maximum width of the portions where the glass of each side was defective were measured in the same manner as in Example 1 except that the temporary fixing and peeling method was performed under the conditions shown in Table 3 using the temporary fixing adhesive, The average value and the standard deviation of the cured film thickness were measured. The measurement results are shown in Table 3.

(Example 14)

(D) a spherical cross-linked polystyrene particle having a mean particle size of 20 mu m and a standard deviation of a particle volume distribution with respect to the particle diameter when the particle diameter (mu m) was logarithmic, as a particulate material not soluble in (A) to (C) Except that the raw materials of the kind shown in Table 3 were used in the composition shown in Table 3 using the " GS-220 " manufactured by Sekisui Chemical Co., Ltd.). The obtained temporary fixing adhesive was subjected to a glass transition temperature, a tensile shear adhesive strength and a peel test in the same manner as in Example 1. Also, the standard deviation of the particle volume distribution with respect to the particle diameter when the average particle diameter and the particle diameter (占 퐉) of the particulate material not soluble in (D) (A) to (C) The results are shown in Table 3.

The average value and the standard deviation of the maximum width of the portions where the glass of each side was defective were measured in the same manner as in Example 1 except that the temporary fixing and peeling method was performed under the conditions shown in Table 3 using the temporary fixing adhesive, The average value and the standard deviation of the cured film thickness were measured. The measurement results are shown in Table 3.

(Example 15)

(D) a spherical cross-linked polystyrene particle having a standard deviation of a particle volume distribution with respect to a particle diameter of 0.058 as a particulate material not soluble in (A) to (C) and having an average particle diameter of 10 mu m and a particle diameter (mu m) Except that the raw materials of the kind shown in Table 3 were used in the compositions shown in Table 3 using SP-210 (manufactured by Sekisui Chemical Co., Ltd.). The obtained temporary fixing adhesive was subjected to a glass transition temperature, a tensile shear adhesive strength and a peel test in the same manner as in Example 1. Also, the standard deviation of the particle volume distribution with respect to the particle diameter when the average particle diameter and the particle diameter (占 퐉) of the particulate material not soluble in (D) (A) to (C) The results are shown in Table 3.

The average value and the standard deviation of the maximum width of the portions where the glass of each side was defective were measured in the same manner as in Example 1 except that the temporary fixing and peeling method was performed under the conditions shown in Table 3 using the temporary fixing adhesive, The average value and the standard deviation of the cured film thickness were measured. The measurement results are shown in Table 3.

(Materials used)

UV-3700B: polyether-based urethane acrylate (UV-3700B, manufactured by Nippon Synthetic Chemical Industry Co., Ltd.), hydrophobic (meth) acrylate,

1.6-X-A: hexanediol diacrylate ("Light Acrylate 1.6-HX-A" manufactured by Kyowa Chemical Co., Ltd.), hydrophobic (meth) acrylate

I-754: Synthesis of oxy-phenyl-acetic acid 2- [2-oxo-2-phenyl-acetoxy-ethoxy] -ethyl ester and oxy-phenyl- acetic acid 2- [2-hydroxy-ethoxy] Mixture (IRGACURE 754 made by Chiba Japan)

The present invention includes a pressure step of applying a pressure of 1 g / cm 2 to 1000 kg / cm 2 on one or both sides so as to make the distance between the fixing member and the member to be processed uniform, Excellent dimensional accuracy can be obtained.

The present invention uses a specific hydrophobic (meth) acrylic monomer and an adhesive for temporary fixation of a specific composition combined therewith, so that the cured product can exhibit high adhesive strength without being affected by cutting water and the like, And a workpiece having a higher dimensional accuracy is easily obtained. In the present invention, the fixing member and the member to be processed are immersed in hot water after being processed, thereby lowering the bonding strength and reducing the adhesive force between the fixing member and the member to be processed.

The present invention has a photocuring property due to the composition of the temporary fixing adhesive and is cured by visible light or ultraviolet light. Therefore, compared with the conventional hot melt adhesive, remarkable effects can be obtained in terms of labor saving (energy saving), energy saving, and shortening of work.

The present invention can obtain a remarkable effect in terms of dimensional accuracy of the member to be processed by performing the irradiation process during the pressure process. That is, it is possible to easily control the thickness of the temporarily fixing adhesive by performing the irradiation process during the pressure process.

The present invention can obtain more preferable dimensional accuracy by using a temporary fixing adhesive containing a particulate material having a small standard deviation of particle volume distribution.

The cured product temporarily fixed by the present invention has an effect of lowering the bonding strength by contacting with hot water of 100 DEG C or less, thereby reducing the adhesive force between the members or between the members and the jig, and thus it is possible to easily recover the members. As a result, it is possible to obtain a remarkable effect that it is unnecessary to use an organic solvent which is expensive, has a high ignitability, or generates harmful gas to the human body, as compared with the conventional temporary fixing adhesive for temporary fixation.

In the temporary fixing adhesive composition having a specific preferable composition range of the present invention, the cured product can be brought into contact with hot water at 100 DEG C or less and can be recovered from the member in the form of a film, so that the effect of excellent workability can be obtained.

Although the present invention has been described in detail or with reference to specific embodiments thereof, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the present invention.

The present application is based on Japanese Patent Application (Japanese Patent Application No. 2008-188295) filed on July 22, 2008, the content of which is incorporated herein by reference.

Industrial availability

The temporary fixing method of the present invention is industrially useful as an adhesive for temporarily fixing optical lenses, prisms, arrays, silicon wafers, and semiconductor mounting parts.

Claims (24)

Comprising the steps of: applying a fixing adhesive to a fixing member; mounting a member to be fixed on the temporary fixing adhesive; and irradiating at least one of visible light and ultraviolet light to the temporary fixing adhesive after mounting to increase the adhesive force of the fixing adhesive, A temporary fixing method comprising applying pressure from one or both of the stationary member and the member to be processed,
The pressure applied and the irradiation are controlled for at least a predetermined time at the same time, and the pressure applied from one or both of the fixing member and the member to be processed is controlled to 10 g / cm 2 or more and 300 kg / cm 2 or less,
Wherein the temporary fixing adhesive is a composition containing (A) a polyfunctional (meth) acrylate, (B) a monofunctional (meth) acrylate and (C) a photopolymerization initiator,
Wherein the temporary fixing adhesive contains 1 to 90 parts by weight of (A), 10 to 99 parts by weight of (B), and a total amount of 100 parts by weight of (A) and (B) in 100 parts by weight of the total amount of (A) 0.1 to 30 parts by weight of component (C)
Wherein the temporary fixing adhesive contains 0.1 to 20 parts by weight of the particulate material (D) which is insoluble in (A) to (C) based on 100 parts by weight of the total amount of (A) and (B)
The particulate material (D) which does not dissolve in the above (A) to (C) is any one of crosslinked polymethyl methacrylate particles, crosslinked polystyrene particles and crosslinked polymethyl methacrylate polystyrene copolymer particles or a mixture thereof,
The average particle diameter of the particulate material (D) which is not soluble in the above (A) to (C) is 5 mu m to 200 mu m,
Wherein the irradiation amount of the visible light or ultraviolet light is in the range of 1 mJ / cm2 to 4000 mJ / cm2 at a wavelength of 365 nm. The method comprising: applying a fixing adhesive to a member to be processed; mounting a fixing member on the temporary fixing adhesive; and irradiating at least one of visible light and ultraviolet light to the temporary fixing adhesive after mounting, A temporary fixing method comprising applying pressure from one or both of the stationary member and the member to be processed,
The pressure applied and the irradiation are controlled for at least a predetermined time at the same time, and the pressure applied from one or both of the fixing member and the member to be processed is controlled to 10 g / cm 2 or more and 300 kg / cm 2 or less,
Wherein the temporary fixing adhesive is a composition containing (A) a polyfunctional (meth) acrylate, (B) a monofunctional (meth) acrylate and (C) a photopolymerization initiator,
Wherein the temporary fixing adhesive contains 1 to 90 parts by weight of (A), 10 to 99 parts by weight of (B), and a total amount of 100 parts by weight of (A) and (B) in 100 parts by weight of the total amount of (A) 0.1 to 30 parts by weight of component (C)
Wherein the temporary fixing adhesive contains 0.1 to 20 parts by weight of the particulate material (D) which is insoluble in (A) to (C) based on 100 parts by weight of the total amount of (A) and (B)
The particulate material (D) which does not dissolve in the above (A) to (C) is any one of crosslinked polymethyl methacrylate particles, crosslinked polystyrene particles and crosslinked polymethyl methacrylate polystyrene copolymer particles or a mixture thereof,
The average particle diameter of the particulate material (D) which is not soluble in the above (A) to (C) is 5 mu m to 200 mu m,
Wherein the irradiation amount of the visible light or ultraviolet light is in the range of 1 mJ / cm2 to 4000 mJ / cm2 at a wavelength of 365 nm. delete The method according to claim 1 or 2,
Wherein at least one of a fixing member, a temporary fixing adhesive, and a member to be processed is controlled at 0 캜 or more and 150 캜 or less. delete The method according to claim 1 or 2,
(A) and (B) are both hydrophobic. The method according to claim 1 or 2,
Wherein the temporary fixing adhesive has a glass transition temperature of from -50 캜 to 50 캜. delete delete The method according to claim 1 or 2,
Wherein the shape of the particulate material (D) which does not dissolve in (A) to (C) is spherical. delete delete The method according to claim 1 or 2,
The standard deviation of the particle volume distribution with respect to the particle diameter when the particle diameter (占 퐉) of the particulate material (D) not soluble in (A) to (C) is represented by logarithm is within the range of 0.0001 to 0.25 Fixed method. A method for manufacturing a temporary member, comprising the step of processing the temporarily fixed member by using the temporary fixing method according to claim 1 or 2, and immersing the processed member in hot water at 100 ° C or less to remove the cured body of the temporary fixing adhesive How to remove / peel. The temporarily fixed member is processed by using the temporary fixing method as set forth in claim 1 or 2, and then a visible ray or ultraviolet ray is applied to the temporary fixing adhesive, and the processed member is immersed in hot water at 100 DEG C or less, And peeling off the cured body of the member. delete 16. The method of claim 15,
Wherein the irradiation amount of visible light or ultraviolet light irradiated after the temporarily fixed member is in the range of 1000 mJ / cm 2 to 40000 mJ / cm 2 at a wavelength of 365 nm. The method according to claim 1 or 2,
(A) a temporary fixing method wherein the polyfunctional (meth) acrylate contains a polyfunctional (meth) acrylate oligomer / polymer and / or a bifunctional (meth) acrylate monomer. The method according to claim 1 or 2,
(A) A temporary fixing method wherein the polyfunctional (meth) acrylate contains a polyfunctional (meth) acrylate oligomer / polymer and a bifunctional (meth) acrylate monomer. 19. The method of claim 18,
Wherein the polyfunctional (meth) acrylate oligomer / polymer comprises a polyester-based urethane (meth) acrylate and / or a polyether-based urethane (meth) acrylate. 19. The method of claim 18,
Wherein the bifunctional (meth) acrylate monomer contains 1,6-hexanediol di (meth) acrylate and / or dicyclopentanyl di (meth) acrylate. The method according to claim 1 or 2,
Wherein the monofunctional (meth) acrylate (B) comprises a phenol ethylene oxide 2 mole modified (meth) acrylate and / or 2- (1,2-cyclohexa carboxyimide) ethyl (meth) acrylate. The method according to claim 1 or 2,
Wherein the monofunctional (meth) acrylate (B) contains phenol ethylene oxide 2-moles modified (meth) acrylate and 2- (1,2-cyclohexa carboxyimide) ethyl (meth) acrylate. The method according to claim 1 or 2,
(C) the photopolymerization initiator is selected from the group consisting of benzyldimethyl ketal, oxy-phenyl-acetic acid 2- [2-oxo-2-phenyl-acetoxy-ethoxy] -ethyl ester and oxy- Propoxy] -ethoxy] -ethyl ester. ≪ / RTI >