KR101657316B1 - 웨이퍼 연마 장치 및 웨이퍼의 제조 방법 - Google Patents

웨이퍼 연마 장치 및 웨이퍼의 제조 방법 Download PDF

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Publication number
KR101657316B1
KR101657316B1 KR1020100089936A KR20100089936A KR101657316B1 KR 101657316 B1 KR101657316 B1 KR 101657316B1 KR 1020100089936 A KR1020100089936 A KR 1020100089936A KR 20100089936 A KR20100089936 A KR 20100089936A KR 101657316 B1 KR101657316 B1 KR 101657316B1
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South Korea
Prior art keywords
wafer
hole
detecting
absence
polishing
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KR1020100089936A
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English (en)
Korean (ko)
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KR20110031108A (ko
Inventor
마사히로 타케우치
Original Assignee
후지코시 기카이 고교 가부시키가이샤
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Publication of KR20110031108A publication Critical patent/KR20110031108A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0616—Monitoring of warpages, curvatures, damages, defects or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H10P74/235—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes comprising optical enhancement of defects or not-directly-visible states

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1020100089936A 2009-09-18 2010-09-14 웨이퍼 연마 장치 및 웨이퍼의 제조 방법 Active KR101657316B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009217854A JP5541770B2 (ja) 2009-09-18 2009-09-18 ウェーハ研磨装置およびウェーハの製造方法
JPJP-P-2009-217854 2009-09-18

Publications (2)

Publication Number Publication Date
KR20110031108A KR20110031108A (ko) 2011-03-24
KR101657316B1 true KR101657316B1 (ko) 2016-09-13

Family

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KR1020100089936A Active KR101657316B1 (ko) 2009-09-18 2010-09-14 웨이퍼 연마 장치 및 웨이퍼의 제조 방법

Country Status (3)

Country Link
JP (1) JP5541770B2 (https=)
KR (1) KR101657316B1 (https=)
CN (1) CN102019581B (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101616464B1 (ko) 2014-11-18 2016-04-29 주식회사 엘지실트론 웨이퍼 연마장비의 웨이퍼 로딩장치 및 웨이퍼 로딩위치 조정 방법
CN109434671A (zh) * 2018-10-11 2019-03-08 德淮半导体有限公司 一种晶圆加工设备及加工方法
JP2020059095A (ja) * 2018-10-11 2020-04-16 株式会社ブイ・テクノロジー ウェハの研磨装置および研磨方法
CN111347061B (zh) * 2018-12-24 2021-03-30 有研半导体材料有限公司 一种硅环加工的工艺方法
CN110767587B (zh) * 2019-10-21 2022-04-01 西安奕斯伟材料科技有限公司 一种晶圆处理装置和上下料方法
CN110752169B (zh) * 2019-10-21 2022-03-22 西安奕斯伟材料科技有限公司 一种晶圆处理装置和上下料方法
CN110695840B (zh) * 2019-11-07 2021-02-02 许昌学院 一种基于光电检测的半导体研磨装置
CN110900342B (zh) * 2019-11-29 2020-12-08 上海磐盟电子材料有限公司 一种磨片机
JP7565591B2 (ja) 2021-01-06 2024-10-11 不二越機械工業株式会社 ウェハ研磨用キャリアおよびウェハ研磨装置
CN113579989B (zh) * 2021-08-13 2024-01-26 西安奕斯伟材料科技股份有限公司 滑片检测装置和抛光系统
JP7748892B2 (ja) * 2022-02-24 2025-10-03 三菱マテリアルテクノ株式会社 移載装置、研磨設備、及び移載方法
JP7769391B2 (ja) * 2023-04-13 2025-11-13 株式会社太陽 両面研磨装置
CN117260450B (zh) * 2023-11-22 2024-01-23 连云港弘鼎石英有限公司 一种具有防尘机构的石英制品加工用磨边设备
CN119833445B (zh) * 2025-01-09 2025-09-02 北京日扬弘创智能装备有限公司 用于半导体制造设备控制的方法、系统、装置及设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005288648A (ja) * 2004-04-02 2005-10-20 Sumco Corp 両面研磨装置の異物検出方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5679055A (en) * 1996-05-31 1997-10-21 Memc Electronic Materials, Inc. Automated wafer lapping system
JP4030247B2 (ja) * 1999-05-17 2008-01-09 株式会社荏原製作所 ドレッシング装置及びポリッシング装置
JP3663348B2 (ja) * 2000-09-26 2005-06-22 Ｔｏｗａ株式会社 研磨装置及び研磨方法
JP4337581B2 (ja) * 2004-02-27 2009-09-30 信越半導体株式会社 半導体ウエーハの両面研磨装置及び割れ検査方法
JP4522360B2 (ja) * 2005-12-02 2010-08-11 日東電工株式会社 半導体ウエハの位置決定方法およびこれを用いた装置
JP2009123790A (ja) * 2007-11-13 2009-06-04 Disco Abrasive Syst Ltd 研削装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005288648A (ja) * 2004-04-02 2005-10-20 Sumco Corp 両面研磨装置の異物検出方法

Also Published As

Publication number Publication date
JP2011066342A (ja) 2011-03-31
CN102019581A (zh) 2011-04-20
JP5541770B2 (ja) 2014-07-09
CN102019581B (zh) 2015-03-25
KR20110031108A (ko) 2011-03-24

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