KR101608565B1 - 가요성 기판의 반송장치 및 표시 디바이스 또는 전자회로의 제조 시스템 - Google Patents

가요성 기판의 반송장치 및 표시 디바이스 또는 전자회로의 제조 시스템 Download PDF

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Publication number
KR101608565B1
KR101608565B1 KR1020137008344A KR20137008344A KR101608565B1 KR 101608565 B1 KR101608565 B1 KR 101608565B1 KR 1020137008344 A KR1020137008344 A KR 1020137008344A KR 20137008344 A KR20137008344 A KR 20137008344A KR 101608565 B1 KR101608565 B1 KR 101608565B1
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KR
South Korea
Prior art keywords
substrate
rail
roller
feeding
unit
Prior art date
Application number
KR1020137008344A
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English (en)
Korean (ko)
Other versions
KR20130143024A (ko
Inventor
도모히데 하마다
도루 기우치
Original Assignee
가부시키가이샤 니콘
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Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Publication of KR20130143024A publication Critical patent/KR20130143024A/ko
Application granted granted Critical
Publication of KR101608565B1 publication Critical patent/KR101608565B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00—Winding webs
    • B65H18/08—Web-winding mechanisms
    • B65H18/10—Mechanisms in which power is applied to web-roll spindle
    • B65H18/103—Reel-to-reel type web winding and unwinding mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/182—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in unwinding mechanisms or in connection with unwinding operations
    • B65H23/1825—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in unwinding mechanisms or in connection with unwinding operations and controlling web tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B65H23/195—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in winding mechanisms or in connection with winding operations
    • B65H23/1955—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in winding mechanisms or in connection with winding operations and controlling web tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2402/00—Constructional details of the handling apparatus
    • B65H2402/30—Supports; Subassemblies; Mountings thereof
    • B65H2402/32—Sliding support means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/17—Nature of material
    • B65H2701/173—Metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/17—Nature of material
    • B65H2701/175—Plastic
    • B65H2701/1752—Polymer film
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays
KR1020137008344A 2011-02-24 2012-02-20 가요성 기판의 반송장치 및 표시 디바이스 또는 전자회로의 제조 시스템 KR101608565B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161446150P 2011-02-24 2011-02-24
US61/446,150 2011-02-24
PCT/JP2012/053961 WO2012115037A1 (ja) 2011-02-24 2012-02-20 可撓性基板の搬送装置及び表示デバイス又は電子回路の製造システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020167008032A Division KR101652674B1 (ko) 2011-02-24 2012-02-20 시트 기판의 반송장치, 및 처리장치

Publications (2)

Publication Number Publication Date
KR20130143024A KR20130143024A (ko) 2013-12-30
KR101608565B1 true KR101608565B1 (ko) 2016-04-01

Family

ID=46720814

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020167008032A KR101652674B1 (ko) 2011-02-24 2012-02-20 시트 기판의 반송장치, 및 처리장치
KR1020137008344A KR101608565B1 (ko) 2011-02-24 2012-02-20 가요성 기판의 반송장치 및 표시 디바이스 또는 전자회로의 제조 시스템

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020167008032A KR101652674B1 (ko) 2011-02-24 2012-02-20 시트 기판의 반송장치, 및 처리장치

Country Status (6)

Country Link
JP (2) JP5821944B2 (zh)
KR (2) KR101652674B1 (zh)
CN (2) CN105836510B (zh)
HK (2) HK1181021A1 (zh)
TW (4) TWI560127B (zh)
WO (1) WO2012115037A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106449491A (zh) * 2016-12-12 2017-02-22 武汉华星光电技术有限公司 柔性显示器件处理系统及方法
CN107032159B (zh) * 2017-04-20 2019-04-09 京东方科技集团股份有限公司 膜材转移装置及膜材转移控制方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000303178A (ja) 1999-04-16 2000-10-31 Sanyo Electric Co Ltd 薄膜形成装置
JP2002035982A (ja) 2000-07-27 2002-02-05 Uht Corp レーザー加工装置
JP2005349632A (ja) 2004-06-09 2005-12-22 Canon Inc インクジェット記録装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4485982A (en) * 1982-11-24 1984-12-04 Xerox Corporation Web tracking system
DE3426976A1 (de) * 1984-07-21 1986-01-30 Graphischer Maschinenbau GmbH, 1000 Berlin Vorrichtung zur durchfuehrung eines rollenwechsels
JP2688328B2 (ja) * 1994-08-29 1997-12-10 株式会社神戸製鋼所 帯状物移送方向転換装置
JP3233542B2 (ja) * 1995-02-14 2001-11-26 株式会社オーシーシー 金属管被覆光ファイバケーブルの製造方法及び製造装置
US5744778A (en) * 1996-04-02 1998-04-28 G&H Diversified Manufacturing, Inc. Tube handling method and apparatus for cutting machine
JP2000143052A (ja) * 1998-11-05 2000-05-23 Sony Corp フィルム状の被加工物の供給装置及び供給方法
SE524962C2 (sv) * 2002-05-30 2004-11-02 Drymilko Ag Förfarande för tillverkning av etiketter och anordning härför
US20040150135A1 (en) * 2002-06-26 2004-08-05 Michael Hennessey Method of melt-forming optical disk substrates
DE50306854D1 (de) * 2003-07-28 2007-05-03 Hauni Maschinenbau Ag Transporteinrichtung und Verfahren zum Transportieren eines Hüllmaterialstreifens
DE102004024461A1 (de) * 2004-05-14 2005-12-01 Konarka Technologies, Inc., Lowell Vorrichtung und Verfahren zur Herstellung eines elektronischen Bauelements mit zumindest einer aktiven organischen Schicht
JP2006100868A (ja) 2004-09-28 2006-04-13 Hitachi Kokusai Electric Inc 無線通信システム
WO2006100868A1 (ja) 2005-03-18 2006-09-28 Konica Minolta Holdings, Inc. 有機化合物層の形成方法、有機ｅｌ素子の製造方法、有機ｅｌ素子
JP4870502B2 (ja) * 2006-09-15 2012-02-08 株式会社ヒラノテクシード 有機ｅｌシート製造装置
JP4914815B2 (ja) * 2007-11-28 2012-04-11 ユニ・チャーム株式会社 加工装置
JP2010097803A (ja) * 2008-10-16 2010-04-30 Konica Minolta Holdings Inc 有機エレクトロニクス素子の作製方法、有機エレクトロニクス素子および有機エレクトロルミネッセンス素子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000303178A (ja) 1999-04-16 2000-10-31 Sanyo Electric Co Ltd 薄膜形成装置
JP2002035982A (ja) 2000-07-27 2002-02-05 Uht Corp レーザー加工装置
JP2005349632A (ja) 2004-06-09 2005-12-22 Canon Inc インクジェット記録装置

Also Published As

Publication number Publication date
TW201242878A (en) 2012-11-01
CN105836510B (zh) 2017-11-28
TW201702161A (zh) 2017-01-16
KR101652674B1 (ko) 2016-08-30
KR20130143024A (ko) 2013-12-30
TWI606970B (zh) 2017-12-01
JP2016026370A (ja) 2016-02-12
CN103153830B (zh) 2016-04-20
TW201803792A (zh) 2018-02-01
TW201827321A (zh) 2018-08-01
TWI701206B (zh) 2020-08-11
CN105836510A (zh) 2016-08-10
WO2012115037A1 (ja) 2012-08-30
HK1181021A1 (zh) 2013-11-01
HK1221701A1 (zh) 2017-06-09
JP5821944B2 (ja) 2015-11-24
CN103153830A (zh) 2013-06-12
JPWO2012115037A1 (ja) 2014-07-07
TWI560127B (en) 2016-12-01
KR20160040317A (ko) 2016-04-12
JP6065954B2 (ja) 2017-01-25
TWI623480B (zh) 2018-05-11

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