KR101599085B1 - 워크피스를 박리하는 방법 및 박리 용액 - Google Patents

워크피스를 박리하는 방법 및 박리 용액 Download PDF

Info

Publication number
KR101599085B1
KR101599085B1 KR1020107024079A KR20107024079A KR101599085B1 KR 101599085 B1 KR101599085 B1 KR 101599085B1 KR 1020107024079 A KR1020107024079 A KR 1020107024079A KR 20107024079 A KR20107024079 A KR 20107024079A KR 101599085 B1 KR101599085 B1 KR 101599085B1
Authority
KR
South Korea
Prior art keywords
solution
film
workpiece
alcr
kmno
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020107024079A
Other languages
English (en)
Korean (ko)
Other versions
KR20110003507A (ko
Inventor
타마라 안드레올리
우도 라우흐
Original Assignee
오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 트뤼프바흐
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 트뤼프바흐 filed Critical 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 트뤼프바흐
Publication of KR20110003507A publication Critical patent/KR20110003507A/ko
Application granted granted Critical
Publication of KR101599085B1 publication Critical patent/KR101599085B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/38—Alkaline compositions for etching refractory metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/20—Other heavy metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/20—Other heavy metals
    • C23G1/205—Other heavy metals refractory metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/22—Light metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Weting (AREA)
KR1020107024079A 2008-05-02 2009-04-09 워크피스를 박리하는 방법 및 박리 용액 Active KR101599085B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4989008P 2008-05-02 2008-05-02
US61/049,890 2008-05-02

Publications (2)

Publication Number Publication Date
KR20110003507A KR20110003507A (ko) 2011-01-12
KR101599085B1 true KR101599085B1 (ko) 2016-03-14

Family

ID=40810251

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107024079A Active KR101599085B1 (ko) 2008-05-02 2009-04-09 워크피스를 박리하는 방법 및 박리 용액

Country Status (14)

Country Link
US (1) US9057134B2 (enExample)
EP (1) EP2276875B1 (enExample)
JP (1) JP5730189B2 (enExample)
KR (1) KR101599085B1 (enExample)
CN (1) CN102016122A (enExample)
BR (1) BRPI0911617B1 (enExample)
CA (1) CA2723136C (enExample)
ES (1) ES2764249T3 (enExample)
MX (1) MX347701B (enExample)
PL (1) PL2276875T3 (enExample)
PT (1) PT2276875T (enExample)
RU (1) RU2507311C2 (enExample)
SG (1) SG188875A1 (enExample)
WO (1) WO2009132758A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011047091A1 (en) * 2009-10-13 2011-04-21 Martek Biosciences Corporation Methods for treating traumatic brain injury
US9230778B2 (en) 2011-06-07 2016-01-05 Oerlikon Surface Solutions Ag, Trubbach Method for removing hard carbon layers
DE102011105645A1 (de) 2011-06-07 2012-12-13 Oerlikon Trading Ag, Trübbach Entschichtungsverfahren für harte Kohlenstoffschichten
CN102277587B (zh) * 2011-07-29 2013-06-05 沈阳大学 一种多组元氮化物硬质反应膜的退除方法
JP6440814B2 (ja) * 2014-03-18 2018-12-19 プラティット・アクチエンゲゼルシャフト 鋼および超硬合金基板のセラミック硬質材料層の除膜方法
US9406534B2 (en) * 2014-09-17 2016-08-02 Lam Research Corporation Wet clean process for cleaning plasma processing chamber components
JP6334500B2 (ja) * 2015-11-19 2018-05-30 株式会社ジーテクト アルミニウムめっき鋼板の溶接方法
CN106884168A (zh) * 2017-04-07 2017-06-23 苏州星蓝纳米技术有限公司 一种硬质合金退涂液及其配制和使用方法
CN107829090A (zh) * 2017-11-15 2018-03-23 温州职业技术学院 Dlc涂层的脱除方法
CN110541169B (zh) * 2018-06-29 2021-12-28 蓝思科技股份有限公司 一种用于脱除工件表面镀层的褪镀液及褪镀方法
WO2020039011A1 (en) * 2018-08-21 2020-02-27 Oerlikon Surface Solutions Ag, Pfäffikon Stripping of coatings al-containing coatings
CN111676448A (zh) * 2020-06-12 2020-09-18 艾瑞森表面技术（苏州）股份有限公司 一种可褪涂的TiAlCrN纳米复合涂层的制备方法
CN112323136A (zh) * 2020-10-26 2021-02-05 深圳市裕展精密科技有限公司 退镀液以及退镀方法
CN115637433A (zh) * 2022-09-28 2023-01-24 国营川西机器厂 Al/BN封严涂层去除方法
WO2024133016A1 (en) 2022-12-20 2024-06-27 Wolfram Bergbau Und Hütten Ag Process for preparing cemented carbide scrap for recycling

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5700518A (en) 1996-04-26 1997-12-23 Korea Institute Of Science And Technology Fabrication method for diamond-coated cemented carbide cutting tool
JP2007519825A (ja) * 2004-01-29 2007-07-19 オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト 膜除去法および膜除去法を実施するための単チャンバ装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3085917A (en) 1960-05-27 1963-04-16 Gen Electric Chemical cleaning method and material
FR1369568A (fr) * 1963-06-24 1964-08-14 Purex Corp Composition pour le nettoyage des métaux
US3833414A (en) * 1972-09-05 1974-09-03 Gen Electric Aluminide coating removal method
US4327134A (en) * 1979-11-29 1982-04-27 Alloy Surfaces Company, Inc. Stripping of diffusion treated metals
US5128179A (en) * 1981-07-08 1992-07-07 Alloy Surfaces Company, Inc. Metal diffusion and after-treatment
US4476047A (en) 1982-03-22 1984-10-09 London Nuclear Limited Process for treatment of oxide films prior to chemical cleaning
DE4339502C2 (de) 1993-11-24 1999-02-25 Thoene Carl Stefan Entschichtungslösung zum naßchemischen Entfernen von Hartstoffschichten und Verfahren zu deren Anwendung
US6036995A (en) * 1997-01-31 2000-03-14 Sermatech International, Inc. Method for removal of surface layers of metallic coatings
JP4326144B2 (ja) 1997-11-10 2009-09-02 エリコン・トレーディング・アクチェンゲゼルシャフト，トリュープバッハ 物体より層を分離するための方法
US7150922B2 (en) * 2000-03-13 2006-12-19 General Electric Company Beta-phase nickel aluminide overlay coatings and process therefor
SG143972A1 (en) * 2000-09-14 2008-07-29 Semiconductor Energy Lab Semiconductor device and manufacturing method thereof
US7045073B2 (en) * 2002-12-18 2006-05-16 Intel Corporation Pre-etch implantation damage for the removal of thin film layers
US7077918B2 (en) * 2004-01-29 2006-07-18 Unaxis Balzers Ltd. Stripping apparatus and method for removal of coatings on metal surfaces

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5700518A (en) 1996-04-26 1997-12-23 Korea Institute Of Science And Technology Fabrication method for diamond-coated cemented carbide cutting tool
JP2007519825A (ja) * 2004-01-29 2007-07-19 オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト 膜除去法および膜除去法を実施するための単チャンバ装置

Also Published As

Publication number Publication date
BRPI0911617A2 (enExample) 2017-07-25
US20110056914A1 (en) 2011-03-10
KR20110003507A (ko) 2011-01-12
EP2276875A1 (de) 2011-01-26
CA2723136A1 (en) 2009-11-05
PT2276875T (pt) 2020-01-17
RU2507311C2 (ru) 2014-02-20
JP5730189B2 (ja) 2015-06-03
CA2723136C (en) 2017-11-07
WO2009132758A1 (de) 2009-11-05
CN102016122A (zh) 2011-04-13
ES2764249T3 (es) 2020-06-02
EP2276875B1 (de) 2019-10-09
PL2276875T3 (pl) 2020-06-01
JP2011520033A (ja) 2011-07-14
MX347701B (es) 2017-05-09
US9057134B2 (en) 2015-06-16
RU2010149274A (ru) 2012-06-10
MX2010011871A (es) 2010-11-30
BRPI0911617B1 (pt) 2023-11-07
SG188875A1 (en) 2013-04-30

Similar Documents

Publication Publication Date Title
KR101599085B1 (ko) 워크피스를 박리하는 방법 및 박리 용액
TWI500816B (zh) 容器用鋼板及其製造方法
US20090065101A1 (en) Corrosion Resistant Conversion Coatings
EP2439310B1 (en) Steel sheet for containers use with organic film performance and method of production of same
WO2007100017A1 (ja) 金属表面処理用組成物、金属表面処理方法、及び金属材料
EP2649219B1 (en) Metal pretreatment composition containing zirconium, copper, and metal chelating agents and related coatings on metal substrates
KR20010095051A (ko) 마그네슘 합금의 표면처리 방법 및 마그네슘 합금 부재
JP2023506442A (ja) 亜鉛ベースの金属保護層と、金属保護層の表面上に生成されたリン酸塩処理層とを有する平鋼製品の製造方法、およびこのタイプの平鋼製品
US7077918B2 (en) Stripping apparatus and method for removal of coatings on metal surfaces
JP4675908B2 (ja) 膜除去法および膜除去法を実施するための単チャンバ装置
KR20140078662A (ko) 아연화 알루미늄
EP2213767A1 (en) Process for producing surface-regulated aluminum cast
Keawhan et al. Corrosion behavior of AISI 4140 steel surface coated by physical vapor deposition
CN109576719A (zh) 一种硬质涂层用退涂液及其制备方法与应用
CN102560492A (zh) 镁合金表面防腐处理方法及其镁制品
JP5540320B2 (ja) 超硬材における硬質被膜の除去方法及び超硬材の製造方法
JP2003277960A (ja) マグネシウム合金の表面処理方法
US6126997A (en) Method for treating magnesium die castings
EP3841228B1 (en) Stripping of al-containing coatings
JP2001098392A (ja) 防錆処理金属、防錆皮膜形成用組成物およびそれを用いた防錆皮膜形成方法
US20080295728A1 (en) Coatings including tobacco products as corrosion inhibitors
JPH0941199A (ja) 表面被覆膜の剥離方法
US20020182337A1 (en) Mechanical plating of zinc alloys
CA1341137C (en) Chromium-containing low-cure coating composition
CN119082741A (zh) 一种快速去除钛及钛合金表面氧化层的清洗剂及清洗工艺

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

FPAY Annual fee payment

Payment date: 20190213

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20200303

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 11