KR101599085B1 - 워크피스를 박리하는 방법 및 박리 용액 - Google Patents
워크피스를 박리하는 방법 및 박리 용액 Download PDFInfo
- Publication number
- KR101599085B1 KR101599085B1 KR1020107024079A KR20107024079A KR101599085B1 KR 101599085 B1 KR101599085 B1 KR 101599085B1 KR 1020107024079 A KR1020107024079 A KR 1020107024079A KR 20107024079 A KR20107024079 A KR 20107024079A KR 101599085 B1 KR101599085 B1 KR 101599085B1
- Authority
- KR
- South Korea
- Prior art keywords
- solution
- film
- workpiece
- alcr
- kmno
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 21
- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Substances [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims abstract description 12
- 239000003513 alkali Substances 0.000 claims abstract description 10
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 4
- 239000000956 alloy Substances 0.000 claims abstract description 4
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 4
- 150000004767 nitrides Chemical class 0.000 claims abstract description 4
- 239000000243 solution Substances 0.000 claims description 41
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 6
- 239000012670 alkaline solution Substances 0.000 claims description 4
- 238000004381 surface treatment Methods 0.000 claims description 4
- 238000011282 treatment Methods 0.000 claims description 4
- 230000001680 brushing effect Effects 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000012805 post-processing Methods 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 239000007864 aqueous solution Substances 0.000 claims 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- 239000012286 potassium permanganate Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 abstract description 14
- 239000002184 metal Substances 0.000 abstract description 14
- 239000000203 mixture Substances 0.000 abstract description 7
- 239000000126 substance Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- LBSANEJBGMCTBH-UHFFFAOYSA-N manganate Chemical compound [O-][Mn]([O-])(=O)=O LBSANEJBGMCTBH-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000004299 exfoliation Methods 0.000 description 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 3
- 229910010037 TiAlN Inorganic materials 0.000 description 2
- RHBRWKIPYGZNMP-UHFFFAOYSA-N [O--].[O--].[O--].[Al+3].[Cr+3] Chemical compound [O--].[O--].[O--].[Al+3].[Cr+3] RHBRWKIPYGZNMP-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- -1 TiN Chemical compound 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/38—Alkaline compositions for etching refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/20—Other heavy metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/20—Other heavy metals
- C23G1/205—Other heavy metals refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/22—Light metals
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- ing And Chemical Polishing (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Chemically Coating (AREA)
- Weting (AREA)
- Chemical Treatment Of Metals (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4989008P | 2008-05-02 | 2008-05-02 | |
| US61/049,890 | 2008-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20110003507A KR20110003507A (ko) | 2011-01-12 |
| KR101599085B1 true KR101599085B1 (ko) | 2016-03-14 |
Family
ID=40810251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020107024079A Active KR101599085B1 (ko) | 2008-05-02 | 2009-04-09 | 워크피스를 박리하는 방법 및 박리 용액 |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US9057134B2 (enExample) |
| EP (1) | EP2276875B1 (enExample) |
| JP (1) | JP5730189B2 (enExample) |
| KR (1) | KR101599085B1 (enExample) |
| CN (1) | CN102016122A (enExample) |
| BR (1) | BRPI0911617B1 (enExample) |
| CA (1) | CA2723136C (enExample) |
| ES (1) | ES2764249T3 (enExample) |
| MX (1) | MX347701B (enExample) |
| PL (1) | PL2276875T3 (enExample) |
| PT (1) | PT2276875T (enExample) |
| RU (1) | RU2507311C2 (enExample) |
| SG (1) | SG188875A1 (enExample) |
| WO (1) | WO2009132758A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110086914A1 (en) * | 2009-10-13 | 2011-04-14 | Bailes Julian E | Methods for Treating Traumatic Brain Injury |
| MY165291A (en) | 2011-06-07 | 2018-03-21 | Oerlikon Surface Solutions Ag Pfaeffikon | Stripping process for hard carbon coatings |
| DE102011105645A1 (de) | 2011-06-07 | 2012-12-13 | Oerlikon Trading Ag, Trübbach | Entschichtungsverfahren für harte Kohlenstoffschichten |
| CN102277587B (zh) * | 2011-07-29 | 2013-06-05 | 沈阳大学 | 一种多组元氮化物硬质反应膜的退除方法 |
| WO2015139731A1 (de) * | 2014-03-18 | 2015-09-24 | Platit Ag | Verfahren zum entschichten von keramischen hartstoffschichten von stahl- und hartmetall-substraten |
| US9406534B2 (en) * | 2014-09-17 | 2016-08-02 | Lam Research Corporation | Wet clean process for cleaning plasma processing chamber components |
| JP6334500B2 (ja) * | 2015-11-19 | 2018-05-30 | 株式会社ジーテクト | アルミニウムめっき鋼板の溶接方法 |
| CN106884168A (zh) * | 2017-04-07 | 2017-06-23 | 苏州星蓝纳米技术有限公司 | 一种硬质合金退涂液及其配制和使用方法 |
| CN107829090A (zh) * | 2017-11-15 | 2018-03-23 | 温州职业技术学院 | Dlc涂层的脱除方法 |
| CN110541169B (zh) * | 2018-06-29 | 2021-12-28 | 蓝思科技股份有限公司 | 一种用于脱除工件表面镀层的褪镀液及褪镀方法 |
| WO2020039011A1 (en) * | 2018-08-21 | 2020-02-27 | Oerlikon Surface Solutions Ag, Pfäffikon | Stripping of coatings al-containing coatings |
| CN111676448A (zh) * | 2020-06-12 | 2020-09-18 | 艾瑞森表面技术（苏州）股份有限公司 | 一种可褪涂的TiAlCrN纳米复合涂层的制备方法 |
| CN112323136A (zh) * | 2020-10-26 | 2021-02-05 | 深圳市裕展精密科技有限公司 | 退镀液以及退镀方法 |
| CN115637433A (zh) * | 2022-09-28 | 2023-01-24 | 国营川西机器厂 | Al/BN封严涂层去除方法 |
| WO2024133016A1 (en) | 2022-12-20 | 2024-06-27 | Wolfram Bergbau Und Hütten Ag | Process for preparing cemented carbide scrap for recycling |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5700518A (en) | 1996-04-26 | 1997-12-23 | Korea Institute Of Science And Technology | Fabrication method for diamond-coated cemented carbide cutting tool |
| JP2007519825A (ja) * | 2004-01-29 | 2007-07-19 | オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト | 膜除去法および膜除去法を実施するための単チャンバ装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3085917A (en) | 1960-05-27 | 1963-04-16 | Gen Electric | Chemical cleaning method and material |
| FR1369568A (fr) * | 1963-06-24 | 1964-08-14 | Purex Corp | Composition pour le nettoyage des métaux |
| US3833414A (en) * | 1972-09-05 | 1974-09-03 | Gen Electric | Aluminide coating removal method |
| US4327134A (en) * | 1979-11-29 | 1982-04-27 | Alloy Surfaces Company, Inc. | Stripping of diffusion treated metals |
| US5128179A (en) * | 1981-07-08 | 1992-07-07 | Alloy Surfaces Company, Inc. | Metal diffusion and after-treatment |
| US4476047A (en) * | 1982-03-22 | 1984-10-09 | London Nuclear Limited | Process for treatment of oxide films prior to chemical cleaning |
| DE4339502C2 (de) | 1993-11-24 | 1999-02-25 | Thoene Carl Stefan | Entschichtungslösung zum naßchemischen Entfernen von Hartstoffschichten und Verfahren zu deren Anwendung |
| US6036995A (en) * | 1997-01-31 | 2000-03-14 | Sermatech International, Inc. | Method for removal of surface layers of metallic coatings |
| JP4326144B2 (ja) | 1997-11-10 | 2009-09-02 | エリコン・トレーディング・アクチェンゲゼルシャフト，トリュープバッハ | 物体より層を分離するための方法 |
| US7150922B2 (en) * | 2000-03-13 | 2006-12-19 | General Electric Company | Beta-phase nickel aluminide overlay coatings and process therefor |
| SG143972A1 (en) * | 2000-09-14 | 2008-07-29 | Semiconductor Energy Lab | Semiconductor device and manufacturing method thereof |
| US7045073B2 (en) * | 2002-12-18 | 2006-05-16 | Intel Corporation | Pre-etch implantation damage for the removal of thin film layers |
| US7077918B2 (en) * | 2004-01-29 | 2006-07-18 | Unaxis Balzers Ltd. | Stripping apparatus and method for removal of coatings on metal surfaces |
-
2009
- 2009-04-09 MX MX2010011871A patent/MX347701B/es active IP Right Grant
- 2009-04-09 CA CA2723136A patent/CA2723136C/en active Active
- 2009-04-09 WO PCT/EP2009/002631 patent/WO2009132758A1/de not_active Ceased
- 2009-04-09 JP JP2011506589A patent/JP5730189B2/ja active Active
- 2009-04-09 US US12/989,727 patent/US9057134B2/en active Active
- 2009-04-09 KR KR1020107024079A patent/KR101599085B1/ko active Active
- 2009-04-09 PT PT97378020T patent/PT2276875T/pt unknown
- 2009-04-09 ES ES09737802T patent/ES2764249T3/es active Active
- 2009-04-09 EP EP09737802.0A patent/EP2276875B1/de active Active
- 2009-04-09 CN CN2009801156527A patent/CN102016122A/zh active Pending
- 2009-04-09 RU RU2010149274/02A patent/RU2507311C2/ru active
- 2009-04-09 BR BRPI0911617-6A patent/BRPI0911617B1/pt active IP Right Grant
- 2009-04-09 PL PL09737802T patent/PL2276875T3/pl unknown
- 2009-04-09 SG SG2013017405A patent/SG188875A1/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5700518A (en) | 1996-04-26 | 1997-12-23 | Korea Institute Of Science And Technology | Fabrication method for diamond-coated cemented carbide cutting tool |
| JP2007519825A (ja) * | 2004-01-29 | 2007-07-19 | オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト | 膜除去法および膜除去法を実施するための単チャンバ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009132758A1 (de) | 2009-11-05 |
| BRPI0911617B1 (pt) | 2023-11-07 |
| EP2276875B1 (de) | 2019-10-09 |
| SG188875A1 (en) | 2013-04-30 |
| PL2276875T3 (pl) | 2020-06-01 |
| CA2723136A1 (en) | 2009-11-05 |
| US9057134B2 (en) | 2015-06-16 |
| RU2507311C2 (ru) | 2014-02-20 |
| KR20110003507A (ko) | 2011-01-12 |
| PT2276875T (pt) | 2020-01-17 |
| MX347701B (es) | 2017-05-09 |
| US20110056914A1 (en) | 2011-03-10 |
| ES2764249T3 (es) | 2020-06-02 |
| JP2011520033A (ja) | 2011-07-14 |
| MX2010011871A (es) | 2010-11-30 |
| RU2010149274A (ru) | 2012-06-10 |
| CN102016122A (zh) | 2011-04-13 |
| CA2723136C (en) | 2017-11-07 |
| JP5730189B2 (ja) | 2015-06-03 |
| EP2276875A1 (de) | 2011-01-26 |
| BRPI0911617A2 (enExample) | 2017-07-25 |
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