KR101598913B1 - 기상 성장 장치 및 기상 성장 방법 - Google Patents

기상 성장 장치 및 기상 성장 방법 Download PDF

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Publication number
KR101598913B1
KR101598913B1 KR1020140081746A KR20140081746A KR101598913B1 KR 101598913 B1 KR101598913 B1 KR 101598913B1 KR 1020140081746 A KR1020140081746 A KR 1020140081746A KR 20140081746 A KR20140081746 A KR 20140081746A KR 101598913 B1 KR101598913 B1 KR 101598913B1
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South Korea
Prior art keywords
gas
gas supply
path
organic metal
reaction chamber
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KR1020140081746A
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English (en)
Korean (ko)
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KR20150006355A (ko
Inventor
타쿠미 야마다
유우스케 사토
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가부시키가이샤 뉴플레어 테크놀로지
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/16—Controlling or regulating
    • C30B25/165—Controlling or regulating the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020140081746A 2013-07-08 2014-07-01 기상 성장 장치 및 기상 성장 방법 Active KR101598913B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2013-142616 2013-07-08
JP2013142616A JP6109657B2 (ja) 2013-07-08 2013-07-08 気相成長装置および気相成長方法

Publications (2)

Publication Number Publication Date
KR20150006355A KR20150006355A (ko) 2015-01-16
KR101598913B1 true KR101598913B1 (ko) 2016-03-02

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KR1020140081746A Active KR101598913B1 (ko) 2013-07-08 2014-07-01 기상 성장 장치 및 기상 성장 방법

Country Status (4)

Country Link
US (1) US9546435B2 (https=)
JP (1) JP6109657B2 (https=)
KR (1) KR101598913B1 (https=)
TW (1) TWI570264B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10438795B2 (en) 2015-06-22 2019-10-08 Veeco Instruments, Inc. Self-centering wafer carrier system for chemical vapor deposition
JP2018204433A (ja) * 2015-09-25 2018-12-27 株式会社日立製作所 内燃機関
USD819580S1 (en) 2016-04-01 2018-06-05 Veeco Instruments, Inc. Self-centering wafer carrier for chemical vapor deposition
USD810705S1 (en) 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition
US9964780B2 (en) * 2016-04-14 2018-05-08 Johnson & Johnson Vision Care, Inc. Methods and apparatus to enhance oxygen concentrations for advanced ophthalmic devices
KR102710128B1 (ko) * 2020-06-30 2024-09-27 주식회사 케이씨텍 초임계 유체 배기 시스템 및 그 방법
US20250075369A1 (en) * 2023-08-28 2025-03-06 Applied Materials, Inc. Method and apparatus for gas delivery in a processing chamber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002313731A (ja) 2001-04-10 2002-10-25 Nippon Sanso Corp 有機金属気相成長装置
KR100758081B1 (ko) 2004-01-05 2007-09-11 가부시키가이샤 호리바 세이사꾸쇼 성막 장치와 성막 방법
KR100859898B1 (ko) 2000-09-26 2008-09-23 가부시키가이샤 시마즈세이사쿠쇼 기화 시스템의 액체재료 공급장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472719A (ja) * 1990-07-13 1992-03-06 Matsushita Electron Corp 半導体気相成長装置
JP3124376B2 (ja) * 1992-06-17 2001-01-15 株式会社東芝 化合物半導体の気相成長装置
JP2002367911A (ja) * 2001-06-07 2002-12-20 Sumitomo Chem Co Ltd 気相成長半導体製造装置及び方法
JP4709963B2 (ja) * 2004-04-27 2011-06-29 多摩川精機株式会社 絶対位置検出方法及び装置
JP4555913B2 (ja) * 2004-05-18 2010-10-06 多摩川精機株式会社 フィールドバス対応型レゾルバ装置
KR20060112056A (ko) * 2005-04-26 2006-10-31 주식회사 리 첼 유기금속 화학기상 증착장치를 이용한 아연산화물 박막형성방법
JP5283370B2 (ja) * 2007-11-29 2013-09-04 株式会社ニューフレアテクノロジー 気相成長装置および気相成長方法
JP5634216B2 (ja) * 2010-10-29 2014-12-03 株式会社アルバック ガス供給システム
JP5626113B2 (ja) * 2011-05-18 2014-11-19 株式会社Ihi ガス分岐装置およびガス分岐方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100859898B1 (ko) 2000-09-26 2008-09-23 가부시키가이샤 시마즈세이사쿠쇼 기화 시스템의 액체재료 공급장치
JP2002313731A (ja) 2001-04-10 2002-10-25 Nippon Sanso Corp 有機金属気相成長装置
KR100758081B1 (ko) 2004-01-05 2007-09-11 가부시키가이샤 호리바 세이사꾸쇼 성막 장치와 성막 방법

Also Published As

Publication number Publication date
US9546435B2 (en) 2017-01-17
JP6109657B2 (ja) 2017-04-05
TWI570264B (zh) 2017-02-11
KR20150006355A (ko) 2015-01-16
JP2015015429A (ja) 2015-01-22
US20150007766A1 (en) 2015-01-08
TW201508086A (zh) 2015-03-01

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