KR101561682B1 - 깊은 홈 후측 콘택 광발전 태양 전지들 - Google Patents

깊은 홈 후측 콘택 광발전 태양 전지들 Download PDF

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KR101561682B1
KR101561682B1 KR1020117013407A KR20117013407A KR101561682B1 KR 101561682 B1 KR101561682 B1 KR 101561682B1 KR 1020117013407 A KR1020117013407 A KR 1020117013407A KR 20117013407 A KR20117013407 A KR 20117013407A KR 101561682 B1 KR101561682 B1 KR 101561682B1
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doped region
wafer
passivation layer
doped
rear surface
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KR20110097827A (ko
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후메이윤 액터 무갈
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실리콘 씨피브이 피엘씨
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/40Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising photovoltaic cells in a mechanically stacked configuration
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/121The active layers comprising only Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/14Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • H10F77/148Shapes of potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219Arrangements for electrodes of back-contact photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/93Interconnections
    • H10F77/933Interconnections for devices having potential barriers
    • H10F77/935Interconnections for devices having potential barriers for photovoltaic devices or modules
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
KR1020117013407A 2008-11-12 2009-11-12 깊은 홈 후측 콘택 광발전 태양 전지들 Active KR101561682B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0820684.9A GB0820684D0 (en) 2008-11-12 2008-11-12 Photovoltaic solar cells
GB0820684.9 2008-11-12

Publications (2)

Publication Number Publication Date
KR20110097827A KR20110097827A (ko) 2011-08-31
KR101561682B1 true KR101561682B1 (ko) 2015-10-20

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Country Link
US (1) US8889462B2 (enExample)
EP (1) EP2356687B1 (enExample)
JP (1) JP5503668B2 (enExample)
KR (1) KR101561682B1 (enExample)
CN (1) CN102246324B (enExample)
GB (2) GB0820684D0 (enExample)
WO (1) WO2010055346A2 (enExample)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2356689A4 (en) * 2008-11-26 2013-11-20 Microlink Devices Inc SOLAR CELL WITH BACK WAY FOR CONTACT TO EMITTER LAYER
US20110195542A1 (en) * 2010-02-05 2011-08-11 E-Chem Enterprise Corp. Method of providing solar cell electrode by electroless plating and an activator used therein
JP2011210802A (ja) * 2010-03-29 2011-10-20 Napura:Kk 太陽電池
CN102569491B (zh) * 2010-12-17 2014-07-23 上海凯世通半导体有限公司 太阳能晶片的掺杂方法以及掺杂晶片
CN102637766B (zh) * 2011-02-15 2014-04-30 上海凯世通半导体有限公司 太阳能晶片掺杂方法、掺杂晶片、太阳能电池及制作方法
CN102569492B (zh) * 2010-12-17 2014-11-05 上海凯世通半导体有限公司 太阳能晶片的掺杂方法以及掺杂晶片
CN102637767B (zh) * 2011-02-15 2015-03-18 上海凯世通半导体有限公司 太阳能电池的制作方法以及太阳能电池
US9559228B2 (en) * 2011-09-30 2017-01-31 Sunpower Corporation Solar cell with doped groove regions separated by ridges
US9269851B2 (en) * 2011-11-15 2016-02-23 Newsouth Innovations Pty Limited Metal contact scheme for solar cells
US20140345685A1 (en) * 2011-12-13 2014-11-27 Dow Corning Corporation Photovoltaic Cell And Method Of Forming The Same
TWI470816B (zh) * 2011-12-28 2015-01-21 Au Optronics Corp 太陽能電池
CN103208557A (zh) * 2012-01-13 2013-07-17 上海凯世通半导体有限公司 太阳能电池的制作方法及太阳能电池
CN103325666A (zh) * 2012-03-21 2013-09-25 苏州贝克微电子有限公司 半导体晶圆掺杂扩散技术
CN102623564B (zh) * 2012-03-30 2015-01-07 中山大学 一种具有激光开槽正面电极的晶体硅太阳电池的制作方法
CN102738288A (zh) * 2012-06-20 2012-10-17 常州天合光能有限公司 非晶硅钝化n型背接触电池及其制备方法
CN102832270A (zh) * 2012-08-16 2012-12-19 友达光电股份有限公司 太阳能电池及其制作方法
CN102856328B (zh) * 2012-10-10 2015-06-10 友达光电股份有限公司 太阳能电池及其制作方法
CN102881737A (zh) * 2012-10-15 2013-01-16 浙江正泰太阳能科技有限公司 体结背接触太阳能电池
CN102903775B (zh) * 2012-10-24 2014-10-22 中国科学院半导体研究所 用于聚光和激光输能的晶体硅太阳能电池结构及其制作方法
WO2014137284A1 (en) * 2013-03-05 2014-09-12 Trina Solar Energy Development Pte Ltd Method of fabricating a solar cell
TW201442261A (zh) * 2013-04-30 2014-11-01 Terasolar Energy Materials Corp 矽晶太陽能電池的製造方法以及矽晶太陽能電池
CN103794679B (zh) * 2014-01-26 2016-07-06 晶澳(扬州)太阳能科技有限公司 一种背接触太阳能电池的制备方法
US20160284917A1 (en) * 2015-03-27 2016-09-29 Seung Bum Rim Passivation Layer for Solar Cells
WO2017146214A1 (ja) * 2016-02-26 2017-08-31 京セラ株式会社 太陽電池素子
TWI668876B (zh) * 2017-08-29 2019-08-11 柯作同 太陽能電池及其製造方法
WO2019102073A1 (en) * 2017-11-24 2019-05-31 Aalto-Korkeakoulusäätiö Sr Photovoltaic semiconductor structure
US11081606B2 (en) * 2018-12-27 2021-08-03 Solarpaint Ltd. Flexible and rollable photovoltaic cell having enhanced properties of mechanical impact absorption
US11978815B2 (en) 2018-12-27 2024-05-07 Solarpaint Ltd. Flexible photovoltaic cell, and methods and systems of producing it
EP4226427A4 (en) * 2020-10-07 2024-11-06 Solarpaint Ltd. FLEXIBLE SOLAR PANELS AND PHOTOVOLTAIC DEVICES AND METHODS AND SYSTEMS FOR THE PRODUCTION THEREOF
CN114695594B (zh) * 2020-12-30 2024-11-15 苏州阿特斯阳光电力科技有限公司 背接触电池的制备方法及背接触电池
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CN113964222B (zh) * 2021-10-15 2023-11-10 浙江大学 一种低漏电的晶体硅太阳能电池片、电池组件及制备方法
CN113964223B (zh) * 2021-10-15 2023-11-10 浙江大学 一种抑制切割边缘漏电的晶体硅太阳能电池片、电池组件及制备方法
CN115084299B (zh) * 2022-06-23 2024-10-01 广东爱旭科技有限公司 一种p型太阳能电池及其制作方法、电池组件和光伏系统
CN115000214B (zh) * 2022-06-23 2024-03-29 浙江爱旭太阳能科技有限公司 一种p型太阳能电池及其制作方法、电池组件和光伏系统
CN115000247B (zh) * 2022-07-29 2022-11-04 中国华能集团清洁能源技术研究院有限公司 内部钝化的背接触perc电池片的制作方法
CN118943223A (zh) * 2024-07-24 2024-11-12 浙江爱旭太阳能科技有限公司 一种太阳能电池、电池组件及光伏系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4838952A (en) 1988-04-29 1989-06-13 Spectrolab, Inc. Controlled reflectance solar cell
KR100378343B1 (ko) 1996-01-09 2003-07-18 삼성전자주식회사 후면 함몰전극형 태양전지
JP2007059644A (ja) 2005-08-25 2007-03-08 Toyota Motor Corp 光起電力素子
US7339110B1 (en) 2003-04-10 2008-03-04 Sunpower Corporation Solar cell and method of manufacture

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4703553A (en) * 1986-06-16 1987-11-03 Spectrolab, Inc. Drive through doping process for manufacturing low back surface recombination solar cells
US5053083A (en) * 1989-05-08 1991-10-01 The Board Of Trustees Of The Leland Stanford Junior University Bilevel contact solar cells
JPH0682854B2 (ja) * 1989-11-24 1994-10-19 株式会社日立製作所 太陽電池
JP2001267610A (ja) * 2000-03-17 2001-09-28 Hitachi Ltd 太陽電池
KR100372343B1 (ko) 2000-12-22 2003-02-15 엘지전자 주식회사 넘버.세븐 신호망에서의 폐기 메시지 관리 방법
US7217883B2 (en) * 2001-11-26 2007-05-15 Shell Solar Gmbh Manufacturing a solar cell with backside contacts
US7169669B2 (en) * 2001-12-04 2007-01-30 Origin Energy Solar Pty. Ltd. Method of making thin silicon sheets for solar cells
JP2005310830A (ja) * 2004-04-16 2005-11-04 Sharp Corp 太陽電池および太陽電池の製造方法
CN1957478A (zh) 2004-04-30 2007-05-02 新南创新有限公司 人造无定形半导体及其在太阳能电池中的应用
JP4641858B2 (ja) * 2005-04-22 2011-03-02 シャープ株式会社 太陽電池
JP4481869B2 (ja) * 2005-04-26 2010-06-16 信越半導体株式会社 太陽電池の製造方法及び太陽電池並びに半導体装置の製造方法
US20070137692A1 (en) * 2005-12-16 2007-06-21 Bp Corporation North America Inc. Back-Contact Photovoltaic Cells
JP2009152222A (ja) * 2006-10-27 2009-07-09 Kyocera Corp 太陽電池素子の製造方法
CN101017858A (zh) * 2007-01-10 2007-08-15 北京市太阳能研究所有限公司 一种背接触式太阳能电池及其制作方法
CN201112399Y (zh) * 2007-09-27 2008-09-10 江苏林洋新能源有限公司 具有浓硼浓磷扩散结构的太阳能电池

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4838952A (en) 1988-04-29 1989-06-13 Spectrolab, Inc. Controlled reflectance solar cell
KR100378343B1 (ko) 1996-01-09 2003-07-18 삼성전자주식회사 후면 함몰전극형 태양전지
US7339110B1 (en) 2003-04-10 2008-03-04 Sunpower Corporation Solar cell and method of manufacture
JP2007059644A (ja) 2005-08-25 2007-03-08 Toyota Motor Corp 光起電力素子

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Publication number Publication date
GB2466342A (en) 2010-06-23
US20110214721A1 (en) 2011-09-08
EP2356687B1 (en) 2016-10-12
KR20110097827A (ko) 2011-08-31
GB2466342B (en) 2013-07-17
CN102246324B (zh) 2015-07-29
GB0919795D0 (en) 2009-12-30
JP2012508473A (ja) 2012-04-05
JP5503668B2 (ja) 2014-05-28
CN102246324A (zh) 2011-11-16
WO2010055346A2 (en) 2010-05-20
EP2356687A2 (en) 2011-08-17
GB0820684D0 (en) 2008-12-17
US8889462B2 (en) 2014-11-18
WO2010055346A3 (en) 2011-03-31

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