KR101550483B1 - 스케일 트랙 - Google Patents

스케일 트랙 Download PDF

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Publication number
KR101550483B1
KR101550483B1 KR1020117001051A KR20117001051A KR101550483B1 KR 101550483 B1 KR101550483 B1 KR 101550483B1 KR 1020117001051 A KR1020117001051 A KR 1020117001051A KR 20117001051 A KR20117001051 A KR 20117001051A KR 101550483 B1 KR101550483 B1 KR 101550483B1
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South Korea
Prior art keywords
metrology
track
track strip
metrology scale
scale
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KR1020117001051A
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English (en)
Korean (ko)
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KR20110033204A (ko
Inventor
알렉산더 데이비드 스캇 엘린
웨슬리 앤드류 히우드
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레니쇼우 피엘씨
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Publication of KR20110033204A publication Critical patent/KR20110033204A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/004—Scales; Graduations

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • Lubricants (AREA)
  • Prostheses (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
KR1020117001051A 2008-06-17 2009-06-11 스케일 트랙 Active KR101550483B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB0811076.9A GB0811076D0 (en) 2008-06-17 2008-06-17 Scale track
GB0811076.9 2008-06-17
GB0816225.7 2008-09-05
GBGB0816225.7A GB0816225D0 (en) 2008-06-17 2008-09-05 Scale track

Publications (2)

Publication Number Publication Date
KR20110033204A KR20110033204A (ko) 2011-03-30
KR101550483B1 true KR101550483B1 (ko) 2015-09-04

Family

ID=39672410

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117001051A Active KR101550483B1 (ko) 2008-06-17 2009-06-11 스케일 트랙

Country Status (8)

Country Link
US (1) US8141265B2 (https=)
EP (2) EP2294363B1 (https=)
JP (2) JP5475759B2 (https=)
KR (1) KR101550483B1 (https=)
CN (1) CN102057256B (https=)
ES (1) ES2727448T3 (https=)
GB (2) GB0811076D0 (https=)
WO (1) WO2010004248A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
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DE102011081638A1 (de) * 2011-08-26 2013-02-28 Zf Friedrichshafen Ag Gehäuseteil für ein Gehäuse eines Sensors für ein Fahrzeuggetriebe, Gehäuse für einen Sensor für ein Fahrzeuggetriebe, Sensor für ein Fahrzeuggetriebe und Verfahren zum Herstellen eines Sensors für ein Fahrzeuggetriebe
DE102011081637A1 (de) * 2011-08-26 2013-02-28 Zf Friedrichshafen Ag Führungsabschnitt eines Gehäuses für einen Sensor, Gehäuse für einen Sensor sowie Sensor, insbesondere für ein Fahrzeuggetriebe und Verfahren zum Herstellen eines Gehäuses für einen Sensor, insbesondere für ein Fahrzeuggetriebe
JP6436674B2 (ja) * 2014-07-28 2018-12-12 三菱電機株式会社 光学式エンコーダおよび光学式エンコーダの製造方法
TWI648520B (zh) 2016-10-21 2019-01-21 財團法人工業技術研究院 光學編碼裝置
EP3477263B1 (de) * 2017-10-26 2019-12-11 Dr. Johannes Heidenhain GmbH Anordnung mit einem an einem träger befestigten massstab
JP7148262B2 (ja) * 2018-04-19 2022-10-05 株式会社ミツトヨ リニアエンコーダ
CN108709478A (zh) * 2018-07-25 2018-10-26 宁夏国励汽车动力科技有限公司 标尺导轨
TWI680648B (zh) 2018-12-26 2019-12-21 財團法人工業技術研究院 編碼盤、檢光器、光學絕對式旋轉編碼器及編碼值輸出、偵錯與除錯的方法
TWI716246B (zh) 2019-12-31 2021-01-11 財團法人工業技術研究院 光學編碼器
KR102489221B1 (ko) * 2020-12-21 2023-01-17 세메스 주식회사 위치 측정기 및 이를 포함하는 기판 처리 장치
GB202211615D0 (en) 2022-08-09 2022-09-21 Renishaw Plc Scale

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US6049992A (en) 1997-01-08 2000-04-18 Johannes Heidenhain Gmbh Method and device for directed mounting of a measurement strip

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DE2712421C2 (de) 1977-03-22 1982-06-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßeinrichtung
NL7711811A (en) * 1977-10-27 1979-05-02 Engel Stevens Ceramic tile laying and aligning and - is of plastics with side oblong projections placed to prevent tile movement after positioning
JPH0110561Y2 (https=) * 1978-08-15 1989-03-27
DE3008384A1 (de) * 1980-03-05 1981-09-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
GB2107466B (en) 1981-10-13 1985-05-01 Ferranti Ltd Measuring apparatus
JPS58174806A (ja) 1982-04-07 1983-10-13 Mitsutoyo Mfg Co Ltd 直線型変位測定機
JPH06100479B2 (ja) 1982-09-01 1994-12-12 ローズマウント エンジニアリング コムパニー リミテッド 位置測定装置
DE3315214A1 (de) 1983-04-27 1984-10-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder winkelmesseinrichtung
DE3319600A1 (de) 1983-05-30 1984-12-06 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengenmesseinrichtung
US4569137A (en) 1983-06-07 1986-02-11 Mitutoyo Mfg. Co., Ltd. Linear scale type displacement measuring device and main scale attaching method thereof
DE3334398C1 (de) 1983-09-23 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
JPS60161524A (ja) 1984-02-02 1985-08-23 Mitsutoyo Mfg Co Ltd 光学式変位検出装置
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DE3635511A1 (de) * 1986-10-18 1988-04-28 Zeiss Carl Fa Halterung fuer mass- und formverkoerperung
GB8819723D0 (en) * 1988-08-19 1988-09-21 Renishaw Plc Metrological scale
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US5172250A (en) 1989-02-28 1992-12-15 Sony Magnescale, Inc. Hologram scale having moisture resistance
DE3929629A1 (de) 1989-09-06 1991-03-07 Zeiss Carl Fa Laengen- oder winkelmesseinrichtung
ATE161327T1 (de) 1994-05-06 1998-01-15 Heidenhain Gmbh Dr Johannes Temperatur-kompensierte positionsmesseinrichtung
DE4438079A1 (de) 1994-10-25 1996-05-02 Heidenhain Gmbh Dr Johannes Führung
DE19526517C2 (de) 1995-07-20 2000-08-24 Zeiss Carl Jena Gmbh Anordnung zur Befestigung einer Längenmeßeinrichtung
DE19526518C1 (de) 1995-07-20 1996-12-12 Zeiss Carl Jena Gmbh Anordnung zur formschlüssigen Aufnahme eines Maßstabs
DE19611983C1 (de) 1996-03-26 1997-07-31 Zeiss Carl Jena Gmbh Bandförmiges, elastisch biegbares Maßband für Längen- oder Winkelmeßeinrichtungen
US5973494A (en) 1996-05-13 1999-10-26 Mitutoyo Corporation Electronic caliper using a self-contained, low power inductive position transducer
DE19724732A1 (de) * 1997-06-12 1998-12-17 Heidenhain Gmbh Dr Johannes Längenmeßsystem mit modular aufgebautem Maßstab
DE19738023B4 (de) * 1997-08-30 2007-04-12 Dr. Johannes Heidenhain Gmbh Vorrichtung und Verfahren zur exakten Justage von Teilungsträgern
DE19802036B4 (de) * 1998-01-21 2006-11-30 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur mechanischen Justage von Teilungsträgern
US6772531B1 (en) 1999-11-30 2004-08-10 Renishaw Plc Measurement apparatus including a track for a measurement scale and apparatus for tensioning the scale
JP3668111B2 (ja) * 2000-09-06 2005-07-06 株式会社ミツトヨ ユニット型リニアスケール
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
US20030226271A1 (en) 2002-06-05 2003-12-11 Cordell Victor David Tile spacer
DE10229885B4 (de) 2002-07-03 2010-06-24 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zum Anbringen eines Maßstabs oder Maßstabträgers oder einer Maßstabführung
GB0216487D0 (en) * 2002-07-16 2002-08-21 Renishaw Plc A rotary scale
US20030047009A1 (en) * 2002-08-26 2003-03-13 Webb Walter L. Digital callipers
EP1697695A1 (en) * 2003-12-24 2006-09-06 3M Innovative Properties Company Device and method for measuring the profile of a surface
GB0413711D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale and readhead apparatus
GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
JP4477442B2 (ja) * 2004-07-20 2010-06-09 株式会社ミツトヨ リニアスケール固定装置及び固定方法
DE102004035299B4 (de) 2004-07-21 2015-07-09 Dr. Johannes Heidenhain Gmbh Montagehilfe einer Positionsmesseinrichtung
DE102005055513B4 (de) 2005-11-18 2021-05-06 Dr. Johannes Heidenhain Gmbh Vorrichtung mit einem Trägerkörper und einem Maßstab
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4259144A (en) 1978-10-10 1981-03-31 The Boeing Company Bi-directional tape applicator head and method
US6049992A (en) 1997-01-08 2000-04-18 Johannes Heidenhain Gmbh Method and device for directed mounting of a measurement strip

Also Published As

Publication number Publication date
US8141265B2 (en) 2012-03-27
GB0811076D0 (en) 2008-07-23
EP2294363A2 (en) 2011-03-16
ES2727448T3 (es) 2019-10-16
EP2294363B1 (en) 2015-02-25
JP5755299B2 (ja) 2015-07-29
WO2010004248A3 (en) 2010-08-12
GB0816225D0 (en) 2008-10-15
JP2011524534A (ja) 2011-09-01
JP2013257341A (ja) 2013-12-26
EP2894438B1 (en) 2019-02-20
WO2010004248A2 (en) 2010-01-14
JP5475759B2 (ja) 2014-04-16
CN102057256A (zh) 2011-05-11
CN102057256B (zh) 2013-03-27
US20110162223A1 (en) 2011-07-07
KR20110033204A (ko) 2011-03-30
EP2894438A1 (en) 2015-07-15

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