JP5475759B2 - スケールトラック - Google Patents

スケールトラック Download PDF

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Publication number
JP5475759B2
JP5475759B2 JP2011514115A JP2011514115A JP5475759B2 JP 5475759 B2 JP5475759 B2 JP 5475759B2 JP 2011514115 A JP2011514115 A JP 2011514115A JP 2011514115 A JP2011514115 A JP 2011514115A JP 5475759 B2 JP5475759 B2 JP 5475759B2
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JP
Japan
Prior art keywords
track
measurement scale
scale
spacer
strips
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Active
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JP2011514115A
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English (en)
Japanese (ja)
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JP2011524534A5 (https=
JP2011524534A (ja
Inventor
デービッド スコット エリン アレクサンダー
アンドリュー ヒーウッド ウェズリー
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Renishaw PLC
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Renishaw PLC
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Publication date
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Publication of JP2011524534A5 publication Critical patent/JP2011524534A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/004—Scales; Graduations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • Lubricants (AREA)
  • Prostheses (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP2011514115A 2008-06-17 2009-06-11 スケールトラック Active JP5475759B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GBGB0811076.9A GB0811076D0 (en) 2008-06-17 2008-06-17 Scale track
GB0811076.9 2008-06-17
GB0816225.7 2008-09-05
GBGB0816225.7A GB0816225D0 (en) 2008-06-17 2008-09-05 Scale track
PCT/GB2009/001468 WO2010004248A2 (en) 2008-06-17 2009-06-11 Scale track

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013185563A Division JP5755299B2 (ja) 2008-06-17 2013-09-06 スケールトラック

Publications (3)

Publication Number Publication Date
JP2011524534A JP2011524534A (ja) 2011-09-01
JP2011524534A5 JP2011524534A5 (https=) 2012-07-26
JP5475759B2 true JP5475759B2 (ja) 2014-04-16

Family

ID=39672410

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011514115A Active JP5475759B2 (ja) 2008-06-17 2009-06-11 スケールトラック
JP2013185563A Active JP5755299B2 (ja) 2008-06-17 2013-09-06 スケールトラック

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2013185563A Active JP5755299B2 (ja) 2008-06-17 2013-09-06 スケールトラック

Country Status (8)

Country Link
US (1) US8141265B2 (https=)
EP (2) EP2294363B1 (https=)
JP (2) JP5475759B2 (https=)
KR (1) KR101550483B1 (https=)
CN (1) CN102057256B (https=)
ES (1) ES2727448T3 (https=)
GB (2) GB0811076D0 (https=)
WO (1) WO2010004248A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011081638A1 (de) * 2011-08-26 2013-02-28 Zf Friedrichshafen Ag Gehäuseteil für ein Gehäuse eines Sensors für ein Fahrzeuggetriebe, Gehäuse für einen Sensor für ein Fahrzeuggetriebe, Sensor für ein Fahrzeuggetriebe und Verfahren zum Herstellen eines Sensors für ein Fahrzeuggetriebe
DE102011081637A1 (de) * 2011-08-26 2013-02-28 Zf Friedrichshafen Ag Führungsabschnitt eines Gehäuses für einen Sensor, Gehäuse für einen Sensor sowie Sensor, insbesondere für ein Fahrzeuggetriebe und Verfahren zum Herstellen eines Gehäuses für einen Sensor, insbesondere für ein Fahrzeuggetriebe
JP6436674B2 (ja) * 2014-07-28 2018-12-12 三菱電機株式会社 光学式エンコーダおよび光学式エンコーダの製造方法
TWI648520B (zh) 2016-10-21 2019-01-21 財團法人工業技術研究院 光學編碼裝置
EP3477263B1 (de) * 2017-10-26 2019-12-11 Dr. Johannes Heidenhain GmbH Anordnung mit einem an einem träger befestigten massstab
JP7148262B2 (ja) * 2018-04-19 2022-10-05 株式会社ミツトヨ リニアエンコーダ
CN108709478A (zh) * 2018-07-25 2018-10-26 宁夏国励汽车动力科技有限公司 标尺导轨
TWI680648B (zh) 2018-12-26 2019-12-21 財團法人工業技術研究院 編碼盤、檢光器、光學絕對式旋轉編碼器及編碼值輸出、偵錯與除錯的方法
TWI716246B (zh) 2019-12-31 2021-01-11 財團法人工業技術研究院 光學編碼器
KR102489221B1 (ko) * 2020-12-21 2023-01-17 세메스 주식회사 위치 측정기 및 이를 포함하는 기판 처리 장치
GB202211615D0 (en) 2022-08-09 2022-09-21 Renishaw Plc Scale

Family Cites Families (47)

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US3522568A (en) 1969-03-13 1970-08-04 Inductosyn Corp Tape scale for position measuring transformer
DE2712421C2 (de) 1977-03-22 1982-06-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßeinrichtung
NL7711811A (en) * 1977-10-27 1979-05-02 Engel Stevens Ceramic tile laying and aligning and - is of plastics with side oblong projections placed to prevent tile movement after positioning
JPH0110561Y2 (https=) * 1978-08-15 1989-03-27
US4259144A (en) 1978-10-10 1981-03-31 The Boeing Company Bi-directional tape applicator head and method
DE3008384A1 (de) * 1980-03-05 1981-09-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
GB2107466B (en) 1981-10-13 1985-05-01 Ferranti Ltd Measuring apparatus
JPS58174806A (ja) 1982-04-07 1983-10-13 Mitsutoyo Mfg Co Ltd 直線型変位測定機
JPH06100479B2 (ja) 1982-09-01 1994-12-12 ローズマウント エンジニアリング コムパニー リミテッド 位置測定装置
DE3315214A1 (de) 1983-04-27 1984-10-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder winkelmesseinrichtung
DE3319600A1 (de) 1983-05-30 1984-12-06 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengenmesseinrichtung
US4569137A (en) 1983-06-07 1986-02-11 Mitutoyo Mfg. Co., Ltd. Linear scale type displacement measuring device and main scale attaching method thereof
DE3334398C1 (de) 1983-09-23 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
JPS60161524A (ja) 1984-02-02 1985-08-23 Mitsutoyo Mfg Co Ltd 光学式変位検出装置
US4684257A (en) 1984-02-02 1987-08-04 Mitutoyo Mfg. Measuring instrument
AT379449B (de) 1984-07-03 1986-01-10 R S F Elektronik Ohg Rechtsfor Laengenmesseinrichtung
GB8432574D0 (en) 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
GB8616240D0 (en) * 1986-07-03 1986-08-13 Renishaw Plc Opto-electronic scale reading apparatus
DE3635511A1 (de) * 1986-10-18 1988-04-28 Zeiss Carl Fa Halterung fuer mass- und formverkoerperung
GB8819723D0 (en) * 1988-08-19 1988-09-21 Renishaw Plc Metrological scale
GB8820777D0 (en) 1988-09-02 1988-10-05 Renishaw Plc Tape scale applicator
US5172250A (en) 1989-02-28 1992-12-15 Sony Magnescale, Inc. Hologram scale having moisture resistance
DE3929629A1 (de) 1989-09-06 1991-03-07 Zeiss Carl Fa Laengen- oder winkelmesseinrichtung
ATE161327T1 (de) 1994-05-06 1998-01-15 Heidenhain Gmbh Dr Johannes Temperatur-kompensierte positionsmesseinrichtung
DE4438079A1 (de) 1994-10-25 1996-05-02 Heidenhain Gmbh Dr Johannes Führung
DE19526517C2 (de) 1995-07-20 2000-08-24 Zeiss Carl Jena Gmbh Anordnung zur Befestigung einer Längenmeßeinrichtung
DE19526518C1 (de) 1995-07-20 1996-12-12 Zeiss Carl Jena Gmbh Anordnung zur formschlüssigen Aufnahme eines Maßstabs
DE19611983C1 (de) 1996-03-26 1997-07-31 Zeiss Carl Jena Gmbh Bandförmiges, elastisch biegbares Maßband für Längen- oder Winkelmeßeinrichtungen
US5973494A (en) 1996-05-13 1999-10-26 Mitutoyo Corporation Electronic caliper using a self-contained, low power inductive position transducer
DE19700367C2 (de) 1997-01-08 1999-07-01 Zeiss Carl Jena Gmbh Verfahren und Montagevorrichtung zum gerichteten Anbringen eines Maßbandes
DE19724732A1 (de) * 1997-06-12 1998-12-17 Heidenhain Gmbh Dr Johannes Längenmeßsystem mit modular aufgebautem Maßstab
DE19738023B4 (de) * 1997-08-30 2007-04-12 Dr. Johannes Heidenhain Gmbh Vorrichtung und Verfahren zur exakten Justage von Teilungsträgern
DE19802036B4 (de) * 1998-01-21 2006-11-30 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur mechanischen Justage von Teilungsträgern
US6772531B1 (en) 1999-11-30 2004-08-10 Renishaw Plc Measurement apparatus including a track for a measurement scale and apparatus for tensioning the scale
JP3668111B2 (ja) * 2000-09-06 2005-07-06 株式会社ミツトヨ ユニット型リニアスケール
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
US20030226271A1 (en) 2002-06-05 2003-12-11 Cordell Victor David Tile spacer
DE10229885B4 (de) 2002-07-03 2010-06-24 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zum Anbringen eines Maßstabs oder Maßstabträgers oder einer Maßstabführung
GB0216487D0 (en) * 2002-07-16 2002-08-21 Renishaw Plc A rotary scale
US20030047009A1 (en) * 2002-08-26 2003-03-13 Webb Walter L. Digital callipers
EP1697695A1 (en) * 2003-12-24 2006-09-06 3M Innovative Properties Company Device and method for measuring the profile of a surface
GB0413711D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale and readhead apparatus
GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
JP4477442B2 (ja) * 2004-07-20 2010-06-09 株式会社ミツトヨ リニアスケール固定装置及び固定方法
DE102004035299B4 (de) 2004-07-21 2015-07-09 Dr. Johannes Heidenhain Gmbh Montagehilfe einer Positionsmesseinrichtung
DE102005055513B4 (de) 2005-11-18 2021-05-06 Dr. Johannes Heidenhain Gmbh Vorrichtung mit einem Trägerkörper und einem Maßstab
US7971487B2 (en) * 2008-05-02 2011-07-05 Carlen Controls, Inc. Linear position transducer with wireless read head

Also Published As

Publication number Publication date
US8141265B2 (en) 2012-03-27
GB0811076D0 (en) 2008-07-23
EP2294363A2 (en) 2011-03-16
ES2727448T3 (es) 2019-10-16
EP2294363B1 (en) 2015-02-25
JP5755299B2 (ja) 2015-07-29
WO2010004248A3 (en) 2010-08-12
GB0816225D0 (en) 2008-10-15
JP2011524534A (ja) 2011-09-01
KR101550483B1 (ko) 2015-09-04
JP2013257341A (ja) 2013-12-26
EP2894438B1 (en) 2019-02-20
WO2010004248A2 (en) 2010-01-14
CN102057256A (zh) 2011-05-11
CN102057256B (zh) 2013-03-27
US20110162223A1 (en) 2011-07-07
KR20110033204A (ko) 2011-03-30
EP2894438A1 (en) 2015-07-15

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